Vacuum suction device

Abstract

The application relates to the technical field of silicon wafer processing, and discloses a vacuum adsorption device, which comprises an adsorption disc, a plurality of adsorption grooves arranged on the surface of one side of the adsorption disc along a first direction, and an opening arranged on the outward side of the adsorption groove; a transmission cavity, the transmission cavity being located in the adsorption disc, the first end of the transmission cavity being communicated with the adsorption groove, and the second end of the transmission cavity being communicated with a vacuum generating device; a switching assembly and a transmission assembly, the switching assembly being located in the transmission cavity, the transmission cavity comprising an upper cavity and a lower cavity, the upper cavity being communicated with the adsorption groove, the lower cavity being communicated with the vacuum generating device, and the transmission assembly being in transmission connection with the switching assembly so as to drive the switching assembly to move in the transmission cavity, the upper cavity and the lower cavity being disconnected under the blocking of the switching assembly in a blocking state, and the upper cavity and the lower cavity being connected under the communication of the switching assembly in a communication state. The application provides the vacuum adsorption device which can automatically realize the blocking and communication of the adsorption groove.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of silicon wafer processing, and in particular to a vacuum adsorption device BACKGROUND

[0002] With the increase of market share of silicon wafer products, silicon wafers of different diameters have appeared in the market. In order to adsorb silicon wafers of different sizes, the existing vacuum adsorption device is provided with adsorption grooves of different sizes, and the adsorption grooves are connected with a vacuum generating device. Further, in order to accurately adsorb the silicon wafers, the adsorption groove matched with the size of the silicon wafer needs to be opened, and the adsorption grooves of other sizes need to be closed at the same time. The unused adsorption grooves are usually manually closed by screws to block the gas flow. However, the manual closing of the adsorption grooves has the problems of troublesome operation and low efficiency. SUMMARY

[0003] The present application mainly solves the technical problem of the existing technology that the manual closing of the adsorption grooves in the multi-adsorption groove vacuum adsorption device is troublesome and low in efficiency. A vacuum adsorption device capable of automatically realizing the plugging and communication of the adsorption grooves is provided.

[0004] In order to solve the above technical problem, the present application provides a vacuum adsorption device, characterized in that the vacuum adsorption device comprises,

[0005] an adsorption disc, a plurality of adsorption grooves are arranged on one side of the surface of the adsorption disc along a first direction, and an opening is arranged on the outer side of the adsorption groove;

[0006] a transmission cavity, the transmission cavity is located in the adsorption disc, a first end of the transmission cavity is in communication with the adsorption groove, and a second end of the transmission cavity is in communication with a vacuum generating device;

[0007] a switching assembly and a transmission assembly, the switching assembly is located in the transmission cavity, the transmission cavity comprises an upper cavity and a lower cavity, the upper cavity is in communication with the adsorption groove, the lower cavity is in communication with the vacuum generating device, the transmission assembly is in transmission connection with the switching assembly to drive the switching assembly to move in the transmission cavity, and the plugging state and the communication state of the adsorption groove are formed; wherein,

[0008] in the plugging state, the upper cavity and the lower cavity are disconnected under the plugging of the switching assembly;

[0009] in the communication state, the upper cavity and the lower cavity are connected under the communication of the switching assembly.

[0010] In an implementation manner, the transmission assembly comprises,

[0011] The drive member is in transmission connection with the transmission member, the switching assembly is located on one side of the drive member, the drive member is used for driving the transmission member to rotate, and the transmission member converts the rotating motion into linear motion of the switching assembly in the first direction in the transmission cavity, so as to form switching of the blocking state and the communication state.

[0012] In an implementation manner, the transmission member comprises,

[0013] The transmission rod is provided with rotating input structures, a plurality of rotating rings are arranged on the transmission rod in the second direction, the outer surface of the rotating ring in the circumferential direction is a driving surface, the rotating ring is recessed radially inward from the driving surface to form a second driving groove, the second driving groove is provided with an opening outward, and the second driving grooves of the rotating rings in the second direction are not intersected with the projection of the bottom surface of the transmission rod.

[0014] The switching assembly is in abutment with the second driving groove to form the communication state, and the switching assembly is in abutment with the driving surface to form the blocking state.

[0015] In an implementation manner, the vacuum adsorption device further comprises a limiting member, the limiting member comprises,

[0016] The limiting ring is arranged on the transmission rod in the second direction, and the outer surface of the limiting ring in the circumferential direction is formed with a plurality of limiting surfaces, and the limiting surfaces are arranged correspondingly with the second driving grooves.

[0017] The limiting block and the first elastic member are located on one side of the limiting ring in the first direction, the first elastic member is used for driving the limiting block to abut against the outer surface of the limiting ring in the circumferential direction, and under the rotation of the limiting ring, the limiting block abuts against each limiting surface in the rotating direction in turn.

[0018] In an implementation manner, the switching assembly comprises,

[0019] The fixing member comprises a first fixing section and a second fixing section arranged in the first direction in turn, the first fixing section is connected with the second fixing section, a first gas hole is arranged through the first fixing section in the first direction, a second gas hole is arranged through the second fixing section in the first direction, the first gas hole is connected with the second gas hole, and an interface is formed between the first gas hole and the second gas hole, the first fixing section is located in the upper cavity, the first gas hole is in communication with the upper cavity, the second fixing section is located in the lower cavity, and the second gas hole is in communication with the lower cavity.

[0020] The motion piece is provided with a first end abutting against the transmission piece and a second end located in the first air hole and provided with a blocking plate, and the blocking plate completely covers the second air hole when abutting against the interface;

[0021] The second elastic piece is connected with the motion piece and the fixed piece respectively, and drives the first end of the motion piece to always abut against the transmission piece, and under the rotation of the transmission piece, the blocking plate abuts against or leaves the interface to switch the blocking state and the communication state.

[0022] In an embodiment, the motion piece comprises,

[0023] The abutting head is provided with an abutting surface on the side close to the transmission piece, and the abutting head abuts against the second driving groove or the driving surface through the abutting surface, and the abutting head can enter or exit the second driving groove;

[0024] The first connecting piece is connected with the blocking plate, and the first connecting piece is provided with a first accommodating cavity from the abutting head to the blocking plate, and a plurality of first driving grooves are radially arranged on the first connecting piece and communicated with the first accommodating cavity.

