Method for predicting and evaluating environmental concentration of nitrogen trifluoride in industrial park

Abstract

The invention discloses an industrial park nitrogen trifluoride environmental concentration prediction and evaluation method, which comprises the following steps: firstly, collecting enterprise information, geographic information and related environmental parameters related to nitrogen trifluoride emission in an industrial park, and then establishing an unsteady-state unbalanced multi-medium environmental model; according to the model, migration and transformation processes of pollutants in atmosphere, water and soil media are comprehensively considered, then the emission rate, the removal rate coefficient and the transfer rate coefficient of nitrogen trifluoride are determined, then the model is solved by adopting a numerical method, and finally a solving result is analyzed and evaluated. According to the method, the non-equilibrium and non-steady-state multi-medium environment model is adopted, the migration and transformation process of nitrogen trifluoride in the atmosphere, the water body and the soil medium is comprehensively considered, the environment concentration of nitrogen trifluoride in the industrial park can be predicted more accurately, the environment concentration of nitrogen trifluoride in different areas and different time in the industrial park can be predicted, and the prediction accuracy is improved. And the space-time coverage degree is higher.

Description

Technical Field

[0001] The invention relates to the field of environmental science and technology, and in particular to a method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park. Background Art

[0002] With the rapid development of industry, the production activities of various enterprises in industrial parks have had varying degrees of impact on the environment. As an important industrial gas, nitrogen trifluoride is widely used in the semiconductor manufacturing industry. However, the emission of nitrogen trifluoride may cause potential harm to the atmosphere, water bodies and soil media. Therefore, accurately predicting and evaluating the environmental concentration of nitrogen trifluoride in industrial parks is of great significance for formulating effective environmental protection measures and ensuring the safety of the ecological environment.

[0003] At present, there are two main methods for predicting and evaluating pollutant concentrations in the environment: monitoring method and diffusion model method. Although the monitoring method can directly obtain actual pollutant concentration data, it has the problems of high monitoring cost and limited time and space coverage. The diffusion model method usually simulates the diffusion process of pollutants in the atmosphere based on certain assumptions. Its accuracy is often affected by model assumptions and parameter selection factors. Therefore, this scheme proposes a method for predicting and evaluating the environmental concentration of nitrogen trifluoride in industrial parks to solve the above problems. Summary of the invention

[0004] The purpose of the present invention is to provide a method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: a method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park, comprising the following steps:

[0006] S1, collect and organize data, including collecting information on enterprises involved in nitrogen trifluoride emissions in the industrial park, geographical information of the industrial park, and related environmental parameters;

[0007] S2, establish a non-steady-state non-equilibrium multi-media environmental model, based on the law of conservation of mass, integrate the migration and transformation process of pollutants in the atmosphere, water and soil environmental media, and describe the concentration changes of nitrogen trifluoride in different environmental media, including model equations for the atmosphere, water and soil phases;

[0008] The equation of the atmospheric phase model is:

[0009]

[0010] Among them, C a represents the concentration of nitrogen trifluoride in the atmosphere; t represents time; Represents the atmospheric wind speed vector; H a represents the height of the atmospheric mixing layer; k i,a Represents the removal rate coefficient of nitrogen trifluoride in the atmosphere; E a represents the emission rate of nitrogen trifluoride in the atmosphere; k j,a Represents the transfer rate coefficient from other environmental media to the atmosphere; C j Indicates the concentration of nitrogen trifluoride in other environmental media;

[0011] The equation of the water phase model is:

[0012]

[0013] Among them, C w Indicates the concentration of nitrogen trifluoride in water; Represents the water velocity vector; V w represents the volume of water; k i,w Represents the removal rate coefficient of nitrogen trifluoride in water; E w represents the emission rate of nitrogen trifluoride in water; k j,w It represents the transfer rate coefficient from other environmental media to water bodies; C j Indicates the concentration of nitrogen trifluoride in other environmental media;

[0014] The equation of the soil phase model is:

[0015]

