Crystal furnace array type temperature measuring device and system

Abstract

The invention discloses a crystal furnace array type temperature measuring device and system, and relates to the field of temperature measuring devices. An array type temperature measuring device for a crystal furnace is applied to the crystal furnace and comprises a temperature measuring sleeve with the surface sleeved with a first flange plate, and the temperature measuring sleeve penetrates through the two sides of the crystal furnace. According to the array type temperature measuring device for the crystal furnace, the detection end of an infrared pyrometer and a temperature conducting rod are located on the same center line, and the infrared pyrometer can directly measure the temperature conducting rod through an optical lens; the temperature detection precision is effectively improved, meanwhile, heat generated by the crystal furnace can be used for controlling the temperature conduction rod to move left and right in a reciprocating mode, and therefore dust and other impurities on the surface, located in the crystal furnace, of the temperature conduction rod can be scraped away through the annular scraper, the temperature conduction deviation of the temperature conduction rod is effectively reduced, and the service life of the temperature conduction rod is prolonged. Therefore, the accuracy of temperature measurement of the infrared pyrometer is ensured, so that a worker can accurately align the crystal furnace.

Description

Technical Field

[0001] The present invention belongs to the technical field of temperature measuring devices, and in particular, relates to a crystal furnace array temperature measuring device and system. Background Art

[0002] At present, the physical vapor transport (PTV) method is one of the mainstream methods for preparing silicon carbide crystals. The PVT method grows silicon carbide single crystals. Usually, a silicon carbide crystal is placed on the top of a crucible as a seed crystal, and silicon carbide powder is placed on the bottom of the crucible as a source material. The crucible is then placed in a crystal furnace, and the crucible is induction heated by an induction coil arranged around the crystal furnace. The temperature inside the crucible reaches about 2300°C, and the growth temperature gradient is controlled. Argon gas is introduced to control the gas pressure in the crystal furnace. During the crystal growth process, the seed crystal temperature is lower and the source temperature is higher. There is a certain temperature gradient between the two. During the crystal growth process, the source material sublimates and crystallizes on the seed crystal at the cold end, and a silicon carbide single crystal is obtained.

[0003] In crystal growth, reliable and stable temperature control is a very critical technical issue, so a temperature measuring component is needed to monitor the temperature in the crystal furnace in real time. At such a high temperature, general contact temperature measuring components cannot be used, and only optical temperature measurement can be relied upon. Optical temperature measurement is performed by opening a glass observation window on the equipment and measuring the temperature through the light transmitted through the observation window. In the existing silicon carbide crystal growth furnace, the insulation material used is very easy to generate dust, and after the silicon carbide powder is heated and melted, fine impurities will be precipitated, which can easily cause dust and other impurities to block the observation window of the crystal growth furnace, causing a great impact on the measurement of the optical thermometer, resulting in low accuracy of temperature measurement, which in turn causes the staff to be unable to accurately adjust the temperature in the crystal furnace, greatly reducing the preparation quality of silicon carbide crystals. In view of this, the present invention is specially proposed. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a crystal furnace array temperature measurement device that can overcome the above problems or at least partially solve the above problems.

[0005] In order to solve the above technical problems, the basic concept of the technical solution adopted by the present invention is: a crystal furnace array temperature measuring device, applied to the crystal furnace, comprising: a temperature measuring sleeve with a first flange plate sleeved on the surface, inserted on both sides of the crystal furnace, wherein the first flange plate is fixedly connected to the crystal furnace by bolts, and the temperature measuring sleeve is provided with two groups, and the two groups of the temperature measuring sleeves are respectively arranged at the upper and lower ends of the side wall of the crystal furnace; a temperature conducting rod, which is slidably connected to the temperature measuring sleeve through a connecting rod; an optical lens, which is fixedly connected to the opening of the temperature measuring sleeve away from the crystal furnace; an annular scraper, which is fixedly connected to the opening of the temperature measuring sleeve away from one end of the optical lens, wherein the inner diameter of the annular scraper is the same as the diameter of the temperature conducting rod; an infrared high A thermometer is installed at one end of the temperature measuring sleeve close to the optical lens through a connecting component, and the detection end is in the same straight line as the temperature conducting rod; a sleeve is fixedly connected to the side of the temperature measuring sleeve close to the optical lens; a moving rod with a piston is slidably connected in the sleeve, and the end away from the optical lens is fixedly connected to the connecting rod; a tension spring is arranged in the sleeve, and its two ends are respectively fixedly connected to the sleeve and the piston on the moving rod; a gas supply mechanism for supplying gas into the sleeve is installed above the crystal furnace close to the temperature measuring sleeve, and the gas delivery port is respectively connected to the gas delivery ports of two adjacent sleeves through connecting gas pipes; a driving mechanism for driving the gas supply mechanism to work is installed on the crystal furnace.