[0025] In an embodiment, the fixed piece comprises,

[0026] The abutting plate is arranged in the first air hole, and the abutting plate is arranged close to the abutting head;

[0027] The second connecting piece is arranged between the abutting plate and the first fixed segment, and the second connecting piece is connected with the first fixed segment, passes through the first driving groove and is connected with the abutting plate, the second elastic piece is arranged in the first accommodating cavity between the abutting plate and the blocking plate, and the second elastic piece always gives the driving force of the abutting plate close to the abutting plate to the blocking plate.

[0028] In an embodiment, the switching assembly comprises,

[0029] The first sealing piece is sleeved on the periphery of the second air hole, and the first sealing piece is at least partially arranged on the interface to form a first protruding part, and the first protruding part is arranged towards the blocking plate;

[0030] The second sealing piece is sleeved on the periphery of the second fixed segment, and the second sealing piece is at least partially arranged on the outer surface of the second fixed segment.

[0031] In an embodiment, the moving part comprises,

[0032] An abutting head is provided with an abutting surface near one side of the moving part, the abutting head abuts with the second driving slot or the driving surface through the abutting surface, and the abutting head can enter or exit the second driving slot;

[0033] A first connecting part and a third elastic part, the abutting head is connected with the blocking plate through the first connecting part, the first connecting part and the blocking part are provided with the third elastic part, a first accommodating cavity is provided from the abutting head to the blocking plate in the first connecting plate, and the first connecting part is provided with a first driving slot near the abutting head, the first driving slot is in communication with the first accommodating cavity and the lower cavity, respectively.

[0034] In an embodiment, the second elastic part is sleeved outside the first connecting part, the second elastic part is connected with the abutting head and the first fixed segment, respectively, the second elastic part always gives the abutting head a driving force away from the first fixed segment, and the blocking plate and the side wall of the first gas hole have a gas permeable groove;

[0035] A first sealing part is sleeved outside the second gas hole, the first sealing part at least partially protrudes from the interface to form a first protruding part, and the first protruding part is arranged towards the blocking plate;

[0036] A second sealing part is sleeved outside the second fixed segment, and the second sealing part is at least partially arranged on the outer surface of the second fixed segment.

[0037] Compared with the prior art, the transmission cavity is in communication with the adsorption groove on the adsorption disc and the vacuum generating device, respectively, the switching assembly is arranged in the transmission cavity, the transmission assembly is in transmission connection with the switching assembly to drive the switching assembly to move in the transmission cavity, so that the blocking state and the communication state of the vacuum adsorption device are formed, the transmission cavity is disconnected with the adsorption groove in the blocking state, and the adsorption groove does not produce adsorption. In the communication state, the transmission cavity is in communication with the adsorption groove, and the adsorption groove produces adsorption. Therefore, the automation control of whether the adsorption groove is in communication or not is realized, and the control efficiency can be provided compared with manual control.

[0038] Therefore, the application has the characteristics of reasonable structure and convenient use. BRIEF DESCRIPTION OF DRAWINGS

[0039] FIG. 1 is a structural schematic view of a vacuum adsorption device according to the present application; Figure 1 FIG. 2 is another structural schematic view of the vacuum adsorption device according to the present application;

[0040] FIG. 3 is a structural schematic view of a vacuum adsorption device according to the present application; Figure 2 FIG. 4 is another structural schematic view of the vacuum adsorption device according to the present application;

[0041] Figure 1 is a structural schematic diagram of a transmission assembly according to the present application; Figure 3

[0042] Figure 2 is a structural schematic diagram of a rotating ring according to the present application; Figure 4

[0043] Figure 3 is another structural schematic diagram of a rotating ring according to the present application; Figure 5

[0044] Figure 4 is a structural schematic diagram of a limiting ring according to the present application; Figure 6

[0045] Figure 5 is a structural schematic diagram of a limiting ring according to the present application; Figure 7 Figure 2 Figure 6 is a partial enlarged view of A in Figure 5;

[0046] Figure 7 is a structural schematic diagram of a switching assembly according to the present application; Figure 8

[0047] Figure 8 is a structural schematic diagram of a switching assembly in a blocking state according to the present application; Figure 9

[0048] Figure 9 is a structural schematic diagram of a switching assembly in a communicating state according to the present application; Figure 10

[0049] Figure 10 is another structural schematic diagram of a switching assembly in a blocking state according to the present application; Figure 11

[0050] Figure 11 is another structural schematic diagram of a switching assembly in a communicating state according to the present application. Figure 12

[0051] Figure 12 is a label explanation of the drawings;

[0052] X, first direction; Y, second direction;

[0053] 10, vacuum suction device;

[0054] 100, suction disc; 110, upper disc; 120, middle disc; 130, lower disc; 131, second accommodating cavity; 140, suction groove; 150, first fixing hole; 160, second fixing hole; 170, third sealing element;

[0055] 200, transmission cavity; 210, upper cavity; 211, first cavity; 212, second cavity; 220, lower cavity; 230, air inlet cavity;

[0056] ​​​​​​​​​​300, switching assembly; 310, fixing member; 311, first fixing section; 312, second fixing section; 313, first air hole; 314, second air hole; 315, interface; 316, abutting plate; 317, second connecting member; 318, third elastic member; 320, moving member; 321, blocking plate; 321-1, air permeation groove; 322, second elastic member; 323, abutting head; 323-1, abutting surface; 324, first connecting member; 324-1, first accommodating cavity; 324-2, first driving groove; 330, first sealing member; 340, second sealing member;

[0057] 400, transmission assembly; 500, driving member; 510, driving structure; 520, intermediate structure; 600, transmission member; 610, transmission rod; 620, rotating ring; 621, driving surface; 622, second driving groove; 630, input structure;

[0058] 700, limiting member; 710, limiting ring; 711, limiting surface; 720, limiting block; 730, first elastic member; 740, third accommodating cavity. DETAILED DESCRIPTION

[0059] In order to make the purpose, features and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0060] The prior art has the technical problem of low efficiency and troublesome operation when manually closing the adsorption grooves in the multi-adsorption-groove vacuum adsorption device.

[0061] Therefore, the present application provides a vacuum adsorption device, characterized in that the vacuum adsorption device comprises,

[0062] An adsorption disc is provided with a plurality of adsorption grooves on the surface of one side in the first direction, and the outward side of the adsorption groove is provided with an opening.

[0063] A transmission cavity is located in the adsorption disc, the first end of the transmission cavity is in communication with the adsorption groove, and the second end of the transmission cavity is in communication with a vacuum generating device.

