Ultrapure water manufacturing system

Abstract

The present invention discloses an ultrapure water production system, and relates to the technical field of ultrapure water production, the ultrapure water production system comprises a cation bed treatment end, an anion bed treatment end and a mixed bed treatment end, the cation bed treatment end, the anion bed treatment end and the mixed bed treatment end are jointly provided with a timing synchronization adjustment end, and the cation bed treatment end is used for timing synchronization by setting a cation bed treatment program. The anion bed treatment end is used for monitoring the on-line silicon meter value in real time and orderly adjusting the valve in the anion bed treatment process, and the mixed bed treatment end is used for monitoring the on-line value of the mixed bed in real time and orderly adjusting the valve in the anion bed treatment process. And the valves are synchronously adjusted according to the on-line numerical values. According to the ultrapure water manufacturing system, the safety and reliability of ultrapure water manufacturing are guaranteed, the treatment processes of cation resin and anion resin are accurately monitored, automatic control over all procedures is achieved, and the ultrapure water manufacturing success rate is further increased.

Description

Technical Field

[0001] The invention relates to the technical field of ultrapure water production, and in particular to an ultrapure water production system. Background Art

[0002] Ultrapure water manufacturing refers to the removal of impurities, ions, microorganisms, etc. in ordinary water to extremely low levels through a series of highly complex water treatment technologies, thereby obtaining pure water close to theoretical water. Ultrapure water is a kind of water with extremely high purity and almost zero particle and bacterial content. Due to the high purity of ultrapure water, it is widely used in semiconductor manufacturing, biopharmaceuticals, precision chemicals, laboratory research and other fields to ensure these industries' strict requirements for water quality.

[0003] Publication No. CN116322947A discloses an ultrapure water manufacturing system and method, in which the ultrapure water manufacturing system reuses the used ultrapure water containing hydrogen peroxide as treated water for ultrapure water manufacturing after using the ultrapure water, and through a simple structure, it can help to clean the device and the treated water.

[0004] After searching the above patents, it was found that there are still some shortcomings in the manufacture of ultrapure water: 1. The manufacture of ultrapure water requires multiple processes such as cation bed, anion bed and mixed bed. In particular, in the cation bed treatment process, it is necessary to accurately monitor the online sodium value. In the existing ultrapure water manufacturing, it is impossible to monitor the online sodium value in real time, resulting in online sodium value errors in the manufacture of ultrapure water, affecting the accuracy of ultrapure water manufacturing; 2. Since the manufacture of ultrapure water requires multiple processes such as cation bed, anion bed and mixed bed, in the anion bed treatment process, it is necessary to monitor the online conductivity in real time. However, the existing ultrapure water manufacturing system has deviations when monitoring the online conductivity, which may affect the data in the anion bed treatment process. The accuracy of the data and the inability to make accurate early warning adjustments when the conductivity value is abnormal make it difficult to ensure the safety and reliability of ultrapure water manufacturing; 3. Since there are multiple processes in ultrapure water manufacturing, especially in mixed bed treatment, the filler in the mixed bed is a mixture of cation resin and anion resin. During the treatment, the cation resin and the anion resin are mixed, and then positively washed to sodium ions, and the online sodium value and silica value are monitored in real time. The conductivity obtained can only be put into operation after it is qualified. In this process, the orderliness of ultrapure water manufacturing cannot be guaranteed stably, and the treatment process of cation resin and anion resin cannot be accurately monitored during the mixed bed treatment, further reducing the success rate of ultrapure water manufacturing.

[0005] Therefore, an ultrapure water production system is proposed to solve the above problems. Summary of the invention

[0006] The main object of the present invention is to provide an ultrapure water production system to solve the problems raised in the above background.

[0007] To achieve the above object, the technical solution adopted by the present invention is: an ultrapure water production system, comprising a cation bed treatment end, an anion bed treatment end and a mixed bed treatment end, wherein the cation bed treatment end, the anion bed treatment end and the mixed bed treatment end are jointly provided with a timing synchronization adjustment end;

[0008] The cationic bed processing end is used to set the cationic bed processing program and set the timing of multiple processes of the cationic bed processing, realize the hierarchical timing adjustment of multiple processes, manually control the corresponding valves to adjust the acid on and off, and orderly set multiple valves, and monitor the online sodium value in the cationic bed processing process in real time to determine the real-time process abnormality of the cationic bed processing process;

[0009] The anion bed treatment end is used to monitor the online silicon meter value in real time, and adjust the valves in the anion bed treatment process in an orderly manner, automatically track the online silicon meter value when the timing ends, and monitor the online conductivity in the anion bed treatment process in real time, determine whether the online conductivity in the anion bed treatment process is abnormal, and issue early warning adjustment information when the conductivity is abnormal;

