Ventilation system for clean room

Abstract

The invention discloses a ventilation system used for a clean room, and relates to the technical field of clean room ventilation, the ventilation system comprises at least two fuming cupboards, the number of the fuming cupboards is at least two, the ventilation system further comprises a main pipeline, and the main pipeline is fixedly arranged in the clean room; one end of each branch pipeline is communicated with the main pipeline, the other end of each branch pipeline is communicated with the fuming cupboards, and the number of the branch pipelines is in one-to-one correspondence with the number of the fuming cupboards; the baffles are rotationally arranged on the branch pipelines through rotating shafts, and the baffles are attached to the inner side walls of the branch pipelines; the air volume detection piece is arranged in the main pipeline and is used for detecting the air volume of the main pipeline; the air volume control assembly is arranged in the main pipeline and used for controlling the air inlet volume according to the detected air volume; the control method has the effect of keeping the air volume constant during working.

Description

Technical Field

[0001] The present application relates to the technical field of clean room ventilation, and in particular to a ventilation system for a clean room. Background Art

[0002] Cleanrooms play a vital role in industries such as semiconductors and pharmaceuticals. They are controlled environments that reduce particulate matter and other pollutants in the air, thereby ensuring the quality of the production process. As a key component of a cleanroom, the ventilation system not only needs to effectively regulate the indoor air quality, but also maintain a certain pressure gradient to prevent external pollutants from entering. Reasonable ventilation system design is an important part of ensuring the stability of the cleanroom environment quality, and has a significant impact on improving product yield and production efficiency.

[0003] To meet the ventilation needs in clean rooms, existing ventilation systems usually consist of fume hoods, main ducts and branch ducts. The fume hoods are used to capture and discharge polluted air, while the main ducts and branch ducts are responsible for transporting and distributing the treated clean air. Common ventilation systems also include various air volume detection and control components, such as air volume detection sensors and manual or automatic valves. Specifically, a single fume hood is designed to ventilate directly through the main duct, or a multi-fume hood system is configured with baffles and manual valves to meet the needs of different clean rooms.

[0004] However, there is a significant problem with the current ventilation system. When one of the fume hoods stops working during operation, the air volume of some fume hoods will be unstable. Therefore, how to optimize the air volume distribution control in a multi-fume hood environment while ensuring ventilation quality has become a technical problem that needs to be solved urgently. Summary of the invention

[0005] In order to control the problem of maintaining a constant air volume during operation, the present application provides a ventilation system for a clean room.

[0006] The present application provides a ventilation system for a clean room, which adopts the following technical solution: A ventilation system for a clean room, comprising a fume hood, wherein at least two fume hoods are provided, and further comprising: A main pipeline, wherein the main pipeline is fixedly installed in the clean room; A branch pipe, one end of which is connected to the main pipe, and the other end of which is connected to the fume hood, wherein the number of the branch pipes corresponds to the number of the fume hoods; A baffle, the baffle is rotatably disposed on the branch pipe via a rotating shaft, and the baffle is in contact with the inner wall of the branch pipe; An air volume detection component, which is arranged in the main duct and is used to detect the air volume of the main duct; An air volume control component is disposed in the main duct and is used to control the air intake volume according to the detected air volume.

[0007] By adopting the above technical solution, the ventilation system can automatically adjust the air intake according to the air volume in the main duct, ensuring the stability and uniformity of the air volume in the clean room. At the same time, the baffle fits the inner wall of the branch duct to effectively prevent unfiltered air from entering the clean room, thereby ensuring the air quality of the clean room.

[0008] Optionally, the air volume detection component includes: An air guide plate, the air guide plate is fixedly arranged in the main pipeline, the air guide plate abuts against the inner wall of the main pipeline, and the air guide plate is provided with air holes at intervals; An air volume detection sensor is fixedly arranged at one end of the air guide plate.

[0009] By adopting the above technical solution, the air volume detection component includes an air guide plate and an air volume detection sensor, the air guide plate is fixed in the main pipeline and contacts the inner wall of the main pipeline, the air guide plate is provided with air guide holes at intervals, and the air volume detection sensor is fixed at one end of the air guide plate. It can effectively improve the accuracy of air volume detection and ensure the operational stability of the ventilation system.

