Optical system for improving A / K inspection precision

Abstract

The invention relates to the technical field of optical equipment, in particular to an optical system for improving A / K inspection precision. The device comprises a base, the top of the base is provided with a working body, one side of the working body is provided with an optical lens group and a controller, the controller is located at the top of the optical lens group, the optical lens group is provided with two reflectors, the working body is fixedly connected with a bearing mechanism below the optical lens group, and the bearing mechanism is fixedly connected with the working body. The working main body is provided with an aperture below the bearing mechanism; according to the optical system for improving the A / K inspection precision, the non-uniformity of the data collected by the optical lens group is reduced through the arranged cooling mechanism, and meanwhile, the noise ratio in the data collected by the optical lens group can be reduced through the cooling mechanism. Turbine blades in the air collecting barrel rotate to generate powerful airflow, air is sucked in from an air suction opening of the base, and after being accelerated and pressurized by the air multiplication ring, the air is sprayed out at a high speed from a slit of the air multiplication ring.

Description

Technical Field

[0001] The present invention relates to the technical field of optical equipment, and in particular to an optical system for improving A / K inspection accuracy. Background Art

[0002] With the continuous development of science and technology, the precision requirements for optical components are getting higher and higher. As an important optical component inspection method, A / K precision inspection is widely used in many fields such as optics, electronics, and medicine.

[0003] In traditional optical component inspection, simple optical equipment and methods are usually used for inspection, such as using a single wavelength of light for irradiation, and judging by naked eye observation or simple measuring tools. However, the detection accuracy of this method is low, and it is difficult to meet the high-precision requirements of modern technology for optical components. With the continuous advancement of optical technology, the A / K precision inspection method has gradually developed. This method uses a specific optical path design and the reflection, refraction and absorption characteristics of light of different wavelengths when passing through the inspection object to obtain richer information, thereby greatly improving the inspection accuracy. For example, when detecting the refractive index of an optical lens, the use of advanced imaging mechanisms and central processing units can accurately calculate the refractive index, providing strong support for the quality control and performance evaluation of optical components.

[0004] However, although the A / K precision inspection method has high accuracy, it still faces some problems in practical applications. Factors such as temperature and noise will have a great impact on the final refractive index data. In order to solve the temperature problem, the existing optical system usually sets temperature sensors around the inspection object to monitor the temperature of the aperture focusing part in real time, and starts the fan to cool down when the temperature variation range exceeds the accuracy range. However, the light and shadow of the rotating fan when working will make the image captured by the imaging mechanism uneven, and the noise generated by the fan when working will also affect the data captured by the imaging mechanism, so that the refractive index of the optical element finally obtained deviates from the actual refractive index.

[0005] In view of this, we propose an optical system for improving the A / K inspection accuracy to improve the deficiencies in the prior art. Summary of the invention

[0006] The object of the present invention is to provide an optical system for improving the A / K inspection accuracy, so as to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above object, the present invention provides an optical system for improving the A / K inspection accuracy, comprising a base, a working body is provided on the top of the base, an optical lens group and a controller are provided on one side of the working body, the controller is located on the top of the optical lens group, two reflectors are provided on the optical lens group, a bearing mechanism is fixedly connected to the working body below the optical lens group, an aperture is provided on the working body below the bearing mechanism, a cooling mechanism is installed in the working body, and an image processing system is integrated in the controller;

[0008] Among them, the supporting mechanism is used to fix the inspection object, the cooling mechanism is used to cool the area around the inspection object, the cooling mechanism located inside the working body can reduce the unevenness of the data collected by the optical lens group, and the cooling mechanism can reduce the proportion of noise in the data collected by the optical lens group, and the image processing system is used to receive the optical data collected by the optical lens group and obtain calculation results.

[0009] As a further improvement of the present technical solution, the supporting mechanism includes a loading platform fixedly connected to one side of the working body, a light-transmitting hole is opened on the top of the loading platform, a plurality of limit bolts are fixedly connected to one side of the top of the loading platform, a limit cap is fixedly connected to the top of each limit bolt, a fixing clip is slidably connected to each limit bolt, a spring is provided on the periphery of each limit bolt between the loading platform and the fixing clip, and the end of the fixing clip away from the limit bolt is tightly attached to the upper surface of the loading platform.

[0010] As a further improvement of the present technical solution, the supporting mechanism also includes a plurality of temperature sensors and a plurality of beam splitters located at the bottom of the stage, and a plurality of air guide grooves are provided on the side of the bottom of the stage away from the working body, and the plurality of temperature sensors and beam splitters are located around the light-transmitting hole.

