Optical measurement device and method

Abstract

The invention discloses an optical measurement device and method, and relates to the technical field of optical measurement. The optical measurement device comprises a loading assembly used for driving a to-be-measured sample to rotate and adjusting the pose of the to-be-measured sample, and the to-be-measured sample is a lens; the detection assembly is used for outputting the first measurement light and obtaining target detection information according to the received detection light, and the target detection information comprises one of eccentricity detection information and modulation transfer function detection information; the conversion assembly comprises a light through hole structure and at least one first focusing objective lens, the conversion assembly is used for controlling a target structure to be located on an output light path of the detection assembly, and the target structure comprises the light through hole structure and one of the first focusing objective lenses; and the imaging assembly is used for reflecting the measuring light or outputting imaging light, so that the light passes through the sample to be detected and the light through hole structure and then is imaged on the detection assembly. The optical measuring device can measure two parameters of the optical eccentricity and the modulation transfer function of the lens.

Description

Technical Field

[0001] The present application relates to the field of optical measurement technology, and in particular to an optical measurement device and method. Background Art

[0002] At present, the optical eccentricity of the lens and the modulation transfer function (MTF) are important indicators for evaluating the imaging quality of the lens.

[0003] However, these two parameter indicators often need to be measured using different equipment, which results in high measurement costs. Summary of the invention

[0004] The main purpose of the present application is to provide an optical measurement device and method, which can measure two parameters of the lens optical eccentricity and modulation transfer function.

[0005] In a first aspect, the present application provides an optical measuring device, the optical measuring device comprising: The object-carrying assembly is used to drive the sample to be tested to rotate and adjust the posture of the sample to be tested, wherein the sample to be tested is a lens; A detection component, configured to output a first measuring light and obtain target detection information according to the received detection light, wherein the target detection information includes one of eccentricity detection information and modulation transfer function detection information; A conversion component, comprising a light-through hole structure and at least one first focusing objective lens, wherein the conversion component is used to control a target structure to be located on an output light path of the detection component, wherein the target structure comprises the light-through hole structure and one of the first focusing objective lenses; The imaging component is used to reflect the first measuring light or output imaging light that passes through the sample to be measured, so that the light is imaged on the detection component after passing through the sample to be measured and the light-through hole structure.

[0006] In one embodiment, the object-carrying assembly comprises: a carrying turntable and a six-axis translation stage, wherein the six-axis translation stage is located on the carrying turntable; The bearing turntable is used to drive the six-axis translation stage to rotate; The six-axis translation platform is used to carry the sample to be tested and drive the sample to be tested to move in six degrees of freedom.

[0007] In one embodiment, the detection assembly includes a first autocollimator.

[0008] In one embodiment, the conversion assembly includes a conversion platform, and the light-through hole structure and each of the first focusing objective lenses are respectively arranged at different positions of the conversion platform; The conversion stage is used for moving to control the target structure to be located on the output optical path of the detection component.

[0009] In one embodiment, the imaging component includes: a target and a light source, the target is located between the supporting turntable and the six-axis translation stage, the surface of the target is perpendicular to the rotation axis of the supporting turntable, the light source is located between the target and the supporting turntable, and the target is located on the light output side of the light source.

[0010] In one embodiment, the imaging assembly includes: a reflective element, the reflective element is located between the carrying turntable and the six-axis translation stage; The reflective element is used to reflect the first measuring light that passes through the sample to be measured.

[0011] In one embodiment, the imaging assembly includes: a detection element and a second focusing objective lens; The detection element is located at a side of the object-carrying component away from the detection component, and the detection element is used to output a second measurement light; The second focusing objective lens is located on the output light path of the second detection component.

[0012] In one embodiment, the optical measuring device further comprises: a moving stand connected to the detection assembly; The motion platform is used to drive the detection component to move so as to adjust the distance from the object-carrying component.

[0013] In one embodiment, the optical measuring device further comprises a processing component, wherein the processing component is electrically connected to the detection component; The processing component is used to obtain the target detection information. When the target detection information is the eccentricity detection information, the eccentricity error and the best fitting optical axis of the sample to be tested are determined according to the target detection information; when the target detection information is the modulation transfer function detection information, the modulation transfer function of the sample to be tested is determined according to the target detection information.

[0014] In a second aspect, the present application further provides an optical measurement method, which is applied to the optical measurement device as described in the first aspect, and the method comprises: Acquiring the target detection information; In a case where the target detection information is the eccentricity detection information, determining the eccentricity error and the best fitting optical axis of the sample to be tested according to the target detection information; In a case where the target detection information is the modulation transfer function detection information, the modulation transfer function of the sample to be tested is determined according to the target detection information.

[0015] The above optical measurement device, when it is necessary to measure the eccentricity of the sample to be measured, controls the rotation of the object carrier component to drive the rotation of the sample to be measured, and adjusts the conversion component to adjust a first focusing objective lens to the output optical path of the detection component. In this case, the first measurement light output by the detection component is emitted to the surface of the sample to be measured through the first focusing objective lens, and the detection component obtains the eccentricity detection information of the current surface to be measured of the sample to be measured based on the received detection light, thereby realizing the measurement of the current surface to be measured of the sample to be measured, and by adjusting the surface to be measured of the sample to be measured and repeating the above process, the eccentricity measurement of all surfaces of the sample to be measured can be realized. Then, the light hole structure can be adjusted to the output optical path of the detection component by adjusting the conversion component, and the detection component is adjusted to a pre-set calibration position. The detection component can receive the reflected light or imaging light emitted from the imaging component and passing through the sample to be measured, thereby obtaining the modulation transfer function detection information based on the received detection light, thereby realizing the measurement of the MTF of the sample to be measured. Therefore, the above optical measurement device can measure two parameters of the sample to be measured, namely, the optical eccentricity and the modulation transfer function, without using two devices to measure the optical eccentricity and the modulation transfer function of the sample to be measured respectively, thereby helping to reduce the optical measurement cost of the lens.

