Evaporation coating method and device, electronic equipment and storage medium

Abstract

The invention relates to an evaporation coating method and device, electronic equipment and a storage medium. The method comprises the steps that an evaporation heat source is controlled to heat evaporation raw materials through first preset power; under the condition that the evaporation capacity of the evaporation raw materials reaches a preset condition, adjusting operation of the preset condition is executed, the power of the evaporation heat source is adjusted, and the preset condition is determined according to the change relation and the change principle of the evaporation capacity under the condition that the power of the evaporation heat source is not changed in the evaporation coating process; and the evaporation heat source is controlled through the adjusted power, the evaporation raw materials are heated, and evaporation coating is carried out. The problems that according to an evaporation coating method in the related technology, due to the fact that the temperature of a heat source and raw materials are in a changing state, the coating effect difference is large in different coating time periods, and even the coating requirement cannot be met, coating fails, and the quality is poor are solved.

Description

Technical Field

[0001] The invention relates to the technical field of metal plating, and in particular to an evaporation coating method, device, electronic equipment, and storage medium. Background Art

[0002] The device currently used for heating the material to be plated in evaporation coating is a crucible. First, the material to be plated is placed in the crucible and heated. The material to be plated begins to melt due to the heat and then evaporates onto the film. However, if the same power is used for heating during the evaporation coating process, the evaporation efficiency of the same power evaporation coating, especially before and after the material to be plated melts, will be greatly different. If the same power is used to melt the material to be plated and then continued to heat after melting, the coating thickness at different locations on the film will be different.

[0003] Moreover, the total amount of material to be plated will gradually decrease as the evaporation coating process proceeds. With the same heating power, the evaporation amount will change, which will lead to uneven coating.

[0004] Regarding the evaporation coating method in the related technology, since the heat source temperature and raw materials are in a changing state, the coating effect varies greatly in different coating time periods, and may even fail to meet the coating requirements, resulting in coating failure and poor quality. The industry has not yet proposed an effective solution. Summary of the invention

[0005] The embodiments of the present invention provide an evaporation coating method, device, electronic device, and storage medium, which at least solve the problem that the evaporation coating method in the related art has large differences in coating effects at different time periods due to the changing temperature of the heat source and the raw materials, and may even fail to meet the coating requirements, resulting in coating failure and poor quality.

[0006] According to an embodiment of the present application, an evaporation coating method is provided, comprising: controlling an evaporation heat source to heat an evaporation raw material through a first preset power; when the evaporation amount of the evaporation raw material reaches a preset condition, performing an adjustment operation of the preset condition to adjust the power of the evaporation heat source, wherein the preset condition is determined according to a change relationship and a change principle of the evaporation amount during the evaporation coating process when the power of the evaporation heat source remains unchanged; controlling the evaporation heat source through the adjusted power to heat the evaporation raw material to perform evaporation coating.

[0007] As an optional embodiment, when the evaporation amount of the evaporation raw material reaches a preset condition, an adjustment operation of the preset condition is performed, and before the power of the evaporation heat source is adjusted, the method also includes: dividing the coating process into sections according to the change relationship of the evaporation amount to obtain a plurality of different sections, wherein the plurality of sections include a plurality of coating sections with different coating efficiencies; according to the evaporation amount change principle of each section, the preset condition and the corresponding power adjustment method of the evaporation heat source are determined so that the evaporation amount of each coating section meets the coating requirements.

[0008] As an optional embodiment, the multiple coating sections include a temperature inefficient section, a high-efficiency evaporation section, and a material-deficient inefficient section; when the power of the evaporation heat source is fixed: the principle of change of evaporation amount in the temperature inefficient section is that the temperature of the evaporation raw material continues to rise, causing the evaporation amount to continue to increase; the principle of change of evaporation amount in the high-efficiency evaporation section is that the temperature of the evaporation raw material continues to rise, causing the evaporation amount to first increase to a peak value, and then the evaporation raw material decreases, causing the evaporation amount to continue to decrease from the peak value; the principle of change of evaporation amount in the material-deficient inefficient section is that the evaporation raw material continues to decrease, causing the evaporation amount to continue to decrease.

[0009] As an optional embodiment, for the temperature inefficiency section, the preset conditions and the corresponding power adjustment method of the evaporation heat source are determined according to the evaporation amount change principle of each section, so that the evaporation amount of each coating section meets the coating requirements, including: entering the temperature inefficiency section, using the first preset power to heat and evaporate the evaporation raw material, so that the evaporation amount reaches a first preset value within a first preset time; the first preset condition is that when the evaporation amount of the evaporation raw material reaches the first preset value, the corresponding adjustment method is to reduce the first preset power to a second preset power, and use the second preset power to heat and evaporate the evaporation raw material until entering the high-efficiency evaporation section.

[0010] As an optional embodiment, for the high-efficiency evaporation section, according to the principle of evaporation amount change in each section, the power of the evaporation heat source is adjusted so that the evaporation amount of each coating section meets the coating requirements, including: entering the high-efficiency evaporation section, using the second preset power to heat and evaporate the evaporation raw material, the evaporation amount continues to increase, and monitoring whether the evaporation amount reaches the maximum value; after the evaporation amount increases to the maximum value, it continues to decrease; the second preset condition is that when it is detected that the evaporation amount is reduced to the second preset value, the corresponding adjustment method is to increase the second preset power to the third preset power; use the third preset power to heat and evaporate the evaporation raw material until the evaporation amount is reduced to the third preset value, and enter the material-deficient and inefficient section, wherein the third preset value is less than the second preset value and greater than the first preset value.

