Buffer chamber for semiconductor process

Abstract

The invention discloses a buffer room for a semiconductor process, which comprises a frame with a front door frame and a rear door frame; the front door assembly is matched with the front door frame, is mounted on the frame through a front transverse moving assembly and has a front transverse moving freedom degree; the rear door assembly is matched with the rear door frame, is mounted on the frame through a rear transverse moving assembly and has a rear transverse moving freedom degree; the front transverse moving driving mechanism is used for driving the front door assembly to move on the front transverse moving assembly; the rear transverse moving driving mechanism is used for driving the rear door assembly to move on the rear transverse moving assembly; wherein the front door assembly and the rear door assembly have the degree of freedom of moving in the front-back direction or part of the door bodies in the assemblies, and a longitudinal movement driving mechanism is additionally provided to push the front door assembly, the rear door assembly or the corresponding door bodies to be connected with the corresponding door frames in a sealed mode.

Description

Technical Field

[0001] The invention relates to a buffer room for semiconductor process, which is also called a buffer chamber. Background Art

[0002] Buffer rooms and airlocks are two types of partitioning devices that are currently widely used. Although both are used as partitioning devices, they have different functions. Since the buffer room is requested for protection in the embodiments of the present invention, the subject matter described in the present invention is also the buffer room, and has nothing to do with the airlock.

[0003] The buffer room is a kind of partition equipment commonly used in semiconductor process equipment. Its purpose is to maintain the gas cleanliness and positive pressure control in the clean area. The buffer room is set between the clean area and the non-clean area. It is usually positive pressure for the non-clean area and negative pressure for the clean area. Specifically, its main function is to prevent the non-clean area from polluting the clean area.

[0004] It should be noted that clean and unclean are relative. In most cases, it is more accurate to use low-requirement area and high-requirement area to describe it. In some cases, part of the low-requirement area is the external environment.

[0005] Since semiconductor processes often have relatively high cleanliness requirements for clean areas, technicians in this field have a clear understanding of this and will not elaborate on it here. Although there are material buffer rooms and personnel buffer rooms, no matter which type of buffer room, it is required that people or materials will not carry contaminants into the clean area after passing through the buffer room. Therefore, when performing buffering, it is necessary to ensure that the door body configured in the buffer room has relatively high sealing performance in the closed state.

[0006] The sealing of the door body in the closed state is obviously related to the matching mode between the door body and the door frame, as well as the opening and closing mode of the door body. There are four main ways to open and close the door body, among which the push-pull door is relatively more widely used in semiconductor processes. The airtight seal is first provided with a sealing strip on the door frame, and in some implementations, a sealing strip can also be provided on the door leaf. These sealing strips are mostly made of rubber or silicone and have a certain elasticity, so that they can meet a certain extrusion stroke to achieve a relatively good seal. This generates a push-pull direction and a joint direction, wherein the push-pull direction is used to change the opening and closing position of the door leaf, while the joint direction is the prerequisite for achieving reliable sealing.

[0007] The current research focus is on how to achieve sealing after the door body is closed while satisfying the conditions of opening and closing movements. However, the problem of mutual interference between two perpendicular movements cannot be effectively solved. Summary of the invention

[0008] The object of the present invention is to provide a buffer room for semiconductor process with relatively good sealing performance.

[0009] In an embodiment of the present invention, a buffer room for semiconductor process is provided, the basic structure of which includes: A frame defining a buffer cavity having a front door frame and a rear door frame; A front door assembly adapted to the front door frame and mounted on the frame through a front transverse movement assembly, so as to have a front transverse movement freedom, and included in the front assembly; A rear door assembly adapted to the rear door frame and mounted on the frame through a rear transverse movement assembly, so as to have a rear transverse movement freedom, and included in the rear assembly; The front transverse driving mechanism is used to drive the front door assembly to move on the front transverse moving assembly to realize the opening and closing transformation of the front door assembly; The rear transverse driving mechanism is used to drive the rear door assembly to move on the rear transverse moving assembly to realize the transformation of the rear door opening and closing assembly; Among them, the front door assembly and the rear door assembly have or part of the door body in the assembly has the freedom to move in the front and rear directions, and a longitudinal driving mechanism is provided to push the front door assembly, the rear door assembly or the corresponding door body to seal and engage with the corresponding door frame.

