Micromirror structure for reducing dynamic deformation

Abstract

The invention discloses a micro-mirror structure for reducing dynamic deformation, which comprises a mirror surface, a torsion beam, an outer frame, a connecting rod and a ring connecting rod, and is characterized in that the outer frame is arranged outside the mirror surface, and the outer frame is connected with the torsion beam; the connecting rods comprise the I-type connecting rod, the II-type connecting rod and the III-type connecting rod. The I-shaped connecting rod, the III-shaped connecting rod and the ring connecting rod are arranged between the mirror surface and the outer frame, the inner end of the I-shaped connecting rod is connected with the mirror surface, the outer end of the I-shaped connecting rod is connected with the ring connecting rod, the inner end and the outer end of the III-shaped connecting rod are connected with the mirror surface and the outer frame respectively, and the ring connecting rod is connected with the mirror surface. The ring connecting rods can be used for connecting two adjacent I-shaped connecting rods or two adjacent III-shaped connecting rods or the adjacent I-shaped connecting rods and III-shaped connecting rods; according to the micro-mirror structure for reducing the dynamic deformation, the dynamic deformation can be remarkably reduced during periodic rotational motion.

Description

Technical Field

[0001] The invention relates to the field of micro-opto-mechanical technology, and in particular to a micro-mirror structure for reducing dynamic deformation. Background Art

[0002] Micromirrors are a very important type of device in micro-nano electromechanical systems and are widely used in AR / VR, LiDAR, projection display, 3D structured light, optical communication and other fields. Micromirrors are roughly divided into four categories according to the driving method: electrothermal micromirrors, electrostatic micromirrors, electromagnetic micromirrors, and piezoelectric micromirrors. The performance of a micromirror depends on the mirror size, resonant frequency, mechanical angle, structural strength, and dynamic deformation, especially dynamic deformation, which is crucial for applications such as high-performance projection display.

[0003] During the rotation of the micromirror, the periodic inertial load acting on the mirror surface will cause dynamic deformation of the mirror surface. In the presence of dynamic deformation, the main peak intensity of the micromirror reflection beam profile decreases, while the intensity of the adjacent peaks becomes non-negligible. This effectively causes the spot size of the mirror reflection beam to change, which in turn leads to a decrease in the contrast between the resolvable spots, thus limiting the use of micromirrors in high-performance applications. However, in current research, there are very few structures that can reduce the dynamic deformation of micromirrors, and the effect is also very limited. Not only can it not be applied to mirrors of different sizes, but it is also difficult to use in high resonant frequency applications. In addition, many methods will greatly increase the complexity of micro-nano processing and manufacturing.

[0004] In summary, in order to expand the use of micromirrors in high-performance applications, providing a micromirror structure for reducing dynamic deformation is a technical problem that technical personnel in this field urgently need to solve. Summary of the invention

[0005] The object of the present invention is to provide a micromirror structure for reducing dynamic deformation, so as to solve the problems existing in the above-mentioned prior art and reduce the dynamic deformation of the micromirror structure.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention provides a micromirror structure for reducing dynamic deformation, comprising a mirror surface, a torsion beam, an outer frame, a connecting rod and a ring connecting rod, wherein the outer frame is arranged outside the mirror surface, and the outer frame is connected to the torsion beam; the connecting rod comprises a type I connecting rod, a type II connecting rod and a type III connecting rod;

[0008] The I-type connecting rod, the III-type connecting rod and the ring connecting rod are arranged between the mirror surface and the outer frame, the inner end of the I-type connecting rod is connected to the mirror surface, the outer end of the I-type connecting rod is connected to the ring connecting rod, the inner end and the outer end of the III-type connecting rod are respectively connected to the mirror surface and the outer frame, and the ring connecting rod can connect two adjacent I-type connecting rods or two adjacent III-type connecting rods or adjacent I-type connecting rods and III-type connecting rods;

[0009] Or, the I-type connecting rod, the II-type connecting rod and the ring connecting rod are arranged between the mirror surface and the outer frame, the inner end of the I-type connecting rod is connected to the mirror surface, the outer end of the I-type connecting rod is connected to the ring connecting rod, the inner end of the II-type connecting rod is connected to the ring connecting rod, and the outer end of the II-type connecting rod is connected to the outer frame, and the ring connecting rod can connect two adjacent I-type connecting rods or two adjacent II-type connecting rods or adjacent I-type connecting rods and II-type connecting rods.

