Ball array type magnetic resistance time grating angular displacement sensor and displacement measurement method

Abstract

The invention relates to the technical field of precision angular displacement measurement sensors, and discloses a ball array type reluctance time grating angular displacement sensor and a displacement measurement method.The ball array type reluctance time grating angular displacement sensor comprises a stator and a mover, and the stator comprises a stator base body and a plurality of steel balls installed in the stator base body; the rotor comprises a rotor base body and a sine / cosine winding arranged along the annular outer surface of the rotor base body, the sine winding is provided with an S + excitation winding, an S-excitation winding and a sine induction winding, and the cosine winding is provided with a C + excitation winding, a C-excitation winding and a cosine induction winding. The sine induction winding and the cosine induction winding respectively generate two paths of electric signals U1 and U2, a traveling wave signal U carrying linear displacement information is output through the logic circuit and is compared with a same-frequency reference signal Uf in phase, and displacement decoupling is achieved. Error interference caused by the external environment can be effectively reduced, the measuring range of the sensor is increased, and the measuring precision is improved.

Description

Background Art

[0002] The types of sensors for angular displacement measurement on the market include grating sensors, inductive sensors, capacitive sensors, laser interferometer measurement systems, etc. In particular, grating sensors and laser interferometer measurement systems are the most commonly used angular displacement measurement sensors, but the measurement error of laser interferometer increases with the increase of measurement stroke, and it is sensitive to the use environment. Changes in air temperature and humidity, air pressure, carbon dioxide content, and airflow disturbances will cause measurement errors, so it is not suitable for long-term working applications.

[0003] The grating angular displacement sensor has the advantages of long service life, strong anti-interference ability and stable movement speed. Therefore, the grating angular displacement sensor is more in line with industrial needs. However, the grating angular displacement sensor uses a spatial reference as a measurement reference. Its accuracy and resolution are affected by the limited spatial reference, resulting in a small measurement range and poor accuracy. Summary of the invention

[0004] The invention provides a ball array type magnetoresistive time grid angular displacement sensor and a displacement measurement method.

[0005] In the first aspect, the present invention provides a ball array magnetoresistive time-grid angular displacement sensor, comprising a stator and a mover, the stator comprising a stator base and a plurality of steel balls tightly mounted in the stator base, the mover comprising a mover base and a sine winding and a cosine winding axially fixed on the outer surface of the mover base, the stator base and the mover base are both made of non-magnetic conductive material, the stator base and the mover base are both hollow cylindrical structures, the mover is sleeved outside the stator, and the stator and the mover are coaxially mounted, the mover performs a circular motion around the center of a circle along the outer surface of the stator, the sine winding is provided with an S+ excitation winding, an S- excitation winding and a sine induction winding, and the cosine winding is provided with a C+ excitation winding, a C- excitation winding and a cosine induction winding.

[0006] The sinusoidal winding is provided with a plurality of coils, and the sinusoidal winding includes an S+ excitation winding, an S- excitation winding and a sinusoidal induction winding, wherein the S+ excitation winding is composed of a coil numbered A 2i-1 The S-excitation winding consists of a coil numbered A 2i The sine induction winding is composed of coils, wherein i is a positive integer; the cosine winding is arranged with a plurality of coils, and the cosine winding includes a C+ excitation winding, a C- excitation winding and a cosine induction winding, wherein the C+ excitation winding is composed of a coil numbered B 2i-1 The C-excitation winding consists of a coil numbered B 2i The cosine induction winding is composed of coils X2, where i is a positive integer;

[0007] The winding direction of the two adjacent excitation coils in the sinusoidal winding is not fixed, and the wiring method is not fixed. The winding direction and wiring method of the coils for the purpose of establishing an alternating time-varying magnetic field are all possible, that is, the coils numbered A 2i The coil number is A 2i-1 The coil is wound in the opposite direction and connected in the forward direction, or numbered A 2i The coil number is A 2i-1 The coils are wound in the same direction, connected in reverse, and are numbered A 2i The coil number is A 2i-1 The coils are arranged at equal intervals and alternately, connected in series to form an excitation winding and a sinusoidal excitation current is passed through it.

[0008] The winding directions of the two adjacent excitation coils in the cosine winding are not fixed, and the wiring method is not fixed. Any coil arrangement method and wiring method for the purpose of establishing an alternating time-varying magnetic field are acceptable, that is, numbered B 2i Coil numbered B 2i-1 The coil is wound in the opposite direction and connected in the forward direction, or numbered B 2i Coil numbered B 2i-1 The coils are wound in the same direction, connected in reverse, and are numbered B 2i Coil numbered B 2i-1 The coils are arranged at equal intervals and alternately, connected in series to form an excitation winding and a cosine excitation current is passed through it.