[0010] The mixed bed treatment end is used to monitor the online values ​​of the cation resin and the anion resin in the mixed bed treatment process in real time, and synchronously adjust the valves according to the online values, control the alkali amount and the timing and sequencing of the operation process flow in real time, monitor the online conductivity values ​​of the cation resin and the anion resin in real time and make abnormal adjustments;

[0011] The timing synchronization adjustment end is used to synchronously adjust the abnormal processing flow of the cation bed, the anion bed and the mixed bed, and track the adjusted manufacturing process in real time through the data monitor.

[0012] The cation bed processing end includes a program setting module, a manual adjustment module and a sodium meter tracking module;

[0013] The program setting module includes a program setting unit, a program timing unit and a step-by-step adjustment unit;

[0014] The program setting unit is used to set the positive bed treatment process and monitor the real-time status of the positive bed treatment process in real time through a data recorder and a data tracker;

[0015] The program timing unit is used to time the positive bed treatment process through a timer;

[0016] The step-by-step adjustment unit is used to perform time- and stage-by-stage process operations on the positive bed treatment process through serial number arrangement, and to track the real-time status of the positive bed treatment process in real time through a data tracker.

[0017] The manual adjustment module includes an acid valve adjustment unit and a multi-valve setting unit;

[0018] The acid valve adjustment unit is used to set the manual valve and control the acid concentration to 5%. When the liquid level of the acid metering tank is lower than 0.1 meters as measured by the liquid level monitor, the outlet valve of the acid metering tank is closed for a set time of 80 minutes, the outlet valve of the acid regeneration pump is closed, and the acid regeneration pump and the acid inlet valve are closed;

[0019] The multi-valve setting unit is used to close and open the valves according to the process duration of the timer, and the valves include inlet and outlet acid valves, inlet and outlet water valves and forward and reverse wash valves.

[0020] The sodium table tracking module includes an online sodium value monitoring unit, which is used to calculate the online sodium value in the cation bed treatment process at the current moment in real time. The calculation formula is as follows:

[0021] Na (mg / L) = (C × V) / m;

[0022] Among them, Na represents the online sodium value in the cation bed treatment process at the current moment, C represents the concentration of sodium ions in the water sample, the unit is mg / L, and V represents the volume of the water sample passing through the cation bed, the unit is usually L or m 3 , m represents the mass of the resin in the cation bed, and the unit is usually kg. The measured unit of Na, mg / L, is converted to ug / L. When the measured Na is ≤10ug / L, close the forward wash valve and open the outlet valve.

[0023] The cathode bed processing end includes a silicon meter monitoring module, a valve adjustment module and a silicon meter tracking module;

[0024] The silicon meter monitoring module includes a silicon meter setting unit, a silicon meter monitoring unit and a silicon meter statistics unit;

[0025] The silicon meter setting unit is used to set the standard silicon dioxide value to 50 g / L;

[0026] The silicon meter monitoring unit is used to calculate the silicon dioxide value of the cathode bed treatment process at the current moment in real time, and the calculation formula is as follows:

[0027] Q = (S + [CO2] + [SiO2]) V / VR;

[0028] Among them, Q represents the silica value in the anion bed treatment process at the current moment, S represents the average effluent acidity in the anion bed treatment process, CO2 represents the average CO2 concentration of the anion bed inlet water, SiO2 represents the average SiO2 concentration of the anion bed inlet water, V represents the total amount of water produced during the cycle, and VR represents the resin volume in the bed;

[0029] The silicon meter statistical unit is used to record the silicon meter values ​​measured at the current time and the historical time in real time through a data recorder.

[0030] The valve adjustment module includes an orderly adjustment unit and an adjustment timing unit;

[0031] The orderly adjustment unit is used to automatically close the water inlet valve and the water outlet valve, open the air valve and the backwash drain valve, and open the backwash water inlet when the silica value at the current moment is calculated to be ≥50g / L. The time is set to 3 minutes. When the timing ends, the backwash water inlet valve is closed and the backwash drain valve is opened. The timing is 10 minutes. When the timing ends, the backwash drain valve is adjusted;

[0032] The timing adjustment unit is used to adjust the process duration of the negative bed treatment process in real time according to the timer.

