A cleaning system

Abstract

The present application relates to a kind of clean systems, belong to cleaning technical field, solve the problem of local cleaning of workpiece not completely in prior art, fixture poor adaptability.The present application includes fixture unit, cleaning liquid injection equipment and filter unit;Fixture unit is used to fix workpiece;Cleaning liquid injection equipment is used to inject cleaning liquid into workpiece interior, and the interior of workpiece is cleaned;Filter unit is used to filter the cleaning liquid discharged from workpiece, and the filtered cleaning liquid is re-injected into cleaning liquid injection equipment to be recycled.The present application can realize the cleaning effect of workpiece interior improvement, fixture is good to different diameter, different height workpiece adaptability.

Description

Technical Field

[0001] This invention relates to the field of cleaning technology, and more particularly to a clean system. Background Technology

[0002] Currently, the internal structure of workpieces is complex, with many dead corners and multiple hard-to-reach areas, resulting in incomplete local cleaning; in addition, the workpiece fixtures are difficult to process, making the workpiece fixtures poorly adaptable to the diameter and height of the workpieces, thus making workpiece cleaning a problem. Summary of the Invention

[0003] Based on the above analysis, the present invention aims to provide a cleaning system to solve the problems of incomplete local cleaning of workpieces and poor fixture adaptability.

[0004] The objective of this invention is mainly achieved through the following technical solutions:

[0005] A cleanroom system includes a clamping unit, a cleaning fluid injection device, and a filtration unit;

[0006] The clamping unit is used to fix the workpiece;

[0007] The cleaning fluid injection device is used to inject cleaning fluid into the workpiece to flush and clean the inside of the workpiece.

[0008] The filtration unit is used to filter the cleaning fluid discharged from the workpiece, and the filtered cleaning fluid is re-injected into the cleaning fluid injection device for recycling.

[0009] Furthermore, the clamping unit includes a first clamping structure; the first clamping structure includes a base plate, a support plate, a rib plate, a lower clamp, an upper clamp, and bolts.

[0010] Furthermore, the support plate is disposed between the base plate and the lower clamp to support the lower clamp and the workpiece.

[0011] Furthermore, the lower clamp and the upper clamp are used to clamp the workpiece; the upper clamp and the lower clamp are respectively provided with protrusions at both ends, and the protrusions have threaded holes in the middle, into which bolts can be inserted for fixing.

[0012] Furthermore, the support plate has different heights to accommodate the lower contact surface of workpieces of different heights.

[0013] Furthermore, the filtration unit includes a filtration component and a cleaning fluid collection component.

[0014] Furthermore, the cleaning fluid collection component is disposed at the lower part of the filter component and is used to collect the cleaning fluid filtered by the filter component.

[0015] Furthermore, the filtration assembly includes a first filtration element, a second filtration element, and a third filtration element.

[0016] Furthermore, it also includes an inflation device for injecting gas into the cleaning fluid in the workpiece.

[0017] Furthermore, it also includes a testing device for detecting the cleanliness of the cleaning fluid discharged from the workpiece.

[0018] Furthermore, the clamping unit also includes a second clamping structure; the second clamping structure includes a guide post, a guide sleeve, and a support plate; the guide sleeve is sleeved on the guide post and can move up and down along the guide post;

[0019] The support plate is fixed to the upper part of the guide sleeve, and the support plate can rise and fall with the guide sleeve.

[0020] Furthermore, the second clamp structure also includes a ball joint and a clamp mounting plate;

[0021] A lower clamp is installed on the upper part of the clamp mounting plate;

[0022] A ball joint support is provided in the middle of the support plate. The ball joint is located in the ball joint support and can rotate in the ball joint support, causing the clamp mounting plate and the workpiece to rotate and sway.

[0023] Furthermore, the second clamping structure also includes a limiting plate, which is disposed on the upper part of the ball joint. The limiting plate is provided with a limiting hole corresponding to the position of the ball joint, and the limiting hole is used to limit the swaying amplitude of the ball joint.

[0024] Furthermore, the lower clamp and the upper clamp are provided in half;

[0025] The lower clamp has a slider at its bottom and a groove at the top of the clamp mounting plate, and the slider can move in the groove.

[0026] A screw is provided between the upper clamps, and the screw is spirally connected to the upper clamps on both sides.