[0009] The coil X1 in the sinusoidal winding 22 is arranged on the circumference of the mover and is located between the coil numbered A1 and the coil numbered A2 in the sinusoidal winding. 2i The coils are respectively on the angular bisector formed by the center of the circle; the coil X2 in the cosine winding 23 is arranged on the circumference of the mover and is located at the coil numbered B1 in the cosine winding, numbered B 2i The coils are on the angle bisectors formed by the center of the circle.

[0010] The sinusoidal winding 22 is numbered A 2i The coil number is A 2i-1 The coil and the cosine winding 23 are numbered B 2i Coil numbered B 2i-1 The sizes of the coils are the same, and the size of the coil X1 in the sine winding is the same as the size of the coil X2 in the cosine winding.

[0011] The angle that the mover rotates relative to the center of the circle after one cycle of movement along the stator is taken as the standard angle, and the center of the coil numbered A1 in the sine winding 22 and the coil numbered B1 in the cosine winding 23 are spaced on the circumference by a standard angle of a first preset multiple, wherein the first preset multiple is (M+1 / 4), M is a positive integer; the adjacent coils numbered A1 in the sine winding 22 and B1 in the cosine winding 23 are spaced by a first preset multiple of the standard angle, wherein the first preset multiple is (M+1 / 4), M is a positive integer; 2iThe coil number is A 2i-1 The coils of the cosine winding 23 are spaced at a standard angle of a second preset multiple along the center of the rotor circumference, wherein the second preset multiple is 1 / N1, and N1 is a positive integer; the adjacent numbered B in the cosine winding 23 2i Coil numbered B 2i-1 The coils are spaced along the center of the rotor's circumference at a standard angle that is a third preset multiple, wherein the third preset multiple is 1 / N2, and N2 is a positive integer.

[0012] Optionally, the adjacent ones of the sinusoidal windings 22 are numbered A 2i The coil number is A 2i-1 The coils of the cosine winding 23 and the coil X1 in the sine winding are printed on different PCB boards using PCB manufacturing technology. 2i Coil numbered B 2i-1 The coil and the X2 coil in the cosine winding are printed on different PCB boards using PCB manufacturing technology.

[0013] Optionally, the stator base 11 is made of stainless steel.

[0014] Optionally, the mover matrix 21 is made of microcrystalline glass ceramics.

[0015] Optionally, the winding direction and connection mode of two adjacent coils in the sine winding are preferably connected in a way that the magnetic field is most uniform. The winding direction and connection mode of two adjacent coils in the cosine winding are preferably connected in a way that the magnetic field is most uniform.

[0016] The beneficial effects of the present invention are as follows: the stator matrix and the mover matrix are both made of non-magnetic conductive materials, so the magnetic field propagation path is constrained inside the tightly installed steel balls by utilizing the magnetic resistance characteristics of the non-magnetic conductive materials, and by changing the number A in the sinusoidal winding 2i The coil number is A 2i-1 The coil and cosine winding are numbered B 2i Coil numbered B 2i-1 The excitation signal of the coil controls the main distribution area and direction of the magnetic field, which can effectively reduce the error interference caused by the external environment, increase the sensor measurement range, and improve the measurement accuracy. In addition, both the sine winding and the cosine winding can be manufactured using PCB technology, without relying on ultra-precision manufacturing processes, simplifying the overall structure and reducing manufacturing costs.

[0017] In a second aspect, the present invention provides a displacement measurement method, which is applied to a ball array type magnetoresistive time grid angular displacement sensor as described above, comprising:

[0018] Applying a sinusoidal current excitation signal to the S+ excitation winding and the S- excitation winding in the sinusoidal winding on the outer surface of the mover base, and applying a cosine current excitation signal to the C+ excitation winding and the C- excitation winding in the cosine winding; wherein the sinusoidal current excitation signal and the cosine current excitation signal have the same frequency and the same amplitude;

[0019] When the mover moves relative to the outer surface of the stator base around the center of the circle, the sine induction winding and the cosine induction winding output standing wave signals U1 and U2 respectively;

[0020] The two standing wave signals U1 and U2 are processed by the logic circuit to output the traveling wave signal U with angular displacement information;

[0021] The traveling wave signal U is compared with the reference signal U f Perform phase comparison to determine the phase difference;

