Device and method for measuring polarization reflectivity of mirror sample
By designing a polarization reflectance measurement device including a mounting table, light source, transmission component and processing component, the problem of low accuracy of traditional methods in measuring warped mirror samples is solved, and accurate polarization of warped mirror samples is achieved. Reflectance measurement.
Patent Information
- Application Number
- CN202411514953.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-29
- Publication Date
- 2025-01-21
AI Technical Summary
The traditional method of polarization reflectivity measurement of specular samples has problems when measuring warped specular samples, resulting in low accuracy of measurement results.
A polarization reflectance measurement device including a mounting stage, a light source, a transmission component and a processing component was designed. The optical path is adjusted through the transmission component, and the transmission module and polarization module are used to adapt to the curved surface of the warped mirror sample to improve measurement accuracy.
The device can accurately measure the polarization reflectance of warped mirror samples, improves the accuracy of measurement results, and is suitable for measurement of flat and warped mirror samples.
Smart Images
Figure CN119334908A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of optical measurement equipment, and in particular to a device and method for measuring the polarization reflectivity of a mirror sample. Background Art
[0002] The polarization reflectivity of a mirror sample can reflect its optical properties, including transparency, reflection characteristics, and optical quality, which is crucial for evaluating the quality and performance of the mirror sample. It is also an important basis for optimizing the preparation process of the mirror sample and improving its performance.
[0003] Traditional methods for measuring the polarization reflectivity of mirror samples include reflection method and laser scanning method.
[0004] The reflection method mainly relies on the light source to provide light. After the light passes through the mirror sample, part of the light will be absorbed, part of the light will be scattered, and the remaining light will be reflected and received by the spectrometer. The intensity of the reflected light is measured by the spectrometer, and the polarization reflectivity of the mirror sample is analyzed. However, this method has high requirements for the measurement environment and requires the mirror sample to be flat. Because the warped mirror sample undergoes complex reflection and refraction on the optical path, the reflected light received by the spectrometer has a large error, so the accuracy of the calculated polarization reflectivity cannot be guaranteed.
[0005] The laser scanning method uses a laser beam to scan the mirror sample, and analyzes the polarization reflectivity by measuring the reflection, scattering or light transmission of the laser beam through the mirror sample. However, this method has high requirements for equipment, and requires the light source to provide a small laser beam to cover the surface of the mirror sample. When the sample measured is a warped mirror sample, it is difficult for the laser beam to cover the shielding surface of the warped mirror sample, resulting in large errors in the light reflected and transmitted by the mirror sample, and the accuracy of the calculated polarization reflectivity is also not guaranteed.
[0006] Therefore, the traditional measurement method is not applicable when measuring the polarization reflectivity of a warped mirror sample, and it is urgent to develop a new measurement method to measure the warped mirror sample to improve the accuracy of the measured polarization reflectivity. Summary of the invention
[0007] In order to improve the accuracy of the measurement results of the polarization reflectivity of a mirror sample, especially the accuracy of the polarization reflectivity of a warped mirror sample, the present application provides a polarization reflectivity measurement device and a measurement method for a mirror sample.
[0008] In a first aspect of the present application, a device for measuring polarization reflectivity of a mirror sample is provided. The device comprises: A mounting table for placing mirror samples; A light source, for providing incident light; A transmission component, comprising a transmission module and a polarization module, wherein the transmission module comprises a first semi-transparent and semi-reflective mirror and a second semi-transparent and semi-reflective mirror, wherein the second semi-transparent and semi-reflective mirror is used to reflect the incident light onto the mirror sample, and the polarization module is arranged on the optical path between the second semi-transparent and semi-reflective mirror and the mirror sample; A processing component, wherein a collection end of the processing component is arranged toward the first output light path of the first semi-transparent and semi-reflective mirror.
[0009] By adopting the above technical solution, the mirror sample is first placed on the mounting table, and the light source provides incident light, and the incident light passes through the second semi-transparent and semi-reflective mirror and the polarization module in sequence to reach the mirror sample. Then, the incident light is reflected as reflected light through the mirror sample, and the reflected light passes through the polarization module and the second semi-transparent and semi-reflective mirror in sequence to reach the first semi-transparent and semi-reflective mirror. At this time, the reflected light is reflected again by the first semi-transparent and semi-reflective mirror, and part of the light enters the processing component from the first output optical path. The processing component calculates the polarization reflectivity of the mirror sample according to the intensity of the incident light and the intensity of the received reflected light. Since the optical path of the measuring device of the present application can be adjusted by the transmission component, for example, the propagation path of the light is changed by the transmission module, and the azimuth angle of the incident light irradiated on the mirror sample is changed by the polarization module, the present application can measure each curved surface of the warped mirror sample, and improve the accuracy of the measurement result of the polarization reflectivity of the warped mirror sample.
