Target material mounting device and coating equipment

Abstract

The invention relates to the technical field of semiconductors or photovoltaics, in particular to a target material mounting device and coating equipment, and aims to solve the problems of long time consumption, influence on production takt and low production efficiency of a target material replacement process of existing coating equipment. A plurality of target material mounting devices are respectively arranged in a first opening of coating equipment, in the target material mounting devices, a first sealing piece is arranged on one side, facing a process cavity, of a bearing piece, so that after a shielding piece shields a fifth opening, a sealed space is formed in the process cavity, and a target material is sealed in the sealed space; the target material is replaced by pumping and deflating the sealed space, the coating equipment does not need to be subjected to the steps of whole machine shutdown, cooling, vacuum breaking of a process chamber and the like in the target material replacement process, and when the target material corresponding to at least one target material mounting device needs to be replaced, the target material corresponding to at least another target material mounting device can continue to be subjected to the coating process; therefore, the production time delayed by replacing the target material is shortened, the production takt can be accelerated, and the production efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic technology, and in particular to a target material installation device and a coating device. Background Art

[0002] In the semiconductor and photovoltaic industries, coating equipment is used to coat the surface of the parts to be coated in order to improve the material properties of the parts to be coated, improve the surface characteristics of the parts to be coated, and achieve specific functions. During the coating process, the target material set in the process chamber of the coating equipment is a key consumable and needs to be replaced frequently.

[0003] Since the coating process often needs to be carried out under vacuum conditions, existing coating equipment usually needs to go through processes such as whole machine shutdown, cooling, and process chamber vacuum breaking before the chamber door can be opened and the target material can be taken out for replacement. The replacement process is time-consuming and affects the production rhythm, and the production efficiency and production utilization rate are low. Summary of the invention

[0004] In view of this, the embodiments of the present application provide a target material installation device and a coating device to solve the problem that the process of replacing the target material of the existing coating equipment is time-consuming, affects the production rhythm, and has low production efficiency and production utilization rate.

[0005] In a first aspect, an embodiment of the present application provides a target material installation device, which is applied to a coating device. The coating device includes a process chamber, the process chamber has a process chamber and a plurality of first openings, the first openings can connect the process chamber with the outside, and the target material installation device includes: a carrier, having a second opening, the carrier is used to be arranged on the process chamber, and the second opening is connected with the first opening; a mounting member, detachably arranged on the carrier, the first side of the mounting member faces the process chamber, and is used to set a target material that can pass through the second opening; and a first sealing member, arranged on a side of the carrier facing the process chamber, the first sealing member includes a second accommodating space, the second accommodating space has a fourth opening on a side close to the carrier, and has a fifth opening on a side close to the process chamber, the second accommodating space is connected with the first opening and the second opening through the fourth opening, and the fifth opening is configured to be opened or blocked by a shielding member; wherein the shielding member is arranged on the target material installation device, or the shielding member is arranged on the process chamber.

[0006] In combination with the first aspect, in certain implementations of the first aspect, the shielding member is disposed in the process chamber; the first sealing member is slidably connected to the carrier, and the first sealing member can slide along the first direction or in the opposite direction of the first direction; the target material mounting device also includes: a driving assembly, configured to drive the first sealing member to slide along the first direction or in the opposite direction of the first direction.

[0007] In combination with the first aspect, in some implementations of the first aspect, the target mounting device has a first through hole, and the first through hole is connected to the second accommodating space.

[0008] In combination with the first aspect, in certain implementations of the first aspect, the carrier has a second through hole; the driving component is disposed on the carrier and sealed with the carrier, the first end of the driving component extends into the second through hole and is connected with the first sealing component, and is configured to drive the first sealing component to slide in the first direction or in the opposite direction of the first direction.

[0009] In combination with the first aspect, in certain implementations of the first aspect, the first seal has at least one threaded hole; the drive assembly includes: at least one connecting shaft, which is sealed and connected to the carrier and seals the second through hole; at least one screw, the first end of the screw is connected to the first end of the connecting shaft, and the second end of the screw is threadedly connected to the first seal through the threaded hole; at least one driving source is connected to the second end of the connecting shaft, and is configured to drive the connecting shaft to rotate around a first rotation direction or a second rotation direction, so as to drive the screw to rotate around the first rotation direction, causing the first seal to slide along the first direction, or to drive the screw to rotate around the second rotation direction, causing the first seal to slide in the opposite direction of the first direction; the first rotation direction is opposite to the second rotation direction.

[0010] In combination with the first aspect, in certain implementations of the first aspect, the first side wall of the first sealing component is slidably connected to the second side wall of the supporting component, and the first side wall and the second side wall are parallel to the first direction.

[0011] In combination with the first aspect, in certain implementations of the first aspect, the target mounting device further includes: at least one second sealing member disposed between the first side wall and the second side wall.

[0012] In combination with the first aspect, in certain implementations of the first aspect, the mounting member includes: a mounting body, the mounting body being detachably disposed on the carrier, and the mounting body being capable of sealing the second opening; the mounting body and the carrier being capable of sealing the first opening; and at least one mounting portion being disposed on a side of the mounting body close to the second accommodating space and configured to be detachably connected to the target material.

[0013] In combination with the first aspect, in certain implementations of the first aspect, the mounting member further includes: a reinforcing rib, which is disposed on a side of the mounting body away from the second accommodating space and has a plurality of lifting holes that penetrate the reinforcing rib along a width direction of the reinforcing rib.

[0014] In combination with the first aspect, in certain implementations of the first aspect, the supporting member has a limiting groove, and the mounting member is detachably disposed in the limiting groove; wherein the second opening is disposed at the bottom of the limiting groove.

[0015] In combination with the first aspect, in certain implementations of the first aspect, the target material mounting device further includes: at least one third sealing member, disposed between the limiting groove and the mounting member.

