Fluidized bed control method, device and system

Abstract

The invention provides a fluidized bed control method, device and equipment and a storage medium, and the method comprises the steps: collecting a real-time temperature, a first pressure difference and a second pressure difference of a fluidized bed, the first pressure difference being a real-time pressure difference between an upper measurement point and a lower measurement point, which are different in preset height, of the fluidized bed, and the second pressure difference being a real-time pressure difference between the upper measurement point and the lower measurement point; the second pressure difference is a real-time pressure difference between the high-pressure stock bin and the fluidized bed; according to the first pressure difference and the second pressure difference, a cascade control method is used for determining control parameters of a pressure supplementing valve on the pressure adjusting pipe; the opening degree of the pressure supplementing valve on the pressure adjusting pipe is adjusted based on the control parameters of the pressure supplementing valve; according to the real-time temperature, determining a power parameter of the heater by using a cascade control method; and controlling the heating power of the heater based on the power parameter. And the fluidized bed pressure difference and the fluidized bed reaction temperature can be accurately controlled.

Description

Technical Field

[0001] The present invention relates to the technical field of polysilicon production, and in particular to a fluidized bed control method, device and system. Background Art

[0002] Fluidized bed technology plays a vital role in the production of polysilicon. Polysilicon is the basic material for manufacturing monocrystalline silicon and solar cells, and is of great significance to the global electronics and photovoltaic industries. SiHCl3, the key ingredient in the production of polysilicon, is produced by the reaction of SiCl4, H2, HCl and industrial silicon in a fluidized bed (boiling bed) at high temperature and pressure. The bed pressure, bed temperature and bed layer control in the fluidized bed have a direct impact on the conversion rate of SiHCl3, which in turn affects the overall economic benefits.

[0003] The current fluidized bed system mainly relies on single-loop control to manage the bed and temperature. This method usually only considers the feedback adjustment of a single variable and lacks the ability to comprehensively optimize multiple key parameters. As a result, when faced with complex and dynamically changing working conditions, the response speed and adjustment accuracy are limited, making it difficult to quickly adapt to fluctuations and changes in the production process. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a fluidized bed control method, device and system to improve the control accuracy of the fluidized bed in view of the above-mentioned deficiencies in the prior art.

[0005] In a first aspect, the present invention provides a fluidized bed control method, which is applied to a fluidized bed system, wherein the fluidized bed system includes a high-pressure silo, a fluidized bed and a heater, wherein a material conveying pipe and a pressure regulating pipe are connected between the high-pressure silo and the fluidized bed, and the pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the material in the high-pressure silo is driven by the pressure difference to be conveyed to the fluidized bed through the material conveying pipe for reaction, and the heater is used to heat the gas entering the fluidized bed.

[0006] The method comprises:

[0007] Collecting the real-time temperature, the first pressure difference, and the second pressure difference of the fluidized bed, wherein the first pressure difference is the real-time pressure difference between two upper and lower different preset height measurement points of the fluidized bed, and the second pressure difference is the real-time pressure difference between the high-pressure silo and the fluidized bed;

[0008] Determining control parameters of the pressure compensation valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference;

[0009] adjusting the opening of the pressure compensating valve on the pressure regulating pipe based on the control parameter of the pressure compensating valve;

[0010] Determining the power parameters of the heater using a cascade control method according to the real-time temperature of the fluidized bed;

[0011] A heating power of the heater is controlled based on the power parameter.

[0012] Furthermore, the method of determining the control parameters of the pressure compensation valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference specifically includes:

[0013] According to a first control logic, the difference between the first pressure difference and the first preset difference is converted into a material conveying pressure difference adjustment amount, wherein the first control logic is a control algorithm for converting the deviation between the first pressure difference of the fluidized bed and the first preset difference into a material conveying pressure difference adjustment amount;

[0014] According to the second control logic, the material conveying pressure difference adjustment amount is converted into the pressure compensating valve control parameter. The second control logic is a control algorithm for converting the material conveying pressure difference adjustment amount into the pressure compensating valve control parameter.

[0015] Furthermore, the method of determining the control parameters of the pressure compensation valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference further includes:

[0016] When the material conveying pressure difference adjustment amount does not belong to the first safety value range, or the pressure compensation valve control parameter does not belong to the second safety value range, a safety warning message is output.

[0017] Further, the power parameter of the heater is determined by using a cascade control method according to the real-time temperature, specifically including:

[0018] According to a third control logic, the difference between the real-time temperature and the preset temperature is converted into a heater output temperature adjustment amount, and the third control logic is a control algorithm for converting the difference between the real-time temperature of the fluidized bed and the preset temperature into a heater output temperature adjustment amount;

[0019] According to a fourth control logic, the heater output temperature adjustment amount is converted into a heater power adjustment parameter. The fourth control logic is a control algorithm for converting the heater output temperature adjustment amount into a heater power adjustment parameter.

[0020] Furthermore, the method of determining the power parameter of the heater by using a cascade control method according to the real-time temperature further includes:

[0021] When the output temperature adjustment amount does not belong to the third safety value range, a safety warning message is output.

[0022] In a second aspect, the present invention provides a fluidized bed control device, comprising:

[0023] Applied to a fluidized bed system, the fluidized bed system includes a high-pressure silo, a fluidized bed and a heater, a material conveying pipe and a pressure regulating pipe are connected between the high-pressure silo and the fluidized bed, the pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the material in the high-pressure silo is driven by the pressure difference to be conveyed to the fluidized bed through the material conveying pipe for reaction, and the heater is used to heat the gas entering the fluidized bed.

[0024] The device comprises:

[0025] A first collector, used for collecting the real-time temperature of the fluidized bed;

[0026] A second collector is used to collect a first pressure difference of the fluidized bed, where the first pressure difference is a real-time pressure difference between two upper and lower measuring points at different preset heights of the fluidized bed;

[0027] a third collector, for collecting a second pressure difference of the fluidized bed, wherein the second pressure difference is a real-time pressure difference between the high-pressure silo and the fluidized bed;

[0028] a first control module, connected to the second collector and the third collector respectively, for determining control parameters of the compensating valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference;

[0029] A second control module, connected to the first control module and the pressure-compensating valve, respectively, and configured to adjust the opening of the pressure-compensating valve on the pressure regulating pipe based on a control parameter of the pressure-compensating valve;

[0030] a third control module, connected to the first collector and the heater respectively, and used to determine the power parameter of the heater according to the real-time temperature by using a cascade control method;

[0031] The fourth control module is connected to the third control module and the heater respectively, and is used to control the heating power of the heater based on the power parameter.

