Hemispherical resonator gyroscope asynchronous vacuumizing system and method

Abstract

According to the hemispherical resonator gyroscope asynchronous vacuumizing system and method provided by the invention, in the process of vacuumizing by using the hemispherical resonator gyroscope asynchronous vacuumizing system provided by the invention, the hemispherical resonator gyroscope which is installed in advance is vacuumized through the main vacuumizing pipeline; if the hemispherical resonator gyroscope is newly added in the system for vacuumizing, the newly added hemispherical resonator gyroscope can be communicated to the pre-vacuumizing pipeline through the gyroscope mounting bayonet and the pre-vacuumizing valve, and after the hemispherical resonator gyroscope is subjected to pre-vacuumizing through the pre-vacuumizing pipeline, the main vacuumizing valve is opened; and the hemispherical resonator gyroscope is directly connected into the main pumping pipeline for vacuumizing. According to the asynchronous vacuum-pumping system for the hemispherical resonator gyroscope, the hemispherical resonator gyroscope can be newly added at any time in the vacuum-pumping process without stopping the whole system or damaging the existing vacuum environment, so that the asynchronous vacuum-pumping system has extremely high convenience and operation flexibility; and the method has positive significance in improving the production efficiency of the hemispherical resonator gyroscope.

Description

Technical Field

[0001] The invention belongs to the technical field of hemispherical resonant gyroscope production, and in particular relates to an asynchronous vacuum pumping system and method for a hemispherical resonant gyroscope. Background Art

[0002] The hemispherical resonant gyroscope is one of the most advanced and core sensor devices in the current inertial navigation system. Due to its high precision, long life, high stability, high reliability, good shock and vibration resistance and temperature performance, it has extremely high application value in both civil and military applications.

[0003] The hemispherical resonator is the core component inside the hemispherical resonator gyroscope. When the hemispherical resonator is vibrating, if there are air molecules around it, these air molecules will collide with the hemispherical resonator, thereby producing a damping effect, reducing the quality factor Q value of the hemispherical resonator, and thus affecting the accuracy of the hemispherical resonator gyroscope. Therefore, the hemispherical resonator gyroscope has extremely high requirements for the degree of vacuum.

[0004] There are two main methods for evacuating a hemispherical resonant gyroscope in the prior art: 1. Sealing and packaging the hemispherical resonant gyroscope in an atmospheric environment, connecting a plurality of packaged hemispherical resonant gyroscopes to a vacuuming device through an exhaust copper tube, and after evacuating the interior of the hemispherical resonant gyroscope, sealing the exhaust copper tube; 2. Placing the unsealed hemispherical resonant gyroscope in a sealed cavity, and after evacuating the sealed cavity, sealing and packaging the hemispherical resonant gyroscope in the vacuum sealed cavity.

[0005] In practice, the production of hemispherical resonant gyroscopes is not carried out synchronously. No matter which method in the prior art is used, during the process of evacuating the hemispherical resonant gyroscopes, if some hemispherical resonant gyroscopes are to be added, the ongoing vacuuming operation needs to be stopped and the existing vacuum environment will be destroyed, which will result in the need to re-perform the vacuuming process and even damage the hemispherical resonant gyroscopes. The vacuuming process for the hemispherical resonant gyroscopes generally takes more than one week. Therefore, in the prior art, there is a technical problem that adding a new hemispherical resonant gyroscope during the vacuuming process will reduce the production efficiency. Summary of the invention

[0006] In order to solve the technical problem in the background technology that adding a hemispherical resonant gyroscope during the vacuuming process will lead to reduced production efficiency, the present invention provides a hemispherical resonant gyroscope asynchronous vacuuming system and method.

[0007] In order to achieve the above object, the present invention adopts the following technical solution:

[0008] In a first aspect, the present invention provides an asynchronous vacuum pumping system for a hemispherical resonant gyroscope, comprising: a main vacuum pumping pipeline, a pre-vacuum pumping pipeline, and a plurality of gyroscope mounting bayonet ports; each of the gyroscope mounting bayonet ports is connected to the main vacuum pumping pipeline and the pre-vacuum pumping pipeline;

[0009] Gyroscope mounting bayonet, used to connect the exhaust copper pipe of the hemispherical resonator gyroscope;

[0010] A main pumping pipeline, used for performing main vacuum pumping on the hemispherical resonant gyroscope;

[0011] A pre-evacuation pipeline for pre-evacuating the hemispherical resonant gyroscope before the main vacuum pumping process;

[0012] A main vacuum pumping valve is provided on the main vacuum pumping pipeline and is used to cut off or connect the passage between the newly added hemispherical resonant gyroscope and the main vacuum pumping pipeline when a hemispherical resonant gyroscope is added;

[0013] The pre-vacuum valve is arranged on the pre-vacuum pipeline and is used to connect the newly added hemispherical resonant gyroscope with the pre-vacuum pipeline when the hemispherical resonant gyroscope is added.

[0014] Optionally, the asynchronous vacuum pumping system of the hemispherical resonant gyroscope also includes a main pumping module, a pre-pumping module, and a leak detection module; the leak detection module is connected to the pre-pumping module; the main pumping pipeline is connected to the main pumping module through a first connecting pipe; the pre-pumping pipeline is connected to the pre-pumping module through a second connecting pipe; the first connecting pipe is connected to the second connecting pipe.

