Multi-cavity continuous high-temperature heat treatment equipment and processing method thereof

Abstract

The multi-chamber continuous high-temperature heat treatment equipment comprises a feeding chamber, a processing chamber and a discharging chamber which are sequentially and continuously arranged together, the processing chamber comprises at least one transfer section and a cooling section, and the top of the transfer section is connected with at least one high-temperature chamber; a material translation mechanism, a heat preservation isolation door mechanism and a material lifting mechanism are arranged in the processing cavity, and each high-temperature cavity is provided with a material keeping mechanism. The multiple high-temperature cavities are connected in series through the transfer sections, so that the whole high-temperature heat treatment equipment forms a three-dimensional space layout, the plane occupied area of the whole equipment is greatly reduced, and the space utilization rate is higher. By arranging at least one high-temperature chamber on the same transfer section, one or more high-temperature heat treatment processes can be performed on the same workpiece, and heat treatment can be performed on a plurality of workpieces at the same time, so that the requirements of the plurality of high-temperature heat treatment processes of the plurality of workpieces can be met at the same time, and the production efficiency is greatly improved. The invention further discloses a machining method of the equipment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a multi-chamber continuous high-temperature heat treatment device and a processing method thereof. Background Art

[0002] With the rapid development of the semiconductor industry, the demand for crystal materials is becoming more and more vigorous, and the production efficiency and cost of high-temperature heat treatment are increasingly valued by the industry. In the process of crystal material production, continuous high-temperature heat treatment equipment is generally used for material processing and production. Existing continuous high-temperature heat treatment equipment is generally arranged in a plane, including multiple chambers arranged in a continuous plane, such as a preheating chamber, a transfer chamber, a high-temperature chamber, an annealing chamber, a cooling chamber, etc., and in order to facilitate the transfer of workpieces, the continuous chambers are usually arranged in a linear arrangement. This chamber arrangement has low space utilization and requires a larger site to be placed. In addition, this equipment is usually only applicable to the heat treatment process of a single-specification workpiece and cannot meet the needs of multiple workpieces undergoing different heat treatment processes at the same time. The production application is relatively limited and the production efficiency is low. At the same time, the transmission mechanism is arranged in the high-temperature heat treatment chamber, the operating reliability is low and the maintenance cost is relatively high. At the same time, the decentralized feeding and discharging of materials has a high labor intensity for workers. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a multi-chamber continuous high-temperature heat treatment equipment in view of the problem that the continuous high-temperature heat treatment equipment in the prior art has low space utilization and cannot meet the needs of processing multiple workpieces at the same time.

[0004] The technical solution of the technical problem of the present invention is: construct a multi-chamber continuous high-temperature heat treatment equipment, including a feed chamber, a processing chamber and a discharge chamber which are arranged in sequence and continuously, characterized in that the processing chamber includes a cooling section and at least one transfer section, and at least one high-temperature chamber is connected to the top of each transfer section; one feed chamber is provided corresponding to each transfer section, a feed isolation door mechanism is provided between the transfer section and the feed chamber, a discharge isolation door mechanism is provided between the cooling section and the discharge chamber, and a partition isolation door is provided between the transfer section and the cooling section;

[0005] A material translation mechanism is provided in the processing chamber, and the material translation mechanism controls the material tray containing the workpiece to translate from each of the transfer sections to the cooling section according to a preset trajectory; a feeding port is provided at the top of the transfer section corresponding to each of the high-temperature chambers, and a heat-insulating isolation door mechanism is provided at the feeding port for opening and closing the feeding port according to a preset process;

[0006] A material lifting mechanism is provided at the bottom of each feeding port in the transfer section, and the material lifting mechanism lifts the material tray on the material translation mechanism to the corresponding high-temperature chamber or drops the material tray from the high-temperature chamber to the material translation mechanism according to a preset process;

[0007] Each of the high-temperature chambers is provided with a material holding mechanism near the feeding port, and the material holding mechanism clamps or releases the material tray fed by the material lifting mechanism according to a preset process.

