Lifting mechanism and wafer detection device

Abstract

The invention relates to a lifting mechanism and a wafer detection device. The lifting mechanism comprises a mounting base and an adjusting assembly, the adjusting assembly comprises a first adjusting piece and a second adjusting piece, the first adjusting piece is slidably connected with the mounting base in the first direction, the second adjusting piece is slidably connected with the first adjusting piece in the second direction, and the second adjusting piece is slidably connected with the first adjusting piece in the third direction. When the first adjusting part moves in the first direction, the second adjusting part moves relative to the first adjusting part in the second direction and the third direction, so that the height of the second adjusting part in the third direction is adjusted, the first direction intersects with the third direction, and the second direction is located between the first direction and the third direction. An included angle alpha between the first direction and the second direction is greater than or equal to 15 degrees and less than or equal to 30 degrees; the included angle beta between the second direction and the third direction is larger than or equal to 60 degrees and smaller than or equal to 75 degrees. The lifting mechanism has high adjusting precision on the height of the second adjusting piece in the third direction.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a lifting mechanism and a wafer detection device. Background Art

[0002] In the wafer detection device, a mobile stage is provided to carry the wafer to be detected and adjust the position of the wafer to be detected in the horizontal direction and the height direction. When the size of the wafer to be detected is large, the greater the weight carried on the mobile stage, the more likely it is to affect the accuracy of the mobile stage in adjusting the position of the wafer to be detected in the height direction. Therefore, in order to adapt to samples to be detected of different sizes, it is necessary to improve the adjustment accuracy of the mobile stage in the height direction of the wafer to be detected. Summary of the invention

[0003] In view of this, the present application provides a lifting mechanism and a wafer inspection device, wherein the lifting mechanism has a high adjustment accuracy for the height of the second adjustment member in the third direction.

[0004] The present application provides a lifting mechanism, which includes: a mounting seat and an adjusting component, wherein the adjusting component includes a first adjusting member and a second adjusting member, the first adjusting member is slidably connected to the mounting seat along a first direction, the second adjusting member is slidably connected to the first adjusting member along a second direction, and the second adjusting member is slidably connected to the first adjusting member along a third direction, when the first adjusting member moves along the first direction, the second adjusting member moves relative to the first adjusting member along the second direction and the third direction, thereby adjusting the height of the second adjusting member in the third direction, wherein the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, and the range of the angle α between the first direction and the second direction is: 15°≤α≤30°; the range of the angle β between the second direction and the third direction is: 60°≤β≤75°.

[0005] Furthermore, the first adjusting member has a first position and a second position relative to the mounting seat along the first direction; the lifting mechanism also includes a control component, the control component includes a controller, a first control subassembly and a second control subassembly, the first control subassembly and the second control subassembly are arranged on the mounting seat at intervals along the first direction, the first control subassembly is arranged close to the first position, and the second control subassembly is arranged close to the second position, the controller is electrically connected to the first control subassembly and the second control subassembly, respectively, and the controller, the first control subassembly and the second control subassembly cooperate to control the first adjusting member to move between the first position and the second position.

[0006] Furthermore, the lifting mechanism also includes a driving component, which includes a driving member, which is installed on a mounting seat and electrically connected to the controller, and the driving member is used to drive the first adjusting member to move along a first direction; when the first adjusting member moves to a first position, the first control subassembly generates a first signal, and the controller receives the first signal of the first control subassembly and controls the driving member to close; when the first adjusting member moves to a second position, the second control subassembly generates a second signal, and the controller receives the second signal of the second control subassembly and controls the driving member to close, and the controller, the first control subassembly and the second control subassembly cooperate to move the first adjusting member between the first position and the second position.

[0007] Furthermore, the first control subassembly includes a first mounting member, a first electrode, a second electrode and a first switch member, the first mounting member is mounted on the mounting seat, the first electrode is arranged on the first mounting member, the second electrode abuts against the first electrode, the second electrode is also connected to the first switch member, and the second electrode and the first switch member can move relative to the first mounting member in a first direction, the first electrode and the second electrode are both electrically connected to the controller, when the first adjusting member moves to the first position, the first electrode and the second electrode are disconnected and a first signal is formed, the controller receives the first signal and controls the driving member to close; when the first adjusting member leaves the first position in a direction close to the second position, the controller controls the driving member to open, and the first electrode and the second electrode are connected. abutment; the second control subassembly includes a second mounting member, a third electrode, a fourth electrode and a second switch member, the second mounting member is mounted on the mounting seat, the third electrode is arranged on the second mounting member, the fourth electrode abuts the third electrode, the fourth electrode is also connected to the second switch member, and the fourth electrode and the second switch member can move along a first direction relative to the second mounting member, the third electrode and the fourth electrode are both electrically connected to the controller, when the first adjusting member moves to the second position, the third electrode is disconnected from the fourth electrode and a second signal is formed, the controller receives the second signal and controls the driving member to close; when the first adjusting member leaves the second position in a direction close to the second position, the controller controls the driving member to open, and the third electrode abuts the fourth electrode.

[0008] Furthermore, the driving assembly also includes a guide member and a connecting member, the power output shaft of the driving member is connected to the guide member, the guide member extends along a first direction, the connecting block is sleeved on the outer periphery of the guide member and is threadedly connected to the guide member, the connecting block is connected to the first adjusting member, and the connecting block is located between the first position and the second position; when the driving member is turned on, the guide member is driven to rotate, thereby driving the connecting block and the first adjusting member to move relative to the mounting seat along the first direction, thereby realizing the adjustment of the height of the second adjusting member in the third direction.

[0009] Furthermore, the first control subassembly also includes a first elastic member, the first mounting member has a first accommodating cavity, and the first accommodating cavity extends along a first direction; the first electrode is arranged in the first accommodating cavity, the first switch member is sequentially penetrated through the first elastic member, the first electrode and the second electrode, and one end of the first switch member away from the second electrode protrudes from the first accommodating cavity; when the first adjusting member moves to the first position, the connecting block abuts against the first switch member to compress the first elastic member and drive the first switch member and the second electrode to move relative to the first accommodating cavity along the first direction toward the direction away from the second position, the first electrode is disconnected from the second electrode and a first signal is generated, the controller receives the first signal and controls the driving member to close; when the first adjusting member leaves the first position in a direction close to the second position, the controller controls the driving member to open, the first elastic member elastically recovers and pushes the first switch member and the second electrode to move relative to the first accommodating cavity along the first direction toward the direction close to the second position, the first electrode and the second electrode are closed. abutment; the second control subassembly also includes a second elastic member, the second mounting member has a second accommodating cavity, and the second accommodating cavity extends along the first direction; the third electrode is arranged in the second accommodating cavity, the second switch member is sequentially penetrated through the second elastic member, the third electrode and the fourth electrode, and one end of the second switch member away from the fourth electrode protrudes from the second accommodating cavity; when the first adjusting member moves to the second position, the connecting block abuts the second switch member to compress the second elastic member and drive the second switch member and the fourth electrode to move relative to the second accommodating cavity along the first direction toward the direction away from the first position, the third electrode is disconnected from the fourth electrode and a second signal is formed, the controller receives the second signal and controls the driving member to close; when the first adjusting member leaves the second position in the direction close to the first position, the controller controls the driving member to open, the second elastic member elastically recovers and pushes the second switch member and the fourth electrode to move relative to the second accommodating cavity along the first direction toward the direction close to the first position, and the third electrode abuts against the fourth electrode.