[0033] The silicon meter tracking module includes a conductivity monitoring unit, an early warning adjustment unit and a timing tracking display unit;

[0034] The conductivity monitoring unit is used to calculate the online conductivity value of the cathode bed treatment process at the current moment in real time, and the calculation formula is as follows:

[0035]

[0036] Wherein, X represents the online conductivity value of the cathode bed treatment process at the current moment, and T represents the time at the current moment;

[0037] The early warning adjustment unit is used to predict whether the online conductivity value of the next process is abnormal based on the online conductivity value, power monitor and temperature monitor in the multiple processes of the cathode bed treatment. The prediction method is as follows:

[0038] Step I: Set the online conductivity parameters, power parameters and temperature parameters of the corresponding process and record them in real time through a data recorder;

[0039] Step II: Calculate the difference between the online conductivity parameters, power parameters and temperature parameters of the corresponding process and the actually measured online conductivity values, power values ​​and temperature values. If the difference = ±0.1, it is judged that the online conductivity, power and temperature are close to the safe value. If the difference > 0.1 or < -0.1, it is judged that the online conductivity, power and temperature exceed the safe value, and an anion bed treatment process warning is issued. Ten minutes is counted as one cycle. According to the online conductivity parameters, power parameters and temperature parameters of three cycles, it is predicted whether the online conductivity value of the corresponding process in the anion bed treatment process is abnormal. If the average values ​​of the online conductivity values ​​of the three cycles all exceed the online conductivity parameters, it is judged that the online conductivity value monitoring in the anion bed treatment process is abnormal.

[0040] The timing tracking display unit is used to track the working time of each process in the negative bed treatment process in real time according to the timer.

[0041] The mixed bed processing end includes a data monitoring module, an acid valve adjustment module and a conductivity monitoring module;

[0042] The data monitoring module includes an online sodium value unit, a silicon dioxide unit and a valve adjustment unit;

[0043] The online sodium value unit is used to recalculate the online sodium values ​​of multiple cation bed treatment processes and display them in real time through a sodium meter, and when the online sodium value is measured to be ≥3ug / L, the water inlet valve and the water outlet valve are immediately closed;

[0044] The silica unit is used to recalculate the online silica values ​​of multiple anion bed treatment processes and display them in real time through a silica meter, and when the online silica value is measured to be ≥3ug / L, the water inlet valve and the water outlet valve are immediately closed;

[0045] The valve adjustment unit is used to track the various processing steps of the cation resin and the anion resin in real time through a timer and a data tracker, and to perform the operation of the next step after the timing of each step ends.

[0046] The acid valve adjustment module includes an alkali quantity control unit and a timing and sequencing unit;

[0047] The alkali amount control unit is used to set the alkali regeneration pump and control the alkali amount in real time according to the mixed bed treatment process;

[0048] The timing and sequencing unit is used to arrange the mixed bed treatment processes in real time by means of a timer, and to arrange the treatment processes of the cation resin and the anion resin in a second order.

[0049] The conductivity monitoring module includes a primary monitoring unit, a primary adjustment unit, a secondary monitoring unit and a secondary adjustment unit;

[0050] The primary monitoring unit is used to monitor the conductivity and online sodium value in the mixed bed treatment process in real time through a data monitor;

[0051] The primary adjustment unit is used to immediately report to the system when the primary monitoring shows that the conductivity is ≤2μs / cm and Na+<2ug / L, close the forward wash drain valve and open the outlet valve;

[0052] The secondary monitoring unit is used to secondary monitor the conductivity and online sodium value in the mixed bed treatment process through a data monitor;

[0053] The secondary adjustment unit is used to immediately report to the system to close the forward wash drain valve and open the outlet valve when the secondary monitoring shows that the conductivity is ≤2μs / cm and Na+<2ug / L.

[0054] The present invention has the following beneficial effects:

[0055] 1. In the present invention, by setting a cationic bed processing end, when manufacturing ultrapure water, by setting the timing of multiple processes of the cationic bed treatment, the step-by-step timing adjustment of multiple processes and the orderly setting of multiple valves are realized, and the online sodium value in the cationic bed treatment process is monitored in real time, and the real-time process of the cationic bed treatment process is judged, so that the cationic bed treatment process is orderly, and the online sodium value can be accurately monitored, thereby reducing the online sodium value error existing in the ultrapure water manufacturing and improving the accuracy of ultrapure water manufacturing.

[0056] 2. In the present invention, by setting up a cathode bed treatment end, during the manufacture of ultrapure water, the online conductivity in the cathode bed treatment process can be monitored in real time by real-time monitoring of the online silicon meter value and real-time monitoring of the online conductivity in the cathode bed treatment process. At the same time, by real-time judgment of whether the online conductivity in the cathode bed treatment process is abnormal, the deviation of the online conductivity in the cathode bed treatment process can be further reduced, the data accuracy in the cathode bed treatment process can be increased, and the safety and reliability of ultrapure water manufacturing can be ensured.