[0010] In a possible implementation: further comprising a calibration component, the calibration component comprising a cross-reticle and an image sensor; The cross-reticle is arranged on the optical path between the light source and the second semi-transparent and semi-reflective mirror; The collection end of the image sensor is arranged toward the second output light path of the first semi-transparent and semi-reflective mirror. The second output light path and the first output light path are two light paths with different directions in which reflected light is output from the first semi-transparent and semi-reflective mirror. The reflected light is the light formed after the incident light is reflected by the mirror sample.
[0011] By adopting the above technical solution, before using the measuring device, the pitch state of the mirror sample can also be calibrated by the calibration component, specifically: first place the mirror sample on the mounting table, and the light source provides incident light, and the incident light presents a cross shape after passing through the cross-shaped graticule, and the cross-shaped incident light then passes through the second semi-transparent and semi-reflective mirror and the polarization module in sequence to reach the mirror sample. The cross-shaped incident light is reflected by the mirror sample and becomes reflected light, and the reflected light is also cross-shaped. Then, the cross-shaped reflected light passes through the polarization module and the second semi-transparent and semi-reflective mirror in sequence to reach the first semi-transparent and semi-reflective mirror, and the reflected light is reflected again after passing through the first semi-transparent and semi-reflective mirror, and part of the light is transmitted from the second output optical path to the image sensor, then the image sensor can determine whether the pitch state of the mirror sample meets the calibration requirements according to whether the cross shape of the received incident light meets the preset shape requirements, so as to optimize the optical path in the measuring device, and then facilitate the subsequent measurement of the polarization reflectivity of the warped mirror sample under the optimized optical path, and ensure the accuracy of the obtained polarization reflectivity.
[0012] In a possible implementation manner, a frosted glass is provided on a side of the cross-reticle facing the light source.
[0013] By adopting the above technical solution, the frosted glass can evenly irradiate the incident light on the cross-shaped reticle plate, thereby making the cross-shaped incident light passing through the cross-shaped reticle plate more uniform, thereby ensuring the accuracy of the cross-shaped reflected light received by the image sensor.
[0014] In a possible implementation manner, the image sensor is one of a charge coupled device image sensor and a complementary metal oxide semiconductor.
[0015] In a possible implementation: the transmission component further includes a first collimator and a second collimator; The first collimator is arranged on the optical path between the cross-reticle and the light source; The second collimator is arranged on the optical path between the polarization module and the mirror sample.
[0016] By adopting the above technical solution, the first collimator is used to ensure that the incident light output by the light source is parallel light, so that the incident light irradiated on the cross-shaped plate is more uniform. The second collimator is not only used to ensure that the reflected light is parallel light, but also used to control the reflected light to be transmitted back to the polarization module, further ensuring the accuracy of the cross-shaped reflected light received by the image sensor.
[0017] In a possible implementation manner: the transmission component further includes a microscope objective lens, and the microscope objective lens is arranged on the optical path between the polarization module and the mirror sample.
[0018] By adopting the above technical solution, the microscope objective lens can magnify the cross shape of the reflected light, thereby facilitating observation of whether the cross shape received by the image sensor meets the preset shape requirements, thereby improving the reliability of calibration.
[0019] In a possible implementation, the mounting platform is provided with knobs for adjusting the mirror sample along the X, Y, and Z axes.
[0020] In a possible implementation manner, a light absorbing hole is opened on the mounting platform, and the area of the mounting platform irradiated by the incident light coincides with the area of the mounting platform occupied by the light absorbing hole.
[0021] By adopting the above technical solution and setting the light absorption hole, when the incident light irradiates the mirror sample, the light transmitted by the mirror sample is absorbed by the light absorption hole, thereby preventing the transmitted light from being reflected on the mounting table and interfering with the reflected light.