[0016] In the second aspect, an embodiment of the present application provides a coating device, comprising: a process chamber, having a process chamber and multiple first openings, the first openings being able to connect the process chamber with the outside world; multiple target material mounting devices mentioned in any one of the first aspects, which are sealed and connected to the process chamber, and can respectively seal the first openings for mounting targets; at least one shielding member, which is arranged on the target material mounting device or the process chamber, and cooperates with the multiple target material mounting devices to replace the target.

[0017] In the target material installation device provided in this embodiment, multiple target material installation devices can be arranged at multiple first openings of the coating equipment, the carrier carries the installation member, and the installation member is detachably arranged on the carrier to replace the target material arranged on the installation member, and the first sealing member is arranged on the side of the carrier facing the process chamber, so that after the shielding member covers the fifth opening, a sealed space is formed in the process chamber, and the target material is sealed in the sealed space. The replacement of the target material is achieved by exhausting gas from the sealed space, so that during the process of target material replacement, the coating equipment does not need to go through steps such as shutting down the whole machine, cooling, and breaking the vacuum of the process chamber. When the target material corresponding to at least one target material installation device needs to be replaced, the target material corresponding to at least another target material installation device can continue the coating process, thereby shortening the production time delayed by replacing the target material. The steps are simple, and the production rhythm can be accelerated, and the production efficiency and production utilization rate can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 Shown is a schematic structural diagram of a target material installation device provided in one embodiment of the present application.

[0020] Figure 2 Shown is an exploded view of a target mounting device provided in one embodiment of the present application.

[0021] Figure 3 The present invention provides an embodiment of the present invention. Figure 1 The target mounting device shown is a schematic cross-sectional structural diagram along CC.

[0022] Figure 4 The present invention provides an embodiment of the present invention. Figure 1The target material mounting device shown is a schematic cross-sectional structure diagram along DD.

[0023] Figure 5 Shown is a schematic structural diagram of a mounting component provided in one embodiment of the present application.

[0024] Figure 6 Shown is a schematic structural diagram of a carrier provided in one embodiment of the present application.

[0025] Figure 7 Shown is a schematic structural diagram of a first sealing member provided in an embodiment of the present application.

[0026] Figure 8 The present invention provides an embodiment of the present invention. Figure 7 The structure schematic diagram of the first sealing member is shown taken along line EE.

[0027] Fig. 9 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present application.

[0028] Fig.10 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present application.

[0029] Fig.11 Shown is a schematic structural diagram of a coating device provided in yet another embodiment of the present application.

[0030] Fig.12 Shown is a schematic structural diagram of a target material installation device provided in another embodiment of the present application.

[0031] Reference numerals:

[0032] 1. Coating equipment; 10. Target material installation device; 11. Carrier; 110. Second opening; 111. First accommodating space; 112. Third opening; 113. First end of carrier; 114. Second end of carrier; 115. First sink; 116. Second through hole; 117. Second side wall; 118. Limiting groove; 12. Mounting member; 120. First side of mounting member; 121. Ventilation assembly; 1210. Ventilation hole; 122. Mounting body; 123. Mounting part; 124. Reinforcement rib; 1240. Lifting hole; 125. Second side of mounting member; 13. First sealing member; 130. Fourth opening; 131. Second accommodating space; 132. Fifth opening; 133. Second end of first sealing member; 134. First sealing member first end; 135, threaded hole; 136, first side wall; 137, second sink; 14, drive assembly; 140, first end of drive assembly; 141, second end of drive assembly; 142, connecting shaft; 1420, second end of connecting shaft; 143, screw; 1430, first end of screw; 1431, second end of screw; 144, drive source; 145, sealed bearing; 15, first through hole; 16, second seal; 17, third seal; 18, fourth seal; 2, target material; 20, process chamber; 21, process chamber; 22, first opening; 30, shielding member; 300, shielding portion; 301, hollow portion; 40, transport assembly; 50, carrier; 60, rotation drive assembly; A, first position; B, second position. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0034] Figure 1 Shown is a schematic structural diagram of a target material installation device provided in one embodiment of the present application. Figure 2 Shown is an exploded view of a target mounting device provided in one embodiment of the present application. Figure 3 The present invention provides an embodiment of the present invention. Figure 1 The target mounting device shown is a schematic cross-sectional structural diagram along CC. Figure 4 The present invention provides an embodiment of the present invention. Figure 1 The target material mounting device shown is a schematic cross-sectional structure diagram along DD. Figure 5 Shown is a schematic structural diagram of a mounting component provided in one embodiment of the present application. Figure 6 Shown is a schematic structural diagram of a carrier provided in one embodiment of the present application. Figure 7Shown is a schematic structural diagram of a first sealing member provided in an embodiment of the present application.

[0035] Figure 8 The present invention provides an embodiment of the present invention. Figure 7 The structure schematic diagram of the first sealing member is shown taken along line EE. Fig. 9 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present application. Fig.10 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present application. Fig.11 Shown is a schematic structural diagram of a coating device provided in yet another embodiment of the present application. Fig.12 Shown is a schematic structural diagram of a target material installation device provided in another embodiment of the present application.

[0036] like Figures 1 to 12 As shown, the target mounting device 10 is applied to a coating device 1. The coating device 1 includes a process chamber 20. The process chamber 20 has a process chamber 21 and a plurality of first openings 22. The first openings 22 can connect the process chamber 21 with the outside.

[0037] The target mounting device 10 comprises: a carrier 11 , a mounting member 12 and a first sealing member 13 .

[0038] The carrier 11 has a second opening 110 . The carrier 11 is used to be disposed on the process chamber 20 , and the second opening 110 is connected to the first opening 22 .

[0039] Exemplarily, the carrier 11 has a second opening 110, a first receiving space 111 and a third opening 112. The second opening 110 can connect the outside with the first receiving space 111. The third opening 112 is configured to connect the first receiving space 111 with the process chamber 21.

