Micro-hemispherical gyroscope sensor

Abstract

According to the micro-hemisphere gyroscope sensor, an excitation electrode and a detection electrode are separately arranged, and compared with a traditional electrode design of an integrated structure, the micro-hemisphere gyroscope sensor has the advantage that the effectively utilized capacitance can be remarkably increased under the condition of the same structural size. The design not only optimizes the capacitance performance, but also greatly reduces the signal interference intensity between the excitation electrode and the detection electrode, thereby effectively improving the mechanical sensitivity and the measurement precision of the gyroscope. The innovation not only enhances the performance of the equipment, but also provides a more reliable technical basis for the development of a high-precision navigation and positioning system.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a micro-hemispherical gyroscope sensor capable of realizing angle or angular velocity detection. Background Art

[0002] In the research and development of micro high-precision gyroscopes, micro-hemispherical gyroscopes have become a hot topic of current research due to their low cost, compact volume structure and excellent precision performance. The progress in this technical field depends largely on the design and optimization of its core component, the micro-hemispherical gyroscope sensor. The micro-hemispherical gyroscope sensor is mainly composed of a resonator, an excitation electrode and a detection electrode, among which the design of the excitation electrode and the detection electrode is directly related to the performance of the gyroscope.

[0003] At present, there are various design schemes for excitation electrodes and detection electrodes, mainly including planar structure, cylindrical structure and spherical structure. Among these structures, the planar structure has been favored by many domestic research institutions due to its relatively simple structure and manufacturing process. However, the excitation electrodes and detection electrodes with planar structures also have some inherent limitations in the existing technical solutions.

[0004] Specifically, the existing planar structure excitation electrodes and detection electrodes usually adopt an integrated manufacturing process, which means that a single electrode needs to simultaneously bear multiple functions such as vibration excitation of the resonator, orthogonal detection, orthogonal control, and standing wave detection. This design limits the number of electrodes that can be effectively used for each function, thereby increasing the noise level in the vibration signal detection process. The increase in noise not only affects the accuracy of the gyroscope, but also poses a challenge to its reliability in practical applications.

[0005] In addition, since the excitation electrodes and detection electrodes in the planar structure are located on the same plane, the electrical shielding effect between them is relatively poor. This design deficiency makes the interference problem between signals particularly prominent, further limiting the room for reducing gyroscope detection noise. Interference between electrical signals will not only reduce the measurement accuracy of the gyroscope, but may also cause system instability, thus affecting its overall performance.

[0006] In summary, although planar structure excitation electrodes and detection electrodes have been widely used in micro-hemispherical gyroscope sensors, the problems of insufficient number of functional electrodes and poor electrical shielding effect have become key factors restricting the further improvement of gyroscope performance. Therefore, exploring new excitation electrode and detection electrode design schemes to improve the functionality and electrical shielding effect of the electrodes is of great significance to promote the development of micro-hemispherical gyroscope technology. Summary of the invention

[0007] In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to provide a micro-hemispherical gyro sensor to solve the problems of insufficient number of functional electrodes and electrical signal interference in the planar structure integrated excitation electrodes and detection electrodes in the prior micro-hemispherical gyro sensors.

[0008] In order to achieve the above object, the technical solution adopted by the present invention is as follows: A micro-hemispherical gyro sensor comprises a detection electrode substrate, on which a plurality of detection electrodes are arranged, all of which are arranged circumferentially and spaced apart around the central axis of the detection electrode substrate, an excitation cover is installed on the detection electrode substrate, the central axis of the excitation cover overlaps with the central axis of the detection electrode substrate, the excitation cover comprises an integrally formed cover wall and a cover top, a through hole with a center on the central axis of the excitation cover is opened on the cover top; a plurality of excitation electrodes are arranged on the cover top, all of which are arranged circumferentially and spaced apart around the central axis of the excitation cover; any excitation electrode comprises an excitation electrode arranged on the upper and lower surfaces of the cover top and an excitation electrode on the wall of the through hole of the cover top, the excitation electrodes on the upper and lower surfaces of the cover top are excited by the excitation electrodes on the wall of the through hole of the cover top The electrodes are electrically connected; the excitation cover and the detection electrode substrate form a cavity with an opening on the top, a resonator is installed in the cavity, the resonator is a hemispherical cover with an opening facing downward, the edge of the hemispherical cover opening extends outward to form a circle of cover edge, the top of the hemispherical cover can pass through the through hole, and the cover edge is suspended and extends under the cover top; the middle part of the upper surface of the hemispherical cover is recessed downward, so that a hollow anchor column with an open upper end is extended downward on the lower surface, the bottom of the hollow anchor column is fixedly connected to the resonator connection electrode set on the detection electrode substrate, so that the resonator can be suspended in the air to generate vibration, and power is supplied to the resonator through the resonator connection electrode; the detection electrode is located directly below the cover edge; the surface of the resonator is completely covered with an electrode film.

