Furnace shutdown device for single crystal furnace

Abstract

The invention provides a blowing-out device for a single crystal furnace, and relates to the technical field of single crystal production equipment. The single crystal furnace shutdown device comprises a tank body, a connecting part, a central pipe and a plurality of heat dissipation parts, the connecting part is arranged on the tank body, and the connecting part is configured to be connected with a heavy hammer lifting structure of the single crystal furnace so as to place the tank body into the furnace body; the central pipe is arranged in the tank body, the bottom of the central pipe penetrates through the tank body, at least one gas outlet is formed in the tank body, and the gas outlet is communicated with the central pipe, so that gas in the furnace body is discharged from the gas outlet through the central pipe; the heat dissipation part is arranged on the outer side of the central pipe in a surrounding mode in the circumferential direction, and cooling liquid used for cooling the central pipe is arranged in the heat dissipation part so that a temperature difference can be formed between the central pipe and the outside of the tank body to accelerate gas flowing. According to the blowing-out device for the single crystal furnace, the cooling efficiency of the single crystal furnace is improved, and the blowing-out time is shortened.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal production equipment, and in particular to a single crystal furnace shutdown device. Background Art

[0002] The whole cycle of the single crystal growth process can be divided into the following steps: furnace preparation, material addition, melting, temperature adjustment, welding, seeding, shoulder release, shoulder rotation, equal diameter, finishing and furnace shutdown. In the furnace shutdown stage, heating needs to be stopped and cooling procedures started, and then the furnace body is disassembled and the internal oxide is cleaned to prepare for furnace assembling.

[0003] The shutdown phase is the longest part of the entire process, accounting for more than 80% of the total time, and the furnace cooling takes up most of the time. During the shutdown phase, the traditional cooling method is to use argon gas to blow inside the furnace to cool the inside of the furnace, and combine the furnace's own cooling structure to achieve the cooling of the furnace.

[0004] However, when cooling is performed only by blowing argon, the argon tends to stay in the furnace body after being heated by the furnace body, resulting in low cooling efficiency and a long furnace shutdown time. Summary of the invention

[0005] The present application provides a single crystal furnace shutdown device, which is used to solve the problems of low furnace cooling efficiency and long shutdown time during the shutdown stage of single crystal production.

[0006] The present application provides a single crystal furnace shutdown device, comprising a tank body, a connecting part, a central tube and a plurality of heat dissipation parts;

[0007] The connecting portion is disposed on the tank body, and the connecting portion is configured to be connected to a weight lifting structure of a single crystal furnace so as to place the tank body into the furnace body;

[0008] The central tube is arranged in the tank body, the bottom of the central tube passes through the tank body, and at least one gas outlet is opened on the tank body, and the gas outlet is communicated with the central tube, so that the gas in the furnace body enters the central tube and is discharged from the gas outlet;

[0009] The heat dissipation part is circumferentially arranged on the outer side of the central tube, and a cooling liquid for cooling the central tube is installed in the heat dissipation part, so that a temperature difference is formed between the central tube and the outside of the tank body to accelerate the flow of gas.

[0010] In some embodiments, the heat dissipation portion includes a first arc segment, a second arc segment and two side segments, and the two sides of the side segment are respectively connected to the first arc segment and the second arc segment to form a cavity for storing coolant, the first arc segment is connected to the central tube, and the second arc segment is connected to the tank body.

[0011] In some embodiments, the device further includes a heat conductor, which is used to conduct the heat of the gas outside the tank to the heat dissipation part.

[0012] In some embodiments, the heat conducting member includes a plurality of first heat conducting plates, wherein the first heat conducting plates are disposed on the heat dissipation portion, and one end of the first heat conducting plate is located inside the heat dissipation portion, and the other end is located outside the tank body.