[0040] The mounting member 12 is detachably disposed on the carrier 11. The first side 120 of the mounting member faces the process chamber 20 and is used to set the target material 2 that can pass through the second opening 110. Exemplarily, the mounting member 12 can seal the second opening 110. Exemplarily, a sealing ring can be provided between the mounting member 12 and the carrier 11 for sealing.

[0041] The first sealing member 13 is disposed on a side of the carrier 11 facing the process chamber 20. The first sealing member 13 includes a second accommodating space 131. The second accommodating space 131 has a fourth opening 130 on a side close to the carrier 11, and has a fifth opening 132 on a side close to the process chamber 20. The second accommodating space 131 is connected to the first opening 22 and the second opening 110 through the fourth opening 130. The fifth opening 132 is configured to be opened or blocked by a shielding member 30.

[0042] Exemplarily, the fourth opening 130 connects the first accommodation space 111 and the second accommodation space 131. The fifth opening 132 is configured to connect the second accommodation space 131 and the process chamber 21. The first side 120 of the mounting member extends into the second accommodation space 131 through the second opening 110, the first accommodation space 111 and the fourth opening 130 in sequence.

[0043] The shielding member 30 is disposed on the target mounting device 10. The shielding member 30 may also be disposed on the process chamber 20. Exemplarily, the target mounting device 10 may further include a shielding member 30.

[0044] Exemplarily, the target mounting device 10 can seal the first opening 22 and is sealed to the process chamber 20. Exemplarily, the mounting member 12 or the carrier 11 and the mounting member 12 can seal the first opening 22. Exemplarily, a sealing ring can be provided between the target mounting device 10 and the process chamber 20 for sealing.

[0045] Exemplarily, the coating device 1 can be any device capable of coating an object. Exemplarily, the coating device 1 can include a vapor deposition device. For example, the coating device 1 can include a physical vapor deposition (PVD) device. For example, the coating device 1 can include a magnetron sputtering PVD device. Exemplarily, the coating device 1 is used to coat parts or raw materials that form photovoltaic modules. For example, the coating device 1 can be used to coat silicon wafers. The coating device 1 can also be used to prepare a perovskite layer, an electron transport layer, a hole transport layer, an encapsulation layer, and a transparent electrode of a perovskite photovoltaic cell. The coating device 1 can also be used to prepare a laminated battery.

[0046] Specifically, the process chamber 20 encloses a process chamber 21. Exemplarily, the plurality of first openings 22 are configured to be located above the part to be coated, so that the target material 2 is located above the part to be coated. After the mounting member 12 is removed from the process chamber 20, the first openings 22 communicate with the outside and the first accommodation space 111.

[0047] Specifically, the target mounting device 10 may be disposed on the process chamber 20 to mount and support the target 2 .

[0048] Exemplarily, the carrier 11 and the process chamber 20 may be fixedly connected or detachably connected. Exemplarily, the carrier 11 may include a carrier frame. The carrier 11 may include a rectangular frame or a circular frame. The shape of the carrier 11 may be set according to the shape of the first opening 22 and the shape of the mounting member 12. Exemplarily, the first accommodating space 111 can accommodate at least part of the mounting member 12, and may also accommodate at least part of the first sealing member 13. Exemplarily, the shape and size of the second opening 110 may be set according to the shape and size of the mounting member 12. The shape and size of the third opening 112 may be set according to the shape and size of the first sealing member 13.

[0049] Exemplarily, after the mounting member 12 is disposed on the carrier 11, the mounting member 12 is sealed and connected to the carrier 11 to seal the second opening 110. After the mounting member 12 is sealed and connected to the carrier 11, the second opening 110 is sealed, the carrier 11 is sealed and connected to the process chamber 20, and the mounting member 12 and the carrier 11 seal the first opening 22.

[0050] Exemplarily, the first side 120 of the mounting member may be a side of the mounting member 12 that can face the process chamber 21, or a side that faces the first accommodation space 111 or the second accommodation space 131. Exemplarily, the mounting member 12 is detachably disposed on the carrier 11. When the target material 2 on the mounting member 12 needs to be replaced, the mounting member 12 can be removed from the carrier 11. Exemplarily, the mounting member 12 can be detachably connected to the target material 2 so as to replace the target material 2 on the mounting member 12.

[0051] Exemplarily, the first seal 13 may be disposed in the process chamber 21. Exemplarily, the first seal 13 may include a frame-like structure. Exemplarily, the first seal 13 may include a rectangular frame or a circular frame. The shape and size of the first seal 13 may be set according to the shape and size of the carrier 11. Exemplarily, the carrier 11 and the first seal 13 may be integrally formed or detachably connected.

[0052] Exemplarily, the mounting member 12 is detachably disposed at the first end 113 of the carrier. The sealing member 13 is sealedly connected to the second end 114 of the carrier. Exemplarily, the first end 113 of the carrier has a second opening 110. The second end 114 of the carrier has a third opening 112. Exemplarily, the first end 134 of the first sealing member is sealedly connected to the carrier 11, such as being sealedly connected to the second end 114 of the carrier. The first end 134 of the first sealing member has a fourth opening 130. The second end 133 of the first sealing member has a fifth opening 132.

[0053] Exemplarily, the side of the carrier 11 that can face the first opening 22 or the process chamber 21 has a first sink 115. The second opening 110 is arranged at the bottom of the first sink 115. The notch of the first sink 115 forms a third opening 112. The first sink 115 can be used to form a first accommodating space 111. Exemplarily, the orthographic projection of the first sealing member 13 at the bottom of the first sink 115 can be located inside the first sink 115 or outside the first sink 115.

[0054] Exemplarily, the first sealing member 13 has a second groove 137 on one side thereof that can face the process chamber 21. The fourth opening 130 is disposed at the bottom of the second groove 137. The notch of the second groove 137 forms a fifth opening 132. The second groove 137 forms a second accommodation space 131.