[0010] Optionally, the front door assembly and the rear door assembly are single door bodies or composite door bodies; If a single door body is used, the front transverse drive mechanism is installed on the front longitudinal slide block, and the rear transverse drive mechanism is installed on the rear longitudinal slide block; Accordingly, a front longitudinal guide rail cooperating with the front longitudinal slider and a rear longitudinal guide rail cooperating with the rear longitudinal slider are provided; If a composite door body is used, the composite door body includes a supporting door body and a free door body. The free door body forms a parallelogram mechanism with the supporting door body through a connecting rod, or the free door body is installed on the supporting door body through a compression guide pair in the front and rear directions.

[0011] Optionally, a limiting protrusion is provided on a surface of one of the supporting door body and the free door body that is opposite to the other.

[0012] Optionally, a reset device is provided between the front door assembly and the rear assembly and the frame.

[0013] Optionally, a pressing mechanism adapted to the composite door body is provided to drive the free door body to be pressed against the corresponding door frame; or A wedge is provided on the frame corresponding to the position of the door frame; Correspondingly, a driven wedge block or a roller is provided at a position on the free door body corresponding to the wedge block to cooperate with the wedge block to form an inclined wedge mechanism.

[0014] Optionally, in the lateral direction, the guidance of the corresponding door assembly is guided by a linear guide rail above the corresponding door frame and by a roller guide below the door frame.

[0015] Optionally, the resetting device is configured as: A control is provided on the part or component for determining the front and rear moving kinematic pairs in the front door assembly and the rear assembly; The catch is engaged with the frame via a spring guide.

[0016] Optionally, the spring guide post is mounted on the frame via a fixing seat; The connection hole of the fixing seat used to connect with the frame is an elongated hole extending in the front-to-back direction, so as to be used to adjust the position of the fixing seat in the front-to-back direction.

[0017] Optionally, a clamping mechanism adapted to the single door body is provided for clamping the single door body on a corresponding door frame, and the clamping mechanism comprises: The clamping claw has a claw body at one end and the other end or the middle is hinged on the frame; A pull rod, hingedly mounted on the clamping claw, to drive the clamping device to swing around its hinge axis; A driving part, used for driving the pull rod; Correspondingly, the single door body is provided with a clamping shaft for cooperating with the clamping claw.

[0018] Optionally, the clamping mechanism is provided on each side of the corresponding door frame; Correspondingly, a group of two clamping shafts are provided on each side of the single door body, and one is provided on the upper and lower corresponding sides of the single door body; The driving part is arranged between the two clamping shafts on the side and is connected with the two pull rods through a synchronous structure.

[0019] In the embodiment of the present invention, the semiconductor process buffer room provided not only provides the lateral movement required for the opening and closing of the corresponding door assembly, but also further provides a structure capable of realizing the longitudinal movement of the door assembly or the door body in the door assembly. Under this condition, when the door assembly moves to align with the corresponding door frame, the door assembly or the door body in the door assembly engages with the corresponding door frame through longitudinal movement, thereby realizing reliable sealing. In view of the existence of separate longitudinal movement, the sealing bonding force required for the sealing is relatively large, so that the sealing ability is easy to ensure. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram of the main structure of a buffer room for semiconductor process in one embodiment.

[0021] Figure 2 Schematic diagram of a top view of a buffer room for semiconductor process in one embodiment.

[0022] Figure 3 It is a left-side structural schematic diagram of a buffer room for semiconductor process in one embodiment.

[0023] Figure 4It is a schematic diagram of the main structure of the framework in one embodiment.