[0015] Optionally, the first connecting pipe is connected to the second connecting pipe via a vacuum gate valve.

[0016] Optionally, the pre-pumping module includes a molecular pump and a mechanical pump that are connected to each other, the molecular pump is connected to the leak detection module, and the molecular pump is connected to the pre-pumping pipeline through the second connecting pipe; the main pumping module is an ion pump.

[0017] Optionally, the leak detection module is a helium mass spectrometer.

[0018] Optionally, an ionization gauge is provided at the gyroscope mounting bayonet; and a heating device is provided on the main extraction pipeline.

[0019] In a second aspect, the present invention further provides a method for asynchronously evacuating a hemispherical resonator gyroscope, which is used in the asynchronously evacuating a hemispherical resonator gyroscope system described above, comprising the steps of:

[0020] S1: vacuuming the previously installed hemispherical resonant gyroscope;

[0021] S2: Connect the newly added hemispherical resonant gyroscope to the gyroscope installation bayonet, open the corresponding pre-vacuum valve, close the corresponding main vacuum valve, cut off the connection between the newly added hemispherical resonant gyroscope and the main vacuum pipeline, and enable the pre-vacuum module to pre-vacuum the newly added hemispherical resonant gyroscope through the pre-vacuum pipeline;

[0022] S3: When the vacuum degree of the newly added hemispherical resonant gyroscope is evacuated to less than 1E-4Pa, the corresponding main vacuum valve is opened to connect the newly added hemispherical resonant gyroscope to the main vacuum pipeline, and all hemispherical resonant gyroscopes are vacuumed through the main vacuum module and the pre-vacuum module;

[0023] S4: When the vacuum degree of any hemispherical resonant gyroscope is pumped below 1E-7Pa, the hemispherical resonant gyroscope is heated and the getter is activated to perform a gettering process until the vacuum degree of the hemispherical resonant gyroscope is pumped below 1E-7Pa again, and the vacuuming operation of the hemispherical resonant gyroscope is completed;

[0024] S5: Repeat steps S1 to S4 until the vacuuming operation of all hemispherical resonant gyroscopes is completed.

[0025] Optionally, in step S1, the step of evacuating the previously installed hemispherical resonant gyroscope specifically includes:

[0026] S1.1: Close the main vacuum valve, open the pre-vacuum valve, start the pre-vacuum module, and pre-evacuate the main vacuum pipeline, pre-vacuum pipeline and the previously installed hemispherical resonant gyroscope;

[0027] S1.2: During the pre-evacuation process, a leak detection module is used to detect leaks. If the detection result shows that there is no leak, step S1.3 is executed;

[0028] S1.3: Heat the main pumping pipeline, wait until the vacuum degree in the main pumping pipeline is lower than 1E-4Pa, start the main pumping module, open the main vacuum valve, and perform main vacuuming on the previously installed hemispherical resonant gyroscope through the main pumping module.

[0029] Optionally, the step S1.2 specifically includes:

[0030] S1.2.1: When the vacuum degree in the pre-evacuation pipeline is drawn to less than 1Pa, start the leak detection module;

[0031] S1.2.2: Spray the seals and joints of each previously installed hemispherical resonant gyroscope with helium gas in turn;

[0032] S1.2.3: Detect whether the gas extracted during the pre-vacuuming process contains helium through the leak detection module. If the gas extracted during the pre-vacuuming process contains helium, the corresponding hemispherical resonant gyroscope has a leak, and the vacuuming operation of the corresponding hemispherical resonant gyroscope is terminated; if helium is not detected, the detection result is that there is no leak, and execute step S1.3.

[0033] Optionally, the step S2 specifically includes:

[0034] S2.1: Close the main vacuum valve corresponding to the newly added hemispherical resonant gyroscope, and connect the exhaust copper pipe of the newly added hemispherical resonant gyroscope to the gyroscope installation bayonet;

[0035] S2.2: Open the pre-vacuum valve corresponding to the newly added hemispherical resonant gyroscope, so that the newly added hemispherical resonant gyroscope is connected to the pre-vacuum pipeline through the gyroscope installation bayonet;

[0036] S2.3: Use the pre-pumping module to pre-pump the newly added hemispherical resonant gyroscope through the pre-pumping pipeline.

[0037] The beneficial effects of the present invention are:

[0038] (1) The present invention provides an asynchronous vacuum pumping system for a hemispherical resonant gyroscope. During the vacuum pumping process, the hemispherical resonant gyroscope is vacuumed through a main vacuum pipe. If a new hemispherical resonant gyroscope needs to be added to the system for vacuum pumping, the new hemispherical resonant gyroscope can be connected to the pre-vacuum pipe through a pre-vacuum valve, and pre-vacuumed through the pre-vacuum pipe. After the vacuum degree at the gyroscope mounting bayonet corresponding to the hemispherical resonant gyroscope is pumped to less than 1E-4Pa, the hemispherical resonant gyroscope is directly connected to the main vacuum pipe for vacuum pumping. The asynchronous vacuum pumping system for a hemispherical resonant gyroscope provided by the present invention can realize the addition of a hemispherical resonant gyroscope at any time during the vacuum pumping process without shutting down the entire system or destroying the existing vacuum environment. It has extremely high convenience and operational flexibility, and has positive significance for improving the production efficiency of hemispherical resonant gyroscopes.