[0013] In some embodiments, the first heat conducting sheet includes a first heat conducting portion and a second heat conducting portion connected to each other, the first heat conducting portion is arranged on the heat dissipation portion and is partially located in the heat dissipation portion, one end of the second heat conducting portion is located outside the tank body, and an angle is formed between the first heat conducting portion and the second heat conducting portion.

[0014] In some embodiments, both ends of the heat dissipation portion extend along the length direction of the tank body.

[0015] In some embodiments, the heat conductive member also includes a plurality of second heat conductive plates, which are evenly distributed along the radial direction of the bottom of the tank body, and the second heat conductive plates are ring-shaped, with the outer ring of the second heat conductive plates being located outside the tank body, and the inner ring of the second heat conductive plates being located inside the heat dissipation part.

[0016] In some embodiments, the second heat conductive sheet is tilted so that the longitudinal section of the second heat conductive sheet faces the spherical center of the bottom of the tank body.

[0017] In some embodiments, the number of the air outlets is three, and the air outlets are evenly distributed on the sides of the tank body and communicated with the central tube.

[0018] In some embodiments, a water injection port is provided on the connecting portion, and the water injection port extends into the tank body to communicate with the heat dissipation portion.

[0019] The present application provides a single crystal furnace shutdown device, which dissipates the heat of the gas in the central tube by arranging a central tube penetrating the tank body in the tank body, and dissipating multiple heat dissipation parts in the tank body; the tank body is connected to a heavy hammer through a connecting part to be placed in the furnace body of the single crystal furnace, and the gas is blown on the surface of the gas outlet. By utilizing the Bernoulli principle, the gas flows rapidly at the gas outlet to form a pressure drop, thereby sucking the high-temperature gas at the bottom to the top, and the gas temperature in the central tube is lower than the external gas temperature, which can form a temperature difference, thereby accelerating the gas flow, so as to quickly bring out the high-temperature gas and speed up the cooling efficiency of the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0021] Figure 1 A cross-sectional view of a single crystal furnace shutdown device provided in an embodiment of the present application;

[0022] Figure 2 for Figure 1 A cross-sectional view of the shutdown device of the single crystal furnace from another angle;

[0023] Figure 3 for Figure 1 Schematic diagram of the structure of the shutdown device of the medium single crystal furnace;

[0024] Figure 4 for Figure 3 Schematic diagram of the cross section of AA;

[0025] Figure 5 for Figure 4 The structural diagram of the middle heat dissipation part;

[0026] Figure 6 for Figure 3 Schematic diagram of the cross section of the middle BB;

[0027] Figure 7 for Figure 3 Schematic diagram of the cross section of CC.

[0028] Description of reference numerals:

[0029] 100, tank body; 110, air outlet;

[0030] 200, connecting portion; 210, water injection port;

[0031] 300, center tube;

[0032] 400, heat dissipation portion; 410, first arc segment; 420, second arc segment; 430, side segment;

[0033] 500, first heat conducting sheet; 510, first heat conducting portion; 520, second heat conducting portion;

[0034] 600. A second heat conducting sheet.

[0035] The above drawings have shown clear embodiments of the present application, which will be described in more detail later. These drawings and text descriptions are not intended to limit the scope of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0036] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with the present application. Instead, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0037] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0038] In this application, unless otherwise clearly specified and limited, the terms "installation", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0039] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0040] The whole cycle of the single crystal growth process can be divided into the following steps: furnace preparation, material addition, melting, temperature adjustment, welding, seeding, shoulder release, shoulder rotation, equal diameter, finishing and furnace shutdown. In the furnace shutdown stage, heating needs to be stopped and cooling procedures started, and then the furnace body is disassembled and the internal oxide is cleaned to prepare for furnace assembling.

[0041] The shutdown phase is the longest part of the entire process, accounting for more than 80% of the total time, and the furnace cooling takes up most of the time. During the shutdown phase, the traditional cooling method is to use argon gas to blow inside the furnace to cool the inside of the furnace, and combine the furnace's own cooling structure to achieve the cooling of the furnace.