[0024] Figure 5 It is a schematic diagram of the three-dimensional structure of the front door opening and closing assembly (including the front door) in one embodiment.

[0025] Figure 6 It is a schematic diagram of the left view structure of the front door opening and closing assembly (including the front door) in one embodiment.

[0026] Figure 7 for Figure 6 Enlarged view of part I.

[0027] Figure 8 Schematic diagram of the front door clamping mechanism structure in one embodiment.

[0028] Fig. 9 It is a schematic diagram of the front view structure of the front door opening and closing mechanism in one embodiment.

[0029] Fig.10 It is a schematic diagram of the left view of the front door opening and closing mechanism in one embodiment.

[0030] Fig.11 It is a schematic diagram of the front view structure of the rear door opening and closing mechanism in one embodiment.

[0031] Fig.12 Schematic diagram of the top view of the rear door opening and closing mechanism in one embodiment.

[0032] Fig.13 for Fig.12 Enlarged view of Part II.

[0033] Fig.14 It is a schematic diagram of the rear view structure of the rear door opening and closing mechanism in one embodiment.

[0034] Fig.15 for Fig.14 Schematic diagram of the structure of Part III.

[0035] In the figure: 1. seat plate, 2. lower air distribution chamber, 3. valve group, 4. rear door, 5. frame, 6. front door opening and closing assembly, 7. rear door opening and closing mechanism, 8. front door.

[0036] 41. Support door body, 42. Free door body, 43. Rear observation window, 44. Hinge shaft, 45. Hinge shaft, 46. Connecting rod, 47. Wedge block, 48. Limiting protrusion, 49. Tension spring.

[0037] 51. Buffer chamber, 52. Front door sealing ring, 53. Spacer, 54. Side process gas pipe joint, 55. Front door frame.

[0038] 61. Lower moving guide rail, 62. Lower moving seat, 63. Front clamping mechanism, 64. Front opening and closing mechanism, 65. Reset assembly, 66. Photoelectric sensor.

[0039] 71. Lower guide pair, 72. Lower guide pair, 73. Lower driving cylinder, 74. Clamping assembly, 75. Lower driving cylinder.

[0040] 81. Upper slide seat, 82. Holding bearing, 83. Front observation window, 84. Front door panel, 85. Lower slide seat.

[0041] 621, lower movable plate, 622, lower movable guide rail.

[0042] 631. Lower clamping claw shaft, 632. Clamping cylinder, 633. Push rod, 634. Compound hinge, 635. Lever mechanism, 636. Pull rod, 637. Upper clamping claw, 638. Lower clamping claw, 639. Lower ball hinge.

[0043] 641. Front opening and closing guide rail, 642. Upper moving pair, 643. Front opening and closing cylinder.

[0044] 651. Control rod, 652. Spring guide column, 653. Long hole, 654. Fixed seat.

[0045] 741. Pressure wheel seat, 742. Pressure wheel.

[0046] 851. Roller, 852. Roller, 853. Roller seat.

[0047] A. High-requirement environment area (hereinafter referred to as Area A), B. External environment or low-requirement environment area (hereinafter referred to as Area B). DETAILED DESCRIPTION

[0048] Whether it is a material buffer room or a personnel buffer room, there is a definite direction for materials or personnel to enter and exit, and in the direction of entry and exit, there is a definite front and back direction, which is also called the longitudinal direction, head-to-tail direction, and length direction.

[0049] When the front-to-back direction is determined, the left-to-right direction is also determined. The left-to-right direction is also called the lateral direction or width direction.

[0050] In the embodiments of the present invention, emphasis is placed on the improvement of the opening, closing and clamping control of doors related to buffer rooms for semiconductor processes. Other parts are schematically shown in the relevant drawings and are not considered as improved parts of the present invention. Those skilled in the art can select the disclosure of related structures or constructions in the prior art accordingly.

[0051] In addition, how to achieve sealing of the front door 8 or the rear door 4, for example, is not part of the content to be improved in the embodiments of the present invention.