[0009] Furthermore, the detection electrode includes an upper detection electrode and a lower detection electrode respectively arranged on the upper and lower surfaces of the detection electrode substrate, and the middle part of the upper detection electrode is not disconnected from the part directly opposite to the cover edge, forming two upper detection electrodes, and the two upper detection electrodes are respectively electrically connected to the lower detection electrode through corresponding connecting electrodes arranged in through holes opened on the detection electrode substrate.

[0010] Furthermore, the distance between the outer side of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the upper detection electrode disconnection point close to the central axis of the detection electrode substrate and the central axis of the detection electrode substrate.

[0011] Furthermore, the distance between the outer side of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the excitation electrode on the lower surface of the cover top close to the cover wall and the central axis of the detection electrode substrate.

[0012] Furthermore, the excitation electrodes on the lower surface of the cover top and the detection electrodes directly facing the cover edge are arranged in a fan-shaped ring toward the central axis of the detection electrode substrate.

[0013] Furthermore, the detection electrode is arranged on the upper surface of the detection electrode substrate.

[0014] Furthermore, there are 8 excitation electrodes and 16 detection electrodes.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The micro-hemispherical gyro sensor of the present invention can significantly increase the effectively utilized capacitance under the same structural size conditions by separating the excitation electrode from the detection electrode, compared with the traditional integrated electrode design. This design not only optimizes the capacitance performance, but also greatly reduces the signal interference intensity between the excitation electrode and the detection electrode, thereby effectively improving the mechanical sensitivity and measurement accuracy of the gyro. This innovation not only enhances the performance of the equipment, but also provides a more reliable technical foundation for the development of high-precision navigation and positioning systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the structure of the micro-hemispherical gyro sensor according to Example 1 of the present invention.

[0017] Figure 2 Schematic diagram of the structure of the micro-hemispherical gyro sensor according to embodiment 2 of the present invention.

[0018] In the figure, there are detection electrode substrate 1, detection electrode 2, excitation cover 3, cover wall 31, cover top 32, resonator 4, hemispherical cover 41, cover edge 42, hollow anchor column 43, central axis 5, resonator connecting electrode 6, and excitation electrode 7. DETAILED DESCRIPTION

[0019] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings; it should be understood that the preferred embodiments are only for illustrating the present invention rather than for limiting the protection scope of the present invention.