[0011] As an optional embodiment, for the short-material and inefficient section, the power of the evaporation heat source is adjusted according to the evaporation amount change principle of each section, so that the evaporation amount of each coating section meets the coating requirements, including: entering the short-material and inefficient section, using the third preset power to heat and evaporate the evaporation raw material, and the evaporation amount continues to decrease; when the evaporation amount decreases to a fourth preset value, the coating is ended and the short-material and inefficient section is exited, wherein the fourth preset value is less than the first preset value, and the evaporation amount of the fourth preset value is the maximum evaporation amount that cannot be used for evaporation coating.

[0012] As an optional embodiment, the multiple sections also include a starting heating section, which is used to heat the evaporation raw material after the coating begins, so that the evaporation amount gradually increases from zero to a fifth preset value, wherein the evaporation amount of the fifth preset value is the minimum evaporation amount that can be applied to the evaporation coating.

[0013] As an optional embodiment, for the starting heating section, the power of the evaporation heat source is adjusted according to the principle of change in the evaporation amount of each section, so that the evaporation amount of each coating section meets the coating requirements, including: after the coating process starts, the evaporation raw material is heated and evaporated with a first preset power, so that the evaporation amount of the evaporation raw material reaches the fifth preset value within a second preset time; wherein the fifth preset value is less than the first preset value, and the fifth preset value is not less than the fourth preset value.

[0014] According to an embodiment of the present application, an evaporation coating device is also provided, including: a heating module, used to control the evaporation heat source to heat the evaporation raw material through a first preset power; an adjustment module, used to perform the adjustment operation of the preset condition when the evaporation amount of the evaporation raw material reaches the preset condition, and adjust the power of the evaporation heat source, wherein the preset condition is determined according to the change relationship and change principle of the evaporation amount during the evaporation coating process when the power of the evaporation heat source remains unchanged; a control module, used to control the evaporation heat source through the adjusted power, heat the evaporation raw material, and perform evaporation coating.

[0015] According to an embodiment of the present application, an electronic device is also provided, including: a processor, and a memory storing a program, wherein the program includes instructions, and when the instructions are executed by the processor, the processor executes any one of the methods described above.

[0016] According to an embodiment of the present application, a non-transitory machine-readable medium storing computer instructions is also provided, wherein the computer instructions are used to enable the computer to execute any of the above methods.

[0017] According to an embodiment of the present application, a computer program product is also provided, including a computer program / instruction, and when the computer program / instruction is executed by a processor, any of the above methods is implemented.

[0018] The evaporation coating method provided by the embodiment of the present invention controls the evaporation heat source to heat the evaporation raw material through a first preset power; when the evaporation amount of the evaporation raw material reaches a preset condition, performs an adjustment operation of the preset condition to adjust the power of the evaporation heat source, and the preset condition is determined according to the change relationship and change principle of the evaporation amount in the evaporation coating process when the power of the evaporation heat source remains unchanged; the evaporation heat source is controlled by the adjusted power to heat the evaporation raw material to perform evaporation coating, which solves the problem in the related art that the evaporation coating method has a large difference in coating effect in different time periods of coating due to the changing state of the heat source temperature and the raw material, and even cannot meet the coating requirements, resulting in coating failure and poor quality, and achieves the technical effect of ensuring that the change of evaporation amount tends to be stable in the whole process of evaporation coating, so as to ensure that the coating effect is stable and always meets the coating requirements, and avoids the problems of coating failure and poor quality caused by uneven coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other embodiments can be obtained based on these drawings without creative work.

[0020] Figure 1 It is a flow chart of an evaporation coating method according to an embodiment of the present invention.

[0021] Figure 2 It is a schematic diagram of the relationship between the evaporation amount changes before and after the heat source power is adjusted in the embodiment created by the present invention.

[0022] Figure 3 It is a flow chart of an evaporation coating method according to an embodiment of the present invention.

[0023] Figure 4 It is a structural schematic diagram of the electronic device created by the present invention. DETAILED DESCRIPTION

[0024] The embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be construed as being limited to the embodiments described herein, which are instead provided to provide a more thorough and complete understanding of the present invention. It should be understood that the drawings and embodiments of the present invention are only for exemplary purposes and are not intended to limit the scope of protection of the present invention.

[0025] For convenience during the evaporation coating process, the same heat source power is generally used to heat the evaporation raw materials. During the entire evaporation process, the temperature of the evaporation raw materials will change slowly. After reaching the critical temperature of evaporation, the temperature remains unchanged, but the evaporation raw materials will gradually decrease. Both temperature and material quantity are factors that affect the evaporation amount. Therefore, if the evaporation amount is to be stable, it is necessary to consider the two angles of temperature and the amount of evaporation raw materials to try to ensure the stability of the evaporation amount.

[0026] Figure 1 is a flow chart of an evaporation coating method according to an embodiment of the present invention, such as Figure 1 As shown, in order to solve the problem that the evaporation coating method in the related art has large differences in coating effects at different coating time periods due to the changing state of the heat source temperature and the raw materials, and even cannot meet the coating requirements, resulting in coating failure and poor quality, the embodiment created by the present invention provides an evaporation coating method, which specifically includes the following steps: Step S101, controlling the evaporation heat source to heat the evaporation raw material through a first preset power; Step S102, when the evaporation amount of the evaporation material reaches a preset condition, performing an adjustment operation of the preset condition to adjust the power of the evaporation heat source, wherein the preset condition is determined according to a change relationship and a change principle of the evaporation amount during the evaporation coating process when the power of the evaporation heat source remains unchanged; Step S103, controlling the evaporation heat source by adjusting the power to heat the evaporation raw material to perform evaporation coating.