[0039] (2) The asynchronous vacuum pumping system for the hemispherical resonant gyroscope provided in the present invention combines the vacuum pumping setting with the leak detection module. The hemispherical resonant gyroscope is leak-checked by the leak detection module during the pre-vacuuming process. There is no need to set up a separate leak detection device. In the present invention, one system directly completes the two process flows of leak detection and vacuum pumping, thereby improving production efficiency and avoiding damage to the hemispherical resonant gyroscope caused by multiple installation and disassembly.

[0040] (3) The asynchronous vacuum pumping system for the hemispherical resonant gyroscope provided in the present invention combines an ion pump, a molecular pump and a mechanical pump, and improves the vacuum pumping effect of the hemispherical resonant gyroscope by combining pre-pumping with main pumping.

[0041] (4) The present invention also provides an asynchronous vacuum pumping method for a hemispherical resonant gyroscope for vacuum pumping the hemispherical resonant gyroscope. The method can also realize adding or removing the hemispherical resonant gyroscope at any time during the vacuum pumping process, thereby improving the production efficiency of the hemispherical resonant gyroscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 is a schematic diagram of an asynchronous vacuum pumping system for a hemispherical resonant gyroscope in the present invention;

[0043] Figure 2 It is a schematic diagram of the asynchronous vacuum pumping method of the hemispherical resonant gyroscope in the present invention.

[0044] Among them: 1. Main pumping pipeline; 11. First connecting pipe; 12. Vacuum plug valve; 2. Pre-pumping pipeline; 21. Second connecting pipe; 3. Gyroscope installation bayonet; 31. Ionization gauge; 4. Main vacuum valve; 5. Pre-vacuum valve; 6. Main pumping module; 7. Pre-pumping module; 8. Leak detection module. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0047] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be considered as a part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0048] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention: the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0049] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0050] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0051] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0052] Existing methods for vacuuming a hemispherical resonant gyroscope generally include two types: 1. Sealing and packaging the hemispherical resonant gyroscope in an atmospheric environment, connecting a plurality of packaged hemispherical resonant gyroscopes to a vacuuming device via an exhaust copper tube, vacuuming the interior of the hemispherical resonant gyroscope, and then sealing the exhaust copper tube; 2. Placing the unsealed hemispherical resonant gyroscope in a sealed cavity, and after vacuuming the sealed cavity, sealing and packaging the hemispherical resonant gyroscope in the vacuum sealed cavity; since the production of the hemispherical resonant gyroscope is not completely synchronous, in both methods of the prior art, there is a technical problem that during the vacuuming process, a new hemispherical resonant gyroscope cannot be added, and a part of the hemispherical resonant gyroscope that has leaked or has been vacuumed cannot be disassembled and replaced, resulting in reduced production efficiency.

[0053] Especially when using an ion pump to evacuate the hemispherical resonant gyroscope, the ion pump has a better vacuum effect, which can generally reach below 1E-7Pa. However, since the vacuum range of the ion pump needs to be below 1E-3Pa, directly evacuating the target outside its working vacuum range will cause the ion pump to shut down. Therefore, in order to avoid the ion pump shutting down and causing the entire production process to stop, the newly added hemispherical resonant gyroscope cannot be directly connected to the ion pump for vacuum operation.

[0054] It should be noted that, since the vacuum degree value is generally small, the vacuum degree value in the present invention is described using scientific notation, such as 1E-7Pa represents 0.0000001Pa, and 1E-4Pa represents 0.0001Pa. This is a description method well known to those skilled in the art, and will not be repeated in the following text.

[0055] Example 1

[0056] In order to solve the technical problems existing in the prior art, see Figure 1, shows a schematic diagram of an asynchronous vacuum pumping system for a hemispherical resonant gyroscope provided in the present invention, comprising: a main pumping pipeline 1, a pre-pumping pipeline 2 and a plurality of gyroscope mounting bayonet sockets 3; each gyroscope mounting bayonet socket 3 is connected to the main pumping pipeline 1 and the pre-pumping pipeline 2; the gyroscope mounting bayonet socket 3 is used to connect the exhaust copper pipe of the hemispherical resonant gyroscope; the main pumping pipeline 1 is used to perform a main vacuum pumping treatment on the hemispherical resonant gyroscope; the pre-pumping pipeline 2 is used to perform a pre-vacuum pumping on the hemispherical resonant gyroscope before the main vacuum pumping treatment; a main vacuum pumping valve 4 is arranged on the main pumping pipeline 1, and is used to cut off or connect the passage between the newly added hemispherical resonant gyroscope and the main pumping pipeline 1 when a hemispherical resonant gyroscope is added; the pre-vacuum pumping valve 5 is arranged on the pre-pumping pipeline 2, and is used to connect the newly added hemispherical resonant gyroscope with the pre-pumping pipeline 2 when a hemispherical resonant gyroscope is added.

