Efficient drying device for TFT (Thin Film Transistor) substrate

Abstract

The invention relates to the technical field of flat panel display, in particular to a TFT substrate efficient drying device which comprises a drying box and a pressure driving mechanism, a supporting mechanism is arranged on the upper side face of the drying box, a sealing plate is arranged on one side of the drying box in a sliding mode, and the pressure driving mechanism comprises a drying box sealing plate and a hydraulic cylinder; when the hydraulic cylinder brakes upwards, air in the drying bin is extracted, evaporation and removal of water are accelerated by reducing pressure, and the water evaporation efficiency is improved. The movable sealing plate can suck air into the drying bin when the air holes communicate with the drying bin, meanwhile, heat dissipation of a TFT substrate is facilitated, when the sealing plate shields the air holes, the hydraulic cylinder sucks the air in the drying bin, then the air pressure in the drying bin is reduced, evaporation and removal of water are accelerated by reducing the pressure, and the drying efficiency is improved. The water evaporation efficiency is accelerated.

Description

Technical Field

[0001] The invention relates to a drying device, in particular to a high-efficiency drying device for a TFT substrate, and belongs to the technical field of flat panel displays. Background Art

[0002] The TFT substrate is a driving circuit built on a glass substrate, which includes a thin film transistor (TFT) and related metal layers, insulating layers and other structures. Each TFT is usually composed of a gate electrode, a source electrode, a drain electrode, a semiconductor layer and a gate insulating layer.

[0003] The main purpose of drying the TFT substrate is to remove residual moisture and particulate matter on the surface of the substrate, ensure the cleanliness of the substrate surface, and thus improve the performance and reliability of the TFT. In the TFT manufacturing process, since there are many semiconductor devices on the TFT substrate, the baking temperature of the semiconductor devices is a key factor affecting the performance of the chip. Semiconductor devices are extremely sensitive and have a narrow operating temperature range. Too high or too low a temperature may affect the performance and must be strictly controlled. Too high a temperature may cause chip damage, and too low a temperature may not achieve the expected baking effect, affecting the conductive performance and stability of the TFT. In severe cases, it may affect the service life of the semiconductor.

[0004] Therefore, there is an urgent need to improve the efficient drying device for TFT substrates to solve the above problems. Summary of the invention

[0005] The present invention provides a high-efficiency drying device for a TFT substrate, which is used to solve the defect in the prior art that excessively high temperature may cause damage to the chip.

[0006] The present invention provides a TFT substrate high-efficiency drying device, comprising: A drying box and a pressure driving mechanism arranged directly above the drying box, wherein a drying chamber is provided on the upper side of the drying box, a supporting mechanism is fixedly arranged inside the drying chamber, and a TFT substrate is arranged on the supporting mechanism; A sealing groove is provided on one side of the drying box, a sealing plate is slidably provided inside the sealing groove, an air hole connected to the interior of the drying chamber is provided on the sealing groove, and the air hole is sealed by sliding the sealing plate; The pressure driving mechanism includes a drying box sealing plate and a hydraulic cylinder. The drying box sealing plate is provided with an air pump connected to the drying bin. The output end of the hydraulic cylinder is provided with a piston. The piston is slidably arranged inside the air pump. When the hydraulic cylinder is braked upward, the hydraulic cylinder is used to extract air inside the drying bin, thereby reducing the air pressure inside the drying bin. The evaporation and removal of water is accelerated by reducing the pressure, thereby increasing the efficiency of water evaporation.

[0007] According to a high-efficiency drying device for TFT substrates provided by the present invention, the drying box sealing plate corresponds to the port of the drying bin, and the upper side of the drying box sealing plate is provided with symmetrically distributed electric telescopic rods, and the telescopic rod output ends of the electric telescopic rods are fixedly connected to the drying box sealing plate, wherein when the electric telescopic rods are braked downward, the drying box sealing plate is clamped at the port of the drying bin and seals the port of the drying bin, and after the drying box sealing plate seals the drying bin, the air inside the drying bin is extracted through the hydraulic cylinder, thereby achieving the purpose of reducing the internal pressure of the drying box sealing plate.