[0010] Optionally, the air volume control component includes: A movable plate, the upper end of which is rotatably connected to the main pipe via a rotating shaft, the peripheral side of the movable plate abuts against the main pipe, the axis of the movable plate, the air guide plate and the main pipe are equal, and a sliding groove is horizontally arranged at one end of the movable plate close to the air guide plate; A telescopic rod, wherein the fixed end of the telescopic rod is fixedly connected to one end of the movable plate, and the telescopic end of the telescopic rod is a free end; A connecting rod, one end of which is slidably disposed in the slide groove; the other end of the connecting rod passes through the slide groove, and the other end of the connecting rod is placed close to one end of the air guide plate; A fixing piece is arranged in the connecting rod and is used to fix the telescopic rod and the connecting rod.

[0011] By adopting the above technical solution, the movable plate in the air volume control assembly can rotate in the main duct, and the position of the movable plate can be adjusted by the cooperation of the telescopic rod and the connecting rod, and the position of the telescopic rod and the connecting rod is fixed by the fixing piece, so as to realize the effective control of the air volume of the main duct. Specifically, the rotation of the movable plate can adjust the opening area of ​​the main duct, and then adjust the air volume; the cooperation of the telescopic rod and the connecting rod makes the position adjustment of the movable plate more flexible; the fixing piece ensures the stable connection between the telescopic rod and the connecting rod, and ensures that the air volume control assembly can maintain a stable working state under different air volume conditions.

[0012] Optionally, the connecting rod is horizontally provided with a matching cavity, the matching cavity is vertically provided with a moving groove, the free end of the telescopic rod is provided with a clamping groove, and the fixing member includes: A spring, one end of which is fixed to the bottom of the moving groove; A fixed block, wherein the fixed block is slidably disposed in the movable groove, one end of the fixed block is fixedly connected to an end of the spring away from the bottom wall of the movable groove, and the other end of the fixed block is embedded in the clamping groove; Wherein, when the movable slot is connected to the clamping slot, the spring drives the fixing block to be embedded in the clamping slot.

[0013] By adopting the above technical solution, the matching cavity and movable groove of the connecting rod cooperate with the clamping groove of the telescopic rod, and combined with the action of the spring and the fixed block, the telescopic rod can be firmly connected to the connecting rod, thereby improving the stability of the air volume control assembly, thereby ensuring that the air volume detection component accurately detects the air volume in the main duct, thereby achieving precise control of the air intake volume of the ventilation system.

[0014] Optionally, a guiding slope is provided at one end of the fixed block close to the movable plate.

[0015] By adopting the above technical solution, the guide plate can effectively guide the fixing block to be smoothly embedded in the clamping groove, thereby improving the stability and reliability of the fixing piece, and thus ensuring the stability of the connection between the telescopic rod and the connecting rod.

[0016] Optionally, a synchronization plate is fixedly provided on the baffle, and the synchronization plate is coaxially arranged with the baffle, and the synchronization plate is rotatably arranged in the branch pipe, and the diameter of the synchronization plate is smaller than the diameter of the baffle, and a pull rope is fixedly provided at one end of the baffle close to the main pipe, and the other end of the pull rope is fixedly provided at one end of the movable plate away from the air guide plate.

[0017] By adopting the above technical solution, the synchronization plate and the baffle are coaxially arranged and rotatably arranged in the branch pipe. The diameter of the synchronization plate is smaller than the diameter of the baffle, so that the synchronization plate can follow the rotation when the baffle rotates to achieve synchronous movement, thereby improving the control accuracy; the other end of the pull rope fixed to one end of the baffle close to the main pipe is fixed to the end of the movable plate away from the air guide plate, ensuring that the movement of the baffle is directly related to the position change of the movable plate, thereby realizing automatic adjustment of the air volume and improving the intelligence level of the ventilation system.

[0018] Optionally, a sealing gasket is provided around the baffle.

[0019] By adopting the above technical solution, a sealing gasket is arranged around the baffle, which improves the sealing between the baffle and the branch pipe, effectively prevents gas leakage, and ensures the stable operation of the ventilation system and the air quality in the clean room.