[0055] In some embodiments, the shielding member 30 may be disposed on the target mounting device 10. For example, Fig.12 As shown, the target mounting device 10 further includes a shielding member 30 and a rotation drive assembly 60. The shielding member 30 is disposed at one end of the first sealing member 13 away from the carrier 11, and the shielding member 30 is rotatably connected to one end of the first sealing member 13 away from the carrier 11. The rotation drive assembly 60 is configured to drive the shielding member 30 to rotate back and forth. The shielding member 30 can be rotated to open or cover the fifth opening 132.

[0056] In some embodiments, the shielding member 30 may be disposed in the process chamber 20. Exemplarily, the shielding member 30 is disposed on a side of the first sealing member 13 in the process chamber 21 away from the carrier 11. The shielding member 30 moves to open or shield the fifth opening 132.

[0057] Exemplarily, the shielding member 30 can shield and seal the fifth opening 132. Exemplarily, at least one shielding member 30 can open the fifth opening 132 on at least one target mounting device 10, so that the target 2 corresponding to the fifth opening 132 can be coated on the object to be coated, and shield the fifth opening 132 of at least another target mounting device 10.

[0058] Exemplarily, for the same target installation device 10, the target installation device 10 seals the first opening 22, and the shielding member 30 shields and seals the fifth opening 132. At this time, the used target 2 is located in the sealed space. For example, the first accommodating space 111 and the second accommodating space 131 form a sealed space. The air can be released into the sealed space to make the air pressure in the sealed space equal to the external air pressure. After the air pressure in the sealed space is equal to the external air pressure, the mounting member 12 is removed from the carrier 11 to replace the used target 2 on the target installation device 10.

[0059] Furthermore, during the process of replacing the target material 2, the shielding member 30 still seals the fifth opening 132. Exemplarily, after the target material installation device 10 is replaced with an unused target material 2, the mounting member 12 is detachably disposed on the carrier 11, and the mounting member 12 seals the second opening 110, so that the first accommodating space 111 and the second accommodating space 131 form a sealed space, and then the sealed space is evacuated so that the air pressure in the sealed space is equal to the air pressure in the process chamber 21. When the unused target material 2 of the target material installation device 10 is required to coat the part to be coated, the shielding member 30 opens the fifth opening 132 so that the unused target material 2 can be coated on the part to be coated.

[0060] For example, Figures 9 to 11 As shown, a plurality of target mounting devices 10 can be applied to the coating equipment 1. The plurality of target mounting devices 10 can seal the plurality of first openings 22 respectively. The target mounting devices 10 can be arranged one-to-one corresponding to the first openings 22. The target 2 corresponding to each target mounting device 10 can be replaced with an unused target 2 in the above manner, and the replaced unused target 2 can be put into use. Exemplarily, when the target 2 corresponding to at least one target mounting device 10 needs to be replaced, the target 2 corresponding to at least another target mounting device 10 can continue the coating process, so that during the process of replacing the target 2 corresponding to at least one target mounting device 10, the target 2 corresponding to at least another target mounting device 10 can continue the coating process, thereby shortening the production time delayed by replacing the target 2.

[0061] In the target material installation device 10 provided in this embodiment, multiple target material installation devices 10 can be arranged at multiple first openings 22 of the coating equipment 1, the carrier 11 carries the mounting member 12, and the mounting member 12 is detachably arranged on the carrier 11 to replace the target material 2 arranged on the mounting member 12, and the first sealing member 13 is arranged on the side of the carrier 11 facing the process chamber 20, so that after the shielding member 30 blocks the fifth opening 132, a sealed space is formed in the process chamber 21, and the target material 2 is sealed in the sealed space. The replacement of the target material 2 is achieved by exhausting gas from the sealed space, so that during the process of replacing the target material 2, the coating equipment 1 does not need to go through the steps of shutting down the whole machine, cooling, breaking the vacuum of the process chamber, etc. When the target material 2 corresponding to at least one target material installation device 10 needs to be replaced, the target material 2 corresponding to at least another target material installation device 10 can continue the coating process, thereby shortening the production time delayed by replacing the target material 2. The steps are simple, and the production rhythm can be accelerated, and the production efficiency and production utilization rate can be improved.

[0062] In some embodiments, the shielding member 30 is disposed in the process chamber 20. Exemplarily, the shielding member 30 is disposed in the process chamber 21. The first sealing member 13 is slidably connected to the carrier 11. The first sealing member 13 can slide along the first direction or the opposite direction of the first direction. The driving component 14 is configured to drive the first sealing member 13 to slide along the first direction or the opposite direction of the first direction.

[0063] Exemplarily, the drive assembly 14 may include one or more of the following drive forms: a gear set, a sprocket chain, a screw guide, a cylinder, a motor, and a crank slider. This embodiment does not specifically limit the structure of the drive assembly 14. Exemplarily, the drive assembly 14 may be connected to the first seal 13 to drive the first seal 13 to slide.

[0064] Exemplarily, the driving component 14 can drive the first sealing member 13 to slide along the first direction, so that the second end 133 of the first sealing member reaches the first position A, so that the shielding member 30 seals the fifth opening 132, and forms a sealed space in the process chamber 21. For example, the first accommodating space 111 and the second accommodating space 131 form a sealed space. Exemplarily, the driving component 14 can also drive the first sealing member 13 to slide in the opposite direction of the first direction, so that the second end 133 of the first sealing member reaches the second position B, so that the second end 133 of the first sealing member is away from the shielding member 30. The second end 133 of the first sealing member is the end of the first sealing member 13 away from the carrier 11.

[0065] Exemplarily, the first direction may be a vertical direction. Exemplarily, the first sealing member 13 is sealingly connected to the second end 114 of the bearing member, and is slidably connected to the second end 114 of the bearing member.