[0011] As a further improvement of the present technical solution, the cooling mechanism includes an air collecting tube, an air exhaust port is opened at the bottom of the air collecting tube, a mounting frame is provided inside the air collecting tube, turbine blades are provided at the top of the mounting frame, a motor is provided at the bottom of the mounting frame, and an air multiplier ring is connected to the top of the air collecting tube.

[0012] As a further improvement of the technical solution, the opening direction of the air multiplier ring is located at an end away from the air exhaust port.

[0013] As a further improvement of the technical solution, the image processing system includes an acquisition unit, a preprocessing unit, an extraction unit and a calculation unit;

[0014] Among them, the acquisition unit is used to convert the optical signal of the image captured by the optical lens group into a digital signal, the preprocessing unit is used to denoise the digital signal obtained by the acquisition unit, the extraction unit is used to extract features related to the refractive index in the image processed by the preprocessing unit, and the calculation unit uses the interference method to calculate the refractive index of the inspection object based on the feature data extracted by the extraction unit.

[0015] As a further improvement of the technical solution, the step of the calculation unit calculating the refractive index of the inspection object using the interference method is:

[0016] S1. Establish an interference optical path: the light emitted from the aperture passes through a beam splitter and is divided into reference light and measurement light. The reference light directly irradiates one of the reflectors on the optical lens group and then is reflected back to the beam splitter. The measurement light passes through the inspection object and irradiates another reflector and then is reflected back to the beam splitter.

[0017] S2. Generate interference fringes: The reference light and the measuring light reunite at the beam splitter, and the two beams with different optical paths produce interference. The interference light is received by the controller, and the controller converts the optical signal of the interference light into a digital signal.

[0018] S3, data acquisition and processing: rotate the angle of the aperture, adjust the incident angle in the light path, and collect interference fringe images under different incident angles;

[0019] S4. Calculate the refractive index using the optical path difference formula based on the characteristic parameters of the interference fringe image.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] In the optical system for improving the accuracy of A / K inspection, the non-uniformity of the data collected by the optical lens group is reduced by setting a cooling mechanism, and the cooling mechanism can also reduce the proportion of noise in the data collected by the optical lens group. Specifically, the rotation of the turbine blades in the wind collector generates a strong airflow, which sucks air from the air outlet of the base, and after being accelerated and pressurized by the air multiplier ring, it is ejected at high speed from the slit of the air multiplier ring. Due to the special design of the slit, the ejected airflow will form a stable air layer along the surface of the air multiplier ring, and this air layer will continuously draw in the surrounding air, thereby achieving the air multiplication effect. At the same time, since the turbine blades are designed to be hidden inside the working body: on the one hand, when the turbine blades are working, no light and shadow will be generated around the optical element, so that the image is uneven. On the other hand, since the position of the turbine blades is far away from the optical lens group, the propagation of noise can be minimized. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional diagram of the overall structure of the present invention;

[0023] Figure 2 It is a left view of the overall structure of the present invention;

[0024] Figure 3 It is a partially cut-away front view of the present invention;

[0025] Figure 4 It is a three-dimensional diagram of the carrying mechanism of the present invention;

[0026] Figure 5 A bottom view of the carrying mechanism of the present invention;

[0027] Figure 6 It is a cutaway perspective view of the cooling mechanism of the present invention;

[0028] Figure 7 It is a cutaway front view of the cooling mechanism of the present invention;

[0029] Figure 8 This is a structural block diagram of the image processing system of the present invention.

[0030] The meaning of each number in the figure is:

[0031] 100, base; 110, working body; 120, optical lens group; 130, controller; 140, aperture; 150, beam splitter;

[0032] 200, bearing mechanism; 210, loading platform; 220, light transmission hole; 230, limit bolt; 240, spring; 250, fixing clip; 260, air guide slot; 270, temperature sensor;

[0033] 300, cooling mechanism; 310, air collecting tube; 320, turbine blades; 330, motor; 340, air multiplier ring;

[0034] 400, image processing system; 410, acquisition unit; 420, pre-processing unit; 430, extraction unit; 440, calculation unit. DETAILED DESCRIPTION