[0020] Optionally, the air volume control components correspond to the number of fume hoods. By adopting the above technical solution, the number of air volume control components corresponds to the number of fume hoods, so that each fume hood can be controlled individually.

[0021] In summary, an embodiment of the present invention provides a ventilation system for a clean room, which includes at least one of the following beneficial technical effects: 1. The ventilation system can automatically adjust the air intake according to the air volume in the main duct to ensure the stability and uniformity of the air volume in the clean room. At the same time, the baffle fits the inner wall of the branch duct to effectively prevent unfiltered air from entering the clean room and ensure the air quality of the clean room.

[0022] 2. The movable plate in the air volume control assembly can rotate in the main duct, and the position of the movable plate can be adjusted by the cooperation of the telescopic rod and the connecting rod, and the position of the telescopic rod and the connecting rod is fixed by the fixing piece, so as to realize the effective control of the air volume of the main duct. Specifically, the rotation of the movable plate can adjust the opening area of ​​the main duct, and then adjust the air volume; the cooperation of the telescopic rod and the connecting rod makes the position adjustment of the movable plate more flexible; the fixing piece ensures the stable connection between the telescopic rod and the connecting rod, ensuring that the air volume control assembly can maintain a stable working state under different air volume conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic structural diagram of a ventilation system for a clean room provided by an embodiment of the present invention; Figure 2 A cross-sectional view of a ventilation system for a clean room provided by an embodiment of the present invention; Figure 3 A schematic diagram of the main pipeline structure in a ventilation system for a clean room provided by an embodiment of the present invention; Figure 4 A schematic diagram of a branch pipe structure in a ventilation system for a clean room provided by an embodiment of the present invention; Figure 5 A schematic diagram of the main pipeline structure in a ventilation system for a clean room provided in an embodiment of the present invention.

[0024] Description of the symbols in the figure: 1. Fume hood; 11. Main duct; 12. Branch duct; 13. Baffle; 2. Air volume detection member; 21. Air guide plate; 22. Air volume detection sensor; 31. Moving plate; 32. Slide; 33. Telescopic rod; 34. Connecting rod; 4. Fixing member; 41. Spring; 42. Fixing block; 43. Matching cavity; 44. Snap-in groove; 45. Moving groove; 51. Synchronous plate; 52. Pull rope. DETAILED DESCRIPTION

[0025] The following is combined with Figure 1-5 This application is described in further detail.

[0026] Combination Figure 1 , Figure 2 and Figure 3 The embodiment of the present application discloses a ventilation system for a clean room, including: a fume hood 1, the fume hood 1 is provided with at least two, a main duct 11, a branch duct 12, a baffle 13, an air volume detection component 2, and an air volume control component, the main duct 11 is fixed in the clean room; one end of the branch duct 12 is connected to the main duct 11, and the other end is connected to the fume hood 1, wherein the number of branch ducts 12 corresponds to the number of fume hoods 1 one by one; the baffle 13 is rotatably arranged on the branch duct 12 by a rotating shaft, and the baffle 13 is fitted with the inner wall of the branch duct 12; the air volume detection component 2 is arranged in the main duct 11, and is used to detect the air volume of the main duct 11; the air volume control component is arranged in the main duct 11, and is used to control the air intake according to the detected air volume. A sealing gasket is arranged around the baffle 13 In the embodiment of the present application, the main duct 11 is fixedly installed in the clean room as the core of the entire ventilation system. The cross-section of the main duct 11 is square, and the branch duct 12 is cylindrical. The branch duct 12 is connected to the main duct 11 through a flange, wherein one end of the branch duct is connected to the main duct 11 by a flange or welding, and the other end is connected to the air inlet of the fume hood 1. The number of branch ducts 12 corresponds to the number of fume hoods 1 to ensure that each fume hood 1 can obtain sufficient air volume. The baffle 13 is disc-shaped, and a rotatable baffle 13 is installed on each branch duct 12. The baffle 13 is connected to the duct wall through a rotating shaft for easy adjustment. A sealing gasket is arranged around the baffle 13 to ensure that the baffle 13 can fit tightly against the duct wall when closed to prevent airflow leakage. In specific use, before the system is started, the air volume requirements of each fume hood 1 are preset according to the level and usage of the clean room, and all baffles 13, gaskets and pipe connections are checked and confirmed to be in good condition. After the system is started, the baffle 13 is opened to allow air to enter the fume hood 1, and the air volume detection component 2 of the baffle 13 starts to monitor the air volume in the main duct 11 in real time. When the air volume is detected to be lower or higher than the preset value, the air volume control component automatically adjusts the air intake to keep the air volume within the preset range, so that the air volume of the fume hood 1 remains constant.