[0066] Specifically, Figures 9 to 11 As shown, for the same target material installation device 10, after the driving assembly 14 drives the first sealing member 13 to slide along the first direction, the second end 133 of the first sealing member reaches the first position A, so that the shielding member 30 seals the fifth opening 132. At this time, the first accommodating space 111 and the second accommodating space 131 form a sealed space. The air can be released into the sealed space to make the air pressure in the sealed space equal to the external air pressure. After the air pressure in the sealed space is equal to the external air pressure, the mounting member 12 is removed from the carrier 11 to replace the used target material 2 on the target material installation device 10.

[0067] Exemplarily, after the target mounting device 10 is replaced with an unused target 2, the mounting member 12 is detachably disposed on the carrier 11, and the mounting member 12 seals the second opening 110, so that the first accommodating space 111 and the second accommodating space 131 form a sealed space, and then the sealed space is evacuated to make the air pressure in the sealed space equal to the air pressure in the process chamber 21. When the unused target 2 of the target mounting device 10 is required to coat the part to be coated, the driving assembly 14 drives the first sealing member 13 to slide in the opposite direction of the first direction, so that the second end 133 of the first sealing member reaches the second position B, so that the second end 133 of the first sealing member is away from the shielding member 30, so that the shielding member 30 opens the fifth opening 132, so that the unused target 2 can be coated on the part to be coated.

[0068] The target mounting device 10 provided in this embodiment also includes a driving component 14. The driving component 14 can drive the first seal 13 to slide along the first direction, so that the second end 133 of the first seal is sealed by the shielding member 30 that blocks the fifth opening 132, which is beneficial to simplify the movement of the shielding member 30. The driving component 14 can also drive the first seal 13 to slide in the opposite direction of the first direction, so that the second end 133 of the first seal is away from the shielding member 30 arranged in the process chamber 20, so that the shielding member 30 moves, thereby opening the fifth opening 132, so that the target 2 can be coated on the part to be coated, so as to facilitate the use of the target 2.

[0069] In some embodiments, the target mounting device 10 has a first through hole 15. The first through hole 15 is connected to the first accommodation space 111, and can also be connected to the second accommodation space 131. The first through hole 15 is configured to evacuate or deflate the sealed space.

[0070] For example, Figure 3 As shown, the carrier 11 may have a first through hole 15. One end of the first through hole 15 is communicated with the first accommodation space 111. Exemplarily, the first sealing member 13 has a first through hole 15, and one end of the first through hole 15 is communicated with the second accommodation space 131.

[0071] Exemplarily, the coating device 1 further includes a vacuum pump assembly (not shown in the figure). The vacuum pump assembly is configured to evacuate or deflate the sealed space through the first through hole 15. The vacuum pump assembly may include a vacuum pump and a first ventilation line. The vacuum pump is connected to the other end of the first through hole 15 through the first ventilation line.

[0072] Exemplarily, the target mounting device 10 also includes an electrical control component (not shown in the figure) and a ventilation component 121. The electrical control component and the ventilation component 121 are arranged on the mounting member 12. The electrical control component can be used for controlling and monitoring signals, power, current, voltage, airflow, etc. during the coating process. The electrical control component can serve as the cathode of the target 2. The ventilation component 121 can be used to input process gas into the process chamber 21 during the coating process so that the target 2 can fully obtain a uniform glow discharge. Exemplarily, the coating equipment 1 also includes a gas equalizing component (not shown in the figure). The gas equalizing component is connected to the ventilation component 121 and is configured to equalize the process gas introduced into the ventilation component 121. The gas equalizing component can be detachably connected to the mounting member 12.

[0073] Exemplarily, the ventilation component 121 has a ventilation hole 1210 for ventilation into the process chamber. The ventilation hole 1210 forms the first through hole 15. In this way, the ventilation hole 1210 can be used to extract and release gas from the sealed space, and additional through holes can be avoided.

[0074] The target material mounting device 10 provided in this embodiment has a first through hole 15, which is connected to the first accommodating space 111 and / or the second accommodating space 131 and is used to evacuate or deflate the sealed space. This can avoid providing a through hole for evacuating and defusing the sealed space on the shielding member 30, which is beneficial to simplifying the design of the shielding member 30, thereby simplifying the structure of the coating equipment 1.

[0075] In some embodiments, Figure 3 , Figure 4 and Figure 6 As shown, the carrier 11 has a second through hole 116. The driving assembly 14 is disposed on the carrier 11 and is sealed and connected to the carrier 11. The first end 140 of the driving assembly extends into the second through hole 116 and is connected to the first sealing member 13, and is configured to drive the first sealing member 13 to slide along the first direction or the opposite direction of the first direction.

[0076] Exemplarily, the first end 134 of the first seal is located in the first accommodation space 111. The second through hole 116 can connect the outside and the first accommodation space 111. The first end 140 of the drive assembly extends into the first accommodation space 111 through the second through hole 116 and is connected to the first end 134 of the first seal.

[0077] Exemplarily, the second end 141 of the driving assembly is disposed outside the process chamber 21 .

[0078] Since the carrier 11 is used to be arranged on the process chamber 20 and does not need to be moved during the disassembly and assembly of the mounting member 12, the drive assembly 14 is arranged on the carrier 11, which is conducive to the installation and fixation of the drive assembly 14 and maintains the support for the first sealing member 13 during the disassembly and assembly of the mounting member 12. In addition, a part of the drive assembly 14 can be arranged outside the process chamber 21, which can reduce the interference of the operation of the drive assembly 14 on the coating process and improve the coating quality.

[0079] In some embodiments, Figure 3 , Figure 4 , Figure 7 and Figure 8 As shown, the first sealing element 13 has at least one threaded hole 135 .

[0080] The driving assembly 14 includes: at least one connecting shaft 142, at least one screw rod 143 and at least one driving source 144. The connecting shaft 142 is sealedly connected to the bearing member 11 and seals the second through hole 116. The first end 1430 of the screw rod is connected to the first end of the connecting shaft (not shown in the figure), and the second end 1431 of the screw rod is screwed to the first sealing member 13 through the threaded hole 135.