[0035] The following will be combined with the accompanying drawings in the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0037] Example 1: Please refer to Figure 1-Figure 3 As shown, the present embodiment aims to provide an optical system for improving the A / K inspection accuracy, comprising a base 100, a working body 110 is provided on the top of the base 100, an optical lens group 120 and a controller 130 are provided on one side of the working body 110, the controller 130 is located on the top of the optical lens group 120, two reflectors are provided on the optical lens group 120, a carrying mechanism 200 is fixedly connected to the working body 110 below the optical lens group 120, an aperture 140 is provided on the working body 110 below the carrying mechanism 200, a cooling mechanism 300 is installed in the working body 110, and an image processing system 400 is integrated in the controller 130;

[0038] Among them, the supporting mechanism 200 is used to fix the inspection object, the cooling mechanism 300 is used to cool the area around the inspection object, the cooling mechanism 300 located inside the working body 110 can reduce the unevenness of the data collected by the optical lens group 120, and the cooling mechanism 300 can reduce the proportion of noise in the data collected by the optical lens group 120, and the image processing system 400 is used to receive the optical data collected by the optical lens group 120 and obtain calculation results.

[0039] Working principle: First, the inspection object (optical element whose refractive index is to be measured) is placed on the supporting mechanism 200, and the aperture 140 is opened. The light reflected by the aperture 140 reaches the optical lens group 120 in two ways: first, directly reaches the optical lens group 120; second, passes through the optical element and then reaches the optical lens group 120. The controller 130 receives the image data collected by the optical lens group 120, processes it, and calculates the refractive index of the optical element.

[0040] During the process of the aperture 140 irradiating the optical element, if the ambient temperature of the beam focusing portion exceeds the preset temperature variation range, the cooling mechanism 300 is activated to cool the area around the optical element so that the temperature around the optical element is always maintained within a normal range.

[0041] In order to fix the optical element, its optical data (incident light, reflected light, etc.) is collected, and the refractive index of the optical element is calculated based on these data, and the temperature around the optical element is constantly monitored during the process of the aperture 140 irradiating the optical element.

[0042] like Figure 4 and Figure 5 As shown, the supporting mechanism 200 includes a loading platform 210 fixedly connected to one side of the working body 110, a light-transmitting hole 220 is opened on the top of the loading platform 210, a plurality of limit bolts 230 are fixedly connected to one side of the top of the loading platform 210, the top of each limit bolt 230 is fixedly connected to a limit cap, each limit bolt 230 is slidably connected to a fixing clamp 250, and a spring 240 is sleeved on the periphery of each limit bolt 230 between the loading platform 210 and the fixing clamp 250, and the end of the fixing clamp 250 away from the limit bolt 230 is tightly attached to the upper surface of the loading platform 210.

[0043] The improvement is that: the carrying mechanism 200 also includes a plurality of temperature sensors 270 and a plurality of beam splitters 150 located at the bottom of the stage 210, a plurality of air guide grooves 260 are provided at the bottom of the stage 210 on a side away from the working body 110, and the plurality of temperature sensors 270 and the beam splitters 150 are all located around the light-transmitting hole 220; first, press the ends of the two fixing clips 250 away from the surface of the stage 210 to make the ends of the fixing clips 250 close to the surface of the stage 210 tilt up, and after placing the optical element on the stage 210, open the aperture 1 40 to irradiate the optical element, the optical data is collected by the optical lens group 120, the temperature sensor 270 around the optical element at the bottom of the stage 210 monitors the temperature of the beam focus part in real time, once the temperature exceeds the preset temperature change range (generally, optical elements of different materials have different temperature change accuracy), the cooling mechanism 300 blows air to the bottom of the optical element, and the wind blowing to the beam focus part on the optical element is intercepted by each wind guide groove 260, and multiple eddies are formed at the bottom of the optical element, thereby improving the cooling effect on the beam focus part. In addition, a light shield is set on the top of the stage 210, when the refractive index of the optical element is detected, the optical element is placed in a dark environment, reducing the interference of external light sources on the light source generated by the aperture 140, thereby improving the A / K inspection accuracy of the optical element.

[0044] Factors such as temperature and noise will have a significant impact on the refractive index data finally obtained. In order to solve the temperature problem, the existing optical system usually sets a temperature sensor 270 around the inspection object to monitor the temperature of the focus part of the aperture 140 in real time, and starts the fan (cooling mechanism 300 described below) to cool down when the temperature variation range exceeds the accuracy range. However, the light and shadow of the rotating fan when working will make the image captured by the imaging mechanism (optical lens group 120 described below) uneven, and the noise generated by the fan when working will also affect the data captured by the optical lens group 120, so that the refractive index of the optical element finally obtained deviates from the actual refractive index.