[0022] In a second aspect of the present application, a method for measuring the polarization reflectivity of a mirror sample is provided. The method is applied to any of the above-mentioned devices for measuring the polarization reflectivity of a mirror sample, and comprises: Step 1: placing the mirror sample on the mounting table; Step 2: The light source provides incident light, and the incident light sequentially passes through a first collimator, a second semi-transparent and semi-reflective mirror, a polarization module, a second collimator or a microscope objective lens to reach the mirror sample; Step 3: The incident light is reflected by the mirror sample to become reflected light, and the reflected light passes through the second collimator or microscope objective, the polarization module, the second semi-transparent and semi-reflective mirror in sequence to reach the first semi-transparent and semi-reflective mirror; Step 4: the reflected light is reflected again by the first semi-transparent and semi-reflective mirror, and part of the light is transmitted from the first output optical path to the processing component; Step 5: The processing component calculates the polarization reflectivity of the mirror sample according to the intensity of the incident light and the intensity of the received reflected light.
[0023] In a possible implementation, the method further includes: Step a1: placing the mirror sample on the mounting table; Step a2: the light source provides incident light, and the incident light sequentially passes through a first collimator, a frosted glass, a cross-shaped graticule, a second semi-transparent and semi-reflective mirror, a polarization module, a second collimator or a microscope objective lens to reach the mirror sample; Step a3: the incident light is reflected by the mirror sample to become reflected light, and the reflected light passes through the second collimator or microscope objective, the polarization module, the second semi-transparent and semi-reflective mirror in sequence to reach the first semi-transparent and semi-reflective mirror; Step a4: the reflected light is reflected again by the first semi-transparent and semi-reflective mirror, and part of the light is transmitted to the image sensor from the second output light path; Step a5: the image sensor determines whether the cross shape received through the second output light path coincides with a preset cross shape, the incident light passes through the cross-shaped reticle to obtain a cross-shaped light, and the reflected light is also a cross-shaped light; Step a6: If yes, the mirror sample is calibrated; Step a7: If not, adjust the knobs for adjusting the mirror sample along the X, Y, and Z axes until the cross shape received through the second output light path coincides with the preset cross shape.
[0024] In summary, the present application includes at least one of the following beneficial technical effects: On the one hand, before using the measuring device, the pitch state of the mirror sample is calibrated by the calibration component, specifically: first place the mirror sample on the mounting table, and the light source provides incident light. The incident light presents a cross shape after passing through the cross-shaped graticule. The cross-shaped incident light then passes through the second semi-transparent and semi-reflective mirror and the polarization module in sequence before reaching the mirror sample. The cross-shaped incident light is reflected by the mirror sample and becomes reflected light, and the reflected light is also in a cross shape. Then, the cross-shaped reflected light passes through the polarization module and the second semi-transparent and semi-reflective mirror in sequence to reach the first semi-transparent and semi-reflective mirror. The reflected light is reflected again after passing through the first semi-transparent and semi-reflective mirror, and part of the light is transmitted from the second output optical path to the image sensor. The image sensor can determine whether the pitch state of the mirror sample meets the calibration requirements based on whether the cross shape of the received incident light meets the preset shape requirements, thereby optimizing the optical path in the measuring device. On the other hand, based on the optimized optical path, the incident light propagates along the same optical path, and the obtained reflected light also propagates along the same optical path. The difference is that when the reflected light passes through the first semi-transparent and semi-reflective mirror, part of the light enters the processing component from the first output optical path, which facilitates the processing component to measure the polarization reflectivity of the mirror sample. Moreover, when the optical path is optimized, the accuracy of the measured polarization reflectivity is improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 It is a schematic structural diagram of a polarization reflectivity measuring device for a mirror sample when measuring polarization reflectivity.
[0026] Figure 2 It is a schematic structural diagram of a device for measuring the polarization reflectivity of a mirror sample when calibrating the mirror sample.