[0042] However, when cooling is performed only by blowing argon, the argon tends to stay in the furnace body after being heated by the furnace body, resulting in low cooling efficiency and a long furnace shutdown time.

[0043] In order to solve the above problems, the present application provides a single crystal furnace shutdown device, which dissipates the heat of the gas in the central tube by arranging a central tube penetrating the tank body in the tank body, and dissipating multiple heat dissipation parts in the tank body; the tank body is connected to the weight through the connecting part to be placed in the furnace body of the single crystal furnace, and the gas is blown on the surface of the gas outlet. By utilizing the Bernoulli principle, the gas flows rapidly at the gas outlet to form a pressure drop, thereby sucking the high-temperature gas at the bottom to the top, and the gas temperature in the central tube is lower than the external gas temperature, which can form a temperature difference, thereby accelerating the gas flow, so as to quickly bring out the high-temperature gas and speed up the cooling efficiency of the furnace body.

[0044] The technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems are described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. The embodiments of the present application will be described below in conjunction with the accompanying drawings.

[0045] The present application provides a single crystal furnace shutdown device, referring to Figure 1 , Figure 2 and Figure 3 The single crystal furnace shutdown device includes a tank body 100, a connecting part 200, a central tube 300 and a plurality of heat dissipation parts 400;

[0046] The connecting portion 200 is disposed on the tank body 100, and the connecting portion 200 is configured to be connected to a heavy hammer lifting structure of the single crystal furnace so as to place the tank body 100 into the furnace body;

[0047] The central tube 300 is disposed in the tank body 100, the bottom of the central tube 300 penetrates the tank body 100, and at least one gas outlet 110 is opened on the tank body 100, and the gas outlet is communicated with the central tube 300, so that the gas in the furnace body is discharged from the gas outlet 110 through the central tube 300;

[0048] The heat dissipation part 400 is circumferentially arranged outside the central tube 300 . The heat dissipation part 400 is filled with a cooling liquid for cooling the central tube 300 , so as to form a temperature difference between the central tube 300 and the outside of the tank body 100 to accelerate the flow of gas.

[0049] Among them, the gas outlet 110 is arranged on the top side wall of the tank body 100. After the tank body 100 is placed in the furnace body of the single crystal furnace, the argon gas blown toward the bottom of the single crystal furnace is blown downward perpendicular to the gas outlet direction of the gas outlet 110 on the tank body 100, so that the gas flow rate at the gas outlet 110 is increased. According to Bernoulli's principle, the gas pressure at the gas outlet 110 decreases, so that the bottom of the central tube 300 absorbs the high-temperature gas at the bottom of the furnace body, thereby realizing the gas flow from bottom to top in the central tube 300.

[0050] The heat dissipation part 400 is arranged around the side wall of the central tube 300. The high-temperature gas entering the central tube 300 from the bottom of the tank body 100 exchanges heat with the heat dissipation part 400 through the tube wall of the central tube 300 to achieve heat dissipation of the gas in the central tube 300. The gas gradually cools down as it gradually flows upward from the central tube 300 until it is discharged from the gas outlet 110 on the top side wall of the tank body 100 to the top of the furnace body and then circulates. This accelerates the heat dissipation of the top crucible in the single crystal furnace.

[0051] By adopting the above technical solution, after the last silicon rod is taken out of the single crystal furnace, the tank body 100 is connected to the weight through the connecting part 200 and placed in the furnace body of the single crystal furnace. Argon gas is used to blow toward the bottom of the furnace body, and the gas is blown on the surface of the gas outlet 110. Using the Bernoulli principle, the gas flows rapidly at the gas outlet 110 to form a pressure drop, thereby sucking the high-temperature gas at the bottom to the top, and the gas temperature in the central tube 300 is lower than the external gas temperature, which can form a temperature difference, thereby accelerating the gas flow, so as to quickly bring out the high-temperature gas, speed up the cooling efficiency of the furnace body, and is convenient and quick to install.