[0016] Among them, C s Indicates the concentration of nitrogen trifluoride in soil; represents the soil water flow velocity vector; V s represents the soil volume; k i,s Represents the removal rate coefficient of nitrogen trifluoride in soil; E s represents the emission rate of nitrogen trifluoride in soil; k j,s Indicates the transfer rate coefficient from other environmental media to soil; C j Indicates the concentration of nitrogen trifluoride in other environmental media;

[0017] S3, performing parameter determination, including determining an emission rate, a removal rate coefficient, and a transfer rate coefficient of nitrogen trifluoride;

[0018] S4, solving the model, using numerical methods to solve the established environmental model;

[0019] S5, analyze and evaluate the results, predict the concentration of nitrogen trifluoride in different environmental media, and use risk assessment indicators to evaluate the environmental risks of nitrogen trifluoride in industrial parks.

[0020] Preferably, the collected enterprise information involving nitrogen trifluoride emissions in the industrial park includes enterprise name, production process and nitrogen trifluoride emissions;

[0021] The geographical information of the industrial park includes geographical location, topography and meteorological data;

[0022] The relevant environmental parameters include atmospheric diffusion coefficient, water body self-purification coefficient and soil adsorption coefficient.

[0023] Preferably, the model assumptions of the environmental model include that the nitrogen trifluoride emissions in the industrial park are continuous and stable emissions, the atmosphere, water bodies and soil media are all uniformly mixed systems, and the chemical reactions of pollutants in the environmental media are ignored.

[0024] Preferably, the emission rate in the parameter determination is determined by actual monitoring data and material balance method.

[0025] Preferably, the removal rate coefficient in the parameter determination is determined by consulting literature and experimental measurement methods.

[0026] Preferably, the transfer rate coefficient in the parameter determination is determined by an empirical formula and a model simulation method.

[0027] Preferably, the numerical methods used to solve the model include finite difference method and finite element method.

[0028] Preferably, the concentration prediction in the result analysis and evaluation is to predict the environmental concentration of nitrogen trifluoride in different areas of the industrial park based on the concentration distribution of nitrogen trifluoride in the atmosphere, water bodies and soil media obtained by solving the model.

[0029] Preferably, the risk assessment in the result analysis and evaluation uses risk assessment indicators to evaluate the environmental risk of nitrogen trifluoride in the industrial park, and the risk assessment indicators include a potential ecological hazard index and a health risk index.

[0030] Preferably, after the risk assessment results are obtained, the environmental risk level of nitrogen trifluoride in the industrial park is determined based on the assessment results, and corresponding risk management measures are proposed.

[0031] Technical effects and advantages of the present invention:

[0032] The present invention adopts a non-equilibrium and non-steady-state multi-media environmental model, comprehensively considers the migration and transformation process of nitrogen trifluoride in the atmosphere, water and soil media, and can more accurately predict the environmental concentration of nitrogen trifluoride in the industrial park; and compared with the traditional monitoring method, the prediction method of the present invention has low cost and does not require a large amount of monitoring equipment and manpower investment; the present invention can predict the environmental concentration of nitrogen trifluoride in different areas and at different times in the industrial park, has higher temporal and spatial coverage, and by predicting and evaluating the environmental concentration of nitrogen trifluoride in the industrial park, it can provide a scientific basis for environmental management departments to formulate environmental protection measures and optimize the layout of industrial parks. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 The following is a flowchart of the prediction and evaluation operation of the present invention. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] The present invention provides Figure 1 The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park shown in the figure includes the following steps:

[0036] S1, collect and organize data, including collecting information on enterprises involved in nitrogen trifluoride emissions in the industrial park, geographical information of the industrial park, and related environmental parameters;

[0037] Specifically, collect information on enterprises involved in nitrogen trifluoride emissions in industrial parks, including enterprise names, production processes, and nitrogen trifluoride emissions;

[0038] Industrial park geographic information includes geographical location, topography and meteorological data;

[0039] Relevant environmental parameters include atmospheric diffusion coefficient, water self-purification coefficient and soil adsorption coefficient.