[0027] Explanation of the reference numerals: 1. mounting table; 2. light source; 3. first collimating mirror; 4. first semi-transparent and semi-reflective mirror; 5. second semi-transparent and semi-reflective mirror; 6. polarization module; 7. microscope objective lens; 8. spectrometer; 9. processor; 10. frosted glass; 11. cross-reticle; 12. image sensor; 13. optical fiber. DETAILED DESCRIPTION
[0028] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0029] A mirror sample is a sample that has been specially treated, such as polishing, coating, etc., to achieve a mirror imaging effect on its surface, and can reflect the surrounding scenery to form a clear image. Due to the different usage scenarios of different mirror samples, the produced mirror samples may be regular and flat, or they may be irregular and warped. There are many methods for measuring the polarization reflectivity of flat mirror samples, but there is currently a lack of methods for measuring the polarization reflectivity of warped mirror samples. The lack of polarization reflectivity of warped mirror samples as a basis for optimizing the production process limits the further development of warped mirror samples. To this end, the present application proposes a polarization reflectivity measurement device for mirror samples, which can measure the polarization reflectivity of flat mirror samples and the polarization reflectivity of warped mirror samples, especially the polarization reflectivity of micro-area samples in the warped mirror samples, and the warped mirror samples are composed of multiple micro-area samples. Flat mirror samples and warped mirror samples are collectively referred to as mirror samples below.
[0030] Reference Figure 1 and Figure 2 The polarization reflectivity measuring device of the mirror sample includes a mounting platform 1, a light source 2, a transmission component, a processing component and a calibration component. The mounting platform 1, the light source 2, the transmission component and the processing component are used together to measure the polarization reflectivity of the mirror sample, and the mounting platform 1, the light source 2, the transmission component and the calibration component are used together to calibrate the state of the mirror sample, so as to better measure the polarization reflectivity of the mirror sample in the future. It should be noted that Figure 1 and Figure 2 The directions of the arrows in the figure indicate the direction of light propagation.
[0031] The mirror sample is placed on a mounting table 1, which is provided with knobs for adjusting the mirror sample along the X, Y, and Z axes. The pitch state of the mirror sample is adjusted by adjusting the knobs of the XY axes. A manual adjustment knob is also provided for manually adjusting the pitch state of the mirror sample. The manual adjustment knob realizes the adjustment function by driving the X, Y, and Z axes through a vacuum adsorption pump.
[0032] The mounting platform 1 is provided with a light absorption hole, which is located below the mirror sample. In other examples, other structures may be provided to place the mirror sample.
[0033] The light source 2 is one of a deuterium lamp and a tungsten lamp, and is used to provide incident light for the mirror sample. In order to reduce the loss of the incident light, an optical fiber 13 is arranged on the output end of the light source 2, and the incident light is transmitted to the transmission component by the optical fiber 13.
[0034] Along the incident direction of the incident light, the transmission component includes a first collimator 3, a transmission module, a polarization module 6 and a microscope objective 7 in sequence. The microscope objective 7 can be replaced with a second collimator. The first collimator 3 and the second collimator are collimators of the same type placed at different positions.
[0035] The transmission module includes a first semi-transparent mirror 4 and a second semi-transparent mirror 5. The second semi-transparent mirror 5 is used to reflect the incident light onto the mirror sample. In order to control the different azimuths of the incident light irradiated on the mirror sample, a polarization module 6 is arranged on the light path between the second semi-transparent mirror 5 and the mirror sample. The polarization module 6 is one of a polarizing prism and a polarizer.
[0036] The microscope objective lens 7 or the second collimator is arranged on the optical path between the polarization module 6 and the mirror sample. In a specific example, when the microscope objective lens 7 is used, the microscope objective lens 7 is a microscope objective lens 7 with a replaceable magnification, and the magnification is between 15 times and 40 times, and the distance between the microscope objective lens 7 and the mirror sample is 23.8 mm, and the distance between the mirror sample is 7.8 mm. In another specific example, when the second collimator is used, the outer diameter of the second collimator is Φ25.4 mm, and the focal length f is 225 mm.
[0037] The processing component includes a spectrometer 8 and a processor 9. The spectrometer 8 is one of a grating spectrometer and a scanning spectrometer. Among them, the spectrometer 8 is used as the collection end of the processing component, and is arranged toward the first output light path of the first semi-transparent and semi-reflective mirror 4. Specifically, the spectrometer 8 is connected with an optical fiber 13, and the end of the optical fiber 13 away from the spectrometer 8 is arranged on the second output light path of the first semi-transparent and semi-reflective mirror 4 to reduce the loss of light entering the spectrometer 8. The processor 9 is centered on the CPU, and a computing model is configured thereon. The computing model is a neural network model obtained by pre-training. The computing model can calculate the polarization reflectivity of the mirror sample according to the intensity of the light collected by the spectrometer 8.