[0016] The above optical measurement method is applied to the above optical measurement device. Since the optical measurement device can measure two parameters of the optical eccentricity and modulation transfer function of the sample to be measured, the detection component can obtain eccentricity detection information and modulation transfer function detection information. On this basis, in the process of measuring the eccentricity of the sample to be measured, by obtaining the eccentricity detection information, calculations can be performed based on the eccentricity detection information to determine the eccentricity error and the best fitting optical axis of the sample to be measured, respectively. In the process of measuring the MTF of the sample to be measured, the modulation transfer function detection information can be obtained, and calculations can be performed based on the modulation transfer function detection information to determine the MTF of the sample to be measured. Combined with the above description, it can be understood that the optical measurement method of the present application can realize the automatic calculation of the final parameters related to the sample to be measured based on the detection parameters measured by the optical measurement device, which is conducive to reducing the optical measurement cost of the sample to be measured and improving the measurement efficiency of the sample to be measured. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] Figure 1 This is a structural schematic diagram of an optical measuring device for measuring the eccentricity of a sample to be measured in one embodiment of the present application; Figure 2 for Figure 1 Schematic diagram of the structure of the optical measurement device for measuring the MTF of the sample to be measured; Figure 3 This is a schematic diagram of the structure of the target in one embodiment of the present application; Figure 4 This is a schematic structural diagram of an optical measuring device in another embodiment of the present application; Figure 5 This is a schematic structural diagram of an optical measuring device in another embodiment of the present application; Figure 6 This is a schematic diagram of the process of an optical measurement method in one embodiment of the present application; Figure 7 Schematic diagram of the internal structure of a computer device in one embodiment of the present application.

[0020] Description of Figure Numbers: 1-carrying assembly, 11-carrying turntable, 12-six-axis translation stage, 2-detection assembly, 3-conversion assembly, 31-conversion stage, 32-light hole structure, 33-first focusing objective lens, 4-imaging assembly, 41-target, 42-light source, 43-reflection element, 44-detection element, 45-second focusing objective lens, 5-sample to be tested, 6-motion stand, motion stand.

[0021] The purpose, features and advantages of this application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0024] In the case of using “including”, “having”, and “comprising” described herein, another component may be added unless a clear limiting term such as “only”, “consisting of”, etc. is used. Unless mentioned otherwise, a term in the singular form may include a plural form and should not be understood as being one in number.

[0025] It should be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of the present application.

[0026] It should also be understood that when interpreting an element, even if not explicitly described, the element is interpreted as including a range of error, which should be within the acceptable deviation range of the specific value determined by those skilled in the art. For example, "approximately", "approximately" or "substantially" can mean within one or more standard deviations, which are not limited here.

[0027] In addition, the drawings are not drawn to a 1:1 scale, and the relative sizes of the elements in the drawings are drawn only as examples and not necessarily according to the true scale.

[0028] At present, in the relevant technology, the optical eccentricity and MTF of the lens are important indicators for evaluating the imaging quality of the lens. In production, it is often necessary to measure the two parameters separately to evaluate the performance of the lens. In current production, these two parameter indicators need to be measured separately by two devices, which has a high measurement cost.

[0029] In order to solve the above problems, the inventors further developed the technical solutions of the embodiments of the present application. Specifically, the optical measurement device provided in the embodiments of the present application includes: a loading assembly, a detection assembly, a conversion assembly and an imaging assembly. The loading assembly is used to carry the sample to be tested and adjust the posture of the sample to be tested, wherein the sample to be tested is a lens. The detection assembly is used to output a first measurement light and obtain target detection information based on the received detection light, wherein the target detection information includes one of eccentricity detection information and modulation transfer function detection information. The conversion assembly includes a light-through hole structure and at least one first focusing objective lens, and the conversion assembly is used to control the target structure to be located on the output light path of the detection assembly, wherein the target structure includes a light-through hole structure and one of each first focusing objective lens. The imaging assembly is used to reflect the first measurement light passing through the sample to be tested or output imaging light, so that the light is imaged on the detection assembly after passing through the sample to be tested and the light-through hole structure.

[0030] The optical measuring device of the present application, when it is necessary to measure the eccentricity of the sample to be measured, controls the rotation of the object carrier component to drive the rotation of the sample to be measured, and adjusts the conversion component to adjust a first focusing objective lens to the output optical path of the detection component. In this case, the first measurement light output by the detection component is emitted to the surface of the sample to be measured through the first focusing objective lens, and the detection component obtains the eccentricity detection information of the current surface to be measured of the sample to be measured based on the received detection light, thereby achieving the measurement of the current surface to be measured of the sample to be measured, and by adjusting the surface to be measured of the sample to be measured and repeating the above process, the eccentricity measurement of all surfaces of the sample to be measured can be achieved. Then, the light hole structure can be adjusted to the output optical path of the detection component by adjusting the conversion component, and the detection component is adjusted to a pre-set calibration position. The detection component can receive the reflected light or imaging light emitted from the imaging component and passing through the sample to be measured, thereby obtaining the modulation transfer function detection information based on the received detection light, thereby achieving the measurement of the MTF of the sample to be measured. Therefore, the above optical measurement device can measure two parameters of the sample to be measured, namely, the optical eccentricity and the modulation transfer function, without using two devices to measure the optical eccentricity and the modulation transfer function of the sample to be measured respectively, thereby helping to reduce the optical measurement cost of the lens.