[0027] Among them, the evaporation coating method provided by the embodiment of the invention controls the evaporation heat source to heat the evaporation raw material through a first preset power; when the evaporation amount of the evaporation raw material reaches the preset condition, the preset condition adjustment operation is performed to adjust the power of the evaporation heat source, and the preset condition is determined according to the change relationship and change principle of the evaporation amount in the evaporation coating process when the evaporation heat source power remains unchanged; the evaporation heat source is controlled by the adjusted power to heat the evaporation raw material to perform evaporation coating, which solves the problem that the evaporation coating method in the related art has a large difference in coating effect in different time periods of coating due to the changing state of the heat source temperature and the raw material, and even cannot meet the coating requirements, resulting in coating failure and poor quality, and achieves the technical effect of ensuring that the change of evaporation amount tends to be stable in the whole process of evaporation coating, so as to ensure that the coating effect is stable and always meets the coating requirements, and avoids the problems of coating failure and poor quality caused by uneven coating.

[0028] As an optional embodiment, when the evaporation amount of the evaporation raw material reaches the preset conditions, the adjustment operation of the preset conditions is performed, and before the power of the evaporation heat source is adjusted, the method also includes: dividing the coating process into sections according to the change relationship of the evaporation amount to obtain a plurality of different sections, wherein the plurality of sections include a plurality of coating sections with different coating efficiencies; according to the evaporation amount change principle of each section, the preset conditions and the corresponding power adjustment method of the evaporation heat source are determined, so that the evaporation amount of each coating section meets the coating requirements.

[0029] The coating process is divided into zones according to the change of evaporation amount to obtain a plurality of different sections, including coating sections with a plurality of different coating efficiencies; the power of the evaporation heat source is adjusted according to the evaporation amount change principle of each section, so that the evaporation amount of each coating section meets the coating requirements; according to the adjusted power of the evaporation heat source, the evaporation heat source is controlled to heat the evaporation raw material to carry out evaporation coating, so as to ensure that the change of evaporation amount tends to be stable in the whole process of evaporation coating, so as to ensure the stability of the coating effect, always meet the technical effects of coating requirements, and avoid coating failure and poor quality caused by uneven coating.

[0030] The coating process is divided into zones according to the change of evaporation amount to obtain multiple different zones. When dividing the zones, it is necessary to consider the heat source power and the amount of the evaporation material, which may include the mass and / or volume of the evaporation material. The zones are divided based on the comprehensive consideration of the heat source power and the amount of the evaporation material.

[0031] It should be noted that the partitioning is time partitioning, that is, the partitioning is composed of nodes in time of the two dimensions of heat source power and the amount of evaporation material. Partitioning by time is less difficult to execute and easier to control, so as to accurately improve the effect and quality of evaporation.

[0032] The plurality of sections include a plurality of coating sections with different coating efficiencies. Figure 2 As shown, the initial heating section is the interval of 0-1, the temperature inefficient section is the interval of 1-2, the efficient evaporation section is the interval of 2-4, and the material shortage inefficient section is the interval of 4-5, etc. The factors and principles that affect the coating efficiency in each section are different, that is, the factors and principles that affect the evaporation amount are different, and they need to be considered separately during adjustment to more accurately adjust the evaporation amount of the evaporation raw materials.

[0033] According to the variation principle of evaporation amount in each section, the power of the evaporation heat source is adjusted so that the evaporation amount in each coating section meets the coating requirements. Figure 2 For example, the initial heating section is the interval of 0-1, the heat source and the evaporation raw material are in the process of heating up, the evaporation raw material transitions from non-evaporation to evaporation and boiling, and the evaporation amount gradually increases until it reaches the initial coating standard. That is, the principle of the evaporation amount change in the initial heating section is that the evaporation raw material continues to heat up, and after a period of zero evaporation, the evaporation amount continues to increase.

[0034] The temperature inefficiency section is the interval of 1-2. In this interval, the evaporation raw materials are sufficient, the temperature rise rate slows down, and the thermal equilibrium point has not been reached. The temperature has not yet made the evaporation raw materials fully boil, and the evaporation amount is still in a slow rising process, but it initially meets the coating requirements and can enter the coating interval for coating. That is, the principle of the evaporation amount change in the temperature inefficiency section is that the evaporation raw materials continue to heat up, causing the evaporation amount to continue to increase.

[0035] The high-efficiency evaporation section is the interval 2-4, in which the heat source temperature basically reaches the equilibrium value, the heating rate is further reduced, the evaporation raw materials are sufficient, and the evaporation amount enters a higher stage. After the evaporation efficiency reaches the peak value, the temperature of the evaporation raw materials still rises slightly, and the evaporation efficiency rises faster than the temperature until the evaporation peak value V0 is reached; then, as the evaporation raw materials gradually decrease, the evaporation amount begins to be affected, and the evaporation amount begins to slowly decrease until it reaches the critical point of low evaporation amount due to lack of materials. That is, the principle of evaporation amount change in the high-efficiency evaporation section is that the evaporation raw materials continue to heat up, causing the evaporation amount to increase to the peak first, and the evaporation raw materials decrease, causing the evaporation amount to continue to decrease from the peak.

[0036] The material shortage and low efficiency section is the interval between 4 and 5. Although the total evaporation volume in this section enters the low efficiency zone due to the reduction of evaporation raw materials, it still meets the coating requirements until the evaporation volume critical point is reached. Due to the serious material shortage, the evaporation volume cannot meet the coating requirements and the coating ends. That is, the principle of the evaporation volume change in the material shortage and low efficiency section is that the evaporation raw materials continue to decrease, causing the evaporation volume to continue to decrease.

[0037] According to the adjusted power of the evaporation heat source, the evaporation heat source is controlled to heat the evaporation raw material to perform evaporation coating. Specifically, after the coating process starts, in the initial heating section, the evaporation raw material is heated and evaporated using the first preset power, so that the evaporation amount of the evaporation raw material reaches a fifth preset value within a preset time.

[0038] The fifth preset value may be the starting point of entering the temperature inefficient section, that is, the starting point for evaporation. The fifth preset value may not be considered during implementation, but in the section, this node still needs to be considered as the starting point of the evaporation process.

