Deposition reaction chamber of vacuum vapor deposition equipment

Abstract

The invention discloses a deposition reaction chamber of vacuum vapor deposition equipment, and belongs to the technical field of vacuum vapor deposition equipment, the deposition reaction chamber comprises a deposition metal box, one end of the deposition metal box is movably connected with a closed metal door, and the inner wall of the deposition metal box is provided with a plurality of detachable thermosistors for adjusting temperature; a deformable supporting mechanism is arranged at the bottom of the deposition metal box, a deformable spraying mechanism corresponding to the deformable supporting mechanism is arranged at the top of the deposition metal box, the deformable supporting mechanism comprises a first anti-toppling bearing plate, and the first anti-toppling bearing plate is fixedly connected with the deposition metal box. A first speed-adjustable power output part is arranged in the middle of the upper surface of the first anti-toppling bearing plate; through mutual cooperation of multiple structures, sprayed raw materials are subjected to multiple dispersion, and through cooperation of rotation of the spraying structure, height adjustment and rotation of a sample, the raw materials are rapidly, fully and uniformly deposited on the surface of the sample.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum vapor deposition equipment, and in particular relates to a deposition reaction chamber of a vacuum vapor deposition equipment. Background Art

[0002] Vacuum vapor deposition equipment is a device that vaporizes the surface of a material source (solid or liquid) into gaseous atoms, molecules or partially ionizes them into ions, and deposits them on the surface of the sample through low-pressure gas (or plasma) to make it have a special functional film. The most important part of the vacuum vapor deposition equipment is the deposition reaction chamber. The conventional deposition reaction chamber includes a driving motor, an annular trough, a heater, a circular trough, an electric nozzle, a temperature detector, a refrigerator, a push plate, a control panel and a rotating shaft. The advantage of the deposition reaction chamber is that the internal temperature of the deposition reaction chamber can be adjusted. However, due to the relatively simple spraying structure of the traditional deposition reaction chamber, the raw materials cannot be evenly deposited on the sample surface, resulting in unsatisfactory processing effect of the deposition reaction chamber, which urgently needs to be improved. Summary of the invention

[0003] The object of the present invention is to provide a deposition reaction chamber of a vacuum vapor deposition device to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a deposition reaction chamber of a vacuum vapor deposition device, comprising a deposition metal box, one end of the deposition metal box is movably connected to a closed metal door, a plurality of detachable thermostats for temperature regulation are arranged on the inner wall of the deposition metal box, a deformable support mechanism is arranged at the bottom of the deposition metal box, a deformable spraying mechanism corresponding to the deformable support mechanism is arranged at the top of the deposition metal box, the deformable support mechanism comprises a first anti-dumping bearing plate, the first anti-dumping bearing plate is fixedly connected to the deposition metal box, a first adjustable speed power output member is arranged in the middle of the upper surface of the first anti-dumping bearing plate, the first adjustable speed power output member is fixedly connected to the first anti-dumping bearing plate, A second anti-dumping bearing plate is provided at the output end of the first adjustable speed power output component, and the second anti-dumping bearing plate is fixedly connected to the first adjustable speed power output component. A protective gas storage base is also provided on the upper surface of the first anti-dumping bearing plate, and the protective gas storage base is fixedly connected to the first anti-dumping bearing plate. A spoiler jet top cover is sealingly and slidably connected to the top of the protective gas storage base. A plurality of second protective holes for spraying in the direction of the second anti-dumping bearing plate to play a spoiler role are provided on the top of the spoiler jet top cover. A plurality of single-way inflation pipes for supplying air to the protective gas storage base are provided above the first anti-dumping bearing plate. The single-way inflation pipe runs through the side wall of the protective gas storage base, and the single-way inflation pipe is fixedly connected to the protective gas storage base.

[0005] As a further solution of the present invention: a first attitude adjustment disk is fixedly connected to the bottom of the spoiler jet top cover, a second attitude adjustment disk is arranged inside the protective air storage base for cooperating with the first attitude adjustment disk to support the spoiler jet top cover, the second attitude adjustment disk is rotatably connected to the first attitude adjustment disk, and a plurality of first retractable limiting drive parts for supporting the second attitude adjustment disk are arranged at the bottom of the protective air storage base.