[0027] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0028] (1) The present invention uses a fixture to fix the workpiece, a cleaning fluid injection device to inject cleaning fluid into the workpiece to clean the workpiece, and the cleaning fluid after cleaning is filtered by a filtration unit for recycling.

[0029] (2) In this invention, there are multiple fixtures, and the height of the support plate and rib plate in each fixture is different to accommodate the lower contact surface of workpieces of different heights.

[0030] (3) The present invention sets the filter assembly as a three-layer filter component combination, which can filter particles of different levels and reduce the accumulation of particles in the filter components. The cleaning liquid discharged from the workpiece is filtered by the multi-layer filter components, which can effectively prevent impurities of different sizes from passing through, improve the filtration accuracy, and ensure that the quality of the cleaning liquid meets the requirements for recycling.

[0031] (4) Compared with the prior art, the present invention is equipped with an air-filling device, which is used to fill the workpiece with compressed gas during the workpiece cleaning process, thereby promoting the cleaning fluid to flow more quickly in the complex internal structure of the workpiece and forming a vortex, which can better clean various parts inside the workpiece. The compressed gas fills the cleaning fluid to form bubbles. The impact force generated after the bubbles burst hits the inner wall of the workpiece, causing the impurities and deposited pollutants attached to the inner wall to fall off and be carried out of the workpiece with the cleaning fluid, thereby improving the quality and efficiency of cleaning.

[0032] (5) Compared with the prior art, the present invention is equipped with a ball joint, which can swing back and forth and left and right in the ball joint support. Combined with the lifting of the guide column and the guide sleeve, the workpiece can swing up and down, left and right and back and forth, so that the cleaning fluid inside the workpiece can swing in multiple directions on the inner wall of the workpiece and collide with the inner wall, so that the excess material attached to the inner wall can be peeled off and enter the cleaning fluid, and the cleaning fluid can carry out the workpiece, thereby improving the cleaning efficiency and cleaning depth of large workpieces.

[0033] (6) Compared with the prior art, the present invention sets up a guide column and guide sleeve lifting structure, which enables the clamp mounting plate to be raised and lowered. On the one hand, this allows the fixture to adapt to workpieces with different support surfaces at different heights; on the other hand, it allows the workpiece to swing up and down. The upper clamp and lower clamp are evenly divided into half structures. A screw is set in the middle of the upper clamp to adjust the distance between the two sides of the upper clamp. A slider is set at the lower part of the lower clamp, which can move in the groove of the clamp mounting plate to adjust the distance between the two sides of the lower clamp. The distance between the upper clamp and the lower clamp is adjusted by bolts set on both sides, so as to fix workpieces with different diameters and contact surfaces at different heights, thereby improving the adaptability of the fixture to the diameter and height of the workpiece.

[0034] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the specification or be learned by practicing the invention. The objectives and other advantages of this invention can be realized and obtained from the content specifically pointed out in the text and accompanying drawings. Attached Figure Description

[0035] The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0036] Figure 1 This is a schematic diagram of the clean system in specific embodiment 1;

[0037] Figure 2 This is a schematic diagram of the first clamp structure in specific embodiment 1;

[0038] Figure 3 This is a schematic diagram of the filter unit in specific embodiment 1;

[0039] Figure 4 This is a schematic diagram of the scraper assembly and cleaning fluid collection assembly in specific embodiment 1;

[0040] Figure 5 This is a schematic diagram of the second clamp structure in specific embodiment 2;

[0041] Figure 6 This is a schematic diagram of the clamp structure in specific embodiment 2.

[0042] Figure label:

[0043] 1-Workpiece, 2-Fixture unit, 21-First clamping structure, 211-Base plate, 212-Support plate, 213-Rib plate, 214-Lower clamp, 215-Upper clamp, 216-Bolt, 22-Second clamping structure, 221-Fixing plate, 222-Guide post, 223-Guide sleeve, 224-Support plate, 2241-Spherical hinge support, 225-Limiting plate, 2251-Limiting hole, 226-Spherical hinge, 2261-Spherical hinge rod, 227-Clamping plate, 2271-Slide groove, 3-Cleaning fluid injection equipment, 4-Inflation equipment, 5-Filtering unit, 5 1-Filter assembly, 511-First filter element, 512-Second filter element, 513-Third filter element, 52-Excess material collection assembly, 521-Excess material collection hopper, 5211-Collection hopper placement rack, 53-Cleaning fluid collection assembly, 531-Collection tank, 532-Collection box, 5321-Discharge pipe, 533-Padded block, 54-Tilting assembly, 541-Filter element placement rack, 542-Rotating shaft, 543-Pressure plate, 544-Shaker arm, 55-Scraper assembly, 551-Scraper holder, 552-Scraper bar, 553-Scraper, 6-Detection equipment. Detailed Implementation

