Particle inspection system

Abstract

The invention provides a particle inspection system. In the system, a clean room assembly comprises a sealed room, an anti-static grid curtain and a chamber environment management module. And the particle inspection machine is arranged in the cavity of the sealing chamber and is used for inspecting the surface particle state of the glass to be inspected. A first automatic lifting door is mounted at the inlet of the sealing chamber; an air shower channel is arranged outside the sealing chamber; the anti-static grid curtain covers the outer side face of the sealing chamber. The chamber environment management module comprises an air adjusting unit, a sensing unit and a management unit, the air adjusting unit and the sensing unit are arranged in the chamber, and the air adjusting unit adjusts the air quality in the chamber of the sealed chamber; the sensing unit monitors environmental data in the chamber; the management unit correspondingly adjusts the working state of the air adjusting unit according to the environment data, so that the corresponding adjustment of the environment state in the chamber is realized, the air quality in the chamber is adjusted in real time, the influence of environment particles on the detection result is avoided, the detection accuracy is improved, and the yield of factory glass is improved.

Description

Technical Field

[0001] The invention relates to detection technology, and in particular to a particle inspection system. Background Art

[0002] In the production of high-precision glass, it is necessary to use a particle inspection machine to inspect the particle condition on the surface of the cleaned glass using the principle of dark field reflection detection. The particle inspection machine projects the light source obliquely onto the glass, captures the scattered light of the light source by the particles through the camera, and determines whether there are particles in the glass based on the intensity of the scattered light. During the detection process, the particle inspection camera is placed in a dark field. In the absence of scattered light from particles, the captured image is completely black. When there are particles, there will be white bright spots due to the presence of scattered light, and the size of the particles is calculated based on the brightness and area.

[0003] However, the inspection accuracy of the particle inspection machine will be reduced due to many influences of its surrounding environment (such as particles and dust in the environment, pressure fluctuations in the surrounding environment, etc.). Therefore, particle inspection of high-end glass is a technology that must be operated in a clean environment with reduced pollutants and particles.

[0004] The existing particle inspection system is unable to automatically and adaptively adjust the cleanliness of the inspection environment, resulting in low accuracy of the inspection results and affecting the yield rate of glass products. Summary of the invention

[0005] The present invention provides a particle inspection system to improve the accuracy of detection and the yield rate of factory-exported glass.

[0006] The present invention provides a particle inspection system, the particle inspection system comprising: a clean room component and a particle inspection machine;

[0007] The clean room assembly includes a sealed room, an anti-static mesh curtain and a chamber environment management module; the particle inspection machine is arranged in the chamber of the sealed room, and the particle inspection machine is used to inspect the surface particle state of the inspected glass by using the dark field reflection detection principle; an entrance is arranged on the side of the sealed room, a first automatic lifting door is installed on the entrance, and an air shower channel is arranged on the outer side of the first automatic lifting door;

[0008] The anti-static mesh curtain covers at least a portion of the outer side surface of the sealed chamber, and is used to prevent the sealed chamber from absorbing dust due to static electricity;

[0009] The chamber environment management module includes an air adjustment unit, a sensor unit and a management unit. The air adjustment unit and the sensor unit are respectively arranged in the chamber of the sealed chamber, and the air adjustment unit is used to adjust the air quality in the chamber of the sealed chamber; the sensor unit is used to monitor the environmental data in the chamber; the management unit is respectively communicated with the air adjustment unit and the sensor unit, and the management unit is used to adjust the working state of the air adjustment unit according to the environmental data.

[0010] Optionally, the sensing unit includes a temperature sensor, a humidity sensor, an air pressure sensor and a first particle counter arranged in the chamber of the sealed chamber; correspondingly, the environmental data includes the temperature, humidity, air pressure and the number of particles in the internal environment in the chamber of the sealed chamber;

[0011] The management unit is respectively connected to the temperature sensor, the humidity sensor, the air pressure sensor and the first particle counter for communication, and is also used to analyze the influence of temperature, humidity and air pressure on the number of particles in the internal environment based on multiple sets of temperature, humidity, air pressure and number of particles in the internal environment stored locally in the sealed chamber.

[0012] Optionally, the chamber environment management module further includes an information input unit, and the information input unit is used to input corresponding information according to the user's operation;

[0013] The management unit is connected to the information input unit, and is also used to trace back and query the temperature, humidity, air pressure and number of internal environmental particles of the factory glass during the inspection process based on the identity information of the factory glass input by the user and the particle data of the factory glass during the application process according to the identity information, and analyze the influence of the environmental data on the quality of the factory glass in combination with the particle data of the factory glass and the temperature, humidity, air pressure and number of environmental particles corresponding to the inspection process.

[0014] Optionally, the management unit is further configured to determine a cleanliness level in the chamber according to the number of environmental particles, and generate an alarm signal when the cleanliness level exceeds a threshold.

[0015] Optionally, the chamber environment management module further includes an information display device;

[0016] The information display device is arranged on the outer surface of the sealed chamber, the display device is in communication connection with the sensor unit, and the information display device is used for displaying the environmental data and the alarm prompt signal in the chamber in real time.