[0006] As a further solution of the present invention: one end of the first retractable limit driving component is fixedly connected to the second posture adjustment disk, the other end of the first retractable limit driving component is fixedly connected to the protective gas storage base, a plurality of first retractable limit driving components are arranged in a circular array on the lower surface of the second posture adjustment disk, and a plurality of protective support balls are provided on the upper surface of the second posture adjustment disk.

[0007] As a further solution of the present invention: a plurality of first protective holes are opened on the upper surface of the spoiler jet top cover, a plurality of protective support balls are arranged in a ring array on the upper surface of the second attitude adjustment disk, the protective support balls are rotatably connected to the second attitude adjustment disk, and an anti-slip bearing plate for anti-slip function is provided on the upper surface of the second anti-dump bearing plate, and the anti-slip bearing plate is fixedly connected to the second anti-dump bearing plate.

[0008] As a further solution of the present invention: the deformable spray mechanism includes an adjustable spray hood, a plurality of third protective holes are opened on the upper surface of the adjustable spray hood, a transmission bulk box is arranged on the top of the adjustable spray hood, the transmission bulk box is fixedly connected to the adjustable spray hood, a plurality of first atomizing electric nozzles are arranged on the lower surface of the transmission bulk box, a hollow feed metal pipe for feeding the first atomizing electric nozzle is arranged on the top of the adjustable spray hood, the hollow feed metal pipe is fixedly connected to the adjustable spray hood, a third anti-dumping bearing plate rotatably connected to the hollow feed metal pipe is arranged above the adjustable spray hood, and a plurality of second retractable limit driving parts for adjusting the height of the adjustable spray hood are arranged on the upper surface of the third anti-dumping bearing plate.

[0009] As a further solution of the present invention: one end of the second retractable limit driving member is fixedly connected to the deposition metal box, the other end of the second retractable limit driving member is fixedly connected to the third anti-dumping supporting plate, a first transmission metal gear is arranged at the bottom of the hollow feed metal tube, the first transmission metal gear is fixedly connected to the hollow feed metal tube, a second adjustable speed power output member is arranged on the upper surface of the third anti-dumping supporting plate, and a second transmission metal gear for cooperating with the first transmission metal gear to drive the hollow feed metal tube to rotate is arranged at the output end of the second adjustable speed power output member.

[0010] As a further solution of the present invention: the second adjustable speed power output part is fixedly connected to the third anti-dumping bearing plate, and a plurality of first hollow transmission air pipes are provided on the inner wall of the adjustable spray hood, which are sealed and slidably connected to the spoiler jet top cover through the first protective holes; the first hollow transmission air pipe is fixedly connected to the adjustable spray hood, and a plurality of first hollow jet pipes are provided on the side of the first hollow transmission air pipe, which is inclined upward.

[0011] As a further solution of the present invention: a plurality of second hollow transmission air pipes are also arranged on the inner wall of the adjustable spray hood, which are sealingly and slidingly connected to the spoiler jet top cover through the first protective holes; the second hollow transmission air pipe is fixedly connected to the adjustable spray hood; and a plurality of second hollow jet pipes are arranged on the side of the second hollow transmission air pipe at an angle downward.

[0012] As a further solution of the present invention: a plurality of pressure-dividing feeding pipes connected to the transmission bulk material box are also arranged on the inner wall of the adjustable spray hood, the pressure-dividing feeding pipes are fixedly connected to the adjustable spray hood, and a plurality of second atomizing electric nozzles are arranged at intervals on the pressure-dividing feeding pipes.

[0013] As a further solution of the present invention: a number of deformable protective plates for anti-slip and shock-absorbing functions are arranged at both ends of the lower surface of the deposition metal box, a number of limiting and pulling plates are arranged on the top of the side of the deposition metal box, the limiting and pulling plates are fixedly connected to the deposition metal box, and a number of detachable display pieces for information display are arranged at the bottom of the side of the limiting and pulling plates.