[0045] exist Figure 6 and Figure 7 In the figure, the cooling mechanism 300 includes an air collecting tube 310, an air exhaust port is opened at the bottom of the air collecting tube 310, a mounting frame is arranged inside the air collecting tube 310, a turbine blade 320 is arranged at the top of the mounting frame, a motor 330 is arranged at the bottom of the mounting frame, and an air multiplier ring 340 is connected to the top of the air collecting tube 310.

[0046] The improvement is that: the direction of the opening of the air multiplier ring 340 is located at the end away from the air outlet; the power of the motor 330 is turned on, the motor 330 drives the turbine blade 320 to rotate, and the turbine blade 320 in the air collecting tube 310 rotates to generate a strong airflow, sucking air from the air outlet of the base 100, and after being accelerated and pressurized by the air multiplier ring 340, it is ejected at high speed from the slit of the air multiplier ring 340. Due to the special design of the slit, the ejected airflow will form a stable air layer along the surface of the air multiplier ring 340, and this air layer will continuously draw in the surrounding air, thereby achieving the air multiplication effect. At the same time, since the turbine blade 320 is designed to be hidden inside the working body 110: on the one hand, when the turbine blade 320 is working, it will not produce light and shadow around the optical element, so as to obtain an uneven image, and on the other hand, the turbine blade 320 installed inside the working body 110 can minimize the spread of noise.

[0047] Description of the air multiplication principle of the air multiplication ring 340 in the cooling mechanism 300:

[0048] The air multiplier ring 340 adopts the Bernoulli principle: in a fluid (including gas and liquid), the pressure is low where the flow rate is fast, and the pressure is high where the flow rate is slow.

[0049] (1) Air intake stage: When the turbine blades 320 rotate at high speed, a strong airflow is generated inside the air collecting tube 310. According to the Bernoulli principle, the high-speed airflow will reduce the air pressure inside the air collecting tube 310, thereby forming an area with a lower air pressure than the surrounding environment. Since the air pressure in the surrounding environment is high, the air will be "inhaled" into the air collecting tube 310 due to the pressure difference.

[0050] (2) Air acceleration and ejection stage: The air sucked into the air collecting tube 310 first enters the cavity of the air collecting tube 310 with a larger inner diameter, and then enters the air multiplier ring 340 with a relatively narrow space under the lift force of the rotating turbine blades 320. The air sucked into the air collecting tube 310 is accelerated to a higher speed through such an acceleration process.

[0051] When high-speed air is ejected from the annular air outlet of the air multiplier ring 340 , according to the Bernoulli principle, a low-pressure area is formed near the air outlet due to the extremely high air flow rate.

[0052] (3) Air multiplier effect: The low-pressure area near the air outlet will attract the surrounding air to flow into this area. The surrounding air mixes with the high-speed air ejected from the air outlet to form a stronger airflow, thereby achieving an air multiplier effect.

[0053] In summary, the working principle of the present invention is as follows:

[0054] First, the inspection object (optical element whose refractive index is to be measured) is placed on the stage 210 and fixed by the fixing clamp 250. The aperture 140 is opened, and the light reflected by the aperture 140 reaches the optical lens group 120 in two ways: first, directly reaches the optical lens group 120; second, passes through the optical element and then reaches the optical lens group 120. The controller 130 receives the image data collected by the optical lens group 120, processes it, and calculates the refractive index of the optical element.

[0055] During the process of the aperture 140 irradiating the optical element, if the temperature sensor 270 detects that the ambient temperature of the beam focusing part exceeds the preset temperature variation range, the power supply of the motor 330 is started, and the motor 330 drives the turbine blades 320 to rotate. The turbine blades 320 in the air collecting tube 310 rotate to generate a strong airflow, which inhales air from the air outlet of the base 100, and after being accelerated and pressurized by the air multiplier ring 340, it is ejected at high speed from the slit of the air multiplier ring 340. Due to the special design of the slit, the ejected airflow will form a stable air layer along the surface of the air multiplier ring 340, and this air layer will continuously draw in the surrounding air, thereby achieving the air multiplication effect. At the same time, it also reduces the turbulence and noise of the air, making the wind from the circular air outlet of the air multiplier ring 340 blowing toward the optical element more stable and gentle.

[0056] Example 2: Figure 8 As shown, this embodiment is based on the content provided in Embodiment 1, and aims to provide an image processing system 400 for receiving image data collected by the controller 130, and calculate the refractive index of the inspection object according to the received data.

