Temperature measurement system with dual-channel Raman signal detection and temperature measurement method thereof

Abstract

The invention provides a temperature measurement system with dual-channel Raman signal detection and a temperature measurement method thereof, and the system comprises a light source, a light transmission module which is used for receiving and transmitting laser to a sample, and reversely transmitting Stokes scattered light and anti-Stokes scattered light of the sample, the two-color sheet is used for separating Stokes scattered light and anti-Stokes scattered light; the first acousto-optic filter is used for filtering the Stokes scattered light; the first photoelectric detector is used for collecting the filtered Stokes scattered light and converting the Stokes scattered light into a first electric signal; the second acousto-optic filter is used for filtering the anti-Stokes scattered light; the second photoelectric detector is used for collecting the filtered anti-Stokes scattered light and converting the filtered anti-Stokes scattered light into a second electric signal; the lock-in amplifier is used for demodulating the electric signal into light intensity amplitude, the lock-in amplifier is further connected with the light source, and the calculation unit calculates the temperature according to the light intensity amplitude. According to the invention, the temperature of the sample is measured by combining the dual-channel and phase locking technologies, and the signal-to-noise ratio and the spatial resolution are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature measurement, and in particular to a temperature measurement system with dual-channel Raman signal detection and a temperature measurement method thereof. Background Art

[0002] Raman effect, also known as Raman scattering, refers to the phenomenon that the frequency of light waves changes after being scattered. Raman scattering means that when a laser of a certain frequency is irradiated onto the surface of a sample, the molecules in the material transfer energy with photons, and the vibrational states (for example, the swing and twist of atoms, the swing and vibration of chemical bonds) change in different ways and degrees, and then scatter light of different frequencies. The change in frequency depends on the characteristics of the scattering material and reflects the vibration, rotation and other information of the material.

[0003] Raman scattering technology is widely used in materials science, biomedicine, chemical analysis and other fields due to its unique non-contact and non-destructive testing characteristics. By analyzing the Raman scattering spectrum of a sample, the temperature of the sample can be measured.

[0004] However, the traditional wide-field Raman temperature measurement method has problems such as weak signal, slow measurement speed and low spatial resolution. Summary of the invention

[0005] In view of the above situation, the present invention provides a temperature measurement system with dual-channel Raman signal detection and a temperature measurement method thereof to solve the problems of weak signal, slow measurement speed and low spatial resolution of the wide-field Raman temperature measurement method.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is to provide a temperature measurement system with dual-channel Raman signal detection and a temperature measurement method thereof, which include: a moving stage for carrying a sample; a light source for generating laser; an optical transmission module for receiving and transmitting the laser to the sample and reversely transmitting the scattered light of the sample, which is arranged between the light source and the moving stage, and the scattered light includes Stokes scattered light and anti-Stokes scattered light; a dichroic plate for separating the Stokes scattered light and the anti-Stokes scattered light; a first acousto-optic filter for filtering the Stokes scattered light and a first photodetector for collecting the filtered Stokes scattered light and converting it into a first electrical signal; a second acousto-optic filter for filtering the anti-Stokes scattered light and a second photodetector for collecting the filtered anti-Stokes scattered light and converting it into a second electrical signal; a phase-locked amplifier for demodulating the first electrical signal and the second electrical signal into a first light intensity amplitude and a second light intensity amplitude, respectively, and the phase-locked amplifier is also connected to the light source to modulate the laser at a specific frequency; and a calculation unit for calculating the temperature according to the first light intensity amplitude and the second light intensity amplitude.

[0007] Preferably, the optical transmission module includes a beam splitter for passing the laser and reflecting the scattered light, a scanning unit for receiving the laser and scanning, and an objective lens for receiving the scanned light and transmitting it to the sample, and the scanning unit includes a pair of x-axis galvanometers and y-axis galvanometers that can change the direction of the laser.

[0008] Preferably, the optical transmission module further comprises a dual telecentric relay system disposed between the scanning unit and the objective lens, the dual telecentric relay system comprising a scanning lens for receiving and focusing the scanning light, and a sleeve lens for receiving and transmitting the focused light to the objective lens. The dual telecentric relay system can perform field curvature correction, distortion compensation, and collimation on the scanning light to optimize the imaging effect.