[0027] Combination Figure 2 and Figure 3 Specifically, the air volume detection component 2 includes an air guide plate 21 and an air volume detection sensor 22. The air guide plate 21 is fixed in the main duct 11, the air guide plate 21 is in contact with the inner wall of the main duct 11, and air holes are arranged at intervals on the air guide plate 21; the air volume detection sensor 22 is fixed at one end of the air guide plate 21.

[0028] In the embodiment of the present application, the air guide plate 21 is arranged in a square shape, and the air guide plate 21 is fixedly arranged in the main duct 11 by welding or bolting. It should be noted that the air guide plate 21 adopts a design of air holes arranged at intervals, which allow air flow to pass through and guide the air flow to the air volume detection sensor 22 at a certain speed and direction. The size, shape and distribution of the air holes need to be set according to factors such as the size of the main duct 11, the air flow velocity and the air volume detection requirements. The air volume detection sensor 22 is used to monitor the air flow through the air guide plate 21 in real time, and convert it into a readable or processable signal output. Common air volume detection sensors 22 include hot wire anemometers, differential pressure sensors, etc., which can accurately measure the flow velocity or pressure difference of the air flow, thereby calculating the air volume.

[0029] In specific use, when wind passes through the wind guide plate 21, the sensor detects the air volume. When the detected air volume is greater than or less than the preset air volume, the air volume control component is driven to adjust the air volume, thereby keeping the air volume of each fume hood 1 constant.

[0030] Combination Figure 4 In a specific embodiment, the air volume control assembly includes a movable plate 31, a telescopic rod 33, a connecting rod 34, and a fixing member 4. The upper end of the movable plate 31 is rotatably connected to the main pipe 11 through a rotating shaft. The peripheral side of the movable plate 31 is in conflict with the main pipe 11. The movable plate 31 is equal to the axis of the air guide plate 21 and the main pipe 11. A slide groove 32 is horizontally arranged at one end of the movable plate 31 close to the air guide plate 21; the fixed end of the telescopic rod 33 is fixedly connected to one end of the movable plate 31, and the telescopic end of the telescopic rod 33 is a free end; one end of the connecting rod 34 is slidably arranged in the slide groove 32; the other end of the connecting rod 34 passes through the slide groove 32, and the other end of the connecting rod 34 is placed at one end close to the air guide plate 21; the fixing member 4 is arranged in the connecting rod 34, for fixing the telescopic rod 33 to the connecting rod 34.

[0031] Combination Figure 5Specifically, the connecting rod 34 is horizontally provided with a matching cavity 43, the matching cavity 43 is vertically provided with a moving groove 45, the free end of the telescopic rod 33 is provided with a clamping groove 44, and the fixing member 4 includes: a spring 41 and a fixing block 42, one end of the spring 41 is fixed to the bottom of the moving groove 45; the fixing block 42 is slidably arranged in the moving groove 45, one end of the fixing block 42 is fixedly connected to one end of the spring 41 away from the bottom wall of the moving groove 45, and the other end of the fixing block 42 is embedded in the clamping groove 44; wherein, when the moving groove 45 is connected to the clamping groove 44, the spring 41 drives the fixing block 42 to be embedded in the clamping groove 44. A guide plate is arranged at one end of the fixing block 42 close to the moving plate 31.

