External blowing device and semiconductor manufacturing system

Abstract

The invention belongs to the technical field of exposure equipment, and particularly relates to an external blowing device and a semiconductor manufacturing system, the external blowing device is used for the exposure equipment, the exposure equipment comprises a projection device and a channel device, the projection device comprises at least one lens, the channel device is provided with an internal space, and the internal space is used for containing the at least one lens in the projection device. The external blowing device comprises a gas supply connecting unit, a filtering connecting unit and an adaptive unit, the gas supply connecting unit is used for providing blowing gas, the adaptive unit is detachably connected with the channel device, and the filtering connecting unit is arranged between the gas supply connecting unit and the adaptive unit and used for being connected with the filter to filter the blowing gas. When the built-in purging device of the exposure equipment cannot be used or no high-purity purging gas is supplied, the external purging device is adopted to replace the built-in purging device, and the filtered high-purity purging gas replaces the gas in the internal space, so that irreversible pollution of the projection device caused by exposure of the projection device in the environment can be avoided.

Description

Technical Field

[0001] The present application belongs to the technical field of exposure equipment, and specifically relates to an external purge device and a semiconductor manufacturing system. Background Art

[0002] Exposure is the process of transferring the target pattern from the mask to the wafer by irradiating the light emitted by the light source device in the exposure equipment through the mask containing the target pattern, exposing the exposure glue coated on the wafer. In order to improve the uniformity of exposure, a projection device is usually set between the light source device and the mask surface. The cleanliness of the lens in the projection device is one of the important factors affecting the exposure quality of the exposure equipment.

[0003] Exposing the projection device to the environment at will can easily cause irreversible contamination of the projection device. Therefore, whether in formal operation or during equipment transportation, the projection device needs to be continuously purged with high-purity nitrogen (N2) to ensure the cleanliness of the projection device. When the built-in purge device of the exposure equipment cannot be used, or there is no high-purity purge gas supply, it is easy to cause irreversible contamination of the projection device. Summary of the invention

[0004] The purpose of the present application is to provide an external purge device to prevent the projection device from being exposed to the environment and causing irreversible contamination of the projection device.

[0005] In order to achieve the above-mentioned object, the present application provides an external purge device for an exposure device, wherein the exposure device includes a projection device and a channel device, wherein the projection device includes at least one lens, and the channel device has an internal space, wherein the internal space is used to accommodate at least one lens in the projection device, and the external purge device includes:

[0006] A gas supply connection unit, used for connecting a gas source to provide a purge gas;

[0007] An adapting unit capable of being detachably connected to the channel device;

[0008] A filter connection unit is connected between the gas supply connection unit and the adapter unit, and is used to connect a filter to filter the purge gas. The filtered purge gas is used to replace the gas in the internal space.

[0009] Optionally, the gas supply connection unit includes M gas source interface components and M first transmission channels, M≥1, the first transmission channels correspond to the gas source interface components one by one, the first end of the gas source interface component is used to connect to the gas source, the second end of the gas source interface component is connected to the first end of the first transmission channel, and the second end of the first transmission channel is connected to the filter connection unit;

[0010] The filter connection unit includes N filter interface components, N second transmission channels and N third transmission channels, N≥1, the second transmission channels and the third transmission channels correspond one-to-one to the filter interface components, the filter interface component includes a filter interface part for connecting to the filter, the first end of the second transmission channel is connected to the second end of the first transmission channel, the filter interface component is connected between the second end of the second transmission channel and the first end of the third transmission channel, and the second end of the third transmission channel is connected to the adapter unit.

[0011] Optionally, the gas supply connection unit further includes a first control valve unit, and the first control valve unit is disposed on the first transmission channel and corresponds one-to-one to the first transmission channel.

[0012] Optionally, the filter connection unit also includes a second control valve unit and a third control valve unit, the second control valve unit is arranged on the second transmission channel and corresponds one-to-one to the second transmission channel, and the third control valve unit is arranged on the third transmission channel and corresponds one-to-one to the third transmission channel.

[0013] Optionally, the external purge device further includes a pressure regulating unit, which is disposed between the air source interface assembly and the adapter unit, and is used to regulate the air pressure on a side of the pressure regulating unit away from the air source interface assembly.

[0014] Optionally, the voltage regulating unit is disposed between the second end of the first transmission channel and the first end of the second transmission channel.

[0015] Optionally, the pressure regulating unit includes a valve with adjustable opening.

[0016] Optionally, M≥2, and the second ends of the M first transmission channels are connected in parallel to the valve with adjustable opening.

[0017] Optionally, the gas supply connection unit further includes a first control valve unit, the first control valve unit is arranged on the first transmission channel and corresponds one-to-one with the first transmission channel, and the first control valve unit includes a one-way valve.

[0018] Optionally, the pressure regulating unit also includes a pressure sensor, which is used to measure the air pressure on the side of the valve with adjustable opening away from the air source interface assembly. The pressure regulating unit is configured so that the opening of the valve with adjustable opening can be adjusted according to the air pressure measured by the pressure sensor.

[0019] Optionally, the external purge device further includes a controller, and the controller is capable of outputting an opening control signal to control the opening of the valve with adjustable opening.

[0020] Optionally, the external purge device also includes a pressure sensor, which is used to measure the air pressure on the side of the valve with adjustable opening away from the air source interface assembly, and generate a pressure signal based on the measured air pressure. The controller can obtain the pressure signal and output the opening control signal based on the pressure signal.

[0021] Optionally, the air supply connection unit also includes a first control valve unit, which is arranged on the first transmission channel and corresponds one-to-one with the first transmission channel, and the controller can control the switch of the first control valve unit according to the opening of the adjustable valve and the pressure signal.