[0006] In order to facilitate flexible disassembly and assembly of the infrared pyrometer, the connecting assembly further includes a second flange, a third flange, and a screw. The second flange is sleeved on one end of the temperature measuring sleeve close to the optical lens, the third flange is sleeved on the infrared pyrometer, and the screw is inserted between the second flange and the third flange. The screw is fixedly connected to the second flange and the third flange by a nut.

[0007] In order to facilitate the driving of the gas supply mechanism to work, the driving mechanism further includes a liquid storage tank storing alcohol inside, a heat-conducting rod, a gas pipe, and an impeller group. The liquid storage tank is fixedly connected to both sides above the crystal furnace, the heat-conducting rod is fixedly inserted into the bottom of the liquid storage tank, and the lower end of the heat-conducting rod extends downward into the crystal furnace. The gas pipe is fixedly connected to the gas outlet of the liquid storage tank, and a solenoid valve is fixedly connected to the gas outlet of the liquid storage tank. The impeller group is rotatably connected to a position in the gas pipe near the air inlet.

[0008] In order to facilitate the gas to enter the sleeve back and forth, the gas supply mechanism further includes a cylinder filled with gas, a reciprocating screw, a suction plate, and an adjusting rod. The cylinder is fixedly connected to the positions on both sides of the crystal furnace near the gas pipe, the reciprocating screw is rotatably connected to the upper end of the cylinder, the suction plate is sealingly and slidably connected in the cylinder, the adjusting rod is fixedly connected to the suction plate, and the upper end extends upward out of the cylinder, the upper end of the adjusting rod is threadedly connected to the reciprocating screw, the upper end of the reciprocating screw is fixedly connected to the rotating shaft of the impeller group, and two gas ports are opened at the bottom of the cylinder, which are respectively connected to the two adjacent sleeves through connecting air pipes.

[0009] In order to facilitate the replenishment of gas into the cylinder, further, a gas guide port is opened at the lower end of the cylinder away from the crystal furnace, and a gas guide pipe is fixedly connected to the gas guide port, and a one-way valve is fixedly connected to the gas guide pipe.

[0010] In order to improve the sealing performance between the heat conducting rod and the liquid storage tank and the crystal furnace, further, a sealing member is sleeved on the heat conducting rod, and the heat conducting rod and the liquid storage tank and the crystal furnace are sealed and connected via the sealing member.

[0011] In order to facilitate the reflux of alcohol, further, a condensing box is fixedly connected to the upper end of the liquid storage tank, a condensing pipe is fixedly connected inside the condensing box, the air outlet of the air pipe is connected to the air inlet of the condensing box, and the liquid outlet of the condensing box is connected to the liquid return port of the liquid storage tank through a connecting pipe.

[0012] In order to facilitate the condensed alcohol to quickly enter the liquid storage tank, further, a guide plate is fixedly connected to the condensation tank, and the guide plate is gradually inclined toward the liquid outlet side of the condensation tank.

[0013] In order to improve the sealing performance of the crystal furnace, further, a circle of heat-expandable pads is sleeved on the temperature measuring sleeve, and the temperature measuring sleeve is sealed and connected to the crystal furnace through the expansion pads.