[0044] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0045] Example 1

[0046] One embodiment of the present invention provides a cleanroom system, such as... Figure 1As shown, it includes a clamping unit 2, a cleaning fluid injection device 3, a filtration unit 5, and a testing device 6.

[0047] In this embodiment, the clamping unit 2 is the first clamping structure 21, such as... Figure 2 As shown, the first clamp structure 21 includes a base plate 211, a support plate 212, a rib plate 213, a lower clamp 214, an upper clamp 215, and bolts 216.

[0048] A support plate 212 is vertically fixed in the middle of the base plate 211, and ribs 213 are symmetrically arranged on both sides to provide support for the support plate 212. It should be noted that the support plate 212 and the ribs 213 have various heights to match the height of the lower contact surface of the workpiece 1.

[0049] The lower clamp 214 is located at the upper end of the support plate 212 and is used to combine with the upper clamp 215 to clamp the workpiece 1. The upper clamp 215 and the lower clamp 214 each have a protruding part at both ends, and a threaded hole is provided in the middle of the protruding part. The protruding parts of the upper clamp 215 and the lower clamp 214 are aligned, and the workpiece 1 is fixed by inserting bolts 216.

[0050] Furthermore, in this embodiment, multiple fixtures are provided, and the heights of the support plate 212 and rib plate 213 in each fixture are different to accommodate the lower contact surface of workpieces 1 of different heights.

[0051] Since the lower contact surface of workpiece 1 has different heights, this embodiment sets up support plates 212 and ribs 213 with different heights to make the fixture adapt to different workpieces and improve the adaptability of the fixture to workpieces of different heights.

[0052] The cleaning fluid injection device 3 is used to inject cleaning fluid into the inside of the workpiece 1 for cleaning. Before injection, the inlet and outlet of the cleaning fluid injection device 3 need to be connected to perform self-circulation. After the required cleanliness is achieved, the cleaning fluid is injected into the workpiece 1.

[0053] Furthermore, an air-filling device 4 is also provided. The air-filling device 4 is used to fill the workpiece 1 with compressed gas during the cleaning process, so that it mixes with the cleaning fluid. The compressed gas can increase the flow speed of the cleaning fluid, form a vortex, increase the scouring force on the cleaning area, and improve the cleaning quality.

[0054] Compared to existing technologies, this embodiment includes an air-filling device 4, used to inject compressed gas into the workpiece 1 during the cleaning process. This propels the cleaning fluid to flow more rapidly within the complex internal structure of the workpiece 1, forming eddies that better clean various parts of the workpiece 1. The compressed gas filling the cleaning fluid forms bubbles; the impact force generated after the bubbles burst strikes the inner wall of the workpiece 1, causing impurities and deposited contaminants attached to the inner wall to detach and be carried out of the workpiece 1 by the cleaning fluid, thereby improving the quality and efficiency of the cleaning process.

[0055] like Figure 3 As shown, the filtration unit 5 includes a filtration component 51, a waste collection component 52, and a cleaning fluid collection component 53.

[0056] In this embodiment, the filter assembly 51 includes a first filter element 511, a second filter element 512, and a third filter element 513. The first filter element 511, the second filter element 512, and the third filter element 513 are arranged from top to bottom, with the filtration accuracy increasing sequentially. The first filter element 511 is a coarse filter, exemplarily with a filtration accuracy of 15mm; the second filter element 512 is a medium filter, exemplarily with a filtration accuracy of 1mm; and the third filter element 513 is a fine filter, exemplarily with a filtration accuracy of 5µm.