[0008] According to a TFT substrate efficient drying device provided by the present invention, the support mechanism comprises a fixed support frame and a movable support frame, the fixed support frame is fixedly arranged inside the drying chamber, the movable support frame is slidably arranged inside the drying chamber corresponding to the fixed support frame, a slide groove is provided on the inner side surface of the drying chamber, and the movable support frame is slidably arranged inside the slide groove; The fixed support frame and the movable support frame are provided with corresponding substrate clamping grooves, and the TFT substrate is clamped inside the substrate clamping grooves.

[0009] According to a TFT substrate efficient drying device provided by the present invention, an adjustment mechanism is fixedly arranged on the movable support frame, and the adjustment mechanism includes a brake block, and the brake block is arranged on the movable support frame, and a brake rod is connected to one side of the brake block, and the end of the brake rod away from the brake block passes through the drying box and is screwed with the drying box through a thread; A limiting hole is provided on one side of the brake block, one end of the brake rod is connected to the limiting block, and the limiting block is rotatably arranged inside the limiting hole.

[0010] According to the high-efficiency drying device for TFT substrates provided by the present invention, a brake handle is connected to one end of the brake rod away from the brake block, and the brake handle is arranged outside the drying box.

[0011] According to a TFT substrate efficient drying device provided by the present invention, a cleaning mechanism is slidably arranged on the fixed support frame, the cleaning mechanism comprises a cleaning slider, and the cleaning slider is provided with a guide block slidably connected to the fixed support frame; The upper and lower sides of the cleaning slider are both connected with a support arm fixing block, a cleaning support arm is fixedly arranged on the support arm fixing block, a cleaning brush is fixedly arranged on the cleaning support arm, and the cleaning brush abuts against the side of the TFT substrate.

[0012] According to a high-efficiency drying device for TFT substrates provided by the present invention, one end of the cleaning slider is connected to a screw drive block, the screw drive block is connected to a transmission screw through a thread, one end of the transmission screw passes through the drying box and is connected to a driven gear, a cleaning motor is fixedly provided on one side of the driven gear on the outer side of the drying box, a driving gear is provided at the output end of the cleaning motor, the driving gear is rotatably connected to the driven gear, and the cleaning motor is used to rotate the transmission screw.

[0013] According to the high-efficiency drying device for TFT substrate provided by the present invention, a rubber sealing pad is arranged on the outer side of the sealing plate, and a sealing plate handle is provided on the top of the sealing plate.

[0014] According to a high-efficiency drying device for TFT substrates provided by the present invention, a heating chamber is provided at the bottom of the drying box, and a heating ring is fixedly provided inside the heating chamber.

[0015] According to a high-efficiency drying device for TFT substrates provided by the present invention, a support frame is fixedly arranged at the bottom of the drying box, the upper end of the electric telescopic rod is fixedly connected to the support frame, a C-shaped fixing plate is fixedly arranged on the support frame, and the upper end of the pressure driving mechanism is fixedly connected to the C-shaped fixing plate.

