Laser thermionic cathode electron beam gun emission system and method thereof

Abstract

The invention relates to a laser thermionic cathode electron gun emission system, and aims to solve the problems of high-precision installation and fixation of structural parts of a laser thermionic cathode electron gun and frequent replacement and disassembly of a cathode due to the life factor of the cathode. The emission system comprises a cathode, a grid electrode, a cathode tray, a positioning adjusting screw, an electrode isolation bowl, a cathode supporting connecting piece, a grid electrode fixing cap, an electrical fixing connecting piece, a laser beam and the like. The invention further provides a laser thermionic cathode electron gun emission system method, the speed of accurately installing emission structural parts can be increased, the problems of high-precision installation and fixation of the structural parts of a laser thermionic cathode electron gun and assembly, disassembly and debugging of a cathode which needs to be frequently replaced due to the cathode service life factor are solved, the assembly and subsequent adjustment efficiency is improved, and the cost is reduced. And the reliability of the electron gun emission structure is improved. The invention belongs to the field of electron emission.

Description

Technical Field

[0001] The invention relates to a laser hot cathode electron beam gun emission system and a method and an assembly method thereof, belonging to the field of electron emission. Background Art

[0002] The excellent properties of electron beams make electron beam processing more and more widely used. As the core component of electron beam processing equipment, the performance of electron guns has a key impact on the effect of electron beam processing. However, traditional thermal emission electron guns generally have the problem of external current generating magnetic fields, which affects thermal electrons, and this effect cannot be eliminated by self-optimization, which greatly limits the further improvement of electron gun performance.

[0003] Considering the heating characteristics of lasers, the cathode can be heated by direct irradiation of the laser beam. Since there is no external current, the influence of the magnetic field can be effectively avoided. In addition, through remote laser emission, traditional heating-related components can be removed, the electron gun structure can be simplified, and the particle nature of laser photons is weak, so they do not bombard the cathode, thereby greatly improving the life of the cathode. With the rapid development of laser technology, the size of laser sources is getting smaller, the power is getting higher, and the cost is getting lower, making it possible to use lasers as heat sources for heating cathodes. However, there is currently little research on the systematic design and engineering application of laser hot cathode electron guns, and the emission structures used in existing electron guns are mostly not convenient for installation, fixation and adjustment, which limits the overall reliability and working efficiency of the electron gun. Therefore, it is necessary to design a laser hot cathode electron beam gun emission system and method to solve the above problems. Summary of the invention

[0004] (1) Problem to be solved

[0005] In order to solve the problem that the structural parts of the laser hot cathode electron gun need to be precisely installed and fixed, and the cathode needs to be frequently replaced or adjusted, the patent of the present invention provides a laser hot cathode electron beam gun emission system and method and method thereof, which provides a threaded connection between the cathode and the cathode tray, a threaded connection between the positioning adjustment screw and the cathode tray, etc., so as to conveniently and accurately install the structural parts, improve the assembly and adjustment efficiency, and enhance the reliability of the emission structure.

[0006] (2) Technical solution

[0007] The technical solution adopted by the present invention to solve the above problems is:

[0008] The present invention discloses a laser hot cathode electron beam gun emission system and its method and assembly method; the emission structure of the present invention comprises a cathode 1, a grid 2, a cathode tray 3, a positioning adjustment screw 4, an electrode isolation bowl 5, a cathode support connector 6, a grid fixing cap 7, an electrical fixing connector 8, and a laser beam 9.

[0009] The method of assembling the above-mentioned emission system of the present invention includes: further defining that a cathode is arranged at the center of the laser hot cathode electron beam gun emission system and the method thereof, the laser beam is directed to the cathode, the cathode is inside the cathode tray, the bottom of the cathode protrudes and is located in the center hole of the grid; the cathode is T-shaped, and a laser incident area is arranged in the middle of the cathode; the emission structure is fixed by a grid support connector as a whole. It also includes an electrical system, and the electrical connection mechanism of the electrical system is arranged above the cathode support connector.

