Graphite boat support

Abstract

The invention discloses a graphite boat support, and relates to the technical field of photovoltaic solar cells, and the graphite boat support is technically characterized in that the graphite boat support comprises a bottom plate which is internally provided with a first movable cavity and a second movable cavity; a limiting ring is fixedly mounted in the second movable cavity, a limiting plate is fixedly mounted at the bottom end of the second movable cavity, a second piston plate is slidably arranged in the second movable cavity, a spring is fixedly mounted between the second piston plate and the limiting plate, and a first piston plate is slidably mounted in the first movable cavity. The first piston plate and the second piston plate are fixedly connected through a U-shaped connecting rod, a pressure cavity is formed between the upper surface of the second piston plate and the top end of the second movable cavity, a pressure relief head is fixedly installed on the bottom plate, one end of the pressure relief head is communicated with the pressure cavity, and a one-way electric control valve is fixedly installed on the pressure relief head. And the air supply assembly is fixedly installed on the side plate, the air supply end of the air supply assembly is communicated with the pressure cavity, and the stability of the bearing graphite boat can be remarkably improved.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic solar cells, in particular to a graphite boat support. Background Art

[0002] Semiconductor or photovoltaic equipment is widely used in electronics, new energy and other industries. The processing of semiconductor and photovoltaic materials usually uses graphite boats to load or move semiconductor and photovoltaic materials, and the device for loading multiple graphite boats is usually called a boat support.

[0003] At present, the graphite boat generally adopts a structure in which both ends of the boat support are supported, and about 2 mm of movable space is reserved in the longitudinal and lateral directions. Therefore, it is impossible to avoid or alleviate the jitter phenomenon of the graphite boat during the transmission process, and the silicon wafer often has problems such as looseness or looseness, resulting in wafer falling or warping. Therefore, in order to solve the above technical problems, the present invention provides a graphite boat support. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a graphite boat support, which can significantly improve the stability of the graphite boat.

[0005] To achieve the above object, the present invention provides the following technical solution: a graphite boat support, comprising a pair of side plates, both ends of the two side plates in the length direction of which are fixedly mounted with end plates, and further comprising: A pair of bottom plates are provided, and both bottom plates are fixedly installed between the two side plates, and a first activity cavity and a second activity cavity are opened in the bottom plates; Wherein, a limit ring is fixedly installed in the second movable chamber, a limit plate is fixedly installed at the bottom end of the second movable chamber, a second piston plate is slidably arranged in the second movable chamber and between the limit plate and the limit ring, a spring is fixedly installed between the second piston plate and the limit plate, a first piston plate is slidably installed in the first movable chamber, the first piston plate and the second piston plate are fixedly connected by a U-shaped connecting rod, a pressure chamber is formed between the upper surface of the second piston plate and the top end of the second movable chamber, a pressure relief head is fixedly installed on the bottom plate, one end of the pressure relief head is connected to the pressure chamber, and a one-way electric control valve is fixedly installed on the pressure relief head; The air supply component is fixedly mounted on the side plate, and the air supply end of the air supply component is connected with the pressure chamber.

[0006] Preferably, the air delivery assembly includes an air pump, a main pipe, a first air pipe and an air inlet pipe. The air pump is fixedly mounted on the side panel, the bottom end of the air inlet pipe is fixedly connected to the air inlet end of the air pump, one end of the main pipe is fixedly connected to the air outlet end of the air pump, one end of the first air pipe is fixedly connected to the main pipe, the other end of the first air pipe is fixedly connected to the bottom plate, and the first air pipe is communicated with the pressure chamber.

[0007] Preferably, a U-shaped pipe rack is also installed on the side panel, and a plurality of air outlets are fixedly installed at equal intervals in the length direction of the U-shaped pipe rack; a second air pipe is fixedly installed on the main pipe, a first electric-controlled valve is fixedly installed on the main pipe and located between the first air pipe and the second air pipe, a second electric-controlled valve is fixedly installed on one end of the first air pipe, and a pipeline assembly is arranged between the second air pipe and one end of the U-shaped pipe rack; a reciprocating motion assembly is installed on the side panel, and the reciprocating motion assembly is fixedly connected to the other end of the U-shaped pipe rack.