[0081] The driving source 144 is connected to the second end 1420 of the connecting shaft. The driving source 144 can be configured to drive the connecting shaft 142 to rotate around the first rotation direction or the second rotation direction, so as to drive the screw 143 to rotate around the first rotation direction, so as to make the first sealing member 13 slide along the first direction. The driving source 144 can also be configured to drive the connecting shaft 142 to rotate around the second rotation direction, so as to drive the screw 143 to rotate around the second rotation direction, so as to make the first sealing member 13 slide along the opposite direction of the first direction.

[0082] The first rotation direction is opposite to the second rotation direction. For example, the first rotation direction may be clockwise, and the second rotation direction may be counterclockwise. Of course, in other embodiments, the first rotation direction may be clockwise, and the second rotation direction may be counterclockwise.

[0083] Exemplarily, the first seal 13 includes a rectangular frame structure. The four corners of the rectangular frame structure each have a threaded hole 135. The drive assembly 14 includes four connecting shafts 142, four screws 143 and four drive sources 144. The drive sources 144, the connecting shafts 142 and the screws 143 correspond one to one. Each drive source 144 drives the corresponding connecting shaft 142 to rotate, so as to drive the corresponding screw 143 to rotate. The four drive sources 144 drive the corresponding connecting shafts 142 to rotate synchronously.

[0084] For example, Figure 6As shown, the carrier 11 has a plurality of second through holes 116. The second ends 1431 of the plurality of screw rods extend into the plurality of second through holes 116 and are connected to the first sealing member 13. The diameter of the second through hole 116 may be greater than the diameter of the screw rod 143.

[0085] Exemplarily, the first end 134 of the first seal is located in the first accommodation space 111. The second through hole 116 can communicate the outside with the first accommodation space 111. The second end 1431 of the screw passes through the second through hole 116 and extends into the first accommodation space 111, and is connected to the first end 134 of the first seal. In this way, the driving source 144 driving the screw 143 to rotate can avoid interfering with the coating process, thereby improving the coating quality.

[0086] Exemplarily, the driving source 144 may include a pulley, and the pulley is driven by a belt to rotate to realize the rotation of the connecting shaft 142. Exemplarily, the driving source 144 may also include a motor, such as a servo motor. This embodiment does not specifically limit the driving source 144. Exemplarily, the moving distance of the first sealing member 13 is controlled by controlling the rotation angle of the screw 143.

[0087] Exemplarily, the connecting shaft 142 is sleeved with a sealed bearing 145. The sealed bearing 145 is sealedly connected to the carrier 11 to seal the second through hole 116. Exemplarily, the connecting shaft 142 is sealedly connected to the process chamber by a magnetic fluid sealing technology. Exemplarily, a magnetic fluid is provided between the connecting shaft 142 and the sealed bearing 145 to seal the connecting shaft 142 and the sealed bearing 145. Exemplarily, the first end of the connecting shaft passes through the center hole of the sealed bearing 145 and is connected to the screw 143.

[0088] In the target material installation device 10 provided in this embodiment, the driving source 144 can be arranged outside the process chamber 21, so as to avoid interference of the driving source 144 with the coating process and improve the coating quality. The first seal 13 can be driven to move by rotating the screw 143, so as to more accurately control the moving distance of the first seal 13 and avoid the first seal 13 from damaging the shielding member 30.

[0089] In some embodiments, Figure 3 As shown, the first side wall 136 of the first sealing member 13 is slidably connected to the second side wall 117 of the carrier 11. The first side wall 136 and the second side wall 117 are parallel to the first direction. The first sealing member 13 and the carrier 11 are directly slidably connected through the side walls close to each other, which has a simple structure and is conducive to simplifying the structure of the target mounting device 10.

[0090] Exemplarily, at least part of the first sealing member 13 is disposed in the first accommodation space 111. The first side wall 136 may be at least part of the outer wall of the first sealing member 13. Specifically, the first side wall 136 may be a side wall of the first sealing member 13 on a side away from the second accommodation space 131. Exemplarily, the second side wall 117 is at least part of the inner wall of the carrier 11. Specifically, the second side wall 117 may be a side wall of the carrier 11 on a side close to the first accommodation space 111.

[0091] In some embodiments, Figure 3 and Figure 7 As shown, the target mounting device 10 further includes: at least one second sealing member 16 . The at least one second sealing member 16 is disposed between the first side wall 136 and the second side wall 117 to seal the gap between the first side wall 136 and the second side wall 117 .

[0092] Exemplarily, the second seal 16 may include a sealing ring. Exemplarily, the target mounting device 10 includes a plurality of second seals 16. The plurality of second seals 16 are arranged at intervals along the gap between the first side wall 136 and the second side wall 117. Exemplarily, at least one second seal 16 is arranged on the first side wall 136.

[0093] In some embodiments, Figure 3 As shown, the target mounting device 10 further includes: at least one fourth sealing member 18. At least one fourth sealing member 18 is disposed on the side of the first sealing member 13 facing the shielding member 30. When the shielding member 30 seals the fifth opening 132, the gap between the first sealing member 13 and the shielding member 30 is sealed. Exemplarily, the fourth sealing member 18 is disposed on the end surface of the second end 133 of the first sealing member.

[0094] In some embodiments, Figure 3 and Figure 5 As shown, the mounting member 12 includes: a mounting body 122 and at least one mounting portion 123. The mounting body 122 is detachably disposed on the carrier 11. The mounting body 122 can seal the second opening 110. The mounting body 122 and the carrier 11 can seal the first opening 22. At least one mounting portion 123 is disposed on one side of the mounting body 122 close to the second accommodating space 131, and is configured to be detachably connected to the target 2. At least two mounting portions 123 are detachably connected to both ends of the target 2, which can provide stable support for the target 2 and facilitate the loading and unloading of the target 2.