[0009] Preferably, the optical transmission module further comprises a reflector for changing the direction of optical transmission, and the reflector is arranged between the dual telecentric relay system and the objective lens.

[0010] Preferably, it further comprises a spatial filter arranged between the light transmission module and the dichroic plate.

[0011] Preferably, the two-color filter is a long-pass two-color filter or a short-pass two-color filter.

[0012] Preferably, the first photodetector and the second photodetector can be single photon detectors, photomultiplier tubes or avalanche photodiodes. A single-point detector is used instead of an array camera to provide high-sensitivity light signal detection.

[0013] Preferably, it further comprises a controller, wherein the controller is connected to the scanning unit and the lock-in amplifier.

[0014] The present invention provides a temperature measurement method using a temperature measurement system with dual-channel Raman signal detection, comprising the following steps:

[0015] Turning on the light source to generate laser light, the laser light is transmitted to the sample through the light transmission module, the sample is irradiated by the laser light and emits scattered light, the scattered light is transmitted to the dichroic plate through the light transmission module, and the dichroic plate separates the scattered light into Stokes scattered light and anti-Stokes scattered light;

[0016] The cutoff band of the first acousto-optic filter is adjusted to the Stokes scattering wavelength corresponding to the sample, and the cutoff band of the second acousto-optic filter is adjusted to the anti-Stokes scattering wavelength corresponding to the sample;

[0017] The Stokes scattered light is filtered by the first acousto-optic filter and converted into a first electrical signal by the first photodetector;

[0018] The anti-Stokes scattered light is filtered by the second acousto-optic filter and converted into a second electrical signal by the second photodetector;

[0019] The lock-in amplifier demodulates the first electrical signal and the second electrical signal to obtain a first light intensity amplitude and a second light intensity amplitude respectively. The calculation unit calculates the temperature according to the first light intensity amplitude and the second light intensity amplitude, and forms a Raman signal graph.

[0020] A further improvement of the temperature measurement method of the temperature measurement system with dual-channel Raman signal detection of the present invention is that the two-color filter is a long-pass two-color filter, and before forming the Raman signal graph;

[0021] Turning on the light source to generate laser light, the laser light is transmitted to the sample through the light transmission module, and the sample is irradiated by the laser light and emits reflected light;

[0022] The cutoff wavelength of the long-pass dichroic plate is made lower than the wavelength of the reflected light and higher than the anti-Stokes scattering wavelength, and then the cutoff wavelength band of the first acousto-optic filter is adjusted to the wavelength of the reflected light;

[0023] The reflected light is transmitted through the optical transmission module, filtered by the first acousto-optic filter through the long-pass dichroic plate, and converted into a third electrical signal by the first photodetector, and the lock-in amplifier demodulates the third electrical signal to obtain a third light intensity amplitude, and forms a pattern diagram;

[0024] The pattern image and the Raman signal image are subjected to image superposition operation to obtain the temperature distribution of the sample at the corresponding position.

[0025] The beneficial effect of the present invention is that a temperature measurement system and a temperature measurement method with dual-channel Raman signal detection of the present invention are provided, and dual channels are set to simultaneously detect Stokes scattered light and anti-Stokes scattered light, thereby obtaining a Raman signal graph to calculate the corresponding temperature value. The signal-to-noise ratio of the Raman signal is improved by phase-locked amplification technology, so that the system can work under lower signal intensity, which is suitable for environments with poor lighting conditions or low collection efficiency; the scanning unit and the spatial filter are set to combine Raman temperature measurement with confocal, ensuring that only light signals from the focal plane are detected, enhancing spatial resolution while improving signal-to-noise ratio, and realizing optical sectioning, three-dimensional stereo imaging, etc.; the intensity information of the specified band is obtained by using an acousto-optic filter, so that the applicable range of the measurement is wider (not limited to the measurement wavelength). The present invention combines phase-locked amplification, acousto-optic modulation filtering and point scanning confocal technology in the Raman temperature measurement system to improve its signal-to-noise ratio and spatial resolution, and realizes the measurement of sample temperature by dual channels. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 It is a structural schematic diagram of a temperature measurement system with dual-channel Raman signal detection according to the present invention.