[0016] The present invention provides a high-efficiency drying device for TFT substrates. When the air holes are connected to the drying chamber by moving the sealing plate, air can be drawn into the interior of the drying chamber, and heat dissipation of the TFT substrate is facilitated. When the sealing plate blocks the air holes, the hydraulic cylinder draws air from the drying chamber, thereby reducing the air pressure inside the drying chamber, solving the problem that the chip may be damaged due to excessive temperature, and achieving the beneficial effect of accelerating the evaporation and removal of water by reducing the pressure, thereby accelerating the efficiency of water evaporation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is one of the cross-sectional views of the TFT substrate efficient drying device provided by an embodiment of the present invention; Figure 2 is a three-dimensional diagram of a high-efficiency drying device for a TFT substrate provided by an embodiment of the present invention; Figure 3 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 1 ; Figure 4 : is a structural diagram of a drying box of a TFT substrate high-efficiency drying device provided by an embodiment of the present invention; Figure 5 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 2 ; Figure 6 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 3 ; Figure 7 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 4 ; Figure 8 is a structural diagram of a cleaning mechanism of a TFT substrate efficient drying device provided by an embodiment of the present invention; Fig. 9 : is a structural diagram of an adjustment mechanism of a TFT substrate high-efficiency drying device provided by an embodiment of the present invention; Reference numerals: 1. Drying box; 101. Heating chamber; 102. Drying chamber; 103. Sealing groove; 104. Air vent; 105. Slide; 2. Pressure drive mechanism; 201. Drying box sealing plate; 202. Hydraulic cylinder; 203. Vacuum pump; 204. Piston; 3. Support mechanism; 301. Fixed support frame; 302. Movable support frame; 303. Base plate slot; 4. Cleaning mechanism; 401. Cleaning motor; 402. Transmission screw; 403. Cleaning slider; 404. Screw drive block; 4 05. Support arm fixing block; 406. Cleaning support arm; 407. Cleaning brush; 408. Guide block; 409. Driving gear; 410. Driven gear; 5. Adjustment mechanism; 501. Brake block; 502. Brake rod; 503. Brake handle; 504. Limit hole; 505. Limit block; 6. Sealing plate; 601. Sealing plate handle; 7. Electric telescopic rod; 701. Telescopic rod output end; 8. Heating coil; 9. Support frame; 901. C-type fixing plate; 10. TFT substrate. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] Combine the following Figure 1-Figure 9 Describing the invention: The TFT substrate high-efficiency drying device provided in this embodiment includes a drying box 1 and a pressure driving mechanism 2 arranged directly above the drying box 1. A drying chamber 102 is provided on the upper side of the drying box 1. A supporting mechanism 3 is fixedly arranged inside the drying chamber 102. A TFT substrate 10 is arranged on the supporting mechanism 3. The TFT substrate 10 can be dried by placing it on the supporting mechanism 3. The structure is simple, and the convenience of use and the drying efficiency are improved. Since many semiconductor devices are arranged on the TFT substrate, the baking temperature of the semiconductor device is a key factor affecting the chip performance. The semiconductor device is extremely sensitive and has a narrow operating temperature range. Too high or too low temperature may affect the performance and must be strictly controlled. Too high temperature may cause chip damage, and too low temperature may not achieve the expected baking effect. Therefore, baking at room temperature will affect the service life of the semiconductor. A sealing groove 103 is provided on one side of the drying box 1. A sealing plate 6 is slidably provided inside the sealing groove 103. An air hole 104 connected to the inside of the drying chamber 102 is provided on the sealing groove 103. The air hole 104 is sealed by sliding the sealing plate 6. The air hole 104 on the sealing groove 103 is connected to the inside of the drying chamber 102. A rubber sealing pad is provided on the outer side of the sealing plate 6. A sealing plate handle 601 is provided above the sealing plate 6. When the sliding sealing plate 6 enables the air hole 104 to be connected to the drying chamber 102, air can be drawn into the drying chamber 102, and heat dissipation of the TFT substrate 10 is facilitated. When the sealing plate 6 blocks the air hole 104, the drying chamber 102 is sealed. The structure is simple, and the flexibility and convenience of use are improved. In order to avoid unnecessary damage to the semiconductor device caused by baking, the TFT substrate 10 is dried by reducing the pressure. The pressure driving mechanism 2 includes a drying box sealing plate 201 and a hydraulic cylinder 202. The drying box sealing plate 201 is provided with a vacuum cylinder 203 connected to the drying chamber 102. The output end of the hydraulic cylinder 202 is provided with a piston 204. The piston 204 is slidably arranged inside the vacuum cylinder 203. When the hydraulic cylinder 202 brakes upward, the hydraulic cylinder 202 is used to extract the air inside the drying chamber 102, thereby reducing the air pressure inside the drying chamber 102, and accelerating the evaporation and removal of water by reducing the pressure, thereby increasing the efficiency of water evaporation. In addition, a heating chamber 101 is provided at the bottom of the drying box 1, and a heating coil 8 is fixedly provided inside the heating chamber 101. After the heating coil 8 is started, the drying box 1 is heated, so that the internal energy inside the drying chamber 102 is increased, and the gap between molecules is increased, so that the TFT substrate 10 inside the drying chamber 102 can be dried; Then, when the air inside the drying chamber 102 escapes after thermal expansion and contraction, the hydraulic cylinder 202 at the start pulls the piston 204 upwards of the vacuum cylinder 203, further reducing the pressure inside the drying chamber 102 and greatly improving the efficiency of water evaporation.