[0017] Optionally, an outlet is further provided on the side wall of the sealed chamber, and a second automatic lifting door is installed on the outlet;

[0018] The clean room assembly further includes a second particle counter and a third particle counter; the second particle counter is arranged near the entrance outside the sealed room, and is used to collect the number of particles in the entrance environment of the sealed room; the third particle counter is arranged near the exit outside the sealed room, and is used to collect the number of particles in the exit environment of the sealed room;

[0019] The management unit is further used to adjust the working state of the air adjustment unit according to the number of particles in the inlet environment and the number of particles in the outlet environment.

[0020] Optionally, at least one observation window is also provided on the side wall of the sealed chamber.

[0021] Optionally, the air conditioning unit includes at least one air supply filter device;

[0022] The air supply filter device is arranged on the top of the sealed chamber, and is used to inhale air from outside the chamber and transmit the air into the chamber after filtering;

[0023] The clean room assembly further comprises an elevated floor, the sealed room is further provided with a return air interlayer, the elevated floor is laid in the chamber, the return air interlayer is provided between a part of the inner wall of the chamber of the sealed room and the sealed room shell, is communicated with the chamber under the elevated floor, and is also communicated with the air supply filter device;

[0024] The air filtered by the air supply filter device and pushed into the chamber flows vertically through the chamber from top to bottom and passes through the elevated floor and the return air interlayer in sequence before being discharged from the sealed chamber, thereby forming a positive pressure in the chamber.

[0025] Optionally, the air conditioning unit further includes a temperature and humidity conditioning device, which is disposed in the chamber of the sealed chamber and is used to adjust the temperature and humidity in the chamber.

[0026] Optionally, there are multiple air supply filter devices, and the multiple air supply filter devices are arranged in an array on the top of the sealed chamber.

[0027] The particle inspection system provided by the embodiment of the present invention includes a clean room component and a particle inspection machine. The clean room component includes a sealed room, an anti-static mesh curtain and a chamber environment management module; the particle inspection machine is arranged in the chamber of the sealed room, and the particle inspection machine is used to inspect the surface particle state of the inspected glass using the dark field reflection detection principle; an entrance is arranged on the side of the sealed room, and a first automatic lifting door is installed on the entrance, and an air shower channel is arranged outside the first automatic lifting door. The anti-static mesh curtain covers at least part of the outer side of the sealed room to prevent the sealed room from absorbing dust due to static electricity. The chamber environment management module includes an air adjustment unit, a sensor unit and a management unit. The air adjustment unit and the sensor unit are respectively arranged in the chamber of the sealed chamber. The air adjustment unit is used to adjust the air quality in the chamber of the sealed chamber; the sensor unit is used to monitor the environmental data in the chamber; the management unit is communicated with the air adjustment unit and the sensor unit respectively, and the management unit is used to adjust the working state of the air adjustment unit according to the environmental data, thereby realizing the corresponding adjustment of the environmental state in the chamber, adjusting the air quality in the chamber in real time, avoiding the influence of particles in the environment on the detection results, improving the accuracy of the detection results and improving the yield rate of factory glass.

[0028] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0030] Figure 1 A schematic diagram of the structure of a particle inspection system provided by an embodiment of the present invention;

[0031] Figure 2 A schematic diagram of the structure of another particle inspection system provided by an embodiment of the present invention;

[0032] Figure 3 A schematic diagram of the positional relationship between a chamber inner wall, a sealed housing, a return air interlayer and other related facilities in the chamber provided in an embodiment of the present invention;

[0033] Figure 4 A point diagram showing the relationship between temperature, humidity and air pressure and the number of particles in the internal environment provided by an embodiment of the present invention;

[0034] Figure 5A schematic diagram of the structure of another particle inspection system provided by an embodiment of the present invention;

[0035] Figure 6 A schematic diagram of a daily display page of an information display device provided by an embodiment of the present invention;

[0036] Figure 7 A schematic diagram of a query display page of an information display device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0038] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0039] In order to solve the problem mentioned in the background technology, an embodiment of the present invention provides a particle inspection system. Figure 1 FIG. 1 is a schematic diagram of a particle inspection system according to an embodiment of the present invention. In the figure, the invisible components of the surface of the sealed chamber cavity are shown with dotted lines. Figure 1The particle inspection system 100 includes a clean room component and a particle inspection machine 101. The clean room component includes a sealed room 102, an antistatic mesh curtain 103 and a chamber environment management module 104; the particle inspection machine 101 is arranged in the chamber of the sealed room 102, and the particle inspection machine 101 is used to inspect the surface particle state of the inspected glass using the dark field reflection detection principle; an entrance 108 is arranged on the side of the sealed room 102, and a first automatic lifting door 109 is installed on the entrance 108, and an air shower channel 111 is arranged outside the first automatic lifting door 109. The antistatic mesh curtain 103 covers at least part of the outer side of the sealed room 102, and is used to prevent the sealed room 102 from absorbing dust due to static electricity. The chamber environment management module 104 includes an air adjustment unit 105, a sensor unit 106 and a management unit 107, and the air adjustment unit 105 and the sensor unit 106 are respectively arranged in the chamber of the sealed room 102, and the air adjustment unit 105 is used to adjust the air quality in the chamber of the sealed room 102. The sensing unit 106 is used to monitor the environmental data in the chamber; the management unit 107 is respectively connected to the air adjustment unit 105 and the sensing unit 106 for communication, and the management unit 107 is used to adjust the working state of the air adjustment unit 105 according to the environmental data.