[0031] The above is the core idea of ​​this application. The technical solutions in the embodiments of this application will be described clearly and completely below in conjunction with the drawings in the embodiments of this application. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0032] Figure 1 This is a schematic diagram of the structure of an optical measuring device for measuring the eccentricity of a sample to be measured in one embodiment of the present application. Figure 2 for Figure 1 Schematic diagram of the structure of the optical measurement device for measuring the MTF of the sample to be measured. Figure 1 and Figure 2 As shown, the present application provides an optical measuring device, which includes: a loading component 1, a detection component 2, a conversion component 3 and an imaging component 4. It should be noted that in order to clearly explain this solution, Figure 1 and Figure 2 The following is a specific structural example of an optical measuring device. Figure 1 and Figure 2 In the embodiment, the object-carrying assembly 1 includes a rotating mechanism and a posture adjustment mechanism (i.e., a carrying turntable 11 and a six-axis translation stage 12), the imaging assembly 4 includes a target 41 and a light source 42, and the conversion assembly 3 includes a conversion stage 31, a light-through hole 32 and a first focusing lens 33. Figure 1 and Figure 2The object-carrying component 1, the conversion component 3 and the imaging component 4 are only an exemplary structure of the present application. The object-carrying component 1, the conversion component 3 and the imaging component 4 may also be other structures. Figure 1 and Figure 2 The structural example does not constitute a limitation on the structures of the object carrier component 1, the conversion component 3 and the imaging component 4.

[0033] The object carrier assembly 1 is used to drive the sample 5 to rotate and adjust the posture of the sample 5 to be tested. It should be noted that the sample 5 to be tested is a lens. The object carrier assembly 1 drives the sample 5 to rotate, thereby realizing the rotation measurement of the sample 5 to be tested, which is convenient for realizing the eccentricity measurement of the test surface of the sample 5 to be tested. By adjusting the posture of the sample 5 to be tested, the test surface of the sample 5 to be tested can be changed, and the eccentricity measurement of the new test surface is continuously repeated, so that the measurement of all test surfaces of the sample 5 to be tested can be realized.

[0034] The detection component 2 is used to output the first measurement light and obtain target detection information according to the received detection light, wherein the target detection information includes one of eccentricity detection information and modulation transfer function detection information. The detection component 2 may include an angle sensor to measure the eccentricity of the sample 5 to be tested.

[0035] The conversion component 3 includes a light-through hole structure 32 and at least one first focusing lens 33. The conversion component 3 is used to control the target structure to be located on the output light path of the detection component 2, wherein the target structure includes the light-through hole structure 32 and one of the first focusing lenses 33. It should be noted that, when there are multiple first focusing lenses 33, the focal lengths of the first focusing lenses 33 are different.

[0036] In applications, such as Figure 1 As shown, in the case where the eccentricity of the sample 5 to be tested needs to be measured, the detection component 2 outputs a first measuring light, the carrier component 1 drives the sample 5 to be tested to rotate, and the conversion component 3 is adjusted to adjust a first focusing objective lens 33 to the output light path of the detection component 2. In this case, the first measuring light output by the detection component 2 is emitted to the surface of the sample 5 to be tested through the first focusing objective lens 33, and the detection component 2 obtains the eccentricity detection information of the current test surface of the sample 5 to be tested based on the received detection light, thereby realizing the measurement of the current test surface of the sample 5 to be tested, and by adjusting the test surface of the sample 5 to be tested and repeating the above process, the eccentricity measurement of all surfaces of the sample 5 to be tested can be realized.

[0037] The imaging component 4 is used to reflect the first measuring light passing through the sample 5 to be measured or output imaging light, so that the light is imaged on the detection component 2 after passing through the sample 5 to be measured and the light-through hole structure 32 .

[0038] It can be understood that after the eccentricity measurement of the sample 5 is completed, Figure 2As shown, the light-through hole structure 32 can be adjusted to the output light path of the detection component 2 by adjusting the conversion component 3, and the detection component 2 is adjusted to a pre-set calibration position. The detection component 2 can receive the reflected light or imaging light emitted from the imaging component 4, thereby obtaining the modulation transfer function detection information according to the received detection light, thereby realizing the measurement of the MTF of the sample 5 to be tested.

[0039] It should be noted that, in the application, after the eccentricity detection information is obtained in the above manner, the best fitting optical axis of the sample 5 to be tested can be determined according to the eccentricity detection information. When measuring the MTF of the sample 5 to be tested, the posture of the sample is adjusted according to the calculated best fitting optical axis, so that the best fitting optical axis of the sample coincides with the rotation axis of the air-floating turntable, thereby achieving MTF measurement under the best optical axis, eliminating the measurement error caused by the sample placement and the inherent error between the mechanical axis and the optical axis during the MTF measurement process, and improving the measurement accuracy of the MTF of the sample 5 to be tested.