[0022] Optionally, the pressure regulating unit includes a pressure sensor, which is used to measure the air pressure on the side of the valve with adjustable opening away from the air source interface assembly. The pressure regulating unit also includes a first display, which can display the air pressure measured by the pressure sensor.

[0023] Optionally, the gas supply connection unit further includes a first control valve unit, which is arranged on the first transmission channel and corresponds one-to-one with the first transmission channel, and the external purge device further includes a controller, which can control the switch of the first control valve unit.

[0024] Optionally, the external purging device further includes a life monitoring unit, and the life monitoring unit is used to monitor the life parameters of the filter connected to the filter interface component.

[0025] Optionally, N≥2, the first end of the second transmission channel connected in parallel is connected to the gas supply connection unit, and the second end of the third transmission channel connected in parallel is connected to the adapter unit.

[0026] Optionally, the filter connection unit also includes a second control valve unit and a third control valve unit, the second control valve unit is arranged on the second transmission channel and corresponds one-to-one with the second transmission channel, the third control valve unit is arranged on the third transmission channel and corresponds one-to-one with the third transmission channel, and the third control valve unit includes a one-way valve.

[0027] Optionally, the filter connection unit also includes a second control valve unit and a third control valve unit, the second control valve unit is arranged on the second transmission channel and corresponds one-to-one with the second transmission channel, the third control valve unit is arranged on the third transmission channel and corresponds one-to-one with the third transmission channel, and the external purge device also includes a controller, which can control the switching of the second control valve unit and the third control valve unit.

[0028] Optionally, the life monitoring unit can generate a life signal according to the life parameter, and the controller can obtain the life signal and control the switching of the second control valve unit and the third control valve unit according to the life parameter.

[0029] Optionally, the life monitoring unit includes a timer, which is used at least to record the cumulative working time of the filter connected to the filter interface component, and the life parameter includes the cumulative working time.

[0030] Optionally, the external purge device further includes an air source connected to the first end of the air source interface assembly, and / or

[0031] A filter is connected to the filter interface component.

[0032] The present application also provides a semiconductor manufacturing system, including the external purge device.

[0033] The external purge device and semiconductor manufacturing system disclosed in the present application have the following beneficial effects:

[0034] In the present application, the external purge device includes a gas supply connection unit, a filter connection unit and an adapter unit. The gas supply connection unit is used to connect to a gas source to provide purge gas. The adapter unit is detachably connected to the channel device. The filter connection unit is arranged between the gas supply connection unit and the adapter unit. The filter connection unit is used to connect to a filter to filter the purge gas provided by the gas supply connection unit. The filtered purge gas is used to replace the gas in the internal space. When the built-in purge device of the exposure device cannot be used, or there is no high-purity purge gas supply, an external purge device is used to provide filtered purge gas to replace the gas in the internal space, which can avoid the projection device being exposed to the environment and causing irreversible contamination of the projection device.

[0035] Other features and advantages of the present application will become apparent from the following detailed description, or may be learned in part by the practice of the present application.

[0036] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The drawings herein are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 It is a schematic diagram of the structure of the external purge device in the embodiment of the present application.

[0039] Figure 2 It is a schematic diagram of the structure of the controller controlling the voltage regulating unit, etc. in an embodiment of the present application.

[0040] Description of reference numerals:

[0041] 100, gas supply connection unit; 110, gas source interface assembly; 120, first transmission channel; 130, first control valve unit;

[0042] 200, filter connection unit; 210, filter interface assembly; 220, second transmission channel; 230, third transmission channel; 240, second control valve unit; 250, third control valve unit;

[0043] 300, adapter unit; 400, gas source; 500, filter;

[0044] 600, pressure regulating unit; 610, valve with adjustable opening; 620, pressure sensor; 630, first display;

[0045] 700. Controller; 800. Life monitoring unit. DETAILED DESCRIPTION

[0046] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this application will be more comprehensive and complete and fully convey the concept of the example embodiments to those skilled in the art.

[0047] In addition, described feature, structure or characteristic can be combined in one or more embodiments in any suitable manner. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present application. However, those skilled in the art will appreciate that the technical scheme of the present application can be put into practice without one or more of the specific details, or other methods, components, devices, steps, etc. can be adopted. In other cases, known methods, devices, realizations or operations are not shown or described in detail to avoid blurring the various aspects of the application.

[0048] The present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the technical features involved in the various embodiments of the present application described below can be combined with each other as long as they do not conflict with each other. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be understood as limiting the present application.

[0049] In this embodiment, an external purge device is used for an exposure device. The exposure device includes a projection device and a channel device. The projection device includes at least one lens. The channel device has an internal space. The internal space is used to accommodate at least one lens in the projection device. In order to prevent the gas in the external environment from entering the internal space and contaminating the lens, the lens needs to be purged, that is, a high-purity purge gas needs to be used to replace the gas in the internal space.

[0050] Typically, the exposure device also includes a built-in purge device, which introduces a built-in purge gas into the internal space to prevent the projection device from being exposed to the environment and causing irreversible contamination of the projection device. The built-in purge gas includes, for example, nitrogen with a purity of 5.4N or above.

[0051] See also Figure 1 As shown, the external purge device includes a gas supply connection unit 100, a filter connection unit 200 and an adapter unit 300. The gas supply connection unit 100 is used to connect to a gas source 400 to provide purge gas. The adapter unit 300 can be detachably connected to the channel device. The filter connection unit 200 is connected between the gas supply connection unit 100 and the adapter unit 300, and is used to connect to a filter 500 to filter the purge gas. The filtered purge gas is used to replace the gas in the internal space.