[0032] In a third aspect, the present invention provides a fluidized bed control system, characterized in that it is applied to polysilicon production, and the system comprises:

[0033] High-pressure silos for storing silicon powder;

[0034] The fluidized bed is connected to the high-pressure silo through a material conveying pipe and a pressure regulating pipe, respectively, and is used to receive silicon powder conveyed by the high-pressure silo. The pressure difference between the high-pressure silo and the fluidized bed is adjusted through the pressure regulating pipe, so that the material in the high-pressure silo is conveyed to the fluidized bed through the material conveying pipe based on the pressure difference to react. The pressure regulating pipe is provided with a pressure compensation valve;

[0035] a heater for heating the gas entering the fluidized bed;

[0036] A temperature detector, used to detect the real-time temperature of the fluidized bed;

[0037] A first pressure detector, used to detect a first pressure difference, where the first pressure difference is a real-time pressure difference between two upper and lower measuring points at different preset heights of the fluidized bed;

[0038] a second pressure detector, for detecting a second pressure difference, wherein the second pressure difference is a real-time pressure difference between the high-pressure silo and the fluidized bed;

[0039] a pressure difference control device, used for determining a control parameter of the pressure compensating valve on the pressure regulating pipe by a cascade control method according to the first pressure difference and the second pressure difference, and adjusting an opening of the pressure compensating valve on the pressure regulating pipe based on the control parameter of the pressure compensating valve;

[0040] The temperature control device is used to determine the power parameter of the heater according to the real-time temperature by using a cascade control method, and control the heating power of the heater based on the power parameter.

[0041] In a fourth aspect, the present invention provides a polysilicon production device, characterized in that it comprises: a fluidized bed system, a reduction furnace, and also comprises the fluidized bed control device according to any one of the second aspects above,

[0042] The fluidized bed system is used for performing a deposition reaction of polysilicon, and comprises:

[0043] High-pressure silos for storing silicon powder;

[0044] The fluidized bed is connected to the high-pressure silo through a material conveying pipe and a pressure regulating pipe respectively, wherein the material conveying pipe is used to convey silicon powder, and the pressure regulating pipe is used to adjust the pressure difference between the high-pressure silo and the fluidized bed. When receiving the silicon powder conveyed by the high-pressure silo, the pressure difference between the high-pressure silo and the fluidized bed is adjusted through the pressure regulating pipe, so that the silicon powder in the high-pressure silo is driven by the pressure difference and conveyed to the fluidized bed for reaction through the material conveying pipe, and a pressure compensation valve is provided on the pressure regulating pipe;

[0045] A heater for heating the gas entering the fluidized bed

[0046] The fluidized bed control method, device and system provided by the present invention can accurately grasp the operating state of the fluidized bed by simultaneously monitoring the pressure distribution (first pressure difference) and material conveying driving force (second pressure difference) inside the fluidized bed and combining with real-time temperature data. The cascade control method is used to adjust the opening of the pressure boost valve and the heater power respectively, which can not only accurately control the pressure difference of the fluidized bed, but also maintain the optimal reaction temperature of the fluidized bed, thereby significantly improving the stability and reaction efficiency of the fluidized bed. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 This is a flow chart of a fluidized bed control method according to Example 1 of the present invention;

[0048] Figure 2 This is a schematic structural diagram of a fluidized bed control device according to Embodiment 2 of the present invention;

[0049] Figure 3 This is a schematic diagram of a fluidized bed control device according to Example 3 of the present invention;

[0050] Figure 4 An electronic device according to embodiment 4 of the present invention;

[0051] Figure 5 This is a comparison diagram of the temperature and pressure difference of the fluidized bed in Example 4 of the present invention. DETAILED DESCRIPTION

[0052] In order to enable those skilled in the art to better understand the technical solution of the present invention, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0053] It should be understood that the specific embodiments and drawings described herein are only used to explain the present invention rather than to limit the present invention.

[0054] It can be understood that, in the absence of conflict, the various embodiments of the present invention and the various features in the embodiments can be combined with each other.

[0055] It can be understood that, for the convenience of description, the drawings of the present invention only show the parts related to the present invention, while the parts irrelevant to the present invention are not shown in the drawings.

[0056] It can be understood that each unit and module involved in the embodiments of the present invention may correspond to only one physical structure, or may be composed of multiple physical structures, or multiple units and modules may be integrated into one physical structure.

[0057] It can be understood that the terms "first", "second", etc. in the embodiments of the present invention are used to distinguish different objects, or to distinguish different processing of the same object, rather than to describe a specific order of objects.

[0058] It can be understood that, without conflict, the functions and steps marked in the flowcharts and block diagrams of the present invention may occur in an order different from that marked in the drawings.

[0059] It is understood that the flowcharts and block diagrams of the present invention illustrate the possible architectures, functions, and operations of the systems, devices, equipment, and methods according to the various embodiments of the present invention. Each box in the flowchart or block diagram may represent a unit, module, program segment, or code, which contains executable instructions for implementing the specified functions. Moreover, each box or combination of boxes in the block diagram and flowchart may be implemented by a hardware-based system that implements the specified functions, or may be implemented by a combination of hardware and computer instructions.

[0060] It can be understood that the units and modules involved in the embodiments of the present invention can be implemented by software or hardware. For example, the units and modules can be located in a processor.

[0061] It should be noted that the scenario diagram described in the embodiment of the present application is for the purpose of more clearly illustrating the technical solution of the embodiment of the present application, and does not constitute a limitation on the technical solution provided in the embodiment of the present application. A person of ordinary skill in the art can know that with the evolution of network architecture and the emergence of new business scenarios, the technical solution provided in the embodiment of the present application is also applicable to similar technical problems.

[0062] In the production process of polysilicon, fluidized bed technology is mainly used in chemical vapor deposition (CVD) process. The fluidized bed bubbling gas into the bottom of the bed of fine particles (such as silicon powder) makes the particles suspended and fluid, thus forming a "fluidized" state, so that the contact and distribution between particles are very uniform. In the production of polysilicon, silicon-containing compound gases (such as silane SiH4 or trichlorosilane SiHCl3) are often introduced into the fluidized bed. These gases decompose and deposit silicon on the surface of the particles through chemical reactions, and the by-product gases are discharged out of the system.