[0014] A control system for a crystal furnace array temperature measuring device, comprising:

[0015] A heating module, disposed in the crystal furnace, for adjusting the temperature inside the crystal furnace;

[0016] A temperature conduction module, which is arranged on both sides of the crystal furnace and inserted in the crystal furnace, and is used to conduct the temperature in the crystal furnace;

[0017] A temperature measurement module, arranged on the temperature conducting module, for measuring the temperature in the crystal furnace in real time;

[0018] A dust cleaning module is arranged in the temperature conducting module and is used to remove dust and other impurities attached to the temperature conducting module so as to improve the accuracy of the temperature measuring module when measuring temperature;

[0019] A gas extraction module, connected to the dust cleaning module, and used to drive the dust cleaning module to clean the temperature conduction module;

[0020] A heat driving module, connected to the gas extraction module, and used to drive the gas extraction module to input or extract gas into or out of the dust cleaning module;

[0021] A heat absorption module, inserted between the crystal furnace and the heat driving module, for transferring the heat generated by the heating module to the heat driving module so as to enable the heat driving module to work;

[0022] A condensation recovery module, connected to the heat drive module, for condensing and recovering vaporized alcohol;

[0023] The system control module is electrically connected to the heating module, the temperature measurement module, the heat drive module, and the condensation recovery module, and is used to control the heating module to accurately adjust the temperature in the crystal furnace according to the temperature measured by the temperature measurement module, and at the same time control the heat drive module and the condensation recovery module to work synchronously.

[0024] After adopting the above technical scheme, the present invention has the following beneficial effects compared with the prior art: by placing the detection end of the infrared pyrometer and the temperature conducting rod on the same center line, the present invention can enable the infrared pyrometer to directly measure the temperature conducting rod through the optical lens, thereby effectively improving the accuracy of temperature detection. At the same time, the heat generated by the crystal furnace can be used to control the reciprocating movement of the temperature conducting rod, so that dust and other impurities on the surface of the temperature conducting rod in the crystal furnace can be scraped off by the annular scraper, effectively reducing the deviation of the temperature conducting rod when conducting temperature, thereby ensuring the accuracy of the temperature measured by the infrared pyrometer, so that the staff can accurately adjust the temperature in the crystal furnace, effectively improving the quality of crystal preparation and processing, and is suitable for popularization and use.

[0025] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings are part of the present invention and are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention, but do not constitute an improper limitation of the present invention. Obviously, the accompanying drawings described below are only some embodiments. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without creative work.

[0027] In the attached picture:

[0028] Figure 1 A three-dimensional schematic diagram of a crystal furnace array temperature measurement device proposed by the present invention;

[0029] Figure 2 This is a structural schematic diagram of a crystal furnace array temperature measurement device proposed by the present invention;

[0030] Figure 3 A schematic diagram of the three-dimensional structure of a cylinder, a suction plate, a reciprocating screw rod, and an adjusting rod in a crystal furnace array-type temperature measuring device proposed by the present invention;

[0031] Figure 4 This is a three-dimensional structural schematic diagram of a temperature measuring sleeve, a temperature conducting rod, a sleeve, and an optical lens in a crystal furnace array-type temperature measuring device proposed by the present invention;

[0032] Figure 5 A crystal furnace array temperature measuring device proposed by the present invention Figure 1 The structural diagram of part A in the figure;

[0033] Figure 6 A crystal furnace array temperature measuring device proposed by the present invention Figure 2 The structural diagram of part B;

[0034] Figure 7 A crystal furnace array temperature measuring device proposed by the present invention Figure 2 Schematic diagram of the structure of part C;

[0035] Figure 8 A crystal furnace array temperature measuring device proposed by the present invention Figure 2 The structural diagram of the D part;

[0036] Fig. 9 The present invention provides a system flow diagram of a crystal furnace array temperature measurement device and system.

[0037] In the figure: 1. crystal furnace; 2. liquid storage tank; 3. gas pipe; 4. condenser tank; 5. condenser; 6. cylinder; 7. reciprocating screw; 8. suction plate; 9. adjusting rod; 10. heat conducting rod; 11. sealing element; 12. gas guide tube; 13. temperature measuring sleeve; 14. temperature conducting rod; 15. connecting rod; 16. sleeve; 17. moving rod; 18. first flange; 19. second flange; 20. screw; 21. impeller assembly; 22. solenoid valve; 23. guide plate; 24. optical lens; 25. annular scraper; 26. third flange; 27. infrared pyrometer; 28. expansion pad; 29. ​​nut.