[0040] In the above optical measurement device, when it is necessary to measure the eccentricity of the sample 5 to be measured, the object carrier assembly 1 is controlled to rotate to drive the sample 5 to be measured to rotate, and the conversion assembly 3 is adjusted to adjust a first focusing lens 33 to the output optical path of the detection assembly 2. In this case, the first measurement light output by the detection assembly 2 is emitted to the surface of the sample 5 to be measured through the first focusing lens 33, and the detection assembly 2 obtains the eccentricity detection information of the current surface to be measured of the sample 5 to be measured according to the received detection light, so as to measure the current surface to be measured of the sample 5 to be measured, and by adjusting the surface to be measured of the sample 5 to be measured and repeating the above process, the eccentricity measurement of all surfaces of the sample 5 to be measured can be achieved. Then, the light hole structure 32 can be adjusted to the output optical path of the detection assembly 2 by adjusting the conversion assembly 3, and the detection assembly 2 is adjusted to a pre-set calibration position, and the detection assembly 2 can receive the reflected light or imaging light emitted from the imaging assembly 4 and passing through the sample 5 to be measured, so as to obtain the modulation transfer function detection information according to the received detection light, so as to measure the MTF of the sample 5 to be measured. Therefore, the above optical measurement device can realize the measurement of two parameters, namely, the optical eccentricity and the modulation transfer function of the sample 5 to be measured, without using two devices to measure the optical eccentricity and the modulation transfer function of the sample 5 to be measured respectively, thereby helping to reduce the optical measurement cost of the lens. In addition, when measuring the MTF of the sample 5 to be measured, the position of the sample is adjusted according to the calculated best fitting optical axis, so that the best fitting optical axis of the sample coincides with the rotation axis of the air-floating turntable, so that the MTF measurement under the best optical axis can be realized, thereby improving the measurement accuracy of the MTF of the sample 5 to be measured.

[0041] In one embodiment, Figure 1 and Figure 2 As shown, the object-carrying assembly 1 includes: a carrying turntable 11 and a six-axis translation platform 12 .

[0042] The six-axis translation platform 12 is located on the carrying turntable 11. The carrying turntable 11 is used to drive the six-axis translation platform 12 to rotate. The six-axis translation platform 12 is used to carry the sample 5 to be tested and drive the sample 5 to be tested to move with six degrees of freedom.

[0043] The bearing turntable 11 can be an air-floating turntable (air turntable), which realizes stable and high-precision rotation by suspending the main shaft in the air (i.e., air bearing). The air-floating turntable has a series of advantages such as high speed, high precision, no friction, no wear, no need for lubricating oil, and has excellent speed control performance and no noise. Therefore, it is suitable for various high-precision measurements. The use of an air-floating turntable is conducive to improving the optical measurement accuracy, thereby helping to improve the measurement accuracy of the eccentricity of the sample 5 to be measured.

[0044] It should be noted that the six-axis translation stage 12 is a parallel motion platform that can move, position and align the load within six degrees of freedom: three translational degrees of freedom of X, Y, and Z and three rotational degrees of freedom of ΘX, ΘY, and ΘZ. The typical structure of the six-axis translation stage 12 can be composed of six actuators with adjustable lengths, which are connected to the base plate and the motion platform that carries the load through flexible hinges. Due to the parallel motion design, the six-axis translation stage 12 can execute complex multi-axis motion trajectories and has high repeatability, dynamics and stability. Therefore, the use of the six-axis translation stage 12 to drive the sample 5 to be tested to move in six degrees of freedom can achieve high-precision posture adjustment of the sample 5 to be tested, which is conducive to further improving the optical measurement accuracy of the sample 5 to be tested.

[0045] In one embodiment, the detection assembly 2 may include a first autocollimator.

[0046] The first autocollimator can be an optical autocollimator, a photoelectric autocollimator, a laser collimator, or other types of autocollimators. An autocollimator is a measuring instrument that uses the principle of light self-collimation to convert angle measurement into linear measurement, and can measure small angle changes. Therefore, when the bearing assembly drives the sample 5 to be measured to rotate, the first autocollimator can be used to measure the eccentricity of the sample 5 to be measured.

[0047] In one example, the detection component 2 may be a first autocollimator.

[0048] In one embodiment, Figure 1 and Figure 2 As shown, the conversion assembly 3 includes a conversion platform 31. The light hole structure 32 and each first focusing lens 33 are respectively arranged at different positions of the conversion platform 31. The conversion platform 31 is used to move to control the target structure to be located on the output light path of the detection assembly 2.

[0049] The light-through hole structure 32 and the first focusing lenses 33 may be arranged in a predetermined manner, such as a linear arrangement.

[0050] It can be understood that by adjusting the position of the conversion table 31 relative to the detection component 2, the position of the light hole structure 32 and each first focusing objective lens 33 relative to the detection component 2 can be adjusted. Therefore, the structure located on the output optical path of the detection component 2 can be switched by driving the conversion table 31 to move relative to the detection component 2. In application, the position of the conversion table 31 can be adjusted manually or by a driving mechanism, that is, the conversion component 3 can also include a driving mechanism. In one example, the driving mechanism can include a motor, and the motor drives the conversion table 31 to move to switch the structure located on the output optical path of the detection component 2.

[0051] In this embodiment, by controlling the movement of the conversion platform 31, the structure located on the output optical path of the detection component 2 can be controlled. When it is necessary to measure the eccentricity of the sample 5 to be tested, a first focusing objective lens 33 can be switched to the output optical path of the detection component 2, so that the optical measurement device can measure the eccentricity of the sample 5 to be tested. When it is necessary to measure the MTF of the sample 5 to be tested, the light hole structure 32 can be switched to the output optical path of the detection component 2, so that the optical measurement device can measure the MTF of the sample 5 to be tested. Therefore, the optical measurement device adopts the above-mentioned conversion component 3 to measure the eccentricity and modulation transfer function of the sample 5 to be tested, which is conducive to reducing the optical measurement cost of the lens.

[0052] In one example, the conversion component 3 can be installed on the detection component 2 so that the conversion component 3 and the detection component 2 can move synchronously in the vertical direction.