[0064] The switching assembly is located in the transmission cavity, the transmission cavity comprises an upper cavity and a lower cavity, the upper cavity is communicated with the adsorption groove, the lower cavity is communicated with the vacuum generating device, the transmission assembly is in transmission connection with the switching assembly to drive the switching assembly to move in the transmission cavity and form the blocking state and the communication state of the adsorption groove.

[0065] In the blocking state, the upper cavity and the lower cavity are disconnected under the blocking of the switching assembly.

[0066] In the communication state, the upper cavity and the lower cavity are connected under the communication of the switching assembly.

[0067] Embodiment 1:

[0068] Please refer to the accompanying drawings Figure 1 to Figure 10 The vacuum adsorption device 10 of the present application is shown in a specific embodiment. The vacuum adsorption device 10 of the present application realizes vacuum adsorption of the object to be adsorbed, and the vacuum adsorption device 10 of the present application is applied to the field of silicon wafer processing. In an embodiment, the vacuum adsorption device 10 of the present application is applied to the adsorption of silicon wafers.

[0069] Please refer to the accompanying drawings Figure 1 to Figure 10 The first direction X of the present application refers to the height direction of the vacuum adsorption device 10, that is, the direction from top to bottom of the vacuum adsorption device 10 or the direction from bottom to top of the vacuum adsorption device 10. In the present application, the upper disc 110 is arranged on the upper side relative to the lower disc 130, and in the present application, the lower disc 130 is arranged on the lower side relative to the upper disc 110. The second direction Y of the present application refers to the length direction of the vacuum adsorption device 10, that is, the direction from left to right of the vacuum adsorption device 10 or the direction from right to left of the vacuum adsorption device 10. In the present application, the rotating ring 620 is arranged on the left side relative to the driving structure 510, and in the present application, the driving structure 510 is arranged on the right side relative to the rotating ring 620.

[0070] The accompanying drawings Figure 1 is a structural schematic view of the vacuum adsorption device 10 of the present application. The accompanying drawings Figure 2 is another structural schematic view of the vacuum adsorption device 10 of the present application. Please refer to the accompanying drawings Figure 1 and Figure 2As shown, the vacuum adsorption device 10 of the present application comprises an adsorption disc 100, which is the main structure of the vacuum adsorption device 10 of the present application, and the rest components of the vacuum adsorption device 10 are installed in the adsorption disc 100. The side of the adsorption disc 100 along the first direction X is an adsorption surface, and a plurality of adsorption grooves 140 are arranged on the side of the adsorption disc 100 along the first direction X. The adsorption grooves 140 extend downward from the adsorption surface to the inside of the adsorption disc 100. The adsorption grooves 140 are provided with openings outward, and the adsorption grooves 140 realize vacuum adsorption of the silicon wafer through the openings.

[0071] In an embodiment, the adsorption grooves 140 are annular structures, and the adsorption grooves 140 are arranged around the center of the adsorption disc 100. Further, the plurality of adsorption grooves 140 are arranged at intervals along the radial direction, and the adsorption grooves 140 are circular structures. The diameter of the adsorption grooves 140 is 200mm to 600mm.

[0072] In an embodiment, the adsorption disc 100 is a cylindrical structure, and the adsorption disc 100 is coaxially arranged with the adsorption grooves 140.

[0073] Please refer to the accompanying drawings Figure 1 and the accompanying drawings Figure 2 As shown, the adsorption disc 100 of the present application comprises an upper disc 110, a middle disc 120 and a lower disc 130 arranged in sequence along the first direction X. The middle disc 120 is arranged between the upper disc 110 and the lower disc 130, and the adsorption grooves 140 and the adsorption surface of the present application are arranged on the upper disc 110. The upper disc 110 is provided with first fixing holes 150, the middle disc 120 is provided with first fixing holes 150 and second fixing holes 160, and the lower disc 130 is provided with second fixing holes 160. The first fixing member connects the upper disc 110 and the middle disc 120 through the first fixing holes 150, and the second fixing member connects the middle disc 120 and the lower disc 130 through the second fixing holes 160.

[0074] In an embodiment, the upper disc 110, the middle disc 120 and the lower disc 130 are cylindrical structures, and the diameters of the upper disc 110, the middle disc 120 and the lower disc 130 are consistent. Further, the upper disc 110, the middle disc 120 and the lower disc 130 are coaxially arranged in the present application.

[0075] Please refer to the accompanying drawings Figure 1 and the accompanying drawings Figure 2 As shown, the adsorption disc 100 of the present application further comprises a transmission cavity 200, which is located in the adsorption disc 100. The first end of the transmission cavity 200 communicates with the adsorption grooves 140, and the second end of the transmission cavity 200 communicates with a vacuum generating device. In the present application, the vacuum generating device is a vacuum pump, which realizes negative pressure of the adsorption grooves 140 through the transmission cavity 200, and further realizes vacuum adsorption of the silicon wafer on the adsorption surface.

[0076] In an embodiment, the transmission cavity 200 is arranged along the first direction X. Further, the transmission cavity 200 comprises an upper cavity 210 and a lower cavity 220 arranged along the first direction X, the upper cavity 210 and the lower cavity 220 are communicated, and the upper cavity 210 is communicated with the adsorption groove 140, and the lower cavity 220 is communicated with the vacuum generating device, so that the vacuum generating device realizes the negative pressure in the adsorption groove 140 through the transmission cavity 200, and further realizes the vacuum adsorption of the silicon wafer.

[0077] In an embodiment, the upper cavity 210 comprises a first cavity 211 and a second cavity 212 arranged along the first direction X, the first cavity 211 is located in the upper disc 110, the upper cavity 210 and the adsorption groove 140 penetrate the upper disc 110 together, the second cavity 212 is located in the middle disc 120, the second cavity 212 penetrates the middle disc 120, and the lower cavity 220 is located in the lower disc 130, and the lower cavity 220 is formed by extending downward from the upper surface of the lower disc 130 to the inside of the lower disc 130.

[0078] In the present application, the number of transmission cavities 200 corresponds to the number of adsorption grooves 140, that is, the bottom of each adsorption groove 140 is provided with one transmission cavity 200. For subsequent control convenience, the plurality of transmission cavities 200 are arranged on the same straight line.

[0079] Please refer to the drawings Figure 1 and Figure 2 It is shown that the adsorption disc 100 of the present application further comprises an air inlet cavity 230, and the vacuum generating device is connected with the lower cavity 220 through the air inlet cavity 230. Further, when the lower cavity 220 is provided with a plurality of lower cavities 220, the lower cavities 220 are communicated with each other, so that when the air inlet cavity 230 is communicated with one of the lower cavities 220, the remaining lower cavities 220 can also be communicated with the air inlet cavity 230.