[0057] In this embodiment, the filter assembly 51 is a three-layer filter combination, which can filter particles of different sizes and reduce the accumulation of particles in the filter components. The cleaning fluid discharged from the workpiece 1 is filtered by the multi-layer filter components, which can effectively prevent impurities of different sizes from passing through, improve the filtration accuracy, and ensure that the quality of the cleaning fluid meets the requirements for recycling.

[0058] To facilitate the collection of excess material, the first filter element 511, the second filter element 512, and the third filter element 513 are all shaped as a hollow mesh structure with an arc-shaped concave surface in the middle, which facilitates the collection of excess material to the middle of the filter element. Furthermore, each filter element is inclined, allowing excess material to slide down to the lower end of the filter screen by gravity.

[0059] The waste collection assembly 52 is located at the lower end of the filter element and is used to collect the waste filtered out by the filter element. The waste collection assembly 52 includes a waste collection hopper 521 and a collection hopper placement frame 5211. The waste collection hopper 521 can be snapped into the collection hopper placement frame 5211 for fixation.

[0060] like Figure 4 As shown, the cleaning fluid collection assembly 53 includes a collection tank 531 and a receiving tank 532. The collection tank 531 is inclined by raising one end with a pad 533 to facilitate the flow of the collected filtered cleaning fluid into the receiving tank 532. The receiving tank 532 is provided with an outlet pipe 5321, which can be used to circulate the cleaning fluid into the cleaning fluid injection device 3.

[0061] Furthermore, the filter unit 5 also includes a tilting assembly 54. The tilting assembly 54 is symmetrically arranged on both sides of the filter component and includes a filter component placement frame 541, a rotating shaft 542, a pressure plate 543, and a rocker arm 544.

[0062] The filter element has two ends mounted on and hinged to a filter element mounting bracket 541. Pressure plates 543 are located on both sides of the filter element. Each pressure plate 543 is L-shaped, with one edge fixed to the flat surfaces of both sides of the filter element, and the other edge hinged to the filter element mounting bracket 541 via a rotating shaft 542. Rotating the pressure plate 543 causes the filter element to rotate accordingly.

[0063] Furthermore, a rocker arm 544 is provided on the other side of the filter component placement rack 541. The rocker arm 544 is coaxially arranged with the pressure plate 543 and can rotate simultaneously. When it is necessary to empty the excess material, the rocker arm 544 is rotated, causing the pressure plate 543 to press down on the filter component, tilting the filter component, and allowing the excess material in the filter component to enter the excess material collection hopper 521.

[0064] Compared to existing technologies, this embodiment features an inclined filter element and a concave center, which facilitates the collection of filtered residue. The embodiment also incorporates a rocker arm 544 and a pressing plate 543 to press the filter element, allowing it to rotate and empty the collected residue, making operation convenient.

[0065] Furthermore, because the third filter element 513 has a high filtration precision and very small pores, some small debris such as iron filings carried out by the cleaning oil will adhere to the third filter element 513, resulting in a decrease in filtration efficiency. In this embodiment, the filter unit 5 is also provided with a scraper assembly 55, which is used to scrape the small debris adhered to the third filter element 513 into the debris collection hopper 521.

[0066] The scraper assembly 55 includes a scraper holder 551, a scraper rod 552, and a scraper 553. The scraper assembly 55 is disposed at the end of the third filter component 513. The scraper holder 551 has a through hole in the middle, into which the scraper rod 552 can be inserted. The curvature of the bottom of the scraper 553 is the same as the curvature of the middle part of the third filter component 513.

[0067] Compared with the prior art, this embodiment is provided with a scraper assembly 55, which is used to scrape small excess objects adhering to the third filter component 513 into the excess object collection hopper 521, so as to avoid the accumulation of excess objects and blockage of the mesh of the filter component, and reduce the excess object residue in the filter component.

[0068] Furthermore, it also includes a testing device 6, used to test the cleanliness and cleaning effect of the kerosene cleaning medium.

[0069] Example 2

[0070] The difference between this embodiment and Embodiment 1 is that this embodiment uses a second clamping structure 22 instead of the first clamping structure 21. In Embodiment 1, the first clamping structure 21 uses clamps to fix the workpiece 1. Different clamps are used depending on the diameter of the workpiece 1. Since the workpiece 1 is semi-circular, circular, or other shapes, the height of the support plate 212 varies. Different clamps and fixtures need to be changed according to the different diameters of the workpiece 1.