[0063] The core principle of the fluidized bed is to use gas (usually hydrogen or hydrogen chloride) to flow upward from the bottom to suspend solid particles (silicon seeds) and present a fluid-like state. The amount of silicon powder fed to the fluidized bed is mainly achieved by controlling the discharge valve and the pressure-compensating regulating valve of the high-pressure silo. Since there is only one high-pressure silo, each unloading and refilling requires a long interruption. This will result in the fluidized bed being unable to obtain new silicon powder feed within 4 hours after the silo is emptied, causing the system to rely on the remaining bed to maintain the reaction; when the gas heating power is increased to maintain the temperature, the thermal response of the system is delayed, which is easy to cause the temperature to rise too quickly when there is no new cold silicon powder entering. Therefore, if the silicon powder accumulates too quickly, the cold material effect causes the temperature to drop rapidly, affecting the reaction rate and SiHCl3 conversion efficiency; if it is too slow, it will consume too much and cannot maintain a suitable bed height and reaction conditions.

[0064] At present, the control of the bed mainly relies on single-loop control: the pressure relief valve is controlled by the pressure difference between the high-pressure silo and the bed, while the bed temperature is achieved by manually controlling the heater power or single-loop control of the heater outlet temperature.

[0065] Therefore, the existing fluidized bed control methods have defects such as discontinuous feeding caused by the single design of the high-pressure silo, hysteresis in the heater response, limitations of single-loop control and inaccuracy in manual temperature adjustment, which make it difficult for the fluidized bed system to maintain a stable operating state and affect the conversion efficiency of production raw materials.

[0066] Based on the problems existing in the prior art, the present application provides a fluidized bed control method to improve the stability of the fluidized bed.

[0067] Embodiment 1:

[0068] The present embodiment provides a fluidized bed control method, which is applied to a fluidized bed control system. The fluidized bed control system includes a high-pressure silo, a fluidized bed, and a heater. A material conveying pipe and a pressure regulating pipe are connected between the high-pressure silo and the fluidized bed. The pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the material in the high-pressure silo is driven by the pressure difference and conveyed to the fluidized bed through the material conveying pipe for reaction. The heater is used to heat the gas entering the fluidized bed.

[0069] like Figure 1 As shown, the method includes the following steps S101 to S105:

[0070] S101: Collecting the real-time temperature, the first pressure difference and the second pressure difference of the fluidized bed. The first pressure difference is the real-time pressure difference between two upper and lower measuring points at different preset heights of the fluidized bed. The second pressure difference is the real-time pressure difference between the high-pressure silo and the fluidized bed.

[0071] Specifically, for real-time temperature acquisition of the fluidized bed, high-precision thermocouples or RTD (resistance temperature detector) sensors can be used; the temperature sensors are installed at key positions of the fluidized bed reactor, usually the middle or multiple heights of the reactor, to obtain accurate temperature distribution.

[0072] For the first pressure difference, a differential pressure transmitter or a pressure sensor can be used to install two pressure sensors at two different preset heights above and below the fluidized bed reactor, and the first pressure difference can be obtained by measuring the pressure difference between the two points.

[0073] With respect to the second pressure difference, a pressure sensor may be installed on the connecting pipe between the high-pressure silo and the fluidized bed reactor to measure the pressure difference between the two and obtain the second pressure difference.

[0074] S102: Determine control parameters of the pressure compensation valve on the pressure regulating pipe using a cascade control method according to the first pressure difference and the second pressure difference.

[0075] Among them, cascade control is an advanced control strategy that uses two control loops (main loop and sub-loop) to improve the response speed and stability of the system.

[0076] Specifically, the cascade control method can accurately adjust the opening of the pressure compensation valve by analyzing the first pressure difference and the second pressure difference to maintain the stable bed pressure difference of the fluidized bed.

[0077] S103: adjusting the opening of the pressure compensating valve on the pressure regulating pipe based on the control parameters of the pressure compensating valve.

[0078] Specifically, based on S102, the calculated control parameters are actually applied to the control of the pressure compensation valve. First, the control parameters calculated in S102 can be converted into actual valve opening signals, and then the converted opening signals are sent to the actuator of the pressure compensation valve, and methods such as digital-to-analog conversion (DAC) and signal conditioning can be used.

[0079] Optionally, a cascade PID control method can be used; Fuzzy control method: a control method based on fuzzy logic, suitable for processing nonlinear, time-varying complex systems; Adaptive control method: automatically adjusts control parameters according to the dynamic characteristics of the system, suitable for processing systems with changing parameters; Model Predictive Control (MPC): MPC uses a system model to predict future behavior and optimizes control inputs to achieve optimal performance; Neural Network Control: uses the learning ability of neural networks to adapt to complex nonlinear systems.

[0080] In actual applications, the method to be selected depends on the specific fluidized bed system characteristics, control requirements, available resources and the engineer's expertise. In actual applications, multiple methods can also be combined to achieve the best control effect. To ensure that the valve executes according to the instructions, the actual position of the valve can also be monitored in real time and fed back to the control system. Safety measures and exception handling can also be added, such as limiting the adjustment rate and alarm mechanism.

[0081] S104: According to the real-time temperature of the fluidized bed, the power parameters of the heater are determined by using a cascade control method.

[0082] The cascade control method is used to determine the power parameters of the heater to maintain the temperature of the fluidized bed system within the set range. That is, the power output of the heater is accurately adjusted through real-time temperature data.

[0083] S105: Controlling the heating power of the heater based on the power parameter.

[0084] The power parameter determined in step S104 is converted into an actual heater control signal. The calculated power parameter can be converted into an actual heater operation to achieve accurate control of the temperature of the fluidized bed system.

[0085] In the embodiment of the present application, the system can accurately grasp the operating state of the fluidized bed by simultaneously monitoring the pressure distribution (first pressure difference) and the material conveying driving force (second pressure difference) inside the fluidized bed, combined with real-time temperature data. The cascade control method is used to adjust the opening of the booster valve and the heater power respectively, which can not only accurately control the pressure difference of the fluidized bed, but also maintain the optimal reaction temperature of the fluidized bed, thereby significantly improving the stability and reaction efficiency of the fluidized bed.

[0086] Optionally, the above S102 may specifically include the following steps:

[0087] According to the first control logic, the difference between the first pressure difference and the first preset difference is converted into a material conveying pressure difference adjustment amount, and the first control logic is a control algorithm for converting the deviation between the first pressure difference of the fluidized bed and the first preset difference into a material conveying pressure difference adjustment amount;

[0088] According to the second control logic, the material conveying pressure difference adjustment amount is converted into the pressure compensation valve control parameter. The second control logic is a control algorithm for converting the material conveying pressure difference adjustment amount into the pressure compensation valve control parameter.