[0010] It is further defined that the cathode support connector is provided with 4 internal threads, the cathode tray is provided with 4 positioning countersunk holes, the cathode tray is threadedly connected to the internal threaded hole of the cathode tray by the positioning adjustment screw, and rests against the positioning countersunk hole of the cathode tray; the cathode is threadedly connected to the cathode tray, and the center hole of the cathode and the center hole of the cathode tray are located on the same straight line; the cathode is fixed to the cathode tray by threads, and the cathode tray is fixed in the cathode support connector by 4 positioning screws.

[0011] It is further defined that the laser incident region in the middle of the cathode is kept in vacuum; and the cathode is heated to the electron emission temperature by direct irradiation of the laser beam.

[0012] It is further defined that the grid fixing cap is provided with an internal thread, the electrical fixing connector is provided with an external thread, and the grid fixing cap is detachably fixedly installed on the outside of the electrical fixing connector through a threaded connection. The grid is detachably fixedly installed in the electrical fixing connector through an interference fit, and the grid is fixedly installed between the grid fixing cap and the electrical fixing connector through a T-shaped external convex platform supported by an inverted T-shaped internal convex platform of the grid fixing cap.

[0013] It is further defined that the cathode, the grid and the electrical fixing connector are electrically connected; the cathode, the grid and the electrode isolation bowl are electrically insulated; the grid and the grid fixing cap and the electrical fixing connector are electrically connected;

[0014] (3) Beneficial effects

[0015] The beneficial effects of the present invention are as follows: the present invention proposes a laser hot cathode electron beam gun emission system and method thereof, which utilizes a threaded connection to construct a composite structure of a cathode and a grid, sets positioning holes and threaded holes, and conveniently, accurately and quickly installs and adjusts structural parts, thereby solving the problem of high-precision installation and fixation of structural parts of a laser hot cathode electron gun, and the problem of frequent replacement of the cathode due to the life of the cathode, thereby improving the efficiency of assembly and subsequent adjustment. A plane is set at the lower end of the cathode as the emission surface of the cathode, which increases the emission surface area of ​​the cathode compared to a V-shaped tungsten cathode. At the same time, a U-shaped surface is set at the center of the cathode, which can converge and absorb the laser beam, improve the reliability of the electron gun emission structure, and meet the scientific research and industrial needs of the laser thermal emission electron gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention.

[0017] The names and numbers of the components involved in the figure are as follows:

[0018] Cathode 1, grid 2, cathode tray 3, positioning adjustment screw 4, electrode isolation bowl 5, cathode support connector 6, grid fixing cap 7, electrical fixing connector 8, laser beam 9. DETAILED DESCRIPTION

[0019] Specific implementation method: Combination Figure 1 To illustrate this embodiment, a laser hot cathode electron beam gun emission system and method described in this embodiment includes a cathode 1, a grid 2, a cathode tray 3, a positioning adjustment screw 4, an electrode isolation bowl 5, a cathode support connector 6, a grid fixing cap 7, an electrical fixing connector 8, and a laser beam 9.

[0020] A cathode is arranged at the center of the laser hot cathode electron beam gun emission system and method thereof, and the cathode is T-shaped, so that the cathode can be fixed in a cathode tray; a laser incident area is arranged in the middle of the cathode, so that the laser beam can be directed to the cathode and the laser beam can be ensured to be in the same straight line as the center hole of the cathode; the cathode is located inside the cathode tray, and the bottom of the cathode protrudes inside the center hole of the grid, so that the cathode is within the working range of the grid; the emission structure is fixed as a whole by a grid support connector; and an electrical system is also included, and the electrical fixing connector of the electrical system is arranged above the cathode support connector.

[0021] The cathode support connector is provided with 4 internal threads, and the cathode tray is provided with 4 positioning countersunk holes. The cathode tray is threadedly connected with the internal threaded hole of the cathode tray through the positioning adjustment screw, and presses against the positioning countersunk hole of the cathode tray to achieve the orientation adjustment and fixation of the cathode tray; the center hole of the cathode and the center hole of the cathode tray are located on the same straight line; the cathode and the cathode tray are threadedly connected, and the vertical orientation of the cathode can be adjusted and conveniently assembled and disassembled; the cathode is fixed to the cathode tray by threads, and the cathode tray is fixed in the cathode support connector by 4 positioning screws, thereby achieving the horizontal orientation adjustment of the cathode.

[0022] The laser incident region in the middle of the cathode is kept in vacuum; the cathode is directly irradiated by the laser beam to heat the cathode to an electron emission temperature.