[0080] In an embodiment, the air inlet cavity 230 is arranged along the second direction Y.

[0081] Please refer to the drawings Figure 1 and Figure 2 It is shown that the vacuum adsorption device 10 of the present application comprises a third sealing member 170, and the third sealing member 170 is arranged between the upper disc 110 and the middle disc 120 and between the middle disc 120 and the lower disc 130, and further, the third sealing member 170 is sleeved in the transmission cavity 200. When the upper disc 110 and the middle disc 120 abut, the sealing performance of the first cavity 211 and the second cavity 212 when connected can be ensured. When the middle disc 120 and the lower disc 130 abut, the sealing performance of the second cavity 212 and the lower cavity 220 when connected can be ensured.

[0082] In an embodiment, the third sealing member 170 is composed of rubber material.

[0083] Please refer to the drawings Figure 1 and Figure 2As shown, the lower disc 130 of the present application is further provided with a second accommodating cavity 131, which is in communication with the lower cavity 220.

[0084] Please refer to the accompanying drawings Figure 1 and the accompanying drawings Figure 2 As shown, the vacuum adsorption device 10 of the present application comprises a switching assembly 300 and a transmission assembly 400. The switching assembly 300 is located in the transmission cavity 200, and further the main body of the switching assembly 300 is located in the upper cavity 210. The connection between the switching assembly 300 and the first cavity 211 is a sealed connection, so as to ensure that the communication and plugging between the upper cavity 210 and the lower cavity 220 can only be carried out through the switching assembly 300. The transmission assembly 400 is located in the transmission cavity 200, and further the main body of the transmission assembly 400 is located in the lower cavity 220. The transmission assembly 400 is in transmission connection with the switching assembly 300, so as to drive the switching assembly 300 to move in the transmission cavity 200, and to form the plugging state and the communication state of the vacuum adsorption device 10. In the plugging state, the upper cavity 210 and the lower cavity 220 are disconnected under the plugging of the switching assembly 300. At this time, the vacuum generating device cannot form the negative pressure in the adsorption groove 140 through the transmission cavity 200. In the communication state, the upper cavity 210 and the lower cavity 220 are connected under the communication of the switching assembly 300. At this time, the vacuum generating device forms the negative pressure in the adsorption groove 140 through the transmission cavity 200.

[0085] Further, any transmission cavity 200 can be opened by driving the transmission assembly 400, and the remaining transmission cavities 200 can still be in the disconnected state. Thus, the automatic control of the on-off of the adsorption groove 140 can be realized.

[0086] The accompanying drawings Figure 3 is a structural schematic view of the transmission assembly 400 of the present application. Please refer to the accompanying drawings Figure 3 As shown, the transmission assembly 400 of the present application comprises a driving member 500 and a transmission member 600. The driving member 500 is in transmission connection with the transmission member 600, and the driving member 500 is used to drive the transmission member 600 to rotate. The switching assembly 300 is arranged on one side of the driving member 500, and the transmission member 600 is in transmission connection with the switching assembly 300. Thus, the rotation of the transmission member 600 is converted into the linear motion of the switching assembly 300 in the transmission cavity 200 along the first direction X, so as to form the switching of the plugging state and the communication state.

[0087] In an embodiment, the driving member 500 comprises a driving structure 510 and an intermediate structure 520, the driving structure 510 is connected with the transmission member 600 through the intermediate structure 520 to drive the transmission member 600 to rotate. The transmission member 600 is provided with an input structure 630 close to one side of the driving member 500, and the input structure 630 refers to the input of the rotating motion. The driving structure 510 comprises a rack and a transverse driving member connected with the rack to drive the rack to move along the second direction Y. The intermediate structure 520 comprises a first driving wheel, a second driving wheel and a connecting rod, the two ends of the connecting rod are respectively connected with the first driving wheel and the second driving wheel, and the first driving wheel and the second driving wheel are coaxially arranged. The first driving wheel is drivingly connected with the rack, the driving structure 510 is used to drive the first driving wheel to rotate, and the second driving wheel is drivingly connected with the input structure 630 to switch the rotating motion of the first driving wheel into the rotating motion of the transmission member 600. Further, the first driving wheel is a cylindrical gear structure, and the second driving wheel and the input structure 630 are bevel gear structures.

[0088] In an embodiment, the driving member 500 can also be a driving motor directly connected with the transmission member 600 to drive the transmission member 600 to rotate.

[0089] Please refer to the accompanying drawings Figure 3 The transmission member 600 of the present application comprises a transmission rod 610, the transmission rod 610 rotates under the driving of the driving member 500, the transmission rod 610 is arranged along the second direction Y, and in specific installation, the transmission rod 610 is located in the lower disc 130, and part of the transmission rod 610 is located in the lower cavity 220.

[0090] Please refer to the accompanying drawings Figure 3 The transmission member 600 of the present application further comprises a rotating ring 620, the number of the rotating ring 620 corresponds to the number of the switching assembly 300, that is, each rotating ring 620 controls one switching assembly 300. The rotating rod is arranged on the transmission rod 610, and the rotating ring 620 is arranged in intervals along the second direction Y, and the rotating ring 620 abuts against the switching assembly 300 to drive the switching assembly 300 to move.

[0091] In an embodiment, the rotating ring 620 is a cylindrical structure, and the rotating center of the rotating ring 620 coincides with the rotating center of the transmission rod 610.

[0092] Please refer to the accompanying drawings Figure 3 The transmission rod 610 is further provided with a limiting ring 710, the limiting ring 710 is part of the limiting member 700, and the limiting member 700 is used to realize the stability of the transmission assembly 400 relative to the position. The limiting ring 710 is arranged on the transmission rod 610, and the limiting ring 710 is arranged in intervals on the transmission rod 610.