[0040] Specifically, dark field reflection detection is an optical detection method. In this detection method, the light source is irradiated on the surface of the glass to be inspected at a certain angle, and the light will be scattered when it encounters particles on the glass surface. Unlike bright field illumination, the normal reflected light from the glass surface is suppressed under dark field illumination, while the light scattered by the particles can be captured by the detector. This scattered light signal is related to factors such as the size, shape, material and position of the particles on the glass surface. For example, larger particles usually produce stronger scattered light because they block and scatter light more obviously. The particle inspection machine 101 is based on the principle of dark field reflection detection and uses an optical system and a detector to detect particles on the glass surface.

[0041] The particle inspection machine 101 may include a light source, an optical focusing and imaging device, a detector, and a data processing device. The light source provides light of a specific angle and intensity to the inspected glass. After the light is irradiated onto the surface of the inspected glass, the optical focusing and imaging device focuses the light scattered by the particles and images it on the detector. The detector converts the optical signal into an electrical signal, and the data processing device analyzes and processes the electrical signals to determine the state of the particles on the glass surface, and then counts the size of the particles on the inspected glass, the number of particles of each size, and the distribution range. Exemplarily, the light source in the particle inspection machine 101 may include an LED light source and / or a laser light source, the optical focusing and imaging device may include optical elements such as an objective lens and an eyepiece, the detector may include a photomultiplier tube and / or a charge-coupled device, and the data processing device may include a signal amplification circuit, a signal filtering circuit, a digital processing circuit, and a data analysis circuit.

[0042] The sealed chamber 102 is a highly sealed space structure, which provides a chamber as a working space for the particle inspection machine 101 inside, preventing external pollutants from entering the chamber and affecting the inspection accuracy of the particle inspection machine 101. Exemplarily, the shell of the sealed chamber 102 can be made of one or more of rigid metal, glass or hard plastic. The shell of the sealed chamber 102 can be a detachable design, and its top, bottom, sides and other functional components such as doors and windows can be assembled to form the shell of the sealed chamber 102. Sealing strips can be provided at the assembly joints to prevent external pollutants from entering the shell. This detachable design facilitates daily maintenance, equipment inspection and cleaning. The shell of the sealed chamber 102 can also be a whole, and its top, bottom and sides can be integrally formed or welded together, and then assembled with other functional components such as doors and windows. This integrally formed design greatly reduces the number of seams on the shell, avoids the use of sealing strips, and greatly reduces the later maintenance workload of the sealed chamber 102. In addition, the reduction of seams reduces the possibility of dust entering the chamber from the seams, and increases the cleaning reliability in the sealed chamber 102. At least one observation window 110 may also be provided on the side wall of the sealed chamber 102 for the staff to monitor the working status of the particle inspection machine 101 at all times.

[0043] An entrance 108 is provided on the side of the sealed chamber 102. The entrance 108 is an opening for the inspected glass to enter the chamber. A first automatic lifting door 109 is provided on the entrance 108, and an air shower channel is provided outside the first automatic lifting door 109. The air shower channel 111 is an air purification device at the entrance 108, also known as an air shower room, which is provided on the necessary path for the inspected glass to enter the sealed chamber outside the first automatic lifting door 109. The strong clean airflow blows away pollutants such as dust and particles attached to the surface of the inspected glass, thereby reducing the number of pollutants entering the sealed chamber 102.

[0044] Exemplarily, the air shower channel 111 may be provided with a channel housing, a fan, an air filter, a nozzle and a channel door. Only one channel door may be provided, which is provided at the channel opening on the air shower channel 111 away from the entrance 108 of the sealed chamber 102, and a first automatic lifting door 109 is provided at the channel opening connected to the sealed chamber 102. The first automatic lifting door 109 and the channel door may be logically interlocked by an electronic interlocking system, that is, when the air shower program is started, the channel door and the first automatic lifting door 109 cannot be opened, and the first automatic lifting door 109 can only be opened after the air shower is finished, so that the inspected glass that has not been air showered can be prevented from entering the chamber. The channel housing of the air shower channel 111 may be made of materials such as stainless steel or cold-rolled steel plate spraying, and the channel housing may be a square or arched shell, and the cross-section of the channel may be adapted to the passage requirements of the inspected glass. The fan is the power core of the air shower channel, which can provide flow power for clean air, and the fan may be a centrifugal fan or an axial flow fan. The air filter can be a high-efficiency filter, also known as HEPA, installed at the air outlet of the fan to filter dust particles in the air output by the fan. The nozzle is connected to the fan to evenly eject the air output by the fan. Multiple nozzles can be set and distributed at multiple locations such as the top and both sides of the air shower channel. The distribution needs to ensure that the ejected airflow can evenly cover the surface of the inspected glass. The material of the nozzle can be stainless steel or engineering plastics, and the design of the caliber and angle can ensure that the ejected clean air can form an effective blowing airflow.

[0045] After the fan of the air shower channel 111 is started, the clean air filtered by the high-efficiency filter will be blown to the surface of the glass to be inspected passing through the air shower channel 111 at a high speed (for example, a wind speed of 20 to 30 m / s). This high-speed airflow can cause dust particles to detach from the surface of the object and be carried by the airflow into the return air port at the bottom of the channel. The air at the return air port can be blown out again by the fan after being circulated and filtered, thereby realizing the circulation and purification of the air.