[0023] The gate fixing cap is provided with an internal thread, and the electrical fixing connector is provided with an external thread. The gate fixing cap can be fixedly installed on the outside of the electrical fixing connector through a threaded connection; the gate is detachably fixedly installed in the electrical fixing connector through an interference fit, and the gate is fixedly installed between the gate fixing cap and the electrical fixing connector by supporting the inverted T-shaped internal convex platform of the gate fixing cap through a T-shaped external convex platform.

[0024] The cathode, the grid and the electrical fixed connector are conductively connected; the cathode, the grid and the electrode isolation bowl are electrically insulated; the grid and the grid fixing cap and the electrical fixed connector are conductively connected; the cathode and the grid are electrically isolated by the electrode isolation bowl, and a high-voltage safety distance is maintained.

[0025] The working process of the present invention is as follows:

[0026] Step 1: fix the cathode tray 3 containing the cathode 1 on the cathode support connector 6 by means of the positioning adjustment screws 4, and then electrically insulate and fix the cathode and the grid by means of the electrode isolation bowl 5;

[0027] Step 2: Install the cathode support connector 6 on the electrical fixing connector 8, and then fix the grid through the grid fixing cap 7;

[0028] Step 3: Start the laser to radiate the laser beam 9, which heats the cathode 1 to achieve electron emission.

[0029] The above is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent replacement and improvement made to the above embodiments without departing from the content of the technical solution of the present invention, based on the technical essence of the present invention, within the spirit and principles of the present invention, still fall within the protection scope of the technical solution of the present invention.

Claims

1. A laser hot cathode electron beam gun emission system and method, characterized in that: The laser hot cathode electron beam gun emission system and method thereof comprise a cathode (1), a grid (2), a cathode tray (3), a positioning adjustment screw (4), an electrode isolation bowl (5), a cathode support connector (6), a grid fixing cap (7), an electrical fixing connector (8), and a laser beam (9); a cathode is arranged at the center of the laser hot cathode electron beam gun emission system and method thereof, the laser beam points to the cathode, the cathode is located inside the cathode tray, and the bottom of the cathode protrudes and is located in the center hole of the grid; the cathode is T-shaped, and a laser incident area is arranged in the middle of the cathode; and the emission structure as a whole is fixed by a grid support connector.

2. A laser hot cathode electron beam gun emission system and method according to claim 1, characterized in that: An electrical system is also included, wherein an electrical connection mechanism of the electrical system is arranged above the cathode support connector.

3. A laser hot cathode electron beam gun emission system and method according to claim 2, characterized in that: The cathode support connector is provided with four internal threads, and the cathode tray is provided with four positioning countersunk holes. The cathode tray is threadedly connected with the internal threaded holes of the cathode tray through the positioning adjustment screws, and abuts against the positioning countersunk holes of the cathode tray.

4. A laser hot cathode electron beam gun emission system and method according to claim 3, characterized in that: The cathode is connected to the cathode tray by threads, the cathode is fixed to the cathode tray by threads, the center hole of the cathode and the center hole of the cathode tray are located on the same straight line, and the cathode tray is fixed in the cathode support connector by four positioning screws.

5. A laser hot cathode electron beam gun emission system and method according to claim 4, characterized in that: The laser incident region in the middle of the cathode is kept in vacuum; the cathode is directly irradiated with the laser beam and heated to the electron emission temperature.

6. A laser hot cathode electron beam gun emission system and method using any one of claims 1 to 5, characterized in that: The assembly method includes: the grid fixing cap is provided with an internal thread, the electrical fixing connector is provided with an external thread, the grid fixing cap is detachably fixedly installed on the outside of the electrical fixing connector through threaded connection, the grid is detachably fixedly installed in the electrical fixing connector through interference fit, and the grid is fixedly installed between the grid fixing cap and the electrical fixing connector through a T-shaped external convex platform supported by an inverted T-shaped internal convex platform of the grid fixing cap.

7. The laser hot cathode electron beam gun emission system and method according to claim 6, characterized in that: The cathode, the grid and the electrical fixing connector are conductively connected; the cathode, the grid and the electrode isolation bowl are electrically insulated; the grid and the grid fixing cap and the electrical fixing connector are conductively connected.

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