[0010] Preferably, the ring connecting rod is a circular ring connecting rod, an inverted ring connecting rod or a straight ring connecting rod.

[0011] Preferably, there are four of each of the type I connecting rods and the type III connecting rods, wherein two of the type I connecting rods are spaced apart on the left side of the mirror, another two of the type I connecting rods are spaced apart on the right side of the mirror, two of the type III connecting rods are spaced apart on the top of the mirror, and another two of the type III connecting rods are spaced apart on the bottom of the mirror.

[0012] Preferably, the ring connecting rod is connected between adjacent I-type connecting rods, between adjacent III-type connecting rods, and between adjacent I-type connecting rods and III-type connecting rods.

[0013] Preferably, the ring connecting rod is connected between adjacent I-type connecting rods and between adjacent III-type connecting rods.

[0014] Preferably, the ring connecting rod is a tangent ring connecting rod capable of being tangent to the outer circle of the mirror surface.

[0015] Preferably, 8 type I connecting rods are provided, and 6 type II connecting rods are provided, the 8 type I connecting rods are evenly distributed on the periphery of the mirror surface, 3 type II connecting rods are spaced apart at the top of the mirror surface, and the other 3 type II connecting rods are spaced apart at the bottom of the mirror surface.

[0016] Preferably, the type I connecting rods and the type II connecting rods are connected in sequence through the ring connecting rods.

[0017] Preferably, the two I-type connecting rods and the three II-type connecting rods located at the top of the mirror are arranged alternately along the circumference and are connected in sequence through the ring-connecting rods, the two I-type connecting rods and the three II-type connecting rods located at the bottom of the mirror are arranged alternately along the circumference and are connected in sequence through the ring-connecting rods, and the two I-type connecting rods located on the left side of the mirror and the two I-type connecting rods located on the right side of the mirror are connected by the ring-connecting rods.

[0018] Preferably, the mirror surface, torsion beam, outer frame, connecting rod and ring connecting rod are in the same plane.

[0019] Compared with the prior art, the present invention has achieved the following technical effects:

[0020] The micromirror structure for reducing dynamic deformation in the present invention can significantly reduce dynamic deformation during periodic rotational motion. The micromirror structure not only realizes the decoupling of the mirror surface and the torsion beam structure, but also adds a ring connecting rod displacement limiting structure, which can still significantly reduce dynamic deformation in high resonant frequency applications, that is, when the micromirror performs high-frequency rotational motion.

[0021] Furthermore, by reasonably reducing or enlarging the outer frame and the ring connecting rod during molding, the dynamic deformation of mirrors of different sizes can be reduced, that is, it is universally applicable to mirror sizes.

[0022] Furthermore, each structure is a planar structure and is located on the same plane as the mirror structure, and no additional photolithography layers are added, thereby not increasing the complexity of micro-nano manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 Schematic diagram of the structure of a micromirror structure for reducing dynamic deformation in Embodiment 1 of the present invention;

[0025] Figure 2 is a schematic structural diagram of a micromirror structure for reducing dynamic deformation in Embodiment 2 of the present invention;

[0026] Figure 3 Schematic diagram of the structure of a micromirror structure for reducing dynamic deformation in Embodiment 3 of the present invention;

[0027] Figure 4 Schematic diagram of the structure of a micromirror structure for reducing dynamic deformation in Embodiment 4 of the present invention;

[0028] Figure 5 is a schematic structural diagram of a micromirror structure for reducing dynamic deformation in Embodiment 5 of the present invention;

[0029] Figure 6 is a structural schematic diagram of a micromirror structure for reducing dynamic deformation in Embodiment 6 of the present invention;

[0030] Figure 7 Schematic diagram of the structure of a micromirror structure for reducing dynamic deformation in Embodiment 7 of the present invention;

[0031] Figure 8 Schematic diagram of the structure of a micromirror structure for reducing dynamic deformation in Embodiment 8 of the present invention;

[0032] Fig. 9 Schematic diagram of the angles between the type I connecting rod and the rotation axis, and the type III connecting rod and the orthogonal axis in the present invention;