[0022] The phase difference and the same frequency reference signal U are measured by high-frequency clock pulses f Interpolation is performed to determine the number of the first high-frequency clock pulses for interpolating the phase difference and the interpolation of the same-frequency reference signal U f The number of second high-frequency clock pulses;

[0023] The linear displacement of the mover relative to the stator is determined according to the number of the first high-frequency clock pulses and the number of the second high-frequency clock pulses. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0025] Figure 1 A schematic diagram of the structure of a ball array type magnetoresistive time-grid angular displacement sensor according to an embodiment of the present invention;

[0026] Figure 2 A structural diagram of a cross section of a mover according to an embodiment of the present invention;

[0027] Figure 3 is a structural diagram of a cross section of a stator according to an embodiment of the present invention;

[0028] Figure 4 It is a schematic diagram of the structure of a sine winding, a cosine winding, a sine induction winding and a cosine induction winding;

[0029] Figure 5 PCB printed coil winding schematic diagram for S+ excitation winding, S- excitation winding, C+ excitation winding and C- excitation winding;

[0030] Figure 6 A cross-sectional schematic diagram of a ball array type magnetoresistive time-grid angular displacement sensor according to an embodiment of the present invention;

[0031] Figure 7 PCB printed coil winding schematic diagram for sine induction winding and cosine induction winding;

[0032] Figure 8 It is a cross-sectional schematic diagram of a ball array type magnetoresistive time-grid angular displacement sensor in the second embodiment;

[0033] Fig. 9 It is a cross-sectional schematic diagram of a ball array type magnetoresistive linear time-grid displacement sensor in Example 3;

[0034] Fig.10 A schematic flow chart of a displacement measurement method according to an embodiment of the present invention;

[0035] Fig.11 The figure is a flow chart of a displacement measurement method according to another embodiment of the present invention.

[0036] Description of the drawings: stator 1 , stator base 11 , mover 2 , mover base 21 , sine winding 22 , cosine winding 23 , sine induction winding X1 , cosine induction winding X2 , steel ball 12 . DETAILED DESCRIPTION

[0037] The following examples are provided to further explain and supplement the present invention and do not constitute any limitation to the present invention.

[0038] A ball array type magnetoresistive time-grid angular displacement sensor and a displacement measurement method according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0039] like Figure 1-4 As shown, the present invention provides a ball array type magnetoresistive time-grid angular displacement sensor, comprising a stator 1 and a mover 2, wherein the stator 1 comprises a stator base 11 and a plurality of steel balls 12 tightly mounted in the stator base 11, the mover 2 comprises a mover base 21 and a sine winding 22 and a cosine winding 23 axially fixed on the outer surface of the mover base 21, the stator base 11 and the mover base 21 are both hollow cylindrical structures, the mover 2 is sleeved outside the stator 1, and the stator 1 and the mover 2 are coaxially mounted, and the mover 2 performs a circular motion around the center of a circle along the outer surface of the stator 1.

[0040] The angle that the mover 2 rotates relative to the center of the circle after moving along the stator 1 for one cycle is taken as the standard angle, such as Figure 3 As shown, the angle that the mover 2 rotates relative to the center O after moving along the stator 1 for one cycle is taken as the standard angle θ.

[0041] like Figure 4 As shown, a sinusoidal winding 22 is provided within a standard angle arc, and the sinusoidal winding 22 is provided with an S+ excitation winding, an S- excitation winding and a sinusoidal induction winding X1, wherein the S+ excitation winding is composed of a winding numbered A 2i-1The S-excitation winding consists of a coil numbered A 2i The sine induction winding is composed of coil X1. In addition, a cosine excitation winding 23 is set within a standard angle. The cosine winding 23 is provided with a C+ excitation winding, a C- excitation winding and a cosine induction winding X2. The C+ excitation winding is composed of a coil numbered B 2i-1 The C-excitation winding consists of a coil numbered B 2i The cosine induction winding is composed of coil X2, where i is a positive integer.

[0042] The S+ excitation winding and the S- excitation winding in the sine winding 22 are wound in opposite directions, that is, numbered A 2i The coil number is A 2i-1 The coils are wound in opposite directions and are numbered A 2i The coil number is A 2i-1 The coils are arranged in series with equal spacing and alternating arrangement to form an excitation winding and a sinusoidal excitation current is passed through; the C+ excitation winding and the C- excitation winding in the cosine winding 23 are wound in opposite directions, that is, numbered B 2i Coil numbered B 2i-1 The coils are wound in the opposite direction and are numbered B 2i Coil numbered B 2i-1 The coils are arranged at equal intervals and alternately, connected in series to form an excitation winding and a cosine excitation current is passed through it.