[0052] The external purge device includes an air supply connection unit 100 and a filter connection unit 200. When using the external purge device, a suitable air source 400 and a filter 500 can be selected according to actual needs, and connected to the air supply connection unit 100 and the filter connection unit 200 respectively, but not limited to this. In some embodiments, the external purge device also includes an air source 400 connected to the filter connection unit 200, and at least one of the filters 500 connected to the filter connection unit 200, depending on the specific circumstances.

[0053] After the gas supply connection unit 100 is connected to the gas source 400, the purge gas is input from the gas source 400 to the gas supply connection unit 100. It can be understood that the gas supply connection unit 100 includes at least a port that can be connected to the gas source 400, and the connection can be a detachable connection or a fixed connection. When the connection is a detachable connection, the external purge device may include or exclude the gas source 400. When the connection is a fixed connection, the external purge device may include the gas source 400. The purge gas provided by the gas source 400 is, for example, nitrogen with a purity of 5N and below. The gas source 400 may include a purge gas storage device and / or a purge gas preparation device. Preferably, the gas source 400 is a purge gas storage device, such as a gas storage tank, which is easy to carry. When the gas source 400 is a purge gas storage device, the gas source 400 can be set in a one-to-one correspondence with the gas supply connection unit 100.

[0054] The external purge device includes a filter connection unit 200 located between the gas supply connection unit 100 and the adapter unit 300. After the filter 500 is connected, the purge gas input from the gas source 400 to the gas supply connection unit 100 can be filtered through the filter 500 and then passed into the internal space through the adapter unit 300. It can be understood that the filter connection unit 200 includes a port for connecting the filter 500. The connection can be a detachable connection or a fixed connection. When the connection is a detachable connection, the external purge device may or may not include the filter 500. When the connection is a fixed connection, the external purge device may include the filter 500. It can be understood that different models of the filter 500 can be selected according to the purity of the purge gas actually required to be filtered. In this way, the purity requirements for the purge gas provided by the gas source 400 connected to the gas supply connection unit 100 can be reduced, and at the same time, a high-purity filtered purge gas can be provided to meet the purge requirements of the projection device. For example, after the filter connection unit 200 is connected to the filter 500, the filter 500 can filter the nitrogen with a purity of 5N or even below 5N provided by the gas source 400 to obtain high-purity nitrogen with a purity of 5.4N or above; or in some embodiments, after the filter connection unit 200 is connected to the filter 500, the filter 500 can filter the nitrogen with a purity of 5N or even below 5N provided by the gas source 400 to obtain nitrogen with a purity of 9N or above.

[0055] It should be noted that the purge gas provided by the gas source 400 connected to the gas supply connection unit 100 may include nitrogen, but is not limited thereto. The purge gas may also include an inert gas or clean dry air, etc., depending on the specific situation.

[0056] The adapter unit 300 can be detachably connected to a channel device of an exposure device, but is not limited thereto. A plurality of adapter units 300 can also be provided to simultaneously connect a plurality of exposure devices, depending on the specific circumstances.

[0057] When the built-in purge device of the exposure equipment cannot be used, or there is no high-purity purge gas supply, it is easy to cause irreversible contamination of the projection device.

[0058] In this embodiment, the external purge device includes a gas supply connection unit 100, a filter connection unit 200 and an adapter unit 300. The gas supply connection unit 100 is used to connect to a gas source 400 to provide purge gas. The adapter unit 300 is detachably connected to the channel device. The filter connection unit 200 is arranged between the gas supply connection unit 100 and the adapter unit 300. The filter connection unit 200 is used to connect to a filter 500 to filter the purge gas provided by the gas supply connection unit 100. The filtered purge gas is used to replace the gas in the internal space. When the built-in purge device of the exposure device cannot be used, or there is no high-purity purge gas to supply the built-in purge device, an external purge device is used to provide the filtered high-purity purge gas to replace the gas in the internal space, which can avoid the projection device being exposed to the environment and causing irreversible contamination of the projection device.

[0059] In addition, the adapter unit 300 is detachably connected to the channel device of the exposure device, that is, the external purge device can be detached after use, without changing the structure of the exposure device, and the external purge device can be reused in multiple identical or different exposure devices. The external purge device is detachable, so that the external purge device can be temporarily installed when needed, so the external purge device can be used both during the use of the exposure device and during the transportation of the exposure device.

[0060] In some embodiments, the gas supply connection unit 100 includes M gas source interface components 110 and M first transmission channels 120, M≥1, and the first transmission channels 120 correspond one to one with the gas source interface components 110. The first end of the gas source interface component 110 is used to connect to the gas source 400, the second end of the gas source interface component 110 is connected to the first end of the first transmission channel 120, and the second end of the first transmission channel 120 is connected to the filter connection unit 200. It should be noted that the connection in the present application includes direct connection and indirect connection, for example, the connection between the second end of the first transmission channel 120 and the filter connection unit 200 can be a direct connection or an indirect connection. Thus, the gas supply connection unit 100 provides one or more gas circuits, which can be connected to one or more gas sources 400 to provide purge gas.

[0061] In some embodiments, the filter connection unit 200 includes N filter interface components 210, N second transmission channels 220, and N third transmission channels 230, N≥1, and the second transmission channels 220 and the third transmission channels 230 correspond to the filter interface components 210 one by one. The filter interface component 210 includes a filter interface component for connecting to the filter 500. The first end of the second transmission channel 220 is connected to the second end of the first transmission channel 120, the filter interface component 210 is connected between the second end of the second transmission channel 220 and one end of the third transmission channel 230, and the second end of the third transmission channel 230 is connected to the adapter unit 300. Thus, the filter connection unit 200 provides one or more gas paths, and one or more filters 500 can be connected to filter the purge gas.