[0008] Preferably, the pipeline assembly includes multiple rigid straight tubes and soft tubes, and two adjacent rigid straight tubes are connected by a soft tube, one end of the rigid straight tube at one end is rotatably connected to the second air pipe, and one end of the rigid straight tube at the other end is rotatably connected to one end of a U-shaped pipe rack; a first sliding rod is fixedly installed on the side panel, and multiple sliding sleeves are slidably installed on the first sliding rod, a fixed sleeve is fixedly installed in the middle of the rigid straight tube, and the fixed sleeve is rotatably connected to the sliding sleeve through a connecting rod, and multiple fixed sleeves are arranged in a one-to-one correspondence with multiple sliding sleeves.

[0009] Preferably, the reciprocating motion assembly comprises a reciprocating screw, a movable sleeve and a second sliding rod; the reciprocating screw is rotatably mounted on the side plate, the movable sleeve is arranged on the outer surface of the reciprocating screw, a track block is fixedly mounted on the inner surface of the movable sleeve, the track block is slidably connected to the spiral track on the reciprocating screw, the other end of the U-shaped pipe rack is fixedly connected to the movable sleeve, the second sliding rod is fixedly mounted on the side plate, and one end of the second sliding rod passes through the interior of the movable sleeve and is slidably connected to the movable sleeve; A connecting ring is fixedly mounted on the reciprocating screw, and a plurality of blades are fixedly mounted on the connecting ring at equal intervals in the circumferential direction. A closing cover is fixedly mounted on the side plate, and the closing cover is sleeved on the outside of the connecting ring and the blades. A third air pipe is fixedly mounted on the main pipe, and one end of the third air pipe is fixedly connected to the closing cover, and the third air pipe is communicated with the interior of the closing cover, and a notch is provided on the closing cover.

[0010] Preferably, a connecting pipe is fixedly installed between the two bottom plates, and both ends of the connecting pipe are respectively connected to the pressure chambers in the two bottom plates.

[0011] Preferably, a plurality of ribs are fixedly installed between the two side panels.

[0012] Compared with the prior art, the present invention provides a graphite boat support having the following beneficial effects: 1. A first movable chamber and a second movable chamber are provided in the bottom plate, a second piston plate is slidably installed in the second movable chamber, a spring is fixedly installed between the second piston plate and the limit plate, a pressure chamber is formed between the upper surface of the second piston plate and the top of the second movable chamber, a first piston plate is slidably installed in the first movable chamber, the first piston plate and the second piston plate are fixedly connected by a U-shaped connecting rod, the air supply end of the air supply assembly is connected to the pressure chamber, the air supply assembly can make the first piston plate and the second piston plate move downward, a negative pressure chamber can be formed between the first piston plate and the electrode plate, the electrode plate is firmly adsorbed on the bottom plate, the graphite boat will not shake, and the processing of semiconductor and photovoltaic materials is more stable and efficient; 2. A reciprocating motion component and a U-shaped tube rack are installed on the side plate. The reciprocating motion component can make the U-shaped tube rack reciprocate in the length direction of the side plate. A second air pipe is fixedly installed on the main pipe. The second air pipe is connected to one end of the U-shaped tube rack through a pipe component. The U-shaped tube rack can spray air on the graphite boat to speed up the separation of liquid from the graphite boat, shorten the time for the graphite boat to drain, and enable the graphite boat to enter the next process faster, so as to improve the processing efficiency of semiconductor and photovoltaic materials.

[0013] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. The specific implementation of the present invention is given in detail by the following embodiments and their accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings: Figure 1 It is a schematic diagram of the structure of the present invention carrying a graphite boat; Figure 2 It is a structural schematic diagram of the present invention; Figure 3 It is a structural schematic diagram of the bottom plate, the reciprocating motion component, the air supply component, the pipeline component and the U-shaped pipe rack in the present invention; Figure 4 It is a structural schematic diagram of the bottom of the bottom plate of the present invention; Figure 5 is a schematic diagram of the cross-sectional structure of the bottom plate of the present invention; Figure 6 It is a schematic diagram of the structure of the reciprocating motion component, the pipeline component, the air pump and the U-shaped pipe rack in the present invention; Figure 7 It is a schematic diagram of the structure of the air supply component and the pipeline component in the present invention; Figure 8It is a schematic diagram of the structure of the pipeline assembly, the hose and the fixing sleeve in the present invention; Fig. 9 It is a schematic diagram of the structure of the reciprocating screw, the movable sleeve, the second sliding rod, the closing cover, the connecting ring and the blades in the present invention.