[0020] Example 1 This embodiment provides a micro-hemispherical gyro sensor, such as Figure 1As shown, it includes a detection electrode substrate 1, on which a plurality of detection electrodes 2 are arranged, and all the detection electrodes 2 are arranged at intervals in a circumference around the central axis 5 of the detection electrode substrate 1; an excitation cover 3 is installed on the detection electrode substrate 1, and the central axis of the excitation cover 3 overlaps with the central axis of the detection electrode substrate 1; the excitation cover 3 includes an integrally formed cover wall 31 and a cover top 32, and the cover top 32 is provided with a through hole with the center on the central axis of the excitation cover 3; a plurality of excitation electrodes 7 are arranged on the cover top 32, and all the excitation electrodes 7 are arranged at intervals in a circumference around the central axis of the excitation cover 3; any excitation electrode 7 includes an excitation electrode arranged on the upper and lower surfaces of the cover top 32 and an excitation electrode on the wall of the through hole of the cover top 32, and the excitation electrodes on the upper and lower surfaces of the cover top 32 are realized through the excitation electrodes on the wall of the through hole of the cover top 32 Electrical connection; the excitation cover 3 and the detection electrode substrate 1 form a cavity with an opening on the top, and a resonator 4 is installed in the cavity. The resonator 4 is a hemispherical cover 41 with an opening facing downward, and the edge of the opening of the hemispherical cover 41 extends outward to form a circle of cover edge 42, the top of the hemispherical cover 41 can pass through the through hole, and the cover edge 42 is suspended and extends under the cover top 32; the middle part of the upper surface of the hemispherical cover 41 is recessed downward, so that a hollow anchor column 43 with an open upper end is extended downward on the lower surface, and the bottom of the hollow anchor column 43 is fixedly connected to the resonator connection electrode 6 set on the detection electrode substrate 1, so that the resonator 4 can be suspended in the air to generate vibration, and at the same time, power is supplied to the resonator 4 through the resonator connection electrode 6; the detection electrode 2 is located directly below the cover edge 42; the surface of the resonator 4 is completely covered with an electrode film.

[0021] In a specific implementation, the detection electrode 2 includes an upper detection electrode and a lower detection electrode respectively arranged on the upper and lower surfaces of the detection electrode substrate 1, and the middle part of the upper detection electrode that is not directly opposite to the cover edge 42 is disconnected to form two upper detection electrodes, and the two upper detection electrodes are respectively electrically connected to the lower detection electrode through corresponding connection electrodes arranged in the through holes opened on the detection electrode substrate 1. In this way, the distance between the detection electrode 2 and the excitation electrode 7 can be increased, the electrical signal interference between the two can be reduced, and the measurement accuracy of the angle change or angular velocity value can be improved.

[0022] In a specific implementation, the distance between the outer side of the cover edge 42 and the central axis 5 of the detection electrode substrate 1 is greater than the distance between the end of the upper detection electrode disconnection point close to the central axis 5 of the detection electrode substrate 1 and the central axis 5 of the detection electrode substrate 1. In this way, the electrical signal between the detection electrode 2 and the excitation electrode 7 can be shielded by the resonator 4, thereby reducing the electrical signal interference between the two.

[0023] In a specific implementation, the distance between the outer side of the cover edge 42 and the central axis 5 of the detection electrode substrate 1 is greater than the distance between the end of the excitation electrode 7 on the lower surface of the cover top 32 close to the cover wall 31 and the central axis 5 of the detection electrode substrate 1. In this way, the electrical signal between the detection electrode 2 and the excitation electrode 7 can be shielded by the resonator 4, thereby reducing the electrical signal interference between the two.

[0024] In a specific implementation, the excitation electrodes 7 on the lower surface of the cover top 32 and the detection electrodes 2 directly facing the cover edge 42 are arranged in a fan-shaped manner toward the central axis 5 of the detection electrode substrate 1 .

[0025] In a specific implementation, the number of the excitation electrodes 7 is 8 and the number of the detection electrodes 2 is 16.

[0026] Working principle: During operation, a pair of excitation capacitors are formed between the excitation electrode 7 on the lower surface of the cover top 32 and the electrode film on the lower surface of the cover edge 42. By applying an AC voltage to the capacitor to form an electrostatic force, the resonator 4 is excited to stably vibrate at the four-antenna modal mechanical frequency; when there is a rotational angular velocity parallel to the central axis 5 of the detection electrode substrate 1, the standing wave of the resonator in the four-antenna modal vibration will precess at its cover edge 42, and the precession angle can be detected by the change in the detection capacitance formed between the detection electrode 2 and the electrode film on the upper surface of the cover edge 42 of the resonator, and then the external angle change or angular velocity value can be calculated.

[0027] Example 2 This embodiment provides a micro-hemispherical gyro sensor, such as Figure 2 As shown, it is mainly the same as embodiment 1, except that the detection electrode 2 is only arranged on the upper surface of the detection electrode substrate 1, and the middle part is not disconnected. And the relative size of the distance between the end of the lower surface of the cover top 32 excitation electrode 7 close to the cover wall 31 and the central axis 5 of the detection electrode substrate 1 and the distance between the outer side of the cover edge 42 and the central axis 5 of the detection electrode substrate 1 is not limited. In this way, the process complexity can be reduced and the production efficiency can be improved.