[0046] The antistatic mesh curtain 103 is a curtain woven from a material containing antistatic fibers, and the surface has a grid-like appearance structure, wherein the antistatic fibers can be fibers made by adding antistatic agents to synthetic fibers, or fibers that are conductive in themselves, such as carbon fibers and metal fibers. The antistatic mesh curtain 103 can cover at least part of the outer side of the sealed chamber 102 and the channel door of the air shower channel. The antistatic mesh curtain 103 at least covers the various assembly gaps, door gaps and window gaps on the shell of the sealed chamber 102 and the air shower channel to prevent static electricity from adsorbing dust, particles and dirt during the operation of the equipment, thereby causing pollution to the inspected glass or causing pollution to the chamber or the air shower channel. Exemplarily, a conveyor belt can be provided in the air shower channel and the chamber to realize the flow transportation of the inspected glass. When the inspected glass enters the air shower channel through the channel door, the antistatic mesh curtain 103 provided at the channel door can sweep (can directly contact and sweep or sweep through in the air at a very small distance) the inspected glass to remove the static electricity on the inspected glass.

[0047] The chamber environment management module 104 refers to a set of devices for monitoring, adjusting and managing the environmental parameters in the chamber, which includes an air adjustment unit 105, a sensor unit 106 and a management unit 107. The air adjustment unit 105 refers to an air quality adjustment device arranged in the chamber. Exemplarily, the air adjustment unit 105 may include an air filter device, which may filter particles and pollutants in the air entering the chamber to adjust the air quality in the chamber. As a preferred example, in addition to the air filter device, the air filter device may also include at least one of a humidifier, an air conditioner and an air pressure adjustment valve to adjust the humidity, temperature and air pressure of the chamber accordingly.

[0048] The sensing unit 106 refers to an environmental data acquisition component arranged in the chamber, wherein environmental data refers to data that can indicate the state of the environment and air. The environmental data may include parameters such as the number of particles, temperature, humidity and air pressure in the environment. Exemplarily, the sensing unit 106 may include a particle counter, a temperature sensor, a humidity sensor, and an air pressure sensor.

[0049] The management unit 107 refers to a data management center and a state control center that processes, stores, applies, analyzes, and adjusts the environmental data in the chamber. For example, the management unit 107 may include at least one of a server, a microprocessor, a data analysis and processing chip, and a single-chip microcomputer. The management unit 107 may adjust the working state of the air adjustment unit 105 according to the environmental data. For example, when the number of particles in the chamber is detected to exceed a threshold, the management unit 107 may send an instruction signal to the air adjustment unit 105 to increase the air filtering power, so as to control the air filtering device in the air adjustment unit 105 to increase the working power or increase the filtering level.

[0050] The particle inspection system provided in this embodiment includes a clean room component and a particle inspection machine. The clean room component includes a sealed room, an anti-static mesh curtain and a chamber environment management module; the particle inspection machine is arranged in the chamber of the sealed room, and the particle inspection machine is used to inspect the surface particle state of the inspected glass using the dark field reflection detection principle; an entrance is arranged on the side of the sealed room, and a first automatic lifting door is installed on the entrance, and an air shower channel is arranged outside the first automatic lifting door. The anti-static mesh curtain covers at least part of the outer side of the sealed room to prevent the sealed room from absorbing dust due to static electricity. The chamber environment management module includes an air adjustment unit, a sensor unit and a management unit. The air adjustment unit and the sensor unit are respectively arranged in the chamber of the sealed chamber. The air adjustment unit is used to adjust the air quality in the chamber of the sealed chamber; the sensor unit is used to monitor the environmental data in the chamber; the management unit is communicated with the air adjustment unit and the sensor unit respectively, and the management unit is used to adjust the working state of the air adjustment unit according to the environmental data, thereby realizing the corresponding adjustment of the environmental state in the chamber, adjusting the air quality in the chamber in real time, avoiding the influence of particles in the environment on the detection results, improving the accuracy of the detection results and improving the yield rate of factory glass.

[0051] Optionally, Figure 2 A schematic diagram of the structure of another particle inspection system provided by an embodiment of the present invention, Figure 3 A schematic diagram of the positional relationship between the chamber inner wall, the sealed housing, the return air interlayer and other related facilities in the chamber provided in an embodiment of the present invention, based on the above-mentioned embodiment, combined with Figure 2 and Figure 3 The sensing unit 106 includes a temperature sensor a, a humidity sensor b, an air pressure sensor c and a first particle counter d arranged in the chamber of the sealed chamber 102; correspondingly, the environmental data includes the temperature, humidity, air pressure and the number of particles in the internal environment in the chamber of the sealed chamber 102. The management unit 107 is respectively connected to the temperature sensor a, the humidity sensor b, the air pressure sensor c and the first particle counter d for communication. The management unit 107 is also used to analyze the influence of temperature, humidity and air pressure on the number of particles in the internal environment according to the multiple sets of temperature, humidity, air pressure and the number of particles in the internal environment in the chamber of the sealed chamber 102 stored locally.