[0062] The air source interface component 110 can be formed as an integral whole with the first transmission channel 120, for example, the air source interface component 110 is a port of a pipeline, and the first transmission channel 120 is at least a section of the remaining portion of the pipeline, but not limited to this. The air source interface component 110 can be separately provided from the first transmission channel 120, for example, an adapter component that enables the air source 400 to be sealed and connected to the first transmission channel 120.

[0063] The first transmission channel 120 and the second transmission channel 220 may be formed as one body. For example, the first transmission channel 120 and the second transmission channel 220 are the front end portion and the rear end portion of a pipe respectively, but not limited thereto. The first transmission channel 120 and the second transmission channel 220 may be separately provided, depending on the specific circumstances.

[0064] The filter interface assembly 210 includes an inlet and an outlet. The inlet of the filter interface assembly 210 is connected to the second end of the second transmission channel 220 , and the outlet of the filter interface assembly 210 is connected to the first end of the third transmission channel 230 .

[0065] The second transmission channel 220 can be formed as one piece with the inlet of the filter interface assembly 210. For example, the inlet of the filter interface assembly 210 is one end of a pipe, and the second transmission channel 220 is at least one section of the remaining portion of the pipe, but is not limited to this. The second transmission channel 220 can be separately provided from the filter interface assembly 210, depending on the specific circumstances.

[0066] The third transmission channel 230 can be formed as one piece with the outlet of the filter interface assembly 210. For example, the outlet of the filter interface assembly 210 is one end of a pipe, and the third transmission channel 230 is at least one section of the remaining portion of the pipe, but is not limited to this. The third transmission channel 230 can be separately provided from the filter interface assembly 210, depending on the specific circumstances.

[0067] The filter interface component includes two ports arranged between the inlet and the outlet of the filter interface assembly 210, which are respectively used to connect the inlet and the outlet of the filter 500, but is not limited to this. In some embodiments, the filter interface component may include multiple ports for connecting the filter 500 to connect a multi-port filter 500. In some embodiments, the filter interface component may include multiple ports for connecting the filter 500 to connect multiple filters 500.

[0068] It can be understood that when the filter interface component is connected to the filter 500, after the purge gas is transmitted from the gas supply connection unit 100 to the second transmission channel 220, it enters the filter 500 from the inlet of the filter interface component 210, one port of the filter interface component, and the inlet of the filter 500 in sequence, and forms filtered purge gas after filtration, and enters the third transmission channel 230 through the outlet of the filter 500, another port of the filter interface component, and the outlet of the filter interface component 210 in sequence, and then enters the internal space of the channel device through the adapter unit 300.

[0069] The second transmission channel 220, the inlet of the filter interface component 210 and a port of the filter interface component can be formed as one body, for example, a port of the filter interface component is one end of a pipe, the second transmission channel 220 is at least a section of the remaining portion of the pipe, and the inlet of the filter interface component 210 is the portion of the pipe located between the second transmission channel 220 and a port of the filter interface component, but is not limited to this. The three can be provided separately, or the inlet of the filter interface component 210 and the filter interface component can be formed as one body, depending on the specific circumstances.

[0070] The third transmission channel 230, the outlet of the filter interface component 210 and the other port of the filter interface component can be formed as one body, for example, the other port of the filter interface component is one end of a pipe, the third transmission channel 230 is at least a section of the remaining portion of the pipe, and the outlet of the filter interface component 210 is the portion of the pipe located between the third transmission channel 230 and the other port of the filter interface component, but is not limited to this. The three can be set separately, or the outlet of the filter interface component 210 and the other port of the filter interface component can be formed as one body, depending on the specific circumstances.

[0071] The third transmission channel 230 can be formed as one body with the adapter unit 300. For example, the adapter unit 300 is one end of a pipe, and the third transmission channel 230 is at least one section of the remaining part of the pipe, but it is not limited thereto. The third transmission channel 230 can be separately provided with the adapter unit 300, depending on the specific situation.

[0072] Preferably, the gas supply connection unit 100 is connected to the gas source 400, including a detachable connection between the gas source 400 and the gas source interface assembly 110, whereby the gas source 400 is detachable for maintenance or replacement, so that filtered purge gas can be continuously provided through an external purge device, but not limited to this. In some embodiments, the gas supply connection unit 100 is connected to the gas source 400, including a fixed connection between the gas source 400 and the gas source interface assembly 110.

[0073] When the gas source 400 is detachably connected to the gas source interface assembly 110 , the external purge device may or may not include the gas source 400 ; when the gas source 400 is fixedly connected to the gas source interface assembly 110 , the external purge device includes the gas source 400 .

[0074] When M=1, the second end of the first transmission channel 120 is connected to the first end of the second transmission channel 220; when M≥2, the second end of the first transmission channel 120 is connected in parallel and then connected to the first end of the second transmission channel 220, but is not limited thereto. When M=N, the second end of the first transmission channel 120 can be connected one-to-one with the first end of the second transmission channel 220, and when M>N, the second end of the first transmission channel 120 can be partially connected in parallel and then connected to the first end of the second transmission channel 220 to form a corresponding connection, depending on the specific situation.

[0075] When M≥2, M gas sources 400 may be connected to provide purge gas to achieve continuous purge of the lens.

[0076] Preferably, the filter connection unit 200 is connected to the filter 500, including a filter interface component that can be detachably connected to the filter 500, so that the filter 500 is detachable for maintenance or replacement to avoid a reduction in the filtering performance of the filter connection unit 200, resulting in the purity of the filtered purge gas failing to meet the purge requirements of the projection device, but not limited to this. In some embodiments, the filter connection unit 200 is connected to the filter 500, including a filter interface component that is fixedly connected to the filter 500.