[0093] The drawings Figure 4is a structural schematic diagram of the rotating ring 620 of the present application. Please refer to the attached Figure 4 As shown in the figure, the rotating ring 620 of the present application includes a driving surface 621 and a second driving groove 622. When the driving surface 621 is in abutment with the switching assembly 300 under the rotation of the rotating ring 620, a blocking state is formed. When the second driving groove 622 is in abutment with the switching assembly 300, a communication state is formed. The outer surface of the rotating ring 620 in the circumferential direction is the driving surface 621, and the rotating ring 620 forms an abutment point when it is in abutment with the switching assembly 300. When the rotating ring 620 rotates and the driving surface 621 is in abutment with the switching assembly 300, the height of the abutment point in the first direction X remains unchanged to ensure the stability of the blocking state. The driving surface 621 on the rotating ring 620 is recessed radially inward to form the second driving groove 622, and the second driving groove 622 is provided with an opening outward. The switching assembly 300 can enter the second driving groove 622 through the opening to form a communication state. When the rotating ring 620 rotates, the height of the abutment point of the driving surface 621 in the first direction X when it is in abutment with the switching assembly 300 is higher than the height of the abutment point of the second driving groove 622 in the first direction X when it is in abutment with the switching assembly 300.

[0094] In an embodiment, the second driving groove 622 is in transition connection with the driving surface 621.

[0095] The attached Figure 5 is another structural schematic diagram of the rotating ring 620 of the present application. Please refer to the attached Figure 5 As shown in the figure, the projection of the rotating ring 620 of the present application along the second direction Y on the bottom surface of the transmission rod 610 is shown, which contains all the second driving grooves 622. In this projection, each second driving groove 622 does not intersect with each other. Therefore, during the rotation of the transmission rod 610, only one of all the switching assemblies 300 will enter the second driving groove 622, that is, only one of each suction groove 140 in the vacuum suction device 10 will be in a communication state, thereby realizing the precise control of the suction grooves 140 in the vacuum suction device 10.

[0096] The attached Figure 6 is a structural schematic diagram of the limiting ring 710 of the present application. Please refer to the attached Figure 6 As shown in the figure, the limiting ring 710 of the present application is a multi-prism structure, and the circumferential outer surface of the limiting ring 710 forms a plurality of limiting surfaces 711, that is, each side surface of the limiting ring 710 forms a limiting surface 711. The limiting surface 711 is correspondingly arranged with the second driving groove 622, and the specific corresponding process will be further explained in the subsequent figures.

[0097] The attached Figure 7 The attached Figure 2 is a partial enlarged view of part A in the figure. Please refer to the attached Figure 7As shown, a third accommodating cavity 740 is arranged in the lower disc 130 along the first direction X, and the third accommodating cavity 740 is used to arrange the limiting member 700. The transmission rod 610 intersects the third accommodating cavity 740, so as to facilitate the limiting ring 710 to be arranged in the third accommodating cavity 740.

[0098] Please refer to the accompanying drawings Figure 7 As shown, the limiting member 700 of the present application further comprises a first elastic member 730 and a limiting block 720. The first elastic member 730 is arranged in the third accommodating cavity 740 along the first direction X. The first end of the first elastic member 730 abuts or is connected with the bottom of the third accommodating cavity 740. The second end of the first elastic member 730 abuts or is connected with the limiting block 720. The limiting block 720 and the limiting ring 710 are both located in the third accommodating cavity 740. The limiting block 720 is located between the first elastic member 730 and the limiting ring 710. The surface of the limiting block 720 close to the limiting ring 710 can be attached to the limiting surface 711 of the limiting ring 710. Under the rotation of the limiting ring 710, the limiting block 720 abuts each limiting surface 711 in the rotation direction in turn. When one limiting surface 711 of the limiting ring 710 abuts the limiting block 720, it means that one of all the switching assemblies 300 falls into the second driving groove 622. At this time, the abutment of the limiting surface 711 and the limiting block 720 can ensure the stability of the switching assembly 300 in the second driving groove 622, because if other switching assemblies 300 need to be switched to fall into the second driving groove 622, the transmission rod 610 needs to be rotated and the pre-tightening force of the first elastic member 730 needs to be overcome at the same time. The arrangement of the limiting member 700 can further increase the accuracy range of the transmission assembly 400 during transmission, because when the limiting ring 710 rotates, if the limiting block 720 passes through the included angle formed by the limiting surfaces 711, the limiting surface 711 and the limiting block 720 will be quickly attached under the driving of the first elastic member 730, because when the transmission rod 610 is not accurately rotated, the first elastic member 730 can further rotate the transmission rod 610 to realize the accurate positioning of the switching assembly 300.

[0099] In an embodiment, the first elastic member 730 is a compression spring.

[0100] The accompanying drawings Figure 8 is a structural schematic view of the switching assembly 300 of the present application. Please refer to the accompanying drawings Figure 7As shown, the switching assembly 300 of the present application comprises a fixing member 310 fixed in the transmission cavity 200, and the fixing member 310 does not have relative movement with the adsorption disc 100. In the present application, the fixing member 310 comprises a first fixing segment 311 and a second fixing segment 312 arranged in sequence along the first direction X, and the cross-sectional area of the first fixing segment 311 along the second direction Y is different from that of the second fixing segment 312. In an embodiment, the cross-sectional area of the first fixing segment 311 along the second direction Y is greater than that of the first fixing segment 311 along the second direction Y, and the cross-sectional area of the first cavity 211 along the second direction Y is smaller than that of the second cavity 212 along the second direction Y, the first fixing segment 311 is located in the second cavity 212, and the second fixing segment 312 is located in the first cavity 211. The first fixing segment 311 is connected with the second fixing segment 312, and the connection between the second fixing segment 312 and the second fixing segment 312 is fixed connection. Further, the first fixing segment 311 and the second fixing segment 312 are integrally arranged.

[0101] Please refer to the accompanying drawings Figure 8 As shown, the fixing member 310 of the present application further comprises a first gas hole 313 and a second gas hole 314, the first gas hole 313 is arranged through the first fixing segment 311 along the first direction X, the second gas hole 314 is arranged through the second fixing segment 312 along the first direction X, the first gas hole 313 is connected with the second gas hole 314, and the cross-sectional area of the first gas hole 313 along the second direction Y is greater than that of the second gas hole 314 along the second direction Y, so as to facilitate the arrangement of the moving member 320 in the first gas hole 313. Because the cross-sectional area of the first gas hole 313 along the second direction Y is different from that of the second gas hole 314, an interface 315 is formed in the first gas hole 313 and the second gas hole 314, the interface 315 intersects with the first gas hole 313 and the second gas hole 314, the first gas hole 313 is communicated with the lower cavity 220, and the second gas hole 314 is communicated with the upper cavity 210. Further, the first gas hole 313 is communicated with the lower cavity 220 through the second cavity 212. Therefore, the switching between the blocking state and the communication state completely depends on the relative movement of the moving member 320.