[0052] Specifically, the temperature sensor a is a sensor for measuring the ambient temperature in the chamber. It can sense the ambient temperature in the chamber and convert this temperature change into an electrical signal or other signal that can be recognized by the management unit 107, so as to facilitate subsequent monitoring, recording and control operations. The temperature sensor a can be made based on the thermal resistor principle, the thermocouple principle or the semiconductor junction temperature characteristics. The temperature sensor a can be a digital ambient temperature sensor a, which has an internal integrated analog-to-digital conversion circuit, as well as other functional circuits such as temperature compensation and calibration. It can directly output a digital signal and communicate with the management unit 107 through a digital interface to realize the reporting of the ambient temperature in the chamber. Exemplarily, the temperature sensor a can be set near the particle inspection machine 101 in the chamber to fully detect the ambient temperature of the inspected glass during the inspection process and report it to the management unit 107.

[0053] Similar to the temperature sensor a, the humidity sensor b is a device for measuring the water vapor content in the chamber environment. It can sense humidity-related parameters such as the partial pressure of water vapor or relative humidity in the air in the chamber, and convert this information into electrical signals or other signals that can be processed and recorded by the management unit 107, thereby realizing the monitoring of the environmental humidity in the chamber. The humidity sensor b can be a capacitive humidity sensor b, a resistive humidity sensor b, or a thermal conductivity air sensor, and can also be an analog humidity sensor b or a digital humidity sensor b. Exemplarily, the humidity sensor b can be set near the particle inspection machine 101 in the chamber to fully detect the environmental humidity of the inspected glass during the inspection process and report it to the management unit 107.

[0054] The air pressure sensor c is a device for measuring the atmospheric pressure in the chamber. It can convert the physical quantity of air pressure into an electrical signal, a digital signal or other signal forms that can be recognized by the management unit 107, so as to realize the monitoring of air pressure changes and data output. The air pressure sensor c can be a piezoresistive air pressure sensor c, a capacitive air pressure sensor c or a piezoelectric air pressure sensor c, and can also be an absolute air pressure sensor c or a relative air pressure sensor c. Exemplarily, the air pressure sensor c can be arranged near the particle inspection machine 101 in the chamber to fully detect the absolute air pressure or relative air pressure of the environment of the inspected glass during the inspection process, and report it to the management unit 107.

[0055] The first particle counter d refers to an instrument used to detect and count the number of solid particles in the environment in the chamber. It can accurately detect tiny particles and can classify and count them according to the size, shape, distribution and other characteristics of the particles. The first particle counter d may include a sampling circuit, a detection circuit and a signal processing circuit. The sampling circuit can obtain samples from the environment and transport the samples to the inside of the sensor for detection. The detection circuit counts and counts the collected samples. The signal processing circuit is connected to the detection circuit, and can receive the electrical signal from the detection circuit, amplify, filter and digitize it, and convert the electrical signal into information such as the size, number (that is, the number of particles in the internal environment), and distribution of the particles through a pre-set algorithm. The first particle counter d can use light scattering or image analysis to identify, classify and count the particles in the air in the chamber.

[0056] Figure 4 A relationship diagram between temperature, humidity and air pressure and the number of particles in the internal environment provided by the embodiment of the present invention, combined with Figure 2 , Figure 3 and Figure 4 The management unit 107 also has an internal environment impact analysis function and a storage function. On the one hand, the management unit 107 can store the temperature, humidity, air pressure and internal environment particle data acquired in real time, wherein the internal environment particle data includes the number of internal environment particles. On the other hand, the management unit 107 can also use the control variable method to analyze the influence of temperature, humidity and air pressure on the number of internal environment particles based on multiple sets of temperature, humidity, air pressure and internal environment particle numbers in the sealed chamber 102 chamber stored locally under the same power of the air filter device, wherein a set of data includes temperature, humidity, air pressure and internal environment particle number at the same collection time. For example, according to multiple sets of environmental data with the same temperature and humidity but different air pressures, a point graph with air pressure on the horizontal axis and the number of internal environment particles on the vertical axis is drawn, and the influence of air pressure on the number of internal environment particles is determined according to the distribution law of the data points, wherein the influence of air pressure on the number of internal environment particles can be positively correlated, negatively correlated or no influence.

[0057] Continue to combine Figure 2 and Figure 3The air conditioning unit 105 includes a temperature and humidity conditioning device 201 and at least one air supply filter device 202. The temperature and humidity conditioning device 201 is disposed in the chamber of the sealed chamber 102, and the temperature and humidity conditioning device 201 is used to adjust the temperature and humidity in the chamber. The air supply filter device 202 is disposed at the top of the sealed chamber 102, and the air supply filter device 202 is used to inhale air from outside the chamber and filter the air before transporting it into the chamber. The clean room assembly also includes an elevated floor 301 and a return air interlayer 302. The elevated floor 301 is laid in the chamber, and the return air interlayer 302 is disposed between a portion of the inner wall 305 of the chamber 304 and the sealed chamber shell 303, and is connected to the chamber 304 under the elevated floor 301, and is also connected to the air supply filter device 202. The air filtered by the air supply filter device 202 and pushed into the chamber 304 flows vertically from top to bottom through the chamber 304 and passes through the elevated floor 301 and the return air interlayer 302 in sequence before being discharged from the sealed chamber, forming a positive pressure in the chamber 304 .