[0008] Furthermore, the material translation mechanism is arranged at the inner bottom of the processing chamber, and the material translation mechanism includes a translation guide rail arranged according to a preset trajectory, a plurality of rollers rotatably arranged on the translation guide rail, a chain driving the plurality of rollers to rotate synchronously, a translation motor driving the chain to rotate through a sprocket shaft, and a material translation vehicle slidingly arranged on the plurality of rollers, and the material tray is mounted on the material translation vehicle; placing the material tray on the material translation vehicle is convenient for transferring the workpiece.

[0009] Furthermore, the material lifting mechanism includes a lifting hydraulic cylinder arranged at the bottom outer side of the processing chamber, a lifting plate arranged at the inner side of the processing chamber and located below the guide rail, and a lifting guide rod driven by the lifting hydraulic cylinder and passing through the bottom side wall of the processing chamber and fixedly connected to the bottom of the lifting plate, and the lifting plate is opposite to the bottom of the feeding port; when the logistics translation vehicle slides to the top of the lifting plate, the lifting hydraulic cylinder can drive the lifting guide rod to rise and fall and drive the lifting plate to pass through the material translation vehicle, and the lifting plate will lift the material tray on the material translation vehicle upward and pass through the corresponding feed port into the corresponding high-temperature chamber; the workpiece to be processed can be sent into the corresponding high-temperature chamber according to a preset program.

[0010] Furthermore, the material tray includes an insulation support plate made of insulation material, an insulation plate frame arranged outside the insulation support plate, and a crucible arranged above the insulation support plate, and the material tray is made of high-temperature resistant materials such as graphite.

[0011] Furthermore, the material holding mechanism includes a driving cylinder arranged on the outer side wall of the high-temperature chamber, a cylinder telescopic rod driven by the driving cylinder and extending through the side wall of the high-temperature chamber into the high-temperature chamber, and a plug plate fixed at the end of the cylinder telescopic rod, and a notch matching the plug plate is provided at the bottom of the material tray; it is convenient to keep the material tray in the high-temperature chamber so that after closing the thermal insulation door, the high-temperature environment in the high-temperature chamber is maintained, thereby saving the energy required for heating and reducing energy consumption.

[0012] Furthermore, each of the high-temperature chambers includes a high-temperature furnace shell fixed on the top of the transfer section, an insulation component arranged in the high-temperature furnace shell, and a heating body arranged in the insulation component for heating the workpiece; the bottom of the high-temperature furnace shell is provided with an opening connected to the corresponding feeding port.

[0013] Furthermore, the thermal insulation door mechanism includes a thermal insulation guide rail horizontally arranged on the top of the transfer section, a thermal insulation door that can seal and cover the opening of the high-temperature chamber furnace shell, a guide roller fixedly arranged on the end face of the thermal insulation door and slidably arranged in the thermal insulation guide rail, and a first driving mechanism that drives the thermal insulation door to slide back and forth.

[0014] Furthermore, the inner side wall of the transfer section is provided with a processing insulation layer, and the partition isolation door is located above the material translation mechanism.

[0015] Furthermore, the feed chamber includes a feed chamber furnace shell and a feed chamber furnace door; the feed isolation door mechanism includes an isolation door shell provided between the feed chamber furnace shell and the transfer section, two thermal insulation isolation doors that can slide up and down are vertically provided in the isolation door shell, and an isolation door lifting mechanism is provided outside the feed chamber furnace shell.

[0016] Another technical problem to be solved by the present invention is to provide a continuous high-temperature heat treatment equipment processing method that can process multiple workpieces at the same time, in view of the low production efficiency and other problems existing in the prior art continuous high-temperature heat treatment equipment processing method.

[0017] The technical solution of the technical problem of the present invention is: construct a continuous high-temperature heat treatment equipment processing method, comprising the following steps:

[0018] S10. A multi-chamber continuous high temperature heat treatment apparatus as described above is provided;

[0019] S21. Once loaded, place the first workpiece into the material tray of the feed chamber;

[0020] S22. Transfer, open the feed isolation door mechanism, control the material translation mechanism to translate the material tray containing the first workpiece to the corresponding transfer section directly below the first feed port;

[0021] S23. Open the corresponding insulation door mechanism, and the material lifting mechanism corresponding to the first feeding port lifts the corresponding material tray into the corresponding high-temperature chamber, and the material holding mechanism in the high-temperature chamber clamps the material tray, closes the insulation door mechanism, and controls the high-temperature chamber to process the first workpiece according to the preset process;