[0089] Specifically, the first control logic: converts the difference between the first pressure difference and the first preset difference into a material conveying pressure difference adjustment amount. The first control logic can be implemented using a PID (proportional-integral-differential) controller, which can effectively handle system errors and generate appropriate control outputs.

[0090] Second control logic: Convert the material conveying pressure differential adjustment amount into the pressure compensation valve control parameter. This step involves mapping the pressure differential adjustment amount to the specific valve control parameter. A nonlinear mapping function can be used to achieve this conversion because the valve response is usually nonlinear.

[0091] Combining the above two controllers to realize cascade control and integrating the two control logics into the automatic control system of the fluidized bed can effectively convert the pressure difference control of the fluidized bed into specific material conveying and pressure relief valve control parameters, thereby realizing precise control of the system.

[0092] Optionally, the above S102 may further include:

[0093] When the material conveying pressure difference adjustment amount does not belong to the first safety value range, or the pressure compensation valve control parameter does not belong to the second safety value range, a safety warning message is output.

[0094] Among them, the first safety numerical range: the safety range of the material conveying pressure difference adjustment amount. The second safety numerical range: the safety range of the pressure compensation valve control parameter.

[0095] Specifically, when the material conveying pressure difference adjustment amount or the pressure compensation valve control parameter exceeds the preset safety range, the system will output a safety warning message.

[0096] For example, the safety check module can be integrated into the automatic control system of the fluidized bed to ensure that safety checks are performed in each control cycle; the upper and lower limits of the safety range can be adjusted according to the actual operating data to adapt to different operating conditions; when the safety warning is triggered, the system can output warning information and automatically take measures, such as reducing the system load or stopping operation, to prevent accidents.

[0097] In this embodiment, the fluidized bed control system can output a safety warning in time when the material conveying pressure difference adjustment amount or the pressure compensation valve control parameter exceeds the safety range, thereby improving the safety and reliability of the system.

[0098] Optionally, the above S104 may specifically include the following steps:

[0099] According to the third control logic, the difference between the real-time temperature and the preset temperature is converted into the heater output temperature adjustment amount, and the third control logic is a control algorithm for converting the difference between the real-time temperature of the fluidized bed and the preset temperature into the heater output temperature adjustment amount;

[0100] According to the fourth control logic, the heater output temperature adjustment amount is converted into the heater power adjustment parameter. The fourth control logic is a control algorithm for converting the heater output temperature adjustment amount into the heater power adjustment parameter.

[0101] Specifically, the third control logic: conversion of temperature difference to heater output temperature adjustment. This can be achieved using a PID controller, in the same way as the pressure difference described above. The fourth control logic: conversion of heater output temperature adjustment to power adjustment parameter. This control logic can be achieved using another PID controller or a linear mapping function. Combining the above two controllers, cascade control is achieved. Through cascade control, the system can respond to temperature changes more quickly and accurately. The PID parameters of temperature control and heater control can be adjusted separately to obtain optimal performance.

[0102] Optionally, the above S104 may further include the following steps:

[0103] When the output temperature adjustment amount does not belong to the third safety value range, a safety warning message is output.

[0104] Third safety value range: define a safety range for the output temperature adjustment. After calculating the output temperature adjustment, check whether it is within the safety range. If the output temperature adjustment exceeds the safety range, a safety warning is triggered and a warning message is output.

[0105] In this embodiment, a safety check can be added to the temperature control system to ensure that the output temperature adjustment amount is within a safe range. If it exceeds this range, the system will output a safety warning. When the temperature adjustment amount exceeds the safe range, a warning message is issued in time to effectively prevent potential dangerous situations and improve the safety and reliability of the entire fluidized bed system.

[0106] The fluidized bed control method provided in the embodiment of the present invention realizes accurate management of material transportation and temperature through a cascade control method. It combines differential pressure control and temperature regulation, and accurately adjusts the opening of the booster valve and the heater power by real-time monitoring of the temperature and pressure difference of the fluidized bed. This method not only improves the stability of material transportation and the accuracy of temperature control, but also greatly improves the reliability and safety of the system through multiple safety mechanisms (including safety range checks on the differential pressure adjustment amount of material transportation, booster valve control parameters, and temperature adjustment amount).

[0107] Embodiment 2:

[0108] like Figure 2 As shown, this embodiment provides a fluidized bed control device 200, which is used to execute the above fluidized bed control method and is applied to a fluidized bed system. The fluidized bed system includes a high-pressure silo, a fluidized bed and a heater. A material conveying pipe and a pressure regulating pipe are connected between the high-pressure silo and the fluidized bed. The pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the material in the high-pressure silo is driven by the pressure difference and conveyed to the fluidized bed through the material conveying pipe for reaction. The heater is used to heat the gas entering the fluidized bed. The device 200 includes:

[0109] The first collector 201 is used to collect the real-time temperature of the fluidized bed;

[0110] The second collector 202 is used to collect a first pressure difference of the fluidized bed, where the first pressure difference is a real-time pressure difference between two upper and lower measuring points at different preset heights of the fluidized bed;

[0111] The third collector 203 is used to collect the second pressure difference of the fluidized bed, where the second pressure difference is the real-time pressure difference between the high-pressure silo and the fluidized bed;

[0112] The first control module 204 is connected to the second collector and the third collector respectively, and is used to determine the control parameters of the pressure compensation valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference;

[0113] The second control module 205 is connected to the first control module and the pressure boosting valve respectively, and is used to adjust the opening of the pressure boosting valve on the pressure regulating pipe based on the control parameters of the pressure boosting valve;

[0114] The third control module 206 is connected to the first collector and the heater respectively, and is used to determine the power parameter of the heater according to the real-time temperature by using a cascade control method;

[0115] The fourth control module 207 is connected to the third control module and the heater respectively, and is used to control the heating power of the heater based on the power parameter.

[0116] Optionally, the first control module 202 includes:

[0117] a first control unit having a first control logic stored therein, for converting the difference between the first pressure difference and the first preset difference into a material conveying pressure difference adjustment amount according to the first control logic, wherein the first control logic is a control algorithm for converting the deviation between the first pressure difference of the fluidized bed and the first preset difference into a material conveying pressure difference adjustment amount;

[0118] The second control unit is connected to the first control unit and stores a second control logic therein for converting the material conveying pressure difference adjustment amount into the pressure compensating valve control parameter according to the second control logic. The second control logic is a control algorithm for converting the material conveying pressure difference adjustment amount into the pressure compensating valve control parameter.