[0102] Please refer to the accompanying drawings Figure 8As shown, the switching assembly 300 of the present application further comprises a moving piece 320, which comprises an abutting head 323 and a first connecting piece 324. The abutting head 323 is arranged at the first end of the moving piece 320. The abutting head 323 is provided with an abutting surface 323-1 on the side close to the transmission member 600. The abutting head 323 abuts against the second driving groove 622 or the driving surface 621 on the rotating ring 620 through the abutting surface 323-1, and the abutting head 323 can enter the second driving groove 622, i.e. the first end of the moving piece 320 abuts against the transmission member 600. The second end of the moving piece 320 is located in the first gas hole 313. The second end of the moving piece 320 is provided with a blocking plate 321. When the blocking plate 321 abuts against the boundary surface 315, the second gas hole 314 is completely blocked by the blocking plate 321, so as to realize the isolation of the first gas hole 313 and the second gas hole 314.

[0103] In the present application, the two ends of the first connecting piece 324 are respectively provided with the abutting head 323 and the blocking plate 321, so as to constitute the two ends of the moving piece 320. The first connecting piece 324 is provided with a first accommodating cavity 324-1 from the abutting head 323 to the blocking plate 321. A plurality of first driving grooves 324-2 are radially arranged on the first connecting piece 324. The first driving grooves 324-2 are connected with the first accommodating cavity 324-1, and the first driving grooves 324-2 are arranged along the first direction X at the same time.

[0104] Please refer to the accompanying drawings Figure 8 As shown, the fixed piece 310 further comprises an abutting plate 316 and a second connecting piece 317. The abutting plate 316 is arranged in the first gas hole 313 and close to the abutting head 323. The second connecting piece 317 is arranged between the abutting plate 316 and the first fixed segment 311, and the second connecting piece 317 is also located in the first gas hole 313. The first end of the second connecting piece 317 is connected with the side wall of the first gas hole 313. After the second connecting piece 317 is connected with the first fixed segment 311, it passes through the first driving groove 324-2 and is connected with the abutting plate 316. The abutting plate 316 is circumferentially provided with a plurality of second connecting pieces 317. When the moving piece 320 floats up and down along the first direction X, the second connecting piece 317 also forms relative movement with the first driving groove 324-2 at the same time. The first driving groove 324-2 is used to limit the movement range and direction of the moving piece 320.

[0105] In an embodiment, the cross section of the abutting plate 316 along the second direction Y is consistent with the shape of the cross section of the first gas hole 313 along the second direction Y. Further, the cross section of the abutting plate 316 along the second direction Y and the cross section of the first gas hole 313 along the second direction Y are both circular.

[0106] In an embodiment, the second connecting piece 317 is a rod structure.

[0107] Please refer to the accompanying drawings Figure 8As shown, the switching assembly 300 of the present application further comprises a second elastic member 322 connected to the moving member 320 and the fixed member 310 respectively. In the present application, the second elastic member 322 is arranged in a first accommodating cavity 324-1 between the abutting plate 316 and the blocking plate 321, and is connected to the blocking plate 321 and the abutting plate 316. In the present application, the second elastic member 322 is a tension spring. When the moving member 320 moves in the first direction X, the second elastic member 322 always provides a driving force to the blocking plate 321 to move close to the abutting plate 316, so as to realize that the first end of the moving member 320 is always in abutment with the transmission member 600. Under the rotation of the transmission member 600, the blocking plate 321 is in abutment with or away from the interface 315, so as to realize the switching between the blocking state and the communication state. The working process of the vacuum suction accessory will be further illustrated in the subsequent drawings.

[0108] Please refer to the accompanying drawings Figure 8 As shown, the switching assembly 300 of the present application further comprises a first sealing member 330 sleeved on the periphery of the second gas hole 314. The first sealing member 330 at least partially protrudes from the interface 315 and forms a first protruding portion, which is arranged towards the blocking plate 321. Thus, in the blocking state, the blocking plate 321 can be in contact with the first sealing member 330, so as to enhance the insulation efficiency between the first gas hole 313 and the second gas hole 314, and avoid that the first gas hole 313 and the second gas hole 314 are still breathable in the blocking state.

[0109] Please refer to the accompanying drawings Figure 8 As shown, the switching assembly 300 of the present application further comprises a second sealing member 340 sleeved on the periphery of the second fixed segment 312. The second sealing member 340 is arranged at least partially on the outer surface of the second fixed segment 312. When the switching assembly 300 is installed in the transmission cavity 200, the second fixed segment 312 can be sealingly connected to the first cavity 211 through the second sealing member 340.

[0110] In an embodiment, the second sealing member 340 and the third sealing member 170 of the present application are both made of rubber material.

[0111] The accompanying drawings Figure 9 is a structural schematic view of the switching assembly 300 of the present application in the blocking state. Please refer to the accompanying drawings Figure 9As shown, under the rotation of the transmission rod 610, the driving surface 621 of the rotating ring 620 abuts against the abutting surface 323-1 of the abutting head 323, and drives the abutting head 323 to move downward along the first direction X until the blocking plate 321 contacts and compresses the first sealing member 330, at this time, the second elastic member 322 is elongated, and the connection between the first gas hole 313 and the second gas hole 314 is blocked by the blocking plate 321, and the connection between the upper cavity 210 and the lower cavity 220 is also blocked at the same time, at this time, the adsorption groove 140 corresponding to the switching assembly 300 is in a blocked state.

[0112] attached Figure 10 is a structural schematic diagram of the switching assembly 300 in a connected state. Please refer to the attached Figure 10 As shown, under the rotation of the transmission rod 610, when the second driving groove 622 of the rotating ring 620 corresponds to the contact surface of the abutting head 323, the second elastic member 322 drives the abutting head 323 to enter the second driving groove 622 to realize the upward movement of the abutting head 323 along the first direction X, and the blocking plate 321 leaves the contact surface, the first gas hole 313 and the second gas hole 314 are connected, and the upper cavity 210 and the lower cavity 220 are also connected at the same time, at this time, the adsorption groove 140 corresponding to the switching assembly 300 is in a connected state.

[0113] Embodiment 2:

[0114] Please refer to the attached Figure 11 to the attached Figure 12 As shown, a specific embodiment of the vacuum adsorption device 10 of the present application is shown. The vacuum adsorption device 10 of the present application realizes vacuum adsorption of the object to be adsorbed, and the vacuum adsorption device 10 of the present application is applied to the field of silicon wafer processing. In an embodiment, the vacuum adsorption device 10 of the present application is applied to the adsorption of silicon wafers.