[0010] Furthermore, the lifting mechanism also includes a limit assembly, which includes a first limit member and a second limit member, the first limit member and the second limit member are arranged on the mounting seat, and the first limit member and the second limit member are arranged at intervals along the first direction on opposite sides of the connecting block to limit the movement of the connecting block in the first direction.

[0011] Further, the lifting mechanism includes a first track assembly and a second track assembly, the first track assembly is arranged between the first adjusting member and the mounting seat, and the first track assembly extends along a first direction to enable the first adjusting member to move relative to the mounting seat along the first direction; the second track assembly is arranged between the first adjusting member and the second adjusting member, and the second track assembly extends along a second direction to enable the first adjusting member to move relative to the second adjusting member along the second direction.

[0012] Further, the first track assembly includes a first subassembly and a second subassembly, the mounting seat has a first convex strip facing the first adjusting member, the first adjusting member has a first groove facing the second adjusting member, the first convex strip divides the first groove into a first setting space and a second setting space, the first setting space is used to set the first subassembly, the second setting space is used to set the second subassembly, the first subassembly and the second subassembly cooperate to guide the first adjusting member to move relative to the mounting seat along the first direction; the second track assembly includes a third subassembly and a fourth subassembly, the second adjusting member has a second convex strip facing the first adjusting member, the first adjusting member has a second groove facing the second adjusting member, the second convex strip divides the second groove into a third setting space and a fourth setting space, the third setting space is used to set the third subassembly, The fourth setting space is used to set the fourth subassembly, and the third subassembly and the fourth subassembly cooperate to guide the first adjusting member to move relative to the second adjusting member along the second direction; the first subassembly and the second subassembly both include a first track member, a second track member and a rolling member, the first track member is arranged on the first adjusting member, the second track member is arranged on the second adjusting member, and the rolling member is arranged between the first track member and the second track member and can be respectively connected to the first track member and the second track member by rolling; the third subassembly and the fourth subassembly both include a third track member, a fourth track member and a second rolling member, the third track member is arranged on the first adjusting member, the fourth track member is arranged on the second adjusting member, and the second rolling member is arranged between the third track member and the fourth track member and can be respectively connected to the third track member and the fourth track member by rolling.

[0013] The present application also provides a wafer detection device, which includes: a shell, a base, a lifting mechanism provided in the present application and a chuck, the shell having a chamber; the base being arranged in the chamber; the lifting mechanism being installed on one side of the base; the chuck being used to carry a sample to be detected, the chuck being arranged on a side of the second adjustment member away from the mounting seat, and when the second adjustment member moves along a third direction, the chuck and the sample to be detected are driven to move along the third direction.

[0014] Furthermore, the wafer detection device also includes a plurality of leveling components, which are arranged around the outer circumference of the mounting seat, and the plurality of leveling components cooperate to adjust the relative position of the mounting seat and the base; the leveling component includes: a support member, an adjusting pressure block and a locking member, the support member is passed through the mounting seat and is threadedly connected to the mounting seat, one end of the support member abuts against the base, the support member has a first penetration hole, the adjusting pressure block is arranged on the surface of the mounting seat away from the base and has a second penetration hole, the base has a locking hole, and the locking member is sequentially passed through the second penetration hole, the first penetration hole and the locking hole to fix the relative position of the mounting seat and the base.

[0015] Further, the chuck has a flow channel for circulating refrigerant; the wafer detection device also includes a refrigerant tank and a pipeline assembly, the refrigerant tank is used to store refrigerant and transport the refrigerant to the chuck through the pipeline assembly; the pipeline assembly includes a pipeline joint, a first pipeline member, a second pipeline member, a third pipeline member and a fourth pipeline member, the pipeline joint is arranged on the shell and located in the chamber, the pipeline joint has a first interface, a second interface, a third interface and a fourth interface, wherein the first interface is communicated with the second interface, and the third interface is communicated with the fourth interface; the first pipeline member passes through the bottom wall of the chamber and one end of the first pipeline member is connected to the refrigerant, the other end of the first pipeline member is connected to the first interface, the second pipeline member is an annular structure and the opposite ends of the second pipeline member are respectively connected to the second interface and the flow channel; the third pipeline member is an annular structure and the opposite ends of the third pipeline member are respectively connected to the flow channel and the third interface, one end of the fourth pipeline member is connected to the fourth interface, and the other end of the fourth pipeline member passes through the bottom wall of the chamber and is connected to the outside.

[0016] In the present application, when the lifting mechanism is applied to a wafer inspection device, the side of the second adjusting member that is away from the first adjusting member is used to carry the chuck and the sample to be inspected, and the relative position of the first adjusting member and the mounting seat in the first direction is adjusted to achieve the height of the second adjusting member in the third direction, thereby achieving the adjustment of the position of the chuck and the sample to be inspected in the height direction. Specifically, when the first adjusting member slides relative to the mounting seat along the first direction, the second adjusting member and the first adjusting member slide relative to each other in the second direction, thereby driving the second adjusting member to move relative to the first adjusting member and the mounting seat along the third direction, so as to change the height of the second adjusting member in the third direction.

[0017] When the angle α between the first direction and the second direction satisfies the range of 15°≤α≤30°, and the angle β between the second direction and the third direction satisfies the range of 60°≤β≤75, the angle between the first direction and the second direction is within a reasonable range, and the angle between the second direction and the third direction is within a reasonable range. On the one hand, when the first adjusting member moves relative to the mounting seat, the resistance of the first adjusting member and the second adjusting member to relative sliding along the second direction can be reduced and the resistance is within a reasonable range, so as to reduce the load of the driving member and improve the performance of the lifting mechanism. On the other hand, it is convenient to regulate the relative sliding speed of the first adjusting member and the second adjusting member, and avoid the second adjusting member sliding directly toward the side close to the mounting seat relative to the first adjusting member due to the steep slope formed by the second direction and the horizontal plane, which is conducive to improving the accuracy of the lifting mechanism in adjusting the height of the second adjusting member in the third direction. When the weight of the component carried by the side of the second adjusting member away from the mounting seat is relatively large, by setting the angle between the first direction and the second direction, and the angle between the second direction and the third direction, the second adjusting member will not slide directly toward the side close to the mounting seat relative to the first adjusting member due to the excessive weight of the component carried by the side of the second adjusting member away from the mounting seat, and the lifting mechanism still maintains a high adjustment accuracy for the height of the second adjusting member in the third direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1A schematic diagram of a portion of the structure of a wafer inspection device according to a first embodiment of the present application;