[0052] In some embodiments, reference Figure 4 and Figure 5 The heat dissipation portion 400 includes a first arc segment 410, a second arc segment 420 and two side segments 430. The two sides of the side segment 430 are respectively connected to the first arc segment 410 and the second arc segment 420 to form a cavity for storing coolant. The first arc segment 410 is connected to the central tube 300, and the second arc segment 420 is connected to the tank body 100.

[0053] The centers of the first arc segment 410 and the second arc segment 420 are both facing one side of the central tube 300. The first arc segment 410 is closely fitted with the side wall of the central tube 300 to achieve the connection between the heat dissipation portion 400 and the central tube 300, and to increase the contact area and the heat dissipation effect. The two side segments 430 are connected to both sides of the first arc segment 410 and to both sides of the second arc segment 420. In addition, the arc of the second arc segment 420 is greater than 180°, so that the heat dissipation portion 400 is in the shape of a single petal in cross section.

[0054] By adopting the above technical solution, the first arc segment 410 is fitted with the central tube 300 to increase the contact area, thereby improving the heat dissipation effect; at the same time, the second heat dissipation portion 400 is an arc segment, thereby increasing the contact area between the second heat dissipation portion 400 and the internal coolant, so that the coolant can quickly exchange heat with the side wall of the heat dissipation portion 400, further improving the heat dissipation efficiency, and the second arc segment 420 is in contact with the inner side of the tank body 100, thereby increasing the volume of the coolant while maintaining the contact area between the side wall of the heat dissipation portion 400 and the coolant.

[0055] For example, the first arc segment 410 can be set as the side wall of the central tube 300, and the adjacent side segments 430 are shared between adjacent heat dissipation parts 400. This is to reduce the wall thickness of the heat dissipation part 400 and the central tube 300, while reducing the cost and being more conducive to heat transfer. The heat dissipation part 400 extends from the top to the bottom of the tank body 100 along the length direction of the tank body 100.

[0056] In the application embodiment, the tank body 100, the central tube 300, the heat dissipation part 400 and other structures are all formed by welding stainless steel. Stainless steel has good high temperature resistance, corrosion resistance and heat conduction effects, so that the device can be used in a high temperature environment.

[0057] In some embodiments, six heat dissipation parts 400 are provided.

[0058] The six heat dissipation parts 400 are evenly distributed around the circumference of the central tube 300 and form a petal shape with the central tube 300. The side segments 430 on the heat dissipation parts 400 increase the contact area with the coolant, thereby facilitating heat exchange between the central tube 300 and the heat dissipation parts 400.

[0059] The single crystal furnace shutdown device further includes a heat conducting member, which is used to conduct the heat of the gas outside the tank body 100 to the heat dissipation part 400 .

[0060] In some embodiments, the heat conducting member includes a plurality of first heat conducting sheets 500 , which are disposed on the heat dissipation portion 400 , with one end of the first heat conducting sheet 500 located inside the heat dissipation portion 400 and the other end located outside the can body 100 .

[0061] One end of the first heat conducting sheet 500 is inserted into the second arc segment 420 , and the other end is inserted into the outside of the tank body 100 , so as to cool the gas outside the tank body 100 and further accelerate the cooling efficiency inside the furnace body.

[0062] Furthermore, in order to maintain a good heat conduction effect, a plurality of first heat conducting sheets 500 are provided on each heat dissipation portion 400. Specifically, the middle portion of the second arc segment 420 contacts the inner side wall of the tank body 100, thereby dividing the second arc segment 420 into two parts. Since the second arc segment 420 directly contacts the side wall of the tank body 100, there is no need to provide the first heat conducting sheet 500. Four first heat conducting sheets 500 are symmetrically provided in the two parts of the second arc segment 420, respectively, so that 48 first heat conducting sheets 500 are provided on the tank body 100. In other embodiments, different numbers of first heat conducting sheets 500 may also be provided according to actual needs, which will not be described in detail herein.