[0038] The calibration assembly includes a frosted glass 10, a cross-reticle plate 11 and an image sensor 12. The frosted glass 10 and the cross-reticle plate 11 are arranged between the first collimating mirror 3 and the second semi-transparent and semi-reflective mirror 5, the frosted glass 10 is close to the side where the first collimating mirror 3 is arranged, and the cross-reticle plate 11 is close to the side where the second semi-transparent and semi-reflective mirror 5 is arranged.
[0039] Specifically, the frosted glass 10 is arranged close to the cross-reticle plate 11, and the frosted glass 10 is used to evenly distribute the incident light so that the incident light is evenly irradiated on the cross-reticle plate 11. The cross-reticle plate 11 can use a transparent background combined with black crosshairs or a black background combined with transparent crosshairs. In this example, the cross-reticle plate 11 uses a black background combined with transparent crosshairs as an example, that is, after the incident light is irradiated on the cross-reticle plate 11, only the transparent crosshair area transmits the incident light, and other areas block the transmission of the incident light. In other words, the incident light output after the incident light passes through the cross-reticle plate 11 presents a cross shape.
[0040] The image sensor 12 is one of a charge coupled device (CCD) image sensor and a complementary metal-oxide-semiconductor (CMOS). The acquisition end of the image sensor 12 is arranged toward the second output light path of the first semi-transparent and semi-reflective mirror 4. It should be noted that the first output light path and the second output light path are two light paths in different directions outputted from the first semi-transparent and semi-reflective mirror 4, and the reflected light is the light formed after the incident light is reflected by the mirror sample.
[0041] Based on the above-mentioned polarization reflectivity measurement device for a mirror sample, the present application also provides a polarization reflectivity measurement method for a mirror sample, which is applied to the above-mentioned measurement device.
[0042] The pitch state calibration process of the mirror sample is shown in steps a1-a7.
[0043] Step a1: Place the mirror sample on the mounting table 1. Specifically, place the mirror sample above the light absorption hole, so that the area where the mirror sample contacts the mounting table 1 is larger than the area where the light absorption hole is located on the mounting table 1, thereby preventing the mirror sample from falling into the light absorption hole. At the same time, ensure that the area where the incident light irradiates the mounting table 1 coincides with the area occupied by the light absorption hole on the mounting table 1, and place the micro-area sample to be tested directly above the light absorption hole, so that when the incident light irradiates the micro-area sample to be tested, the light transmitted by the micro-area sample is absorbed by the light absorption hole, thereby preventing the transmitted light from being reflected on the mounting table 1 and interfering with the reflected light.
[0044] Step a2: The light source 2 provides incident light, and the incident light passes through the first collimator 3, the frosted glass 10, the cross-shaped plate 11, the second semi-transparent and semi-reflective mirror 5, the polarization module 6, the second collimator or the microscope objective 7 in sequence to reach the mirror sample. The incident light after passing through the cross-shaped plate 11 presents a cross shape, so the incident light irradiated to the mirror sample also presents a cross shape.
[0045] Step a3: The incident light is reflected by the mirror sample and becomes reflected light, and the reflected light passes through the second collimator or microscope objective 7, the polarization module 6, and the second semi-transparent mirror 5 to reach the first semi-transparent mirror 4. After the cross-shaped incident light is reflected by the mirror sample, the reflected light still presents a cross shape. If the microscope objective 7 is used at this time, the cross-shaped reflected light is magnified by the microscope objective 7, and then passes through the polarizing prism or polarizer, the second semi-transparent mirror 5 to reach the first semi-transparent mirror 4.
[0046] Step a4: The reflected light is reflected again by the first semi-transparent mirror 4, and part of the light is transmitted from the second output optical path to the image sensor 12. After the reflected light passes through the second semi-transparent mirror 5, part of the light enters the spectrometer 8 from the first output optical path, and the remaining part of the light enters the image sensor 12 from the second output optical path.
[0047] Step a5: The image sensor 12 determines whether the cross received through the second output light path coincides with the preset cross. First, a test is performed in advance: when the incident light is reflected by the mirror sample, the reflected light formed can enter the spectrometer 8 from the first output light path and the intensity is maximum, the shape, size, position and other information of the cross received in the image sensor 12, and the cross at this time is saved to complete the calibration. Therefore, before measuring the polarization reflectivity of the mirror sample, it is necessary to calibrate the pitch state of the mirror sample to be measured based on the cross obtained by the advance test, specifically to determine whether the cross formed by the reflected light reflected by the mirror sample in the image sensor 12 coincides with the calibrated cross.