[0040] S2, establish a non-steady-state non-equilibrium multi-media environmental model, based on the law of conservation of mass, integrate the migration and transformation process of pollutants in the atmosphere, water and soil environmental media, and describe the concentration changes of nitrogen trifluoride in different environmental media, including model equations for the atmosphere, water and soil phases;

[0041] The equation of the atmospheric phase model is:

[0042]

[0043] Among them, C a represents the concentration of nitrogen trifluoride in the atmosphere; t represents time; Represents the atmospheric wind speed vector; H a represents the height of the atmospheric mixing layer; k i,a Represents the removal rate coefficient of nitrogen trifluoride in the atmosphere; E a represents the emission rate of nitrogen trifluoride in the atmosphere; k j,a Represents the transfer rate coefficient from other environmental media to the atmosphere; C j Indicates the concentration of nitrogen trifluoride in other environmental media;

[0044] The equation for the water phase model is:

[0045]

[0046] Among them, C w Indicates the concentration of nitrogen trifluoride in water; Represents the water velocity vector; V w represents the volume of water; k i,w Represents the removal rate coefficient of nitrogen trifluoride in water; E w represents the emission rate of nitrogen trifluoride in water; k j,w It represents the transfer rate coefficient from other environmental media to water bodies; C j Indicates the concentration of nitrogen trifluoride in other environmental media;

[0047] The equation of the soil phase model is:

[0048]

[0049] Among them, C s Indicates the concentration of nitrogen trifluoride in soil; represents the soil water flow velocity vector; V s represents the soil volume; k i,s Represents the removal rate coefficient of nitrogen trifluoride in soil; E s represents the emission rate of nitrogen trifluoride in soil; k j,s Indicates the transfer rate coefficient from other environmental media to soil; C j Indicates the concentration of nitrogen trifluoride in other environmental media;

[0050] Specifically, the model assumptions of the environmental model include that the nitrogen trifluoride emissions in the industrial park are continuous and stable emissions, the atmosphere, water bodies and soil media are all uniformly mixed systems, and the chemical reactions of pollutants in the environmental media are ignored.

[0051] S3, performing parameter determination, including determining an emission rate, a removal rate coefficient, and a transfer rate coefficient of nitrogen trifluoride;

[0052] Specifically, based on the collected enterprise information, the emission rate of nitrogen trifluoride of each enterprise in the industrial park is determined. The emission rate in the parameter determination is determined by actual monitoring data and material balance method;

[0053] The removal rate coefficient in parameter determination is determined by consulting literature and experimental measurement methods. The removal rate coefficient reflects the removal process of pollutants in different environmental media and can be determined by consulting literature and experimental measurement methods. For example, the removal of nitrogen trifluoride in the atmosphere mainly includes dry deposition and wet deposition processes, and its removal rate coefficient can be calculated based on the relevant deposition rate and atmospheric mixing layer height parameters.

[0054] In parameter determination, the transfer rate coefficient is determined by empirical formulas and model simulation methods. The transfer rate coefficient describes the transfer process of pollutants between different environmental media and can be determined by empirical formulas and model simulation methods. For example, the transfer of nitrogen trifluoride between the atmosphere and water bodies is mainly achieved through volatilization and sedimentation processes, and its transfer rate coefficient can be calculated based on the volatilization rate and sedimentation rate parameters.

[0055] S4, solving the model, using numerical methods to solve the established environmental model;

[0056] Specifically, the numerical methods used to solve the model include the finite difference method and the finite element method. During the solution process, it is necessary to select appropriate time step and space step according to the specific situation to ensure the stability and accuracy of the model.

[0057] S5, analyze and evaluate the results, predict the concentration of nitrogen trifluoride in different environmental media, and use risk assessment indicators to evaluate the environmental risks of nitrogen trifluoride in industrial parks.

[0058] Specifically, the concentration prediction in the result analysis and evaluation is based on the concentration distribution of nitrogen trifluoride in the atmosphere, water bodies and soil media obtained by solving the model, and the environmental concentration of nitrogen trifluoride in different areas of the industrial park is predicted.