[0020] Figure 2 A schematic diagram of a partial exploded structure of a wafer inspection device according to the first embodiment of the present application;

[0021] Figure 3 A partial structural side view of a wafer inspection device according to the first embodiment of the present application;

[0022] Figure 4 A partial structural side view of a wafer inspection device according to a second embodiment of the present application;

[0023] Figure 5 This is a circuit block diagram of a lifting mechanism according to an embodiment of the present application;

[0024] Figure 6 A schematic diagram of a top view of a wafer inspection device according to an embodiment of the present application;

[0025] Figure 7 for Figure 6 Sectional view in the AA direction;

[0026] Figure 8 for Figure 7 A magnified image of the dashed box in middle B;

[0027] Fig. 9 for Figure 7 The enlarged view of the dashed box in C;

[0028] Fig.10 for Figure 2 The enlarged view of the dashed box in D;

[0029] Fig.11 This is a partial structural schematic diagram of the lifting mechanism of the first embodiment of the present application;

[0030] Fig.12 This is a partial structural schematic diagram of the lifting mechanism of the second embodiment of the present application;

[0031] Fig.13 A partial structural schematic diagram of a wafer inspection device according to a second embodiment of the present application;

[0032] Fig.14 A schematic diagram of a partial exploded structure of a wafer inspection device according to a second embodiment of the present application;

[0033] Fig.15 This is a schematic diagram of a top view of a housing according to an embodiment of the present application;

[0034] Fig.16 for Fig.15 Cross-sectional view in the EE direction;

[0035] Fig.17 for Figure 6 Cross-sectional view in the FF direction;

[0036] Fig.18 for Fig.17 The enlarged image of the dashed box in G;

[0037] Fig.19 A partial structural schematic diagram of a wafer inspection device according to a third embodiment of the present application;

[0038] Fig. 20 This is a schematic structural diagram of a chuck according to an embodiment of the present application.

[0039] Description of reference numerals:

[0040] 100-lifting mechanism, 110-mounting seat, 111-first convex strip, 112-first mounting plate, 113-second mounting plate, 120-adjusting assembly, 121-first adjusting member, 1211-first groove, 1212-second groove, 122-second adjusting member, 1221-second convex strip, 130-control assembly, 131-controller, 132-first control subassembly, 1321-first mounting member, 1322-first electrode, 1323-second electrode, 1324-first switch member, 1325-first elastic member, 1326-first Accommodating cavity, 1327-first penetration part, 1328-first switch part, 133-second control subassembly, 1331-second mounting member, 1332-third electrode, 1333-fourth electrode, 1334-second switch member, 1335-second elastic member, 1336-second accommodating cavity, 1337-second penetration part, 1338-second switch part, 140-driving assembly, 141-driving member, 142-guide member, 143-connecting member, 150-limiting assembly, 151-first limiting member, 152-second limiting member, 160-first track assembly Components, 161-first subassembly, 162-second subassembly, 163-first track component, 164-second track component, 165-first rolling component, 170-second track component, 171-third subassembly, 172-fourth subassembly, 173-third track component, 174-fourth track component, 175-second rolling component, 180-guide rail component, 181-guide rail component, 182-sliding component, 200-wafer detection device, 210-housing, 211-chamber, 212-through hole, 220-base, 221-locking hole, 230-chuck, 2 31-flow channel, 240-leveling assembly, 241-support member, 2411-first penetration hole, 242-adjusting block, 2421-second penetration hole, 243-locking member, 250-refrigerant tank, 260-pipeline assembly, 261-pipeline joint, 2611-first interface, 2612-second interface, 2613-third interface, 2614-fourth interface, 262-first pipeline member, 263-second pipeline member, 264-third pipeline member, 265-fourth pipeline member, 270-baffle assembly, 271-first baffle, 272-second baffle. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0042] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0043] Reference to "embodiment" or "implementation" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiment or implementation may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0044] In the wafer detection device, a mobile stage is provided to carry the wafer to be detected and adjust the position of the wafer to be detected in the horizontal direction and the height direction. When the size of the wafer to be detected is large, the greater the weight carried on the mobile stage, the more likely it is to affect the accuracy of the mobile stage in adjusting the position of the wafer to be detected in the height direction. Therefore, in order to adapt to samples to be detected of different sizes, it is necessary to improve the adjustment accuracy of the mobile stage in the height direction of the wafer to be detected.

[0045] See also Figure 1 and Figure 2 The present application provides a lifting mechanism 100, the lifting mechanism 100 includes: a mounting seat 110 and an adjustment assembly 120, the adjustment assembly 120 includes a first adjustment member 121 and a second adjustment member 122, the first adjustment member 121 is along a first direction (such as Figure 2 The second adjusting member 122 is slidably connected to the mounting base 110 along the second direction (as shown in the X direction). Figure 2 The first adjusting member 121 can be slidably connected to the first adjusting member 121, and the second adjusting member 122 can be slidably connected to the first adjusting member 121 along the third direction (as shown in the Y direction) ... Figure 2The second adjusting member 122 is slidably connected to the first adjusting member 121 (shown in the Z direction), and when the first adjusting member 121 moves along the first direction, the second adjusting member 122 moves along the second direction and the third direction relative to the first adjusting member 121, thereby adjusting the height of the second adjusting member 122 in the third direction, wherein the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, and the range of the angle α between the first direction and the second direction is: 15°≤α≤30°; the range of the angle β between the second direction and the third direction is: 60°≤β≤75°.

[0046] Specifically, the value of the angle α between the first direction and the second direction can be but is not limited to 15°, 16°, 18°, 20°, 21°, 22°, 23°, 24°, 25°, 26°, 27°, 28°, 29° and 30°, etc.

[0047] Specifically, the value of the angle β between the second direction and the third direction can be, but is not limited to, 60°, 62°, 63°, 65°, 67°, 69°, 70°, 71°, 72°, 73°, 74° and 75°.

[0048] It can be understood that the first direction, the third direction and the second direction intersect with each other respectively.

[0049] It can be understood that the third direction is the height direction.

[0050] In this embodiment, when the lifting mechanism 100 is applied to the wafer detection device 200, the side of the second adjusting member 122 away from the first adjusting member 121 is used to carry the chuck 230 and the sample to be detected, and the relative position of the first adjusting member 121 and the mounting seat 110 in the first direction is adjusted to achieve the height of the second adjusting member 122 in the third direction, thereby achieving the adjustment of the position of the chuck 230 and the sample to be detected in the height direction. Specifically, when the first adjusting member 121 slides relative to the mounting seat 110 along the first direction, the second adjusting member 122 and the first adjusting member 121 slide relative to each other in the second direction, thereby driving the second adjusting member 122 to move relative to the first adjusting member 121 and the mounting seat 110 along the third direction, so as to change the height of the second adjusting member 122 in the third direction.