[0115] The difference between this embodiment and embodiment 1 is the specific structure of the driving assembly, and the structures of the other components of the vacuum adsorption device 10 are described in embodiment 1, which will not be described again in this embodiment.

[0116] Please refer to the attached Figure 11 and the attached Figure 12 As shown, the present application is described in the attached Figure 11 and the attached Figure 12As shown, the switching assembly 300 of the present application comprises a fixing member 310 fixed in the transmission cavity 200, and the fixing member 310 does not have relative movement with the adsorption disc 100. In the present application, the fixing member 310 comprises a first fixing segment 311 and a second fixing segment 312 arranged in sequence along the first direction X, and the cross-sectional area of the first fixing segment 311 along the second direction Y is different from that of the second fixing segment 312. In an embodiment, the cross-sectional area of the first fixing segment 311 along the second direction Y is greater than that of the first fixing segment 311 along the second direction Y, and the cross-sectional area of the first cavity 211 along the second direction Y is smaller than that of the second cavity 212 along the second direction Y, the first fixing segment 311 is located in the second cavity 212, and the second fixing segment 312 is located in the first cavity 211. The first fixing segment 311 is connected with the second fixing segment 312, and the connection between the first fixing segment 311 and the second fixing segment 312 is fixed connection. Further, the first fixing segment 311 and the second fixing segment 312 are integrally arranged.

[0117] Please refer to the accompanying drawings Figure 11 and the accompanying drawings Figure 12 As shown, the fixing member 310 of the present application further comprises a first gas hole 313 and a second gas hole 314, the first gas hole 313 is arranged through the first fixing segment 311 along the first direction X, the second gas hole 314 is arranged through the second fixing segment 312 along the first direction X, the first gas hole 313 is connected with the second gas hole 314, and the cross-sectional area of the first gas hole 313 along the second direction Y is greater than that of the second gas hole 314 along the second direction Y, so as to facilitate the arrangement of the moving member 320 in the first gas hole 313. Because the cross-sectional area of the first gas hole 313 along the second direction Y is different from that of the second gas hole 314, an interface 315 is formed in the first gas hole 313 and the second gas hole 314, the interface 315 intersects with the first gas hole 313 and the second gas hole 314, the first gas hole 313 is communicated with the lower cavity 220, and the second gas hole 314 is communicated with the upper cavity 210. Further, the first gas hole 313 is communicated with the lower cavity 220 through the second cavity 212. Therefore, the switching between the blocking state and the communication state completely depends on the relative movement of the moving member 320.

[0118] Please refer to the accompanying drawings Figure 11 and the accompanying drawings Figure 12As shown, the switching assembly 300 of the present application further comprises a moving piece 320, which comprises an abutting head 323 and a first connecting piece 324. The abutting head 323 is arranged at the first end of the moving piece 320. The abutting head 323 is provided with an abutting surface 323-1 on the side close to the transmission piece 600. The abutting head 323 abuts against the second driving groove 622 or the driving surface 621 on the rotating ring 620 through the abutting surface 323-1, and can enter the second driving groove 622, i.e., the first end of the moving piece 320 abuts against the transmission piece 600. The second end of the moving piece 320 is located in the first air hole 313, and the second end of the moving piece 320 is provided with a blocking plate 321. When the blocking plate 321 abuts against the interface 315, the second air hole 314 is completely covered by the blocking plate 321, so as to realize the isolation of the first air hole 313 and the second air hole 314.

[0119] In the present application, the two ends of the first connecting piece 324 are respectively provided with the abutting head 323 and the blocking plate 321, so as to constitute the two ends of the moving piece 320. Further, the first connecting piece 324 is connected with the blocking plate 321 through the third elastic piece 318.

[0120] In an embodiment, the third elastic piece 318 is a compression spring.

[0121] Please refer to the accompanying drawings Figure 11 and the accompanying drawings Figure 12 As shown, the first connecting piece 324 of the present application is provided with a first driving groove 324-2 on the side close to the abutting head 323, which is in communication with the first accommodating cavity 324-1 and the lower cavity 220 respectively.

[0122] Please refer to the accompanying drawings Figure 11 and the accompanying drawings Figure 12 As shown, the switching assembly 300 of the present application further comprises a second elastic piece 322, which is connected with the moving piece 320 and the fixed piece 310 respectively. In the present application, the second elastic piece 322 is sleeved outside the first connecting piece 324, and is connected with the abutting head 323 and the first fixed section 311 respectively. The second elastic piece 322 always gives the abutting head 323 a driving force away from the first fixed section 311, so as to realize that the first end of the moving piece 320 always abuts against the transmission piece 600. Under the rotation of the transmission piece 600, the blocking plate 321 abuts against or is away from the interface 315, so as to realize the switching of the blocking state and the communication state. The working process of the vacuum suction accessory will be further explained in the subsequent drawings. In the present application, the blocking plate 321 has a gas permeable groove 321-1 between the side wall of the first air hole 313, i.e., the cross section of the blocking plate 321 in the second direction Y is smaller than the cross section of the first air hole 313 in the second direction Y.

[0123] In an embodiment, the second elastic piece 322 is a compression spring.

[0124] Please refer to the attached Figure 11 and the attached Figure 12 As shown in the attached and the attached

[0125] As shown in the attached Figure 11 and the attached Figure 12 As shown in the attached and the attached

[0126] In an embodiment, the second sealing member 340 and the third sealing member 170 are both made of rubber material.

[0127] As shown in the attached Figure 11 When the transmission rod 610 rotates, the driving surface 621 of the rotating ring 620 abuts against the abutting surface 323-1 of the abutting head 323, and drives the abutting head 323 to move downward along the first direction X until the blocking plate 321 contacts the interface 315 and compresses the first sealing member 330. At this time, the second elastic member 322 is elongated, and the connection between the first air hole 313 and the second air hole 314 is blocked by the blocking plate 321. Meanwhile, the connection between the upper cavity 210 and the lower cavity 220 is also blocked. At this time, the adsorption groove 140 corresponding to the switching assembly 300 is in a blocked state.

[0128] As shown in the attached Figure 12 When the transmission rod 610 rotates, the second driving groove 622 of the rotating ring 620 corresponds to the contact surface of the abutting head 323, the second elastic member 322 drives the abutting head 323 into the second driving groove 622, so as to realize the upward movement of the abutting head 323 along the first direction X, and the blocking plate 321 leaves the contact surface. The first air hole 313 and the second air hole 314 are in communication, and the upper cavity 210 and the lower cavity 220 are also in communication at the same time. At this time, the adsorption groove 140 corresponding to the switching assembly 300 is in a connected state.