[0014] Compared with the prior art, the beneficial effects of the present invention are: the present invention has a simple structure and is easy to use. When in use, the sprayed raw materials are dispersed multiple times through the mutual cooperation of multiple structures. The rotation, height adjustment and rotation of the spraying structure and the sample enable the raw materials to be quickly and fully deposited evenly on the sample surface, thereby achieving a better processing effect of the deposition reaction chamber. Secondly, the present invention can be applied to different types of samples, thereby making the deposition reaction chamber more widely applicable and worthy of promotion and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a deposition reaction chamber of a vacuum vapor deposition device; Figure 2 It is a schematic structural diagram of a deformable support mechanism in a deposition reaction chamber of a vacuum vapor deposition device; Figure 3 A schematic diagram of the structure of a protective gas storage base in a deposition reaction chamber of a vacuum vapor deposition device; Figure 4 It is a structural schematic diagram of a deformable spraying mechanism in a deposition reaction chamber of a vacuum vapor deposition device; Figure 5 A schematic diagram of the structure of an adjustable spray hood in a deposition reaction chamber of a vacuum vapor deposition device; In the figure: 1-closed metal door, 2-deformable support mechanism, 3-deformable spraying mechanism, 4-deposition metal box, 5-limited lifting plate, 6-detachable display piece, 7-detachable thermostat, 8-deformable protective plate, 20-first retractable limited driving member, 21-first anti-dumping bearing plate, 22-single-pass inflation tube, 23-protective support ball, 24-protective gas storage base, 25-spoiler jet top cover, 26-anti-slip bearing plate, 27-second anti-dumping bearing plate, 281-first adjustable speed power output member, 282-first protective hole, 283-second protective hole, 284-first posture adjustment Disk, 285-second attitude adjustment disk, 30-third protective hole, 31-third anti-dumping bearing plate, 32-first transmission metal gear, 33-hollow feed metal pipe, 34-second retractable limit drive, 35-second transmission metal gear, 36-second adjustable speed power output, 37-adjustable spray hood, 381-first hollow jet pipe, 382-first hollow transmission air pipe, 383-transmission bulk material box, 384-first atomizing electric nozzle, 385-second hollow transmission air pipe, 386-second hollow jet pipe, 387-second atomizing electric nozzle, 388-pressure feed pipe. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" and "set" should be understood in a broad sense. For example, it can be fixedly connected or set, or it can be detachably connected or set, or integrally connected or set.

[0018] For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0019] See also Figure 1The present embodiment provides a deposition reaction chamber of a vacuum vapor deposition device, including a deposition metal box 4, one end of the deposition metal box 4 is movably connected to a closed metal door 1, and a plurality of detachable thermostats 7 for temperature regulation are arranged on the inner wall of the deposition metal box 4, and the use of the detachable thermostat 7 is a prior art. A deformable support mechanism 2 is arranged at the bottom of the deposition metal box 4, and a deformable spraying mechanism 3 corresponding to the deformable support mechanism 2 is arranged at the top of the deposition metal box 4. A plurality of deformable protective plates 8 for anti-slip and shock-absorbing functions are arranged at both ends of the lower surface of the deposition metal box 4, and the deformable protective plates 8 are rubber plates or silicone plates. A plurality of limiting lifting plates 5 are arranged on the top of the side of the deposition metal box 4, and the limiting lifting plates 5 are fixedly connected to the deposition metal box 4. A plurality of detachable display pieces 6 for information display are arranged at the bottom of the side of the limiting lifting plate 5, and the detachable display piece 6 is a liquid crystal screen or a handwriting fluorescent board.