[0039] It should be noted that the above-mentioned high-efficiency stage can be understood as a stage where the evaporation amount is higher than a preset threshold value, and is not limited to a certain range. The evaporation amount in the high-efficiency stage can fully meet the coating demand and is likely to exceed the maximum coating demand, resulting in waste.

[0040] After the evaporation amount of the evaporation raw material reaches the fifth preset value, the temperature inefficiency section is entered, and the evaporation raw material is continuously heated and evaporated using the first preset power until the evaporation amount of the evaporation raw material reaches the first preset value. At this time, the temperature is still in the inefficient section, and the first preset power is reduced to the second preset power, and heating is continued until the temperature inefficiency section ends, wherein the first preset value is greater than the fifth preset value and less than the maximum value of the evaporation amount; The first preset value may be the midpoint of the temperature inefficiency section. This is to take into account that the evaporation amount in the later stage of the temperature inefficiency section is close to the high efficiency stage, so as to avoid the heat source power being too high, resulting in the evaporation amount becoming too high. Before the evaporation amount enters the high efficiency stage, the heat source power is reduced to avoid the evaporation amount in the high efficiency stage being too high, resulting in waste.

[0041] The evaporation amount in the temperature inefficiency section gradually increases, therefore, the first preset value is greater than the fifth preset value, but the evaporation amount in the temperature inefficiency section has not yet reached the high-efficiency stage, therefore, the second preset threshold is less than the maximum value of the evaporation amount, and even less than the minimum standard value of the high-efficiency stage.

[0042] After the first preset power is reduced to the second preset power, in the late stage of the temperature inefficiency interval, the second preset power is still used to heat and evaporate the evaporation raw material, including the end of the temperature inefficiency interval and entering the high-efficiency evaporation section. In the high-efficiency evaporation section, the evaporation amount increases to a maximum value and then gradually decreases. When the evaporation amount decreases to the second preset value, it is still in the high-efficiency evaporation area. Then, the second preset power can be increased to a third preset power, and the third preset power is used to heat and evaporate the evaporation raw material, wherein the second preset value is less than the first preset value and greater than the fifth preset value; The above-mentioned second preset value is that under the second preset power, due to the reduction of the evaporation raw material, the evaporation amount is reduced to the inefficient critical point. The inefficient critical point can vary with different heat source powers. In theory, the higher the heat source power, the higher the inefficient critical point. Therefore, after reaching the inefficient critical point, the second preset power is increased to the third preset power to increase the inefficient critical point, so that the remaining evaporation raw material can support the coating in a more efficient evaporation mode, avoiding the deterioration of the coating effect caused by insufficient evaporation raw materials.

[0043] When the evaporation amount is reduced to the third preset value, the third preset power is reduced to the fourth preset power, and the fourth preset power is used to heat and evaporate the evaporation raw material until the evaporation amount is reduced to the fourth preset value, thereby ending the coating.

[0044] The third preset value is also the inefficient critical point under the third preset power. Theoretically, the power can be changed an unlimited number of times to adjust the inefficient critical point. However, the effect of the power change is worse, which creates a certain burden on the heat source control. Therefore, this embodiment can be limited to the number of times the heat source power is increased for the purpose of adjusting the inefficient critical point not exceeding 1 time, 2 times, 3 times, 4 times or 5 times. Preferably, this embodiment chooses to increase the heat source power for the purpose of adjusting the inefficient critical point not more than 1 time.

[0045] The fourth preset value is also the critical point of evaporation at which the evaporation amount cannot support evaporation coating. Once the evaporation amount is lower than the fourth preset value, coating cannot be performed.

[0046] As an optional embodiment, the multiple coating sections include a temperature inefficient section, a high-efficiency evaporation section, and a material-deficient inefficient section; when the power of the evaporation heat source is fixed: the principle of change of evaporation amount in the temperature inefficient section is that the temperature of the evaporation raw material continues to rise, causing the evaporation amount to continue to increase; the principle of change of evaporation amount in the high-efficiency evaporation section is that the temperature of the evaporation raw material continues to rise, causing the evaporation amount to first increase to a peak value, and then the evaporation raw material decreases, causing the evaporation amount to continue to decrease from the peak value; the principle of change of evaporation amount in the material-deficient inefficient section is that the evaporation raw material continues to decrease, causing the evaporation amount to continue to decrease.

[0047] As above, Figure 2For example, the temperature inefficiency section is the interval of 1-2, and the principle of evaporation change is that the evaporation raw material continues to rise in temperature, causing the evaporation to continue to increase. The efficient evaporation section is the interval of 2-4, and the principle of evaporation change is that the evaporation raw material continues to rise in temperature, causing the evaporation to increase to the peak first, and then the evaporation raw material decreases, causing the evaporation to continue to decrease from the peak; the material shortage inefficiency section is the interval of 4-5, and the principle of evaporation change is that the evaporation raw material continues to decrease, causing the evaporation to continue to decrease.

[0048] As an optional embodiment, for the temperature inefficient section, according to the principle of evaporation amount change in each section, the preset conditions and the corresponding power adjustment method of the evaporation heat source are determined so that the evaporation amount of each coating section meets the coating requirements, including: entering the temperature inefficient section, using a first preset power to heat and evaporate the evaporation raw material, so that the evaporation amount reaches a first preset value within a first preset time; the first preset condition is that when the evaporation amount of the evaporation raw material reaches the first preset value, the corresponding adjustment method is to reduce the first preset power to a second preset power, and use the second preset power to heat and evaporate the evaporation raw material until entering the high-efficiency evaporation section.

[0049] After the coating process starts, after the evaporation amount of the evaporation raw material reaches the fifth preset value, it enters the temperature inefficiency section, and continues to use the first preset power to heat and evaporate the evaporation raw material until the evaporation amount of the evaporation raw material reaches the first preset value. At this time, it is still in the temperature inefficiency section, and the first preset power is reduced to the second preset power, and heating is continued until the temperature inefficiency section ends, wherein the first preset value is greater than the fifth preset value and less than the maximum evaporation amount.