[0028] The corresponding relationship between the reference numerals and the components is as follows:

[0029] 1. Light source; 2. Beam splitter; 3. Scanning unit; 31. X-axis galvanometer; 32. Y-axis galvanometer; 4. Dual telecentric relay system; 41. Scanning lens; 42. Sleeve lens; 5. Reflector; 6. Objective lens; 7. Sample; 8. Moving stage; 9. Dichroic film; 10. First acousto-optic filter; 11. First photodetector; 12. Second acousto-optic filter; 13. Second photodetector; 14. Phase-locked amplifier; 15. Controller. DETAILED DESCRIPTION

[0030] To facilitate understanding of the present invention, the following description is given in conjunction with the accompanying drawings and embodiments.

[0031] See also Figure 1 The present invention provides a temperature measurement system with dual-channel Raman signal detection, including a moving stage 8, a light source 1, an optical transmission module, a two-color plate 9, an acousto-optic filter, a photodetector, and a phase-locked amplifier 14. Among them:

[0032] The moving stage 8 is used to carry samples and can move to change the position of the samples. The light source 1 is used to generate laser and excite the sample 7 to generate scattered light. The light transmission module is arranged between the light source 1 and the moving stage 8, and is used to receive and transmit the laser to the sample 7, and reversely transmit the scattered light of the sample 7. The scattered light includes Stokes scattered light and anti-Stokes scattered light. The dichroic plate 9 is used to separate the Stokes scattered light and the anti-Stokes scattered light. The first acousto-optic filter 10 is used to filter the Stokes scattered light, and the first photodetector 11 collects the filtered Stokes scattered light and converts it into a first electrical signal to form a first detection channel; the second acousto-optic filter 12 is used to filter the anti-Stokes scattered light, and the second photodetector 13 collects the filtered anti-Stokes scattered light and converts it into a second electrical signal to form a second detection channel; the phase-locked amplifier 14 is used to demodulate the first electrical signal and the second electrical signal to respectively obtain a first light intensity amplitude and a second light intensity amplitude, and the phase-locked amplifier 14 is also connected to the light source 1 to modulate the laser at a specific frequency; the calculation unit calculates the temperature according to the first light intensity amplitude and the second light intensity amplitude.

[0033] Specifically, the light source 1 is used as an excitation source and is modulated by the phase-locked amplifier 14. The output laser of the light source 1 is modulated at a specific frequency, so that when the light beam passes through the sample 7, only the scattered light signal matching the modulation frequency will be detected by the phase-locked amplifier 14. That is, the laser is transmitted to the sample 7 through the optical transmission module, and the sample 7 is excited to emit scattered light, which is transmitted back to the dichroic plate 9 through the optical transmission module. Under the action of the dichroic plate 9, the Stokes scattered light and the anti-Stokes scattered light are separated. The Stokes scattered light passes through the first detection channel (the first acousto-optic filter 10 and the first photodetector 11) to form a first electrical signal, and the anti-Stokes scattered light passes through the second detection channel (the second acousto-optic filter 12 and the second photodetector 13) to form a second electrical signal. The phase-locked amplifier 14 simultaneously receives the first electrical signal and the second electrical signal, and demodulates the first electrical signal to obtain the first light intensity amplitude I S , demodulate the second electrical signal to obtain the second light intensity amplitude I AS The phase-locked amplifier 14 compares and demodulates the received signal with the reference signal generated internally, thereby extracting the signal component with the same frequency as the reference signal. In this way, even in a noisy environment, it can accurately measure the weak Raman scattering signal and improve the signal-to-noise ratio. Finally, the calculation unit performs a proportional operation, that is, according to R(T)=I AS / I S The temperature of sample 7 is calculated and the Raman signal graph is obtained.