[0053] Specifically, the conversion platform 31 can be movably connected to the detection component 2, so that the conversion platform 31 can move relative to the detection component 2, thereby adjusting the structure located on the output light path of the detection component 2. Exemplarily, when the light hole structure 32 and each first focusing lens 33 are arranged linearly, the conversion platform 31 can be slidably connected to the detection component 2.

[0054] Figure 3 Schematic diagram of the structure of the target in one embodiment of the present application. Figure 1 and Figure 2 As shown, the imaging assembly 4 includes: a target 41 and a light source 42. The light source 42 may be a display screen. The structure of the target 41 may be as follows: Figure 3 shown.

[0055] The target 41 is located between the support turntable 11 and the six-axis translation stage 12 , the surface of the target 41 is perpendicular to the rotation axis of the support turntable 11 , the light source 42 is located between the target 41 and the support turntable 11 , and the target 41 is located on the light emitting side of the light source 42 .

[0056] Among them, the support turntable 11 can drive the light source 42, the target 41, the six axes and the sample 5 to be tested to rotate, and the six-axis displacement stage 12 can drive the sample 5 to be tested to move with six degrees of freedom. In this embodiment, the measurement process of the eccentricity of the sample 5 to be tested can be as follows: the sample 5 to be tested is placed on the six-axis displacement stage 12, a suitable first focusing objective lens 33 is selected and the detection component is adjusted to a specified position; the support turntable 11 drives the sample to rotate; the detection component 2 obtains the eccentricity detection information of the test surface of the sample 5 to be tested according to the received detection light; the test surface of the sample 5 to be tested is adjusted, and the above process can be repeated to achieve the eccentricity measurement of all surfaces of the sample 5 to be tested; the eccentricity error and the best fitting optical axis of the sample 5 to be tested can be calculated according to the eccentricity detection information.

[0057] In this embodiment, the measurement process of the MTF of the sample 5 to be tested can be as follows: the posture of the sample 5 to be tested is adjusted according to the calculated best fitting optical axis, so that the best fitting optical axis of the sample coincides with the rotation axis of the air-floating turntable; the conversion component 3 is controlled to switch the light-through hole structure 32 to the output optical path of the detection component 2, and the detection component 2 is adjusted to a pre-set calibration position; the lower light source 42 is turned on to illuminate the entire target 41; the height of the six-axis translation stage 12 is adjusted so that the imaging light (i.e., the detection light) is clearly imaged in the detection component 2 after passing through the sample 5 to be tested (i.e., the detection light), and the detection component 2 obtains the modulation transfer function detection information of the sample 5 to be tested (i.e., the imaging information of the target 41); the MTF of the sample 5 to be tested can be calculated based on the modulation transfer function detection information.

[0058] When it is necessary to measure the MTF of the edge field of view of the sample 5 to be tested, the product can be tilted by the six-axis translation stage 12, and the tilt angle is determined according to the MTF measurement field requirement, thereby realizing the MTF measurement of any field of view.

[0059] In this embodiment, the imaging component 4 includes a target 41 and a light source 42. Through the cooperation of the target 41 and the light source 42, imaging light can be output to the sample to be tested 5, so that the imaging light is clearly imaged in the detection component 2 after passing through the sample to be tested 5, so that the detection component 2 can obtain the modulation transfer function detection information of the sample to be tested 5, thereby realizing the measurement of the MTF of the sample to be tested 5.

[0060] Figure 4 FIG. 1 is a schematic diagram of the structure of an optical measuring device in another embodiment of the present application. In another embodiment, Figure 4 As shown, the imaging assembly 4 includes a reflective element 43. The reflective element 43 may be an optical flat crystal or a reflective mirror.

[0061] The reflective element 43 is located between the support turntable 11 and the six-axis translation stage 12. The reflective element 43 is used to reflect the first measurement light passing through the sample 5 to be measured.

[0062] In this embodiment, the measurement process of the eccentricity of the sample 5 to be tested is the same as the measurement process of the previous embodiment, and will not be repeated here. As for the measurement process of the MTF of the sample 5 to be tested, compared with the previous embodiment, this embodiment does not need to use the light source 42 and the target 41 as the target object, and the reflection of the measuring light can be achieved through the reflector or optical flat crystal under the sample 5 to be tested, and then the reflection imaging is achieved on the imaging surface of the detection component 2, and the detection component 2 obtains the modulation transfer function detection information (i.e., the reflection image information) of the sample 5 to be tested; the MTF of the sample 5 to be tested can be calculated based on the modulation transfer function detection information.

[0063] It should be noted that the optical flat crystal will not interfere with the light below, and the light can be reflected on the sample 5 to be tested through the optical flat crystal. Therefore, an additional eccentricity measurement system can be added below the turntable of the object carrier assembly 1 to improve the efficiency of eccentricity measurement. Based on this, in one embodiment, the imaging assembly 4 may include: an optical flat crystal, a detection element and at least one second focusing objective lens. Similarly, in the case where there are multiple second focusing objective lenses, the focal lengths of the second focusing objective lenses are different. The detection element may include a second autocollimator, and the detection element is used to output a second measurement light. The second focusing objective lens is located on the output light path of the detection element. In this embodiment, the detection element and the second focusing objective lens can be used to measure the eccentricity of another surface to be tested of the sample 5 to be tested (i.e., the lower surface of the sample 5 to be tested in the figure), and the second measurement light output by the detection element is emitted to the surface of the sample 5 to be tested through the second focusing objective lens and the optical flat crystal, and the detection assembly 2 obtains the eccentricity detection information of another surface to be tested of the sample 5 to be tested according to the received detection light. Therefore, the optical measuring device of this embodiment has two sets of upper and lower measuring systems, so it can realize simultaneous measurement of two surfaces of the sample 5 to be measured, which is beneficial to improve the measurement efficiency of the sample 5 to be measured.