[0050] The first preset value may be the midpoint of the temperature inefficiency section. This is to take into account that the evaporation amount in the later stage of the temperature inefficiency section is close to the high efficiency stage, so as to avoid the heat source power being too high, resulting in the evaporation amount becoming too high. Before the evaporation amount enters the high efficiency stage, the heat source power is reduced to avoid the evaporation amount in the high efficiency stage being too high, resulting in waste.

[0051] After the first preset power is reduced to the second preset power, in the late stage of the temperature inefficiency interval, the second preset power is still used to heat and evaporate the evaporation raw material, including the end of the temperature inefficiency interval and entering the high-efficiency evaporation section.

[0052] As an optional embodiment, for the high-efficiency evaporation section, the power of the evaporation heat source is adjusted according to the principle of evaporation amount change in each section so that the evaporation amount of each coating section meets the coating requirements, including: entering the high-efficiency evaporation section, using the second preset power to heat and evaporate the evaporation raw material, the evaporation amount continues to increase, and monitoring whether the evaporation amount reaches the maximum value; after the evaporation amount increases to the maximum value, it continues to decrease; the second preset condition is that when it is detected that the evaporation amount is reduced to the second preset value, the corresponding adjustment method is to increase the second preset power to the third preset power; use the third preset power to heat and evaporate the evaporation raw material until the evaporation amount is reduced to the third preset value, and enter the material-deficient and inefficient section, wherein the third preset value is less than the second preset value and greater than the first preset value.

[0053] In the high-efficiency evaporation section, the evaporation amount increases to a maximum value and then gradually decreases. When the evaporation amount decreases to a second preset value, while it is still in the high-efficiency evaporation zone, the second preset power can be increased to a third preset power, and the third preset power can be used to heat and evaporate the deposition raw materials.

[0054] The second preset value is the value at which the evaporation amount is reduced to the inefficient critical point due to the reduction of the evaporation raw material under the second preset power. The inefficient critical point can vary with different heat source powers. In theory, the higher the heat source power, the higher the inefficient critical point.

[0055] Therefore, after reaching the inefficiency critical point, the second preset power is increased to the third preset power to improve the inefficiency critical point, so that the remaining evaporation raw materials can support coating in a more efficient evaporation manner, avoiding the deterioration of the coating effect caused by insufficient evaporation raw materials.

[0056] Theoretically, when the heat source power is fixed, the inefficiency zone can be entered when the corresponding inefficiency critical point is reached. However, before entering the inefficiency zone, in order to delay the inefficiency critical point caused by the shortage of materials, the first preset power has been reduced to the second preset power. The corresponding inefficiency critical point has also changed. At this time, the starting point of the inefficiency zone can also be defined according to the inefficiency critical point corresponding to the second preset power.

[0057] Compared with the material shortage inefficiency zone before adjustment, the material shortage inefficiency zone after adjustment comes later, that is, the inefficiency critical point 4' corresponding to the second preset power will be later than the inefficiency critical point corresponding to the first preset power, and will also be later than the unadjusted inefficiency critical point 4.

[0058] As an optional embodiment, for the material-deficient and inefficient section, the power of the evaporation heat source is adjusted according to the principle of evaporation amount change in each section, so that the evaporation amount of each coating section meets the coating requirements, including: entering the material-deficient and inefficient section, using a third preset power to heat and evaporate the evaporation raw material, and the evaporation amount continues to decrease; when the evaporation amount decreases to a fourth preset value, the coating is ended and the material-deficient and inefficient section is exited, wherein the fourth preset value is less than the first preset value, and the evaporation amount of the fourth preset value is the maximum evaporation amount that cannot be used for evaporation coating.

[0059] The starting point of the above-mentioned material shortage low efficiency zone can be understood as the low efficiency critical point corresponding to the second preset power. When the evaporation amount decreases to the low efficiency critical point corresponding to the second preset power, it can be considered that the material shortage low efficiency zone has been entered.

[0060] Since the third preset value is also the inefficiency critical point under the third preset power, when the inefficiency critical point of the second preset power is reached, in order to delay the arrival of the inefficiency critical point, the second preset power has been increased to the third preset power.

[0061] Theoretically, the power can be changed an unlimited number of times to adjust the inefficiency critical point, but the effect of power change will be worse as time goes by, which will cause a certain burden on heat source control. Therefore, in this embodiment, the number of times the heat source power is increased for the purpose of adjusting the inefficiency critical point shall not exceed 1.

[0062] When the evaporation amount is reduced to the third preset value, the third preset power is reduced to the fourth preset power, and the evaporation raw material is heated and evaporated using the fourth preset power until the evaporation amount is reduced to the fourth preset value, and the coating is terminated. The third preset value is also the inefficiency critical point corresponding to the third preset power, and the fourth preset value is also the evaporation critical point where the evaporation amount cannot support the evaporation coating. Once the evaporation amount is lower than the fourth preset value, the coating cannot be performed.

[0063] As an optional embodiment, the multiple sections also include a starting heating section, which is used to heat the evaporation raw materials after the coating begins, so that the evaporation amount gradually increases from zero to a fifth preset value, wherein the evaporation amount of the fifth preset value is the minimum evaporation amount that can be applied to the evaporation coating.

[0064] After the coating process begins, in the initial heating section, the first preset power is used to heat and evaporate the evaporation raw material, so that the evaporation amount of the evaporation raw material reaches the fifth preset value within the preset time. The first preset power used is higher than the fixed power before adjustment. The evaporation amount can be increased more quickly and the temperature of the evaporation raw material can be raised.