[0052] For the convenience of description, the buffer room used in semiconductor process is referred to as buffer room. In the semiconductor manufacturing process, it can be used as a personnel buffer room or a material buffer room. At the same time, in the semiconductor process, the buffer room can be divided into multiple levels, thus presenting the following Figure 2 and 3 In the marked state, the side where the front door 8 is located is the entrance side, and the side where the rear door 4 is located is the exit side. Figure 2 and Figure 3 In the figure, the symbol A refers to the high-requirement environment area, hereinafter referred to as Zone A, corresponding to the exit side; the symbol B refers to the external environment or low-requirement environment area, hereinafter referred to as Zone B, corresponding to the entrance side. It can be seen from this that the entrance side can be a natural environment or an area with relatively low cleanliness requirements in the process area. The exit side is an area with relatively high cleanliness requirements compared to Zone B.

[0053] Relatively speaking, the rear door 4 has a higher sealing requirement. If the cost is taken into consideration, the front door 8 and the rear door 4 may be configured with different sealing capabilities.

[0054] Figure 1 and Figure 4 The frame including the frame 5 is the base of the buffer room, and is the base on which other components of the buffer room are installed. The frame 5 is mostly made of sheet metal structure and supported by beams. In some embodiments, part of the plate can be replaced by engineering plastics.

[0055] exist Figure 1 and Figure 4 In the illustrated structure, the frame 5 is also provided with a number of control valves, indicating that Figure 3 The valve group 3 shown in Figure 1 The lower part of the utility model has a seat plate 1 and a lower air distribution chamber 2. The seat plate 1 and the lower air distribution chamber 2 can be called a base as a whole. The base is generally provided with a plurality of pipe joints.

[0056] As common sense, the frame 5 is often connected to a variety of pipelines to distribute gas according to different needs. Since it does not belong to the improved content of the present invention, it will not be repeated here.

[0057] Framework in Figure 4 A buffer chamber 51 is provided in the Figure 4 In the illustrated structure, the front door frame and the rear door frame of the frame are aligned, but in some implementations, the front door frame and the rear door frame are staggered. The drawings of the embodiments of the present invention are used to assist understanding and schematically display some examples.

[0058] The front door frame is adapted to be provided with a front door assembly, and the front door assembly is used to represent an assembly including the front door 8. Similarly, the rear door assembly is used to represent an assembly including the rear door 4. For example, in Fig.11 In the structure shown, the rear door assembly includes a supporting door body 41 and a free door body 42 .

[0059] In addition, two types of clamping structures between door bodies and door frames are adopted in the embodiments of the present invention, and two door body component structures are also adapted. Obviously, for the front door 8 and the rear door 4, the relevant door body structures based on the embodiments of the present invention can be interchangeable with each other, and two examples are given as examples respectively.

[0060] The front door assembly adapted to the front door frame is mounted on the frame through the front transverse movement assembly, and has the front transverse movement freedom, and is included in the front assembly. The front assembly here is used to represent the buffer room part located at the front side of the frame, mainly for the convenience of description, and has no other purpose.

[0061] Similarly, the rear door assembly adapted to the rear door frame is mounted on the frame through the rear transverse movement assembly, and has the rear transverse movement freedom, and is included in the rear assembly. Similarly, the rear assembly is also a name drafted for the convenience of description, and has no other purpose.

[0062] Furthermore, for the convenience of description, the front door frame and the rear door frame are collectively referred to as door frames, and the front transverse moving assembly and the rear transverse moving assembly are collectively referred to as transverse moving assemblies. The front transverse moving driving mechanism for driving the front door assembly and the rear transverse moving driving mechanism for driving the rear door assembly are collectively referred to as transverse moving driving mechanisms. In the following text, the contents related to the front and rear definitions are collectively referred to in the same way, which is in line with people's general understanding and is conducive to simplifying the description.