[0057] 3. In the present invention, by setting a mixed bed treatment end, when manufacturing ultrapure water, by real-time monitoring of the online values ​​of the cation resin and the anion resin in the mixed bed treatment process, and real-time control of the alkali amount and the timing and sequencing of the operating process flow, the orderliness of the ultrapure water manufacturing can be relatively stably guaranteed during the ultrapure water manufacturing. By real-time monitoring of the online conductivity values ​​of the cation resin and the anion resin and making abnormal adjustments, the processing processes of the cation resin and the anion resin can be accurately monitored in real time and synchronously during the mixed bed treatment process, thereby further improving the success rate of ultrapure water manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 A schematic diagram of the overall system architecture of an ultrapure water manufacturing system of the present invention;

[0059] Figure 2 It is a schematic diagram of the structure of a cation bed processing end of an ultrapure water production system of the present invention;

[0060] Figure 3 It is a schematic diagram of the structure of the cathode bed processing end of an ultrapure water production system of the present invention;

[0061] Figure 4 The present invention is a schematic diagram of the structure of a mixed bed processing end of an ultrapure water production system. DETAILED DESCRIPTION

[0062] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0063] Embodiment 1

[0064] Please refer to Figures 1 to 2 As shown: an ultrapure water manufacturing system, including a cation bed processing end, an anion bed processing end and a mixed bed processing end, the cation bed processing end, the anion bed processing end and the mixed bed processing end are commonly provided with a timing synchronization adjustment end;

[0065] The cation bed treatment end is used to set the cation bed treatment program and set the timing of multiple processes of the cation bed treatment, realize the step-by-step timing adjustment of multiple processes, manually control the corresponding valves to adjust the acid on and off, and orderly set multiple valves, and monitor the online sodium value in the cation bed treatment process in real time to determine the real-time process abnormality of the cation bed treatment process;

[0066] The anion bed treatment end is used to monitor the online silicon meter value in real time, and make orderly adjustments to the valves in the anion bed treatment process. It automatically tracks the online silicon meter value when the timing ends, and monitors the online conductivity in the anion bed treatment process in real time to determine whether the online conductivity in the anion bed treatment process is abnormal, and issues early warning adjustment information when the conductivity is abnormal.

[0067] The mixed bed treatment end is used to monitor the online values ​​of the cation resin and the anion resin in the mixed bed treatment process in real time, and adjust the valve synchronously according to the online values, control the alkali amount and the timing and sequencing of the operation process in real time, monitor the online conductivity values ​​of the cation resin and the anion resin in real time and make abnormal adjustments;

[0068] The timing synchronization adjustment terminal is used to synchronously adjust the abnormal processing flow of the cation bed, anion bed and mixed bed, and track the adjusted manufacturing process in real time through the data monitor.

[0069] The cation bed processing end includes a program setting module, a manual adjustment module and a sodium meter tracking module;

[0070] The program setting module includes a program setting unit, a program timing unit and a step adjustment unit;

[0071] The program setting unit is used to set the positive bed treatment process and monitor the real-time status of the positive bed treatment process in real time through the data recorder and data tracker;

[0072] The program timing unit is used to time the cation bed treatment process through a timer;

[0073] The step-by-step adjustment unit is used to perform time- and stage-by-stage operation on the cation bed treatment process through serial number arrangement, and to track the real-time status of the cation bed treatment process through a data tracker.

[0074] The manual adjustment module includes an acid valve adjustment unit and a multi-valve setting unit;

[0075] The acid valve adjustment unit is used to set the manual valve and control the acid concentration to 5%. When the liquid level of the acid metering tank is lower than 0.1 meters as measured by the liquid level monitor, the outlet valve of the acid metering tank is closed. The time is set to 80 minutes, the outlet valve of the acid regeneration pump is closed, and the acid regeneration pump and the acid inlet valve are closed;

[0076] The multi-valve setting unit is used to close and open the valves according to the process duration of the timer. The valves include inlet and outlet acid valves, inlet and outlet water valves, and forward and reverse wash valves.

[0077] The sodium table tracking module includes an online sodium value monitoring unit, which is used to calculate the online sodium value in the cation bed treatment process at the current moment in real time. The calculation formula is as follows:

[0078] Na (mg / L) = (C × V) / m;

[0079] Among them, Na represents the online sodium value in the cation bed treatment process at the current moment, C represents the concentration of sodium ions in the water sample, the unit is mg / L, and V represents the volume of the water sample passing through the cation bed, the unit is usually L or m 3 , m represents the mass of the resin in the cation bed, and the unit is usually kg. The measured unit of Na, mg / L, is converted to ug / L. When the measured Na is ≤10ug / L, close the forward wash valve and open the outlet valve.