[0057] In the present embodiment, during the process of vacuuming using the hemispherical resonant gyroscope asynchronous vacuuming system of the present invention, the previously installed hemispherical resonant gyroscope is vacuumed through the main vacuuming pipeline 1. If it is necessary to add a new hemispherical resonant gyroscope in the system for vacuuming, the newly added hemispherical resonant gyroscope can be connected to the pre-vacuuming pipeline 2 through the gyroscope installation bayonet 3 and the pre-vacuuming valve 5, and the hemispherical resonant gyroscope is pre-evacuated through the pre-vacuuming pipeline 2 until the vacuum degree at the corresponding gyroscope installation bayonet 3 is evacuated to less than 1E-4Pa. At this time, the main vacuuming valve 4 is opened, and the hemispherical resonant gyroscope is directly connected to the main vacuuming pipeline 1 for vacuuming. The hemispherical resonant gyroscope asynchronous vacuuming system provided by the present invention can realize the addition of a hemispherical resonant gyroscope at any time during the vacuuming process without shutting down the entire system or destroying the existing vacuum environment. It has extremely high convenience and operational flexibility, and has positive significance for improving the production efficiency of hemispherical resonant gyroscopes.

[0058] Furthermore, according to actual operational requirements, after opening the main vacuum valve 4, it can be specifically selected whether to close the pre-vacuum valve 5; when the pre-vacuum valve 5 is not closed, the hemispherical resonant gyroscope can be vacuumed through the pre-vacuum pipeline 2 and the main vacuum pipeline 1; when the pre-vacuum valve 5 is closed, the vacuum operation is performed through the main vacuum pipeline 1.

[0059] Optionally, the asynchronous vacuum pumping system of the hemispherical resonant gyroscope in the present invention also includes a main pumping module 6, a pre-pumping module 7, and a leak detection module 8; the leak detection module 8 is connected to the pre-pumping module 7; the main pumping pipeline 1 is connected to the main pumping module 6 through the first connecting pipe 11; the pre-pumping pipeline 2 is connected to the pre-pumping module 7 through the second connecting pipe 21; the first connecting pipe 11 is connected to the second connecting pipe 21.

[0060] In the present embodiment, the main extraction module 6 and the main extraction pipeline 1 are connected through the first connecting tube 11, and the pre-extraction pipeline 2 is connected to the pre-extraction module 7 through the second connecting tube 21. During the application process, the pre-extraction module 7 performs pre-extraction on the main extraction pipeline 1, the hemispherical resonant gyroscope and the pre-extraction pipeline 2 through the first connecting tube 11 and the second connecting tube 21. When the pre-extraction reaches a certain vacuum degree, such as when the vacuum degree in the main extraction pipeline 1 is lower than 1E-4Pa, the main extraction module 6 is started, the main vacuum valve 4 is opened, and the hemispherical resonant gyroscope is vacuumed through the main extraction module 6 and the pre-extraction module 7; the leak detection module 8 is connected to the pre-extraction module 7. During the pre-extraction process through the pre-extraction module 7, the hemispherical resonant gyroscope can be leak-checked through the leak detection module 8. When a hemispherical resonant gyroscope is found to have a leak, the pre-extraction valve 5 corresponding to the hemispherical resonant gyroscope can be closed and disassembled without affecting the vacuum operation of other hemispherical resonant gyroscopes.

[0061] Furthermore, in the prior art, a separate leak detection device is generally used, and the packaged hemispherical resonant gyroscope is connected to the leak detection device through an exhaust copper tube. After the leak detection is performed separately, it is disassembled for vacuuming. The process is cumbersome, and repeated installation and disassembly may cause slight damage to the hemispherical resonant gyroscope, affecting the efficiency of vacuuming and the production quality of the hemispherical resonant gyroscope. The hemispherical resonant gyroscope asynchronous vacuuming system of the present invention is provided with a leak detection module 8, and during the pre-vacuuming process of the hemispherical resonant gyroscope, leakage detection can be performed without repeated disassembly and installation, thereby reducing the probability of damage to the hemispherical resonant gyroscope during production.

[0062] Optionally, the first connecting pipe 11 and the second connecting pipe 21 in the present invention are connected via a vacuum gate valve 12 .

[0063] In this embodiment, the first connecting pipe 11 is connected to the second connecting pipe 21 through the vacuum plug valve 12, and the connection relationship between the first connecting pipe 11 and the second connecting pipe 21 is adjusted by the vacuum plug valve 12. Specifically, in application, when pre-evacuation is performed, the vacuum plug valve 12 is adjusted to connect the first connecting pipe 11 with the second connecting pipe 21, and the pre-evacuation module 7 pre-evacuates the main extraction pipeline 1, the pre-evacuation pipeline 2 and the hemispherical resonant gyroscope; when a new hemispherical resonant gyroscope is added during the vacuuming process, the vacuum plug valve 12 is adjusted to disconnect the first connecting pipe 11 from the second connecting pipe 21, and the newly added hemispherical resonant gyroscope is pre-evacuated through the pre-evacuation module 7 and the pre-evacuation pipeline 2, so that the vacuum degree at the gyroscope installation port 3 is lower than 1E-4Pa, and the corresponding main vacuuming valve 4 can be opened at this time, and the hemispherical resonant gyroscope is connected to the main extraction pipeline 1, and the vacuuming operation is performed through the main extraction module 6, without affecting the main extraction module 6 and other hemispherical resonant gyroscopes.