[0022] S31. Secondary loading, placing the second workpiece into the material tray of the feed chamber;

[0023] S32. Transfer, open the feed isolation door mechanism, control the material translation mechanism to translate the material tray containing the second workpiece to the corresponding transfer section directly below the second feed port;

[0024] S33. Open the corresponding insulation door mechanism, and the material lifting mechanism corresponding to the second feeding port lifts the corresponding material tray to the corresponding high-temperature chamber, and the material holding mechanism in the high-temperature chamber clamps the material tray, closes the insulation door mechanism, and controls the high-temperature chamber to process the second workpiece according to the preset process;

[0025] S40. After the first workpiece is processed, open the corresponding insulation isolation door mechanism, control the corresponding material lifting mechanism to lift it to the bottom of the material tray in the corresponding high-temperature chamber, and control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to drop the material tray onto the material translation mechanism, and close the insulation isolation door mechanism; open the partition isolation door, and translate the material tray containing the first workpiece to the cooling section through the material translation mechanism, and close the partition isolation door; repeat the steps S21 to S23 synchronously;

[0026] S50. After the second workpiece is processed, open the corresponding insulation isolation door mechanism, control the corresponding material lifting mechanism to lift it to the bottom of the material tray in the corresponding high-temperature chamber, and control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to drop the material tray onto the material translation mechanism, and close the insulation isolation door mechanism; open the partition isolation door, and translate the material tray containing the second workpiece to the cooling section through the material translation mechanism, and close the partition isolation door; repeat the steps S31 to S33 synchronously;

[0027] S60. Repeat steps S21 to S50 synchronously in other transfer segments;

[0028] S70. When the number of workpieces in the cooling section reaches a preset number, the discharge isolation door mechanism is opened, the material translation mechanism is controlled to transfer the workpieces that have completed the cooling process to the discharge chamber, and the discharge isolation door mechanism is closed.

[0029] The implementation of the multi-chamber continuous high-temperature heat treatment equipment and the processing method thereof described in the present invention has the following beneficial effects: by setting the high-temperature chamber at the top of the processing chamber transfer section, and using the transfer section to connect multiple high-temperature chambers in series, the entire high-temperature heat treatment equipment forms a three-dimensional space layout, which greatly reduces the plane occupied area of ​​the entire equipment, and the space utilization rate is higher. By setting at least one high-temperature chamber on the same transfer section, one or more high-temperature heat treatment processes (such as annealing, hydrogen permeation, groove precipitation, etc.) can be performed on the same workpiece as needed, and multiple workpieces can also be heat-treated in multiple high-temperature chambers at the same time to meet the requirements of multiple high-temperature heat treatment processes of multiple workpieces at the same time, greatly improving production efficiency. By connecting at least one transfer section with the same cooling section, the processed multiple workpieces can be concentrated in the cooling section for cooling, realizing centralized discharging and reducing the work intensity of discharging. By setting a heat-insulating isolation door mechanism at the feeding port, the high and low temperature processes between the high-temperature chamber and the transfer section are isolated, avoiding the influence of high-temperature radiation in the high-temperature chamber on the inlet and outlet isolation door mechanism, and improving the stability of the operation of the entire equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a front view of a preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0031] Figure 2 It is a schematic diagram of the overall structure of a preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0032] Figure 3 It is a structural schematic diagram of the feed isolation door mechanism in a preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0033] Figure 4a It is a schematic structural diagram of a material translation mechanism in a preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0034] Figure 4b It is a structural schematic diagram of another perspective of the material translation mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0035] Figure 5a It is a structural schematic diagram of the heat preservation isolation door mechanism in a preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0036] Figure 5b It is another structural schematic diagram of the heat preservation isolation door mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention;

[0037] Figure 6aIt is a schematic structural diagram of the material lifting mechanism and the material holding mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention after the material tray is lowered;

[0038] Figure 6b It is a schematic diagram of the structure of the material lifting mechanism and the material holding mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention after the material tray rises to a preset position;