[0077] When the filter interface component is detachably connected to the filter 500, the external purge device may or may not include the filter 500 connected to the filter interface component; when the filter interface component is fixedly connected to the filter 500, the external purge device includes the filter 500 connected to the filter interface component.

[0078] When N=1, the first end of the second transmission channel 220 is connected to the second end of the first transmission channel 120, and the second end of the third transmission channel 230 is connected to the adapter unit 300; when N≥2, the first end of the second transmission channel 220 is connected in parallel to the second end of the first transmission channel 120, and the second end of the third transmission channel 230 is connected in parallel to the adapter unit 300, but is not limited to this. When M=N, the first end of the second transmission channel 220 can be connected one-to-one with the second end of the first transmission channel 120, and when M<N, the first end of the second transmission channel 220 can be partially connected in parallel to form a corresponding connection with the second end of the first transmission channel 120, depending on the specific situation.

[0079] When N≥2, a multi-channel filter 500 may be connected to filter the purge gas to prevent the life of the filter 500 from being rapidly reduced, or the filtering effect from being insufficient, or the filter 500 from being unable to be replaced, resulting in an inability to continuously purge the lens.

[0080] The external purge device may also include a pressure regulating unit 600, which is arranged between the gas source interface assembly 110 and the adapter unit 300. The pressure regulating unit 600 is used to adjust the air pressure on the side of the pressure regulating unit 600 away from the gas source interface assembly 110. This can stabilize the pressure of the purge gas entering the internal space of the channel device from the external purge device, avoid the influence of pressure fluctuations on the purge effect, and avoid the waste of purge gas from the gas source 400.

[0081] Preferably, the pressure regulating unit 600 is disposed between the air supply connection unit 100 and the filter connection unit 200. Thus, it is possible to avoid damage to the filter 500 connected to the filter connection unit 200 or accelerated reduction in life due to air pressure fluctuations.

[0082] The pressure regulating unit 600 may include a valve 610 with an adjustable opening. By adjusting the opening of the valve 610 with an adjustable opening, the air pressure at the rear end of the valve 610 with an adjustable opening may be adjusted.

[0083] For example, the valve 610 with adjustable opening is arranged between the second end of the first transmission channel 120 and the first end of the second transmission channel 220. By adjusting the opening of the valve 610 with adjustable opening, the rear end of the valve 610 with adjustable opening, that is, the air pressure in the second transmission channel 220 can be adjusted, but it is not limited to this. The specific implementation method of the pressure regulating unit 600 and the position of the pressure regulating unit 600 in the external purge device can be set according to actual needs, as long as the air pressure on the side of the pressure regulating unit 600 away from the air source interface assembly 110 can be adjusted.

[0084] In some embodiments, the pressure regulating unit 600 further includes a pressure sensor 620, which is used to measure the air pressure on the side of the valve 610 with adjustable opening away from the air source interface assembly 110. The pressure regulating unit 600 is configured so that the opening of the valve 610 with adjustable opening can be adjusted according to the air pressure measured by the pressure sensor 620. By measuring the air pressure at the rear end of the valve 610 with adjustable opening through the pressure sensor 620, the opening of the valve 610 with adjustable opening is adjusted in feedback, so that the air pressure at the rear end of the valve 610 with adjustable opening can be stabilized, that is, the pressure stabilization function is achieved through the pressure regulating unit 600.

[0085] In some embodiments, see Figure 1 and Figure 2 As shown, the external purge device further includes a controller 700 , which can output an opening control signal to control the opening of the valve 610 with adjustable opening, thereby achieving air pressure regulation at the rear end of the valve 610 with adjustable opening.

[0086] In some embodiments, the external purge device or pressure regulating unit 600 includes a pressure sensor 620, and a first display 630 for displaying the air pressure at the rear end of the valve 610 with adjustable opening measured by the pressure sensor 620, such as a pointer display meter or an LED display meter, etc., and the displayed content is, for example, the air pressure value. The pressure sensor 620 is used to measure the air pressure on the side of the valve 610 with adjustable opening away from the air source interface assembly 110. Therefore, when using the external purge device, the user can adjust the opening of the valve 610 with adjustable opening according to the display content of the first display 630 to achieve air pressure regulation at the rear end of the valve 610 with adjustable opening. The opening of the valve 610 with adjustable opening can be adjusted manually or by the controller 700. The method of adjustment by the controller 700 is the same as in the previous embodiment and will not be repeated here.

[0087] In some embodiments, the external purge device includes a pressure sensor 620 and a controller 700. The pressure sensor 620 is used to measure the air pressure on the side of the adjustable opening valve 610 away from the air source interface assembly 110, and generate a pressure signal according to the measured air pressure. The controller 700 can obtain the pressure signal and output an opening control signal according to the pressure signal. Thus, the controller 700 can feedback control the opening of the adjustable opening valve 610 according to the measured air pressure at the rear end of the adjustable opening valve 610, so as to achieve the stability of the air pressure at the rear end of the adjustable opening valve 610.

[0088] The gas source 400 connected to the gas supply connection unit 100 may include a purge gas storage device and / or a purge gas preparation device. When the gas source 400 includes a purge gas storage device, the gas supply pressure of the purge gas storage device decreases as the gas storage amount decreases; when the gas source 400 includes a purge gas preparation device, the gas supply pressure is determined by the output end of the purge gas preparation device. That is, during the use of the external purge device, the gas supply pressure of the gas source 400 is prone to fluctuations. By setting up a pressure regulating unit 600, the pressure fluctuation of the purge gas can be smoothed to avoid affecting the lens purge, avoiding damage to the filter connection unit 200, accelerating the reduction of the service life, and excessive consumption of the purge gas.