[0058] Specifically, the temperature and humidity adjustment device 201 refers to an environmental regulating device for adjusting the ambient temperature and humidity in the chamber. Exemplarily, the temperature and humidity adjustment device 201 may include at least one of an air conditioner, a dehumidifier and a humidifier. The temperature and humidity adjustment device 201 may change the temperature and humidity state of the environment in the chamber according to the set target temperature and humidity values ​​through various physical or chemical adjustment methods, so that the ambient temperature and humidity requirements of the special particle inspection in the chamber are met.

[0059] The air supply filter device 202 is a key device in the clean room component to ensure the air quality in the chamber. Its main function is to filter and purify the air entering the chamber, remove dust particles, microorganisms, harmful gases and other pollutants in the air, and provide the chamber with clean air that meets the cleanliness level requirements. Exemplarily, the core filter component of the air supply filter device 202 can be a high-efficiency filter (also called a HEPA filter) or an ultra-high-efficiency filter (also called an ULPA filter). In addition, the air supply filter device 202 can also include an air inlet, a pre-filter, a medium-efficiency filter, a fan, a static pressure box and an air outlet arranged on the inner side of the chamber top of the sealed chamber 102. After the fan is started, the suction force generated causes the air outside the chamber to enter the air supply filter device 202 through the air inlet. The air first passes through the pre-filter, and large particles of pollutants are intercepted. Then, the air enters the medium-efficiency filter to further remove particles of medium particle size. Next, the air passes through a high-efficiency or ultra-high-efficiency filter, and almost all tiny dust particles and microorganisms are filtered out. In this process, the static pressure box makes the air static pressure uniform, and finally, the clean air is sent into the chamber through the air outlet. The air thrust provided by the fan is from the top of the chamber to the bottom of the chamber, forming an airflow that flows through the chamber from top to bottom perpendicular to the bottom surface, forming a positive pressure in the chamber. There can be multiple air supply filter devices 202, which are arranged in an array at the top of the chamber. In the case where there is only one air supply filter device 202, there can be multiple high-efficiency filters in the air supply filter device 202, which are arranged in an array at the top of the chamber.

[0060] The elevated floor 301 may include a hollow floor body and an overhead bracket, wherein the overhead bracket is arranged under the hollow floor to raise the hollow floor, so that the particle inspection machine 101 placed on the floor can be raised relative to the bottom surface of the chamber 304, so that the clean air provided by the air supply filter device 202 perpendicular to the bottom surface of the chamber passes through the hollow floor body after passing through the inspected glass, enters the return air interlayer 302 from under the elevated floor 301, and then returns to the air supply filter device 202 at the top of the chamber 304, and is finally discharged from the chamber 304, so that the airflow completes an upward circulation in the return air interlayer 302, preventing the return air flow from causing a directional deviation to the vertically downward clean air in the chamber 304, which can complete the airflow circulation and bring the particles in the chamber 304 out of the chamber 304 in a single phase, preventing the airflow after flowing through the chamber 304 from blowing back the glass to cause an increase in particles, thereby further increasing the accuracy of the inspection.

[0061] The return air interlayer 302 is a special space structure located between the top and side of the chamber 304 and the corresponding sealed chamber shell. It is mainly used for collecting and conveying the return air in the chamber 304 and is an important part of the clean room air conditioning and ventilation technology. Exemplarily, the return air interlayer 304 can be set between a part of the inner wall 302 of the chamber 304 and the sealed chamber shell 303 at the corresponding position. It is a cavity set between the inner wall of the chamber 304 and the sealed chamber shell 303. The cavity is at the bottom of the chamber, that is, under the elevated floor 301, and is connected to the chamber 304. The bottom surface under the elevated floor 301 can be provided with openings such as return air louvers or grids to facilitate air to enter the return air interlayer 302 from under the elevated floor 301. In the vertical unidirectional air chamber 304, a high efficiency filter is installed on the top of the chamber 304, and the clean air is blown vertically downward. After passing through the working area, the air carries pollutants such as dust particles in the working area and is collected by the return air outlet under the elevated floor 301 on the floor of the chamber 304 and enters the return air interlayer 302. The air entering the return air interlayer 302 will be guided back to the air supply filter device 202 at the top of the chamber in this relatively closed space. The design of the return air interlayer 302 can make the return air converge more evenly, avoiding the situation where the local return air is not smooth and there are more local particles affecting the detection results.

[0062] In the particle inspection system provided in this embodiment, the sensing unit includes a temperature sensor, a humidity sensor, an air pressure sensor and a first particle counter arranged in the chamber of the sealed room. The management unit is respectively connected to the temperature sensor, the humidity sensor, the air pressure sensor and the first particle counter for communication, and the management unit is also used to analyze the influence of temperature, humidity and air pressure on the number of particles in the internal environment according to the temperature, humidity, air pressure and the number of particles in the internal environment of the multiple groups of sealed chambers stored locally. The air adjustment unit includes a temperature and humidity adjustment device and at least one air supply filter device. The air supply filter device is arranged at the top of the sealed room, and the air supply filter device is used to inhale air from the outside of the chamber and transport the air into the chamber after filtering. The particle inspection system also includes an elevated floor, and the sealed room is also provided with a return air interlayer, the elevated floor is laid in the chamber, and the return air interlayer is arranged between part of the inner wall of the chamber of the sealed room and the outer shell of the sealed room, and is connected to the chamber under the elevated floor, and is also connected to the air supply filter device. The air filtered by the air supply filter device and pushed into the chamber flows vertically through the chamber from top to bottom and passes through the elevated floor and the return air interlayer in turn before being discharged from the sealed chamber, forming a positive pressure in the chamber, achieving air purification and circulation in the chamber, improving the cleanliness of the working area of ​​the particle inspection machine, and improving the accuracy of the test results.