[0064] Figure 5 FIG. 1 is a schematic diagram of the structure of an optical measuring device in another embodiment of the present application. Figure 5 As shown, the imaging assembly 4 includes: a detection element 44 and at least one second focusing lens 45. The detection element 44 may include a second autocollimator.

[0065] The detection element 44 is located at a side of the object-carrying assembly 1 away from the detection assembly 2 , and is used to output the second measuring light. The second focusing lens 45 is located on the output light path of the second detection assembly 2 .

[0066] In this embodiment, the measurement process of the MTF of the sample 5 to be measured can be as follows: the detection element 44 outputs the second measurement light, and the first detection component 2 stops outputting the first measurement light; the second measurement light output by the detection element 44 is converged at the focus of the sample 5 to be measured through the second focusing objective lens 45, and is imaged on the imaging surface of the first detection component 2, then the detection component 2 can also obtain the modulation transfer function detection information (i.e., imaging information) of the sample 5 to be measured, and the MTF of the sample 5 to be measured can be calculated based on the modulation transfer function detection information.

[0067] It should be noted that the detection assembly 2 and the detection element 44 can be supported by different support frames (for example Figure 5 The imaging assembly 4 of this embodiment can also be used to measure the eccentricity of the sample 5 to be tested. The second measuring light output by the detection element 44 is emitted to the surface of the sample 5 to be tested through the second focusing objective lens 45. The detection assembly 2 obtains the eccentricity detection information of the other surface to be tested of the sample 5 to be tested (i.e., the lower surface of the sample 5 to be tested in the figure) according to the received detection light. With the imaging assembly 4 of this embodiment, the optical measuring device of this embodiment has two sets of upper and lower measuring systems, so that the two surfaces of the sample 5 to be tested can be measured simultaneously, which is conducive to improving the measurement efficiency of the sample 5 to be tested.

[0068] In one embodiment, Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, the optical measuring device further comprises: a moving stand 6 .

[0069] The moving platform 6 is connected to the detection component 2 , and the moving platform 6 is used to drive the detection component 2 to move so as to adjust the distance with the object-carrying component 1 .

[0070] It can be understood that the moving stand 6 is connected to the detection component 2, and the moving stand 6 can drive the detection component 2 to move in the vertical direction, so as to adjust the distance from the object-carrying component 1, and then adjust the distance from the sample 5 to be tested. Therefore, the vertical position of the detection component 2 can be adjusted as needed in the application, so as to realize the eccentricity measurement and MTF measurement of the sample 5 to be tested.

[0071] It should be noted that when the conversion component 3 is connected to the detection component 2, the motion platform 6 drives the detection component 2 to move vertically, which will also drive the conversion component 3 to move synchronously. Therefore, during the measurement process, there is no need to additionally adjust the vertical position of the conversion component 3, which is beneficial to improving the measurement efficiency.

[0072] In one embodiment, the optical measuring device further comprises a processing component (not shown in the figure). The processing component may comprise a microprocessor.

[0073] The processing component is electrically connected to the detection component 2. The processing component is used to obtain target detection information, and when the target detection information is eccentricity detection information, the eccentricity error and the best fitting optical axis of the sample 5 to be tested are determined according to the target detection information; when the target detection information is modulation transfer function detection information, the modulation transfer function of the sample 5 to be tested is determined according to the target detection information.

[0074] It can be understood that the optical detection device of the embodiment of the present application can realize the measurement of eccentricity. The detection component 2 can obtain the eccentricity detection information of the sample 5 to be tested during the measurement process. The processing component is electrically connected to the detection component 2. The eccentricity detection information obtained by the detection device can be transmitted to the processing component. The processing component can perform calculations based on the eccentricity detection information to determine the eccentricity error and the best fitting optical axis of the sample 5 to be tested. After the optical measurement device completes the measurement of the eccentricity, it can complete the measurement of the MTF of the sample 5 to be tested according to the corresponding embodiment of the above embodiment. The detection component 2 obtains the modulation transfer function detection information. Similarly, the modulation transfer function detection information obtained by the detection device can be transmitted to the processing component. The processing component can perform calculations based on the modulation transfer function detection information to determine the MTF of the sample 5 to be tested. Combined with the above description, it can be understood that the optical detection device of this embodiment can not only realize the measurement of the two parameters of the optical eccentricity and the modulation transfer function of the sample 5 to be tested, but also realize the automatic calculation of the final parameters, which is conducive to reducing the optical measurement cost of the sample 5 to be tested and improving the measurement efficiency of the sample 5 to be tested.

[0075] It should be noted that the optical measuring device can adjust the posture of the sample according to the calculated best fitting optical axis during the process of measuring the MTF of the sample 5 to be measured, so that the best fitting optical axis of the sample coincides with the rotation axis of the air-floating turntable, thereby improving the measurement accuracy of the MTF of the sample 5 to be measured.

[0076] In application, the processing component can also be electrically connected to at least one of the carrier component 1, the conversion component 3 and the imaging component 4, respectively, to control the connected components to perform related functions. In one example, the processing component is also used to control the detection component 2 to output a first measurement light. In another example, the processing component is also electrically connected to the carrier component 1, and the processing component is also used to control the carrier component 1 to adjust the posture of the sample to be tested 5, for example, to control the carrier component 1 to move along a preset motion trajectory to drive the sample to be tested 5 to adjust its posture. In another example, the processing component is also connected to the conversion component 3, and the processing component is also used to control the conversion component 3 to switch the structure located in the output light path of the detection component 2. In another example, when the imaging component 4 outputs imaging light, the processing component is also connected to the imaging component 4, and the processing component is also used to control the imaging component 4 to output imaging light.