[0119] Optionally, the third control module 204 includes:

[0120] a third control unit having a third control logic stored therein, for converting the difference between the real-time temperature and the preset temperature into a heater output temperature adjustment amount according to the third control logic, wherein the third control logic is a control algorithm for converting the difference between the real-time temperature of the fluidized bed and the preset temperature into the heater output temperature adjustment amount;

[0121] The fourth control unit is connected to the third control unit and stores a fourth control logic therein for converting the heater output temperature adjustment amount into the heater power adjustment parameter according to the fourth control logic. The fourth control logic is a control algorithm for converting the heater output temperature adjustment amount into the heater power adjustment parameter.

[0122] Optionally, the fourth control unit is further used to output a safety warning message when the output temperature adjustment amount does not fall within the third safety value range.

[0123] In the embodiment of the present application, the fluidized bed control device can accurately grasp the operating state of the fluidized bed by simultaneously monitoring the pressure distribution (first pressure difference) and the material conveying driving force (second pressure difference) inside the fluidized bed, combined with real-time temperature data. The cascade control method is used to adjust the opening of the pressure compensation valve and the heater power respectively, which can not only accurately control the pressure difference of the fluidized bed, but also maintain the optimal reaction temperature of the fluidized bed, thereby significantly improving the stability and reaction efficiency of the fluidized bed.

[0124] Embodiment 3:

[0125] like Figure 3 As shown, this embodiment provides a fluidized bed control system, which is applied to polysilicon production. The system includes:

[0126] High-pressure silos for storing silicon powder;

[0127] The fluidized bed is connected to the high-pressure silo through a material conveying pipe and a pressure regulating pipe, respectively, and is used to receive silicon powder conveyed by the high-pressure silo. The pressure difference between the high-pressure silo and the fluidized bed is adjusted through the pressure regulating pipe, so that the material in the high-pressure silo is conveyed to the fluidized bed through the material conveying pipe based on the pressure difference to react. A pressure compensation valve is provided on the pressure regulating pipe;

[0128] a heater for heating the gas entering the fluidized bed;

[0129] A temperature detector, used to detect the real-time temperature of the fluidized bed;

[0130] A first pressure detector is used to detect a first pressure difference, where the first pressure difference is a real-time pressure difference between two upper and lower measuring points at different preset heights of the fluidized bed;

[0131] A second pressure detector is used to detect a second pressure difference, where the second pressure difference is a real-time pressure difference between the high-pressure silo and the fluidized bed;

[0132] A pressure difference control device, used for determining a control parameter of a compensating valve on the pressure regulating pipe by a cascade control method according to the first pressure difference and the second pressure difference, and adjusting an opening of the compensating valve on the pressure regulating pipe based on the control parameter of the compensating valve;

[0133] The temperature control device is used to determine the power parameters of the heater according to the real-time temperature by using a cascade control method, and control the heating power of the heater based on the power parameters.

[0134] The fluidized bed control system in this embodiment achieves high efficiency and high quality control of the silicon powder processing process through precise pressure difference control and temperature management. The pressure difference adjustment mechanism between the high-pressure silo and the fluidized bed ensures the stability and controllability of silicon powder transportation, avoiding the problem of material blockage or uneven transportation. At the same time, the coordinated use of the heater and the temperature detector, combined with the cascade control method, realizes the precise regulation of the temperature in the fluidized bed, which is crucial for the uniform heating and reaction of silicon powder. The dual pressure detection of the system (inside the fluidized bed and between the silo and the fluidized bed) provides comprehensive pressure monitoring, which helps to maintain the stability of the entire process. In addition, the cascade control method adopted by the pressure difference control device and the temperature control device can quickly respond to system changes, improve the control accuracy and the dynamic performance of the system. This comprehensive control strategy not only improves the efficiency and quality of silicon powder processing, but also reduces energy consumption and raw material waste through precise control. The intelligent control of the system also reduces the difficulty of operation, reduces human errors, and improves the safety and reliability of the production process.

[0135] Optionally, the pressure difference control device comprises:

[0136] a first control loop, for converting the difference between the first pressure difference and the first preset difference into a material conveying pressure difference adjustment amount according to a first control logic, wherein the first control logic is a control algorithm for converting the deviation between the first pressure difference of the fluidized bed and the first preset difference into a material conveying pressure difference adjustment amount;

[0137] The second control loop is used to convert the material conveying pressure difference adjustment amount into the pressure compensation valve control parameter. The second control logic is a control algorithm for converting the material conveying pressure difference adjustment amount into the pressure compensation valve control parameter.

[0138] The first control loop controls the second control loop in cascade.

[0139] Specifically, the pressure difference control device consists of two cascade control loops, which are responsible for control tasks at different levels. The first control loop compares the real-time pressure difference in the fluidized bed with the preset difference through the first control logic, and calculates the pressure difference adjustment amount for material transportation. This process ensures that the pressure difference in the fluidized bed is always maintained within the ideal range, thereby optimizing the stability and efficiency of material transportation. The second control loop receives the pressure difference adjustment amount from the first control loop and converts it into the control parameter of the pressure boosting valve through the second control logic. This hierarchical control strategy enables the system to respond quickly to pressure difference changes, accurately adjust the opening of the pressure boosting valve, and ensure the continuity and uniformity of material transportation. Through cascade control, the system not only improves control accuracy and response speed, but also enhances its adaptability to complex dynamic environments. This design effectively reduces fluctuations and uncertainties in the material transportation process, reduces energy consumption and material waste, and improves the safety and reliability of the entire fluidized bed system.

[0140] Optionally, the temperature control device comprises:

[0141] a third control loop, for converting the difference between the real-time temperature and the preset temperature into a heater output temperature adjustment amount according to a third control logic, wherein the third control logic is a control algorithm for converting the difference between the real-time temperature of the fluidized bed and the preset temperature into the heater output temperature adjustment amount;

[0142] a fourth control loop, for converting the heater output temperature adjustment amount into a heater power adjustment parameter according to a fourth control logic, wherein the fourth control logic is a control algorithm for converting the heater output temperature adjustment amount into the heater power adjustment parameter,

[0143] The third control loop controls the fourth control loop in cascade.