[0059] Furthermore, the risk assessment in the result analysis and evaluation uses risk assessment indicators to evaluate the environmental risks of nitrogen trifluoride in the industrial park. The risk assessment indicators include potential ecological hazard index and health risk index. After the risk assessment results are obtained, the environmental risk level of nitrogen trifluoride in the industrial park is determined based on the evaluation results, and corresponding risk management measures are proposed.

[0060] Example 1: For the prediction and evaluation of nitrogen trifluoride environmental concentration in industrial parks, the specific operation steps are as follows:

[0061] A1. Collect information on enterprises involved in nitrogen trifluoride emissions in the industrial park, including Enterprise A, Enterprise B and Enterprise C. Through investigation, it is found that Enterprise A is mainly engaged in semiconductor manufacturing, with nitrogen trifluoride emissions of 50 tons per day; Enterprise B is engaged in electronic component production, with nitrogen trifluoride emissions of 80 tons per day; Enterprise C is engaged in photovoltaic material production, with nitrogen trifluoride emissions of 70 tons per day;

[0062] Obtain the geographical information of the industrial park, which is located in City C. The terrain is mainly plains and the climate is subtropical monsoon. Collect local meteorological data, including wind speed, wind direction, temperature and humidity;

[0063] After sorting out the relevant environmental parameters and consulting literature and conducting experimental measurements, it was determined that the atmospheric diffusion coefficient was 0.00016 square meters per second, the water self-purification coefficient was 80.07 per day, and the soil adsorption coefficient was 31.82 liters per kilogram.

[0064] A2, based on the collected data, establish a non-equilibrium non-steady-state multi-media environmental model for the industrial park. The model assumes that nitrogen trifluoride emissions in the industrial park are continuous and stable, and the atmosphere, water and soil media are all uniformly mixed systems, ignoring the chemical reactions of pollutants in the environmental media.

[0065] Determine the various parameters in the model equation. For the atmospheric phase, calculate the emission rate of nitrogen trifluoride in the atmosphere based on meteorological data and emission rate; determine the removal rate coefficient of nitrogen trifluoride in the atmosphere and the transfer rate coefficient from other environmental media to the atmosphere by consulting literature. For the water phase and soil phase, use similar methods to determine the corresponding parameters.

[0066] A3, according to the production process and material balance of the enterprises, the nitrogen trifluoride emission rates of enterprises A, B and C are determined to be 18,250 tons / year, 29,200 tons / year and 25,550 tons / year respectively;

[0067] By consulting the literature and conducting experimental measurements, it was determined that the removal rate coefficient of nitrogen trifluoride in the atmosphere is 0.08 / day; the removal rate coefficient of nitrogen trifluoride in water is 0.03 / day; and the removal rate coefficient of nitrogen trifluoride in soil is 0.02 / day.

[0068] Using empirical formula and model simulation methods, the transfer rate coefficient of nitrogen trifluoride between the atmosphere and water is determined to be 3.18 kg / day; the transfer rate coefficient between the atmosphere and soil is 1.22×10 -8 kg / day; the transfer rate coefficient between water and soil is 2.71×10 -13 kg / day.

[0069] A4, the finite difference method is used to solve the established non-equilibrium and non-steady-state multi-media environment model, and the time step is determined to be 50 hours and the space step is 2000 meters. Through iterative calculation, the concentration distribution of nitrogen trifluoride in the atmosphere, water and soil media is obtained.

[0070] A5. Based on the model solution results, the concentration distribution map of nitrogen trifluoride in the atmosphere, water and soil media in the industrial park was drawn. The analysis found that the concentration of nitrogen trifluoride in the atmosphere near Enterprise A was relatively high, with a maximum value of 559 mg / m3; the concentration of nitrogen trifluoride in the atmosphere near Enterprise B was relatively high, with a maximum value of 636 mg / L; the concentration of nitrogen trifluoride in the atmosphere near Enterprise C was relatively high, with a maximum value of 425 mg / kg;

[0071] The potential ecological hazard index was used to evaluate the environmental risk of nitrogen trifluoride in the industrial park. The potential ecological hazard index of nitrogen trifluoride in the industrial park was calculated to be 1.49, which is a medium risk level. Based on the evaluation results, the following risk management measures are proposed:

[0072] (1) Strengthen supervision of enterprises involved in nitrogen trifluoride emissions to ensure that their pollutant emissions comply with national and local environmental protection standards.