[0077] In one embodiment, the present application further provides an optical measurement method, which is applied to the optical measurement device of any of the above embodiments. Figure 6 As shown, the optical measurement method includes the following steps S601 to S603.

[0078] S601: Obtain target detection information.

[0079] S602: When the target detection information is eccentricity detection information, determine the eccentricity error and the best fitting optical axis of the sample to be tested according to the target detection information.

[0080] S603: When the target detection information is modulation transfer function detection information, determine the modulation transfer function of the sample to be tested according to the target detection information.

[0081] The above optical measurement method is applied to the above optical measurement device. Since the optical measurement device can measure two parameters of the optical eccentricity and modulation transfer function of the sample to be measured, the detection component can obtain eccentricity detection information and modulation transfer function detection information. On this basis, in the process of measuring the eccentricity of the sample to be measured, by obtaining the eccentricity detection information, calculations can be performed based on the eccentricity detection information to determine the eccentricity error and the best fitting optical axis of the sample to be measured, respectively. In the process of measuring the MTF of the sample to be measured, the modulation transfer function detection information can be obtained, and calculations can be performed based on the modulation transfer function detection information to determine the MTF of the sample to be measured. Combined with the above description, it can be understood that the optical measurement method of the present application can realize the automatic calculation of the final parameters related to the sample to be measured based on the detection parameters measured by the optical measurement device, which is conducive to reducing the optical measurement cost of the sample to be measured and improving the measurement efficiency of the sample to be measured.

[0082] In one embodiment, the optical measurement method further includes: a step of controlling the detection component to output a first measurement light.

[0083] In one embodiment, the optical measurement method further includes: a step of controlling the object-carrying assembly to adjust the position and posture of the sample to be measured, for example, controlling the object-carrying assembly to move along a preset motion trajectory to drive the sample to be measured to adjust its position and posture.

[0084] In one embodiment, the optical measurement method further includes: controlling the conversion component to switch a structure located in an output optical path of the detection component.

[0085] In one embodiment, the optical measurement method further includes: in a case where the imaging component outputs imaging light, controlling the imaging component to output imaging light.

[0086] Based on the above-mentioned optical measurement method, in one embodiment, the optical measurement method includes: controlling the detection component to output a first measurement light; controlling the conversion component to adjust the target focusing objective lens to the output optical path of the detection component; controlling the carrier component to move along a preset motion trajectory to drive the sample to be measured to adjust its posture; obtaining eccentricity detection information, and determining the eccentricity error and the best-fit optical axis of the sample to be measured based on the eccentricity detection information; controlling the carrier component to adjust the position of the sample to be measured based on the best-fit optical axis so that the best-fit optical axis coincides with the rotation axis of the carrier component; controlling the conversion component to adjust the light-through hole structure to the output optical path of the detection component; obtaining modulation transfer function detection information, and determining the modulation transfer function of the sample to be measured based on the modulation transfer function detection information.

[0087] The present application provides a computer device, which includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the optical measurement method in the above-mentioned embodiment.

[0088] Reference below Figure 7 , which shows a schematic diagram of the structure of a computer device suitable for implementing the embodiments of the present application. The computer device in the embodiments of the present application may include but is not limited to mobile terminals such as mobile phones, laptop computers, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions), PMPs (Portable Media Players), vehicle-mounted terminals (such as vehicle-mounted navigation terminals), etc., and fixed terminals such as digital TVs, desktop computers, etc. Figure 7 The computer device shown is only an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0089] like Figure 7As shown, the computer device may include a processing device 1001 (such as a central processing unit, a graphics processor, etc.), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM: Read Only Memory) 1002 or a program loaded from a storage device 1003 to a random access memory (RAM: Random Access Memory) 1004. In RAM1004, various programs and data required for the operation of the computer device are also stored. The processing device 1001, ROM1002 and RAM1004 are connected to each other through a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Generally, the following systems can be connected to the I / O interface 1006: an input device 1007 including, for example, a touch screen, a touch pad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; an output device 1008 including, for example, a liquid crystal display (LCD: Liquid Crystal Display), a speaker, a vibrator, etc.; a storage device 1003 including, for example, a magnetic tape, a hard disk, etc.; and a communication device 1009. The communication device 1009 can allow the computer device to communicate with other devices wirelessly or by wire to exchange data. Although the figure shows a computer device with various systems, it should be understood that it is not required to implement or have all the systems shown. More or fewer systems can be implemented or have alternatively.

[0090] In particular, according to the embodiments disclosed in the present application, the process described above with reference to the flowchart can be implemented as a computer software program. For example, the embodiments disclosed in the present application include a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication device, or installed from a storage device 1003, or installed from a ROM 1002. When the computer program is executed by the processing device 1001, the above-mentioned functions defined in the method of the embodiment disclosed in the present application are executed.

[0091] The computer device provided by the present application adopts the optical measurement method in the above embodiment to measure two parameters, namely, the optical eccentricity of the lens and the modulation transfer function. Compared with the prior art, the beneficial effects of the computer device provided by the present application are the same as those of the optical measurement method provided by the above embodiment, and other technical features in the computer device are the same as those disclosed in the method of the previous embodiment, which will not be described in detail here.