[0080] By setting the cationic bed treatment program and setting the timing of multiple processes of the cationic bed treatment, the step-by-step timing adjustment of multiple processes is realized, the corresponding valves are manually controlled to adjust the acid on and off, and multiple valves are set in an orderly manner. The online sodium value in the cationic bed treatment process is monitored in real time, and the real-time process of the cationic bed treatment process is judged. The cationic bed treatment process is orderly and can accurately monitor the online sodium value, reduce the online sodium value error in ultrapure water manufacturing, and improve the accuracy of ultrapure water manufacturing.

[0081] Embodiment 2

[0082] Please refer to Figure 3 As shown: Based on the first embodiment, the cathode bed processing end includes a silicon meter monitoring module, a valve adjustment module and a silicon meter tracking module;

[0083] The silicon meter monitoring module includes a silicon meter setting unit, a silicon meter monitoring unit and a silicon meter statistics unit;

[0084] The silicon table setting unit is used to set the standard silicon dioxide value to 50g / L;

[0085] The silicon meter monitoring unit is used to calculate the silicon dioxide value of the cathode bed treatment process at the current moment in real time. The calculation formula is as follows:

[0086] Q = (S + [CO2] + [SiO2]) V / VR;

[0087] Among them, Q represents the silica value in the anion bed treatment process at the current moment, S represents the average effluent acidity in the anion bed treatment process, CO2 represents the average CO2 concentration of the anion bed inlet water, SiO2 represents the average SiO2 concentration of the anion bed inlet water, V represents the total amount of water produced during the cycle, and VR represents the resin volume in the bed;

[0088] The silicon meter statistics unit is used to record the silicon meter values ​​measured at the current time and historical time in real time through a data recorder.

[0089] The valve adjustment module includes an orderly adjustment unit and an adjustment timing unit;

[0090] The orderly adjustment unit is used to automatically close the water inlet valve and the water outlet valve, and open the air valve and the backwash drain valve, and open the backwash water inlet when the silica value at the current moment is calculated to be ≥50g / L. The time is set to 3 minutes. When the timing ends, the backwash water inlet valve is closed and the backwash drain valve is opened. The timing is 10 minutes. When the timing ends, the backwash drain valve is adjusted;

[0091] The timing adjustment unit is used to adjust the process duration of the negative bed treatment process in real time according to the timer.

[0092] The silicon meter tracking module includes a conductivity monitoring unit, an early warning adjustment unit, and a timing tracking display unit;

[0093] The conductivity monitoring unit is used to calculate the online conductivity value of the cathode bed treatment process at the current moment in real time. The calculation formula is as follows:

[0094]

[0095] Wherein, X represents the online conductivity value of the cathode bed treatment process at the current moment, and T represents the time at the current moment;

[0096] The early warning adjustment unit is used to predict whether the online conductivity value of the next process is abnormal based on the online conductivity value, power monitor and temperature monitor in the multiple processes of the cathode bed treatment. The prediction method is as follows:

[0097] Step I: Set the online conductivity parameters, power parameters and temperature parameters of the corresponding process and record them in real time through a data recorder;

[0098] Step II: Calculate the difference between the online conductivity parameters, power parameters and temperature parameters of the corresponding process and the actually measured online conductivity values, power values ​​and temperature values. If the difference = ±0.1, it is judged that the online conductivity, power and temperature are close to the safe value. If the difference > 0.1 or < -0.1, it is judged that the online conductivity, power and temperature exceed the safe value, and an anion bed treatment process warning is issued. Ten minutes is counted as one cycle. According to the online conductivity parameters, power parameters and temperature parameters of three cycles, it is predicted whether the online conductivity value of the corresponding process in the anion bed treatment process is abnormal. If the average values ​​of the online conductivity values ​​of the three cycles all exceed the online conductivity parameters, it is judged that the online conductivity value monitoring in the anion bed treatment process is abnormal.

[0099] The timing tracking display unit is used to track the working time of each process in the negative bed treatment process in real time according to the timer.

[0100] By real-time monitoring of the online silicon meter value, orderly adjustment of the valves in the anion bed treatment process, automatic tracking of the online silicon meter value at the end of timing of multiple processes, and real-time monitoring of the online conductivity in the anion bed treatment process, it is possible to monitor the online conductivity in the anion bed treatment process in real time, and at the same time, by real-time judgment of whether the online conductivity in the anion bed treatment process is abnormal, and issuing early warning adjustment information when the conductivity is abnormal, further reducing the deviation of the online conductivity in the anion bed treatment process, increasing the data accuracy in the anion bed treatment process, and ensuring the safety and reliability of ultrapure water manufacturing.