[0073] (2) Optimize the layout of industrial parks and place enterprises involved in nitrogen trifluoride emissions away from residential areas and sensitive areas as much as possible.

[0074] (3) Strengthen environmental monitoring, regularly monitor the atmosphere, water and soil environmental media within the industrial park, and keep abreast of changes in the environmental concentration of nitrogen trifluoride.

[0075] Example 2: Assume that there is an industrial park called WZ, and there is an electronic manufacturing company X in the park. This company uses nitrogen trifluoride in the production process. The park is located in a plain area, surrounded by rivers and farmland, with four distinct seasons and southeasterly winds throughout the year. For the prediction and evaluation of nitrogen trifluoride environmental concentration in WZ Industrial Park, the specific operation steps are as follows:

[0076] A1, collect information about enterprises involved in nitrogen trifluoride emissions in the industrial park. Through investigation and monitoring of X company in the park, identify the main sources of nitrogen trifluoride emissions, including tail gas emission outlets in production workshops, volatilization of storage tanks, etc. Record the location, emission volume and emission time pattern of each emission source. A production workshop of company X emits about 100 kg of nitrogen trifluoride every day, and the emission location is located in the southeast corner of the park. Collect the production plan of X company in order to predict the changes in emissions in different time periods in the future.

[0077] A2, based on the collected data, establish a non-equilibrium non-steady-state multi-media environmental model for the industrial park. The model assumes that nitrogen trifluoride emissions in the industrial park are continuous and stable, and the atmosphere, water and soil media are all uniformly mixed systems, ignoring the chemical reactions of pollutants in the environmental media.

[0078] Determine the atmospheric diffusion coefficient of each parameter in the model equation: By setting up multiple meteorological monitoring stations in the park, collecting data such as wind direction, wind speed, temperature, and humidity, and combining the atmospheric diffusion model to calculate the atmospheric diffusion coefficient under different meteorological conditions. When the wind speed is 5 meters per second and the stability is level D, the atmospheric diffusion coefficient is 0.25 square kilometers per hour; the flow velocity of the rivers around the park is measured, and the average flow velocity is 0.5 meters per second; soil samples are collected from different locations in the park, and laboratory tests are carried out to determine that the soil permeability coefficient is 0.01 centimeters per second.

[0079] A3, determine the parameters, including the emission rate, removal rate coefficient and transfer rate coefficient of nitrogen trifluoride. Using the empirical formula and model simulation method, the transfer rate coefficient of nitrogen trifluoride between the atmosphere and water is determined to be 6.11×10 -12 kg / day; the transfer rate coefficient between the atmosphere and soil is 1.59×10 -3 kg / day; the transfer rate coefficient between water and soil is 8.72×10 -15 kg / day.

[0080] A4, the finite difference method is used to solve the established non-equilibrium and non-steady-state multi-media environment model, and the time step is determined to be 80 hours and the space step is 10,000 meters. Through iterative calculation, the concentration distribution of nitrogen trifluoride in the atmosphere, water and soil media is obtained.

[0081] A5. Based on the model solution, the concentration distribution map of nitrogen trifluoride in the atmosphere, water and soil media in the industrial park was drawn. The analysis found that the concentration of nitrogen trifluoride in the atmosphere near Enterprise X was relatively high, with a maximum value of 24.41 mg / m3; the maximum concentration of nitrogen trifluoride in the atmosphere 2,000 meters away from Enterprise X was 0.28 mg / L;

[0082] The potential ecological hazard index was used to evaluate the environmental risk of nitrogen trifluoride in the industrial park. The calculated potential ecological hazard index of nitrogen trifluoride in the industrial park was 0.02, which is a low risk level.