[0039] Figure 6c Shown Figure 6b Enlarged view of part I. DETAILED DESCRIPTION

[0040] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0041] It should also be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0043] like Figure 1 , 2As shown in Figures 3, 4a, 4b, 5a, 5b, 6a, 6b, and 6c, in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment of the present invention, it mainly includes a feed chamber 1, a processing chamber 10, and a discharge chamber 2 which are arranged in sequence and continuously. The processing chamber 10 includes a cooling section 12 and at least one transfer section 11. Each transfer section 11 is connected to the top with at least one high-temperature chamber 20; wherein a feed isolation door mechanism 30 is provided between the transfer section 11 and the feed chamber 1, a discharge isolation door mechanism 40 is provided between the cooling section 12 and the discharge chamber 2, and a partition isolation door 50 is provided between the transfer section 11 and the cooling section 12. A material translation mechanism 60 is provided in the processing chamber 10, and the workpiece 4 is placed in the material tray 3. The material tray 3 is controlled by the material translation mechanism 60 to translate according to a preset trajectory.

[0044] like Figure 1 , 2 As shown in Figure 3, in this preferred embodiment, the feed chamber 1 may include a feed chamber furnace shell 1a and a feed chamber furnace door 1b, wherein the feed chamber furnace door 1b may be arranged at the top or side of the feed chamber furnace shell 1a. The feed chamber furnace door 1b is opened, and the workpiece 4 may be placed in the corresponding material tray 3. In this preferred embodiment, it is preferred that the feed chamber 1 also includes a feed translation mechanism 1c, so as to deliver the material tray 3 containing the workpiece 4 into the processing chamber 10. Specifically, the feed translation mechanism 1c may include a feed guide rail arranged in the feed chamber furnace shell 1a, a plurality of rollers arranged on the feed guide rail, a chain driving all rollers to rotate synchronously, a sprocket driving the chain to rotate, a sprocket shaft fixing the sprocket outside the feed chamber furnace shell 1a, and a feed drive motor driving the sprocket shaft to rotate. The drive motor drives the sprocket to rotate through the sprocket shaft, thereby driving the rollers on the chain to roll on the feed guide rail. When the material tray 3 is placed on the rollers of the feed translation mechanism 1c, the material tray 3 is fed into the processing chamber 10 along the guide rail direction.

[0045] like Figure 1 , 2 As shown, in this preferred embodiment, the processing chamber 10 is preferably provided to include a processing chamber furnace shell 13, and a partition isolation door 50 provided in the processing chamber furnace shell 13, and the partition isolation door 50 divides the processing chamber into a transfer section 11 and a cooling section 12. Among them, a heat preservation layer 14 is provided inside the processing chamber furnace shell 13 of the transfer section 11, a feeding port 15 is provided at the top of the transfer section 11 corresponding to each high-temperature chamber 20, and a heat preservation isolation door mechanism 70 is provided at each feeding port 15, and a material lifting mechanism 80 is provided at the bottom of each feeding port 15 in the transfer section 11, and the material lifting mechanism 80 is located below the material translation mechanism 60.

[0046] like Figure 1 , 2As shown, in this preferred embodiment, the high temperature chamber 20 includes a high temperature furnace shell 21 fixed on the top of the transfer section 11, a heat preservation component 22 disposed in the high temperature furnace shell 21, and a heating body 23 disposed in the heat preservation component 22. One end of the high temperature furnace shell is open 24, and the opening 24 is just opposite to the feeding port 15. The heating body 23 is used to heat the workpiece 4 according to the process requirements. Figure 1 , 2 As shown in FIGS. 5a and 5b, the heat-insulating door mechanism 70 is arranged between the high-temperature furnace shell opening 24 and the feeding port 15 at the top of the transfer section. Specifically, the heat-insulating door mechanism 70 may include a heat-insulating guide rail 71 arranged horizontally at the top of the transfer section 11, a heat-insulating door 72 which can be sealed and covered at the high-temperature furnace shell opening 24, a guide roller 73 fixed at the end surface of the heat-insulating door 72, the guide roller 73 being slidably arranged in the heat-insulating guide rail 71, and a first driving mechanism, such as a driving motor, for driving the heat-insulating door 72 to slide back and forth. The first driving mechanism may include a rack 74 fixed to the side of the heat-insulating door 72, a gear shaft 75 rotatably arranged at the top of the transfer section 11, a gear 76 sleeved and fixed on the gear shaft 75, and a first motor 77 driving the gear shaft 75 to rotate, and the gear 76 cooperates with the rack 74. When the thermal insulation door 72 needs to be opened or closed, the first motor 77 drives the gear shaft 75 to rotate forward and reversely, and the cooperation between the gear 76 and the rack 74 drives the thermal insulation door 72 to reciprocate, thereby covering or opening the opening 24 of the high temperature furnace shell.