[0064] Optionally, the pre-pumping module 7 in the present invention comprises a molecular pump 71 and a mechanical pump 72 which are connected to each other, the molecular pump 71 is connected to the leak detection module 8, and the molecular pump 71 is connected to the pre-pumping pipeline 2 through the second connecting pipe 21; the main pumping module 1 is an ion pump.

[0065] In this embodiment, the pre-pumping module 7 includes a molecular pump 71 and a mechanical pump 72 which are interconnected. The molecular pump 71 is connected to the leak detection module 8. In actual use, due to the working principle of the molecular pump 71 itself, a certain initial vacuum degree is required to avoid damage to the blades in the molecular pump 71. Therefore, the mechanical pump 72 is used as the front pump of the molecular pump 71. After the vacuum degree in the pre-pumping pipeline 2 is pumped to below 1Pa by the mechanical pump 72, the molecular pump 71 is started to further pre-pump. During the pre-pumping process, the air extracted by the molecular pump 71 is leak-checked by the leak detection module 8. When a hemispherical resonant gyroscope is found to be leaking, the leaking hemispherical resonant gyroscope is disassembled.

[0066] Since the ion pump has higher vacuum performance and faster pumping rate than molecular pumps and mechanical pumps, the ion pump is used as the main pumping module 6. However, the initial vacuum degree required by the ion pump is generally below 1E-4Pa. Therefore, the hemispherical resonant gyroscope in the present invention performs a pre-pumping operation to pump the vacuum degree in the hemispherical resonant gyroscope and the main pumping pipeline 1 to below 1E-4Pa, and then adjusts the main vacuum valve 4, thereby performing further vacuuming operations through the ion pump, thereby improving the vacuuming level of the hemispherical resonant gyroscope and improving production quality.

[0067] Optionally, the leak detection module 8 in the present invention is a helium mass spectrometer.

[0068] In this embodiment, during the pre-evacuation process, when the hemispherical resonant gyroscope is leak-checked, helium can be blown into the hemispherical resonant gyroscope in sequence, and the helium mass spectrometer can be used to detect whether the gas extracted during the pre-evacuation contains helium to determine whether there is a leak. Specifically, if there is a leak on the hemispherical resonant gyroscope, after blowing helium, the helium is sucked into the hemispherical resonant gyroscope due to the air pressure, and then pumped away by the molecular pump 71. At this time, the helium mass spectrometer can detect the presence of helium in the extracted gas, indicating that the hemispherical resonant gyroscope has a leak problem; conversely, if the helium mass spectrometer does not detect helium, it indicates that there is no leak in the hemispherical resonant gyroscope. The asynchronous vacuum pumping system for the hemispherical resonant gyroscope provided by the present invention performs leak detection and vacuum pumping simultaneously, thereby improving production efficiency and reducing the risk of damage to the hemispherical resonant gyroscope.

[0069] Optionally, an ionization gauge 31 is provided at the gyroscope mounting bayonet 3 in the present invention, and a heating device is provided on the main extraction pipeline 1 .

[0070] In this embodiment, the vacuum degree at the gyroscope mounting bayonet 3 can be detected by the ionization gauge 31 to obtain the vacuuming progress in the hemispherical resonant gyroscope, and the hemispherical resonant gyroscope is subjected to corresponding processes according to the vacuuming progress; and the main extraction pipeline 1 is provided with a heating device, and the main extraction pipeline 1 is heated during the vacuuming process to improve the vacuuming efficiency and reduce residual air and impurities.

[0071] Example 2

[0072] On the other hand, the present invention also provides a method for asynchronous vacuum pumping of a hemispherical resonant gyroscope, which is used for any asynchronous vacuum pumping system of a hemispherical resonant gyroscope in Example 1, referring to Figure 2 , the simplified steps include:

[0073] S1: vacuuming the previously installed hemispherical resonant gyroscope;

[0074] S2: Install the newly added hemispherical resonant gyroscope, cut off the connection between the newly added hemispherical resonant gyroscope and the main extraction pipeline; perform pre-exhaust on the newly added hemispherical resonant gyroscope;

[0075] S3: The vacuum degree of the newly added hemispherical resonant gyroscope is pumped down to below 1E-4Pa, and the corresponding main vacuum pumping valve is opened to pump the vacuum of all hemispherical resonant gyroscopes;

[0076] S4: the vacuum degree of any hemispherical resonant gyroscope is evacuated to below 1E-7Pa, the hemispherical resonant gyroscope is heated, the getter is activated to perform gettering treatment, the vacuum degree of the hemispherical resonant gyroscope is evacuated to below 1E-7Pa again, and the vacuum evacuation operation of the hemispherical resonant gyroscope is completed;

[0077] S5: Repeat the above steps.