[0065] The fifth preset value may be the starting point of entering the temperature inefficient section, that is, the starting point for evaporation. The fifth preset value may not be considered during implementation, but in the section, this node still needs to be considered as the starting point of the evaporation process.

[0066] As an optional embodiment, for the initial heating section, the power of the evaporation heat source is adjusted according to the principle of change in the evaporation amount of each section, so that the evaporation amount of each coating section meets the coating requirements, including: after the coating process starts, the evaporation raw material is heated and evaporated with a first preset power, so that the evaporation amount of the evaporation raw material reaches a fifth preset value within a second preset time; wherein the fifth preset value is less than the first preset value, and the fifth preset value is not less than the fourth preset value.

[0067] The second preset time when the evaporation amount reaches the fifth preset value is significantly earlier than the first preset time when the evaporation amount reaches the first preset value, that is, the fifth preset value is significantly smaller than the first preset value. Considering that the fifth preset value is the minimum value of the evaporation amount that can be used for evaporation coating, and the fourth preset value is the maximum value of the evaporation amount that cannot be used for evaporation coating, the coating requirements for the evaporation amount in the same evaporation coating process should be consistent, so the fifth preset value is not less than the fourth preset value.

[0068] After the evaporation amount of the evaporation raw material reaches the fifth preset value, the temperature enters the low-efficiency section, and the evaporation raw material is continuously heated and evaporated using the first preset power until the evaporation amount of the evaporation raw material reaches the first preset value.

[0069] It should be noted that this embodiment also provides an optional implementation, which is described in detail below. This implementation provides a coating method, which is described as follows.

[0070] Figure 2 Schematic diagram of the relationship between the evaporation amount before and after the heat source power is adjusted according to the embodiment of the present invention. Figure 2 As shown in the figure, the dotted line represents the evaporation curve before adjustment. During the evaporation coating process, the heat source temperature and the weight of the evaporation raw material are in a changing state during the process. The initial heating section is the interval of 0-1, the heat source and the evaporation raw material are in the process of heating up, the evaporation raw material transitions from non-evaporation to evaporation and boiling, and the evaporation amount gradually increases until it reaches the initial coating standard, and the curve formed is shown as the dotted line.

[0071] like Figure 2 As shown, the temperature inefficient section is the interval 1-2, which is about 15 minutes. The evaporation raw materials are sufficient, the temperature rise rate slows down, and the thermal equilibrium point has not been reached. The temperature has not yet made the evaporation raw materials fully boil, and the evaporation amount is still in a slow rising process. However, it preliminarily meets the coating requirements and can enter the coating interval for coating.

[0072] like Figure 2 As shown, the high-efficiency evaporation section is the interval 2-4, in which the heat source temperature basically reaches the equilibrium value, the heating rate is further reduced, the evaporation raw material is sufficient, and the evaporation amount enters a higher stage. After the evaporation efficiency reaches the peak value, the temperature of the evaporation raw material still increases slightly, and the evaporation efficiency increases faster than the temperature until the evaporation amount peak value V0 is reached; then, as the evaporation raw material gradually decreases, it begins to affect the evaporation amount, and the evaporation amount begins to slowly decrease until it enters the low evaporation amount critical point 4 due to lack of material.

[0073] like Figure 2 As shown, the material shortage and inefficiency section is the interval 4-5. Although this interval enters the inefficiency zone due to the reduction of the total evaporation amount of the evaporation raw materials, it still meets the coating requirements until it reaches the evaporation critical point 5. The evaporation cannot meet the coating requirements due to severe material shortage and the coating ends.

[0074] The above is the entire change of the dotted line of evaporation before adjustment.

[0075] like Figure 2 In the above process, the present embodiment adjusts and increases the heat source power P1 in the 0-2 interval, shortens the start time, and thus reduces the waste of evaporation materials in the 0-1 interval due to the low evaporation level caused by the temperature, and the curve formed is shown as the solid line.

[0076] At the midpoint of the 1-2 interval, the power P1 is reduced to P2, P1>P2. Due to the system hysteresis from power to evaporation, the evaporation amount will still rise to near the high-efficiency critical point. However, as the power P2 has been reduced, the evaporation enters the high-efficiency stage, that is, it continues to operate near the high-efficiency critical level and no longer continues to rise to the original peak value, thereby making the coating more uniform along the length direction.

[0077] And because the evaporation amount in the high-efficiency stage is reduced, the speed of reducing the evaporation raw materials becomes slower than before, thereby extending the time length of the high-efficiency stage and increasing the effective coating meters. When the inefficient critical point 4' under the P2 power condition is reached again, P2 can be increased to P3 again, P3>P2, thereby extending the high-efficiency coating range again until the inefficient critical point 4'' under the P3 kilometer condition is reached; then it enters the material shortage and inefficient stage, and the coating ends when the evaporation critical point 5' is reached.

[0078] This embodiment determines the evaporation amount in the evaporation process by zoning, and adjusts the coating power P1-↓-P2-↑-P3 in each section to achieve coating uniformity and longer effective coating meters, thereby improving the evaporation effect and quality.

[0079] Figure 3 is a flow chart of an evaporation coating method according to an embodiment of the present invention, such as Figure 3As shown, based on the above-mentioned evaporation coating method provided by the embodiment of the invention, the embodiment of the invention also provides an evaporation coating device, which is applied to evaporation coating. The evaporation coating device includes: a heating module 301, an adjustment module 302, and a control module 303. The device is described in detail below.

[0080] The heating module 301 is used to control the evaporation heat source to heat the evaporation raw material through a first preset power; the adjustment module 302 is connected to the above-mentioned heating module 301, and is used to perform the adjustment operation of the preset conditions when the evaporation amount of the evaporation raw material reaches the preset conditions, and adjust the power of the evaporation heat source, wherein the preset conditions are determined according to the change relationship and change principle of the evaporation amount during the evaporation coating process when the power of the evaporation heat source remains unchanged; the control module 303 is connected to the above-mentioned adjustment module 302, and is used to control the evaporation heat source through the adjusted power to heat the evaporation raw material to perform evaporation coating.