[0034] As a preferred embodiment, the optical transmission module includes a beam splitter 2 for passing laser and reflecting scattered light, a scanning unit 3 for receiving laser and scanning, and an objective lens 6 for receiving scanned light and transmitting it to the sample 7. The scanning unit 3 includes a pair of x-axis galvanometers 31 and y-axis galvanometers 32 that can change the direction of the laser. Since the beam splitter 2 can pass laser and reflect scattered light, a light incident circuit and a light reflection circuit can be formed under the action of the beam splitter 2. Specifically, the laser is transmitted to the sample 7 through the beam splitter 2, the scanning unit 3, and the objective lens 6 in sequence to form a light incident circuit, and the scattered light of the sample 7 is then transmitted to the dichroic film 9 through the objective lens 6, the scanning unit 3, and the beam splitter 2 in sequence to form a light reflection circuit. The x-axis galvanometer 31 and the y-axis galvanometer 32 can scan along the x-axis and the y-axis respectively, and the reflection angle of the galvanometer can be changed to realize arbitrary deflection of the laser.

[0035] As a preferred embodiment, the optical transmission module also includes a dual telecentric relay system 4 arranged between the scanning unit 3 and the objective lens 6, and the dual telecentric relay system includes a scanning lens 41 for receiving and focusing the scanning light, and a sleeve lens 42 for receiving and transmitting the focused light to the objective lens 6.

[0036] As a preferred embodiment, the optical transmission module further includes a reflector 5 for changing the direction of optical transmission, and the reflector 5 is disposed between the dual telecentric relay system 4 and the objective lens 6. The reflector 5 may be omitted or added according to system requirements.

[0037] As a preferred embodiment, a spatial filter is also included between the optical transmission module and the dichroic plate 9. The spatial filter ensures that only the light signal from the focal plane is detected, enhances the spatial resolution and improves the signal-to-noise ratio, thereby realizing the combination of Raman temperature measurement and confocal. The spatial filter structure is two lenses and a spatial pinhole structure arranged between the two lenses, wherein the spatial pinhole structure can be the light aperture of the optical fiber.

[0038] As a preferred embodiment, the dichroic filter 9 is a long-pass dichroic filter or a short-pass dichroic filter. If the dichroic filter 9 is a long-pass dichroic filter, the cutoff wavelength of the long-pass dichroic filter is made greater than the anti-Stokes scattering wavelength but less than the Stokes scattering wavelength, so that the Stokes scattered light can enter the first detection channel through the long-pass dichroic filter 9, and the anti-Stokes scattered light is reflected by the long-pass dichroic filter 9 and enters the second detection channel. If the dichroic filter 9 is a short-pass dichroic filter, the cutoff wavelength of the short-pass dichroic filter is made greater than the anti-Stokes scattering wavelength but less than the Stokes scattering wavelength, so that the Stokes scattered light can be reflected by the short-pass dichroic filter and enter the second detection channel, and the anti-Stokes scattered light can enter the first detection channel through the short-pass dichroic filter.

[0039] As a preferred implementation, the first photodetector 11 and the second photodetector 13 can both be single photon detectors, photomultiplier tubes or avalanche photodiodes.

[0040] As a preferred embodiment, the system further includes a controller 15, which is connected to the scanning unit 3 and the lock-in amplifier 14. The calculation unit can be integrated into the controller 15 to form an integrated structure. The controller 15 can control the reflection angle of the galvanometer of the scanning unit 3, determine the pixel position corresponding to the light intensity amplitude adjusted by the lock-in amplifier 14, and gradually construct the entire image.