[0051] When the angle α between the first direction and the second direction satisfies the range of 15°≤α≤30°, and the angle β between the second direction and the third direction satisfies the range of 60°≤β≤75, the angle between the first direction and the second direction is within a reasonable range, and the angle between the second direction and the third direction is within a reasonable range. On the one hand, when the first adjusting member 121 moves relative to the mounting seat 110, the resistance of the relative sliding of the first adjusting member 121 and the second adjusting member 122 along the second direction can be reduced and the resistance is within a reasonable range, so as to reduce the load of the driving member 141 and improve the performance of the lifting mechanism 100. On the other hand, it is convenient to regulate the relative sliding speed of the first adjusting member 121 and the second adjusting member 122, so as to avoid the second adjusting member 122 sliding directly toward the side close to the mounting seat 110 relative to the first adjusting member 121 due to the steep slope formed by the second direction and the horizontal plane, which is conducive to improving the accuracy of the height adjustment of the second adjusting member 122 by the lifting mechanism 100 in the third direction. When the weight of the component carried by the side of the second adjusting member 122 away from the mounting seat 110 is relatively large, by setting the angle between the first direction and the second direction, and the angle between the second direction and the third direction, the second adjusting member 122 will not slide directly toward the side close to the mounting seat 110 relative to the first adjusting member 121 due to the excessive weight of the component carried by the side of the second adjusting member 122 away from the mounting seat 110, and the lifting mechanism 100 still maintains a high adjustment accuracy for the height of the second adjusting member 122 in the third direction.

[0052] It can be understood that the angle α between the first direction and the second direction and the angle β between the second direction and the third direction satisfy the relationship: α+β≤90°. In other words, the angle between the first direction and the third direction is an acute angle or a right angle.

[0053] The angle between the first direction and the second direction, the angle between the second direction and the third direction, and the angle between the first direction and the third direction are all within a reasonable range, so as to reduce the resistance to relative sliding of the first adjusting member 121 and the second adjusting member 122 along the second direction while improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0054] Preferably, the angle α between the first direction and the second direction and the angle β between the second direction and the third direction satisfy the relationship: α+β=90°. In other words, the angle between the first direction and the third direction is a right angle.

[0055] The angle between the first direction and the second direction, the angle between the second direction and the third direction, and the angle between the first direction and the third direction are all within a preferred range, the resistance to relative sliding of the first adjusting member 121 and the second adjusting member 122 along the second direction is small, and the lifting mechanism 100 has a high accuracy in adjusting the height of the second adjusting member 122 in the third direction.

[0056] Optionally, the number of the first adjusting members 121 is two, and the two first adjusting members 121 are arranged along the fourth direction (eg Figure 2 The fourth direction (shown in the W direction) is spaced apart on opposite sides of the second adjusting member 122, wherein the fourth direction intersects the first direction, the second direction, and the third direction respectively. When the two first adjusting members 121 move relative to the mounting base 110 along the first direction, the second adjusting member 122 is driven to move relative to the first adjusting member 121 along the second direction and the third direction, so as to improve the stability of adjusting the height of the second adjusting member 122 in the third direction.

[0057] Optionally, the mounting seat 110 includes a first mounting plate 112 and a second mounting plate 113 that are bent and connected to each other, the first mounting plate 112 extends along a first direction and is used to set the first adjusting member 121, and the second mounting plate 113 extends along a third direction, when the second adjusting member 122 moves along the third direction relative to the first adjusting member 121, the second adjusting member 122 moves along the third direction relative to the second mounting plate 113.

[0058] It can be understood that, along the third direction, the first mounting plate 112 and the second adjusting member 122 are spaced apart from each other.

[0059] In this embodiment, the first mounting plate 112 is used to provide support for the first adjusting member 121 and the second adjusting member 122, and the second mounting plate 113 is used to provide guidance and support for the movement of the second adjusting member 122 in the third direction, so that when the first adjusting member 121 moves relative to the mounting base 110 along the first direction, the movement of the second adjusting member 122 in the third direction can be prevented from tilting and affecting the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0060] Optionally, the lifting mechanism 100 also includes a guide rail assembly 180, the guide rail assembly 180 includes a guide rail member 181 and a sliding member 182, the guide rail member 181 is arranged on the second mounting plate 113 and extends along the third direction, the sliding member 182 can be slidably connected to the guide rail member 181 along the third direction, and the sliding member 182 is also connected to the second adjusting member 122.

[0061] When the first adjusting member 121 moves along a first direction relative to the mounting seat 110, the second adjusting member 122 moves along a second direction relative to the first adjusting member 121, and the guide rail assembly 180 is used to guide the second adjusting member 122 to move along a third direction relative to the first adjusting member 121 to prevent the second adjusting member 122 from tilting during movement.

[0062] See also Figures 2 to 5 In some embodiments, the first adjustment member 121 has a first position and a second position relative to the mounting seat 110 along the first direction; the lifting mechanism 100 also includes a control component 130, the control component 130 includes a controller 131, a first control subassembly 132 and a second control subassembly 133, the first control subassembly 132 and the second control subassembly 133 are arranged on the mounting seat 110 at intervals along the first direction, the first control subassembly 132 is arranged close to the first position, and the second control subassembly 133 is arranged close to the second position, the controller 131 is electrically connected to the first control subassembly 132 and the second control subassembly 133 respectively, and the controller 131, the first control subassembly 132 and the second control subassembly 133 cooperate to control the first adjustment member 121 to move between the first position and the second position.

[0063] It can be understood that, along the first direction, the first position and the second position are arranged at intervals, and the first control sub-component and the second control sub-component 133 are arranged at intervals.

[0064] It can be understood that when the first adjusting member 121 moves from the first position to the second position, the second adjusting member 122 moves from the first extreme position to the second extreme position in the third direction, the first position corresponds to the first extreme position, and the second position corresponds to the second extreme position.

[0065] Understandably, in Figure 3 In the embodiment, the first adjusting member 121 is in the first position, and the second adjusting member 122 is in the first extreme position; Figure 4 In the embodiment, the first adjusting member 121 is in the second position, and the second adjusting member 122 is in the second extreme position.

[0066] In this embodiment, when the first adjusting member 121 moves to the first position relative to the mounting seat 110 along the first direction, the controller 131 cooperates with the first control subassembly 132 to control the first adjusting member 121 to stop moving, and prevent the first adjusting member 121 from continuing to move in the direction away from the second position toward the first position; when the first adjusting member 121 moves to the second position relative to the mounting seat 110 along the first direction, the controller 131 cooperates with the second control subassembly 133 to control the first adjusting member 121 to stop moving, and prevent the first adjusting member 121 from continuing to move in the direction away from the first position toward the second position. The controller 131, the first control subassembly 132, and the second control subassembly 133 cooperate to control the first adjusting member 121 to move between the first position and the second position, so that the second adjusting member 122 moves between the first extreme position and the second extreme position in the third direction, so as to improve the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0067] It can be understood that when the first adjusting member 121 moves from the first position to the second position relative to the mounting seat 110 along the first direction, the second adjusting member 122 moves relative to the first adjusting member 121 along the second direction toward the first mounting plate 112, thereby achieving the second adjusting member 122 moving in the third direction toward the first mounting plate 112 to reduce the height of the second adjusting member 122 in the third direction.