[0081] The above-mentioned evaporation coating device provided by the embodiment of the invention controls the evaporation heat source to heat the evaporation raw material through a first preset power; when the evaporation amount of the evaporation raw material reaches the preset condition, the preset condition adjustment operation is performed to adjust the power of the evaporation heat source, and the preset condition is determined according to the change relationship and change principle of the evaporation amount in the evaporation coating process when the evaporation heat source power remains unchanged; the evaporation heat source is controlled by the adjusted power to heat the evaporation raw material to perform evaporation coating, which solves the problem that the evaporation coating method in the related art has a large difference in coating effect in different time periods of coating due to the changing state of the heat source temperature and the raw material, and even cannot meet the coating requirements, resulting in coating failure and poor quality, and achieves the technical effect of ensuring that the change of evaporation amount tends to be stable in the whole process of evaporation coating, so as to ensure the stability of the coating effect and always meet the coating requirements, and avoid the problems of coating failure and poor quality caused by uneven coating.

[0082] The embodiments of the present invention also provide a non-transitory machine-readable medium storing a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to execute the method of the embodiments of the present invention.

[0083] The embodiments of the present invention further provide a computer program product, including a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to execute the method of the embodiments of the present invention.

[0084] The embodiment of the invention also provides an electronic device, comprising: at least one processor; and a memory connected to the at least one processor in communication. The memory stores a computer program that can be executed by the at least one processor, and the computer program is used to enable the electronic device to perform the method of the embodiment of the invention when executed by the at least one processor.

[0085] refer to Figure 4 , a block diagram of an electronic device that can be used as a server or client of an embodiment of the invention will now be described, which is an example of hardware devices that can be applied to various aspects of the invention. The electronic device is intended to represent various forms of digital electronic computer devices, such as laptop computers, desktop computers, workbenches, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices, and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the invention described and / or required herein.

[0086] like Figure 4 As shown, the electronic device includes a computing unit 401, which can perform various appropriate actions and processes according to a computer program stored in a read-only memory (ROM) 402 or a computer program loaded from a storage unit 408 to a random access memory (RAM) 403. In RAM 403, various programs and data required for the operation of the electronic device can also be stored. The computing unit 401, ROM 402, and RAM 403 are connected to each other via a bus 404. An input / output (I / O) interface 405 is also connected to the bus 404.

[0087] Multiple components in the electronic device are connected to the I / O interface 405, including: an input unit 406, an output unit 407, a storage unit 408, and a communication unit 409. The input unit 406 can be any type of device that can input information to the electronic device, and the input unit 406 can receive input digital or character information, and generate key signal input related to user settings and / or function control of the electronic device. The output unit 407 can be any type of device that can present information, and can include but is not limited to a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. The storage unit 408 can include but is not limited to a disk, an optical disk. The communication unit 409 allows the electronic device to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks, and can include but is not limited to a modem, a network card, an infrared communication device, and / or a wireless communication transceiver, such as a Bluetooth device, a WiFi device, a WiMax device, a cellular communication device, and / or the like.

[0088] The computing unit 401 may be a variety of general and / or special processing components with processing and computing capabilities. Some examples of the computing unit 401 include, but are not limited to, a CPU, a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing units, various computing units running machine learning model algorithms, digital signal processors (DSPs), and any appropriate processors, controllers, microcontrollers, etc. The computing unit 401 performs the various methods and processes described above. For example, in some embodiments, the method embodiments created by the present invention may be implemented as a computer program, which is tangibly contained in a machine-readable medium, such as a storage unit 408. In some embodiments, part or all of the computer program may be loaded and / or installed on an electronic device via ROM 402 and / or communication unit 409. In some embodiments, the computing unit 401 may be configured to perform the above-described method in any other appropriate manner (e.g., by means of firmware).

[0089] The computer program for implementing the method of the present invention can be written in any combination of one or more programming languages. These computer programs can be provided to a processor or controller of a general-purpose computer, a special-purpose computer, or other programmable data processing device, so that the computer program, when executed by the processor or controller, enables the functions / operations specified in the flow chart and / or block diagram to be implemented. The computer program can be executed entirely on the machine, partially on the machine, partially on the machine as a stand-alone software package and partially on a remote machine, or entirely on a remote machine or server.

[0090] In the context of the present invention, a machine-readable medium may be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, device, or apparatus. A machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. A machine-readable signal medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, or infrared systems, devices, or equipment, or any suitable combination of the foregoing. More specific examples of machine-readable storage media may include electrical connections based on one or more lines, portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM or flash memory), optical fibers, portable compact disk read-only memories (CD-ROMs), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0091] It should be noted that the term "including" and its variations used in the embodiments of the present invention are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". The modifications of "one" and "multiple" mentioned in the embodiments of the present invention are illustrative and not restrictive. Those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0092] The user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in the embodiments of the present invention are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of relevant data must comply with the relevant laws, regulations and standards of relevant countries and regions, and provide corresponding operation entrances for users to choose to authorize or refuse.

[0093] The various steps described in the method implementation methods provided by the embodiments of the present invention can be performed in different orders and / or in parallel. In addition, the method implementation methods may include additional steps and / or omit the steps shown. The scope of protection of the present invention is not limited in this respect.

[0094] The term "embodiment" in this specification refers to specific features, structures or characteristics described in conjunction with the embodiment that can be included in at least one embodiment of the invention. The appearance of this phrase in various places in the specification does not necessarily mean the same embodiment, nor does it mean that it is mutually exclusive with other embodiments and is independent or optional. The various embodiments in this specification are described in a related manner, and the same and similar parts between the various embodiments refer to each other. In particular, for the device, equipment, and system embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts refer to the partial description of the method embodiment.