[0043] The sine winding 22 is numbered A 2i The coil number is A 2i-1 The cosine winding 23 is numbered B 2i Coil numbered B 2i-1 The sizes of the coils are the same, and the size of the coil X1 in the sine induction winding is the same as the size of the coil X2 in the cosine induction winding.

[0044] The coil X1 in the sinusoidal winding 22 is arranged on the circumference of the mover and is located between the coil numbered A1 and the coil numbered A2 in the sinusoidal winding. 2i The coils are respectively on the angular bisector formed by the center of the circle; the coil X2 in the cosine winding 23 is arranged on the circumference of the mover and is located at the coil numbered B1 in the cosine winding, numbered B 2i The coils are on the angle bisectors formed by the center of the circle.

[0045] In this embodiment, the stator base 11 and the mover base 21 are both made of non-magnetic conductive materials:

[0046] Optionally, the stator base 11 is made of stainless steel;

[0047] Optionally, the mover matrix 21 is made of microcrystalline glass ceramics.

[0048] Optionally, the number of the sinusoidal winding 22 is A 2i The coil number is A 2i-1 The coil and the coil X1 in the sinusoidal induction winding are printed on different PCB boards using PCB manufacturing technology and are numbered A. 2i The coil number is A 2i-1 The coils are arranged in series with equal spacing and alternating arrangement to form an excitation winding and a sinusoidal excitation current is passed through; the cosine winding 23 is numbered B 2i Coil numbered B 2i-1 The coil of the cosine induction winding and the coil X2 are printed on different PCB boards using PCB manufacturing technology and are numbered B 2i Coil numbered B 2i-1 The coils are arranged at equal intervals and alternately, connected in series to form an excitation winding and a cosine excitation current is passed through it.

[0049] like Figure 5 As shown, taking the coil numbered A1 in the sinusoidal winding 22 as an example, the coil numbered A1 is printed on a PCB board in the sinusoidal winding using PCB manufacturing technology. 2i The coil number is A 2i-1 The coil size and cosine winding of the coil 22 are numbered B 2i Coil numbered B 2i-1 The coils of the coils are the same size.

[0050] like Figure 7 As shown, taking the induction coil X1 in the sine winding 22 as an example, the induction coil X1 is printed on a PCB board in the sine winding using PCB manufacturing technology, and the coil size of the induction coil X1 in the sine winding 22 is the same as the coil size of the induction coil X2 in the cosine winding 23.

[0051] The angle that the mover 2 rotates relative to the center of the circle after moving along the stator 1 for one cycle is taken as the standard angle, and the radians of the standard angle of the coil numbered A1 in the sine winding and the coil numbered B1 in the cosine winding are spaced apart on the circumference by a first preset multiple, and the first preset multiple is (M+1 / 4), where M is a positive integer.

[0052] like Figure 4 As shown, the arc distance between the first excitation coil A1 on the sine winding and the first excitation coil B1 on the cosine winding is (M+1 / 4)θ.

[0053] The adjacent ones in the sinusoidal winding 22 are numbered A 2i The coil number is A 2i-1The coils are spaced along the center of the circumference of the mover 2 by a second preset multiple of the standard angle, wherein the second preset multiple is 1 / N1, wherein N1 is a positive integer.

[0054] The adjacent number in the cosine winding 23 is B 2i Coil numbered B 2i-1 The coils are spaced along the center of the circumference of the mover 2 by a radian of a standard angle that is a third preset multiple, wherein the third preset multiple is 1 / N2, wherein N2 is a positive integer.

[0055] like Figure 4 As shown, the arc distance between the center of two adjacent excitation coils in the sinusoidal winding 22 is θ1, that is, the arc distance between the center of two adjacent excitation coils in the sinusoidal winding 22 is θ1. 2i The coil number is A 2i-1 The arc of the center interval between the coils is θ1, and the arc of the center interval between two adjacent excitation coils in the cosine winding 23 is θ1, that is, .... 2i Coil numbered B 2i-1 The arc of the center interval between the coils is also θ1, where θ1 = the standard angle of the second preset multiple or the standard angle of the third preset multiple.

[0056] In this embodiment, the second preset multiple is set according to actual conditions.