[0033] Fig.10 Schematic diagram of the angles between the type I connecting rod and the rotation axis, and between the type II connecting rod and the orthogonal axis in the present invention;

[0034] Fig.11 is a process flow chart of manufacturing a micromirror structure for reducing dynamic deformation in the present invention;

[0035] In the figure: 1. mirror; 2. torsion beam; 3. outer frame; 4. ring connecting rod; 5. type I connecting rod; 6. type II connecting rod; 7. type III connecting rod; 8. device layer; 9. insulation layer; 10. substrate layer. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] The object of the present invention is to provide a micromirror structure for reducing dynamic deformation, so as to solve the problems existing in the prior art.

[0038] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] Embodiment 1

[0040] The micromirror structure used to reduce dynamic deformation in this embodiment is as follows: Figure 1As shown, it includes a mirror surface 1, a torsion beam 2, an outer frame 3, a connecting rod and a ring connecting rod 4. The outer frame 3 is arranged outside the mirror surface 1, and the outer frame 3 is connected to the torsion beam 2; the connecting rod includes an I-type connecting rod 5 and a III-type connecting rod 7;

[0041] An I-type connecting rod 5, a III-type connecting rod 7 and a ring connecting rod 4 are arranged between the mirror surface 1 and the outer frame 3. The inner end of the I-type connecting rod 5 is connected to the mirror surface 1, the outer end of the I-type connecting rod 5 is connected to the ring connecting rod 4, the inner end and the outer end of the III-type connecting rod 7 are respectively connected to the mirror surface 1 and the outer frame 3, and the ring connecting rod 4 can connect two adjacent I-type connecting rods 5 or two adjacent III-type connecting rods 7 or adjacent I-type connecting rods 5 and III-type connecting rods 7. The joint structure formed by the I-type connecting rod 5 and the ring connecting rod 4 can limit the vertical displacement of the I-type connecting rod 5 to each other, thereby limiting the vertical displacement of the mirror surface 1 at the position where the I-type connecting rod 5 is located.

[0042] In this embodiment, the mirror 1 is not directly connected to the torsion beam 2. The mirror 1 is connected to the outer frame 3 through a connecting rod and a ring connecting rod 4. When working, it rotates together with the outer frame 3 and has a certain mechanical rotation angle, wherein the rotation axis is the central axis of the torsion beam 2 structure. The mirror 1 is a structure where dynamic deformation occurs. In the presence of the connecting rod and the ring connecting structure, the mirror 1 can significantly reduce the dynamic deformation, reduce the reduction in the main peak intensity of the reflected light beam, and increase the contrast between the distinguishable light spots.

[0043] In this embodiment, the mirror surface 1 , the torsion beam 2 , the outer frame 3 , the connecting rod and the ring connecting rod 4 can be scaled proportionally during molding, and are universally applicable to mirror surfaces 1 of different sizes.

[0044] In this embodiment, the mirror surface 1, the torsion beam 2, the outer frame 3, the connecting rod and the ring connecting rod 4 are in the same plane, and no additional photolithography pattern is required, which will not increase the complexity of micro-nano processing and manufacturing.

[0045] In this specific embodiment, the ring-link rod 4 is a circular ring-link rod 4, whose center coincides with the center of the mirror surface 1. There are 4 I-type connecting rods 5 and 4 III-type connecting rods 7, among which 2 I-type connecting rods 5 are spaced apart on the left side of the mirror surface 1, and the other 2 I-type connecting rods 5 are spaced apart on the right side of the mirror surface 1, 2 III-type connecting rods 7 are spaced apart on the top of the mirror surface 1, and the other 2 III-type connecting rods 7 are spaced apart at the bottom of the mirror surface 1. The ring-link rod 4 is connected between adjacent I-type connecting rods 5, between adjacent III-type connecting rods 7, and between adjacent I-type connecting rods 5 and III-type connecting rods 7, that is, the ring-link rod 4 is a full-ring structure connected together to form a circular ring concentric with the mirror surface 1.

[0046] Embodiment 2

[0047] like Figure 2As shown, the difference between this embodiment and the first embodiment is that the ring connecting rod 4 is connected between adjacent I-type connecting rods 5 and adjacent III-type connecting rods 7, that is, the ring connecting rod 4 does not connect the adjacent I-type connecting rods 5 and III-type connecting rods 7, and the ring connecting rod 4 is not a full-ring structure.