[0144] Specifically, by comparing the real-time temperature with the preset temperature through the third control loop, the system can quickly identify the temperature deviation and calculate the required temperature adjustment. This ensures that the temperature inside the fluidized bed is always kept at an ideal state; the fourth control loop converts the temperature adjustment into a specific heater power parameter, achieving precise control of the heater output. Through dynamic adjustment, the system can flexibly adjust the heating intensity according to actual needs, avoiding energy waste and temperature overshoot.

[0145] In some embodiments, the fluidized bed control system may further include a sequence program module for controlling the opening sequence and time of each valve and controller.

[0146] The sequence program module realizes the comprehensive automation and optimization of the fluidized bed system startup, operation and shutdown process by accurately controlling the opening sequence and time of each valve and controller. Precise timing control ensures that the various components of the system work together in the preset optimal sequence and time point, greatly reducing the risk of human operation errors. In the startup phase, it can gradually activate various system components in the order of optimal safety and efficiency, such as opening the gas supply first, then gradually increasing the heater power, and finally starting material transportation, thus avoiding the system shock that may be caused by sudden startup. During operation, the sequence program module can dynamically adjust the parameters of each control link according to process requirements to ensure that the entire system is always in the best operating state. In the shutdown phase, it can gradually stop the operation of each component in a safe order to prevent material blockage or equipment damage caused by sudden shutdown.

[0147] Operators can preset multiple operating modes according to different processing requirements, and the sequential program module can automatically execute the corresponding control sequence according to the selected mode. This not only simplifies the operation process, but also provides a combination of standardized and personalized solutions for different batches or types of silicon powder processing. In an emergency, the sequential program module can also quickly execute the preset safety shutdown procedure to maximize the safety of equipment and personnel.

[0148] In some embodiments, the above-mentioned fluidized bed control system may also include a ramp program module, which is used to control the pressure difference of the fluidized bed when the high-pressure silo is feeding into the fluidized bed, and to make a slow rise until the control target position is reached. The ramp time is an adjustable variable, and the ramp target value is an adjustable variable.

[0149] Combining the ramping program module with the first and second control loops can significantly improve the overall performance and operating efficiency of the system. The first control loop is responsible for real-time monitoring and adjusting the temperature of the fluidized bed to ensure the stability of the processing environment; the second control loop dynamically adjusts the heater power to achieve precise temperature control. On this basis, the ramping program module controls the slow increase in the pressure difference when the high-pressure silo feeds the fluidized bed to ensure smooth transportation and uniform distribution of materials. This combination not only optimizes the coordinated control of temperature and material transportation, reduces the risk of system fluctuations and material blockages, but also improves processing quality and energy efficiency. The flexibility and adaptability of the overall system have also been enhanced, and it can be dynamically adjusted according to different process requirements to ensure efficient operation in a changing production environment.

[0150] In a specific embodiment, Figure 3 The fluidized bed control system shown in the figure comprises:

[0151] High-pressure silo (1): A storage container for silicon powder. It maintains a high pressure state to facilitate the delivery of silicon powder to the fluidized bed.

[0152] Fluidized bed (2): a reactor where silicon powder comes into contact with the reaction gas and reacts.

[0153] Heater (3): used to heat the gas entering the fluidized bed to maintain the reaction temperature of the fluidized bed.

[0154] Valve 1, Valve 2 and Valve 3 are silicon powder valves used to control the flow of silicon powder from the high pressure silo to the fluidized bed. These valves can be configured in series or parallel to provide more precise flow control.

[0155] Valve 4 and valve 5 are pressure compensation valves used to maintain the pressure difference between the high-pressure silo and the fluidized bed.

[0156] The temperature control main loop (4), equivalent to the third control loop, is used to monitor the temperature of the fluidized bed (2) in real time through a temperature sensor and control the heater sub-loop (5) according to the temperature of the fluidized bed (2);

[0157] The heater sub-loop (5), equivalent to the fourth control loop mentioned above, is used to adjust the power of the heater through the temperature controller TIC to maintain a suitable temperature of the fluidized bed.

[0158] The differential pressure control main loop (6) is equivalent to the first control loop, and is used to measure the bed pressure difference of the fluidized bed (2) through a differential pressure sensor, and control the differential pressure cascade differential pressure control sub-loop (7) according to the bed pressure difference.

[0159] The pressure difference control sub-loop (7), equivalent to the above-mentioned second control loop, is used to control the valve 5 according to the pressure difference between the high-pressure silo and the fluidized bed layer;

[0160] Sequential control program (8) is used to control the opening and closing sequence and time of valve 1, valve 2, valve 3, valve 4 and valve 5;

[0161] The ramp program (9) is used to control the pressure difference of the fluidized bed when the high-pressure silo is feeding into the fluidized bed, and to make a slow rise until the control target position is reached. The ramp time is an adjustable variable, and the ramp target value is an adjustable variable.

[0162] The specific control steps include:

[0163] 1. First, a bed temperature 4 is selected as the main loop measurement point, and the sub-loop is the heater outlet temperature 5. The heater outlet temperature and the heater power form a single loop, and the main loop 4 is used to cascade control the sub-loop 5.

[0164] 2. Select the pressure difference between the upper and lower pressures of the bed as the measuring point 6 of the main loop. The secondary loop is the pressure difference between the high-pressure silo and the fluidized bed 7. The control output point of the secondary loop 7 is valve 5. Use the main loop 6 to control the secondary loop 7 in cascade.

[0165] 3. Make a ramp program. The control point is the pressure difference of the fluidized bed 6. When the high-pressure silo feeds the fluidized bed, the set value of the main loop 6 is controlled to make a slow rise until it reaches the control target position. The ramp time is an adjustable variable, and the ramp target value is an adjustable variable.

[0166] 4. Make a sequential control program to control the opening and closing order and time of valves 1, 3 and 4; control the opening degree and opening time of valves 2 and 5; set parameters for the set value of the bed temperature 4 of the main circuit; set parameters for the automatic start of the auxiliary circuit 7, the time control of the cascade start, and the automatic start time control of the main circuit 6; and determine the program stop condition.

[0167] First open valve 4 for charging, give valve 5 a small opening, put main circuit 4 into automatic mode, give a set temperature value, and put sub-circuit 5 into cascade mode; when 7 is greater than 100Kpa, put 6 into automatic mode, put 7 into cascade mode, open valve 2, and then open valve 3. After receiving the feedback information of valve 3 opening, open valve 1 for discharging. When 7 is less than 40Kpa, end the program.