[0063] Correspondingly, regarding the transverse movement assembly, its purpose is mainly to realize the conversion of the opening and closing positions of the corresponding door body, corresponding to the transverse movement working stroke. Obviously, the open position of the door body corresponds to the opening end point of the transverse movement working stroke, and the closed position corresponds to the closing end point of the transverse movement working stroke. When the door body moves to the closing end point, it is suitable for the actuation of the door body clamping mechanism.

[0064] It should also be noted that when the door body is at the closing dead point, it does not mean that the door body no longer generates lateral movement, but rather that it has reached the starting point of longitudinal movement.

[0065] The door body clamping mechanism is mainly actuated by longitudinal movement or contains a component of longitudinal movement, and is also referred to as a longitudinal movement drive mechanism in the embodiment of the present invention.

[0066] The front transverse driving mechanism is used to drive the front door assembly to move on the front transverse moving assembly to realize the opening and closing transformation of the front door assembly. Figure 5 and Fig. 9 In the illustrated structure, there is a front opening and closing guide rail 641, which is a linear guide rail arranged horizontally. The front opening and closing guide rail 641 can be provided with one above and one below the door frame. Fig.10In the illustrated structure, a roller track pair is arranged below the front door frame. Relatively speaking, the lower side of the front door panel 84 is the driven part. However, in some embodiments, the upper and lower sides of the front door panel 84 can be synchronously driven using, for example, the front opening and closing cylinder 643, that is, the front opening and closing cylinder 641 is arranged one above and one below.

[0067] In view of the fact that the front door panel 84 also needs to move longitudinally, Fig. 9 The figure shows that there is an upper movable pair 642, which is a linear guide rail arranged in the longitudinal direction.

[0068] Correspondingly, the upper moving slider of the upper moving pair 642 serves as the base of the front transverse driving mechanism, that is, the upper moving pair 642 carries the front transverse driving mechanism to move in the front-to-back direction, and the front door plate 84 is driven by the front transverse driving mechanism. In other words, the front door plate 83 is indirectly mounted on the upper moving pair 642. Therefore, in the closing stroke, the front transverse driving mechanism first drives the front door plate 84 to move to the side where the front door frame is located, and when the front door plate 84 and the front door frame are just aligned, the front transverse driving mechanism stops driving, and the upper moving pair 642 starts, thereby pushing the front door plate 84 to engage with the front door frame to achieve sealing.

[0069] The configuration of the rear lateral drive mechanism is basically the same as that of the front lateral drive mechanism. Fig.11 The upper guide pair 72 and the lower guide pair 71 shown in the figure both use linear guide rails to achieve relatively reliable and relatively high-precision movement. As for the longitudinal drive mechanism of the rear door 4, another form of drive mode is adopted, which can be specifically referred to in Figure 11~Figure 13 The rear door 4 adopts a composite door body, which includes a supporting door body 41 and a free door body 42, wherein an upper guide pair 72 is formed between the supporting door body 41 and the upper guide rail, and a lower guide pair 71 is formed between the supporting door body 41 and the lower guide rail, and the free door body 42 forms a parallelogram mechanism with the supporting door body 41 through a connecting rod 46.

[0070] Correspondingly, in the parallelogram mechanism, the free door body 42 and the supporting door body 41 are parallel, and the distance between the two depends on the length of the connecting rod 46. Obviously, the connecting rod 46 does not need to be too long, and it only needs to be able to achieve the required longitudinal movement to meet the sealing between the rear door 4 and the rear door frame, while ensuring that the free door body 42 does not interfere with the rear door frame during lateral movement. The design basis is relatively clear and will not be repeated here.

[0071] It can be seen that whether using a parallelogram mechanism or with the help of the upper movable pair 642, the door body and the door frame can be moved away from or closer to each other, thereby achieving sealing. Therefore, both configurations can be used on the front door 8 and the rear door 4.

[0072] Correspondingly, a corresponding power part is also provided to push the corresponding door body to move toward the corresponding door frame, thereby achieving sealing.