[0048] Embodiment 3

[0049] like Figure 3 As shown, the difference between this embodiment and the first embodiment is that the ring connecting rod 4 is an inverted ring connecting rod 4, and its center is located outside the mirror surface 1. There are 4 I-type connecting rods 5 and 4 III-type connecting rods 7, among which 2 I-type connecting rods 5 are arranged at intervals on the left side of the mirror surface 1, and the other 2 I-type connecting rods 5 are arranged at intervals on the right side of the mirror surface 1, 2 III-type connecting rods 7 are arranged at intervals on the top of the mirror surface 1, and the other 2 III-type connecting rods 7 are arranged at intervals on the bottom of the mirror surface 1, and the ring connecting rod 4 is connected between adjacent I-type connecting rods 5, between adjacent III-type connecting rods 7, and between adjacent I-type connecting rods 5 and III-type connecting rods 7, that is, the ring connecting rods 4 are a full ring structure, and after being connected together, they form a polygon with a circular arc as the side line.

[0050] Embodiment 4

[0051] like Figure 4 As shown, the difference between this embodiment and the third embodiment is that the ring connecting rod 4 is connected between adjacent I-type connecting rods 5 and adjacent III-type connecting rods 7, that is, the ring connecting rod 4 does not connect the adjacent I-type connecting rods 5 and III-type connecting rods 7, and the ring connecting rod 4 is not a full-ring structure.

[0052] Embodiment 5

[0053] like Figure 5 As shown, the difference between this embodiment and the first embodiment is that the ring connecting rod 4 is a straight ring connecting rod 4, which is a rectangular rod.

[0054] There are four I-type connecting rods 5 and four III-type connecting rods 7, among which two I-type connecting rods 5 are spaced apart on the left side of the mirror 1, and the other two I-type connecting rods 5 are spaced apart on the right side of the mirror 1, two III-type connecting rods 7 are spaced apart on the top of the mirror 1, and the other two III-type connecting rods 7 are spaced apart on the bottom of the mirror 1; the ring-linking rods 4 are connected between adjacent I-type connecting rods 5, between adjacent III-type connecting rods 7, and between adjacent I-type connecting rods 5 and III-type connecting rods 7, that is, the ring-linking rods 4 are a full-ring structure connected together to form a polygon.

[0055] Embodiment 6

[0056] like Figure 6As shown, the difference between this embodiment and the fifth embodiment is that the ring connecting rod 4 is connected between adjacent I-type connecting rods 5 and adjacent III-type connecting rods 7, that is, the ring connecting rod 4 does not connect the adjacent I-type connecting rods 5 and III-type connecting rods 7, and the ring connecting rod 4 is not a full-ring structure.

[0057] Embodiment 7

[0058] like Figure 7 As shown, the difference between this embodiment and the first embodiment is that: the connecting rod includes a type I connecting rod 5 and a type II connecting rod 6, and the type I connecting rod 5, the type II connecting rod 6 and the ring connecting rod 4 are arranged between the mirror surface and the outer frame, the inner end of the type I connecting rod 5 is connected to the mirror surface 1, the outer end of the type I connecting rod 5 is connected to the ring connecting rod 4, the inner end of the type II connecting rod 6 is connected to the ring connecting rod 4, and the outer end of the type II connecting rod 6 is connected to the outer frame 3, and the ring connecting rod 4 can connect two adjacent type I connecting rods 5 or two adjacent type II connecting rods 6 or adjacent type I connecting rods 5 and type II connecting rods 6; the ring connecting rod 4 is a cut ring connecting rod 4, which is a rectangular rod and is tangent to the outer circle of the mirror surface 1.

[0059] In this embodiment, 8 I-type connecting rods 5 are provided, and 6 II-type connecting rods 6 are provided. The 8 I-type connecting rods 5 are evenly distributed on the periphery of the mirror surface 1, 3 II-type connecting rods 6 are spaced apart at the top of the mirror surface 1, and the other 3 II-type connecting rods 6 are spaced apart at the bottom of the mirror surface 1. The I-type connecting rods 5 and the II-type connecting rods 6 are sequentially connected by the ring connecting rods 4; that is, the ring connecting rods 4 are a full ring structure, and form a polygon after being connected together.