[0048] Step a6: If yes, the mirror sample is calibrated; Step a7: If not, mirror the sample until the cross shape received through the second output light path coincides with the preset cross shape, and the preset cross shape is the cross shape calibrated in advance in step a5.
[0049] It should be noted that each time before using the above-mentioned measuring device, the mirror sample needs to be calibrated according to the above-mentioned steps. After the calibration is completed, it means that the optical path of the measuring device is normal and the loss of reflected light is minimal, so multiple mirror samples can be measured continuously during the measurement without performing a calibration operation for each mirror sample.
[0050] After the calibration is completed, the frosted glass 10 and the cross-reticle plate 11 are removed, and then the measurement operation is started. The specific measurement process is shown in step 15.
[0051] Step 1: Place the mirror sample on the mounting platform 1. The mirror sample at this time can be the mirror sample used for calibration as mentioned above, or can be other mirror samples to be tested. Similarly, place the micro-area sample to be tested of the mirror sample just above the light absorption hole.
[0052] Step 2: The light source 2 provides incident light, and the incident light passes through the first collimator 3, the second semi-transparent and semi-reflective mirror 5, the polarization module 6, the second collimator or the microscope objective lens 7 in sequence to reach the mirror sample.
[0053] Step 3: The incident light is reflected by the mirror sample to become reflected light, and the reflected light passes through the second collimator or microscope objective 7, the polarization module 6, the second semi-transparent mirror 5 in sequence to reach the first semi-transparent mirror 4.
[0054] Step 4: The reflected light is reflected again by the first semi-transparent and semi-reflective mirror 4, and part of the light is transmitted from the first output optical path to the processing component, and the remaining light is transmitted from the second output optical path to the image sensor 12. Of course, in order to save energy, the image sensor 12 can be directly turned off after the calibration operation is completed, so even if there is light on the second output optical path, there is no need to use the image sensor 12 for imaging.
[0055] Step 5: The processing component calculates the polarization reflectivity of the mirror sample according to the intensity of the incident light and the intensity of the reflected light. From the embodiment of the measuring device, it can be seen that the processor 9 is configured with a calculation model, which is a neural network model. The training process of the neural network model is: For the polarization reflectivity of the mirror sample to be measured at an azimuth angle, the azimuth angle is first determined, and the azimuth angle is locked by a polarizing prism or a polarizer, and then a standard mirror sample is placed on the mounting table 1 to calculate the intensity of the reflected light reflected by the standard mirror sample to the spectrometer 8 at the azimuth angle. The standard mirror sample refers to a flat mirror sample with a known polarization reflectivity. The intensity of the incident light at the azimuth angle is calculated using the Fresnel formula based on the intensity of the reflected light collected by the spectrometer 8 and the magnitude of the polarization reflectivity. Similarly, the intensity of the incident light corresponding to each of the multiple mirror samples at the same azimuth angle is calculated respectively until the intensity of the incident light corresponding to the multiple mirror samples at the same azimuth angle is the same or the fluctuation value is less than the preset value, and the training is completed.
[0056] It should be noted that the intensity of the incident light corresponding to each azimuth angle needs to be trained in advance in the above manner.
[0057] Based on the trained calculation model, after the current azimuth is determined by a polarizing prism or polarizer, the intensity of the incident light at the azimuth is retrieved, and then based on the actual intensity of the reflected light received by the spectrometer 8, the Fresnel formula is used to calculate the polarization reflectivity at the azimuth, thereby completing the measurement operation.
[0058] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of disclosure involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the aforementioned disclosed concept. For example, the above features are replaced with the technical features with similar functions disclosed in the present application (but not limited to) by each other to form a technical solution.
Claims
1. A device for measuring polarization reflectivity of a mirror sample, characterized in that: include: A mounting table (1) for placing a mirror sample; A light source (2) for providing incident light; A transmission component, comprising a transmission module and a polarization module (6), wherein the transmission module comprises a first semi-transparent and semi-reflective mirror (4) and a second semi-transparent and semi-reflective mirror (5), wherein the second semi-transparent and semi-reflective mirror (5) is used to reflect the incident light onto the mirror sample, and the polarization module (6) is arranged on the optical path between the second semi-transparent and semi-reflective mirror (5) and the mirror sample; A processing component, wherein a collection end of the processing component is arranged toward a first output light path of the first semi-transparent and semi-reflective mirror (4).