[0092] It should be understood that the various parts disclosed in this application can be implemented by hardware, software, firmware or a combination thereof. In the description of the above embodiments, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0093] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0094] The present application provides a computer-readable storage medium having computer-readable program instructions (ie, computer programs) stored thereon, and the computer-readable program instructions are used to execute the optical measurement method in the above-mentioned embodiment.

[0095] The computer-readable storage medium provided in the present application may be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, systems or devices, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM: Random Access Memory), a read-only memory (ROM: Read Only Memory), an erasable programmable read-only memory (EPROM: Erasable Programmable Read Only Memory or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM: CD-Read Only Memory), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, system or device. The program code contained on the computer-readable storage medium may be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (Radio Frequency: Radio Frequency), etc., or any suitable combination of the above.

[0096] The computer-readable storage medium may be included in the computer device; or may exist independently without being installed in the computer device.

[0097] The computer-readable storage medium carries one or more programs. When the one or more programs are executed by a computer device, the computer device implements the steps of the optical measurement method in any of the above embodiments.

[0098] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0099] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present application. In this regard, each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0100] The modules involved in the embodiments described in this application may be implemented by software or hardware, wherein the name of the module does not constitute a limitation on the unit itself in some cases.

[0101] The readable storage medium provided in the present application is a computer-readable storage medium, which stores computer-readable program instructions (i.e., computer programs) for executing the above-mentioned optical measurement method, and can realize automatic calculation of the final parameters related to the sample to be measured. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in the present application are the same as the beneficial effects of the optical measurement method provided in the above-mentioned embodiment, and will not be described in detail here.

[0102] The present application also provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the steps of the optical measurement method as described above are implemented.

[0103] The computer program product provided in this application can realize the automatic calculation of the final parameters related to the sample to be tested. Compared with the prior art, the beneficial effects of the computer program product provided in this application are the same as the beneficial effects of the optical measurement method provided in the above embodiment, which will not be repeated here.

[0104] The above descriptions are only some embodiments of the present application, and are not intended to limit the patent scope of the present application. All equivalent structural changes made using the contents of the present application specification and drawings under the technical concept of the present application, or direct / indirect applications in other related technical fields are included in the patent protection scope of the present application.

Claims

1. An optical measuring device, characterized in that: The optical measuring device comprises: The object-carrying assembly is used to drive the sample to be tested to rotate and adjust the posture of the sample to be tested, wherein the sample to be tested is a lens; A detection component, configured to output a first measuring light and obtain target detection information according to the received detection light, wherein the target detection information includes one of eccentricity detection information and modulation transfer function detection information; A conversion component, comprising a light-through hole structure and at least one first focusing objective lens, wherein the conversion component is used to control a target structure to be located on an output light path of the detection component, wherein the target structure comprises the light-through hole structure and one of the first focusing objective lenses; The imaging component is used to reflect the first measuring light or output imaging light that passes through the sample to be measured, so that the light is imaged on the detection component after passing through the sample to be measured and the light-through hole structure.

2. The optical measuring device according to claim 1, characterized in that The object-carrying assembly comprises: a carrying turntable and a six-axis displacement table, wherein the six-axis displacement table is located on the carrying turntable; The bearing turntable is used to drive the six-axis translation stage to rotate; The six-axis translation platform is used to carry the sample to be tested and drive the sample to be tested to move in six degrees of freedom.

3. The optical measuring device according to claim 1, characterized in that The detection assembly includes a first autocollimator.

4. The optical measuring device according to claim 1, characterized in that The conversion assembly includes a conversion platform, and the light-through hole structure and each of the first focusing objective lenses are respectively arranged at different positions of the conversion platform; The conversion stage is used for moving to control the target structure to be located on the output optical path of the detection component.

5. The optical measuring device according to claim 2, characterized in that: The imaging assembly includes: a target and a light source, wherein the target is located between the support turntable and the six-axis translation stage, the surface of the target is perpendicular to the rotation axis of the support turntable, the light source is located between the target and the support turntable, and the target is located on the light output side of the light source.

6. The optical measuring device according to claim 2, characterized in that The imaging assembly comprises: a reflective element, wherein the reflective element is located between the carrying turntable and the six-axis translation stage; The reflective element is used to reflect the first measuring light that passes through the sample to be measured.

7. The optical measuring device according to claim 1, characterized in that The imaging assembly comprises: a detection element and at least one second focusing objective lens; The detection element is located at a side of the object-carrying component away from the detection component, and the detection element is used to output a second measuring light; The second focusing lens is located on the output light path of the detection element.

8. The optical measuring device according to claim 2, characterized in that: The optical measuring device further comprises: a moving stand connected to the detection assembly; The motion platform is used to drive the detection component to move so as to adjust the distance from the object-carrying component.

9. The optical measuring device according to any one of claims 1 to 8, characterized in that: The optical measuring device further comprises a processing component, wherein the processing component is electrically connected to the detection component; The processing component is used to obtain the target detection information, and when the target detection information is the eccentricity detection information, determine the eccentricity error and the best fitting optical axis of the sample to be tested according to the target detection information; In a case where the target detection information is the modulation transfer function detection information, the modulation transfer function of the sample to be tested is determined according to the target detection information.

10. An optical measurement method, applied to the optical measurement device according to any one of claims 1 to 9, characterized in that: The method comprises: Acquiring the target detection information; In a case where the target detection information is the eccentricity detection information, determining the eccentricity error and the best fitting optical axis of the sample to be tested according to the target detection information; In a case where the target detection information is the modulation transfer function detection information, the modulation transfer function of the sample to be tested is determined according to the target detection information.

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