[0063] Optionally, Figure 5 A schematic diagram of a particle inspection system according to an embodiment of the present invention is provided. Figure 5The chamber environment management module 104 also includes an information input unit, which is used to input corresponding information according to the user's operation. The management unit 107 is connected to the information input unit, and is also used to trace and query the temperature, humidity, air pressure and number of particles in the internal environment of the factory glass during the inspection process according to the identity information of the factory glass input by the user and its particle data during the application process, and analyze the influence of environmental data on the quality of the factory glass in combination with the particle data of the factory glass and its corresponding temperature, humidity, air pressure and number of particles in the environment during the inspection process.

[0064] Specifically, the information input unit is a device that inputs corresponding information to the management unit 107 according to the user operation. Exemplarily, the information input unit may include at least one of a keyboard, a mouse, a touch screen, and a voice input component. When the user needs to query the data stored locally in the management unit 107 or needs to control the management unit 107 to perform a certain task, the user may use the information input unit to input corresponding information to the management unit 107, wherein the corresponding information input by the user may include the identity information of the factory glass and the quality influencing factor determination signal. After receiving the identity information of the factory glass, the particle data of the factory glass during the application process, and the quality influencing factor determination signal, the management unit 107 may trace back and query the corresponding temperature, humidity, air pressure, and number of environmental particles of the factory glass during the inspection process according to the identity information of the factory glass, and then analyze the influence of environmental data on the quality of the factory glass according to the temperature, humidity, air pressure, and number of environmental particles of the factory glass during the inspection process, combined with the particle data of the factory glass during the application process. For example, when the particle data of the factory glass shows that the particles exceed the standard, the management unit 107 can analyze whether the temperature, humidity, air pressure and number of environmental particles corresponding to the factory glass during the inspection process do not meet the inspection regulations. If so, it can be determined that the non-compliant environmental data can be one of the reasons why the factory glass exceeds the standard.

[0065] Figure 6 A schematic diagram of a daily display page of an information display device provided by an embodiment of the present invention, Figure 7 A schematic diagram of a query display page of an information display device provided by an embodiment of the present invention, combined with Figure 5 , Figure 6 and Figure 7The chamber environment management module 104 further includes an information display device 403. For example, the information display device 403 may be a display screen or a touch screen integrated with the server, or a display panel separately arranged on the outer wall of the sealed chamber. The information display device 403 is respectively connected to the sensing unit 106 and the management unit 107 for communication. The information display device 403 may display the real-time environment data and the historical environment data in the chamber, or may display the environment data meeting the conditions according to the query signal input by the user through the information input unit or the touch device, and may also highlight the alarm signal when the cleanliness in the chamber exceeds the set cleanliness level.

[0066] The management unit 107 is also used to determine the cleanliness level in the chamber according to the number of environmental particles. For example, if the number of environmental particles with a diameter greater than a preset value in the chamber is within a particle number range corresponding to a cleanliness level, the current cleanliness level of the chamber is determined to be equal to the corresponding level. In addition, when the cleanliness level exceeds the threshold, the management unit 107 can also generate an alarm prompt signal and send it to the device carried by the on-duty personnel or directly highlight it on the information display device.

[0067] An outlet 401 is also provided on the side wall of the sealed chamber 102, and a second automatic lifting door 402 is installed on the outlet 401. The second automatic lifting door 402 can be automatically opened when the inspected glass is inspected and approaches, and automatically closed after the inspected glass is completely out of the chamber. The clean room component can also include a second particle counter and a third particle counter. The second particle counter is arranged near the entrance 108 outside the sealed chamber 102, and is used to collect the number of environmental particles at the entrance 108 of the sealed chamber 102. The third particle counter is arranged near the exit outside the sealed chamber 102, and is used to collect the number of environmental particles at the exit of the sealed chamber 102. The management unit 107 is also used to adjust the working state of the air adjustment unit 105 according to the number of environmental particles at the entrance 108 and the number of environmental particles at the exit. For example, the management unit 107 can increase the purification power of the air supply filter device 202 in the air adjustment unit 105 when the number of particles at the exit and / or entrance 108 of the chamber exceeds the preset value, so as to prevent the inlet and outlet particles from affecting the air quality in the chamber, and further improve the accuracy of the inspection.

[0068] The particle inspection system provided by the present invention includes a clean room component and a particle inspection machine. The clean room component includes a sealed room, an anti-static mesh curtain and a chamber environment management module; the particle inspection machine is arranged in the chamber of the sealed room, and the particle inspection machine is used to inspect the surface particle state of the inspected glass using the dark field reflection detection principle; an entrance is arranged on the side of the sealed room, a first automatic lifting door is installed on the entrance, and an air shower channel is arranged outside the first automatic lifting door. The anti-static mesh curtain covers at least part of the outer side of the sealed room, and is used to prevent the sealed room from absorbing dust due to static electricity. The chamber environment management module includes an air adjustment unit, a sensor unit and a management unit. The air adjustment unit and the sensor unit are respectively arranged in the chamber of the sealed chamber. The air adjustment unit is used to adjust the air quality in the chamber of the sealed chamber; the sensor unit is used to monitor the environmental data in the chamber; the management unit is communicated with the air adjustment unit and the sensor unit respectively, and the management unit is used to adjust the working state of the air adjustment unit according to the environmental data, thereby realizing the corresponding adjustment of the environmental state in the chamber, adjusting the air quality in the chamber in real time, avoiding the influence of particles in the environment on the detection results, improving the accuracy of the detection results and improving the yield rate of factory glass.