[0047] In this preferred embodiment, a material lifting mechanism 80 is preferably provided at the bottom of each feeding port 15 in the transfer section 11, so as to lift the material tray 3 from the material translation mechanism 60 to the high temperature chamber 20 for high temperature heat treatment process. The material lifting mechanism 80 is preferably provided to include a lifting hydraulic cylinder 81, a lifting plate 82, and a lifting guide rod 83. The lifting hydraulic cylinder 81 is provided at the bottom position of the outer side of the furnace shell 13 of the processing chamber, the lifting plate 82 is provided at the inner side of the furnace shell 13 of the processing chamber and is located below the translation guide rail, and the lifting guide rod 83 is driven by the lifting hydraulic cylinder 81 and passes through the bottom side wall of the furnace shell 13 of the processing chamber and is fixedly connected with the lifting plate. Specifically, the lifting plate 82 is directly opposite to the feeding port 15. When the material translation vehicle slides to the top of the lifting plate 82, the lifting hydraulic cylinder 81 drives the lifting guide rod 83 to rise and fall, and drives the lifting plate 82 to pass through the material translation vehicle, and lifts the material tray 3 located on the material translation vehicle upward, so that the material tray 3 passes through the corresponding feed port and enters the high temperature chamber 20. Specifically, the material tray 3 can be provided to include an insulation tray 3a made of insulation material, an insulation plate frame 3b arranged outside the insulation tray 3a, and a crucible 3c arranged above the insulation tray 3a, to ensure that the material tray 3 can withstand the high temperature environment in the high temperature chamber 20.

[0048] like Figure 1 , 2, 6a, 6b, 6c, in this preferred embodiment, a material holding mechanism 90 is provided near the feeding port 15 in the high temperature chamber 20, and the material holding mechanism 90 preferably includes a driving cylinder 91 provided on the outer side wall of the high temperature furnace shell 21, a cylinder telescopic rod 92 passing through the side wall of the high temperature furnace shell 21 and extending into the high temperature chamber 20, and a plug plate 93 fixed at the end of the cylinder telescopic rod 92, and a notch 3d matching the plug plate is provided at the bottom of the insulation support plate 3a of the material tray. It is best to set at least two material holding mechanisms 90 on the high temperature chamber 20, and they are symmetrically distributed around the opening 24 of the high temperature furnace shell.

[0049] In this preferred embodiment, the material translation mechanism 60 translates the material tray 3 from the transfer section 11 to the cooling section 12 according to a preset trajectory. Figure 4a , 4b As shown, the material translation mechanism 60 is preferably provided to include a translation guide rail 61, a plurality of rollers 62 rotatably arranged on the translation guide rail 61, a chain 63 driving the plurality of rollers 62 to rotate synchronously, a sprocket shaft 65 driven by a translation motor 64, a sprocket 66 arranged on the sprocket shaft 65, and a material translation vehicle 67 slidingly arranged on the rollers 62 along the translation guide rail 61, and the sprocket 66 cooperates with the chain 63. The translation guide rail 61 extends from each transfer section 11 to the cooling section 12, the translation motor 64 drives the sprocket shaft 65 to drive the sprocket 66 to rotate, and drives the rollers 62 to rotate through the chain 63, thereby driving the material translation vehicle 67 located on the rollers to move along the translation guide rail 61. It is preferred that the sprocket shaft 65 and the translation motor 64 are arranged outside the furnace shell 13 of the processing chamber, and the chain 63 extends to the inside of the furnace shell 13 of the processing chamber, so that the translation motor 64 does not need to be in a high temperature environment, thereby extending the service life of the entire material translation mechanism 60.

[0050] Multiple transfer sections 11 can be arranged in the processing chamber shell 13 as needed, each of which is provided with the above-mentioned feeding chamber 1, and all the transfer sections 11 are connected to the cooling section 12. In this way, multiple workpieces 4 can be processed at the same time, further improving production efficiency.