[0021] Figure 1 This is one of the cross-sectional views of the TFT substrate efficient drying device provided by an embodiment of the present invention; Figure 2 This is one of the three-dimensional diagrams of the efficient drying device for TFT substrate provided by the embodiment of the present invention; Figure 3 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 1 ; On the one hand, in order to facilitate the drying box sealing plate 201 to seal the drying bin 102, the drying box sealing plate 201 corresponds to the port of the drying bin 102, and the upper side of the drying box sealing plate 201 is provided with symmetrically distributed electric telescopic rods 7, and the telescopic rod output end 701 of the electric telescopic rod 7 is fixedly connected to the drying box sealing plate 201, wherein when the electric telescopic rod 7 is braked downward, the drying box sealing plate 201 is clamped at the port of the drying bin 102 and seals the port of the drying bin 102. After the drying box sealing plate 201 seals the drying bin 102, the air inside the drying bin 102 is extracted through the hydraulic cylinder 202, thereby achieving the purpose of reducing the internal pressure of the drying box sealing plate 201. The electric telescopic rod 7 is fixedly provided on the upper side of the drying box sealing plate 201, and the drying box sealing plate 201 is pressed into the interior of the drying bin 102 through the telescopic rod output end 701 on the electric telescopic rod 7, which can improve the convenience of use and ensure the sealing of the drying bin 102.

[0022] Figure 5 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 2 ; Figure 6 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 3 ; On the other hand, the support mechanism 3 includes a fixed support frame 301 and a movable support frame 302. The fixed support frame 301 is fixedly arranged inside the drying chamber 102. The movable support frame 302 is slidably arranged inside the drying chamber 102 corresponding to the fixed support frame 301. A slide groove 105 is provided on the inner side of the drying chamber 102. The movable support frame 302 is slidably arranged inside the slide groove 105. The fixed support frame 301 on the support mechanism 3 is fixedly arranged inside the drying chamber 102 to improve the stability of the fixed support frame 301. The movable support frame 302 is slidably arranged inside the slide groove 105 of the drying chamber 102. Therefore, it can be adjusted according to the size of the TFT substrate 10, thereby improving the scope and flexibility of use. The fixed support frame 301 and the movable support frame 302 are provided with corresponding substrate slots 303, and the TFT substrate 10 is clamped inside the substrate slots 303. A substrate slot 303 is provided between the fixed support frame 301 and the movable support frame 302, and the TFT substrate 10 is clamped inside the substrate slots 303. The structure is simple, and the convenience of use is improved. In order to facilitate the adjustment of the distance between the movable support frame 302 and the fixed support frame 301, an adjustment mechanism 5 is fixedly arranged on the movable support frame 302, and the adjustment mechanism 5 includes a brake block 501, and the brake block 501 is arranged on the movable support frame 302. A brake rod 502 is connected to one side of the brake block 501, and the end of the brake rod 502 away from the brake block 501 passes through the drying box 1 and is screwed to the drying box 1 through a thread. The adjustment mechanism 5 is fixedly arranged on the movable support frame 302, and the brake block 501 on the adjustment mechanism 5 is fixedly arranged on the support mechanism 3, and the brake block 501 is adjusted by the brake rod 502. 1 is adjusted, and the movable support frame 302 is pushed forward by rotating the brake rod 502 to improve the convenience of use. A limiting hole 504 is provided on one side of the brake block 501, and one end of the brake rod 502 is connected to a limiting block 505, and the limiting block 505 is rotatably arranged inside the limiting hole 504. In order to facilitate the adjustment of the brake block 501, a limiting hole 504 is provided on the brake block 501, and the limiting block 505 at one end of the brake rod 502 is rotatably arranged inside the limiting hole 504. Therefore, when the brake rod 502 is rotated, the brake block 501 can be pushed to achieve the displacement of the movable support frame 302; At the same time, one end of the brake rod 502 away from the brake block 501 is connected to the brake handle 503, and the brake handle 503 is arranged on the outside of the drying box 1. One end of the brake rod 502 extends out of the drying box 1 and is connected to the brake handle 503. The brake rod 502 is rotated by the brake handle 503. The structure is simple and easy to use.