[0069] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A particle inspection system, characterized in that: include: cleanroom component and particle inspection machines; The clean room assembly includes a sealed room, an anti-static mesh curtain and a chamber environment management module; the particle inspection machine is arranged in the chamber of the sealed room, and the particle inspection machine is used to inspect the surface particle state of the inspected glass by using the dark field reflection detection principle; an entrance is arranged on the side of the sealed room, a first automatic lifting door is installed on the entrance, and an air shower channel is arranged on the outer side of the first automatic lifting door; The anti-static mesh curtain covers at least a portion of the outer side surface of the sealed chamber, and is used to prevent the sealed chamber from absorbing dust due to static electricity; The chamber environment management module includes an air adjustment unit, a sensor unit and a management unit. The air adjustment unit and the sensor unit are respectively arranged in the chamber of the sealed chamber, and the air adjustment unit is used to adjust the air quality in the chamber of the sealed chamber; the sensor unit is used to monitor the environmental data in the chamber; the management unit is respectively communicated with the air adjustment unit and the sensor unit, and the management unit is used to adjust the working state of the air adjustment unit according to the environmental data.

2. The particle inspection system according to claim 1, characterized in that: The sensing unit includes a temperature sensor, a humidity sensor, an air pressure sensor and a first particle counter arranged in the chamber of the sealed chamber; correspondingly, the environmental data includes the temperature, humidity, air pressure and the number of particles in the internal environment of the sealed chamber; The management unit is respectively connected to the temperature sensor, the humidity sensor, the air pressure sensor and the first particle counter for communication, and is also used to analyze the influence of temperature, humidity and air pressure on the number of particles in the internal environment based on multiple sets of temperature, humidity, air pressure and number of particles in the internal environment stored locally in the sealed chamber.

3. The particle inspection system according to claim 2, characterized in that: The chamber environment management module further includes an information input unit, and the information input unit is used to input corresponding information according to the user's operation; The management unit is connected to the information input unit, and is also used to trace back and query the temperature, humidity, air pressure and number of internal environmental particles of the factory glass during the inspection process based on the identity information of the factory glass input by the user and the particle data of the factory glass during the application process according to the identity information, and analyze the influence of the environmental data on the quality of the factory glass in combination with the particle data of the factory glass and the temperature, humidity, air pressure and number of environmental particles corresponding to the inspection process.

4. The particle inspection system according to claim 2, characterized in that: The management unit is further used to determine the cleanliness level in the chamber according to the number of environmental particles, and to generate an alarm signal when the cleanliness level exceeds a threshold.

5. The particle inspection system according to claim 4, characterized in that: The chamber environment management module further includes: an information display device; The information display device is arranged on the outer surface of the sealed chamber, the display device is in communication connection with the sensor unit, and the information display device is used for displaying the environmental data and the alarm prompt signal in the chamber in real time.

6. The particle inspection system according to claim 1, characterized in that: An exit is also provided on the side wall of the sealed chamber, and a second automatic lifting door is installed on the exit; The clean room assembly further includes a second particle counter and a third particle counter; the second particle counter is arranged near the entrance outside the sealed room, and is used to collect the number of particles in the entrance environment of the sealed room; the third particle counter is arranged near the exit outside the sealed room, and is used to collect the number of particles in the exit environment of the sealed room; The management unit is further used to adjust the working state of the air adjustment unit according to the number of particles in the inlet environment and the number of particles in the outlet environment.

7. The particle inspection system according to claim 1, characterized in that: At least one observation window is also arranged on the side wall of the sealed chamber.

8. The particle inspection system according to claim 1, characterized in that: The air conditioning unit includes at least one air supply filter device; The air supply filter device is arranged on the top of the sealed chamber, and is used to inhale air from outside the chamber and transmit the air into the chamber after filtering; The clean room assembly further comprises an elevated floor, the sealed room is further provided with a return air interlayer, the elevated floor is laid in the chamber, the return air interlayer is provided between a part of the inner wall of the chamber of the sealed room and the sealed room shell, is communicated with the chamber under the elevated floor, and is also communicated with the air supply filter device; The air filtered by the air supply filter device and pushed into the chamber flows vertically through the chamber from top to bottom and passes through the elevated floor and the return air interlayer in sequence before being discharged from the sealed chamber, thereby forming a positive pressure in the chamber.

9. The particle inspection system according to claim 8, characterized in that: The air conditioning unit further comprises a temperature and humidity conditioning device, which is disposed in the chamber of the sealed room and is used to adjust the temperature and humidity in the chamber.

10. The particle inspection system according to claim 8, characterized in that: There are multiple air supply filter devices, and multiple air supply filter devices are arranged in an array on the top of the sealed chamber.

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