[0020] See also Figure 1 , Figure 2 and Figure 3 In one embodiment, in order to make the use of the deformable support mechanism 2 more reliable, in this embodiment, preferably, the deformable support mechanism 2 includes a first anti-dumping load plate 21, the first anti-dumping load plate 21 is fixedly connected to the deposition metal box 4, and a first adjustable speed power output member 281 is arranged in the middle of the upper surface of the first anti-dumping load plate 21, the first adjustable speed power output member 281 is a servo motor, the first adjustable speed power output member 281 is fixedly connected to the first anti-dumping load plate 21, and a second anti-dumping load plate 27 is arranged at the output end of the first adjustable speed power output member 281, the second anti-dumping load plate 27 is fixedly connected to the first adjustable speed power output member 281, and a protective gas storage base 24 is also arranged on the upper surface of the first anti-dumping load plate 21, and the protective gas storage base 24 is connected to the first anti-dumping load plate 21. The bearing plate 21 is fixedly connected, and the top of the protective gas storage base 24 is sealed and slidably connected with a spoiler jet cover 25. The top of the spoiler jet cover 25 is provided with a plurality of second protective holes 283 for spraying in the direction of the second anti-dumping bearing plate 27 to play a spoiler role. A plurality of single-way air-filling tubes 22 for supplying air to the protective gas storage base 24 are arranged above the first anti-dumping bearing plate 21. The single-way air-filling tubes 22 penetrate the side wall of the protective gas storage base 24, and the single-way air-filling tubes 22 are fixedly connected to the protective gas storage base 24. The bottom of the spoiler jet cover 25 is fixedly connected with a first attitude adjustment disk 284, and the interior of the protective gas storage base 24 is provided with a second attitude adjustment disk 285 for cooperating with the first attitude adjustment disk 284 to support the spoiler jet cover 25. See also Figure 2 and Figure 3In one embodiment, in order to make the function of the deformable support mechanism 2 more abundant, in this embodiment, preferably, the second posture adjustment disk 285 is rotatably connected to the first posture adjustment disk 284, and the bottom of the protective gas storage base 24 is provided with a plurality of first retractable limit drive members 20 for supporting the second posture adjustment disk 285, the first retractable limit drive member 20 is a spring, one end of the first retractable limit drive member 20 is fixedly connected to the second posture adjustment disk 285, and the other end of the first retractable limit drive member 20 is fixedly connected to the protective gas storage base 24, and the plurality of first retractable limit drive members 20 are provided. The limit drive parts 20 are arranged in a circular array on the lower surface of the second posture adjustment disk 285, and a plurality of protective support balls 23 are provided on the upper surface of the second posture adjustment disk 285. A plurality of first protective holes 282 are opened on the upper surface of the spoiler jet top cover 25, and a plurality of protective support balls 23 are arranged in a circular array on the upper surface of the second posture adjustment disk 285. The protective support balls 23 are rotatably connected to the second posture adjustment disk 285. The upper surface of the second anti-dumping bearing plate 27 is provided with an anti-slip bearing plate 26 for anti-slip effect, and the anti-slip bearing plate 26 is fixedly connected to the second anti-dumping bearing plate 27.

[0021] In another embodiment, the deformable support mechanism 2 includes a first anti-dumping load plate 21, which is fixedly connected to the deposition metal box 4, and a first adjustable speed power output component 281 is arranged in the middle of the upper surface of the first anti-dumping load plate 21, and the first adjustable speed power output component 281 is a stepping motor, and the first adjustable speed power output component 281 is fixedly connected to the first anti-dumping load plate 21, and a second anti-dumping load plate 27 is arranged at the output end of the first adjustable speed power output component 281, and the second anti-dumping load plate 27 is fixedly connected to the first adjustable speed power output component 281, and a protective gas storage base 24 is also arranged on the upper surface of the first anti-dumping load plate 21, and the protective gas storage base 24 is fixedly connected to the first anti-dumping load plate 21, and the protective gas storage base 24 is fixedly connected to the first anti-dumping load plate 21. The top of the base 24 is sealed and slidably connected with a spoiler jet top cover 25, and a plurality of second protective holes 283 are provided on the top of the spoiler jet top cover 25 for spraying in the direction of the second anti-dumping bearing plate 27 to play a spoiler role. A plurality of single-way air-filling tubes 22 for supplying air to the protective air storage base 24 are arranged above the first anti-dumping bearing plate 21, and the single-way air-filling tubes 22 penetrate the side wall of the protective air storage base 24, and the single-way air-filling tubes 22 are fixedly connected to the protective air storage base 24. A first attitude adjustment disk 284 is fixedly connected to the bottom of the spoiler jet top cover 25, and a second attitude adjustment disk 285 for cooperating with the first attitude adjustment disk 284 to support the spoiler jet top cover 25 is arranged inside the protective air storage base 24; See also Figure 2 and Figure 3In another embodiment, in order to make the function of the deformable support mechanism 2 more abundant, in this embodiment, preferably, the second posture adjustment disk 285 is rotatably connected to the first posture adjustment disk 284, and the bottom of the protective gas storage base 24 is provided with a plurality of first retractable limit driving members 20 for supporting the second posture adjustment disk 285, the first retractable limit driving member 20 is a metal spring, one end of the first retractable limit driving member 20 is fixedly connected to the second posture adjustment disk 285, and the other end of the first retractable limit driving member 20 is fixedly connected to the protective gas storage base 24, and the plurality of first retractable limit driving members 20 are provided. The shrinkage limit drive members 20 are arranged in a circular array on the lower surface of the second posture adjustment disk 285, and a plurality of protective support balls 23 are provided on the upper surface of the second posture adjustment disk 285. A plurality of first protective holes 282 are provided on the upper surface of the spoiler jet top cover 25, and a plurality of protective support balls 23 are arranged in a circular array on the upper surface of the second posture adjustment disk 285. The protective support balls 23 are rotatably connected to the second posture adjustment disk 285. An anti-skid bearing plate 26 for anti-skid function is provided on the upper surface of the second anti-dumping bearing plate 27, and the anti-skid bearing plate 26 is fixedly connected to the second anti-dumping bearing plate 27.