[0038] It should be noted that these drawings and textual descriptions are not intended to limit the conceptual scope of the present invention in any way, but are intended to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention but are not used to limit the scope of the present invention.

[0040] Embodiment 1:

[0041] Reference Figure 1-Figure 8 , a crystal furnace array temperature measuring device, applied to the crystal furnace 1, comprising: a temperature measuring sleeve 13 with a first flange 18 on the surface, inserted on both sides of the crystal furnace 1, wherein the first flange 18 is fixedly connected to the crystal furnace 1 by bolts, and the temperature measuring sleeve 13 is provided with two groups, and the two groups of temperature measuring sleeves 13 are respectively arranged at the upper and lower ends of the side wall of the crystal furnace 1; a temperature conducting rod 14, which is slidably connected in the temperature measuring sleeve 13 through a connecting rod 15; an optical lens 24, which is fixedly connected to the opening of the temperature measuring sleeve 13 away from the crystal furnace 1; an annular scraper 25, which is fixedly connected to the opening of the temperature measuring sleeve 13 away from one end of the optical lens 24, wherein the inner diameter of the annular scraper 25 is the same as the diameter of the temperature conducting rod 14; an infrared pyrometer 27, which is connected by The component is installed at one end of the temperature measuring sleeve 13 close to the optical lens 24, and the detection end is in the same straight line as the temperature conducting rod 14; the sleeve 16 is fixedly connected to the side of the temperature measuring sleeve 13 close to the optical lens 24; the moving rod 17 with a piston is slidably connected in the sleeve 16, and the end away from the optical lens 24 is fixedly connected to the connecting rod 15; the tension spring is arranged in the sleeve 16, and the two ends are respectively fixedly connected to the pistons on the sleeve 16 and the moving rod 17; the gas supply mechanism for supplying gas into the sleeve 16 is installed above the crystal furnace 1 close to the temperature measuring sleeve 13, and the gas delivery port is respectively connected to the gas delivery ports of the two adjacent sleeves 16 through connecting gas pipes; the driving mechanism for driving the gas supply mechanism to work is installed on the crystal furnace 1;

[0042] The driving mechanism includes a liquid storage tank 2 storing alcohol, a heat conducting rod 10, an air pipe 3, and an impeller group 21. The liquid storage tank 2 is fixedly connected to both sides above the crystal furnace 1, the heat conducting rod 10 is fixedly inserted at the bottom of the liquid storage tank 2, and the lower end of the heat conducting rod 10 extends downward into the crystal furnace 1. The air pipe 3 is fixedly connected to the air outlet of the liquid storage tank 2, and a solenoid valve 22 is fixedly connected to the air outlet of the liquid storage tank 2. The impeller group 21 is rotatably connected to a position near the air inlet in the air pipe 3;

[0043] The gas supply mechanism includes a cylinder 6 filled with gas, a reciprocating screw rod 7, a suction plate 8, and an adjusting rod 9. The cylinder 6 is fixedly connected to the positions of the two sides of the crystal furnace 1 near the gas supply pipe 3. The reciprocating screw rod 7 is rotatably connected to the upper end of the cylinder 6. The suction plate 8 is sealingly and slidably connected in the cylinder 6. The adjusting rod 9 is fixedly connected to the suction plate 8, and the upper end extends upward out of the cylinder 6. The upper end of the adjusting rod 9 is threadedly connected to the reciprocating screw rod 7. The upper end of the reciprocating screw rod 7 is fixedly connected to the rotating shaft of the impeller group 21. Two gas supply ports are opened at the bottom of the cylinder 6, and are respectively connected to the two adjacent sleeves 16 through connecting air pipes;

[0044] The upper end of the liquid storage tank 2 is fixedly connected to a condensing tank 4, a condensing pipe 5 is fixedly connected inside the condensing tank 4, the air outlet of the gas pipe 3 is connected to the air inlet of the condensing tank 4, and the liquid outlet of the condensing tank 4 is connected to the liquid return port of the liquid storage tank 2 through a connecting pipe.