[0023] Figure 4 : is a structural diagram of a drying box of a TFT substrate high-efficiency drying device provided by an embodiment of the present invention; Figure 5This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 2 ; Figure 6 This is a partial structure of the TFT substrate efficient drying device provided by the embodiment of the present invention. Figure 3 ; Figure 8 is a structural diagram of a cleaning mechanism of a TFT substrate efficient drying device provided by an embodiment of the present invention; On the other hand, a cleaning mechanism 4 is slidably provided on the fixed support frame 301, and the cleaning mechanism 4 includes a cleaning slider 403, and a guide block 408 slidably connected to the fixed support frame 301 is provided on the cleaning slider 403. The cleaning mechanism 4 is provided on the support mechanism 3 to facilitate cleaning the side of the TFT substrate 10, which helps to clean the dust on the surface of the TFT substrate 10 while drying; The upper and lower sides of the cleaning slider 403 are connected to a support arm fixing block 405, a cleaning support arm 406 is fixedly provided on the support arm fixing block 405, a cleaning brush 407 is fixedly provided on the cleaning support arm 406, and the cleaning brush 407 is against the side of the TFT substrate 10. The cleaning slider 403 is slidably provided on the fixed support frame 301 through a guide block 408, so as to improve the stability of the movement of the cleaning slider 403. When the cleaning slider 403 moves, it drives the cleaning support arm 406 on the support arm fixing block 405 to move, and then drives the cleaning brush 407 on the cleaning support arm 406 to move, so as to clean the side of the TFT substrate 10 through the cleaning brush 407, so as to achieve the purpose of dust removal. In addition, in order to improve the efficiency of cleaning, such as Figure 8 As shown, one end of the cleaning slider 403 is connected to a screw drive block 404, and the screw drive block 404 is connected to a transmission screw 402 through a thread, and one end of the transmission screw 402 passes through the drying box 1 and is connected to a driven gear 410, and a cleaning motor 401 is fixedly arranged on one side of the driven gear 410 on the outer side of the drying box 1, and a driving gear 409 is arranged at the output end of the cleaning motor 401, and the driving gear 409 is rotatably connected to the driven gear 410, and the cleaning motor 401 is used to rotate the transmission screw 402, and a screw drive is arranged on one side of the cleaning slider 403. Block 404, the screw drive block 404 is connected to the transmission screw 402 through a thread, so the rotation of the transmission screw 402 can drive the cleaning slider 403 to slide circularly on the fixed support frame 301, and a cleaning motor 401 is arranged at one end of the transmission screw 402. After the cleaning motor 401 is started, it drives the driven gear 410 to rotate, and then drives the driving gear 409 on the transmission screw 402 to rotate. Therefore, the cleaning motor 401 can drive the cleaning slider 403 to move circularly on the support mechanism 3, without manual operation, thereby improving the cleaning efficiency.

[0024] Figure 2 is a three-dimensional diagram of a high-efficiency drying device for a TFT substrate provided by an embodiment of the present invention; A support frame 9 is fixedly provided at the bottom of the drying box 1, the upper end of the electric telescopic rod 7 is fixedly connected to the support frame 9, a C-shaped fixing plate 901 is fixedly provided on the support frame 9, the upper end of the pressure driving mechanism 2 is fixedly connected to the C-shaped fixing plate 901, the pressure driving mechanism 2 and the drying box 1 are fixed by the support frame 9 to improve the overall structural strength, and the pressure driving mechanism 2 is fixed by the C-shaped fixing plate 901 to improve the stability of the pressure driving mechanism 2.

[0025] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0026] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A TFT substrate high-efficiency drying device, comprising a drying box (1) and a pressure drive mechanism (2) arranged directly above the drying box (1), characterized in that: A drying chamber (102) is provided on the upper side of the drying box (1), a support mechanism (3) is fixedly arranged inside the drying chamber (102), and a TFT substrate (10) is arranged on the support mechanism (3); A sealing groove (103) is provided on one side of the drying box (1), a sealing plate (6) is slidably arranged inside the sealing groove (103), an air hole (104) communicating with the interior of the drying chamber (102) is provided on the sealing groove (103), and the air hole (104) is sealed by sliding the sealing plate (6); The pressure drive mechanism (2) comprises a drying box sealing plate (201) and a hydraulic cylinder (202); the drying box sealing plate (201) is provided with an air pump (203) connected to the drying chamber (102); an output end of the hydraulic cylinder (202) is provided with a piston (204); the piston (204) is slidably arranged inside the air pump (203); when the hydraulic cylinder (202) is braked upward, the hydraulic cylinder (202) is used to extract air inside the drying chamber (102), thereby reducing the air pressure inside the drying chamber (102); the evaporation and removal of water is accelerated by reducing the pressure, thereby increasing the efficiency of water evaporation.