[0083] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park, characterized in that: The prediction and evaluation method comprises the following steps: S1, collect and organize data, including collecting information on enterprises involved in nitrogen trifluoride emissions in the industrial park, geographical information of the industrial park, and related environmental parameters; S2, establish a non-steady-state non-equilibrium multi-media environmental model, based on the law of conservation of mass, integrate the migration and transformation process of pollutants in the atmosphere, water and soil environmental media, and describe the concentration changes of nitrogen trifluoride in different environmental media, including model equations for the atmosphere, water and soil phases; The equation of the atmospheric phase model is: Among them, C a represents the concentration of nitrogen trifluoride in the atmosphere; t represents time; Represents the atmospheric wind speed vector; H a represents the height of the atmospheric mixing layer; k i,a Represents the removal rate coefficient of nitrogen trifluoride in the atmosphere; E a represents the emission rate of nitrogen trifluoride in the atmosphere; k j,a Represents the transfer rate coefficient from other environmental media to the atmosphere; C j Indicates the concentration of nitrogen trifluoride in other environmental media; The equation of the water phase model is: Among them, C w Indicates the concentration of nitrogen trifluoride in water; Represents the water velocity vector; V w represents the volume of water; k i,w Represents the removal rate coefficient of nitrogen trifluoride in water; E w represents the emission rate of nitrogen trifluoride in water; k j,w It represents the transfer rate coefficient from other environmental media to water bodies; C j Indicates the concentration of nitrogen trifluoride in other environmental media; The equation of the soil phase model is: Among them, C s Indicates the concentration of nitrogen trifluoride in soil; represents the soil water flow velocity vector; V s represents the soil volume; k i,s Represents the removal rate coefficient of nitrogen trifluoride in soil; E s represents the emission rate of nitrogen trifluoride in soil; k j,s Indicates the transfer rate coefficient from other environmental media to soil; C j Indicates the concentration of nitrogen trifluoride in other environmental media; S3, performing parameter determination, including determining an emission rate, a removal rate coefficient, and a transfer rate coefficient of nitrogen trifluoride; S4, solving the model, using numerical methods to solve the established environmental model; S5, analyze and evaluate the results, predict the concentration of nitrogen trifluoride in different environmental media, and use risk assessment indicators to evaluate the environmental risks of nitrogen trifluoride in industrial parks.

2. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 1, characterized in that: The information collected about enterprises involved in nitrogen trifluoride emissions in the industrial park includes enterprise names, production processes and nitrogen trifluoride emissions; The geographical information of the industrial park includes geographical location, topography and meteorological data; The relevant environmental parameters include atmospheric diffusion coefficient, water body self-purification coefficient and soil adsorption coefficient.

3. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 1, characterized in that: The model assumptions of the environmental model include that the nitrogen trifluoride emission in the industrial park is a continuous and stable emission, the atmosphere, water and soil media are all uniformly mixed systems, and the chemical reactions of pollutants in the environmental media are ignored.

4. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 1, characterized in that: The emission rate in the parameter determination is determined by actual monitoring data and material balance method.

5. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 4, characterized in that: The removal rate coefficient in the parameter determination is determined by consulting literature and experimental measurement methods.

6. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 4, characterized in that: In the parameter determination, the transfer rate coefficient is determined by an empirical formula and a model simulation method.

7. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 1, characterized in that: The numerical methods used to solve the model include finite difference method and finite element method.

8. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 1, characterized in that: The concentration prediction in the result analysis and evaluation is to predict the environmental concentration of nitrogen trifluoride in different areas of the industrial park based on the concentration distribution of nitrogen trifluoride in the atmosphere, water and soil media obtained by solving the model.

9. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 8, characterized in that: The risk assessment in the result analysis and evaluation uses risk assessment indicators to evaluate the environmental risk of nitrogen trifluoride in the industrial park, and the risk assessment indicators include a potential ecological hazard index and a health risk index.

10. The method for predicting and evaluating the environmental concentration of nitrogen trifluoride in an industrial park according to claim 9, characterized in that: After the risk assessment results are obtained, the environmental risk level of nitrogen trifluoride in the industrial park is determined based on the assessment results, and corresponding risk management measures are proposed.

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