[0022] See also Figure 1 , Figure 4 and Figure 5 In one embodiment, in order to make the use of the deformable spraying mechanism 3 more reliable, in this embodiment, preferably, the deformable spraying mechanism 3 includes an adjustable spraying hood 37, a plurality of third protective holes 30 are opened on the upper surface of the adjustable spraying hood 37, a transmission bulk material box 383 is arranged on the top of the adjustable spraying hood 37, the transmission bulk material box 383 is fixedly connected to the adjustable spraying hood 37, a plurality of first atomizing electric spray heads 384 are arranged on the lower surface of the transmission bulk material box 383, and the use of the first atomizing electric spray heads 384 is the prior art, A hollow material feeding metal pipe 33 for feeding the first atomizing electric spray head 384 is arranged on the top of the adjustable spray hood 37, and the hollow material feeding metal pipe 33 is fixedly connected to the adjustable spray hood 37. A third anti-dumping bearing plate 31 rotatably connected to the hollow material feeding metal pipe 33 is arranged above the adjustable spray hood 37. A plurality of second retractable limit driving members 34 for adjusting the height of the adjustable spray hood 37 are arranged on the upper surface of the third anti-dumping bearing plate 31, and the second retractable limit driving member 34 is an electric telescopic rod; See also Figure 4 and Figure 5In one embodiment, in order to make the function of the deformable spraying mechanism 3 more abundant, in this embodiment, preferably, one end of the second retractable limit driving member 34 is fixedly connected to the deposition metal box 4, the other end of the second retractable limit driving member 34 is fixedly connected to the third anti-dumping bearing plate 31, and a first transmission metal gear 32 is arranged at the bottom of the hollow feeding metal pipe 33, and the first transmission metal gear 32 is fixedly connected to the hollow feeding metal pipe 33, and a second adjustable speed power output member 36 is arranged on the upper surface of the third anti-dumping bearing plate 31, and a servo motor of the second adjustable speed power output member 36 is arranged. The output end of the force output member 36 is provided with a second transmission metal gear 35 for cooperating with the first transmission metal gear 32 to drive the hollow material feeding metal pipe 33 to rotate. The second adjustable speed power output member 36 is fixedly connected to the third anti-dumping bearing plate 31. The inner wall of the adjustable spray hood 37 is provided with a plurality of first hollow transmission air pipes 382 which are sealingly and slidably connected to the spoiler jet top cover 25 through the first protective holes 282. The first hollow transmission air pipe 382 is fixedly connected to the adjustable spray hood 37. A plurality of first hollow jet pipes 381 are arranged on the side surface of the first hollow transmission air pipe 382 in an upwardly inclined manner. See also Figure 4 and Figure 5 In one embodiment, in order to make the function of the deformable spray mechanism 3 more abundant, in this embodiment, preferably, the inner wall of the adjustable spray hood 37 is also provided with a plurality of second hollow transmission air pipes 385 which are sealingly and slidingly connected with the spoiler jet top cover 25 through the first protective hole 282, the second hollow transmission air pipe 385 is fixedly connected to the adjustable spray hood 37, and a plurality of second hollow jet pipes 386 are arranged on the side of the second hollow transmission air pipe 385 in a downward tilted manner, and a plurality of pressure-dividing feed pipes 388 which are connected to the transmission bulk material box 383 are also arranged on the inner wall of the adjustable spray hood 37, the pressure-dividing feed pipe 388 is fixedly connected to the adjustable spray hood 37, and a plurality of second atomizing electric nozzles 387 are arranged at intervals on the pressure-dividing feed pipe 388, and the use of the second atomizing electric nozzles 387 is the prior art.