[0032] In the embodiment of the present application, the movable plate 31 is arranged in a square shape, and the upper end of the movable plate 31 is rotatably connected to the main pipe 11 through a rotating shaft to ensure that the movable plate 31 can rotate around the rotating shaft; the telescopic rod 33 can be arranged in a cylindrical shape or a square rod shape, and the telescopic rod 33 and the movable rod can be arranged in an integral manner, or can be fixedly connected by welding or bolting, which is not specifically limited in the embodiment of the present application. Among them, the telescopic rod 33 is an electric telescopic rod 33, and the electric telescopic rod 33 is electrically connected to the air volume detection sensor 22. When the air volume detection sensor 22 detects that the air volume does not meet the preset air volume, a control signal is sent to the electric telescopic rod 33, thereby controlling the electric telescopic rod 33 to extend or shorten, thereby controlling the air intake. One end of the connecting rod 34 is arranged in a spherical shape, and the other end is consistent with the shape of the telescopic rod 33. The slide groove 32 is arranged in a T-shape, so that the connecting rod 34 can slide, which is not specifically limited in the embodiment of the present application. The movable groove 45 and the clamping groove 44 are both arranged in a square shape. The shape of the matching cavity 43 is consistent with the shape of the telescopic rod 33 , and the free end of the telescopic rod 33 can be embedded in the matching cavity 43 .

[0033] During specific use, when the air volume needs to be adjusted, the telescopic rod 33 is driven to extend. When the telescopic rod 33 is in the process of extending, the free end of the telescopic rod 33 is embedded in the matching cavity 43. When the movable groove 45 is connected with the clamping groove 44, driven by the spring 41, the fixed block 42 will quickly embed into the clamping groove 44 to achieve a fixed connection between the telescopic rod 33 and the connecting rod 34, thereby pushing the opening size of the air guide plate 21, thereby changing the size of the airflow channel between the air guide plate 21 and the main duct 11, and then achieving the purpose of adjusting the air volume.

[0034] Replay Figure 4 In a specific embodiment, a synchronization plate 51 is fixedly provided on the baffle 13, and the synchronization plate 51 is coaxially arranged with the baffle 13. The synchronization plate 51 is rotatably arranged in the branch pipe 12. The diameter of the synchronization plate 51 is smaller than the diameter of the baffle 13. A pull rope 52 is fixedly provided at one end of the baffle 13 close to the main pipe 11, and the other end of the pull rope 52 is fixedly arranged at one end of the movable plate 31 away from the air guide plate 21.

[0035] In the embodiment of the present application, a synchronization plate 51 with a diameter smaller than that of the baffle 13 is fixedly installed at the center or near the center of the baffle 13. The synchronization plate 51 should be coaxially arranged with the baffle 13 to ensure that the two are synchronized during rotation. The synchronization plate 51 also needs to have a certain strength and rigidity. A branch pipe 12 is installed on the main pipe 11 for installing and adjusting the baffle 13 and the synchronization plate 51. The size of the branch pipe 12 needs to ensure that the synchronization plate 51 can rotate freely without friction or hindrance. It should be noted that the synchronization plate 51 and the baffle 13 can both rotate, wherein the synchronization plate 51 is tilted, and the end of the synchronization plate 51 away from the air guide plate 21 is tilted toward the end close to the baffle 13. In specific use, when the system is not started, the baffle 13 and the synchronization plate 51 are both in a stationary state, the pull rope 52 is in a relaxed state, and the movable plate 31 is in its initial position. When the fume hood 1 is opened, the baffle 13 rotates, wherein the baffle 13 drives the synchronous plate 51 to rotate, and then pulls the pull rope 52, so that the pull rope 52 drives the movable plate 31 to rotate, and then the main duct 11 is opened for ventilation.

[0036] The number of air volume control components corresponds to the number of fume hoods 1 , so that each fume hood 1 can control the air intake volume individually.

[0037] The implementation principle of the embodiment of the present application is as follows: before the system is started, the air volume requirements of each fume hood 1 are preset according to the level and usage of the clean room, and all baffles 13, gaskets and pipe connections are checked and confirmed to be in good condition. After the system is started, the baffle 13 is opened to allow air to enter the fume hood 1, and at the same time, the air volume detection component 2 of the baffle 13 begins to monitor the air volume in the main duct 11 in real time. When it is detected that the air volume is lower than or higher than the preset value, the air volume control component automatically adjusts the air intake to keep the air volume within the preset range, thereby keeping the air volume of the fume hood 1 constant.

[0038] This specific embodiment is merely an explanation of the present application and is not a limitation of the present application. After reading this specification, those skilled in the art may make modifications to the present embodiment without any creative contribution as needed, but such modifications are protected by the patent law as long as they are within the scope of the claims of the present application.