[0057] The image processing system 400 includes an acquisition unit 410, a pre-processing unit 420, an extraction unit 430 and a calculation unit 440;

[0058] Among them, the acquisition unit 410 is used to convert the optical signal of the image acquired by the optical lens group 120 into a digital signal, the preprocessing unit 420 is used to denoise the digital signal obtained by the acquisition unit 410, the extraction unit 430 is used to extract the features related to the refractive index in the image processed by the preprocessing unit 420, and the calculation unit 440 calculates the refractive index of the inspection object using the interference method based on the feature data extracted by the extraction unit 430.

[0059] It should be disclosed that the acquisition unit 410 is responsible for controlling the optical lens group 120 to take photos. Through the connection with the optical lens group 120, it is possible to adjust shooting parameters such as focal length, exposure time, sensitivity, etc. to ensure that a clear and accurate image of the optical element is obtained. The optical signal is converted into a digital signal for subsequent processing and analysis. For example, using a high-quality image sensor, more details and more accurate color information can be captured, providing basic data for accurate analysis of the refractive index.

[0060] The preprocessing unit 420 performs denoising on the collected image. Various filtering algorithms, such as mean filtering, median filtering, Gaussian filtering, etc., are used to remove noise from the image and improve the signal-to-noise ratio of the image. Noise will interfere with the subsequent analysis process and reduce the accuracy of the refractive index measurement, so denoising is a very important step. Image enhancement is then performed: the features of the optical element can be made more obvious by adjusting parameters such as contrast, brightness, and sharpness. For example, enhancing the contrast of the image can make the propagation path of light in the optical element more clearly visible, which helps to accurately analyze the refractive index.

[0061] The extraction unit 430 extracts features related to the refractive index of the optical element from the preprocessed image. For example, the features such as the propagation path of the light in the optical element, the refraction angle, and the reflection intensity are extracted. These features are the key basis for calculating the refractive index. By using image processing algorithms such as edge detection, contour extraction, and texture analysis, the boundaries and internal structures of the optical element are accurately located to further analyze the changes in the refractive index. For example, the refraction of light at the edge of the optical element can be determined by edge detection, thereby inferring the magnitude of the refractive index.

[0062] The calculation unit 440 calculates the refractive index of the inspection object using the interference method based on the feature data extracted by the extraction unit 430, and performs accuracy evaluation and error analysis on the calculation results. The accuracy and reliability of the refractive index calculation are evaluated by comparing with known standard values ​​or taking the average value of multiple measurements. At the same time, possible error sources are analyzed, such as measurement error, system error, random error, etc., and corresponding measures are taken to correct and optimize.

[0063] In order to calculate the refractive index of the inspection object according to the data fed back by the optical lens assembly 120, the calculation unit 440 uses the interference method to calculate the refractive index of the inspection object in the following steps:

[0064] S1. Establishing an interference optical path: The light emitted from the aperture 140 passes through the beam splitter 150 and is divided into a reference light and a measuring light. The reference light is directly irradiated onto one of the reflectors on the optical lens group 120 and then reflected back to the beam splitter 150. The measuring light passes through the inspection object and irradiates onto another reflector and then is reflected back to the beam splitter 150.

[0065] S2. Generate interference fringes: The reference light and the measuring light are reunited at the beam splitter 150, and the two beams of light with different optical paths generate interference. The interference light is received by the controller 130, and the interference light is received by the detector in the controller 130. The detector can be a photodiode, a CCD camera, etc. The detector converts the optical signal into a digital (electrical) signal for subsequent processing and analysis;

[0066] S3, data collection and processing: rotating the angle of the aperture 140, adjusting the incident angle in the light path, and collecting interference fringe images under different incident angle conditions;

[0067] S4. Calculate the refractive index using the optical path difference formula based on the characteristic parameters of the interference fringe image:

[0068] Step 1: The optical path difference formula is: ΔL = (n-1)d, where ΔL is the optical path difference, n is the refractive index of the inspection object, and d is the thickness of the optical element;

[0069] In interference fringes, the optical path difference can also be expressed as: ΔL = mλ, where m is the order of the interference fringes and λ is the wavelength of the light source;

[0070] The second step is to combine the above two optical path difference formulas to obtain the calculation formula of the refractive index: Among them, the order m of the interference fringes can be determined by observing the movement of the interference fringes or using other known methods; the wavelength λ of the light source and the thickness d of the optical element are known (which can be obtained by measurement or known specifications), and these values ​​are substituted into the formula to calculate the refractive index n of the optical element.