[0057] The present invention is described in detail below in conjunction with the accompanying drawings. A ball array type magnetoresistive time-grid angular displacement sensor is described using three specific embodiments. The difference between the three embodiments is the arrangement position of the excitation coils of the same size constituting each group of excitation windings, the fixed-length structures in the three different embodiments are consistent, and the parameters in the sine winding and the cosine winding in the moving-length structure are consistent.

[0058] Embodiment 1

[0059] A ball array type magnetoresistive time grid angular displacement sensor comprises a stator 1 and a mover 2, wherein the stator 1 comprises a stator base 11 made of non-magnetic stainless steel material and a high-precision steel ball 12 tightly mounted in the stator base 11. Figure 3 As shown, the diameter of a single high-precision steel ball 12 is d1=12 mm, and the standard angle θ relative to the center O after the mover 2 moves around the center O along the outer surface of the stator 1 for one cycle is 6°, as shown in FIG. Figure 6 As shown, the wall thickness of the stator base body 11 is d2 = 1 mm.

[0060] The mover 2 includes a mover base 21 made of PVC material and a sine winding and a cosine winding arranged along the annular outer surface of the mover base 21. The stator base 11 and the mover base 21 are both hollow annular cylindrical structures. The mover 2 is sleeved outside the stator 1, and the mover 2 performs a circular motion around the center of the circle along the outer surface of the stator 1. There are multiple PCB boards in the sine winding, and each PCB board is printed with an excitation coil or an induction coil using PCB manufacturing technology. There are also multiple PCB boards in the cosine winding, and each PCB board is printed with an excitation coil or an induction coil using PCB manufacturing technology. Figure 6 As shown, the wall thickness d3 of the mover base 21 is 1 mm, and the thickness L1 of a single PCB board in the sine winding or cosine winding is 1 mm.

[0061] like Figure 5 As shown, the sinusoidal winding 22 is numbered A 2i The coil number is A 2i-1 The coil size of the coil is the same as the cosine winding 23 numbered B 2i Coil numbered B 2i-1 The coils have the same coil size, the radius of a single excitation coil R1 = 12 mm, the line width of a single excitation coil δ1 = 1 mm,

[0062] like Figure 6 As shown, a sinusoidal winding 22 is provided within a standard angle arc, including an S+ excitation winding, an S- excitation winding and a sinusoidal induction winding, the S+ excitation winding and the S- excitation winding are wound in opposite directions, the S+ excitation winding and the S- excitation winding are alternately arranged and connected in series with each other, wherein the S+ excitation winding is composed of a coil numbered A1 and a coil numbered A3, the S- excitation winding is composed of a coil numbered A2 and a coil numbered A4, and the four excitation coils are connected in series and a sinusoidal excitation current is passed through them, and the other In addition, a cosine winding 23 is also set within a standard angle arc, including a C+ excitation winding, a C- excitation winding and a cosine induction winding. The C+ excitation winding and the C- excitation winding are wound in opposite directions. The C+ excitation winding and the C- excitation winding are alternately arranged and connected in series with each other, wherein the C+ excitation winding is composed of a coil numbered B1 and a coil numbered B3, and the C- excitation winding is composed of a coil numbered B2 and a coil numbered B4, and the four excitation coils are connected in series to pass a cosine excitation current.

[0063] like Figure 6 As shown, the number of excitation coils is set to 4 in one measurement cycle W, and the arc distance between two adjacent excitation coils in the sine winding or cosine winding on the outer surface of the mover substrate 21 along the circumferential center is θ1=θ / 4=1.5°.

[0064] like Figure 6As shown, the arc between the first excitation coil A1 in the sine winding and the first excitation coil B1 in the cosine winding is (M+1 / 4)θ (M is 4).

[0065] The coil size of the induction coil X1 in the sine winding 22 is the same as the coil size of the induction coil X2 in the cosine winding 23. Figure 7 As shown, the radius of a single induction coil R2 = 11 mm, and the line width of a single induction coil δ2 = 1 mm.

[0066] like Figure 6 As shown, the induction coil X1 in the sine winding 22 is spaced at an arc angle of θ2 = 0.75° from the center of the coil numbered A2 and the coil numbered A3 on the circumference of the mover 2, that is, on the angular bisector of ∠A1OA4; the induction coil X2 in the cosine winding 23 is spaced at an arc angle of θ2 = 0.75° from the center of the coil numbered B2 and the coil numbered B3 on the circumference of the mover 2, that is, on the angular bisector of ∠B2OB3.