Claims

1. A ventilation system for a clean room, comprising a fume hood (1), wherein the fume hood (1) is provided with at least two, characterized in that: Also includes: A main pipeline (11), wherein the main pipeline (11) is fixedly arranged in the clean room; a branch pipe (12), one end of the branch pipe (12) being in communication with the main pipe (11), and the other end of the branch pipe being in communication with the fume hood (1), wherein the number of the branch pipes (12) corresponds one-to-one to the number of the fume hoods (1); a baffle (13), the baffle (13) being rotatably disposed on the branch pipe (12) via a rotating shaft, the baffle (13) being in contact with an inner wall of the branch pipe (12); An air volume detection component (2), the air volume detection component (2) being arranged in the main duct (11) and being used to detect the air volume of the main duct (11); An air volume control component, the air volume control component is arranged in the main duct (11) and is used to control the air intake volume according to the detected air volume.

2. A ventilation system for a clean room according to claim 1, characterized in that: The air volume detection element (2) comprises: An air guide plate (21), the air guide plate (21) being fixedly arranged in the main duct (11), the air guide plate (21) being in contact with an inner wall of the main duct (11), and the air guide plate (21) being provided with air holes at intervals; An air volume detection sensor (22), wherein the air volume detection sensor (22) is arranged and fixedly mounted on one end of the air guide plate (21).

3. A ventilation system for a clean room according to claim 2, characterized in that: The air volume control component comprises: a movable plate (31), the upper end of the movable plate (31) being rotatably connected to the main pipe (11) via a rotating shaft, the peripheral side of the movable plate (31) being in contact with the main pipe (11), the axis of the movable plate (31) and the air guide plate (21) and the main pipe (11) being equal, and a slide groove (32) being horizontally arranged at one end of the movable plate (31) close to the air guide plate (21); A telescopic rod (33), wherein the fixed end of the telescopic rod (33) is fixedly connected to one end of the movable plate (31), and the telescopic end of the telescopic rod (33) is a free end; a connecting rod (34), one end of the connecting rod (34) being slidably disposed in the slide groove (32); the other end of the connecting rod (34) passing through the slide groove (32), and the other end of the connecting rod (34) being placed at one end close to the air guide plate (21); A fixing member (4), the fixing member (4) being arranged in the connecting rod (34) and being used for fixing the telescopic rod (33) and the connecting rod (34).

4. A ventilation system for a clean room according to claim 3, characterized in that: The connecting rod (34) is horizontally provided with a matching cavity (43), the matching cavity (43) is vertically provided with a moving groove (45), the free end of the telescopic rod (33) is provided with a clamping groove (44), and the fixing member (4) comprises: A spring (41), one end of the spring (41) being fixed to the bottom of the movable groove (45); a fixed block (42), the fixed block (42) being slidably disposed in the movable groove (45), one end of the fixed block (42) being fixedly connected to an end of the spring (41) away from the bottom wall of the movable groove (45), and the other end of the fixed block (42) being embedded in the clamping groove (44); When the movable slot (45) is connected to the engaging slot (44), the spring (41) drives the fixing block (42) to be embedded in the engaging slot (44).

5. A ventilation system for a clean room according to claim 4, characterized in that: A guiding inclined surface is provided at one end of the fixed block (42) close to the movable plate (31).

6. A ventilation system for a clean room according to claim 3, characterized in that: A synchronization plate (51) is fixedly arranged on the baffle (13), the synchronization plate (51) being coaxially arranged with the baffle (13), the synchronization plate (51) being rotatably arranged in the branch pipe (12), the diameter of the synchronization plate (51) being smaller than the diameter of the baffle (13), a pull rope (52) being fixedly arranged at one end of the baffle (13) close to the main pipe (11), and the other end of the pull rope (52) being fixedly arranged at one end of the movable plate (31) away from the air guide plate (21).

7. A ventilation system for a clean room according to claim 1, characterized in that: A sealing gasket is provided on the peripheral side of the baffle (13).

8. A ventilation system for a clean room according to claim 1, characterized in that: The number of the air volume control components corresponds to the number of the fume hoods (1).

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