[0073] As for the longitudinal movement, a longitudinal moving power part can be provided separately, or the longitudinal movement can be realized by means of a lateral moving moving component. Fig.13 In the structure shown in , a wedge block 47 is provided on the free door body 42, and a clamping assembly 74 can be provided on the door frame. The clamping assembly 74 has a roller, which is combined with the roller when the free door body 42 moves to a predetermined position. The roller and the wedge block 47 can form an inclined wedge mechanism. The typical feature of the inclined wedge mechanism is that it can realize the conversion between two motion forms with a certain angle. In other words, the lateral movement generated by the free door body 42 under the drive of the rear transverse driving mechanism can be converted into longitudinal movement to realize the clamping between the rear door 4 and the rear door frame.

[0074] Roller in Fig.15 The pressure wheel 742 is shown in the middle, which is a driven structural configuration.

[0075] Based on the foregoing description, the configuration of the front door assembly and the configuration of the rear door assembly can be interchangeable, or the same transverse drive mode and longitudinal drive mode can be used. Therefore, under this condition, the front door assembly and the rear door assembly can both choose a single door body or a composite door body.

[0076] Correspondingly, if a single door body is used, the front transverse driving mechanism is installed on the front longitudinal sliding block, and the rear transverse driving mechanism is installed on the rear longitudinal sliding block, thereby forming a guide for the door body with two degrees of freedom by means of a linear guide rail. Accordingly, a front longitudinal guide rail matched with the front longitudinal sliding block and a rear longitudinal guide rail matched with the rear longitudinal sliding block are provided.

[0077] If a composite door body is used, the composite door body includes a supporting door body 41 and a free door body 42. The free door body 42 forms a parallelogram mechanism with the supporting door body 41 through four connecting rods 46. The maximum distance between the supporting door body 41 and the free door body 42 is the state when the connecting rod 46 in the parallelogram mechanism is perpendicular to the supporting door body 41. However, as mentioned above, in the initial state, that is, when the free door body 42 and the supporting door body 41 are driven by, for example, a rear transverse drive mechanism and move laterally, the distance between the free door body 42 and the supporting door body 41 is the smallest to avoid interference between the free door body 42 and the door frame. Under this condition, the free door body 42 and the supporting door body 41 need to be held in position using, for example, a tensioning device, such as Fig.15 As shown in the figure, the free door body 42 and the supporting door body 41 are connected by a tension spring 49, so that when the clamping assembly 74 takes effect, the distance between the free door body 42 and the supporting door body 41 is minimized, so that the longitudinal dimension of the rear door 4 remains relatively small, thereby reducing the possibility of motion interference.

[0078] The aforementioned supporting door body 41 is similar to the mounting base of the free door body 42 as a whole, and it may not exist in the form of a door panel as a whole, but may be a frame.

[0079] The free door body 42 and the supporting door body 41 can be closely fitted in the initial state, or a certain distance can be maintained to avoid the suction force caused by the tight fitting. Fig.14 In the structure shown, a limiting protrusion 48 is provided on the surfaces of the free door body 42 or the supporting door body 41 facing each other, and the limiting protrusion 48 is used to maintain a given distance between the free door body 42 and the supporting door body 41.

[0080] In order to avoid rigid impact, the limiting protrusion 48 can be made of elastic material, such as a rubber block.

[0081] In addition, in order to assist in resetting, a resetting device is provided between the front door assembly and the rear assembly and the framework. In certain embodiments, the resetting device can be used as a main resetting.

[0082] exist Figure 7 In the illustrated structure, the core of the reset device is a spring guide column 652, which is mounted on a fixed seat 654. The active end of the spring guide column 652 is indirectly connected to, for example, the front door panel 84 to indirectly push the front door panel 84 to reset. Obviously, the reset here is to disengage the front door panel 84 from the engagement with the front door frame.