2. The TFT substrate high-efficiency drying device according to claim 1, characterized in that: The drying box sealing plate (201) corresponds to the port of the drying chamber (102); the upper side of the drying box sealing plate (201) is provided with symmetrically distributed electric telescopic rods (7); the telescopic rod output end (701) of the electric telescopic rod (7) is fixedly connected to the drying box sealing plate (201); when the electric telescopic rod (7) is braked downward, the drying box sealing plate (201) is clamped at the port of the drying chamber (102) and seals the port of the drying chamber (102); after the drying box sealing plate (201) seals the drying chamber (102), the air inside the drying chamber (102) is extracted through the hydraulic cylinder (202), thereby achieving the purpose of reducing the internal pressure of the drying box sealing plate (201).

3. The TFT substrate high-efficiency drying device according to claim 1, characterized in that: The support mechanism (3) comprises a fixed support frame (301) and a movable support frame (302), wherein the fixed support frame (301) is fixedly arranged inside the drying bin (102), and the movable support frame (302) is slidably arranged inside the drying bin (102) corresponding to the fixed support frame (301), and a slide groove (105) is provided on the inner side surface of the drying bin (102), and the movable support frame (302) is slidably arranged inside the slide groove (105); Corresponding substrate slots (303) are provided on the fixed support frame (301) and the movable support frame (302), and the TFT substrate (10) is snapped into the interior of the substrate slots (303).

4. The TFT substrate high-efficiency drying device according to claim 3, characterized in that: An adjusting mechanism (5) is fixedly arranged on the movable support frame (302), the adjusting mechanism (5) comprising a brake block (501), the brake block (501) being arranged on the movable support frame (302), a brake rod (502) being connected to one side of the brake block (501), an end of the brake rod (502) away from the brake block (501) passing through the drying box (1) and being screwed together with the drying box (1) by means of a thread; A limiting hole (504) is provided on one side of the brake block (501); one end of the brake rod (502) is connected to the limiting block (505); and the limiting block (505) is rotatably disposed inside the limiting hole (504).

5. The TFT substrate high-efficiency drying device according to claim 4, characterized in that: One end of the brake rod (502) away from the brake block (501) is connected to a brake handle (503), and the brake handle (503) is arranged outside the drying box (1).

6. The high-efficiency drying device for TFT substrate according to claim 5, characterized in that: A cleaning mechanism (4) is slidably disposed on the fixed support frame (301), the cleaning mechanism (4) comprising a cleaning slider (403), and the cleaning slider (403) is provided with a guide block (408) slidably connected to the fixed support frame (301); The upper and lower side surfaces of the cleaning slider (403) are both connected to a support arm fixing block (405); a cleaning support arm (406) is fixedly arranged on the support arm fixing block (405); a cleaning brush (407) is fixedly arranged on the cleaning support arm (406); the cleaning brush (407) abuts against the side surface of the TFT substrate (10).

7. The TFT substrate high-efficiency drying device according to claim 6, characterized in that: One end of the cleaning slider (403) is connected to a screw drive block (404), and the screw drive block (404) is connected to a transmission screw (402) via a threaded connection. One end of the transmission screw (402) passes through the drying box (1) and is connected to a driven gear (410). A cleaning motor (401) is fixedly provided on one side of the driven gear (410) on the outer side of the drying box (1). A driving gear (409) is provided at the output end of the cleaning motor (401), and the driving gear (409) is rotatably connected to the driven gear (410). The cleaning motor (401) is used to rotate the transmission screw (402).

8. The TFT substrate high-efficiency drying device according to claim 1, characterized in that: A rubber sealing pad is provided on the outer side surface of the sealing plate (6), and a sealing plate handle (601) is provided on the top of the sealing plate (6).

9. The TFT substrate high-efficiency drying device according to claim 1, characterized in that: A heating chamber (101) is provided at the bottom of the drying box (1), and a heating ring (8) is fixedly arranged inside the heating chamber (101).

10. The TFT substrate high-efficiency drying device according to claim 2, characterized in that: A support frame (9) is fixedly arranged at the bottom of the drying box (1); the upper end of the electric telescopic rod (7) is fixedly connected to the support frame (9); a C-shaped fixing plate (901) is fixedly arranged on the support frame (9); and the upper end of the pressure drive mechanism (2) is fixedly connected to the C-shaped fixing plate (901).

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