[0071] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An optical system for improving A / K inspection accuracy, comprising a base (100), a working body (110) being provided on the top of the base (100), an optical lens group (120) and a controller (130) being provided on one side of the working body (110), the controller (130) being located on the top of the optical lens group (120), and two reflectors being provided on the optical lens group (120), characterized in that: The working body (110) is fixedly connected to a carrying mechanism (200) below the optical lens group (120); an aperture (140) is provided on the working body (110) below the carrying mechanism (200); a cooling mechanism (300) is installed in the working body (110); and an image processing system (400) is integrated in the controller (130); The bearing mechanism (200) is used to fix the inspection object, the cooling mechanism (300) is used to cool the area around the inspection object, the cooling mechanism (300) located inside the working body (110) can reduce the unevenness of data collected by the optical lens group (120), and the cooling mechanism (300) can reduce the proportion of noise in the data collected by the optical lens group (120), and the image processing system (400) is used to receive the optical data collected by the optical lens group (120) and obtain calculation results.

2. The optical system for improving A / K inspection accuracy according to claim 1, characterized in that: The bearing mechanism (200) comprises a loading platform (210) fixedly connected to one side of the working body (110), a light-transmitting hole (220) being provided at the top of the loading platform (210), a plurality of limit bolts (230) being fixedly connected to one side of the top of the loading platform (210), a limit cap being fixedly connected to the top of each limit bolt (230), a fixing clamp (250) being slidably connected to each limit bolt (230), a spring (240) being sleeved on the periphery of each limit bolt (230) between the loading platform (210) and the fixing clamp (250), and an end of the fixing clamp (250) away from the limit bolt (230) being in close contact with the upper surface of the loading platform (210).

3. The optical system for improving A / K inspection accuracy according to claim 2, characterized in that: The bearing mechanism (200) further comprises a plurality of temperature sensors (270) and a plurality of beam splitters (150) located at the bottom of the stage (210); a plurality of air guide grooves (260) are provided at the bottom of the stage (210) on a side away from the working body (110); and the plurality of temperature sensors (270) and beam splitters (150) are located around the light transmission hole (220).

4. The optical system for improving A / K inspection accuracy according to claim 1, characterized in that: The cooling mechanism (300) comprises an air collecting cylinder (310), an air exhaust port being provided at the bottom of the air collecting cylinder (310), a mounting frame being provided inside the air collecting cylinder (310), a turbine blade (320) being provided at the top of the mounting frame, a motor (330) being provided at the bottom of the mounting frame, and an air multiplier ring (340) being connected to the top of the air collecting cylinder (310).

5. The optical system for improving A / K inspection accuracy according to claim 4, characterized in that: The direction of the opening of the air multiplier ring (340) is located at an end away from the air suction port.

6. The optical system for improving A / K inspection accuracy according to claim 1, characterized in that: The image processing system (400) comprises a collection unit (410), a pre-processing unit (420), an extraction unit (430) and a calculation unit (440); The acquisition unit (410) is used to convert an optical signal of an image acquired by the optical lens group (120) into a digital signal, the preprocessing unit (420) is used to perform denoising on the digital signal obtained by the acquisition unit (410), the extraction unit (430) is used to extract features related to the refractive index in the image processed by the preprocessing unit (420), and the calculation unit (440) calculates the refractive index of the inspection object using an interference method based on the feature data extracted by the extraction unit (430).

7. The optical system for improving A / K inspection accuracy according to claim 6, characterized in that: The steps of the calculation unit (440) calculating the refractive index of the inspection object using the interference method are as follows: S1. Establishing an interference optical path: allowing the light emitted by the aperture (140) to pass through the beam splitter (150) and be divided into reference light and measurement light. The reference light is directly irradiated onto one of the reflectors on the optical lens group (120) and then reflected back to the beam splitter (150). The measurement light passes through the inspection object and is irradiated onto another reflector and then reflected back to the beam splitter (150). S2, generating interference fringes: the reference light and the measuring light are reunited at the beam splitter (150), and the two light beams with different optical paths generate interference. The interference light is received by the controller (130), and the controller (130) converts the optical signal of the interference light into a digital signal; S3, data collection and processing: rotating the angle of the aperture (140), adjusting the incident angle in the light path, and collecting interference fringe images under different incident angle conditions; S4. Calculate the refractive index using the optical path difference formula based on the characteristic parameters of the interference fringe image.

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