[0023] See also Figure 1 , Figure 4 and Figure 5In another embodiment, in order to make the use of the deformable spraying mechanism 3 more reliable, in this embodiment, preferably, the deformable spraying mechanism 3 includes an adjustable spraying hood 37, a plurality of third protective holes 30 are opened on the upper surface of the adjustable spraying hood 37, a transmission bulk material box 383 is arranged on the top of the adjustable spraying hood 37, the transmission bulk material box 383 is fixedly connected to the adjustable spraying hood 37, a plurality of first atomizing electric spray heads 384 are arranged on the lower surface of the transmission bulk material box 383, and the use of the first atomizing electric spray heads 384 is a prior art A hollow feeding metal pipe 33 for feeding the first atomizing electric spray head 384 is arranged on the top of the adjustable spray hood 37, and the hollow feeding metal pipe 33 is fixedly connected to the adjustable spray hood 37. A third anti-dumping bearing plate 31 rotatably connected to the hollow feeding metal pipe 33 is arranged above the adjustable spray hood 37. A plurality of second retractable limiting driving members 34 for adjusting the height of the adjustable spray hood 37 are arranged on the upper surface of the third anti-dumping bearing plate 31, and the second retractable limiting driving member 34 is a hydraulic cylinder; See also Figure 4 and Figure 5In one embodiment, in order to make the function of the deformable spraying mechanism 3 more abundant, in this embodiment, preferably, one end of the second retractable limit driving member 34 is fixedly connected to the deposition metal box 4, and the other end of the second retractable limit driving member 34 is fixedly connected to the third anti-dumping bearing plate 31. A first transmission metal gear 32 is provided at the bottom of the hollow feeding metal tube 33, and the first transmission metal gear 32 is fixedly connected to the hollow feeding metal tube 33. A second adjustable speed power output member 36 is provided on the upper surface of the third anti-dumping bearing plate 31, and a stepping motor of the second adjustable speed power output member 36 is provided. The output end of the second adjustable speed power output member 36 is provided with a second transmission metal gear 35 for cooperating with the first transmission metal gear 32 to drive the hollow feeding metal tube 33 to rotate. The second adjustable speed power output member 36 is fixedly connected to the third anti-dumping bearing plate 31, and a plurality of gears are provided on the inner wall of the adjustable spraying hood 37 through the first protective hole 282 and the spoiler jet. The top cover 25 is sealed and slidably connected to the first hollow transmission air delivery pipe 382, ​​the first hollow transmission air delivery pipe 382 is fixedly connected to the adjustable spray hood 37, and the side of the first hollow transmission air delivery pipe 382 is inclined upwardly provided with a plurality of first hollow jet pipes 381, and the inner wall of the adjustable spray hood 37 is also provided with a plurality of second hollow transmission air delivery pipes 385 that are sealed and slidably connected to the spoiler jet top cover 25 through the first protective holes 282, and the second hollow transmission air delivery pipe 385 is fixedly connected to the adjustable spray hood 37. The adjustable spray hood 37 is fixedly connected, and a plurality of second hollow jetting pipes 386 are arranged on the side of the second hollow transmission air pipe 385 which is inclined downward. A plurality of pressure-dividing feeding pipes 388 which are connected to the transmission bulk material box 383 are also arranged on the inner wall of the adjustable spray hood 37. The pressure-dividing feeding pipe 388 is fixedly connected to the adjustable spray hood 37, and a plurality of second atomizing electric nozzles 387 are arranged at intervals on the pressure-dividing feeding pipe 388. The use of the second atomizing electric nozzles 387 is prior art.