[0078] Specifically, the asynchronous vacuum pumping method for a hemispherical resonant gyroscope provided by the present invention may include:

[0079] S1: vacuuming the previously installed hemispherical resonant gyroscope;

[0080] S2: Connect the newly added hemispherical resonant gyroscope to the gyroscope installation bayonet 3, open the corresponding pre-vacuum valve 5, close the corresponding main vacuum valve 4, cut off the connection between the newly added hemispherical resonant gyroscope and the main vacuum pipeline 1, and make the pre-vacuum module 7 pre-vacuum the newly added hemispherical resonant gyroscope through the pre-vacuum pipeline 2;

[0081] S3: When the vacuum degree of the newly added hemispherical resonant gyroscope is evacuated to less than 1E-4Pa, the corresponding main vacuum valve 4 is opened to connect the newly added hemispherical resonant gyroscope to the main vacuum pipeline 1, and all hemispherical resonant gyroscopes are vacuumed through the main vacuum module 6 and the pre-vacuum module 7;

[0082] S4: When the vacuum degree of any hemispherical resonant gyroscope is pumped below 1E-7Pa, the hemispherical resonant gyroscope is heated and the getter is activated to perform a gettering process until the vacuum degree of the hemispherical resonant gyroscope is pumped below 1E-7Pa again, and the vacuuming operation of the hemispherical resonant gyroscope is completed;

[0083] S5: Repeat steps S1 to S4 until the vacuuming operation of all hemispherical resonant gyroscopes is completed.

[0084] In this embodiment, a method for asynchronous vacuum pumping of a hemispherical resonant gyroscope is provided, which is used for the asynchronous vacuum pumping system of the hemispherical resonant gyroscope in Example 1. It should be noted that the asynchronous vacuum pumping method of the hemispherical resonant gyroscope provided in this embodiment is completely corresponding to the asynchronous vacuum pumping system of the hemispherical resonant gyroscope in Example 1, and their beneficial effects are also similar, which will not be elaborated here.

[0085] Furthermore, in step S4 of the present invention, the hemispherical resonant gyroscope is heated to maintain the temperature of the hemispherical resonant gyroscope at 100 degrees Celsius to 130 degrees Celsius, which can be achieved by installing a heating plate and a thermocouple outside the hemispherical resonant gyroscope, and the vacuuming process is accelerated by heating the hemispherical resonant gyroscope. Specifically, the temperature of the hemispherical resonant gyroscope can be specifically selected to be 100 degrees Celsius, 110 degrees Celsius, 120 degrees Celsius or 130 degrees Celsius.

[0086] Specifically, in this embodiment, a plurality of hemispherical resonator gyroscopes sealed and packaged in the atmosphere are sequentially connected to the gyroscope mounting bayonet 3 through exhaust copper pipes to perform a vacuum operation.

[0087] Furthermore, in step S4, when activating the getter, the getter inside the hemispherical resonant gyroscope is energized to be completely activated, and during the process of activating the getter, the vacuum degree at the gyroscope mounting bayonet 3 should not be higher than 1E-4Pa to avoid affecting the operation of the ion pump.

[0088] In this embodiment, the getter inside the hemispherical resonator gyroscope is activated to eliminate residual gas, thereby ensuring that the internal vacuum degree of the hemispherical resonator gyroscope meets the use requirements throughout its life cycle.

[0089] Further, in this embodiment, after the vacuuming operation of a hemispherical resonant gyroscope is completed, the pre-vacuuming valve 5 and the main vacuuming valve 4 corresponding to the hemispherical resonant gyroscope can be closed, and after the exhaust copper tube thereof is squeezed and sealed by hydraulic pliers, the hemispherical resonant gyroscope can be removed from the gyroscope mounting bayonet 3. And according to the actual production progress, steps S1 to S4 are repeated until the production of the batch of hemispherical resonant gyroscopes is completed.

[0090] Optionally, in step S1 of the present invention, the step of evacuating the previously installed hemispherical resonant gyroscope specifically includes:

[0091] S1.1: close the main vacuum valve 4, open the pre-vacuum valve 5, start the pre-vacuum module 7, and pre-evacuate the main vacuum pipeline 1, the pre-vacuum pipeline 2 and the previously installed hemispherical resonant gyroscope;

[0092] S1.2: During the pre-evacuation process, a leak detection module 8 is used to detect leaks. If the detection result shows that there is no leak, step S1.3 is executed;

[0093] S1.3: The main pumping pipeline 1 is heated, and when the vacuum degree in the main pumping pipeline 1 is lower than 1E-4Pa, the main pumping module 6 is started, the main vacuuming valve 4 is opened, and the main vacuuming treatment is performed on the previously installed hemispherical resonant gyroscope through the main pumping module 6.

[0094] In the present embodiment, during the process of evacuating the previously installed hemispherical resonant gyroscope, the main extraction pipeline 1, the pre-extraction pipeline 2 and the previously installed hemispherical resonant gyroscope are first pre-exhausted through the pre-exhaust module 7, so that their vacuum degree reaches the vacuum degree working range of the main extraction module 6; during the pre-exhaust process, each hemispherical resonant gyroscope is leak-checked in turn through the leak detection module 8; after the leak detection, the hemispherical resonant gyroscope without leakage is connected to the heated main extraction pipeline 1 for the main vacuum pumping process.

[0095] Furthermore, if a leak is found in the hemispherical resonant gyroscope during the leak detection process, the pre-vacuum valve corresponding to the hemispherical resonant gyroscope can be closed and the hemispherical resonant gyroscope can be removed; at the same time, according to the actual production progress, it can be selected whether to add a new hemispherical resonant gyroscope at the gyroscope mounting socket 3 and execute steps S1 to S4 in the present invention.