[0051] like Figure 1 , 2As shown in Figure 3, in this preferred embodiment, the feed isolation door mechanism 30 is preferably provided, which includes a feed isolation door housing 31 provided between the feed chamber furnace shell 1a and the processing chamber furnace shell 13, two feed isolation doors 32 vertically slidably provided in the feed isolation door housing, and a first hydraulic cylinder 33 for driving the feed isolation door 32 to move up and down. When the feed isolation door 32 needs to be opened, the first hydraulic cylinder 33 is controlled to drive the two feed isolation doors 32 to slide in opposite directions, thereby opening the passage between the feed chamber 1 and the processing chamber 10, so as to deliver the material tray 3 from the feed chamber 1 to the processing chamber 10; when the feed isolation door 32 needs to be closed, the first hydraulic cylinder 33 is controlled to drive the two feed isolation doors 32 to slide in opposite directions, until the gap between the two feed isolation doors 32 is closed, so that the passage between the feed chamber 1 and the processing chamber 10 is closed.

[0052] In the above embodiment, the discharge chamber 2 may include a discharge chamber furnace shell 2a and a discharge chamber furnace door 2b, and the discharge chamber furnace door 2b may be arranged on the top or side of the discharge chamber furnace shell 2a. It is preferred that the discharge chamber 2 also includes a discharge translation mechanism 2c, so as to deliver the material tray 3 containing the workpiece 4 from the cooling section 12 into the discharge chamber 2. The discharge translation mechanism 2c may be arranged with reference to the above-mentioned feed translation mechanism 1c.

[0053] In the above embodiment, the discharge isolation door mechanism 40 can also be set with reference to the above-mentioned feed isolation door mechanism 30, that is, the discharge isolation door mechanism 40 includes a discharge isolation door shell arranged between the discharge chamber furnace shell and the processing chamber furnace shell 13, two discharge isolation doors vertically slidingly arranged in the discharge isolation door shell, and a second hydraulic cylinder for driving the discharge isolation door to move up and down.

[0054] like Figure 2 As shown, in a preferred embodiment of the processing method of the multi-chamber continuous high-temperature heat treatment equipment of the present invention, the following steps are included:

[0055] S10. A multi-chamber continuous high temperature heat treatment apparatus as described above is provided;

[0056] S21. Once loaded, place the first workpiece into the material tray of the feed chamber;

[0057] S22. Transfer, open the feed isolation door mechanism, control the material translation mechanism to translate the material tray containing the first workpiece to the corresponding transfer section directly below the first feed port; that is, transfer the first workpiece from the first station of the feed chamber to the second station of the transfer section;

[0058] S23. Open the corresponding insulation door mechanism, and the material lifting mechanism corresponding to the first feeding port lifts the corresponding material tray into the corresponding high-temperature chamber, and the material holding mechanism in the high-temperature chamber clamps the material tray, closes the insulation door mechanism, and controls the high-temperature chamber to process the first workpiece according to the preset process; that is, the first workpiece is transferred from the second station in the transfer section to the third station in the high-temperature chamber;

[0059] S31. Secondary loading, placing the second workpiece into the material tray of the feed chamber;

[0060] S32. Transfer, open the feed isolation door mechanism, control the material translation mechanism to translate the material tray containing the second workpiece to the corresponding transfer section directly below the second feed port; that is, transfer the second workpiece from the first station of the feed chamber to the fourth station of the transfer section;

[0061] S33. Open the corresponding insulation door mechanism, and the material lifting mechanism corresponding to the second feeding port lifts the corresponding material tray into the corresponding high-temperature chamber, and the material holding mechanism in the high-temperature chamber clamps the material tray, closes the insulation door mechanism, and controls the high-temperature chamber to process the second workpiece according to the preset process; that is, the second workpiece is transferred from the fourth station in the transfer section to the fifth station in another high-temperature chamber;

[0062] S40. After the first workpiece is processed, open the corresponding insulation isolation door mechanism, control the corresponding material lifting mechanism to lift it to the bottom of the material tray in the corresponding high-temperature chamber, and control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to drop the material tray onto the material translation mechanism, and close the insulation isolation door mechanism; open the partition isolation door, and translate the material tray containing the first workpiece to the cooling section through the material translation mechanism, and close the partition isolation door; repeat the steps S21 to S23 synchronously;