[0041] The present invention provides a temperature measurement method using a temperature measurement system with dual-channel Raman signal detection, comprising the following steps:

[0042] Turn on the light source to generate laser, the laser is transmitted to the sample 7 through the light transmission module, the sample 7 is irradiated by the laser and emits scattered light, the scattered light is transmitted to the dichroic plate 9 through the light transmission module, and the dichroic plate 9 separates the scattered light into Stokes scattered light and anti-Stokes scattered light;

[0043] The cutoff band of the first acousto-optic filter 10 is adjusted to the Stokes scattering wavelength corresponding to the sample 7, and the cutoff band of the second acousto-optic filter 12 is adjusted to the anti-Stokes scattering wavelength corresponding to the sample 7;

[0044] The Stokes scattered light is filtered by the first acousto-optic filter 10 and converted into a first electrical signal by the first photodetector 11;

[0045] The anti-Stokes scattered light is filtered by the second acousto-optic filter 12 and converted into a second electrical signal by the second photodetector 13;

[0046] The lock-in amplifier 14 adjusts the first electrical signal and the second electrical signal to obtain a first light intensity amplitude and a second light intensity amplitude respectively. The calculation unit calculates the temperature according to the first light intensity amplitude and the second light intensity amplitude, and forms a Raman signal graph.

[0047] The temperature measurement method of the temperature measurement system with dual-channel Raman signal detection of the present invention is further improved in that the two-color plate 9 is a long-pass two-color plate, before forming the Raman signal graph;

[0048] Turn on the light source to generate laser light, which is transmitted to the sample 7 through the light transmission module. The sample 7 is irradiated by the laser light and emits reflected light.

[0049] The cutoff wavelength of the long-pass dichroic plate 9 is made lower than the wavelength of the reflected light and higher than the anti-Stokes scattering wavelength, and then the cutoff wavelength band of the first acousto-optic filter 10 is adjusted to the wavelength of the reflected light;

[0050] The reflected light is transmitted through the optical transmission module, filtered by the first acousto-optic filter 10 through the long-pass dichroic plate 9, and converted into a third electrical signal by the first photodetector 11. The lock-in amplifier 14 demodulates the third electrical signal to obtain a third light intensity amplitude and forms a pattern diagram.

[0051] The pattern image and the Raman signal image are superimposed to obtain the temperature distribution of the sample 7 at the corresponding position.

[0052] Specifically, the cutoff wavelength of the long-pass dichroic film 9 is made lower than the wavelength of the reflected light and higher than the anti-Stokes scattering wavelength. When forming the mode diagram, the wavelength of the reflected light is higher than the cutoff wavelength of the long-pass dichroic film 9, and the reflected light can enter the first detection channel through the long-pass dichroic film 9. When forming the Raman signal diagram, since the wavelength of the reflected light is lower than the Stokes scattering wavelength and higher than the anti-Stokes scattering wavelength, the wavelength of the Stokes scattering light is also higher than the cutoff wavelength of the long-pass dichroic film 9, and the Stokes scattering light can also enter the first detection channel through the long-pass dichroic film 9. Since the wavelength of the anti-Stokes scattering light is lower than the cutoff wavelength of the long-pass dichroic film 9, it will be reflected by the long-pass dichroic film 9 and enter the second detection channel, thereby realizing the separation of the Stokes scattering light and the anti-Stokes scattering light.

[0053] Similarly, the cutoff wavelength of the long-pass dichroic filter 9 can also be made higher than the wavelength of the reflected light but lower than the Stokes scattering wavelength. When forming the mode diagram, the wavelength of the reflected light is lower than the cutoff wavelength of the long-pass dichroic filter 9, and the reflected light is reflected by the long-pass dichroic filter 9 into the second detection channel. When forming the Raman signal diagram, the wavelength of the Stokes scattered light is higher than the cutoff wavelength of the long-pass dichroic filter 9, and the Stokes scattered light can enter the first detection channel through the long-pass dichroic filter 9. Since the wavelength of the reflected light is lower than the Stokes scattering wavelength and higher than the anti-Stokes scattering wavelength, the wavelength of the anti-Stokes scattered light is also lower than the cutoff wavelength of the long-pass dichroic filter 9, and it will be reflected by the long-pass dichroic filter 9 into the second detection channel, and the separation of the Stokes scattered light and the anti-Stokes scattered light is also achieved.

[0054] Similarly, a short-pass two-color filter 9 can be used to allow the reflected light to pass when forming the mode diagram; and to separate the Stokes scattered light and the anti-Stokes scattered light when forming the Raman signal diagram, so as to realize the simultaneous detection of the Stokes scattered light and the anti-Stokes scattered light.