[0015] In the figure: 10, side plate; 101, first fixing block; 102, second fixing block; 11, end plate; 12, rib plate; 20. Bottom plate; 201. First movable chamber; 202. Second movable chamber; 203. Limit plate; 204. Limit ring; 21. First piston plate; 22. Second piston plate; 23. Spring; 24. U-shaped connecting rod; 25. Connecting pipe; 26. Pressure relief head; 261. One-way electric control valve; 30. air pump; 31. main pipe; 311. first electric control valve; 32. first air pipe; 321. second electric control valve; 33. air inlet pipe; 34. second air pipe; 35. third air pipe; 40. U-shaped pipe rack; 401. outlet head; 50, hard straight tube; 51, soft tube; 52, fixed sleeve; 53, sliding sleeve; 54, first sliding rod; 60, reciprocating screw; 61, movable sleeve; 611, track block; 62, second slide bar; 63, closing cover; 631, notch; 632, mounting block; 64, connecting ring; 65, blade; 70. Graphite boat; 71. Electrode plate. DETAILED DESCRIPTION

[0016] The following is combined with Figures 1 to 9 The principles and features of the present invention are described, and the examples given are only used to explain the present invention and are not used to limit the scope of the present invention. In the following paragraphs, the present invention is described in more detail by way of example with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and are not in precise proportions, and are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention.

[0017] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0019] Embodiment 1: Please combine Figures 1 to 9 As shown, the present invention provides a graphite boat support, comprising a pair of side plates 10, with end plates 11 fixedly mounted at both ends of the two side plates 10 in the length direction, and the graphite boat support also includes: A pair of bottom plates 20 are provided. The two bottom plates 20 are fixedly installed between the two side plates 10. The two bottom plates 20 are symmetrically distributed in the length direction of the side plates 10. A first active cavity 201 and a second active cavity 202 are opened in the bottom plates 20; Among them, a limit ring 204 is fixedly installed in the second active chamber 202, a limit plate 203 is fixedly installed at the bottom end of the second active chamber 202, a second piston plate 22 is slidably arranged in the second active chamber 202 and between the limit plate 203 and the limit ring 204, a spring 23 is fixedly installed between the second piston plate 22 and the limit plate 203, a first piston plate 21 is slidably installed in the first active chamber 201, the first piston plate 21 and the second piston plate 22 are fixedly connected by a U-shaped connecting rod 24, a pressure chamber is formed between the upper surface of the second piston plate 22 and the top of the second active chamber 202, a pressure relief head 26 is fixedly installed on the bottom plate 20, one end of the pressure relief head 26 is connected to the pressure chamber, and a one-way electric control valve 261 is fixedly installed on the pressure relief head 26; The air delivery assembly includes an air pump 30, a main pipe 31, a first air pipe 32 and an air inlet pipe 33. The air pump 30 is fixedly mounted on the side plate 10. The bottom end of the air inlet pipe 33 is fixedly connected to the air inlet end of the air pump 30. One end of the main pipe 31 is fixedly connected to the air outlet end of the air pump 30. One end of the first air pipe 32 is fixedly connected to the main pipe 31. The other end of the first air pipe 32 is fixedly connected to the bottom plate 20. The first air pipe 32 is connected to the pressure chamber. When the graphite boat 70 is carried, the two electrode plates 71 at the two ends of the graphite boat 70 in the length direction are supported on the two bottom plates 20 respectively, and the electrode plates 71 completely cover the first piston plate 21. After that, the air pump 30 is started to send air into the pressure chamber through the first air pipe 32. The pressure in the pressure chamber increases, and the second piston plate 22 moves toward the bottom end of the second active chamber 202. The first piston plate 21 will drop synchronously with the second piston plate 22, and a negative pressure chamber is formed between the upper surface of the first piston plate 21 and the electrode plate 71, and the negative pressure chamber gradually increases, thereby The electrode plate 71 is firmly adsorbed on the bottom plate 20, so that the graphite boat 70 will not shake when transmitting or processing semiconductor and photovoltaic materials, and the processing of semiconductor and photovoltaic materials is more stable and efficient; when the graphite boat 70 needs to be removed, the one-way electric control valve 261 is opened, and the air in the pressure chamber is discharged through the pressure relief head 26, and the second piston plate 22 moves upward under the elastic force of the spring 23, and the first piston plate 21 also moves upward. After the negative pressure chamber disappears, the adsorption force on the electrode plate 71 is lost, and the graphite boat 70 can be smoothly removed; It should be noted that a connecting pipe 25 is fixedly installed between the two bottom plates 20, and the two ends of the connecting pipe 25 are respectively connected to the pressure chambers in the two bottom plates 20, so that the pressure chambers in the two bottom plates 20 can be pressurized at the same time, and the two electrode plates 71 are respectively adsorbed and fixed on the two bottom plates 20, so that the supported graphite boat 70 has higher stability; A plurality of ribs 12 are fixedly installed between the two side plates 10. The bottom plate 20 is used as the main load-bearing member, and the plurality of ribs 12 are used as risk load-bearing members to prevent the bottom plate 20 from breaking. The plurality of ribs 12 are used as auxiliary supports.