[0045] When in use, the staff first moves the device to the designated working position, then fixes it to improve its own stability, and then installs the infrared pyrometer 27 on the side of the temperature measuring sleeve 13 close to the optical lens 24 through the connecting component, and then electrically connects the infrared pyrometer 27 and the heater on the crystal furnace 1 to the external main controller. When preparing the crystal, the temperature conducting rod 14 will conduct the heat in the crystal furnace 1 to the temperature measuring sleeve 13, and then the infrared pyrometer 27 will measure the temperature in the temperature measuring sleeve 13 through the optical lens 24, so that the temperature at different positions in the crystal furnace 1 can be monitored in real time. After the crystal raw material is heated and melted, the impurities and other fine substances inside will float in the crystal furnace 1. , and thus it will adhere to the surface of the temperature conducting rod 14, so that the heat conducted by the temperature conducting rod 14 is lower than the temperature in the crystal furnace 1, which causes the temperature measured by the infrared pyrometer 27 to be inconsistent with the actual temperature. At this time, since the temperature in the crystal furnace 1 is higher, the heat conducting rod 10 will heat up, and then the heat conducting rod 10 will transfer the heat into the liquid storage tank 2, and then the volatile alcohol in the liquid storage tank 2 will vaporize, thereby generating gas. When a certain amount of gas accumulates in the liquid storage tank 2, the gas pressure in the liquid storage tank 2 will increase with the increase of gas. When the gas pressure in the liquid storage tank 2 reaches a certain value, the solenoid valve 22 can be opened at this time, and then the gas in the liquid storage tank 2 will be transported into the gas pipe 3, and then the impeller on the impeller assembly 21 will be driven by the airflow. When the suction plate 8 moves downward, the gas in the cylinder 6 will be transported into the sleeve 16 through the connecting air pipe, and then the moving rod 17 will overcome the tension of the tension spring and drive the temperature conducting rod 14 to move to the side away from the infrared pyrometer 27 through the connecting rod 15. When the suction plate 8 moves upward, the gas will flow back into the cylinder 6, and then the moving rod 17 will pull the temperature conducting rod 14 back to the initial position through the connecting rod 15 under the action of the tension spring. Repeatedly, the temperature conducting rod 14 can be driven to move back and forth left and right. 4 are tightly connected by sliding, so the annular scraper 25 can scrape off the dust and other impurities attached to the outer surface of the temperature measuring sleeve 13 by the temperature conducting rod 14, so that the temperature conducting rod 14 can stably and accurately conduct the temperature in the crystal furnace 1 to the temperature measuring sleeve 13 for monitoring by the infrared pyrometer 27, effectively improving the accuracy of temperature detection, so that it is convenient for the staff to accurately adjust the temperature in the crystal furnace 1, and effectively improving the quality of crystal preparation and processing. At the same time, when the gas generated by the volatilization of alcohol drives the impeller group 21 to rotate, the gas will flow into the condensation box 4 along the gas delivery pipe 3, and then the gas with a higher temperature will be condensed and liquefied under the action of the condenser 5, so that the gas will be condensed into alcohol again. After condensing into alcohol,The alcohol will flow back into the liquid storage tank 2 through the connecting pipe, and then it can be heated and vaporized again to generate gas, so as to continuously drive the impeller group 21 to rotate, and the alcohol gas can also be recycled and reused, effectively reducing the waste of resources and production costs, and is suitable for popularization and use.