[0068] It can be understood that, along the third direction, the first adjusting member 121 and the second adjusting member 122 are arranged in sequence, and the second extreme position and the first extreme position are arranged in sequence.

[0069] In some embodiments, the lifting mechanism 100 also includes a driving component 140, and the driving component 140 includes a driving member 141. The driving member 141 is installed on the mounting base 110 and is electrically connected to the controller 131. The driving member 141 is used to drive the first adjusting member 121 to move along a first direction; when the first adjusting member 121 moves to the first position, the first control subassembly 132 generates a first signal, and the controller 131 receives the first signal of the first control subassembly 132 and controls the driving member 141 to be closed; when the first adjusting member 121 moves to the second position, the second control subassembly 133 generates a second signal, and the controller 131 receives the second signal of the second control subassembly 133 and controls the driving member 141 to be closed, and the controller 131, the first control subassembly 132 and the second control subassembly 133 cooperate to move the first adjusting member 121 between the first position and the second position.

[0070] Optionally, the driving member 141 is a driving motor.

[0071] In this embodiment, the driving member 141 provides power to drive the first adjusting member 121 to move in a first direction. When the first adjusting member 121 moves to the first position, the first control subassembly 132 generates a first signal for the first control subassembly 132, and the controller 131 receives the first signal of the first control subassembly 132 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, so as to prevent the first adjusting member 121 from continuing to move in the direction of the first position away from the second position. When the first adjusting member 121 moves to the second position, the second control subassembly 133 generates a second signal, and the controller 131 receives the second signal of the second control subassembly 133 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, so as to prevent the first adjusting member 121 from continuing to move in the direction of the second position away from the first position. The controller 131, the first control subassembly 132, the second control subassembly 133 and the driving member 141 cooperate to control the driving member 141 through the first signal or the second signal, so that the driving member 141 is closed and the first adjusting member 121 stops moving, thereby controlling the first adjusting member 121 to move between the first position and the second position, and finally making the second adjusting member 122 move between the first extreme position and the second extreme position in the third direction, so as to improve the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0072] In addition, when the angle α between the first direction and the second direction satisfies the range of 15°≤α≤30°, and the angle β between the second direction and the third direction satisfies the range of 60°≤β≤75, the angle between the first direction and the second direction is within a reasonable range, and the angle between the second direction and the third direction is within a reasonable range. When the driving member 141 is used to drive the first adjusting member 121 to move relative to the mounting seat 110, the resistance to the relative sliding of the first adjusting member 121 and the second adjusting member 122 along the second direction can be reduced and the resistance is within a reasonable range, so as to reduce the load of the driving member 141, and avoid the driving member 141 driving the first adjusting member 121 to move too fast, thereby reducing the accuracy of adjusting the position of the second adjusting member 122 in the third direction, thereby improving the performance of the lifting mechanism 100.

[0073] See also Figures 6 to 8In some embodiments, the first control subassembly 132 includes a first mounting member 1321, a first electrode 1322, a second electrode 1323 and a first switch 1324, wherein the first mounting member 1321 is mounted on the mounting seat 110, the first electrode 1322 is disposed on the first mounting member 1321, the second electrode 1323 abuts against the first electrode 1322, the second electrode 1323 is also connected to the first switch 1324, and the second electrode 1323 and the first switch 1324 can be relatively connected to the first mounting member 1321 along the first The first electrode 1322 and the second electrode 1323 are both electrically connected to the controller 131. When the first adjusting member 121 moves to the first position, the first electrode 1322 and the second electrode 1323 are disconnected and a first signal is formed. The controller 131 receives the first signal and controls the driving member 141 to close. When the first adjusting member 121 leaves the first position in a direction close to the second position, the controller 131 controls the driving member 141 to open, and the first electrode 1322 abuts against the second electrode 1323.

[0074] It can be understood that when the first adjusting member 121 is located between the first position and the second position, the second electrode 1323 abuts against the first electrode 1322 , and the first electrode 1322 and the second electrode 1323 are electrically connected.

[0075] Optionally, when the first electrode 1322 and the second electrode 1323 are abutted and electrically connected, in some embodiments, the first electrode 1322 is a positive electrode and the second electrode 1323 is a negative electrode; in other embodiments, the first electrode 1322 is a negative electrode and the second electrode 1323 is a positive electrode.

[0076] It can be understood that the first signal is a signal indicating that the first electrode 1322 and the second electrode 1323 are electrically disconnected.

[0077] In this embodiment, when the first adjusting member 121 is located between the first position and the second position, the second electrode 1323 abuts against the first electrode 1322, and the first electrode 1322 and the second electrode 1323 are electrically connected. At this time, the driving member 141 drives the first adjusting member 121 to move in the first direction toward the direction close to the first position. When the first adjusting member 121 moves to the first position, the first adjusting member 121 abuts against the first switch member 1324 and drives the second electrode 1323 and the first switch member 1324 to move relative to the first mounting member 1321 in the first direction toward the direction away from the first electrode 1322, so that the second electrode 1323 is spaced from the first electrode 1322, the first electrode 1322 and the second electrode 1323 are electrically disconnected and form a first signal, and the controller 131 receives the first signal of the first control subassembly 132 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, so as to prevent the first adjusting member 121 from continuing to move in the direction away from the second position toward the first position. When the first adjusting member 121 leaves the first position toward the direction close to the second position, the controller 131 controls the driving member 141 to open, so as to drive the first adjusting member 121 to slide relative to the mounting seat 110 along the first direction, the first adjusting member 121 is separated from the first switch member 1324, and the first switch member 1324 drives the second electrode 1323 to move relative to the first mounting member 1321 along the first direction toward the direction close to the first electrode 1322, so that the second electrode 1323 abuts against the first electrode 1322 and restores electrical connection. The controller 131, the first control subassembly 132 and the driving member 141 cooperate to limit one of the extreme positions of the first adjusting member 121 moving along the first direction on the mounting seat 110, thereby limiting the first extreme position of the second adjusting member 122 in the third direction, which is conducive to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0078] See also Figure 6 , Figure 7 and Fig. 9In some embodiments, the second control subassembly 133 includes a second mounting member 1331, a third electrode 1332, a fourth electrode 1333 and a second switch member 1334, wherein the second mounting member 1331 is mounted on the mounting seat 110, the third electrode 1332 is disposed on the second mounting member 1331, the fourth electrode 1333 abuts against the third electrode 1332, the fourth electrode 1333 is also connected to the second switch member 1334, and the fourth electrode 1333 and the second switch member 1334 can be relative to the second mounting member 1331 along the first The third electrode 1332 and the fourth electrode 1333 are both electrically connected to the controller 131. When the first adjusting member 121 moves to the second position, the third electrode 1332 and the fourth electrode 1333 are disconnected and a second signal is formed. The controller 131 receives the second signal and controls the driving member 141 to close. When the first adjusting member 121 leaves the second position in a direction close to the second position, the controller 131 controls the driving member 141 to open, and the third electrode 1332 abuts against the fourth electrode 1333.