[0055] The specific use steps of the temperature measurement system with dual-channel Raman signal detection of the present invention are as follows:

[0056] First, the pattern detection is performed, and only one detection channel is needed. Taking the first detection channel as an example, the second acousto-optic filter 12 and the second photodetector 13 of the second detection channel are turned off, and the long-pass dichroic filter 9 is selected, and the cutoff wavelength of the long-pass dichroic filter 9 is made lower than the wavelength of the reflected light and higher than the anti-Stokes scattering wavelength:

[0057] S1: The sample 7 is placed on the moving stage 8, and the moving stage 8 is rotated to find a suitable detection position;

[0058] S2: The light source 1 is modulated by the phase-locked amplifier 14 and emits a laser, which passes through the beam splitter 2 and enters the scanning unit 3. The scanning unit 3 performs beam scanning according to the instruction of the controller 15. The scanning light is sequentially irradiated onto the sample 7 through the dual telecentric relay system 4, the reflector 5 and the objective lens 6. The sample 7 generates reflected light, which then passes through the objective lens 6, the reflector 5, the telecentric relay system and the beam splitter 2 in sequence;

[0059] S3: Adjust the cutoff band of the first acousto-optic filter 10 to the wavelength of the reflected light. Then the reflected light passes through the long-pass dichroic plate 9 and the first acousto-optic filter 10 and enters the first photodetector 11. After the first photodetector 11 passes through the lock-in amplifier 14, the light intensity amplitude is demodulated and a pattern diagram is formed.

[0060] To detect the Raman signal graph again, two detection channels are needed, so the second acousto-optic filter 12 and the second photodetector 13 are turned on:

[0061] S4: Turn on the light source 1 again, so that the laser light generated by the light source 1 is irradiated to the sample 7 through the light incident circuit. The sample 7 scatters and generates scattered light, which is transmitted back to the dichroic filter 9 through the light reflection circuit. Under the action of the dichroic filter 9, the Stokes scattered light and the anti-Stokes scattered light are separated;

[0062] S5: The cutoff band of the first acousto-optic filter 10 is adjusted to the Stokes scattering wavelength corresponding to the sample 7, and the cutoff band of the second acousto-optic filter 12 is adjusted to the anti-Stokes scattering wavelength corresponding to the sample 7. Then, the Stokes scattered light passes through the first acousto-optic filter 10 and the first photodetector 11 to form a first electrical signal, and the anti-Stokes scattered light passes through the second acousto-optic filter 12 and the second photodetector 13 to form a second electrical signal. The lock-in amplifier 14 receives the first electrical signal and the second electrical signal at the same time, and demodulates the first electrical signal to obtain the first light intensity amplitude I S , demodulate the second electrical signal to obtain the second light intensity amplitude I AS ;

[0063] S6: The calculation unit performs proportional operation, that is, according to R(T)=I AS / I S Calculate the temperature of sample 7 and obtain the Raman signal graph;

[0064] S7: The Raman signal image is combined with the pattern image to perform image superposition operation, so as to obtain the temperature distribution of the sample 7 at the corresponding position.

[0065] The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A temperature measurement system with dual-channel Raman signal detection, characterized in that: include: A moving stage for carrying samples; A light source for producing laser light; An optical transmission module for receiving and transmitting the laser to the sample and reversely transmitting scattered light of the sample, disposed between the light source and the moving stage, wherein the scattered light includes Stokes scattered light and anti-Stokes scattered light; A dichroic film for separating the Stokes scattered light and the anti-Stokes scattered light; a first acousto-optic filter for filtering the Stokes scattered light and a first photodetector for collecting the filtered Stokes scattered light and converting it into a first electrical signal; a second acousto-optic filter for filtering the anti-Stokes scattered light and a second photodetector for collecting the filtered anti-Stokes scattered light and converting it into a second electrical signal; A lock-in amplifier for demodulating the first electrical signal and the second electrical signal into a first light intensity amplitude and a second light intensity amplitude, respectively, wherein the lock-in amplifier is also connected to the light source to modulate the laser at a specific frequency; A calculation unit calculates temperature according to the first light intensity amplitude and the second light intensity amplitude.