[0063] S50. After the second workpiece is processed, open the corresponding insulation isolation door mechanism, control the corresponding material lifting mechanism 80 to lift it to the bottom of the material tray in the corresponding high-temperature chamber, and control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to drop the material tray onto the material translation mechanism, and close the insulation isolation door mechanism; open the partition isolation door, and translate the material tray containing the second workpiece to the cooling section through the material translation mechanism, and close the partition isolation door; repeat the steps S31 to S33 synchronously;

[0064] S60. Repeat steps S21 to S50 synchronously in other transfer segments;

[0065] S70. When the number of workpieces in the cooling section reaches a preset number, the discharge isolation door mechanism is opened, the material translation mechanism is controlled to transfer the workpieces that have completed the cooling process to the discharge chamber, and the discharge isolation door mechanism is closed.

[0066] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work, any modifications, equivalent substitutions, improvements, etc. made should be included in the protection scope of the present invention.

Claims

1. A multi-chamber continuous high-temperature heat treatment equipment, comprising a feeding chamber, a processing chamber and a discharging chamber which are arranged in sequence and continuously, characterized in that: The processing chamber comprises a cooling section and at least one transfer section, and at least one high-temperature chamber is connected to the top of each transfer section; a feed chamber is provided corresponding to each transfer section, a feed isolation door mechanism is provided between the transfer section and the feed chamber, a discharge isolation door mechanism is provided between the cooling section and the discharge chamber, and a partition isolation door is provided between the transfer section and the cooling section; A material translation mechanism is provided in the processing chamber, and the material translation mechanism controls the material tray containing the workpiece to translate from each of the transfer sections to the cooling section according to a preset trajectory; a feeding port is provided at the top of the transfer section corresponding to each of the high-temperature chambers, and a heat-insulating isolation door mechanism is provided at the feeding port for opening and closing the feeding port according to a preset process; A material lifting mechanism is provided at the bottom of each feeding port in the transfer section, and the material lifting mechanism lifts the material tray on the material translation mechanism to the corresponding high-temperature chamber or drops the material tray from the high-temperature chamber to the material translation mechanism according to a preset process; Each of the high-temperature chambers is provided with a material holding mechanism near the feeding port, and the material holding mechanism clamps or releases the material tray fed by the material lifting mechanism according to a preset process.

2. The multi-chamber continuous high-temperature heat treatment equipment according to claim 1, characterized in that: The material translation mechanism is arranged at the inner bottom of the processing chamber, and the material translation mechanism includes a translation guide rail arranged according to a preset trajectory, a plurality of rollers rotatably arranged on the translation guide rail, a chain driving the plurality of rollers to rotate synchronously, a translation motor driving the chain to rotate through a sprocket shaft, and a material translation vehicle slidably arranged on the plurality of rollers, and the material tray is mounted on the material translation vehicle.

3. The multi-chamber continuous high-temperature heat treatment equipment according to claim 2, characterized in that: The material lifting mechanism includes a lifting hydraulic cylinder arranged at the bottom of the outer side of the processing chamber, a lifting plate arranged at the inner side of the processing chamber and located below the translation guide rail, and a lifting guide rod driven by the lifting hydraulic cylinder and passing through the bottom side wall of the processing chamber and fixedly connected to the bottom of the lifting plate, and the lifting plate is opposite to the feeding port; when the logistics translation vehicle slides to the top of the lifting plate, the lifting hydraulic cylinder can drive the lifting guide rod to rise and fall and drive the lifting plate to pass through the material translation vehicle, and the lifting plate will lift the material tray on the material translation vehicle upward and pass through the corresponding feed port into the corresponding high-temperature chamber.

4. The multi-chamber continuous high-temperature heat treatment equipment according to claim 1, characterized in that: The material tray comprises a heat-insulating support plate made of heat-insulating material, a heat-insulating plate frame arranged outside the heat-insulating support plate, and a crucible arranged above the heat-insulating support plate.

5. The multi-chamber continuous high-temperature heat treatment equipment according to claim 3, characterized in that: The material holding mechanism includes a driving cylinder arranged on the outer side wall of the high-temperature chamber, a cylinder telescopic rod driven by the driving cylinder and extending through the side wall of the high-temperature chamber into the high-temperature chamber, and an insert plate fixed at the end of the cylinder telescopic rod. A notch matching the insert plate is provided at the bottom of the material tray.