[0046] Embodiment 2:

[0047] Reference Figure 1-Figure 8 , a crystal furnace array temperature measuring device, which is basically the same as Example 1, and further: the connecting component includes a second flange 19, a third flange 26, and a screw 20, the second flange 19 is sleeved on one end of the temperature measuring sleeve 13 close to the optical lens 24, the third flange 26 is sleeved on the infrared pyrometer 27, the screw 20 is inserted between the second flange 19 and the third flange 26, and the screw 20 is fixedly connected to the second flange 19 and the third flange 26 through a nut 29. Through the arrangement of the second flange 19, the third flange 26, the screw 20, and the nut 29, the infrared pyrometer 27 can be stably fixed on the side of the temperature measuring sleeve 13 close to the optical lens 24, which effectively improves the stability of the infrared pyrometer 27. At the same time, when the infrared pyrometer 27 is damaged, it is also convenient to disassemble and assemble it, which effectively improves the flexibility of the infrared pyrometer 27;

[0048] An air guide port is provided at the lower end of the cylinder 6 away from the crystal furnace 1, and an air guide pipe 12 is fixedly connected to the air guide port. A one-way valve is fixedly connected to the air guide pipe 12. Through the setting of the air guide pipe 12, when the gas in the cylinder 6 is reduced over a long period of time, the staff can replenish gas into the cylinder 6 through the air guide pipe 12, so that the temperature conducting rod 14 can be stably moved left and right, and the dust removal effect on the surface of the temperature conducting rod 14 is effectively improved;

[0049] The heat conducting rod 10 is sleeved with a sealing member 11, and the heat conducting rod 10 is sealed and connected with the liquid storage tank 2 and the crystal furnace 1 through the sealing member 11. The sealing member 11 can improve the sealing performance between the heat conducting rod 10 and the liquid storage tank 2 and the crystal furnace 1, and prevent alcohol from flowing into the crystal furnace 1 through the gap, thereby causing alcohol waste;

[0050] A guide plate 23 is fixedly connected to the condensation box 4, and the guide plate 23 is gradually inclined toward the liquid outlet of the condensation box 4. Through the setting of the guide plate 23, the condensed alcohol can be guided so that it can quickly flow back to the liquid storage box 2 to be volatilized again when heated;

[0051] A circle of heat expansion pads 28 are sleeved on the temperature measuring sleeve 13, and the temperature measuring sleeve 13 is sealed and connected to the crystal furnace 1 through the expansion pads 28. By arranging a circle of expansion pads 28 on the outer surface of the temperature measuring sleeve 13, when the crystal furnace 1 is working and heating up, the expansion pads 28 can be preheated and expanded, so that the temperature measuring sleeve 13 and the crystal furnace 1 can be sealed and connected, thereby improving the sealing between the two, preventing heat loss, and effectively improving the insulation effect of the crystal furnace 1.

[0052] Embodiment 3:

[0053] Reference Figure 1-Figure 9 : A control system for a crystal furnace array temperature measuring device, comprising:

[0054] A heating module is arranged in the crystal furnace 1 and is used to adjust the temperature inside the crystal furnace 1;

[0055] The temperature conducting module is arranged on both sides of the crystal furnace 1 and inserted in the crystal furnace 1, and is used to conduct the temperature in the crystal furnace 1;

[0056] A temperature measurement module, arranged on the temperature conducting module, for measuring the temperature in the crystal furnace 1 in real time;

[0057] The dust cleaning module is arranged in the temperature conducting module and is used to remove dust and other impurities attached to the temperature conducting module so as to improve the accuracy of the temperature measuring module when measuring temperature;

[0058] The gas extraction module is connected to the dust cleaning module and is used to drive the dust cleaning module to clean the temperature conduction module;

[0059] A heat drive module is connected to the gas extraction module and is used to drive the gas extraction module to input or extract gas into or out of the dust cleaning module;

[0060] The heat absorption module is inserted between the crystal furnace 1 and the heat driving module, and is used to transfer the heat generated by the heating module to the heat driving module so as to make the heat driving module work;

[0061] A condensation recovery module is connected to the heat drive module and is used for condensing and recovering vaporized alcohol;

[0062] The system control module is electrically connected to the heating module, the temperature measurement module, the heat drive module, and the condensation recovery module. It is used to control the heating module to accurately adjust the temperature in the crystal furnace 1 according to the temperature measured by the temperature measurement module, and at the same time control the heat drive module and the condensation recovery module to work synchronously.