[0071] like Figure 5 As shown, the second clamping structure 22 includes a fixed plate 221, a guide post 222, a guide sleeve 223, and a support plate 224. The guide post 222 and the guide sleeve 223 are installed on both sides of the fixed plate 221. The guide sleeve 223 is sleeved on the guide post 222 and can move up and down along the guide post 222. The support plate 224 is fixed to the upper part of the guide sleeve 223, and the support plate 224 can move up and down together with the guide sleeve 223.

[0072] The second clamping structure 22 also includes a ball joint 226, a ball joint rod 2261, and a clamp mounting plate 227 fixed to the ball joint rod 2261. A ball joint support 2241 is provided in the middle of the support plate 224, and the ball joint 226 is disposed in the ball joint support 2241, which can rotate in multiple directions in the ball joint support 2241, thereby driving the clamp mounting plate 227 to rotate in multiple directions.

[0073] Furthermore, the second clamping structure 22 is also provided with a limiting plate 225 for limiting the rotation angle of the ball joint 226. The limiting plate 225 is installed on the upper part of the support plate 224, and a limiting hole 2251 is provided at the position corresponding to the ball joint support 2241, through which the ball joint rod 2261 can pass. Furthermore, the diameter of the limiting hole 2251 is larger than the diameter of the ball joint 226. When the ball joint 226 rotates in the ball joint support 2241, the ball joint rod 2261 rotates inside the limiting hole 2251 to limit the sway amplitude of the ball joint 226.

[0074] During the internal cleaning of the workpiece, on the one hand, the rotation of the ball joint 226 causes the workpiece 1 and the cleaning fluid inside the workpiece 1 to sway left and right and back and forth; on the other hand, the up and down movement of the guide post 222 and the guide sleeve 223 enables the workpiece 1 and the fixture to sway up and down. Therefore, in this embodiment, the workpiece 1 can achieve up, down, left, right, front and back swaying to thoroughly clean the dead corners inside the workpiece 1.

[0075] Compared with the prior art, this embodiment is provided with a ball joint 226, which can swing back and forth and left and right in the ball joint support 2241. Combined with the lifting and lowering of the guide column 222 and the guide sleeve 223, the workpiece can swing up, down, left, right and back and forth, so that the cleaning fluid inside the workpiece 1 can swing and collide with the inner wall of the workpiece 1, causing the excess material attached to the inner wall to be peeled off and enter the cleaning fluid, which then carries the workpiece 1 out, thereby improving the cleaning efficiency and cleaning depth of the workpiece 1.

[0076] like Figure 6 As shown, furthermore, to accommodate clamps of different diameters, the upper part of the clamp mounting plate 227 is provided with a sliding groove 2271, the length direction of which is the same as the length direction of the clamp mounting plate 227. The lower clamp 214 is a split design. The bottom of the lower clamp 214 has a slider, which can drive the lower clamp 214 to slide on the sliding groove 2271, so that the distance between the two sides of the lower clamp 214 increases or decreases to accommodate workpieces 1 of different diameters.

[0077] The upper clamp 215 is a split design. A screw is located in the middle of the upper clamp 215, and the screw is screwed to the two upper clamps 215 on either side. By rotating the screw, the distance between the two sides of the two upper clamps 215 can be increased or decreased to accommodate workpieces 1 of different diameters. Long bolts 216 are provided on both sides of the upper clamp 215 and the lower clamp 214 for connecting and fixing the upper clamp 215 and the lower clamp 214.

[0078] Compared to existing technologies, this embodiment features a lifting structure with guide posts 222 and guide sleeves 223, enabling the clamp mounting plate 227 to rise and fall, thus allowing the fixture to adapt to workpieces 1 with different support surfaces at varying heights. An upper clamp 215 and a lower clamp 214 are evenly divided into halves. A screw is located in the middle of the upper clamp 215 to adjust the distance between its two sides. A slider is located at the bottom of the lower clamp 214, allowing it to move within the groove 2271 of the clamp mounting plate 227 to adjust the distance between its two sides. The distance between the upper clamp 215 and the lower clamp 214 is adjusted using bolts 216 located on both sides, enabling the fixing of workpieces 1 with different diameters and contact surfaces at varying heights, thereby improving the fixture's adaptability to the diameter and height of the workpiece 1.