6. The multi-chamber continuous high-temperature heat treatment equipment according to claim 1, characterized in that: Each of the high-temperature chambers includes a high-temperature furnace shell fixed on the top of the transfer section, an insulation component arranged in the high-temperature furnace shell, and a heating body arranged in the insulation component for heating the workpiece; the bottom of the high-temperature furnace shell is provided with an opening connected to the corresponding feeding port.

7. The multi-chamber continuous high-temperature heat treatment equipment according to claim 6, characterized in that: The thermal insulation door mechanism includes a thermal insulation guide rail horizontally arranged on the top of the transfer section, a thermal insulation door that can seal and cover the opening of the high-temperature chamber furnace shell, a guide roller fixedly arranged on the end face of the thermal insulation door and slidably arranged in the thermal insulation guide rail, and a first driving mechanism that drives the thermal insulation door to slide back and forth.

8. The multi-chamber continuous high-temperature heat treatment equipment according to claim 6, characterized in that: The inner side wall of the transfer section is provided with a processing insulation layer, and the partition isolation door is located above the material translation mechanism.

9. The multi-chamber continuous high-temperature heat treatment equipment according to claim 8, characterized in that: The feeding chamber includes a feeding chamber furnace shell and a feeding chamber furnace door; the feeding isolation door mechanism includes an isolation door shell arranged between the feeding chamber furnace shell and the transfer section, two thermal insulation isolation doors that can slide up and down are vertically arranged in the isolation door shell, and an isolation door lifting mechanism is arranged outside the feeding chamber furnace shell.

10. A method for processing a multi-chamber continuous high-temperature heat treatment equipment, characterized in that: The following steps are involved: S10. A multi-chamber continuous high temperature heat treatment device is provided as described in any one of claims 1 to 9; S21. Once loaded, place the first workpiece into the material tray of the feed chamber; S22. Transfer, open the feed isolation door mechanism, control the material translation mechanism to translate the material tray containing the first workpiece to the corresponding transfer section directly below the first feed port; S23. Open the corresponding insulation door mechanism, and the material lifting mechanism corresponding to the first feeding port lifts the corresponding material tray into the corresponding high-temperature chamber, and the material holding mechanism in the high-temperature chamber clamps the material tray, closes the insulation door mechanism, and controls the high-temperature chamber to process the first workpiece according to the preset process; S31. Secondary loading, placing the second workpiece into the material tray of the feed chamber; S32. Transfer, open the feed isolation door mechanism, control the material translation mechanism to translate the material tray containing the second workpiece to the corresponding transfer section directly below the second feed port; S33. Open the corresponding insulation door mechanism, and the material lifting mechanism corresponding to the second feeding port lifts the corresponding material tray to the corresponding high-temperature chamber, and the material holding mechanism in the high-temperature chamber clamps the material tray, closes the insulation door mechanism, and controls the high-temperature chamber to process the second workpiece according to the preset process; S40. After the first workpiece is processed, open the corresponding insulation isolation door mechanism, control the corresponding material lifting mechanism to lift it to the bottom of the material tray in the corresponding high-temperature chamber, and control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to drop the material tray onto the material translation mechanism, and close the insulation isolation door mechanism; open the partition isolation door, and translate the material tray containing the first workpiece to the cooling section through the material translation mechanism, and close the partition isolation door; repeat the steps S21 to S23 synchronously; S50. After the second workpiece is processed, open the corresponding insulation isolation door mechanism, control the corresponding material lifting mechanism to lift it to the bottom of the material tray in the corresponding high-temperature chamber, and control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to drop the material tray onto the material translation mechanism, and close the insulation isolation door mechanism; open the partition isolation door, and translate the material tray containing the second workpiece to the cooling section through the material translation mechanism, and close the partition isolation door; repeat the steps S31 to S33 synchronously; S60. Repeat steps S21 to S50 synchronously in other transfer segments; S70. When the number of workpieces in the cooling section reaches a preset number, the discharge isolation door mechanism is opened, the material translation mechanism is controlled to transfer the workpieces that have completed the cooling process to the discharge chamber, and the discharge isolation door mechanism is closed.

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