[0067] Optionally, the winding directions of two adjacent excitation coils in the sinusoidal winding (22) are opposite, wherein the coils numbered A 2i , numbered A 2i-1 The excitation coils (where i is a positive integer) are connected in series through the excitation signal lead to form a group, forming a sinusoidal excitation winding, and a sinusoidal excitation current is passed; the winding directions of the two adjacent excitation coils in the cosine winding (23) are opposite, wherein the number is B 2i , numbered B 2i-1 The excitation coils (where i is a positive integer) are connected in series through excitation signal leads to form a cosine excitation winding, and a cosine excitation current is passed through it.

[0068] Optionally, the sine winding (22) is numbered A 2i The excitation coils composed of the coils are connected in series through the excitation signal lead to form a group, forming an S-excitation winding, and a negative sinusoidal excitation current is passed through the sinusoidal winding (22) numbered A 2i-1 The excitation coils composed of the coils are connected in series through the excitation signal lead to form a group, forming an S+ excitation winding, and a positive sinusoidal excitation current is passed; the cosine winding (23) is numbered B 2i The excitation coils composed of the coils are connected in series through the excitation signal lead to form a group, forming a C-excitation winding, and a negative cosine excitation current is passed through the cosine winding (23) numbered B 2i-1 The excitation coils composed of coils are connected in series into a group through the excitation signal lead to form a C+ excitation winding, and a positive cosine excitation current is passed through;

[0069] Optionally, the sine winding (22) is numbered A 2iThe excitation coils composed of the coils are connected in series through the excitation signal lead to form a group, forming an S-excitation winding, and the sine winding (22) is numbered A 2i-1 The excitation coils composed of the coils are connected in series through the excitation signal lead to form a group, forming an S+ excitation winding. The S+ excitation winding and the S- excitation winding are wound in opposite directions and are connected in series to form a sine winding, and a sine excitation current is passed; the cosine winding (23) is numbered B 2i The excitation coils composed of the coils are connected in series through the excitation signal lead to form a group, forming a C-excitation winding, and the cosine winding (23) is numbered B 2i-1 The excitation coils composed of the coils are connected in series into a group through the excitation signal lead to form a C+ excitation winding. The C+ excitation winding and the C- excitation winding are wound in opposite directions and are connected in series to form a cosine winding, and a cosine excitation current is passed through;

[0070] Embodiment 2

[0071] The difference between the second embodiment and the first embodiment lies in the arrangement positions of the four excitation coils of the same size constituting the S+ excitation winding and the S+ excitation winding. Figure 6 As shown, in the first embodiment, four excitation coils are arranged at an interval of θ1=θ / 4=1.5° along the circumference center of the mover 2 within a standard angle arc, as shown in FIG. Figure 8 As shown, in the second embodiment, the four excitation coils are arranged at an interval of θ1 = θ / 3 = 2° along the circumference center of the mover 2 within a standard arc angle.

[0072] Embodiment 3

[0073] like Fig. 9 As shown, the difference between the third embodiment and the first and second embodiments is the number and arrangement position of the excitation coils of the same size constituting the S+ excitation winding and the S+ excitation winding. In the third embodiment, the two excitation coils are arranged at an interval of θ1=θ=6° along the circumference center of the mover 2 within a standard angle arc, that is, at an interval of a standard angle arc.

[0074] like Fig.10 As shown, a displacement measurement method is applied to a ball array type magnetoresistive time grid angular displacement sensor as described above, comprising:

[0075] S1. Apply a sinusoidal current excitation signal to the sinusoidal excitation winding on the outer surface of the mover base, and apply a cosine current excitation signal to the cosine excitation winding; wherein the sinusoidal current excitation signal and the cosine current excitation signal have the same frequency and amplitude.

[0076] S2. When the mover moves relative to the outer surface of the stator base around the center of the circle, the sine induction winding and the cosine induction winding output standing wave signals U1 and U2 respectively.

[0077] S3, the two standing wave signals U1 and U2 are processed by a logic circuit to output a traveling wave signal U with angular displacement information.

[0078] S4 combines the traveling wave signal U with the reference signal U f Perform phase comparison to determine the phase difference.

[0079] S5, through the high-frequency clock pulse phase difference and the same frequency reference signal U f Interpolation is performed to determine the number of the first high-frequency clock pulses for interpolating the phase difference and the interpolation of the same-frequency reference signal U f The number of second high-frequency clock pulses.

[0080] S6. Determine the linear displacement of the mover relative to the stator according to the number of the first high-frequency clock pulses and the number of the second high-frequency clock pulses.