[0168] The output of main loop 4 sets upper and lower limits, the output of main loop 6 sets upper and lower limits, and the output of sub-loop 7 sets upper and lower limits.

[0169] Further Figure 5 It can be seen from the test results shown that the above fluidized bed control method can significantly improve the stability of fluidized bed temperature and pressure difference control.

[0170] This embodiment also provides a polysilicon production device, including:

[0171] The fluidized bed system and the reduction furnace further include the fluidized bed control device provided in any of the above embodiments,

[0172] The fluidized bed system is used to carry out the deposition reaction of polysilicon, which includes:

[0173] High-pressure silos for storing silicon powder;

[0174] The fluidized bed is connected to the high-pressure silo through a material conveying pipe and a pressure regulating pipe, respectively. The material conveying pipe is used to convey silicon powder, and the pressure regulating pipe is used to adjust the pressure difference between the high-pressure silo and the fluidized bed. The pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the silicon powder in the high-pressure silo is driven by the pressure difference to be conveyed to the fluidized bed through the material conveying pipe for reaction, and the pressure regulating pipe is provided with a pressure compensation valve;

[0175] A heater is used to heat the gas entering the fluidized bed.

[0176] Specifically, the polysilicon production equipment is mainly composed of a fluidized bed system, a reduction furnace and a fluidized bed control device. The design of the fluidized bed system utilizes the principle of pressure difference to achieve automatic transportation and reaction control of silicon powder. The high-pressure silo is connected to the fluidized bed through a material conveying pipe and a pressure regulating pipe. By adjusting the pressure difference between the two, the precise transportation of silicon powder is achieved. The pressure relief valve on the pressure regulating pipe further enhances the accuracy of pressure control. The setting of the heater ensures the temperature conditions required for the reaction. Accurate control of material conveying and reaction conditions is achieved to improve the production efficiency and quality of polysilicon.

[0177] Embodiment 4: Figure 4 A schematic diagram of the hardware structure of an electronic device provided in an embodiment of the present application is shown.

[0178] The electronic device may include a processor 401 and a memory 402 storing computer program instructions.

[0179] Specifically, the processor 401 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or may be configured to implement one or more integrated circuits of the embodiments of the present application.

[0180] Memory 402 may include a large capacity memory for data or instructions. By way of example and not limitation, memory 402 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive or a combination of two or more of these. In appropriate cases, memory 402 may include a removable or non-removable (or fixed) medium. In appropriate cases, memory 402 may be inside or outside of an integrated gateway disaster recovery device. In a specific embodiment, memory 402 is a non-volatile solid-state memory.

[0181] The memory may include read-only memory (ROM), random access memory (RAM), magnetic disk storage media devices, optical storage media devices, flash memory devices, electrical, optical or other physical / tangible memory storage devices. Thus, typically, the memory includes one or more tangible (non-transitory) computer-readable storage media (e.g., memory devices) encoded with software including computer-executable instructions, and when the software is executed (e.g., by one or more processors), it is operable to perform the operations described with reference to the method according to an aspect of the present disclosure.

[0182] The processor 401 reads and executes the computer program instructions stored in the memory 402 to implement any one of the fluidized bed control methods in the above embodiments.

[0183] In one example, the electronic device may further include a fluidized bed control interface 403 and a bus 404. Figure 3 As shown, the processor 401, the memory 402, and the fluidized bed control interface 403 are connected via a bus 404 and perform fluidized bed control among each other.

[0184] The fluidized bed control interface 403 is mainly used to implement fluidized bed control between various modules, devices, units and / or equipment in the embodiments of the present application.

[0185] Bus 404 includes hardware, software or both, and the parts of online data flow billing equipment are coupled to each other. For example, but not limitation, bus may include accelerated graphics port (AGP) or other graphics bus, enhanced industrial standard architecture (EISA) bus, front side bus (FSB), hypertransport (HT) interconnection, industrial standard architecture (ISA) bus, infinite bandwidth interconnection, low pin count (LPC) bus, memory bus, micro channel architecture (MCA) bus, peripheral component interconnection (PCI) bus, PCI-Express (PCI-X) bus, serial advanced technology attachment (SATA) bus, video electronics standard association local (VLB) bus or other suitable bus or two or more of these combinations. In appropriate cases, bus 404 may include one or more buses. Although the present application embodiment describes and shows a specific bus, the present application considers any suitable bus or interconnection.

[0186] In addition, in combination with the fluidized bed control method in the above embodiment, the embodiment of the present application can provide a computer storage medium for implementation. The computer storage medium stores computer program instructions; when the computer program instructions are executed by the processor, any one of the fluidized bed control methods in the above embodiment is implemented.

[0187] It should be clear that the present application is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present application is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present application.

[0188] The functional blocks shown in the above block diagram can be implemented as hardware, software, firmware or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application specific integrated circuit (ASIC), appropriate firmware, a plug-in, a function card, etc. When implemented in software, the elements of the present application are programs or code segments that are used to perform the required tasks. The program or code segment can be stored in a machine-readable medium, or transmitted on a transmission medium or a fluidized bed control link by a data signal carried in a carrier wave. "Machine-readable medium" can include any medium capable of storing or transmitting information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical disks, hard disks, optical fiber media, radio frequency (RF) links, etc. The code segment can be downloaded via a computer network such as the Internet, an intranet, etc.

[0189] It should also be noted that the exemplary embodiments mentioned in this application describe some methods or systems based on a series of steps or devices. However, this application is not limited to the order of the above steps, that is, the steps can be performed in the order mentioned in the embodiment, or in a different order from the embodiment, or several steps can be performed simultaneously.

[0190] Aspects of the present disclosure are described above with reference to the flowchart and / or block diagram of the method, device (system) and computer program product according to the embodiment of the present disclosure. It should be understood that each box in the flowchart and / or block diagram and the combination of each box in the flowchart and / or block diagram can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device to produce a machine so that these instructions executed by the processor of the computer or other programmable data processing device enable the implementation of the function / action specified in one or more boxes of the flowchart and / or block diagram. Such a processor can be, but is not limited to, a general-purpose processor, a special-purpose processor, a special application processor, or a field programmable logic circuit. It can also be understood that each box in the block diagram and / or flowchart and the combination of boxes in the block diagram and / or flowchart can also be implemented by dedicated hardware that performs a specified function or action, or can be implemented by a combination of dedicated hardware and computer instructions.