[0096] Optionally, step S1.2 in the present invention specifically includes:

[0097] S1.2.1: When the vacuum degree in the pre-evacuation pipeline 2 is drawn to less than 1 Pa, the leak detection module 8 is started;

[0098] S1.2.2: Spray the seals and joints of each previously installed hemispherical resonant gyroscope with helium gas in turn;

[0099] S1.2.3: Detect whether the gas extracted during the pre-vacuuming process contains helium through the leak detection module 8. If the gas extracted during the pre-vacuuming process contains helium, the corresponding hemispherical resonant gyroscope has a leak, and the vacuuming operation of the corresponding hemispherical resonant gyroscope is terminated; if helium is not detected, the detection result is that there is no leak, and execute step S3.

[0100] In this embodiment, during the pre-evacuation process, the hemispherical resonant gyroscope is leak-checked using the leak detection module 8 to determine whether there is a leak. It should be noted that the implementation method and beneficial effects of leak detection on the hemispherical resonant gyroscope in this embodiment correspond to those of the leak detection module 8 in Example 1, and are not described in detail here.

[0101] Optionally, step S2 in the present invention specifically includes:

[0102] S2.1: Close the main vacuum valve 4 corresponding to the newly added hemispherical resonant gyroscope, and connect the exhaust copper pipe of the newly added hemispherical resonant gyroscope to the gyroscope installation bayonet 3;

[0103] S2.2: Open the pre-vacuum valve 5 corresponding to the newly added hemispherical resonant gyroscope, so that the newly added hemispherical resonant gyroscope is connected to the pre-vacuum pipe 2 through the gyroscope installation bayonet 3;

[0104] S2.3: Use the pre-pumping module 7 to pre-pump air through the pre-pumping pipeline 2 to pre-pump air to the newly added hemispherical resonant gyroscope.

[0105] In the present embodiment, when adding a new hemispherical resonant gyroscope, its corresponding main vacuum pumping valve 4 should be closed, and the vacuum plug valve 12 should also be closed to prevent the air inside the new hemispherical resonant gyroscope from directly connecting to the main pumping pipeline 1, causing the main pumping module 6 to shut down; after the new hemispherical resonant gyroscope is connected to the gyroscope mounting bayonet 3, its corresponding pre-vacuum pumping valve 5 is opened, and the pre-vacuum module 7 is used to pre-evacuate the new hemispherical resonant gyroscope through the pre-vacuum pipeline 2 until the vacuum degree at the mounting bayonet 3 corresponding to the new hemispherical resonant gyroscope is lower than 1E-4Pa. At this time, it has entered the working range of the main pumping module 6, and the corresponding main vacuum pumping valve 4 is opened, and the main pumping module 6 is used to perform main vacuum pumping on the previously installed hemispherical resonant gyroscope and the new hemispherical resonant gyroscope through the main pumping pipeline 1.

[0106] In the present invention, during the pre-evacuation of the newly added hemispherical resonant gyroscope, the previously installed hemispherical resonant gyroscope is still subjected to vacuuming operation through the main extraction module 6 and the main extraction pipeline 1. After the vacuum degree in the newly added hemispherical resonant gyroscope is drawn to the working range of the main extraction module 6, the newly added hemispherical resonant gyroscope can be connected to the main extraction pipeline 1 through the adjustment of the main vacuuming valve 4, and the vacuuming operation is performed together with the previously installed hemispherical resonant gyroscope. The hemispherical resonant gyroscope asynchronous vacuuming system and method provided in the present invention can add and remove hemispherical resonant gyroscopes at any time during the asynchronous production process of hemispherical resonant gyroscopes, thereby solving the technical problem in the prior art that the production efficiency is reduced when a newly added hemispherical resonant gyroscope is added.

[0107] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0108] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An asynchronous vacuum pumping system for a hemispherical resonant gyroscope, characterized in that: include: A main extraction pipeline (1), a pre-extraction pipeline (2) and a plurality of gyroscope mounting bayonet holes (3); each of the gyroscope mounting bayonet holes (3) is connected to the main extraction pipeline (1) and the pre-extraction pipeline (2); A gyroscope mounting bayonet (3) for connecting an exhaust copper pipe of a hemispherical resonator gyroscope; A main vacuum pipeline (1) is used for performing a main vacuum pumping process on the hemispherical resonant gyroscope; A pre-evacuation pipeline (2) is used to pre-evacuate the hemispherical resonant gyroscope before the main vacuum pumping process; A main vacuum valve (4) is arranged on the main vacuum pipeline (1) and is used to cut off or connect the passage between the newly added hemispherical resonant gyroscope and the main vacuum pipeline (1) when a hemispherical resonant gyroscope is added; A pre-vacuum valve (5) is arranged on the pre-vacuum pipeline (2) and is used to connect the newly added hemispherical resonant gyroscope to the pre-vacuum pipeline (2) when a hemispherical resonant gyroscope is added.

2. The asynchronous vacuum pumping system for a hemispherical resonator gyroscope according to claim 1, characterized in that: The asynchronous vacuum pumping system for the hemispherical resonant gyroscope further comprises a main vacuum pumping module (6), a pre-vacuum pumping module (7), and a leak detection module (8); The leak detection module (8) is connected to the pre-extraction module (7); The main pumping pipeline (1) is connected to the main pumping module (6) via a first connecting pipe (11); The pre-extraction pipeline (2) is connected to the pre-extraction module (7) via a second connecting pipe (21); The first communicating pipe (11) is in communication with the second communicating pipe (21).