[0020] Embodiment 2: When the graphite boat 70 is processed in some processes, it needs to be in contact with liquid. For example, when wet coating and cleaning are performed, after the graphite boat 70 is processed, the graphite boat 70 needs to be drained and then moved to the next process, which takes a long time and is not conducive to improving the processing efficiency of the graphite boat 70. In order to solve this problem, a U-shaped pipe rack 40 is also installed on the side plate 10. A plurality of gas outlets 401 are fixedly installed at equal intervals in the length direction of the U-shaped pipe rack 40, and the bottom ends of the plurality of gas outlets 401 are located above the top of the graphite boat 70. A second air pipe 34 is fixedly mounted on the main pipe 31, a first electric-controlled valve 311 is fixedly mounted on the main pipe 31 and located between the first air pipe 32 and the second air pipe 34, a second electric-controlled valve 321 is fixedly mounted on one end of the first air pipe 32, and a pipe assembly is arranged between the second air pipe 34 and one end of the U-shaped pipe rack 40, and the overall length of the pipe assembly can be changed; A reciprocating motion assembly is installed on the side plate 10, and the reciprocating motion assembly is fixedly connected to the other end of the U-shaped pipe rack 40; the reciprocating motion assembly can make the U-shaped pipe rack 40 reciprocate in the length direction of the side plate 10; During the reciprocating motion of the U-shaped tube rack 40 in the length direction of the side plate 10, the first electrically controlled valve 311 is opened, and air is sent into the U-shaped tube rack 40 through the pipeline assembly, and sprayed on the graphite boat 70 by the multiple air outlet heads 401, which can accelerate the separation of the liquid from the graphite boat 70, shorten the time for the graphite boat 70 to drain, and enable the graphite boat 70 to enter the next process faster, so as to improve the processing efficiency of semiconductor and photovoltaic materials; The specific structure of the pipeline assembly and the reciprocating motion assembly is now introduced; The pipeline assembly includes a plurality of rigid straight tubes 50 and a hose 51. Two adjacent rigid straight tubes 50 are connected by the hose 51. One end of the rigid straight tube 50 at one end is rotatably connected to the second air pipe 34. One end of the rigid straight tube 50 at the other end is rotatably connected to one end of the U-shaped pipe rack 40. A pair of first fixed blocks 101 are fixedly installed on the side plate 10, a first slide bar 54 is fixedly installed between the two first fixed blocks 101, a plurality of sliding sleeves 53 are slidably installed on the first slide bar 54, a fixed sleeve 52 is fixedly installed in the middle of the rigid straight tube 50, the fixed sleeve 52 is rotatably connected with the sliding sleeve 53 through a connecting rod, a plurality of fixed sleeves 52 and a plurality of sliding sleeves 53 are arranged one by one, the length of the rigid straight tube 50 at the end is half of the length of the rigid straight tube 50 in the middle, and the rotation axes of the two rigid straight tubes 50 at both ends are parallel to the rotation axis of the connecting rod and are located at the same height; During the movement of the U-shaped pipe rack 40, the plurality of rigid straight pipes 50 can be continuously switched between a vertical state and a horizontal state, so that the overall length of the pipe assembly can be continuously changed; The reciprocating motion assembly includes a reciprocating screw 60, a movable sleeve 61 and a second slide bar 62; a pair of second fixed blocks 102 are fixedly mounted on the first fixed block 101, the reciprocating screw 60 is rotatably mounted on the two second fixed blocks 102, the movable sleeve 61 is sleeved on the outer surface of the reciprocating screw 60, a track block 611 is fixedly mounted on the inner surface of the movable sleeve 61, the track block 611 is slidably connected to the spiral track on the reciprocating screw 60, the other end of the U-shaped pipe rack 40 is fixedly connected to the movable sleeve 61, the second slide bar 62 is fixedly mounted on the two second fixed blocks 102, and one end of the second slide bar 62 passes through the interior of the movable sleeve 61 and is slidably connected to the movable sleeve 61; A connecting ring 64 is fixedly mounted on the reciprocating screw 60, and a plurality of blades 65 are fixedly mounted on the connecting ring 64 at equal intervals in the circumferential direction. A closed cover 63 is sleeved on the outside of the connecting ring 64 and the blades 65, and the closed cover 63 is fixedly mounted on the side plate 10 through a mounting block 632. A third air pipe 35 is fixedly mounted on the main pipe 31, and one end of the third air pipe 35 is fixedly connected to the closed cover 63, and the third air pipe 35 is connected to the inside of the closed cover 63, and a notch 631 is opened on the closed cover 63; After the first electric control valve 311 is opened, air can be transported to the closed cover 63 through the third air pipe 35. The air discharged from one end of the third air pipe 35 hits the blade 65, which can push the connecting ring 64 to rotate. Then, during the rotation of the reciprocating screw 60, the track block 611 slides along the spiral track, so that the movable sleeve 61 reciprocates in the axial direction of the reciprocating screw 60, and the U-shaped pipe frame 40 can reciprocate in the length direction of the side plate 10. Finally, it should be noted that the side panel 10 is made of carbon fiber composite material, and the remaining parts are made of graphite material. Because some processes require that the graphite boat support be placed below the liquid level together with the graphite boat 70, the top of the air inlet pipe 33 is located above the liquid level, and a sealing cover is fixedly installed on the side panel 10, and the air pump 30 is arranged in the sealing cover to prevent the liquid from affecting the service life of the air pump 30. The sealing cover is not shown in the figure.