2. The polarization reflectivity measuring device of a mirror sample according to claim 1, characterized in that: Also included is a calibration component, the calibration component comprising a cross-reticle plate (11) and an image sensor (12); The cross-reticle plate (11) is arranged on the optical path between the light source (2) and the second semi-transparent and semi-reflective mirror (5); The collection end of the image sensor (12) is arranged toward the second output light path of the first semi-transparent and semi-reflective mirror (4); the second output light path and the first output light path are two light paths in different directions in which reflected light is output from the first semi-transparent and semi-reflective mirror (4); the reflected light is light formed after the incident light is reflected by the mirror sample.
3. The polarization reflectivity measuring device of a mirror sample according to claim 2, characterized in that: A frosted glass (10) is provided on the side of the cross-reticle plate (11) facing the light source (2).
4. The polarization reflectivity measuring device of a mirror sample according to claim 2, characterized in that: The image sensor (12) is one of a charge coupled device image sensor and a complementary metal oxide semiconductor.
5. The polarization reflectivity measuring device of a mirror sample according to claim 2, characterized in that: The transmission component also includes a first collimator (3) and a second collimator; The first collimator (3) is arranged on the optical path between the cross-reticle plate (11) and the light source (2); The second collimator is arranged on the optical path between the polarization module (6) and the mirror sample.
6. The polarization reflectivity measuring device of a mirror sample according to claim 1, characterized in that: The transmission component also includes a microscope objective lens (7), and the microscope objective lens (7) is arranged on the optical path between the polarization module (6) and the mirror sample.
7. The polarization reflectivity measuring device of a mirror sample according to claim 1, characterized in that: The mounting platform (1) is provided with knobs for adjusting the mirror surface sample along the X, Y and Z axes.
8. The polarization reflectivity measuring device of a mirror sample according to claim 1, characterized in that: A light absorbing hole is provided on the mounting platform (1), and the area of the mounting platform (1) irradiated by the incident light coincides with the area of the mounting platform (1) occupied by the light absorbing hole.
9. A method for measuring polarization reflectivity of a mirror sample, applied to a measuring device as claimed in any one of claims 1 to 8, characterized in that: include: Step 1: placing the mirror sample on the mounting table (1); Step 2: The light source (2) provides incident light, and the incident light sequentially passes through a first collimator (3), a second semi-transparent and semi-reflective mirror (5), a polarization module (6), a second collimator or a microscope objective lens (7) to reach the mirror sample; Step 3: the incident light is reflected by the mirror sample to become reflected light, and the reflected light passes through the second collimator or microscope objective (7), the polarization module (6), the second semi-transparent and semi-reflective mirror (5) in sequence to reach the first semi-transparent and semi-reflective mirror (4); Step 4: the reflected light is reflected again by the first semi-transparent and semi-reflective mirror (4), and part of the light is transmitted from the first output light path to the processing component; Step 5: The processing component calculates the polarization reflectivity of the mirror sample according to the intensity of the incident light and the intensity of the received reflected light.
10. The method for measuring polarization reflectivity of a mirror sample according to claim 9, characterized in that: The method further comprises: Step a1: placing the mirror sample on the mounting platform (1); Step a2: the light source (2) provides incident light, and the incident light sequentially passes through a first collimator (3), a frosted glass (10), a cross-shaped graticule (11), a second semi-transparent and semi-reflective mirror (5), a polarization module (6), a second collimator or a microscope objective lens (7) and reaches the mirror sample; Step a3: the incident light is reflected by the mirror sample to become reflected light, and the reflected light passes through the second collimator or microscope objective (7), the polarization module (6), the second semi-transparent and semi-reflective mirror (5) in sequence to reach the first semi-transparent and semi-reflective mirror (4); Step a4: the reflected light is reflected again by the first semi-transparent and semi-reflective mirror (4), and part of the light is transmitted to the image sensor (12) through the second output light path; Step a5: the image sensor (12) determines whether the cross shape received through the second output light path coincides with a preset cross shape, the incident light passing through the cross-shaped reticle (11) generates a light beam in the shape of a cross, and the reflected light is also a light beam in the shape of a cross; Step a6: If yes, the mirror sample is calibrated; Step a7: If not, adjust the knobs for adjusting the mirror sample along the X, Y, and Z axes until the cross shape received through the second output light path coincides with the preset cross shape.