[0079] It can be understood that when the first adjusting member 121 is located between the first position and the second position, the fourth electrode 1333 abuts against the third electrode 1332 , and the third electrode 1332 and the fourth electrode 1333 are electrically connected.

[0080] Optionally, when the third electrode 1332 abuts against and is electrically connected to the fourth electrode 1333, in some embodiments, the third electrode 1332 is a positive electrode and the fourth electrode 1333 is a negative electrode; in other embodiments, the third electrode 1332 is a negative electrode and the fourth electrode 1333 is a positive electrode.

[0081] It can be understood that the second signal is a signal indicating that the third electrode 1332 and the fourth electrode 1333 are electrically disconnected.

[0082] In this embodiment, when the first adjusting member 121 is located between the first position and the second position, the fourth electrode 1333 abuts against the third electrode 1332, and the third electrode 1332 and the fourth electrode 1333 are electrically connected. At this time, the driving member 141 drives the first adjusting member 121 to move along the first direction toward the direction close to the second position. When the first adjusting member 121 moves to the second position, the first adjusting member 121 abuts against the second switch member 1334 and drives the fourth electrode 1333 and the second switch member 1334 to move relative to the first mounting member 1321 along the first direction toward the direction away from the third electrode 1332, so that the fourth electrode 1333 is spaced from the third electrode 1332, the third electrode 1332 and the fourth electrode 1333 are electrically disconnected and form a second signal, and the controller 131 receives the second signal of the second control subassembly 133 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, so as to prevent the first adjusting member 121 from continuing to move toward the second position away from the first position. When the first adjusting member 121 leaves the second position in a direction close to the first position, the controller 131 controls the driving member 141 to open, so as to drive the first adjusting member 121 to slide in the first direction relative to the mounting seat 110 in a direction close to the first position, the first adjusting member 121 is separated from the second switch member 1334, and the second switch member 1334 drives the fourth electrode 1333 to move in the first direction relative to the first mounting member 1321 in a direction close to the third electrode 1332, so that the fourth electrode 1333 abuts against the third electrode 1332 and restores electrical connection. The controller 131, the second control subassembly 133 and the driving member 141 cooperate to limit the other extreme position of the first adjusting member 121 moving in the first direction of the mounting seat 110, thereby limiting the second extreme position of the second adjusting member 122 in the third direction, which is conducive to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0083] In some embodiments, the driving assembly 140 also includes a guide member 142 and a connecting member 143, the power output shaft of the driving member 141 is connected to the guide member 142, the guide member 142 extends along a first direction, the connecting block is sleeved on the outer periphery of the guide member 142 and is threadedly connected to the guide member 142, the connecting block is connected to the first adjusting member 121, and the connecting block is located between the first position and the second position; when the driving member 141 is turned on, the guide member 142 is driven to rotate, thereby driving the connecting block and the first adjusting member 121 to move relative to the mounting seat 110 along the first direction, thereby realizing the adjustment of the height of the second adjusting member 122 in the third direction.

[0084] It can be understood that, along the fourth direction, two opposite ends of the connecting block are respectively connected to two of the first adjusting members 121 .

[0085] It can be understood that when the first adjusting member 121 moves to the first position, the connecting member 143 abuts against the first switch member 1324 of the first control subassembly 132 ; when the first adjusting member 121 moves to the second position, the connecting member 143 abuts against the second switch member 1334 of the second control subassembly 133 .

[0086] In this embodiment, when the driving member 141 is turned on, the power output shaft of the driving member 141 rotates and drives the guide member 142 to rotate, so that the connecting block moves in the first direction relative to the guide member 142, thereby driving the first adjusting member 121 to move in the first direction. When the driving member 141 is turned off, the power output shaft of the driving member 141 and the guide member 142 stop rotating, and the connecting block stops sliding relative to the guide member 142, so that the first adjusting member 121 stops moving in the first direction, which is conducive to adjusting the second adjusting member 122 to a specific height.

[0087] It can be understood that when the first adjusting member 121 is in the first position, the controller 131 receives the first signal of the first control subassembly 132 and closes the driving member 141 to prevent the first adjusting member 121 from continuing to move in the direction of the first position away from the second position; when the first adjusting member 121 is in the second position, the controller 131 receives the second signal of the second control subassembly 133 and closes the driving member 141 to prevent the first adjusting member 121 from continuing to move in the direction of the second position away from the first position; when the first adjusting member 121 is between the first position and the second position, the controller 131 can also control the driving member 141 to close the driving member 141 and make the first adjusting member 121 stay between the first position and the second position, and adjust the second adjusting member 122 to a specific height. In this embodiment, it should not be understood that the first adjusting member 121 can only stay in the first position or the second position.

[0088] It can be understood that by changing the rotation direction of the power output shaft of the driving member 141, the moving direction of the connecting block and the first adjusting member 121 on the mounting seat 110 can be changed, so as to change the moving direction of the second adjusting member 122 in the third direction.

[0089] Optionally, in some embodiments, when the power output shaft of the driving member 141 rotates clockwise, the connecting block and the first adjusting member 121 move from the first position to the second position, and the second adjusting member 122 moves from the first extreme position to the second extreme position; when the power output shaft of the driving member 141 rotates counterclockwise, the connecting block and the first adjusting member 121 move from the second position to the first position, and the second adjusting member 122 moves from the second extreme position to the first extreme position.

[0090] In other embodiments, when the power output shaft of the driving member 141 rotates counterclockwise, the connecting block and the first adjusting member 121 move from the first position to the second position, and the second adjusting member 122 moves from the first extreme position to the second extreme position; when the power output shaft of the driving member 141 rotates clockwise, the connecting block and the first adjusting member 121 move from the second position to the first position, and the second adjusting member 122 moves from the second extreme position to the first extreme position.

[0091] In some embodiments, the first control subassembly 132 further includes a first elastic member 1325, the first mounting member 1321 has a first accommodating cavity 1326, and the first accommodating cavity 1326 extends along a first direction; the first electrode 1322 is disposed in the first accommodating cavity 1326, the first switch member 1324 is sequentially penetrated through the first elastic member 1325, the first electrode 1322 and the second electrode 1323, and one end of the first switch member 1324 away from the second electrode 1323 protrudes from the first accommodating cavity 1326; when the first adjusting member 121 moves to the first position, the connecting block abuts against the first switch member 1324 to compress the first elastic member 1325 and drive the first switch member 132 4 and the second electrode 1323 moves relative to the first accommodating cavity 1326 along the first direction toward the direction away from the second position, the first electrode 1322 and the second electrode 1323 are disconnected and a first signal is formed, the controller 131 receives the first signal and controls the driving member 141 to be closed; when the first adjusting member 121 leaves the first position toward the direction close to the second position, the controller 131 controls the driving member 141 to be opened, the first elastic member 1325 elastically recovers and pushes the first switch member 1324 and the second electrode 1323 to move relative to the first accommodating cavity 1326 along the first direction toward the direction close to the second position, and the first electrode 1322 and the second electrode 1323 are in contact with each other.