[0060] Embodiment 8

[0061] like Figure 8 As shown, the difference between this embodiment and embodiment seven is that: the two I-type connecting rods 5 and the three II-type connecting rods 6 located at the top of the mirror 1 are arranged alternately along the circumference and are connected in sequence through the ring-linking rod 4, the two I-type connecting rods 5 and the three II-type connecting rods 6 located at the bottom of the mirror 1 are arranged alternately along the circumference and are connected in sequence through the ring-linking rod 4, and the two I-type connecting rods 5 located on the left side of the mirror 1 and the two I-type connecting rods 5 located on the right side of the mirror 1 are connected through the ring-linking rod 4; that is, the ring-linking rod 4 is not a full-ring structure.

[0062] like Figure 9-10 As shown, in the above embodiments, the I-type connecting rod is only connected to the mirror surface 1 except the ring-link rod 4 structure, and the I-type connecting rod forms an angle α with the rotation axis; the II-type connecting rod is only connected to the outer frame 3 except the ring-link rod 4 structure, and only the cut-ring structure has six II-type connecting rods, four of which form an angle β with the orthogonal axis, and two of which are located on the orthogonal axis; the III-type connecting rod is connected to the outer frame 3 and the mirror surface 1 except the ring-link rod 4 structure, and the III-type connecting rod forms an angle γ with the orthogonal axis.

[0063] In order to make the micromirror structure more reliable and stable, preferably, the ratio of the width of the outer frame 3 to the radius of the mirror surface 1 is between 0.12-0.25. In order to minimize dynamic deformation, preferably, the angles α, β and γ between the connecting rod and the rotation axis (or orthogonal axis) are between 20-25 degrees. Preferably, several micromirror structures that reduce dynamic deformation are all made of materials with high Young's modulus and low density in micro-nano processing, such as single crystal silicon.

[0064] The micromirror structure for reducing dynamic deformation in the present invention has the following working principle:

[0065] When the micromirror works under the action of an external periodic excitation electrical signal, the mirror surface performs periodic rotational motion around the rotation axis where the torsion beam is located, generating a certain mechanical rotation angle, and the mirror surface will be dynamically deformed due to the periodic inertial load. After the light beam is reflected by the moving mirror surface, a scanning line will be generated. Due to the non-planarity of the mirror surface caused by dynamic deformation, the spot shape of the reflected light beam will change.

[0066] When the mirror performs periodic rotational motion around the rotation axis where the torsion beam is located, the outer frame is connected to the mirror through a connecting rod and performs periodic rotational motion together. At the same time, the outer frame is connected to the torsion beam to drive the torsion beam to perform periodic torsional motion and generate a certain torsion angle.

[0067] When the micromirror is working under the action of an external periodic excitation electrical signal, the mirror surface and the torsion beam are structurally decoupled through the external frame and the connecting rod, so that the dynamic deformation of the mirror surface is not affected by the torsion of the torsion beam. When the mirror surface performs periodic rotational motion, the dynamic deformation of the mirror surface is significantly reduced due to the displacement limitation of the ring connecting rod.

[0068] The micromirror structure used to reduce dynamic deformation in the present invention is as follows: Fig.11 As shown, the production process is as follows:

[0069] 1) preparing an SOI wafer including, from top to bottom, a device layer 8, an insulating layer 9 and a substrate layer 10, wherein the device layer 8 and the substrate layer 10 are made of single crystal silicon material, and the insulating layer 9 is made of silicon oxide;

[0070] 2) performing metal sputtering on the top device layer to sputter out a metal layer 11 for electrical connection;

[0071] 3) Front etching, etching the single crystal silicon material on the top of the insulating layer 9, etching the mirror 1, the outer frame 3, the ring connecting rod 4 and the connecting rod (this process can scale all the above structures in proportion to the mirror diameter requirements);

[0072] 4) Backside etching, etching the single crystal silicon material at the bottom of the insulating layer 10 to provide activity space for the mirror 1, the outer frame 3, the ring connecting rod 4 and the connecting rod;

[0073] 5) Release the structure, remove the insulating layer 9 in the hollowed-out areas between the above structures, and complete the micromirror structure manufacturing process.