[0081] Optionally, another embodiment is used to illustrate a displacement measurement method, such as Fig.11 As shown, the details are as follows:

[0082] Two sinusoidal excitation currents I with the same frequency and amplitude are applied to the sinusoidal excitation winding and cosine excitation winding on the outer cylindrical surface of the rotor base. a and cosine excitation current I b :I a =I m sinωt、I b =I m cosωt, where the amplitude of the excitation signal is I m =5A, the frequency of the excitation signal is ω=10kHz. When the mover and the stator produce relative motion, the sine induction winding and cosine induction winding in the displacement induction winding on the outer surface of the mover base will output two orthogonal standing wave signals:

[0083]

[0084] Among them, U1 and U2 represent the standing wave signals output by the sine induction winding and the cosine induction winding respectively, Ke represents the magnetic field coupling coefficient, and x represents the displacement of the mover relative to the stator in the direction of movement.

[0085] The two orthogonal standing wave signals output by the sine induction winding and the cosine induction winding are superimposed after signal preprocessing to output a traveling wave signal U, wherein the signal preprocessing includes an amplification circuit, a filtering circuit and a zero-crossing comparison circuit, and the superposition process is as follows:

[0086]

[0087] Same frequency reference signal U f =K e I msin(ωt), since the traveling wave signal U and the reference signal U of the same frequency f There is a phase difference between the two, which is calculated by the number of interpolated high-frequency clock pulses ΔT. In the same cycle as the traveling wave signal, the reference signal U f The number of interpolated high-frequency clock pulses is T, and the displacement x of a ball array magnetoresistive time-grid angular displacement sensor can be calculated by the number of two high-frequency clock pulses:

[0088]

[0089] N is the number of measurement cycles of a ball array magnetoresistive time-grid angular displacement sensor.

[0090] Those skilled in the art know that the present invention can be implemented as a system, method or computer program product. Therefore, the present disclosure can be specifically implemented in the following forms, namely: it can be complete hardware, it can be complete software (including firmware, resident software, microcode, etc.), or it can be a combination of hardware and software, generally referred to as "circuit", "module" or "system" herein. In addition, in some embodiments, the present invention can also be implemented in the form of a computer program product in one or more computer-readable media, and the computer-readable medium contains computer-readable program code. Computer-readable storage media can be, for example, but not limited to - electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices or devices, or any combination of the above.

[0091] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0092] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A ball array type magnetoresistive time grid angular displacement sensor, comprising a stator (1) and a mover (2), characterized in that: The stator (1) comprises a stator base (11) and a plurality of steel balls (12) tightly mounted in the stator base (11); the mover (2) comprises a mover base (21) and a sine winding (22) and a cosine winding (23) arranged along the annular outer surface of the mover base (21); the stator base (11) and the mover base (21) are both hollow annular cylindrical structures; the mover (2) is sleeved outside the stator (1), and the mover (2) performs a circular motion around the center of a circle along the outer surface of the stator (1); the sine winding (22) is provided with an S+ excitation winding, an S- excitation winding and a sine induction winding; and the cosine winding (23) is provided with a C+ excitation winding, a C- excitation winding and a cosine induction winding; The sinusoidal winding (22) is provided with a plurality of coils, and the sinusoidal winding (22) comprises an S+ excitation winding, an S- excitation winding and a sinusoidal induction winding, wherein the S+ excitation winding is composed of a coil numbered A 2i-1 The S-excitation winding consists of a coil numbered A 2i The sine induction winding is composed of coils, wherein i is a positive integer; a plurality of coils are arranged in the cosine winding (22), and the cosine winding (23) includes a C+ excitation winding, a C- excitation winding and a cosine induction winding, wherein the C+ excitation winding is composed of a coil numbered B 2i-1 The C-excitation winding consists of a coil numbered B 2i The cosine induction winding is composed of a coil X2, wherein i is a positive integer; the sine winding (22) is numbered A 2i The coil number is A 2i-1 The coil and the cosine winding (23) are numbered B 2i Coil numbered B 2i-1 The coils are the same size; The coils in the S+ excitation winding and the S- excitation winding are equally spaced, alternately arranged and connected in series with each other to form an excitation winding, and the coils in the C+ excitation winding and the C- excitation winding are equally spaced, alternately arranged and connected in series with each other to form an excitation winding; The coil X1 in the sinusoidal winding (22) is arranged on the circumference of the mover (2) and is located between the coil numbered A1 and the coil numbered A2 in the sinusoidal winding (22). 2i The coils of the cosine winding (23) are respectively on the angular bisector formed by the center of the circle; the coil X2 in the cosine winding (23) is arranged on the circumference of the mover (2) and is located between the coil numbered B1 in the cosine winding (23) and the coil numbered B 2i The coils are respectively on the angular bisectors formed by the center of the circle; the coil X1 in the sine winding (22) and the coil X2 in the cosine winding (23) have the same size.