[0063] The present invention enables the detection end of the infrared pyrometer 27 and the temperature conducting rod 14 to be on the same center line, so that the infrared pyrometer 27 can directly measure the temperature conducting rod 14 through the optical lens 24, thereby effectively improving the accuracy of temperature detection. Through the coordinated use of the driving mechanism, the air supply mechanism, the sleeve 16, the moving rod 17, the tension spring, the connecting rod 15, and the annular scraper 25, the heat generated by the crystal furnace 1 can be used to control the reciprocating movement of the temperature conducting rod 14 to the left and right, so that the dust and other impurities on the surface of the temperature conducting rod 14 in the crystal furnace 1 can be scraped off by the annular scraper 25, effectively reducing the deviation of the temperature conducting rod 14 when conducting temperature, thereby ensuring the accuracy of the temperature measurement by the infrared pyrometer 27, so that the staff can accurately adjust the temperature in the crystal furnace 1, effectively improving the quality of crystal preparation and processing, and suitable for popularization and use.

[0064] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0065] The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment, it is not used to limit the present invention. Any technician familiar with this patent can make some changes or modify the technical contents suggested above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the solution of the present invention.

Claims

1. A crystal furnace array temperature measuring device, applied to a crystal furnace (1), characterized in that: include: A temperature measuring sleeve (13) with a first flange (18) sleeved on its surface is inserted on both sides of the crystal furnace (1). The first flange (18) is fixedly connected to the crystal furnace (1) by means of bolts, and two groups of temperature measuring sleeves (13) are provided, and the two groups of temperature measuring sleeves (13) are respectively arranged at the upper and lower ends of the side wall of the crystal furnace (1); A temperature conducting rod (14) is slidably connected in the temperature measuring sleeve (13) via a connecting rod (15); An optical lens (24) is fixedly connected to an opening in the temperature measuring sleeve (13) away from the crystal furnace (1); The annular scraper (25) is fixedly connected to an opening in the temperature measuring sleeve (13) at one end away from the optical lens (24). Wherein, the inner diameter of the annular scraper (25) is the same as the diameter of the temperature conducting rod (14); An infrared pyrometer (27) is installed at one end of the temperature measuring sleeve (13) close to the optical lens (24) through a connecting assembly, and a detection end is in the same straight line as the temperature conducting rod (14); A sleeve (16) is fixedly connected to a side of the temperature measuring sleeve (13) close to the optical lens (24); A moving rod (17) with a piston is slidably connected in the sleeve (16), and one end away from the optical lens (24) is fixedly connected to the connecting rod (15); A tension spring is arranged in the sleeve (16), and two ends of the tension spring are respectively fixedly connected to the sleeve (16) and the piston on the moving rod (17); A gas supply mechanism for supplying gas into the sleeve (16), which is installed above the crystal furnace (1) near the temperature measuring sleeve (13), and the gas supply port is respectively connected to the gas supply ports of two adjacent sleeves (16) through connecting gas pipes; A driving mechanism for driving the gas supply mechanism to operate is installed on the crystal furnace (1).

2. The crystal furnace array temperature measuring device according to claim 1, characterized in that: The connecting assembly comprises a second flange (19), a third flange (26), and a screw (20); the second flange (19) is sleeved on one end of the temperature measuring sleeve (13) close to the optical lens (24); the third flange (26) is sleeved on the infrared pyrometer (27); the screw (20) is inserted between the second flange (19) and the third flange (26); the screw (20) is fixedly connected to the second flange (19) and the third flange (26) via a nut (29).

3. The crystal furnace array temperature measuring device according to claim 1, characterized in that: The driving mechanism comprises a liquid storage tank (2) storing alcohol therein, a heat conducting rod (10), an air pipe (3), and an impeller group (21); the liquid storage tank (2) is fixedly connected to both sides above the crystal furnace (1); the heat conducting rod (10) is fixedly inserted into the bottom of the liquid storage tank (2); the lower end of the heat conducting rod (10) extends downward into the crystal furnace (1); the air pipe (3) is fixedly connected to the air outlet of the liquid storage tank (2); an electromagnetic valve (22) is fixedly connected to the air outlet of the liquid storage tank (2); and the impeller group (21) is rotatably connected to a position in the air pipe (3) close to the air inlet.