[0089] M≥2, the second ends of the first transmission channels 120 are connected in parallel and connected to the pressure regulating unit 600. Thus, only one pressure regulating unit 600 is provided to achieve air pressure regulation at the rear end of the pressure regulating unit 600.

[0090] Optionally, the gas supply connection unit 100 further includes a first control valve unit 130 , which is disposed on the first transmission channel 120 and corresponds one-to-one to the first transmission channel 120 .

[0091] M=1, the on-off of the air flow in the air supply connection unit 100 can be controlled by switching the first control valve unit 130 .

[0092] M≥2, the on-off of the airflow in the plurality of first transmission channels 120 in the air supply connection unit 100 can be controlled by controlling the first control valve unit 130. Thus, the switching of the plurality of air paths or air path combinations in the air supply connection unit 100 can be realized.

[0093] M≥2, the second ends of the first transmission channels 120 can be connected in parallel. Preferably, the first control valve unit 130 is a one-way valve. Thus, when the second ends of the first transmission channels 120 are connected in parallel, gas backflow between the first transmission channels 120 opened by the first control valve unit 130 can be avoided.

[0094] In some embodiments, the external purge device includes a first control valve unit 130 and a pressure regulating unit 600. Thus, when the gas source 400 connected to a first transmission channel 120 cannot continue to supply gas, the switch of the first control valve unit 130 can be controlled to switch to another first transmission channel 120 for gas supply; or when the gas pressure of the gas source 400 connected to a first transmission channel 120 is too low and cannot provide a purge gas with sufficient pressure, the switch of the first control valve unit 130 can be controlled or at least one first transmission channel 120 that was originally in a disconnected state can be additionally supplied with gas, so as to avoid the purge gas supply pressure being low or interrupted, which affects the lens purge.

[0095] For example, when an external purge device is used, when the air pressure at the rear end of the pressure regulating unit 600 is lower than a preset value, the first control valve unit 130 that was originally in a closed state is opened to continuously provide sufficient purge gas pressure. Optionally, the first control valve unit 130 that was originally in an open state is also closed to disconnect the gas source 400 that cannot continue to supply gas or whose gas supply pressure is too low; optionally, the disconnected gas source 400 that cannot continue to supply gas or whose gas supply pressure is too low is replaced or maintained.

[0096] For example, the pressure regulating unit 600 includes a valve 610 with an adjustable opening. When the external purge device is used, if the air pressure at the rear end of the pressure regulating unit 600 is still lower than the preset value, the opening of the valve 610 with an adjustable opening is adjusted first. When the opening of the valve 610 with an adjustable opening is greater than the preset value, for example, the opening of the valve 610 with an adjustable opening is already at its maximum, but the air pressure at the rear end of the pressure regulating unit 600 is still lower than the preset value, the first control valve unit 130 in the closed state is opened to continuously provide sufficient purge gas pressure. Optionally, the first control valve unit 130 that was originally in the open state is also closed to disconnect the gas source 400 that cannot continue to supply gas or whose gas supply pressure is too low; optionally, the disconnected gas source 400 that cannot continue to supply gas or whose gas supply pressure is too low is replaced or maintained.

[0097] In some embodiments, the external purge device includes a controller 700, and the controller 700 can control the switch of the first control valve unit 130, which can reduce manual intervention.

[0098] In this embodiment, optionally, the controller 700 can implement the function of the controller 700 for controlling the valve 610 with adjustable opening in the pressure regulating unit 600 in the above embodiment involving the pressure regulating unit 600, which will not be repeated here.

[0099] For example, the controller 700 can output an opening control signal to control the opening of the valve 610 with adjustable opening, and can control the switch of the first control valve unit 130. When an external purge device is used, it can be determined whether the air pressure at the rear end of the valve 610 with adjustable opening is within a preset range according to the display content of the first display 630 in the pressure regulating unit 600. When the air pressure at the rear end of the valve 610 with adjustable opening is low, the opening of the valve 610 with adjustable opening is adjusted first. When the opening of the valve 610 with adjustable opening corresponding to the opening control signal is greater than the preset value, for example, the opening of the valve 610 with adjustable opening has been opened to the maximum, but the air pressure at the rear end of the valve 610 with adjustable opening is still lower than the preset value, it is usually because the gas source 400 is insufficiently supplied. The first control valve unit 130 in the closed state can be opened by the controller 700 to provide sufficient purge gas pressure. Optionally, the controller 700 can also close the first control valve unit 130 that was originally in the open state after opening the first control valve unit 130 that was in the closed state.

[0100] For example, the controller 700 can obtain a pressure signal and output an opening control signal according to the pressure signal to control the opening of the valve 610 with adjustable opening. When the air pressure at the rear end of the valve 610 with adjustable opening corresponding to the pressure signal is lower than a preset value, and the opening of the valve 610 with adjustable opening corresponding to the opening control signal is greater than a preset value, the controller 700 can open the first control valve unit 130 in a closed state to provide sufficient purge gas pressure. Optionally, the controller 700 can also close the first control valve unit 130 that was originally in an open state after opening the first control valve unit 130 in a closed state.

[0101] Optionally, the external purging device further includes a life monitoring unit 800, which is used to monitor the life parameters of the filter 500 connected to the filter connection unit 200. Thus, it is possible to avoid the filter 500 from being used beyond its life, so that the filtered purge gas does not meet the requirements of purging the lens, such as reduced purity or introduction of new contamination.

[0102] In some embodiments, the life monitoring unit 800 includes a timer, which is at least used to record the accumulated working time of the filter 500 connected to the filter connection unit 200.

[0103] The timer records the accumulated working time of the filter 500 to determine the life of the filter 500, making life monitoring simpler and reducing the manufacturing cost of the external purge device.