[0092] In this embodiment, when the first adjusting member 121 moves to the first position, the connecting block abuts against the first switch member 1324 to push the second electrode 1323 and the first switch member 1324 to move in the first accommodating cavity 1326 along the first direction toward the direction away from the first electrode 1322, so that the second electrode 1323 is spaced apart from the first electrode 1322, and at the same time compresses the first elastic member 1325, the first electrode 1322 and the second electrode 1323 are electrically disconnected and a first signal is formed, the controller 131 receives the first signal of the first control subassembly 132 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving to prevent the first adjusting member 121 from continuing to move toward the first position away from the second position. When the first adjusting member 121 leaves the first position toward the direction close to the second position, the controller 131 controls the driving member 141 to open, so as to drive the first adjusting member 121 to slide relative to the mounting seat 110 along the first direction, the first adjusting member 121 is separated from the first switch member 1324, the first elastic member 1325 is elastically restored, and pushes the first switch member 1324 to drive the second electrode 1323 to move in the first accommodating cavity 1326 along the first direction toward the direction close to the first electrode 1322, so that the second electrode 1323 abuts against the first electrode 1322 and restores electrical connection. The controller 131, the first control subassembly 132 and the driving member 141 cooperate to limit one of the extreme positions of the first adjusting member 121 moving along the first direction on the mounting seat 110, thereby limiting the first extreme position of the second adjusting member 122 in the third direction, which is conducive to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction. The first elastic member 1325 is conducive to quickly restoring the electrical connection between the first electrode 1322 and the second electrode 1323, so as to improve the accuracy of controlling the movement position of the first adjusting member 121 in the first direction and the movement position of the second adjusting member 122 in the third direction.

[0093] It can be understood that in some embodiments, when the first adjusting member 121 is in the first position, the first elastic member 1325 is in a compressed state; when the first adjusting member 121 is between the first position and the second position, the first elastic member 1325 is in an original length state. In other embodiments, when the first adjusting member 121 is in the first position, the first elastic member 1325 is in a compressed state and the first elastic member 1325 has a first compression amount; when the first adjusting member 121 is between the first position and the second position, the first elastic member 1325 is in a compressed state and the first elastic member 1325 has a second compression amount, and the first compression amount is greater than the second compression amount.

[0094] It can be understood that the first switch component 1324 has a first penetration portion 1327 and a first switch portion 1328 that are connected. The radial dimension of the first switch portion 1328 is larger than the radial dimension of the first penetration portion 1327. The first penetration portion 1327 is sequentially penetrated through the first elastic component 1325, the first electrode 1322 and the second electrode 1323. The first switch portion 1328 at least partially protrudes from the first accommodating cavity 1326. The first elastic component 1325 is sleeved on the outer periphery of the first penetration portion 1327 and the opposite ends of the first elastic component 1325 respectively abut the first electrode 1322 and the first switch portion 1328.

[0095] In some embodiments, the second control subassembly 133 further includes a second elastic member 1335, the second mounting member 1331 has a second accommodating cavity 1336, and the second accommodating cavity 1336 extends along the first direction; the third electrode 1332 is disposed in the second accommodating cavity 1336, and the second switch member 1334 is sequentially penetrated through the second elastic member 1335, the third electrode 1332 and the fourth electrode 1333, and one end of the second switch member 1334 away from the fourth electrode 1333 protrudes from the second accommodating cavity 1336; when the first adjusting member 121 moves to the second position, the connecting block abuts against the second switch member 1334 to compress the second elastic member 1335 and drive the second switch member 133 4 and the fourth electrode 1333 moves relative to the second accommodating cavity 1336 along the first direction toward the direction away from the first position, the third electrode 1332 is disconnected from the fourth electrode 1333 and forms a second signal, the controller 131 receives the second signal and controls the driving member 141 to be closed; when the first adjusting member 121 leaves the second position toward the direction close to the first position, the controller 131 controls the driving member 141 to be opened, the second elastic member 1335 elastically recovers and pushes the second switch member 1334 and the fourth electrode 1333 to move relative to the second accommodating cavity 1336 along the first direction toward the direction close to the first position, and the third electrode 1332 abuts against the fourth electrode 1333.

[0096] In this embodiment, when the first adjusting member 121 moves to the second position, the connecting block abuts against the second switch member 1334 to push the fourth electrode 1333 and the second switch member 1334 to move in the second accommodating cavity 1336 along the first direction toward the direction away from the third electrode 1332, so that the fourth electrode 1333 is spaced apart from the third electrode 1332, and at the same time compresses the second elastic member 1335, the third electrode 1332 and the fourth electrode 1333 are electrically disconnected and a second signal is formed, the controller 131 receives the second signal of the second control subassembly 133 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving to prevent the first adjusting member 121 from continuing to move toward the second position away from the first position. When the first adjusting member 121 leaves the second position in the direction close to the first position, the controller 131 controls the driving member 141 to open, so as to drive the first adjusting member 121 to slide relative to the mounting seat 110 in the first direction in the direction close to the first position, the first adjusting member 121 is separated from the second switch member 1334, the second elastic member 1335 is elastically restored, and pushes the second switch member 1334 to drive the fourth electrode 1333 to move in the second accommodating cavity 1336 in the first direction in the direction close to the third electrode 1332, so that the fourth electrode 1333 abuts against the third electrode 1332 and restores electrical connection. The controller 131, the second control subassembly 133 and the driving member 141 cooperate to limit the other extreme position of the first adjusting member 121 moving in the first direction of the mounting seat 110, thereby limiting the second extreme position of the second adjusting member 122 in the third direction, which is conducive to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction. The second elastic member 1335 is conducive to quickly restoring the electrical connection between the third electrode 1332 and the fourth electrode 1333, so as to improve the accuracy of controlling the movement position of the first adjusting member 121 in the first direction and the movement position of the second adjusting member 122 in the third direction.

[0097] It can be understood that in some embodiments, when the first adjusting member 121 is in the first position, the second elastic member 1335 is in a compressed state; when the first adjusting member 121 is between the first position and the second position, the second elastic member 1335 is in an original length state. In other embodiments, when the first adjusting member 121 is in the first position, the second elastic member 1335 is in a compressed state and the second elastic member 1335 has a first compression amount; when the first adjusting member 121 is between the first position and the second position, the second elastic member 1335 is in a compressed state and the second elastic member 1335 has a second compression amount, and the first compression amount is greater than the second compression amount.

[0098] It can be understood that the second switch component 1334 has a connected second penetration portion 1337 and a second switch portion 1338, the radial dimension of the second switch portion 1338 is larger than the radial dimension of the second penetration portion 1337, the second penetration portion 1337 is sequentially penetrated through the second elastic component 1335, the third electrode 1332 and the fourth electrode 1333, the second switch portion 1338 at least partially protrudes from the second accommodating cavity 1336, the second elastic component 1335 is sleeved on the outer periphery of the second penetration portion 1337 and the opposite ends of the second elastic component 1335 respectively abut the third electrode 1332 and the second switch portion 1338.