[0095] Exemplarily, the shape of the target 2 is a long strip. For example, the shape of the target 2 is a long strip with a circular or annular cross section. Exemplarily, the mounting member 12 includes at least two mounting portions 123, and the at least two mounting portions 123 are configured to be detachably connected to both ends of the target 2.

[0096] Exemplarily, the mounting portion 123 is detachably disposed on the mounting body 122 to facilitate assembly and disassembly of the target material 2 .

[0097] The shape of the target material 2 may also include a rectangular or circular plate. The structure and number of the mounting portion 123 may be set according to the structure of the target material 2, and this embodiment does not specifically limit this.

[0098] Exemplarily, the electrical control assembly and the ventilation assembly 121 are disposed on the mounting body 122 .

[0099] In some embodiments, Figure 2 and Figure 3 As shown, the mounting member 12 includes a reinforcing rib 124. The reinforcing rib 124 is disposed on a side of the mounting body 122 away from the second accommodation space 131 and has a plurality of hoisting holes 1240 penetrating the reinforcing rib 124 along the width direction of the reinforcing rib 124.

[0100] Since the mounting member 12 is heavy, the mounting member 12 can be disassembled and moved by hoisting. The strength of the mounting member 12 can be improved by providing the reinforcing ribs 124, so that the mounting member 12 is prevented from being damaged during disassembly and movement, thereby extending the service life of the mounting member 12.

[0101] Exemplarily, the reinforcing rib 124 is located on the second side 125 of the mounting member. The second side 125 of the mounting member and the first side 120 of the mounting member are disposed opposite to each other along a first direction.

[0102] Exemplarily, the orthographic projection of the reinforcing rib 124 on the second side 125 of the mounting member may include a ring shape to uniformly improve the strength of the mounting body 122 .

[0103] In some embodiments, Figure 3 and Figure 8 As shown, the bearing member 11 has a limiting groove 118. The mounting member 12 is detachably disposed in the limiting groove 118. The second opening 110 is disposed at the bottom of the limiting groove 118.

[0104] By providing the limiting groove 118 , the mounting member 12 can be quickly and accurately fitted on the second opening 110 , and the second opening 110 can be sealed, and the mounting member 12 can be prevented from slipping due to factors such as vibration.

[0105] Exemplarily, the limiting groove 118 is disposed at the first end 113 of the supporting member.

[0106] In some embodiments, the depth of the limiting groove 118 can be designed to be larger, and the second opening 110 can be closer to the process chamber 21 than the third opening 113. This is conducive to improving the sealing between the mounting member 12 and the carrier 11.

[0107] In some embodiments, the target mounting device 10 further includes: a third sealing member 17. The third sealing member 17 is disposed between the limiting groove 118 and the mounting member 12 so that the mounting member 12 can better seal the second opening 110. Exemplarily, the third sealing member 17 may include a sealing ring or a sealing gasket. Exemplarily, the third sealing member 17 is disposed on the mounting member 12.

[0108] The above describes in detail the target material installation device 10 embodiment of the present application, and the following describes in detail the coating device 1 embodiment of the present application. It should be understood that the description of the target material installation device 10 embodiment corresponds to the description of the coating device 1 embodiment, and therefore, the parts not described in detail can refer to the above target material installation device 10 embodiment.

[0109] like Figures 9 to 11 As shown, the coating equipment 1 includes: a process chamber 20, at least one shielding member 30 and a plurality of target mounting devices 10 mentioned in any of the above embodiments.

[0110] The process chamber 20 has a process chamber 21 and a plurality of first openings 22. The first openings 22 can connect the process chamber 21 with the outside. The shielding member 30 is disposed in the process chamber 21.

[0111] The target material installation device 10 is sealedly connected to the process chamber 20 and can seal the first opening 22 respectively. The target material installation device 10 is used to install the target material 2.

[0112] At least one shielding member 30 is disposed on the target mounting device 10 or the process chamber 20 and cooperates with a plurality of target mounting devices 10 to replace the target 2 .

[0113] As mentioned above, the coating device 1 can be any device capable of coating an object. Exemplarily, the coating device 1 can include a vapor deposition device. For example, the coating device 1 can include a physical vapor deposition (PVD) device. For example, the coating device 1 can include a magnetron sputtering PVD device. Exemplarily, the coating device 1 is used to coat parts or raw materials that form photovoltaic modules.

[0114] Exemplarily, the shielding member 30 is configured to open the fifth opening 132 on at least one target mounting device 10 so that the target 2 corresponding to the fifth opening 132 can be used to coat the object to be coated, and to shield the fifth opening 132 of at least another target mounting device 10 .

[0115] Exemplarily, the shielding member 30 includes two shielding portions 300 and a hollow portion 301 between the two shielding portions 300. The hollow portion 301 is used to open the fifth opening 132 on at least one target mounting device 10, so that the target 2 corresponding to the fifth opening 132 can be coated on the object to be coated. The shielding portion 300 is used to shield the fifth opening 132 of at least another target mounting device 10.

[0116] Exemplarily, the coating device 1 further comprises a transport component 40 and a carrier plate 50. The transport component 40 is used to transport the piece to be coated along the second direction. The carrier plate 50 is used to carry the piece to be coated. Exemplarily, the plurality of first openings 22 are arranged along the second direction.

[0117] Exemplarily, after the shielding member 30 shields at least one target mounting device 10 equipped with a target material 2 that needs to be replaced, the driving assembly 14 drives the first sealing member 13 corresponding to the target mounting device 10 equipped with the target material 2 that needs to be replaced to slide along the first direction, so that the second end 133 of the first sealing member reaches the first position A, so that the shielding member 30 seals the fifth opening 132 corresponding to the target mounting device 10 equipped with the target material 2 that needs to be replaced, thereby replacing the target material 2 in the target mounting device 10 equipped with the target material 2 that needs to be replaced.