[0104] It should be noted that the life monitoring unit 800 includes a timer, which is at least used to record the cumulative working time of the filter 500 connected to the filter connection unit 200, but is not limited thereto. The life monitoring unit 800 may also be a flow monitoring device or a gas purity monitoring device, etc., depending on the specific situation. The life monitoring unit 800 is a flow monitoring device, which can monitor the life of the filter 500 by monitoring the total flow of the gas filtered by the filter 500; the life monitoring unit 800 is a gas purity monitoring device, which can monitor the life of the filter 500 by monitoring the purity of the gas filtered by the filter 500.

[0105] The life monitoring unit is used to monitor the life parameters of the filter 500 connected to the filter interface component, including monitoring the life parameters of the filter 500 in use, but is not limited to this. It can also monitor the life parameters of all filters 500 connected to the filter connection unit 200, depending on the specific situation.

[0106] N≥2, the first ends of the second transmission channels 220 are connected in parallel and then connected to the gas supply unit 100. Preferably, they are connected to the gas supply connection unit 100 via the pressure regulating unit 600. Thus, only one pressure regulating unit 600 is provided to achieve the gas pressure adjustment at the rear end of the pressure regulating unit 600.

[0107] N≥2, the second ends of the third transmission channels 230 are connected in parallel and then connected to the adapter unit 300. Thus, one adapter unit 300 can be connected to multiple gas paths providing filtered purge gas, and the external purge device can continuously provide filtered purge gas.

[0108] Optionally, the filter connection unit 200 also includes a second control valve unit 240 and a third control valve unit 250, the second control valve unit 240 is arranged on the second transmission channel 220 and corresponds one-to-one to the second transmission channel 220, and the third control valve unit 250 is arranged on the third transmission channel 230 and corresponds one-to-one to the third transmission channel 230.

[0109] N=1, the on-off of the airflow in the filter connection unit 200 can be controlled by switching the second control valve unit 240 or the third control valve unit 250 .

[0110] N≥2, whether the multiple filters 500 in the filter connection unit 200 can pass the airflow can be controlled by controlling the second control valve unit 240 and the third control valve unit 250. Thus, the switching of different filters 500 can be achieved.

[0111] N≥2, the second ends of the third transmission channels 230 can be connected in parallel. Preferably, the third control valve unit 250 includes a one-way valve, so that when the second ends of the third transmission channels 230 are connected in parallel, gas backflow between the third transmission channels 230 opened by the third control valve unit 250 can be avoided.

[0112] In some embodiments, the external purge device includes a second control valve unit 240, a third control valve unit 250, and a life monitoring unit 800. Therefore, when the life monitoring unit 800 detects that the filter 500 in use has reached the end of its life, the second control valve unit 240 and the third control valve unit 250 corresponding to the filter 500 that has not reached the end of its life can be opened, and the second control valve unit 240 and the third control valve unit 250 corresponding to the filter 500 that has reached the end of its life can be closed, so as to realize the gas path switching of the filtered purge gas, and avoid the insufficient purity or interruption of the filtered purge gas, which affects the lens purge.

[0113] It can be understood that when the life parameter exceeds the preset range, the corresponding filter 500 has reached the end of its life.

[0114] Optionally, the life monitoring unit 800 further includes a second display, and the display content of the second display may include life parameters, or a result of determining whether the filter 500 has reached the end of its life based on the life parameters. Thus, when using an external purge device, the second control valve unit 240 and the third control valve unit 250 may be opened or closed based on the display content.

[0115] In some embodiments, the external purge device includes a controller 700, and the controller 700 can control the switching of the second control valve unit 240 and the third control valve unit 250, which can reduce manual intervention.

[0116] In this embodiment, optionally, the controller 700 can implement the function of the controller 700 for controlling the valve 610 with adjustable opening in the pressure regulating unit 600 in the embodiment of the pressure regulating unit 600 mentioned above, or can implement the function of the controller 700 for controlling the first control valve unit 130 in the embodiment of the first control valve unit 130 mentioned above, which will not be repeated here.

[0117] For example, the life monitoring unit 800 can generate a life signal based on the life parameter, and the controller 700 is configured to obtain the life signal and control the switching of the second control valve unit 240 and the third control valve unit 250 according to the life parameter corresponding to the life signal. For example, when the life parameter corresponding to the life signal exceeds a preset range, the controller 700 can determine that the filter 500 corresponding to the life signal has reached the end of its life. The controller 700 can open the second control valve unit 240 and the third control valve unit 250 connected to the filter 500 that has not reached the end of its life, and close the second control valve unit 240 and the third control valve unit 250 connected to the filter 500 that has reached the end of its life.

[0118] In some embodiments, the purge gas to be filtered has a high pressure, and the second control valve unit 240 and the third control valve unit 250 connected to multiple filters 500 may be opened simultaneously to improve the efficiency of providing the filtered purge gas.

[0119] The present application also proposes a semiconductor manufacturing system, including the external purge device disclosed above. The semiconductor manufacturing system may include a master controller to implement the functions implemented by the controller 700 in the above embodiment. It can be understood that the external purge device may include or exclude the controller 700. The master controller may control multiple external purge devices, and the master controller may also control other semiconductor manufacturing equipment.

[0120] The terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the feature. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0121] In this application, unless otherwise clearly specified and limited, the terms "assembly", "connection" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0122] In the description of this specification, the description with reference to the terms "some embodiments", "exemplarily", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0123] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application. Therefore, any changes or modifications made in accordance with the claims and description of the present application should fall within the scope of the patent of this application.