[0079] When fixing workpiece 1, the distance between the two sides of the lower clamp 214 is adjusted by sliding the two lower clamps 214 in the slide groove 2271 to adapt to the diameter of workpiece 1. After that, workpiece 1 is placed on the lower clamp 214 and the lower clamp 214 is fixed. The upper clamp 215 is then fastened on top of workpiece 1 and adjusted to the diameter of workpiece 1 by the screw between the two upper clamps 215. The upper and lower clamps 214 are then fixed together with bolts 216.

[0080] The clamp and workpiece 1 are fixed to the clamp mounting plate 227. The clamp mounting plate 227 is connected to the support plate 224 via a ball joint 226. The support plate 224 can move up and down with the guide sleeve 223 to adapt to the height of the lower contact surface of the workpiece 1.

[0081] The ball joint 226 at the lower part of the clamp mounting plate 227 can rotate up, down, left, right, forward, and backward within the ball joint support 2241, causing the clamp and workpiece 1 to rotate. Due to the limiting hole 2251, the sway angle of the clamp and workpiece 1 is within the limited range.

[0082] When workpiece 1 rotates, the cleaning fluid inside workpiece 1 sloshes around, collides with the inner wall of workpiece 1, washes away excess material from the inner wall of workpiece 1, and allows the excess material to enter the cleaning fluid, which is then discharged together with the cleaning fluid.

[0083] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A cleanroom system, characterized in that, Includes a clamping unit (2), a cleaning fluid injection device (3), and a filtration unit (5); The clamping unit (2) is used to fix the workpiece (1); The cleaning fluid injection device (3) is used to inject cleaning fluid into the workpiece (1) to flush and clean the inside of the workpiece (1). The filtration unit (5) is used to filter the cleaning fluid discharged from the workpiece (1), and the filtered cleaning fluid is re-injected into the cleaning fluid injection device (3) for recycling. The clamping unit (2) includes a second clamping structure (22); the second clamping structure (22) includes a fixing plate (221), a guide post (222), a guide sleeve (223), a support plate (224), a ball joint (226), and a clamp mounting plate (227); the guide post (222) and the guide sleeve (223) are installed on both sides of the fixing plate (221), the guide sleeve (223) is sleeved on the guide post (222) and can move up and down along the guide post (222); the support plate (224) is fixed on the upper part of the guide sleeve (223), and the support plate (224) can move up and down together with the guide sleeve (223); A ball joint support (2241) is provided in the middle of the support plate (224), and the ball joint (226) is provided in the ball joint support (2241) and can rotate in multiple directions in the ball joint support (2241), thereby driving the clamp mounting plate (227) to rotate in multiple directions. The upper part of the clamp mounting plate (227) is provided with a sliding groove (2271), the length direction of the sliding groove (2271) is the same as the length direction of the clamp mounting plate (227); the lower clamp (214) is provided on the sliding groove (2271); the lower clamp (214) is a split design; the bottom of the lower clamp (214) has a slider, the slider can drive the lower clamp (214) to slide on the sliding groove (2271).

2. The cleanroom system according to claim 1, characterized in that, The clamping unit (2) further includes a first clamping structure (21); the first clamping structure (21) includes a support plate (212); the support plate (212) has different heights to accommodate the lower contact surface of workpieces (1) of different heights.

3. The cleanroom system according to claim 1, characterized in that, The filtration unit (5) includes a filtration component (51) and a cleaning fluid collection component (53).

4. The cleanroom system according to claim 3, characterized in that, The cleaning fluid collection component (53) is located at the lower part of the filter component (51) and is used to collect the cleaning fluid filtered by the filter component (51).

5. The cleanroom system according to claim 3, characterized in that, The filter assembly (51) includes a first filter element (511), a second filter element (512), and a third filter element (513).

6. The cleanroom system according to claim 1, characterized in that, It also includes an inflation device (4) for filling the cleaning fluid in the workpiece (1) with gas.

7. The cleanroom system according to claim 1, characterized in that, It also includes a testing device (6) for detecting the cleanliness of the cleaning fluid discharged from the workpiece (1).

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