[0028] In summary, unlike the micro-hemispherical resonator with an integral excitation electrode and a planar detection electrode, the present invention separates the excitation electrode and the detection electrode. Under the same structural size, the effectively utilized capacitance is larger, and the signal interference intensity between the excitation electrode and the detection electrode is smaller, so the mechanical sensitivity and precision performance of the gyroscope are higher.

[0029] The above embodiments of the present invention are merely examples for illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes and modifications can be made based on the above description. It is impossible to list all the embodiments here. Any obvious changes or modifications derived from the technical solution of the present invention are still within the scope of protection of the present invention.

Claims

1. A micro-hemispherical gyro sensor, comprising a detection electrode substrate, characterized in that: The detection electrode substrate is provided with a plurality of detection electrodes, all of which are arranged at intervals in a circumference around the central axis of the detection electrode substrate; an excitation cover is installed on the detection electrode substrate, the central axis of the excitation cover overlaps with the central axis of the detection electrode substrate, the excitation cover comprises an integrally formed cover wall and a cover top, the cover top is provided with a through hole with the center on the central axis of the excitation cover; the cover top is provided with a plurality of excitation electrodes, all of which are arranged at intervals in a circumference around the central axis of the excitation cover; any excitation electrode comprises an excitation electrode arranged on the upper and lower surfaces of the cover top and an excitation electrode on the wall of the through hole of the cover top, the excitation electrodes on the upper and lower surfaces of the cover top are electrically connected through the excitation electrode on the wall of the through hole of the cover top; The excitation cover and the detection electrode substrate form a cavity with an opening at the top, and a resonator is installed in the cavity. The resonator is a hemispherical cover with an opening facing downward. The edge of the hemispherical cover opening extends outward to form a circle of cover edge, and the top of the hemispherical cover can pass through the through hole, and the cover edge is suspended and extends under the cover top; the middle part of the upper surface of the hemispherical cover is recessed downward, so that a hollow anchor column with an open upper end extends downward on the lower surface, and the bottom of the hollow anchor column is fixedly connected to the resonator connection electrode arranged on the detection electrode substrate, so that the resonator can be suspended in the air to generate vibration, and power is supplied to the resonator through the resonator connection electrode; the detection electrode is located directly below the cover edge; the surface of the resonator is completely covered with an electrode film.

2. The micro-hemispherical gyro sensor according to claim 1, characterized in that: The detection electrode includes an upper detection electrode and a lower detection electrode respectively arranged on the upper and lower surfaces of the detection electrode substrate. The middle part of the upper detection electrode is not disconnected from the part directly opposite to the cover edge, forming two upper detection electrodes. The two upper detection electrodes are respectively electrically connected to the lower detection electrode through corresponding connecting electrodes in through holes opened on the detection electrode substrate.

3. The micro-hemispherical gyro sensor according to claim 2, characterized in that: The distance between the outer side of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the upper detection electrode disconnection point close to the central axis of the detection electrode substrate and the central axis of the detection electrode substrate.

4. The micro-hemispherical gyro sensor according to claim 1, characterized in that: The distance between the outer side of the cover and the central axis of the detection electrode substrate is greater than the distance between one end of the excitation electrode on the lower surface of the cover top close to the cover wall and the central axis of the detection electrode substrate.

5. The micro-hemispherical gyro sensor according to claim 1, characterized in that: The excitation electrodes on the lower surface of the cover top and the detection electrodes directly facing the cover edge are arranged in a fan-shaped manner toward the central axis of the detection electrode substrate.

6. The micro-hemispherical gyro sensor according to claim 1, characterized in that: The detection electrode is arranged on the upper surface of the detection electrode substrate.

7. The micro-hemispherical gyro sensor according to claim 1, characterized in that: There are 8 excitation electrodes and 16 detection electrodes.

Images