[0101] Embodiment 3

[0102] Please refer to Figure 4 As shown: Based on the first embodiment, the mixed bed processing end includes a data monitoring module, an acid valve adjustment module and a conductivity monitoring module;

[0103] The data monitoring module includes an online sodium value unit, a silica unit, and a valve adjustment unit;

[0104] The online sodium value unit is used to recalculate the online sodium values ​​of multiple cation bed treatment processes and display them in real time through the sodium meter. When the online sodium value is measured to be ≥3ug / L, the water inlet valve and the water outlet valve are immediately closed;

[0105] The silica unit is used to recalculate the online silica values ​​of multiple anion bed treatment processes and display them in real time through a silica meter. When the online silica value is measured to be ≥3ug / L, the water inlet valve and the water outlet valve are immediately closed;

[0106] The valve adjustment unit is used to track the various processing steps of the cation resin and the anion resin in real time through a timer and a data tracker, and to operate the next step after the timing of each step is completed.

[0107] The acid valve adjustment module includes an alkali quantity control unit and a timing and sequencing unit;

[0108] The alkali quantity control unit is used to set the alkali regeneration pump and control the alkali quantity in real time according to the mixed bed treatment process;

[0109] The timing and sequencing unit is used to arrange the mixed bed treatment processes in real time by means of a timer, and to arrange the treatment processes of the cation resin and the anion resin twice.

[0110] The conductivity monitoring module includes a primary monitoring unit, a primary adjustment unit, a secondary monitoring unit and a secondary adjustment unit;

[0111] The primary monitoring unit is used to monitor the conductivity and online sodium value in the mixed bed treatment process in real time through a data monitor;

[0112] The primary adjustment unit is used to immediately report to the system to close the forward wash drain valve and open the outlet valve when the primary monitoring conductivity is ≤2μs / cm and Na+<2ug / L;

[0113] The secondary monitoring unit is used to monitor the conductivity and online sodium value in the mixed bed process through a data monitor;

[0114] The secondary adjustment unit is used to immediately report to the system to close the forward wash drain valve and open the outlet valve when the secondary monitoring output conductivity is ≤2μs / cm and Na+<2ug / L.

[0115] By real-time monitoring of the online values ​​of cation resins and anion resins in the mixed bed treatment process, synchronously adjusting the valves according to the online values, and real-time control of the alkali amount and the timing and sequencing of the operating process flow, the orderliness of ultrapure water production can be relatively stably guaranteed during ultrapure water production. By real-time monitoring of the online conductivity values ​​of cation resins and anion resins and making abnormal adjustments, the treatment processes of cation resins and anion resins can be accurately monitored in real time and synchronously during the mixed bed treatment process during ultrapure water production, further improving the success rate of ultrapure water production.

[0116] In the present invention, an ultrapure water manufacturing system is provided. When the system is in operation and used for ultrapure water manufacturing, the cation bed treatment program is first set, and the timing of multiple processes of the cation bed treatment is set to achieve step-by-step timing adjustment of multiple processes, and the corresponding valves are manually controlled to adjust the acid on and off, as well as the orderly setting of multiple valves, and the online sodium value in the cation bed treatment process is monitored in real time, and the real-time process of the cation bed treatment process is judged, so that the cation bed treatment process is orderly, and the online sodium value can be accurately monitored, the online sodium value error existing in the ultrapure water manufacturing is reduced, and the precision of ultrapure water manufacturing is improved; secondly, by real-time monitoring of the online silicon meter value, orderly adjustment of the valves in the anion bed treatment process, and automatic tracking of the online silicon meter value at the end of the timing of multiple processes, and real-time monitoring of the online conductivity in the anion bed treatment process, the online conductivity in the anion bed treatment process can be monitored in real time, and at the same time, through It can judge in real time whether the online conductivity in the anion bed treatment process is abnormal, and issue early warning adjustment information when the conductivity is abnormal, so as to further reduce the deviation of the online conductivity in the anion bed treatment process, increase the data accuracy in the anion bed treatment process, and ensure the safety and reliability of ultrapure water manufacturing; finally, by real-time monitoring of the online values ​​of cation resin and anion resin in the mixed bed treatment process, and synchronously adjusting the valves according to the online values, the alkali amount and the timing and sorting operation process flow can be controlled in real time, which can ensure the orderliness of ultrapure water manufacturing in a relatively stable manner during ultrapure water manufacturing. By real-time monitoring of the online conductivity values ​​of cation resin and anion resin and making abnormal adjustments, the processing processes of cation resin and anion resin can be accurately monitored in real time and synchronously during the mixed bed treatment process during ultrapure water manufacturing, further improving the success rate of ultrapure water manufacturing, and the valves can be set to open and close at regular intervals according to each process in the ultrapure water manufacturing process.