[0129] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. Also, the specific features, structures, materials or characteristics described can be combined in an appropriate manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0130] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0131] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A vacuum suction device, characterized by, The vacuum adsorption device comprises, an adsorption disc, a surface of one side of the adsorption disc in a first direction is provided with a plurality of adsorption grooves, and the adsorption grooves are provided with openings on the outward side; a transmission cavity, the transmission cavity is located in the adsorption disc, a first end of the transmission cavity is communicated with the adsorption grooves, and a second end of the transmission cavity is communicated with a vacuum generating device; a switching assembly and a transmission assembly, the switching assembly is located in the transmission cavity, the transmission cavity comprises an upper cavity and a lower cavity, the upper cavity is communicated with the adsorption grooves, the lower cavity is communicated with the vacuum generating device, the transmission assembly is in transmission connection with the switching assembly, so as to drive the switching assembly to move in the transmission cavity, and a blocking state and a communication state of the adsorption grooves are formed; wherein, in the blocking state, the upper cavity and the lower cavity are disconnected under the blocking of the switching assembly; in the communication state, the upper cavity and the lower cavity are connected under the communication of the switching assembly; the transmission assembly comprises, a driving member and a transmission member, the driving member is in transmission connection with the transmission member, the switching assembly is located on one side of the driving member, the driving member is used for driving the transmission member to rotate, and the transmission member converts the rotary motion into the linear motion of the switching assembly in the transmission cavity in the first direction, so as to switch the blocking state and the communication state; the transmission member comprises, a transmission rod, the transmission rod is provided with a rotary input structure, a plurality of rotary rings are arranged on the transmission rod in a second direction, an outer surface in the circumferential direction of the rotary ring is a driving surface, a second driving groove is formed by recessing radially inward from the driving surface on the rotary ring, the second driving groove is provided with an opening outward, and the second driving grooves of the rotary rings are not intersected in the projection of the bottom surface of the transmission rod in the second direction; wherein, the switching assembly and the second driving groove form the communication state, and the switching assembly and the driving surface form the blocking state.

2. The vacuum chuck of claim 1, wherein The vacuum adsorption device further comprises a limiting member, the limiting member comprises, a limiting ring, one or more limiting rings are arranged on the transmission rod in the second direction, a plurality of limiting surfaces are formed on the outer surface in the circumferential direction of the limiting ring, and the limiting surfaces are correspondingly arranged with the second driving grooves; a limiting block and a first elastic member, the limiting block and the first elastic member are located on one side of the limiting ring in the first direction, the first elastic member is used for driving the limiting block to abut against the outer surface in the circumferential direction of the limiting ring, and under the rotation of the limiting ring, the limiting block abuts against each limiting surface in the rotation direction in turn.

3. The vacuum chuck of claim 1, wherein the switching assembly comprises, The fixed part comprises a first fixed section and a second fixed section arranged in sequence along a first direction, the first fixed section is connected with the second fixed section, a first air hole is arranged through the first fixed section along the first direction, a second air hole is arranged through the second fixed section along the first direction, the first air hole is connected with the second air hole, and an interface is formed between the first air hole and the second air hole, the first fixed section is located in the upper cavity, the first air hole is communicated with the upper cavity, the second fixed section is located in the lower cavity, and the second air hole is communicated with the lower cavity; The moving part, the sealing plate, the first end of the moving part is abutted with the transmission part, the second end of the moving part is located in the first air hole, the second end of the moving part is provided with a sealing plate, and the sealing plate completely covers the second air hole when the sealing plate is abutted with the interface; The second elastic part is connected with the moving part and the fixed part respectively, the first end of the moving part is always abutted with the transmission part under the driving of the second elastic part, and the sealing plate is abutted with or separated from the interface to form the switching of the sealing state and the communication state.

4. The vacuum chuck of claim 3, wherein The moving part comprises, The abutting head is provided with an abutting surface on the side close to the transmission part, the abutting head is abutted with the second driving groove or the driving surface through the abutting surface, and the abutting head can enter or exit the second driving groove; The first connecting part is connected with the sealing plate through the abutting head, and a first containing cavity is arranged in the first connecting plate from the abutting head to the sealing plate, a plurality of first driving grooves are arranged through the first connecting part in the radial direction, and the first driving grooves are communicated with the first containing cavity.

5. The vacuum chuck of claim 4, wherein The fixed part comprises, The abutting plate is arranged in the first air hole, and the abutting plate is arranged close to the abutting head; The second connecting part is arranged between the abutting plate and the first fixed section, the second connecting part is connected with the first fixed section, passes through the first driving groove and is connected with the abutting plate, the second elastic part is arranged in the first containing cavity between the abutting plate and the sealing plate, and the second elastic part always gives the driving force of the sealing plate close to the abutting plate.

6. The vacuum chuck of claim 5, wherein The switching assembly comprises, The first sealing part is arranged on the periphery of the second air hole, the first sealing part is at least partially arranged on the interface to form a first protruding part, and the first protruding part is arranged towards the sealing plate; The second sealing part is arranged on the periphery of the second fixed section, and the second sealing part is at least partially arranged on the outer surface of the second fixed section.

7. The vacuum chuck of claim 3, wherein The moving part comprises, The abutting head is provided with an abutting surface on the side close to the transmission part, the abutting head is abutted with the second driving groove or the driving surface through the abutting surface, and the abutting head can enter or exit the second driving groove; The abutting head is connected with the blocking plate through the first connecting piece, the third elastic piece is arranged between the first connecting piece and the blocking piece, a first accommodating cavity is arranged from the abutting head to the blocking plate in the first connecting plate, and a first driving groove is arranged on the side of the first connecting piece close to the abutting head and is communicated with the first accommodating cavity and the lower cavity respectively.

8. The vacuum chucking device according to claim 7, wherein, The second elastic piece is sleeved outside the first connecting piece, the second elastic piece is connected with the abutting head and the first fixed segment respectively, the second elastic piece always gives the abutting head a driving force away from the first fixed segment, and the blocking plate has a gas permeable groove between the side wall of the first gas hole. A first sealing piece is sleeved outside the second gas hole, the first sealing piece is at least partially arranged to protrude from the interface to form a first protruding part, and the first protruding part is arranged towards the blocking plate. A second sealing piece is sleeved outside the second fixed segment, and the second sealing piece is at least partially arranged to protrude from the outer surface of the second fixed segment.

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