3. The asynchronous vacuum pumping system for a hemispherical resonator gyroscope according to claim 2, characterized in that: The first connecting pipe (11) and the second connecting pipe (21) are connected via a vacuum gate valve (12).

4. The asynchronous vacuum pumping system for a hemispherical resonator gyroscope according to claim 2, characterized in that: The pre-pumping module (7) comprises a molecular pump (71) and a mechanical pump (72) which are connected to each other, the molecular pump (71) is connected to the leak detection module (8), and the molecular pump (71) is connected to the pre-pumping pipeline (2) through the second connecting pipe (21); The main pumping module (6) is an ion pump.

5. The asynchronous vacuum pumping system for a hemispherical resonator gyroscope according to claim 2, characterized in that: The leak detection module (8) is a helium mass spectrometer.

6. The asynchronous vacuum pumping system for a hemispherical resonator gyroscope according to claim 1, characterized in that: An ionization gauge (31) is provided at the gyroscope mounting bayonet (3); and a heating device is provided on the main extraction pipeline (1).

7. A method for asynchronous vacuum pumping of a hemispherical resonator gyroscope, used in the asynchronous vacuum pumping system of a hemispherical resonator gyroscope according to any one of claims 2 to 6, characterized in that: Includes steps: S1: vacuuming the previously installed hemispherical resonant gyroscope; S2: Connect the newly added hemispherical resonant gyroscope to the gyroscope installation bayonet (3), open the corresponding pre-vacuuming valve (5), close the corresponding main vacuuming valve (4), cut off the connection between the newly added hemispherical resonant gyroscope and the main vacuuming pipeline (1), and allow the pre-vacuuming module (7) to pre-vacuum the newly added hemispherical resonant gyroscope through the pre-vacuuming pipeline (2); S3: When the vacuum degree of the newly added hemispherical resonant gyroscope is evacuated to less than 1E-4Pa, the corresponding main vacuum valve (4) is opened to connect the newly added hemispherical resonant gyroscope to the main vacuum pipeline (1), and all the hemispherical resonant gyroscopes are evacuated through the main vacuum module (6) and the pre-vacuum module (7); S4: When the vacuum degree of any hemispherical resonant gyroscope is pumped below 1E-7Pa, the hemispherical resonant gyroscope is heated and the getter is activated to perform a gettering process until the vacuum degree of the hemispherical resonant gyroscope is pumped below 1E-7Pa again, and the vacuuming operation of the hemispherical resonant gyroscope is completed; S5: Repeat steps S1 to S4 until the vacuuming operation of all hemispherical resonant gyroscopes is completed.

8. The asynchronous vacuum pumping method for a hemispherical resonant gyroscope according to claim 7, characterized in that: In step S1, the step of evacuating the previously installed hemispherical resonant gyroscope specifically includes: S1.1: close the main vacuum valve (4), open the pre-vacuum valve (5), start the pre-vacuum module (7), and pre-evacuate the main vacuum pipeline (1), the pre-vacuum pipeline (2) and the previously installed hemispherical resonant gyroscope; S1.2: During the pre-evacuation process, a leak detection module (8) is used to detect leaks. If the detection result shows that there is no leak, step S1.3 is executed; S1.3: The main pumping pipeline (1) is heated, and when the vacuum degree in the main pumping pipeline (1) is lower than 1E-4Pa, the main pumping module (6) is started, the main vacuuming valve (4) is opened, and the hemispherical resonant gyroscope installed previously is subjected to main vacuuming through the main pumping module (6).

9. The asynchronous vacuum pumping method for a hemispherical resonator gyroscope according to claim 8, characterized in that: The step S1.2 specifically includes: S1.2.1: When the vacuum degree in the pre-evacuation pipeline (2) is reduced to less than 1 Pa, the leak detection module (8) is activated; S1.2.2: Spray the seals and joints of each previously installed hemispherical resonant gyroscope with helium gas in turn; S1.2.3: Detect whether the gas extracted during the pre-vacuuming process contains helium through the leak detection module (8). If the gas extracted during the pre-vacuuming process contains helium, the corresponding hemispherical resonant gyroscope has a leak, and the vacuuming operation of the corresponding hemispherical resonant gyroscope is terminated; if helium is not detected, the detection result is that there is no leak, and step S1.3 is executed.

10. The asynchronous vacuum pumping method for a hemispherical resonator gyroscope according to claim 7, characterized in that: The step S2 specifically includes: S2.1: Close the main vacuum valve (4) corresponding to the newly added hemispherical resonant gyroscope, and connect the exhaust copper pipe of the newly added hemispherical resonant gyroscope to the gyroscope installation bayonet (3); S2.2: Open the pre-vacuum valve (5) corresponding to the newly added hemispherical resonant gyroscope, so that the newly added hemispherical resonant gyroscope is connected to the pre-vacuum pipeline (2) through the gyroscope installation bayonet (3); S2.3: Use the pre-pumping module (7) to pre-pump air to the newly added hemispherical resonant gyroscope through the pre-pumping pipeline (2).

Images