[0118] Exemplarily, the driving assembly 14 drives the first sealing member 13 corresponding to the target material installation device 10 equipped with the unused target material 2 to slide in the opposite direction of the first direction, so that the second end 133 of the first sealing member reaches the second position B, so that the second end 133 of the first sealing member is away from the shielding member 30, so that the shielding member 30 moves, thereby opening the fifth opening 132, so that the unused target material 2 can be coated on the coating member. The target material installation device 10 and the shielding member 30 can cooperate to replace the target material 2 with reference to the above method, and other methods can also be set according to actual needs.

[0119] The coating equipment 1 provided in this embodiment includes a plurality of target material mounting devices 10, a carrier 11 carrying a mounting member 12, and the mounting member 12 is detachably arranged on the carrier 11 so as to replace the target material 2 arranged on the mounting member 12, and a first sealing member 13 is arranged on the side of the carrier 11 facing the process chamber 20, so that after the shielding member 30 blocks the fifth opening 132, a sealed space is formed in the process chamber 21, and the target material 2 is sealed in the sealed space, and the target material 2 is replaced by exhausting gas from the sealed space, so that during the process of replacing the target material 2, the coating equipment 1 does not need to go through the steps of shutting down the whole machine, cooling, breaking the vacuum of the process chamber, etc., when the target material 2 corresponding to at least one target material mounting device 10 needs to be replaced, the target material 2 corresponding to at least another target material mounting device 10 can continue the coating process, thereby shortening the production time delayed by replacing the target material 2, and the steps are simple, which can speed up the production rhythm, improve the production efficiency and the production utilization rate.

[0120] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0121] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "provided with", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with it.

[0122] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0123] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0124] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A target material installation device, characterized in that: Applied to a coating device, the coating device includes a process chamber, the process chamber has a process chamber and a plurality of first openings, the first openings can connect the process chamber with the outside, and the target material installation device includes: A carrier having a second opening, wherein the carrier is used to be disposed on the process chamber so that the second opening is communicated with the first opening; a mounting member, detachably disposed on the carrier, wherein a first side of the mounting member faces the process chamber and is used to set a target material capable of passing through the second opening; and a first sealing member, disposed on a side of the carrier facing the process chamber, the first sealing member comprising a second accommodating space, the second accommodating space having a fourth opening on a side close to the carrier and a fifth opening on a side close to the process chamber, the second accommodating space being connected to the first opening and the second opening through the fourth opening, and the fifth opening being configured to be opened or covered by a covering member; Wherein, the shielding member is arranged on the target material mounting device, or the shielding member is arranged on the process chamber.

2. The target mounting device according to claim 1, characterized in that: The shielding member is arranged in the process chamber; The first sealing member is slidably connected to the bearing member, and the first sealing member can slide along a first direction or a direction opposite to the first direction; The target material installation device also includes: The driving assembly is configured to drive the first sealing member to slide along the first direction or in a direction opposite to the first direction.

3. The target mounting device according to claim 1, characterized in that: The target material mounting device has a first through hole, and the first through hole is communicated with the second accommodation space.

4. The target mounting device according to claim 2, characterized in that: The carrier has a second through hole; The driving component is disposed on the supporting member and is sealed and connected to the supporting member. The first end of the driving component extends into the second through hole and is connected to the first sealing member, and is configured to drive the first sealing member to slide along the first direction or in the opposite direction of the first direction.

5. The target mounting device according to claim 4, characterized in that: The first seal has at least one threaded hole; The drive assembly comprises: at least one connecting shaft, sealingly connected to the bearing member and sealing the second through hole; at least one screw, a first end of the screw being connected to the first end of the connecting shaft, and a second end of the screw being threadedly connected to the first sealing member through the threaded hole; At least one driving source is connected to the second end of the connecting shaft and is configured to drive the connecting shaft to rotate around a first rotation direction or a second rotation direction to drive the screw to rotate around the first rotation direction so that the first seal slides along the first direction, or to drive the screw to rotate around the second rotation direction so that the first seal slides in the opposite direction of the first direction; the first rotation direction is opposite to the second rotation direction.

6. The target mounting device according to claim 2, characterized in that: The first side wall of the first sealing member is slidably connected to the second side wall of the bearing member, and the first side wall and the second side wall are parallel to the first direction; Wherein, the target material installation device further comprises: At least one second sealing member is disposed between the first side wall and the second side wall.

7. The target mounting device according to any one of claims 1 to 6, characterized in that: The mounting member comprises: A mounting body, the mounting body being detachably disposed on the bearing member, the mounting body being capable of sealing the second opening; the mounting body and the bearing member being capable of sealing the first opening; At least one mounting portion is disposed on a side of the mounting body close to the second accommodation space and is configured to be detachably connected to the target material.

8. The target mounting device according to claim 7, characterized in that: The mounting member further comprises: The reinforcing rib is arranged on a side of the installation body away from the second accommodation space and has a plurality of hanging holes penetrating the reinforcing rib along a width direction of the reinforcing rib.

9. The target mounting device according to any one of claims 1 to 6, characterized in that: The bearing member has a limiting groove, and the mounting member is detachably arranged in the limiting groove; Wherein, the second opening is arranged at the bottom of the limiting groove.

10. The target mounting device according to claim 9, characterized in that: Also includes: At least one third sealing member is disposed between the limiting groove and the mounting member.

11. A coating device, characterized in that: include: A process chamber, comprising a process chamber and a plurality of first openings, wherein the first openings are capable of connecting the process chamber with the outside; a plurality of target mounting devices according to any one of claims 1 to 10, which are sealedly connected to the process chamber and can respectively seal the first opening, and are used for mounting targets; At least one shielding member is disposed on the target material installation device or the process chamber and cooperates with a plurality of the target material installation devices to replace the target material.

Images