[0117] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An ultrapure water production system, characterized in that: The system comprises a cation bed processing end, an anion bed processing end and a mixed bed processing end, wherein the cation bed processing end, the anion bed processing end and the mixed bed processing end are jointly provided with a timing synchronization adjustment end; The cationic bed processing end is used to set the cationic bed processing program and set the timing of multiple processes of the cationic bed processing, realize the hierarchical timing adjustment of multiple processes, manually control the corresponding valves to adjust the acid on and off, and orderly set multiple valves, and monitor the online sodium value in the cationic bed processing process in real time to determine the real-time process abnormality of the cationic bed processing process; The anion bed treatment end is used to monitor the online silicon meter value in real time, and adjust the valves in the anion bed treatment process in an orderly manner, automatically track the online silicon meter value when the timing ends, and monitor the online conductivity in the anion bed treatment process in real time, determine whether the online conductivity in the anion bed treatment process is abnormal, and issue early warning adjustment information when the conductivity is abnormal; The mixed bed treatment end is used to monitor the online values ​​of the cation resin and the anion resin in the mixed bed treatment process in real time, and synchronously adjust the valves according to the online values, control the alkali amount and the timing and sequencing of the operation process flow in real time, monitor the online conductivity value of the mixed bed in real time and make abnormal adjustments; The timing synchronization adjustment end is used to synchronously adjust the abnormal processing flow of the cation bed, the anion bed and the mixed bed, and track the adjusted manufacturing process in real time through the data monitor.

2. The system according to claim 1, characterized in that The cation bed processing end includes a program setting module, a manual adjustment module and a sodium table tracking module; The program setting module includes a program setting unit, a program timing unit and a step-by-step adjustment unit; The program setting unit is used to set the positive bed treatment process and monitor the real-time status of the positive bed treatment process in real time through a data recorder and a data tracker; The program timing unit is used to time the positive bed treatment process through a timer; The step-by-step adjustment unit is used to perform time- and stage-by-stage process operations on the positive bed treatment process through serial number arrangement, and to track the real-time status of the positive bed treatment process in real time through a data tracker.

3. The system according to claim 2, characterized in that The manual adjustment module includes an acid valve adjustment unit and a multi-valve setting unit; The acid valve adjustment unit is used to set the manual valve and control the acid concentration to 5%. When the liquid level of the acid metering tank is lower than 0.1 meters as measured by the liquid level monitor, the outlet valve of the acid metering tank is closed for a set time of 80 minutes, the outlet valve of the acid regeneration pump is closed, and the acid regeneration pump and the acid inlet valve are closed; The multi-valve setting unit is used to close and open the valves according to the process duration of the timer, and the valves include inlet and outlet acid valves, inlet and outlet water valves and forward and reverse wash valves.

4. The system according to claim 3, characterized in that The sodium table tracking module includes an online sodium value monitoring unit, which is used to calculate the online sodium value in the cation bed treatment process at the current moment in real time. The calculation formula is as follows: Na (mg / L) = (C × V) / m; Among them, Na represents the online sodium value in the cation bed treatment process at the current moment, C represents the concentration of sodium ions in the water sample, the unit is mg / L, and V represents the volume of the water sample passing through the cation bed, the unit is usually L or m 3 , m represents the mass of the resin in the cation bed, and the unit is usually kg. The measured unit of Na, mg / L, is converted to ug / L. When the measured Na is ≤10ug / L, close the forward wash valve and open the outlet valve.

5. The system according to claim 1, characterized in that The cathode bed processing end includes a silicon meter monitoring module, a valve adjustment module and a silicon meter tracking module; The silicon meter monitoring module includes a silicon meter setting unit, a silicon meter monitoring unit and a silicon meter statistics unit; The silicon meter setting unit is used to set the standard silicon dioxide value to 50 g / L; The silicon meter monitoring unit is used to calculate the silicon dioxide value of the cathode bed treatment process at the current moment in real time, and the calculation formula is as follows: Q = (S + [CO2] + [SiO2]) V / VR; Among them, Q represents the silica value in the anion bed treatment process at the current moment, S represents the average effluent acidity in the anion bed treatment process, CO2 represents the average CO2 concentration of the anion bed inlet water, SiO2 represents the average SiO2 concentration of the anion bed inlet water, V represents the total amount of water produced during the cycle, and VR represents the resin volume in the bed; The silicon meter statistical unit is used to record the silicon meter values ​​measured at the current time and the historical time in real time through a data recorder.