[0063] The first heat conducting sheet 500 is fixed by welding with stainless steel.

[0064] In some embodiments, reference Figure 5 The first heat-conducting sheet 500 includes a first heat-conducting portion 510 and a second heat-conducting portion 520 that are connected to each other. The first heat-conducting portion 510 is arranged on the heat dissipation portion 400, and a portion of the first heat-conducting portion 510 is located inside the heat dissipation portion 400. One end of the second heat-conducting portion 520 is located outside the can body 100, and there is an angle between the first heat-conducting portion 510 and the second heat-conducting portion 520.

[0065] The included angles between the four first heat conducting parts 510 and the second heat conducting parts 520 on the same side of the second arc segment 420 are different. The first heat conducting part 510 is arranged at the center of the circle of the second arc segment 420 in the cross section, and the second heat conducting part 520 is arranged at the center of the circle of the can body 100 in the cross section, and the spacing between adjacent second heat conducting parts 520 is maintained. In order to evenly arrange the first heat conducting sheet 500 between the can body 100 and the heat dissipation part 400, the heat dissipation effect at each position is equal, so as to further improve the heat dissipation effect.

[0066] In some embodiments, both ends of the heat dissipation portion 400 extend along the length direction of the can body 100. The first heat conductive sheet 500 is disposed along the length direction of the can body 100.

[0067] The first heat conducting sheet 500 is arranged along the length direction of the tank body 100, so that the length direction of the second heat conducting part 520 is parallel to the length direction of the tank body 100, that is, the length direction of the second heat conducting part 520 is the same as the movement direction of the gas, so that a gas flow channel is formed between two adjacent second heat conducting parts 520, ensuring that the gas can fully contact with the second heat conducting part 520 during the flow process, thereby increasing the contact area with the gas and improving the heat exchange efficiency; and maintaining a suitable spacing to ensure that the gas can flow smoothly.

[0068] Furthermore, in the cross section, the length of the first heat conductive sheet 500 extending into the heat dissipation portion 400 is 10 mm-5 mm, and the length of the first heat conductive sheet 500 extending outside the tank body 100 is 10 mm-5 mm, so as to improve the heat dissipation effect.

[0069] In some embodiments, reference Figure 1 and Figure 3 The heat conducting member also includes a plurality of second heat conducting plates 600, which are evenly distributed along the radial direction of the bottom of the tank body 100, and are annular in shape. The outer ring of the second heat conducting plate 600 is located outside the tank body 100, and the inner ring of the second heat conducting plate 600 is located inside the heat dissipation portion 400.

[0070] By adopting the above technical solution, the design of the annular heat conductive sheet can increase the area of ​​heat conduction, thereby improving the efficiency of heat conduction. By connecting the inner circle of the second heat conductive sheet 600 to the heat dissipation part 400, an efficient heat exchange path can be formed, so that the heat in the high-temperature gas can be quickly transferred to the heat dissipation part 400. The setting of the annular heat conductive sheet can promote heat exchange inside and outside the tank body 100, especially under natural convection conditions, the annular structure can increase the disturbance of the fluid, thereby increasing the heat exchange rate. Since the annular heat conductive sheet is in direct contact with the tank body 100 and the heat dissipation part 400, this direct contact can reduce thermal resistance, make heat transfer smoother, and improve the overall thermal management efficiency.

[0071] In some embodiments, the second heat conductive sheet 600 is tilted so that the longitudinal section of the second heat conductive sheet 600 faces the spherical center of the bottom of the tank body 100 .

[0072] In view of the high temperature characteristics of the bottom of the tank body 100, a second heat conducting sheet 600 is arranged at the bottom of the tank body 100. The second heat conducting sheet 600 is a trumpet-shaped sheet. These circular sheets not only increase the contact area between the bottom and the heat, but also cleverly guide the airflow to the central ZTE tube through the inclined setting of the second heat conducting sheet 600. It effectively reduces the dead corners of heat accumulation at the bottom, and also promotes the uniform distribution of heat, further improving the overall heat dissipation performance and avoiding heat accumulation.