[0021] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any ordinary technician in the industry can smoothly implement the present invention as shown in the drawings and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the present invention using the technical content disclosed above are all equivalent embodiments of the present invention. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the technical solution of the present invention.

Claims

1. A graphite boat support, comprising a pair of side plates (10), with end plates (11) fixedly mounted at both ends of the two side plates (10) in the length direction, characterized in that: Also includes: A bottom plate (20), wherein a pair of the bottom plates (20) are provided, and the two bottom plates (20) are fixedly mounted between the two side plates (10), and a first active cavity (201) and a second active cavity (202) are formed in the bottom plates (20); wherein a limit ring (204) is fixedly installed in the second active chamber (202), a limit plate (203) is fixedly installed at the bottom end of the second active chamber (202), a second piston plate (22) is slidably installed in the second active chamber (202) and between the limit plate (203) and the limit ring (204), a spring (23) is fixedly installed between the second piston plate (22) and the limit plate (203), a first piston plate (21) is slidably installed in the first active chamber (201), the first piston plate (21) and the second piston plate (22) are fixedly connected via a U-shaped connecting rod (24), a pressure chamber is formed between the upper surface of the second piston plate (22) and the top end of the second active chamber (202), a pressure relief head (26) is fixedly installed on the bottom plate (20), one end of the pressure relief head (26) is connected to the pressure chamber, and a one-way electric control valve (261) is fixedly installed on the pressure relief head (26); An air supply assembly is fixedly mounted on the side plate (10), and an air supply end of the air supply assembly is in communication with the pressure chamber.