Claims

1. An external purge device, used for an exposure device, the exposure device comprising a projection device and a channel device, the projection device comprising at least one lens, the channel device having an internal space, the internal space being used to accommodate at least one lens in the projection device, characterized in that: The external purge device comprises: A gas supply connection unit, used for connecting a gas source to provide a purge gas; An adapting unit capable of being detachably connected to the channel device; A filter connection unit is connected between the gas supply connection unit and the adapter unit, and is used to connect a filter to filter the purge gas. The filtered purge gas is used to replace the gas in the internal space.

2. The external purge device according to claim 1, characterized in that: The gas supply connection unit comprises M gas source interface components and M first transmission channels, M≥1, the first transmission channels correspond to the gas source interface components one by one, the first end of the gas source interface component is used to connect to the gas source, the second end of the gas source interface component is connected to the first end of the first transmission channel, and the second end of the first transmission channel is connected to the filter connection unit; The filter connection unit includes N filter interface components, N second transmission channels and N third transmission channels, N≥1, the second transmission channels and the third transmission channels correspond one-to-one to the filter interface components, the filter interface component includes a filter interface part for connecting to the filter, the first end of the second transmission channel is connected to the second end of the first transmission channel, the filter interface component is connected between the second end of the second transmission channel and the first end of the third transmission channel, and the second end of the third transmission channel is connected to the adapter unit.

3. The external purge device according to claim 2, characterized in that: The gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds one-to-one to the first transmission channel.

4. The external purge device according to claim 2, characterized in that: The filter connection unit also includes a second control valve unit and a third control valve unit, the second control valve unit is arranged on the second transmission channel and corresponds to the second transmission channel one by one, and the third control valve unit is arranged on the third transmission channel and corresponds to the third transmission channel one by one.

5. The external purge device according to claim 2, characterized in that: The external purge device also includes a pressure regulating unit, which is arranged between the air source interface component and the adapter unit, and is used to adjust the air pressure on the side of the pressure regulating unit away from the air source interface component.

6. The external purge device according to claim 5, characterized in that: The voltage regulating unit is disposed between the second end of the first transmission channel and the first end of the second transmission channel.

7. The external purge device according to claim 6, characterized in that: The pressure regulating unit comprises a valve with adjustable opening.

8. The external purge device according to claim 7, characterized in that: M≥2, and the second ends of the M first transmission channels are connected in parallel and connected to the valve with adjustable opening.

9. The external purge device according to claim 8, characterized in that: The gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds to the first transmission channel one by one, and the first control valve unit includes a one-way valve.

10. The external purge device according to claim 8, characterized in that: The pressure regulating unit also includes a pressure sensor, which is used to measure the air pressure on the side of the valve with adjustable opening away from the air source interface assembly. The pressure regulating unit is configured so that the opening of the valve with adjustable opening can be adjusted according to the air pressure measured by the pressure sensor.

11. The external purge device according to claim 8, characterized in that: The external purge device further comprises a controller, and the controller is capable of outputting an opening control signal to control the opening of the valve with adjustable opening.

12. The external purge device according to claim 11, characterized in that: The external purge device also includes a pressure sensor, which is used to measure the air pressure on the side of the valve with adjustable opening away from the air source interface assembly, and generate a pressure signal based on the measured air pressure. The controller can obtain the pressure signal and output the opening control signal based on the pressure signal.

13. The external purge device according to claim 12, characterized in that: The air supply connection unit also includes a first control valve unit, which is arranged on the first transmission channel and corresponds one-to-one with the first transmission channel. The controller can control the switch of the first control valve unit according to the opening of the valve with adjustable opening and the pressure signal.

14. The external purge device according to claim 7 or 8, characterized in that: The pressure regulating unit includes a pressure sensor, which is used to measure the air pressure on the side of the valve with adjustable opening away from the air source interface component. The pressure regulating unit also includes a first display, which can display the air pressure measured by the pressure sensor.

15. The external purge device according to claim 14, characterized in that: The gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds one-to-one with the first transmission channel. The external purge device further includes a controller, which can control the switch of the first control valve unit.

16. The external purge device according to claim 2, characterized in that: The external purging device further comprises a life monitoring unit, and the life monitoring unit is used to monitor the life parameters of the filter connected to the filter interface component.

17. The external purge device according to claim 16, characterized in that: N≥2, the first end of the second transmission channel connected in parallel is connected to the gas supply connection unit, and the second end of the third transmission channel connected in parallel is connected to the adapter unit.

18. The external purge device according to claim 17, characterized in that: The filter connection unit also includes a second control valve unit and a third control valve unit, the second control valve unit is arranged on the second transmission channel and corresponds to the second transmission channel one by one, the third control valve unit is arranged on the third transmission channel and corresponds to the third transmission channel one by one, and the third control valve unit includes a one-way valve.

19. The external purge device according to claim 17, characterized in that: The filter connection unit also includes a second control valve unit and a third control valve unit, the second control valve unit is arranged on the second transmission channel and corresponds to the second transmission channel one-to-one, the third control valve unit is arranged on the third transmission channel and corresponds to the third transmission channel one-to-one, and the external purge device also includes a controller, which can control the switching of the second control valve unit and the third control valve unit.

20. The external purge device according to claim 19, characterized in that: The life monitoring unit can generate a life signal according to the life parameter, and the controller can obtain the life signal and control the switching of the second control valve unit and the third control valve unit according to the life parameter.

21. The external purge device according to claim 16 or 20, characterized in that: The life monitoring unit includes a timer, which is used at least to record the cumulative working time of the filter connected to the filter interface component, and the life parameter includes the cumulative working time.

22. The external purge device according to claim 2, characterized in that: The external purge device further includes an air source connected to the first end of the air source interface assembly, and / or A filter is connected to the filter interface component.

23. A semiconductor manufacturing system, characterized in that: Comprising an external purge device as described in any one of claims 1-22.

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