[0024] The working principle and use process of the present invention are as follows: before use, the second retractable limit driving member 34 is controlled to retract, so that the adjustable spray hood 37 moves upward and is out of contact with the spoiler jet top cover 25, so that the adjustable spray hood 37 moves up to the top of the deposition metal box 4. When in use, the closed metal door 1 is opened, and then the sample to be processed is placed on the second anti-dumping supporting plate 27. At this time, the anti-slip supporting plate 26 provides anti-slip protection for the sample, and then the closed metal door 1 is closed, and then the second retractable limit driving member 34 is controlled to extend, so that the adjustable spray hood 37 moves down to the top of the deposition metal box 4. Figure 1 Position shown; Then, the raw materials are supplied to the transmission bulk material box 383 through the hollow material feeding metal pipe 33, so that the first atomizing electric spray head 384 and the second atomizing electric spray head 387 both perform atomization spraying of the raw materials. At the same time, the sample is driven to rotate through the first adjustable speed power output member 281, and at the same time, the adjustable spray hood 37 is driven to rotate in the opposite direction to the sample through the second adjustable speed power output member 36. At the same time, the second retractable limit driving member 34 is controlled to continuously extend and contract, so that the first atomizing electric spray head 384 and the second atomizing electric spray head 387 both perform vertical reciprocating movement, so that the raw materials are evenly distributed on the surface of the sample; Secondly, when the adjustable spray hood 37 moves vertically back and forth, the first hollow transmission air delivery pipe 382 and the second hollow transmission air delivery pipe 385 cooperate with the first retractable limit drive member 20 to drive the spoiler jet cover 25, so that the spoiler jet cover 25 moves vertically back and forth. When the spoiler jet cover 25 moves downward, the gas in the spoiler jet cover 25 is sprayed outwardly through the first hollow jet pipe 381 and the second hollow jet pipe 386. The rotation of the first hollow jet tube 381 and the second hollow jet tube 386, as well as the vertical reciprocating movement of the first hollow jet tube 381 and the second hollow jet tube 386, form an inclined annular vortex inside the adjustable spray hood 37, and the raw material is further evenly dispersed on the sample surface by the annular vortex. In addition, when the spoiler jet top cover 25 moves downward, the gas in the spoiler jet top cover 25 is sprayed through the second protective hole 283, and the sprayed gas further drives the raw material to float, so that the raw material is further evenly dispersed on the sample surface; Therefore, through the mutual cooperation of multiple structures, the sprayed raw materials are dispersed multiple times, and the rotation of the spray structure, the height adjustment and the rotation of the sample are matched, so that the raw materials can be quickly and fully deposited on the sample surface evenly, so that the processing effect of the deposition reaction chamber is better. Secondly, the present invention can be applied to different types of samples, so that the application range of the deposition reaction chamber is wider. In addition, the present invention has a simple structure and is easy to use, and is worthy of promotion and use.

[0025] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0026] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A deposition reaction chamber of a vacuum vapor deposition device, comprising a deposition metal box, one end of which is movably connected to a closed metal door, and the inner wall of the deposition metal box is provided with a plurality of detachable thermostats for temperature regulation, characterized in that: The bottom of the deposition metal box is provided with a deformable support mechanism, the top of the deposition metal box is provided with a deformable spraying mechanism corresponding to the deformable support mechanism, the deformable support mechanism includes a first anti-dumping bearing plate, the first anti-dumping bearing plate is fixedly connected to the deposition metal box, a first adjustable speed power output member is provided in the middle of the upper surface of the first anti-dumping bearing plate, the first adjustable speed power output member is fixedly connected to the first anti-dumping bearing plate, a second anti-dumping bearing plate is provided at the output end of the first adjustable speed power output member, the second anti-dumping bearing plate is fixedly connected to the first adjustable speed power output member A protective gas storage base is also provided on the upper surface of the first anti-dumping bearing plate, the protective gas storage base is fixedly connected to the first anti-dumping bearing plate, the top of the protective gas storage base is sealingly and slidably connected with a spoiler jet top cover, the top of the spoiler jet top cover is provided with a plurality of second protective holes for spraying in the direction of the second anti-dumping bearing plate to play a spoiler role, a plurality of single-way inflation pipes for supplying air to the protective gas storage base are provided above the first anti-dumping bearing plate, the single-way inflation pipe runs through the side wall of the protective gas storage base, and the single-way inflation pipe is fixedly connected to the protective gas storage base.

2. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 1, characterized in that: The bottom of the spoiler jet top cover is fixedly connected with a first attitude adjustment disk, and the interior of the protective air storage base is provided with a second attitude adjustment disk for cooperating with the first attitude adjustment disk to support the spoiler jet top cover, the second attitude adjustment disk is rotatably connected to the first attitude adjustment disk, and the bottom of the protective air storage base is provided with a plurality of first retractable limiting drive parts for supporting the second attitude adjustment disk.

3. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 2, characterized in that: One end of the first retractable limit drive component is fixedly connected to the second posture adjustment disk, and the other end of the first retractable limit drive component is fixedly connected to the protective gas storage base. A plurality of first retractable limit drive components are arranged in a circular array on the lower surface of the second posture adjustment disk, and a plurality of protective support balls are provided on the upper surface of the second posture adjustment disk.

4. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 3, characterized in that: A plurality of first protective holes are provided on the upper surface of the spoiler jet top cover, a plurality of protective support balls are arranged in a ring array on the upper surface of the second attitude adjustment disk, the protective support balls are rotatably connected to the second attitude adjustment disk, and an anti-skid bearing plate for anti-skid function is provided on the upper surface of the second anti-dump bearing plate, and the anti-skid bearing plate is fixedly connected to the second anti-dump bearing plate.

5. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 4, characterized in that: The deformable spray mechanism includes an adjustable spray hood, a plurality of third protective holes are opened on the upper surface of the adjustable spray hood, a transmission bulk box is arranged on the top of the adjustable spray hood, the transmission bulk box is fixedly connected to the adjustable spray hood, a plurality of first atomizing electric nozzles are arranged on the lower surface of the transmission bulk box, a hollow feed metal pipe for feeding the first atomizing electric nozzle is arranged on the top of the adjustable spray hood, the hollow feed metal pipe is fixedly connected to the adjustable spray hood, a third anti-dumping bearing plate rotatably connected to the hollow feed metal pipe is arranged above the adjustable spray hood, and a plurality of second retractable limit driving parts for adjusting the height of the adjustable spray hood are arranged on the upper surface of the third anti-dumping bearing plate.

6. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 5, characterized in that: One end of the second retractable limit driving component is fixedly connected to the deposition metal box, and the other end of the second retractable limit driving component is fixedly connected to the third anti-dumping supporting plate. A first transmission metal gear is arranged at the bottom of the hollow feed metal tube, and the first transmission metal gear is fixedly connected to the hollow feed metal tube. A second adjustable speed power output component is arranged on the upper surface of the third anti-dumping supporting plate, and a second transmission metal gear for cooperating with the first transmission metal gear to drive the hollow feed metal tube to rotate is arranged at the output end of the second adjustable speed power output component.

7. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 6, characterized in that: The second adjustable speed power output component is fixedly connected to the third anti-dumping bearing plate, and a plurality of first hollow transmission air pipes are provided on the inner wall of the adjustable spray hood, which are sealingly and slidingly connected to the spoiler jet top cover through the first protective holes. The first hollow transmission air pipe is fixedly connected to the adjustable spray hood, and a plurality of first hollow jet pipes are provided on the side of the first hollow transmission air pipe, which is inclined upward.

8. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 7, characterized in that: The inner wall of the adjustable spray hood is also provided with a plurality of second hollow transmission air pipes which are sealingly and slidingly connected to the spoiler jet top cover through the first protective holes. The second hollow transmission air pipe is fixedly connected to the adjustable spray hood, and a plurality of second hollow jet pipes are arranged on the side of the second hollow transmission air pipe in a downward tilted manner.

9. The deposition reaction chamber of the vacuum vapor deposition equipment according to claim 8, characterized in that: The inner wall of the adjustable spray hood is also provided with a plurality of pressure-dividing feeding pipes connected with the transmission bulk material box, the pressure-dividing feeding pipes are fixedly connected with the adjustable spray hood, and a plurality of second atomizing electric nozzles are arranged at intervals on the pressure-dividing feeding pipes.

10. The deposition reaction chamber of the vacuum vapor deposition equipment according to any one of claims 1 to 9, characterized in that: Several deformable protective plates for anti-slip and shock-absorbing are arranged at both ends of the lower surface of the deposition metal box, and several limiting lifting plates are arranged on the top of the side of the deposition metal box. The limiting lifting plates are fixedly connected to the deposition metal box, and several detachable display pieces for information display are arranged on the bottom of the side of the limiting lifting plates.

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