[0074] It should be noted that the mirror 1 is a reflective light beam structure and can be designed into any shape as needed. The present invention only takes a circular design as an example; the torsion beam 2 is a supporting structure that generates rotational motion when the micromirror is working, and is roughly divided into a straight beam structure and a folded beam structure, which is crucial to the resonant frequency of the micromirror. The present invention takes a straight beam structure as an example.

[0075] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A micromirror structure for reducing dynamic deformation, characterized in that: It includes a mirror surface, a torsion beam, an outer frame, a connecting rod and a ring connecting rod, wherein the outer frame is arranged outside the mirror surface, and the outer frame is connected to the torsion beam; the connecting rod includes a type I connecting rod, a type II connecting rod and a type III connecting rod; The I-type connecting rod, the III-type connecting rod and the ring connecting rod are arranged between the mirror surface and the outer frame, the inner end of the I-type connecting rod is connected to the mirror surface, the outer end of the I-type connecting rod is connected to the ring connecting rod, the inner end and the outer end of the III-type connecting rod are respectively connected to the mirror surface and the outer frame, and the ring connecting rod can connect two adjacent I-type connecting rods or two adjacent III-type connecting rods or adjacent I-type connecting rods and III-type connecting rods; Or, the I-type connecting rod, the II-type connecting rod and the ring connecting rod are arranged between the mirror surface and the outer frame, the inner end of the I-type connecting rod is connected to the mirror surface, the outer end of the I-type connecting rod is connected to the ring connecting rod, the inner end of the II-type connecting rod is connected to the ring connecting rod, and the outer end of the II-type connecting rod is connected to the outer frame, and the ring connecting rod can connect two adjacent I-type connecting rods or two adjacent II-type connecting rods or adjacent I-type connecting rods and II-type connecting rods.

2. The micromirror structure for reducing dynamic deformation according to claim 1, characterized in that: The ring connecting rod is a circular ring connecting rod, an inverted ring connecting rod or a straight ring connecting rod.

3. The micromirror structure for reducing dynamic deformation according to claim 2, characterized in that: There are four type I connecting rods and four type III connecting rods, wherein two type I connecting rods are spaced apart on the left side of the mirror, another two type I connecting rods are spaced apart on the right side of the mirror, two type III connecting rods are spaced apart on the top of the mirror, and another two type III connecting rods are spaced apart on the bottom of the mirror.

4. The micromirror structure for reducing dynamic deformation according to claim 3, characterized in that: The ring connecting rod is connected between adjacent I-type connecting rods, between adjacent III-type connecting rods, and between adjacent I-type connecting rods and III-type connecting rods.

5. The micromirror structure for reducing dynamic deformation according to claim 3, characterized in that: The ring connecting rod is connected between adjacent I-type connecting rods and between adjacent III-type connecting rods.

6. The micromirror structure for reducing dynamic deformation according to claim 1, characterized in that: The ring connecting rod is a cutting ring connecting rod which can be tangent to the outer circle of the mirror surface.

7. The micromirror structure for reducing dynamic deformation according to claim 6, characterized in that: There are 8 type I connecting rods and 6 type II connecting rods. The 8 type I connecting rods are evenly distributed on the periphery of the mirror surface, 3 type II connecting rods are spaced apart at the top of the mirror surface, and the other 3 type II connecting rods are spaced apart at the bottom of the mirror surface.

8. The micromirror structure for reducing dynamic deformation according to claim 7, characterized in that: The I-type connecting rods and the II-type connecting rods are connected in sequence through the ring connecting rods.

9. The micromirror structure for reducing dynamic deformation according to claim 7, characterized in that: The two I-type connecting rods and the three II-type connecting rods located at the top of the mirror are alternately arranged along the circumference and are connected in sequence through the ring connecting rods. The two I-type connecting rods and the three II-type connecting rods located at the bottom of the mirror are alternately arranged along the circumference and are connected in sequence through the ring connecting rods. The two I-type connecting rods located on the left side of the mirror and the two I-type connecting rods located on the right side of the mirror are connected through the ring connecting rods.

10. The micromirror structure for reducing dynamic deformation according to claim 1, characterized in that: The mirror surface, torsion beam, outer frame, connecting rod and ring connecting rod are in the same plane.

Images