[0073] For example, in the embodiment of the present application, the number of the second heat conducting sheets 600 is 5, and the 5 second heat conducting sheets 600 are installed at equal intervals on the bottom of the tank body 100. The angle between the adjacent second heat conducting sheets 600 and the spherical center of the bottom of the tank body 100 is 10°. The inclination angles of the plurality of second heat conducting sheets 600 are increased in an orderly manner, thereby increasing the contact area with the gas outside the tank body 100, promoting uniform distribution of heat, further improving the overall heat dissipation performance, and avoiding heat accumulation.

[0074] In the embodiment of the present application, the bottom of the tank body 100 is hemispherical, and the central tube 300 is coaxially arranged with the tank body 100. The second heat conducting sheet 600 is evenly arranged on the bottom hemisphere of the tank body 100 to further increase the contact area of ​​the gas and improve the heat dissipation effect.

[0075] In some embodiments, reference Figure 1 , Figure 6 and Figure 7 The number of the air outlets 110 is three, and the air outlets 110 are evenly distributed on the sides of the tank body 100 and communicate with the central tube 300 .

[0076] The three gas outlets 110 are evenly distributed on the side wall of the top of the tank body 100, so that the blowing direction of the argon gas is perpendicular to the gas flow direction of the gas outlets 110, so as to absorb the high-temperature gas at the bottom of the tank body 100 through the central tube 300 based on the Bernoulli principle. The provision of multiple gas outlets 110 can improve the exhaust efficiency of the central tube 300 and reduce the possibility of avoiding the gas outlets 110 during the argon blowing process.

[0077] In some embodiments, a water injection port 210 is provided on the connection portion 200 , and the water injection port 210 extends into the tank body 100 and communicates with the heat dissipation portion 400 .

[0078] Among them, the connecting part 200 is a tubular structure, the middle part of the connecting part 200 is a water injection port 210, the connecting part 200 is integrally formed with the tank body 100, and serves as the top of the tank body 100. The heat dissipation part 400 extends to the top of the tank body 100 and is connected with the water injection port 210, and is separated from the air outlet 110, so that cooling water can be directly injected into the water injection port 210 to fill multiple heat dissipation parts 400 without flowing into the central tube 300.

[0079] The outer side of the connecting portion 200 is provided with a clamping structure for connecting with a weight. In other embodiments, bolts may also be used for connection and fixing, which will not be elaborated in detail here.

[0080] In the embodiment of the present application, the coolant is water, which has a large specific heat capacity. In the embodiment of the present application, the heat dissipation unit 400 stores 0.5m 3 For example, water can contain 110,000 kJ of energy when it rises 50°C. Compared with argon, the amount of heat that can be taken away is doubled. However, 200 kg of graphite in the furnace only contains 144,000 kJ of energy when it drops 1,000°C. After absorbing heat, 26° room temperature water is far from reaching the boiling standard of 98°. The thermal expansion coefficient of water is small. For every degree increase in the temperature of 0.5 cubic meters of water, the volume expands by about 1.25×10 -4 Cubic meters, leave enough space of 15cm at the top 3 It can ensure safe use.

[0081] The present application provides a single crystal furnace shutdown device, which dissipates the heat of the gas in the central tube 300 by setting a central tube 300 penetrating the tank body 100 in the tank body 100 and setting a plurality of heat dissipation parts 400 in the tank body 100; the tank body 100 is connected to a weight through a connecting part 200 to be placed in the furnace body of the single crystal furnace, and the gas is blown on the surface of the gas outlet 110. By using the Bernoulli principle, the gas flows rapidly at the gas outlet 110, generating a pressure drop and forming a low-pressure area, thereby sucking the high-temperature gas at the bottom to the top, and the gas temperature in the central tube 300 is lower than the external gas temperature, which can form a temperature difference, thereby accelerating the gas flow, so as to quickly bring out the high-temperature gas and speed up the cooling efficiency of the furnace body.