6. The system according to claim 5, characterized in that The valve adjustment module includes an orderly adjustment unit and an adjustment timing unit; The orderly adjustment unit is used to automatically close the water inlet valve and the water outlet valve, open the air valve and the backwash drain valve, and open the backwash water inlet when the silica value at the current moment is calculated to be ≥50g / L. The time is set to 3 minutes. When the timing ends, the backwash water inlet valve is closed and the backwash drain valve is opened. The timing is 10 minutes. When the timing ends, the backwash drain valve is adjusted; The timing adjustment unit is used to adjust the process duration of the negative bed treatment process in real time according to the timer.

7. The system according to claim 6, characterized in that The silicon meter tracking module includes a conductivity monitoring unit, an early warning adjustment unit and a timing tracking display unit; The conductivity monitoring unit is used to calculate the online conductivity value of the cathode bed treatment process at the current moment in real time, and the calculation formula is as follows: Wherein, X represents the online conductivity value of the cathode bed treatment process at the current moment, and T represents the time at the current moment; The early warning adjustment unit is used to predict whether the online conductivity value of the next process is abnormal based on the online conductivity value, power monitor and temperature monitor in the multiple processes of the cathode bed treatment. The prediction method is as follows: Step I: Set the online conductivity parameters, power parameters and temperature parameters of the corresponding process and record them in real time through a data recorder; Step II: Calculate the difference between the online conductivity parameters, power parameters and temperature parameters of the corresponding process and the actually measured online conductivity values, power values ​​and temperature values. If the difference = ±0.1, it is judged that the online conductivity, power and temperature are close to the safe value. If the difference > 0.1 or < -0.1, it is judged that the online conductivity, power and temperature exceed the safe value, and an anion bed treatment process warning is issued. Ten minutes is counted as one cycle. According to the online conductivity parameters, power parameters and temperature parameters of three cycles, it is predicted whether the online conductivity value of the corresponding process in the anion bed treatment process is abnormal. If the average values ​​of the online conductivity values ​​of the three cycles all exceed the online conductivity parameters, it is judged that the online conductivity value monitoring in the anion bed treatment process is abnormal. The timing tracking display unit is used to track the working time of each process in the negative bed treatment process in real time according to the timer.

8. The system according to claim 1, characterized in that The mixed bed processing end includes a data monitoring module, an acid valve adjustment module and a conductivity monitoring module; The data monitoring module includes an online sodium value unit, a silicon dioxide unit and a valve adjustment unit; The online sodium value unit is used to recalculate the online sodium values ​​of multiple cation bed treatment processes and display them in real time through a sodium meter, and when the online sodium value is measured to be ≥3ug / L, the water inlet valve and the water outlet valve are immediately closed; The silica unit is used to recalculate the online silica values ​​of multiple anion bed treatment processes and display them in real time through a silica meter, and when the online silica value is measured to be ≥3ug / L, the water inlet valve and the water outlet valve are immediately closed; The valve adjustment unit is used to track the various processing steps of the cation resin and the anion resin in real time through a timer and a data tracker, and to perform the operation of the next step after the timing of each step ends.

9. The system according to claim 8, characterized in that The acid valve adjustment module includes an alkali quantity control unit and a timing and sequencing unit; The alkali amount control unit is used to set the alkali regeneration pump and control the alkali amount in real time according to the mixed bed treatment process; The timing and sequencing unit is used to arrange the mixed bed treatment processes in real time by means of a timer, and to arrange the treatment processes of the cation resin and the anion resin in a second order.

10. The system according to claim 9, characterized in that The conductivity monitoring module includes a primary monitoring unit, a primary adjustment unit, a secondary monitoring unit and a secondary adjustment unit; The primary monitoring unit is used to monitor the conductivity and online sodium value in the mixed bed treatment process in real time through a data monitor; The primary adjustment unit is used to immediately report to the system when the primary monitoring shows that the conductivity is ≤2μs / cm and Na+<2ug / L, close the forward wash drain valve and open the outlet valve; The secondary monitoring unit is used to secondary monitor the conductivity and online sodium value in the mixed bed treatment process through a data monitor; The secondary adjustment unit is used to immediately report to the system to close the forward wash drain valve and open the outlet valve when the secondary monitoring shows that the conductivity is ≤2μs / cm and Na+<2ug / L.

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