2. The temperature measurement system with dual-channel Raman signal detection according to claim 1, characterized in that: The optical transmission module includes a beam splitter for passing the laser and reflecting the scattered light, a scanning unit for receiving the laser and scanning, and an objective lens for receiving the scanned light and transmitting it to the sample. The scanning unit includes a pair of x-axis galvanometers and y-axis galvanometers that can change the direction of the laser.

3. The temperature measurement system with dual-channel Raman signal detection according to claim 2, characterized in that: The optical transmission module further comprises a dual telecentric relay system disposed between the scanning unit and the objective lens, wherein the dual telecentric relay system comprises a scanning lens for receiving and focusing the scanning light and a sleeve lens for receiving and transmitting the focused light to the objective lens.

4. The temperature measurement system with dual-channel Raman signal detection according to claim 3, characterized in that: The optical transmission module further comprises a reflector for changing the direction of optical transmission, wherein the reflector is arranged between the dual telecentric relay system and the objective lens.

5. The temperature measurement system with dual-channel Raman signal detection according to claim 1, characterized in that: It also includes a spatial filter arranged between the light transmission module and the dichroic plate.

6. The temperature measurement system with dual-channel Raman signal detection according to claim 1, characterized in that: The two-color filter is a long-pass two-color filter or a short-pass two-color filter.

7. The temperature measurement system with dual-channel Raman signal detection according to claim 1, characterized in that: The first photodetector and the second photodetector may both be single photon detectors, photomultiplier tubes or avalanche photodiodes.

8. The temperature measurement system with dual-channel Raman signal detection according to claim 1, characterized in that: It also includes a controller, which is connected to the scanning unit and the lock-in amplifier.

9. A temperature measurement method of a temperature measurement system with dual-channel Raman signal detection as claimed in claim 1, characterized in that: The steps include: Turning on the light source to generate laser light, the laser light is transmitted to the sample through the light transmission module, the sample is irradiated by the laser light and emits scattered light, the scattered light is transmitted to the dichroic plate through the light transmission module, and the dichroic plate separates the scattered light into Stokes scattered light and anti-Stokes scattered light; The cutoff band of the first acousto-optic filter is adjusted to the Stokes scattering wavelength corresponding to the sample, and the cutoff band of the second acousto-optic filter is adjusted to the anti-Stokes scattering wavelength corresponding to the sample; The Stokes scattered light is filtered by the first acousto-optic filter and converted into a first electrical signal by the first photodetector; The anti-Stokes scattered light is filtered by the second acousto-optic filter and converted into a second electrical signal by the second photodetector; The lock-in amplifier demodulates the first electrical signal and the second electrical signal to obtain a first light intensity amplitude and a second light intensity amplitude respectively. The calculation unit calculates the temperature according to the first light intensity amplitude and the second light intensity amplitude, and forms a Raman signal graph.

10. The temperature measurement method of the temperature measurement system with dual-channel Raman signal detection according to claim 9, characterized in that: The two-color filter is a long-pass two-color filter, before forming the Raman signal graph; Turning on the light source to generate laser light, the laser light is transmitted to the sample through the light transmission module, and the sample is irradiated by the laser light and emits reflected light; The cutoff wavelength of the long-pass dichroic plate is made lower than the wavelength of the reflected light and higher than the anti-Stokes scattering wavelength, and then the cutoff wavelength band of the first acousto-optic filter is adjusted to the wavelength of the reflected light; The reflected light is transmitted through the optical transmission module, filtered by the first acousto-optic filter through the long-pass dichroic plate, and converted into a third electrical signal by the first photodetector, and the lock-in amplifier demodulates the third electrical signal to obtain a third light intensity amplitude and forms a pattern diagram; The pattern image and the Raman signal image are subjected to image superposition operation to obtain the temperature distribution of the sample at the corresponding position.

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