[0082] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the present application. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims.

[0083] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A single crystal furnace shutdown device, characterized in that: It comprises a tank body (100), a connecting part (200), a central tube (300) and a plurality of heat dissipation parts (400); The connecting portion (200) is arranged on the tank body (100), and the connecting portion (200) is configured to be connected to a weight lifting structure of a single crystal furnace so as to place the tank body (100) into the furnace body; The central tube (300) is arranged in the tank body (100), the bottom of the central tube (300) passes through the tank body (100), at least one gas outlet (110) is provided on the side wall of the tank body (100), and the gas outlet (110) is communicated with the central tube (300) so that the gas in the furnace body is discharged from the gas outlet (110) through the central tube (300); The heat dissipation portion (400) is circumferentially arranged on the outside of the central tube (300), and a cooling liquid for cooling the central tube (300) is installed in the heat dissipation portion (400), so as to form a temperature difference between the central tube (300) and the outside of the tank body (100) to accelerate the flow of gas.

2. The single crystal furnace shutdown device according to claim 1, characterized in that: The heat dissipation portion (400) comprises a first arc segment (410), a second arc segment (420) and two side segments (430), the two sides of the side segment (430) are respectively connected to the first arc segment (410) and the second arc segment (420) to form a cavity for storing coolant, the first arc segment (410) is connected to the central tube (300), and the second arc segment (420) is connected to the tank body (100).

3. The single crystal furnace shutdown device according to claim 1, characterized in that: It also includes a heat conducting member, which is used to conduct the heat of the gas outside the tank body (100) to the heat dissipation part (400).

4. The single crystal furnace shutdown device according to claim 3, characterized in that: The heat conducting member comprises a plurality of first heat conducting sheets (500), wherein the first heat conducting sheets (500) are arranged on the heat dissipation portion (400), and one end of the first heat conducting sheet (500) is located inside the heat dissipation portion (400), and the other end is located outside the tank body (100).

5. The single crystal furnace shutdown device according to claim 4, characterized in that: The first heat-conducting sheet (500) comprises a first heat-conducting portion (510) and a second heat-conducting portion (520) which are connected to each other, the first heat-conducting portion (510) is arranged on the heat-dissipating portion (400) and is partially located inside the heat-dissipating portion (400), one end of the second heat-conducting portion (520) is located outside the tank body (100), and an angle is formed between the first heat-conducting portion (510) and the second heat-conducting portion (520).

6. The single crystal furnace shutdown device according to claim 2, characterized in that: Both ends of the heat dissipation portion (400) extend along the length direction of the tank body (100).

7. The single crystal furnace shutdown device according to claim 3, characterized in that: The heat-conducting member further comprises a plurality of second heat-conducting sheets (600), wherein the second heat-conducting sheets (600) are evenly distributed along the radial direction of the bottom of the tank body (100), and the second heat-conducting sheets (600) are annular in shape, wherein the outer ring of the second heat-conducting sheets (600) is located outside the tank body (100), and the inner ring of the second heat-conducting sheets (600) is located inside the heat dissipation portion (400).

8. The single crystal furnace shutdown device according to claim 7, characterized in that: The second heat conducting plate (600) is arranged at an angle so that the longitudinal section of the second heat conducting plate (600) faces the spherical center of the bottom of the tank body (100).

9. The single crystal furnace shutdown device according to any one of claims 1 to 6, characterized in that: The number of the air outlets (110) is three, and the air outlets (110) are evenly distributed on the sides of the tank body (100) and are in communication with the central tube (300).

10. The single crystal furnace shutdown device according to any one of claims 1 to 6, characterized in that: The connection portion (200) is provided with a water injection port (210), and the water injection port (210) extends into the tank body (100) to communicate with the heat dissipation portion (400).

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