2. The ball array magnetoresistive time grid angular displacement sensor according to claim 1, characterized in that: The stator base (11) is made of non-magnetic material.

3. The ball array type magnetoresistive time grid angular displacement sensor according to claim 1, characterized in that: The mover base (21) is made of non-magnetic material.

4. The ball array magnetoresistive time-grid angular displacement sensor according to claim 1, characterized in that: The winding directions of the two adjacent excitation coils in the sinusoidal winding (22) are not fixed, and the connection method is not fixed. Any coil winding direction and connection method for the purpose of establishing an alternating time-varying magnetic field are acceptable, that is, numbered A. 2i The coil number is A 2i-1 The coil is wound in the opposite direction and connected in the forward direction, or numbered A 2i The coil number is A 2i-1 The coils are wound in the same direction, connected in reverse, and are numbered A 2i The coil number is A 2i-1 The coils are arranged in series with equal spacing and alternating arrangement to form an excitation winding and a sinusoidal excitation current is passed through; The winding direction of the two adjacent excitation coils in the cosine winding (23) is not fixed, and the connection method is not fixed. The winding direction and connection method of the coils for the purpose of establishing an alternating time-varying magnetic field are all possible, that is, numbered B 2i Coil numbered B 2i-1 The coil is wound in the opposite direction and connected in the forward direction, or numbered B 2i Coil numbered B 2i-1 The coils are wound in the same direction, connected in reverse, and are numbered B 2i Coil numbered B 2i-1 The coils are arranged at equal intervals and alternately, connected in series to form an excitation winding and a cosine excitation current is passed through it.

5. The ball array magnetoresistive time-grid angular displacement sensor according to claim 1, characterized in that: The angle that the mover (2) rotates relative to the center of a circle after moving along the stator (1) for one cycle is taken as a standard angle, and the centers of the coil numbered A1 in the sine winding and the coil numbered B1 in the cosine winding are spaced on the circumference at a standard angle that is a first preset multiple.

6. The ball array magnetoresistive time grid angular displacement sensor according to claim 1, characterized in that: The adjacent ones in the sinusoidal winding (22) are numbered A 2i The coil number is A 2i-1 The coils are spaced at a standard angle of a second preset multiple along the circumference center of the mover (2); adjacent ones of the cosine windings (23) are numbered B 2i Coil numbered B 2i-1 The coils are spaced along the center of the circumference of the mover (2) at a standard angle that is a third preset multiple.

7. The ball array magnetoresistive time grid angular displacement sensor according to claim 6, characterized in that: The first preset multiple is (M+1 / 4), where M is a positive integer.

8. The ball array type magnetoresistive time grid angular displacement sensor according to claim 7, characterized in that: The two preset multiples are 1 / N1, where N1 is a positive integer.

9. The ball array type magnetoresistive time grid angular displacement sensor according to claim 7, characterized in that: The three preset multiples are 1 / N2, where N2 is a positive integer.

10. A displacement measurement method, applied to a ball array type magnetoresistive time grid angular displacement sensor as claimed in any one of claims 1 to 9, characterized in that: include: Applying a sinusoidal current excitation signal to the S+ excitation winding and the S- excitation winding in the sinusoidal winding on the outer surface of the mover base, and applying a cosine current excitation signal to the C+ excitation winding and the C- excitation winding in the cosine winding; wherein the sinusoidal current excitation signal and the cosine current excitation signal have the same frequency and the same amplitude; When the mover moves relative to the outer surface of the stator base around the center of the circle, the sine induction winding and the cosine induction winding output standing wave signals U1 and U2 respectively; The two standing wave signals U1 and U2 are processed by the logic circuit to output the traveling wave signal U with angular displacement information; The traveling wave signal U is compared with the reference signal U f Perform phase comparison to determine the phase difference; The phase difference and the same frequency reference signal U are controlled by a high frequency clock pulse. f Interpolation is performed to determine the number of the first high-frequency clock pulses for interpolating the phase difference and the number of the first high-frequency clock pulses for interpolating the same-frequency reference signal U f The number of second high-frequency clock pulses; The linear displacement of the mover relative to the stator is determined according to the number of the first high-frequency clock pulses and the number of the second high-frequency clock pulses.

Images