[0083] exist Figure 7 In the illustrated structure, the connection between the front door panel 84 and the spring guide column 652 has multiple links, wherein the front door panel 84 is connected to the lower movable plate 621 through a roller pair, and the lower movable plate cooperates with the lower movable guide rail 622 to form a lower movable pair 62, and a lever 651 is provided on the lower movable plate, and the lever 651 is connected to the spring guide column 652 to provide a reset force to the lower movable plate 621, and then provide a reset force to the front door panel 84.

[0084] The reset device is indicated in Figure 6 In the middle is a reset assembly 65, four of which are arranged on the corresponding frame corresponding to each door body to provide a balanced reset force.

[0085] In addition, Figure 7 In the illustrated structure, the fixing hole on the fixing seat 654 is an elongated hole 653 extending in the front-to-back direction, so that the position of the fixing seat 654 can be adjusted according to different needs, so that the restoring force and restoring stroke provided by the restoring assembly 65 are more appropriate.

[0086] Regarding the clamping mechanism adapted to the composite door body, its purpose is to drive the free door body 42 to be pressed on the corresponding door frame; the clamping mechanism can be a linear motion mechanism or component installed on, for example, the supporting door body 41, and the linear motion mechanism can be a linear motor, a hydraulic cylinder, a cylinder, etc., preferably a cylinder is used.

[0087] The aforementioned content also mentions the inclined wedge mechanism, which can be an inclined wedge mechanism with sliding friction or an inclined wedge mechanism with rolling friction. The inclined wedge mechanism mentioned in the aforementioned text is an inclined wedge mechanism with rolling friction, which is used to convert lateral motion into longitudinal motion.

[0088] exist Figure 6 and Figure 8 In the embodiment, the clamping mechanism is adapted to the single door body, and the clamping mechanism comprises: Hold your claws tight, Figure 8 There are two, an upper clamping claw 637 and a lower clamping claw 638. The figure shows a lower clamping claw shaft 631 of the lower clamping claw 638, which is used to hinge the lower clamping claw 638 on the frame. When the lower clamping claw 638 rotates around the lower clamping claw shaft 631, its claw head will inevitably have a forward and backward movement component.

[0089] Furthermore, the clamping claws cooperate with the clamping bearings 82 provided on both sides of the front door plate 84, for example, to pull the front door plate 84 toward the rear side, thereby achieving the connection between the front door plate 84 and the front door frame.

[0090] Figure 8 For example, the lower clamping claw shaft 631 is used for hinged installation of the tail end of the lower clamping claw 638, and in some embodiments, the lower clamping claw shaft 631 can also be used for hinged installation of the middle part of the lower clamping claw 638.

[0091] A pull rod 636 is provided to drive the clamping claw to rotate around its hinge axis. The pull rod 636 is connected to the clamping claw by hinge mounting. Figure 8 The illustrated structure uses a ball hinge for hinge assembly to eliminate motion interference, such as the lower ball hinge 639 shown in the figure.

[0092] A driving unit is further provided to drive the pull rod 636. Figure 8 In the illustrated structure, the driving part adopts a clamping cylinder 632, which is controlled by a dead point to better realize the transfer control of the clamping claws.

[0093] Clamping cylinder 632 Figure 8 The connection between the two pull rods 636 is achieved by means of a lever mechanism 635, wherein the lever of the lever mechanism 635 is hinged on the frame, and the active end of the lever mechanism is hinged to the push rod 633 of the clamping cylinder 632 through a block with a longitudinal elongated hole to form a composite hinge 634, thereby eliminating longitudinal movement interference.

[0094] In addition, the aforementioned clamping bearing 82 is used to reduce the resistance of the clamping claws. Relatively speaking, in some embodiments, the clamping bearing 82 can be replaced by a simple optical axis.

[0095] Figure 5 In the embodiment, four clamping bearings 82 are provided on the front door plate 84, and two are provided on both sides of the front door plate 84. Correspondingly, one clamping mechanism is provided on both sides of the corresponding door frame to improve the reliability of clamping.