[0191] The above are only specific implementation methods of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A fluidized bed control method, characterized in that: Applied to a fluidized bed system, the fluidized bed system includes a high-pressure silo, a fluidized bed and a heater, a material conveying pipe and a pressure regulating pipe are connected between the high-pressure silo and the fluidized bed, the pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the material in the high-pressure silo is driven by the pressure difference to be conveyed to the fluidized bed through the material conveying pipe for reaction, and the heater is used to heat the gas entering the fluidized bed. The method comprises: Collecting the real-time temperature, the first pressure difference, and the second pressure difference of the fluidized bed, wherein the first pressure difference is the real-time pressure difference between two upper and lower different preset height measurement points of the fluidized bed, and the second pressure difference is the real-time pressure difference between the high-pressure silo and the fluidized bed; Determining control parameters of the pressure compensation valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference; adjusting the opening of the pressure compensating valve on the pressure regulating pipe based on the control parameter of the pressure compensating valve; Determining the power parameters of the heater using a cascade control method according to the real-time temperature of the fluidized bed; A heating power of the heater is controlled based on the power parameter.

2. The method according to claim 1, characterized in that Determining the control parameters of the pressure compensation valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference specifically includes: According to a first control logic, the difference between the first pressure difference and the first preset difference is converted into a material conveying pressure difference adjustment amount, wherein the first control logic is a control algorithm for converting the deviation between the first pressure difference of the fluidized bed and the first preset difference into a material conveying pressure difference adjustment amount; According to the second control logic, the material conveying pressure difference adjustment amount is converted into the pressure compensating valve control parameter. The second control logic is a control algorithm for converting the material conveying pressure difference adjustment amount into the pressure compensating valve control parameter.

3. The method according to claim 2, characterized in that The method of determining the control parameters of the pressure compensating valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference also includes: When the material conveying pressure difference adjustment amount does not belong to the first safety value range, or the pressure compensation valve control parameter does not belong to the second safety value range, a safety warning message is output.

4. The method according to claim 1, characterized in that Determining the power parameter of the heater by using a cascade control method according to the real-time temperature specifically includes: According to a third control logic, the difference between the real-time temperature and the preset temperature is converted into a heater output temperature adjustment amount, and the third control logic is a control algorithm for converting the difference between the real-time temperature of the fluidized bed and the preset temperature into a heater output temperature adjustment amount; According to a fourth control logic, the heater output temperature adjustment amount is converted into a heater power adjustment parameter. The fourth control logic is a control algorithm for converting the heater output temperature adjustment amount into a heater power adjustment parameter.

5. The method according to claim 4, characterized in that The method of determining the power parameter of the heater by using a cascade control method according to the real-time temperature further includes: When the output temperature adjustment amount does not belong to the third safety value range, a safety warning message is output.

6. A fluidized bed control device, characterized in that: Applied to a fluidized bed system, the fluidized bed system includes a high-pressure silo, a fluidized bed and a heater, a material conveying pipe and a pressure regulating pipe are connected between the high-pressure silo and the fluidized bed, the pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the material in the high-pressure silo is driven by the pressure difference to be conveyed to the fluidized bed through the material conveying pipe for reaction, and the heater is used to heat the gas entering the fluidized bed. The device comprises: A first collector, used for collecting the real-time temperature of the fluidized bed; A second collector is used to collect a first pressure difference of the fluidized bed, where the first pressure difference is a real-time pressure difference between two upper and lower measuring points at different preset heights of the fluidized bed; a third collector, for collecting a second pressure difference of the fluidized bed, wherein the second pressure difference is a real-time pressure difference between the high-pressure silo and the fluidized bed; a first control module, connected to the second collector and the third collector respectively, for determining control parameters of the compensating valve on the pressure regulating pipe by using a cascade control method according to the first pressure difference and the second pressure difference; A second control module, connected to the first control module and the pressure-compensating valve, respectively, and configured to adjust the opening of the pressure-compensating valve on the pressure regulating pipe based on a control parameter of the pressure-compensating valve; a third control module, connected to the first collector and the heater respectively, and used to determine the power parameter of the heater according to the real-time temperature by using a cascade control method; The fourth control module is connected to the third control module and the heater respectively, and is used to control the heating power of the heater based on the power parameter.

7. The device according to claim 6, characterized in that The first control module comprises: a first control unit having a first control logic stored therein, for converting the difference between the first pressure difference and the first preset difference into a material conveying pressure difference adjustment amount according to the first control logic, wherein the first control logic is a control algorithm for converting the deviation between the first pressure difference of the fluidized bed and the first preset difference into a material conveying pressure difference adjustment amount; The second control unit is connected to the first control unit and stores a second control logic therein for converting the material conveying pressure difference adjustment amount into a pressure compensating valve control parameter according to the second control logic. The second control logic is a control algorithm for converting the material conveying pressure difference adjustment amount into a pressure compensating valve control parameter.

8. The device according to claim 6, characterized in that The third control module comprises: a third control unit having a third control logic stored therein, for converting the difference between the real-time temperature and the preset temperature into a heater output temperature adjustment amount according to the third control logic, wherein the third control logic is a control algorithm for converting the difference between the real-time temperature of the fluidized bed and the preset temperature into a heater output temperature adjustment amount; The fourth control unit is connected to the third control unit and stores a fourth control logic therein for converting the heater output temperature adjustment amount into the heater power adjustment parameter according to the fourth control logic. The fourth control logic is a control algorithm for converting the heater output temperature adjustment amount into the heater power adjustment parameter.

9. The device according to claim 8, characterized in that The fourth control unit is further configured to output safety warning information when the output temperature adjustment amount does not fall within a third safety numerical range.

10. A polysilicon production device, characterized in that: include: The fluidized bed system and the reduction furnace further include the fluidized bed control device according to any one of claims 6 to 9, The fluidized bed system is used for performing a deposition reaction of polysilicon, and comprises: High-pressure silos for storing silicon powder; The fluidized bed is connected to the high-pressure silo through a material conveying pipe and a pressure regulating pipe, respectively. The material conveying pipe is used to convey silicon powder, and the pressure regulating pipe is used to adjust the pressure difference between the high-pressure silo and the fluidized bed. The pressure difference between the high-pressure silo and the fluidized bed is adjusted by the pressure regulating pipe, so that the silicon powder in the high-pressure silo is driven by the pressure difference to be conveyed to the fluidized bed through the material conveying pipe for reaction, and the pressure regulating pipe is provided with a pressure compensation valve; A heater is used to heat the gas entering the fluidized bed.

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