[0095] The above-described embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of protection. It should be pointed out that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the attached claims.

Claims

1. An evaporation coating method, characterized in that: include: Controlling the evaporation heat source to heat the evaporation raw material at a first preset power; When the evaporation amount of the evaporation raw material reaches a preset condition, an adjustment operation of the preset condition is performed to adjust the power of the evaporation heat source, wherein the preset condition is determined according to a change relationship and a change principle of the evaporation amount in the evaporation coating process when the power of the evaporation heat source remains unchanged; The evaporation heat source is controlled by the adjusted power to heat the evaporation raw material to perform evaporation deposition.

2. The method according to claim 1, characterized in that When the evaporation amount of the evaporation raw material reaches a preset condition, an adjustment operation of the preset condition is performed, and before the power of the evaporation heat source is adjusted, the method further includes: According to the variation relationship of the evaporation amount, the coating process is divided into zones to obtain a plurality of different zones, wherein the plurality of zones include a plurality of coating zones with different coating efficiencies; According to the variation principle of the evaporation amount of each section, the preset conditions and the corresponding power adjustment method of the evaporation heat source are determined so that the evaporation amount of each coating section meets the coating requirements.

3. The method according to claim 2, characterized in that Multiple coating sections include temperature inefficient section, efficient evaporation section, and material shortage inefficient section; When the power of the evaporation heat source is fixed: The principle of the change of evaporation amount in the temperature inefficient section is that the evaporation amount continues to increase due to the continuous increase in temperature of the evaporation raw material; The principle of the change of evaporation amount in the high-efficiency evaporation section is that the temperature of the evaporation raw material continues to rise, causing the evaporation amount to increase to a peak value first, and the evaporation raw material decreases, causing the evaporation amount to continue to decrease from the peak value; The principle of the change of the evaporation amount in the material-deficient and inefficient section is that the evaporation raw material continues to decrease, causing the evaporation amount to continue to decrease.

4. The method according to claim 3, characterized in that For the temperature inefficient section, according to the evaporation amount variation principle of each section, the preset conditions and the corresponding power adjustment method of the evaporation heat source are determined so that the evaporation amount of each coating section meets the coating requirements, including: Entering the temperature inefficient section, heating and evaporating the evaporation raw material using the first preset power, so that the evaporation amount reaches a first preset value within a first preset time; The first preset condition is that when the evaporation amount of the evaporation raw material reaches the first preset value, the corresponding adjustment method is to reduce the first preset power to the second preset power, and use the second preset power to heat and evaporate the evaporation raw material until entering the high-efficiency evaporation section.

5. The method according to claim 4, characterized in that For the high-efficiency evaporation section, according to the evaporation amount variation principle of each section, the power of the evaporation heat source is adjusted so that the evaporation amount of each coating section meets the coating requirements, including: Entering the high-efficiency evaporation section, heating and evaporating the evaporation raw material using the second preset power, the evaporation amount continuously increases, and monitoring whether the evaporation amount reaches a maximum value; After the evaporation amount increases to a maximum value, it continues to decrease; The second preset condition is that when it is detected that the evaporation amount is reduced to the second preset value, the corresponding adjustment method is to increase the second preset power to the third preset power; The third preset power is used to heat and evaporate the evaporation raw material until the evaporation amount is reduced to a third preset value and enters the material shortage and inefficiency section, wherein the third preset value is less than the second preset value and greater than the first preset value.

6. The method according to claim 5, characterized in that For the insufficient and inefficient sections, the power of the evaporation heat source is adjusted according to the evaporation amount variation principle of each section, so that the evaporation amount of each coating section meets the coating requirements, including: Entering the material shortage and low efficiency section, the evaporation raw material is heated and evaporated using the third preset power, and the evaporation amount continues to decrease; When the evaporation amount decreases to a fourth preset value, the coating is terminated and the material shortage and inefficiency section is exited, wherein the fourth preset value is smaller than the first preset value, and the evaporation amount of the fourth preset value is the maximum evaporation amount that cannot be applied to evaporative coating.

7. The method according to any one of claims 3 to 6, characterized in that The multiple sections also include a starting heating section, which is used to heat the evaporation raw material after the coating begins, so that the evaporation amount gradually increases from zero to a fifth preset value, wherein the evaporation amount of the fifth preset value is the minimum evaporation amount that can be applied to the evaporation coating.

8. The method according to claim 7, characterized in that For the initial heating section, according to the evaporation amount variation principle of each section, the power of the evaporation heat source is adjusted so that the evaporation amount of each coating section meets the coating requirements, including: After the film deposition process begins, the evaporation raw material is heated and evaporated using the first preset power, so that the evaporation amount of the evaporation raw material reaches the fifth preset value within the second preset time; Among them, the fifth preset value is smaller than the first preset value, and the fifth preset value is not smaller than the fourth preset value.

9. An evaporation coating device based on the method according to any one of claims 1 to 8, characterized in that: include: A heating module, used for controlling the evaporation heat source to heat the evaporation raw material through a first preset power; An adjustment module, used for, when the evaporation amount of the evaporation raw material reaches a preset condition, executing the adjustment operation of the preset condition to adjust the power of the evaporation heat source, wherein the preset condition is determined according to the change relationship and change principle of the evaporation amount in the evaporation coating process when the power of the evaporation heat source remains unchanged; The control module is used to control the evaporation heat source through the adjusted power to heat the evaporation raw material to perform evaporation coating.

10. An electronic device comprising: A processor and a memory storing a program, wherein the program comprises instructions, which, when executed by the processor, cause the processor to perform the method according to any one of claims 1 to 8.

11. A non-transitory machine-readable medium storing computer instructions, characterized in that: The computer instructions are used to cause the computer to execute the method according to any one of claims 1 to 8.

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