4. The crystal furnace array temperature measuring device according to claim 3, characterized in that: The gas supply mechanism comprises a cylinder (6) filled with gas, a reciprocating screw (7), a suction plate (8), and an adjusting rod (9); the cylinder (6) is fixedly connected to positions on both sides of the crystal furnace (1) near the gas supply pipe (3); the reciprocating screw (7) is rotatably connected to the upper end of the cylinder (6); the suction plate (8) is sealingly and slidably connected in the cylinder (6); the adjusting rod (9) is fixedly connected to the suction plate (8), and the upper end extends upward out of the cylinder (6); the upper end of the adjusting rod (9) is threadedly connected to the reciprocating screw (7); the upper end of the reciprocating screw (7) is fixedly connected to the rotating shaft of the impeller group (21); and two gas supply ports are provided at the bottom of the cylinder (6), which are respectively connected to two adjacent sleeves (16) through connecting air pipes.

5. The crystal furnace array temperature measuring device according to claim 4, characterized in that: A gas guide port is provided at the lower end of the cylinder (6) on the side away from the crystal furnace (1), a gas guide pipe (12) is fixedly connected to the gas guide port, and a one-way valve is fixedly connected inside the gas guide pipe (12).

6. The crystal furnace array temperature measuring device according to claim 3, characterized in that: A sealing member (11) is sleeved on the heat conducting rod (10), and the heat conducting rod (10) is sealedly connected to the liquid storage tank (2) and the crystal furnace (1) via the sealing member (11).

7. The crystal furnace array temperature measuring device according to claim 3, characterized in that: The upper end of the liquid storage tank (2) is fixedly connected to a condensing tank (4), a condensing pipe (5) is fixedly connected inside the condensing tank (4), the air outlet of the gas transmission pipe (3) is connected to the air inlet of the condensing tank (4), and the liquid outlet of the condensing tank (4) is connected to the liquid return port of the liquid storage tank (2) via a connecting pipe.

8. The crystal furnace array temperature measuring device according to claim 7, characterized in that: A guide plate (23) is fixedly connected inside the condensation box (4), and the guide plate (23) is gradually inclined toward a liquid outlet side of the condensation box (4).

9. The crystal furnace array temperature measuring device according to claim 1, characterized in that: The temperature measuring sleeve (13) is sleeved with a circle of heat expansion pad (28), and the temperature measuring sleeve (13) is sealedly connected to the crystal furnace (1) via the expansion pad (28).

10. A control system for a crystal furnace array temperature measuring device, using a crystal furnace array temperature measuring device according to any one of claims 1 to 7, characterized in that: include: A heating module, arranged in the crystal furnace (1), and used for adjusting the temperature inside the crystal furnace (1); A temperature conduction module, arranged on both sides of the crystal furnace (1) and inserted into the crystal furnace (1), and used for conducting the temperature inside the crystal furnace (1); A temperature measurement module, arranged on the temperature conducting module, and used for measuring the temperature in the crystal furnace (1) in real time; A dust cleaning module is arranged in the temperature conducting module and is used to remove dust and impurities attached to the temperature conducting module so as to improve the accuracy of the temperature measuring module when measuring temperature; A gas extraction module, connected to the dust cleaning module, and used to drive the dust cleaning module to clean the temperature conduction module; A heat driving module, connected to the gas extraction module, and used to drive the gas extraction module to input or extract gas into or out of the dust cleaning module; a heat absorption module, inserted between the crystal furnace (1) and the heat driving module, and used for transferring the heat generated by the heating module to the heat driving module so as to enable the heat driving module to operate; A condensation recovery module, connected to the heat drive module, for condensing and recovering vaporized alcohol; The system control module is electrically connected to the heating module, the temperature measurement module, the heat drive module and the condensation recovery module, and is used to control the heating module to accurately adjust the temperature in the crystal furnace (1) according to the temperature measured by the temperature measurement module, and at the same time control the heat drive module and the condensation recovery module to work synchronously.

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