[0096] Furthermore, if Figure 5 and 6 As shown, the driving part is arranged between the two clamping shafts on the side, and connects the two pull rods 636 through a synchronous structure.

Claims

1. A buffer room for semiconductor process, characterized in that: include: A frame defining a buffer cavity having a front door frame and a rear door frame; A front door assembly adapted to the front door frame and mounted on the frame through a front transverse movement assembly, so as to have a front transverse movement freedom, and included in the front assembly; A rear door assembly adapted to the rear door frame and mounted on the frame through a rear transverse movement assembly, so as to have a rear transverse movement freedom, and included in the rear assembly; The front transverse driving mechanism is used to drive the front door assembly to move on the front transverse moving assembly to realize the opening and closing transformation of the front door assembly; The rear transverse driving mechanism is used to drive the rear door assembly to move on the rear transverse moving assembly to realize the transformation of the rear door opening and closing assembly; Among them, the front door assembly and the rear door assembly have or part of the door body in the assembly has the freedom to move in the front and rear directions, and a longitudinal driving mechanism is provided to push the front door assembly, the rear door assembly or the corresponding door body to seal and engage with the corresponding door frame.

2. The buffer room according to claim 1, characterized in that: The front door assembly and the rear door assembly are single door bodies or composite door bodies; If a single door body is used, the front transverse drive mechanism is installed on the front longitudinal slide block, and the rear transverse drive mechanism is installed on the rear longitudinal slide block; Accordingly, a front longitudinal guide rail cooperating with the front longitudinal slider and a rear longitudinal guide rail cooperating with the rear longitudinal slider are provided; If a composite door body is used, the composite door body includes a supporting door body and a free door body. The free door body forms a parallelogram mechanism with the supporting door body through a connecting rod, or the free door body is installed on the supporting door body through a compression guide pair in the front and rear directions.

3. The buffer room according to claim 2, characterized in that: A limiting protrusion is arranged on one side of the supporting door body and the free door body opposite to the other side.

4. The buffer room according to claim 2 or 3, characterized in that: A reset device is arranged between the front door assembly and the rear assembly and the frame.

5. The buffer room according to claim 4, characterized in that: Providing a pressing mechanism adapted to the composite door body to drive the free door body to be pressed against the corresponding door frame; or A wedge is provided on the frame corresponding to the position of the door frame; Correspondingly, a driven wedge block or a roller is provided at a position on the free door body corresponding to the wedge block to cooperate with the wedge block to form an inclined wedge mechanism.

6. The buffer room according to claim 4, characterized in that: In the lateral movement direction, the corresponding door assembly is guided by a linear guide rail above the corresponding door frame and by a roller guide below the door frame.

7. The buffer room according to claim 4, characterized in that: The reset device is configured as follows: A control is provided on the part or component for determining the front and rear moving kinematic pairs in the front door assembly and the rear assembly; The catch is engaged with the frame via a spring guide.

8. The buffer room according to claim 7, characterized in that: The spring guide column is mounted on the frame through a fixing seat; The connection hole of the fixing seat for connecting with the frame is an elongated hole extending in the front-to-back direction, so as to be used for adjusting the position of the fixing seat in the front-to-back direction.

9. The buffer room according to claim 2, characterized in that: Adapted to the single door body, a clamping mechanism is provided for clamping the single door body on the corresponding door frame, and the clamping mechanism includes: The clamping claw has a claw body at one end and the other end or the middle is hinged on the frame; A pull rod, hingedly mounted on the clamping claw, to drive the clamping device to swing around its hinge axis; A driving part, used for driving the pull rod; Correspondingly, the single door body is provided with a clamping shaft for cooperating with the clamping claw.

10. The buffer room according to claim 9, characterized in that: The clamping mechanism is provided on each side of the corresponding door frame; Correspondingly, a group of two clamping shafts are provided on each side of the single door body, and one is provided on the upper and lower corresponding sides of the single door body; The driving part is arranged between the two clamping shafts on the side and is connected with the two pull rods through a synchronous structure.

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