2. The graphite boat support according to claim 1, characterized in that: The air delivery assembly comprises an air pump (30), a main pipe (31), a first air pipe (32) and an air inlet pipe (33); the air pump (30) is fixedly mounted on the side plate (10); the bottom end of the air inlet pipe (33) is fixedly connected to the air inlet end of the air pump (30); one end of the main pipe (31) is fixedly connected to the air outlet end of the air pump (30); one end of the first air pipe (32) is fixedly connected to the main pipe (31); the other end of the first air pipe (32) is fixedly connected to the bottom plate (20); and the first air pipe (32) is communicated with the pressure chamber.

3. The graphite boat support according to claim 2, characterized in that: A U-shaped pipe rack (40) is also installed on the side plate (10), and a plurality of gas outlets (401) are fixedly installed at equal intervals in the length direction of the U-shaped pipe rack (40); A second air pipe (34) is fixedly mounted on the main pipe (31), a first electric-controlled valve (311) is fixedly mounted on the main pipe (31) and located between the first air pipe (32) and the second air pipe (34), a second electric-controlled valve (321) is fixedly mounted on one end of the first air pipe (32), and a pipeline assembly is provided between the second air pipe (34) and one end of the U-shaped pipe rack (40); A reciprocating motion component is mounted on the side plate (10), and the reciprocating motion component is fixedly connected to the other end of the U-shaped pipe rack (40).

4. The graphite boat support according to claim 3, characterized in that: The pipeline assembly comprises a plurality of rigid straight tubes (50) and a hose (51), two adjacent rigid straight tubes (50) are connected via the hose (51), one end of the rigid straight tube (50) at one end is rotatably connected to the second air pipe (34), and one end of the rigid straight tube (50) at the other end is rotatably connected to one end of the U-shaped tube rack (40); A first sliding rod (54) is fixedly mounted on the side plate (10), and a plurality of sliding sleeves (53) are slidably mounted on the first sliding rod (54). A fixed sleeve (52) is fixedly mounted on the middle of the rigid straight tube (50), and the fixed sleeve (52) is rotatably connected to the sliding sleeve (53) via a connecting rod. The plurality of fixed sleeves (52) and the plurality of sliding sleeves (53) are arranged in a one-to-one correspondence.

5. The graphite boat support according to claim 3, characterized in that: The reciprocating motion assembly comprises a reciprocating screw (60), a movable sleeve (61) and a second sliding rod (62); The reciprocating screw (60) is rotatably mounted on the side plate (10); the movable sleeve (61) is sleeved on the outer surface of the reciprocating screw (60); a track block (611) is fixedly mounted on the inner surface of the movable sleeve (61); the track block (611) is slidably connected to the spiral track on the reciprocating screw (60); the other end of the U-shaped pipe frame (40) is fixedly connected to the movable sleeve (61); the second sliding rod (62) is fixedly mounted on the side plate (10); one end of the second sliding rod (62) passes through the interior of the movable sleeve (61) and is slidably connected to the movable sleeve (61); A connecting ring (64) is fixedly mounted on the reciprocating screw (60), and a plurality of blades (65) are fixedly mounted on the connecting ring (64) at equal intervals in a circumferential direction. A closing cover (63) is fixedly mounted on the side plate (10), and the closing cover (63) is sleeved on the outside of the connecting ring (64) and the blades (65). A third air pipe (35) is fixedly mounted on the main pipe (31), and one end of the third air pipe (35) is fixedly connected to the closing cover (63), and the third air pipe (35) is communicated with the interior of the closing cover (63). A notch (631) is provided on the closing cover (63).

6. The graphite boat support according to claim 1, characterized in that: A connecting pipe (25) is fixedly installed between the two bottom plates (20), and two ends of the connecting pipe (25) are respectively connected to the pressure chambers in the two bottom plates (20).

7. The graphite boat support according to claim 1, characterized in that: A plurality of rib plates (12) are fixedly mounted between the two side plates (10).

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