[0099] In some embodiments, the lifting mechanism 100 also includes a limit assembly 150, and the limit assembly 150 includes a first limit member 151 and a second limit member 152. The first limit member 151 and the second limit member 152 are arranged on the mounting seat 110, and the first limit member 151 and the second limit member 152 are arranged at intervals along the first direction on opposite sides of the connecting block to limit the movement of the connecting block in the first direction.

[0100] It can be understood that the first limiting member 151 is disposed close to the first position, and the second limiting member 152 is disposed close to the second position.

[0101] It can be understood that the first limiting member 151 and the second limiting member 152 are disposed on the surface of the first mounting plate 112 facing the second adjusting member 122 .

[0102] In this embodiment, when the first adjusting member 121 moves relative to the mounting seat 110 along the first direction, the first limiting member 151 is used to limit the connection block and the first adjusting member 121 to the first position, so as to prevent the connection block and the first adjusting member 121 from continuing to move in the direction of the first position away from the second position; the second limiting member 152 is used to limit the connection block and the first adjusting member 121 to the second position, so as to prevent the connection block and the first adjusting member 121 from continuing to move in the direction of the second position away from the first position. The first limiting member 151 and the second limiting member 152 cooperate to provide a hard limit for the movement of the connection block in the first direction, thereby limiting the movement trajectory of the first adjusting member 121 between the first position and the second position.

[0103] See also Figure 2 In some embodiments, the lifting mechanism 100 includes a first track assembly 160 and a second track assembly 170, the first track assembly 160 is arranged between the first adjusting member 121 and the mounting seat 110, and the first track assembly 160 extends along a first direction to enable the first adjusting member 121 to move relative to the mounting seat 110 along the first direction; the second track assembly 170 is arranged between the first adjusting member 121 and the second adjusting member 122, and the second track assembly 170 extends along a second direction to enable the first adjusting member 121 to move relative to the second adjusting member 122 along the second direction.

[0104] In this embodiment, the first track component 160 is disposed between the first adjusting member 121 and the mounting seat 110. When the driving member 141 drives the first adjusting member 121 to move relative to the mounting seat 110, the first track component 160 guides the first track component 163 to move relative to the mounting seat 110 along the first direction. The second track component 170 is disposed between the first adjusting member 121 and the second adjusting member 170. When the first adjusting member 121 moves relative to the mounting seat 110 along the first direction, the first adjusting member 121 also moves relative to the second adjusting member 122 along the first direction. The second track component 170 guides the second adjusting member 122 to move relative to the first adjusting member 121 along the two directions, and finally realizes the movement of the second adjusting member 122 in the third direction. In this embodiment, the first track assembly 160 and the second track assembly 170 guide the movement direction of the first adjusting member 121 and the second adjusting member 122, which is beneficial to improving the accuracy of the first adjusting member 121 moving on the mounting seat 110 and improving the accuracy of the second adjusting member 122 moving in the third direction.

[0105] See also Fig.10 and Fig.11 In some embodiments, the first track assembly 160 includes a first subassembly 161 and a second subassembly 162, the mounting seat 110 has a first convex strip 111 facing the first adjusting member 121, the first adjusting member 121 has a first groove 1211 facing the second adjusting member 122, the first convex strip 111 divides the first groove 1211 into a first setting space and a second setting space, the first setting space is used to set the first subassembly 161, the second setting space is used to set the second subassembly 162, the first subassembly 161 and the second subassembly 162 are arranged in a first and second arrangement space. The component 162 cooperates to guide the first adjusting member 121 to move relative to the mounting seat 110 along the first direction; the first sub-assembly 161 and the second sub-assembly 162 both include a first track member 163, a second track member 164 and a first rolling member 165, the first track member 163 is arranged on the first adjusting member 121, the second track member 164 is arranged on the mounting seat 110, and the first rolling member 165 is arranged between the first track member 163 and the second track member 164 and can be respectively rollingly connected to the first track member 163 and the second track member 164.

[0106] Optionally, the first subassembly 161 is a cross roller guide assembly 180 , and the second subassembly 162 is a cross roller guide assembly 180 .

[0107] In this embodiment, the first groove 1211 is used to set the first subassembly 161 and the second subassembly 162, and the first subassembly 161 is located in the first setting space, and the second subassembly 162 is located in the second setting space, and the first groove 1211 and the first ridge 111 cooperate so that the first track member 163 and the second track member 164 of the first subassembly 161 are tightly arranged on the opposite sides of the first rolling member 165, and the first track member 163 and the second track member 164 of the second subassembly 162 are tightly arranged on the opposite sides of the first rolling member 165, thereby facilitating further improving the accuracy of the first subassembly 161 and the second subassembly 162 in guiding the first adjustment member 121 to move relative to the mounting seat 110 along the first direction. In addition, the first rolling member 165 is arranged between the first track member 163 and the second track member 164, and the opposite sides of the first rolling member 165 can be respectively rollingly connected to the first track member 163 and the second track member 164, so that the first rolling member 165 and the first track member 163 are in line contact and the friction force of relative sliding between the first rolling member 165 and the first track member 163 is small, and the first rolling member 165 and the second track member 164 are in line contact and the friction force of relative sliding between the first rolling member 165 and the second track member 164 is small, which improves the accuracy of relative sliding of the first track member 163 and the second track member 164 along the first direction, and then helps to improve the accuracy of adjusting the height of the second adjustment member 122 in the third direction.

[0108] See also Fig.11 and Fig.12In some embodiments, the second track assembly 170 includes a third subassembly 171 and a fourth subassembly 172, the second adjusting member 122 has a second convex strip 1221 facing the first adjusting member 121, the first adjusting member 121 has a second groove 1212 facing the second adjusting member 122, the second convex strip 1221 divides the second groove 1212 into a third setting space and a fourth setting space, the third setting space is used to set the third subassembly 171, the fourth setting space is used to set the fourth subassembly 172, the third subassembly 171 and the fourth subassembly The third subassembly 171 and the fourth subassembly 172 cooperate to guide the first adjusting member 121 to move relative to the second adjusting member 122 along the second direction; the third subassembly 171 and the fourth subassembly 172 both include a third track member 173, a fourth track member 174 and a second rolling member 175, the third track member 173 is arranged on the first adjusting member 121, the fourth track member 174 is arranged on the second adjusting member 122, and the second rolling member 175 is arranged between the third track member 173 and the fourth track member 174 and can be respectively rollingly connected to the third track member 173 and the fourth track member 174.

[0109] Optionally, the third subassembly 171 is a cross roller guide assembly 180 , and the fourth subassembly 172 is a cross roller guide assembly 180 .

[0110] In this embodiment, the second groove 1212 is used to set the third subassembly 171 and the fourth subassembly 172, and the third subassembly 171 is located in the third setting space, and the fourth subassembly 172 is located in the fourth setting space. The second groove 1212 and the second ridge 1221 cooperate so that the third track member 173 and the fourth track member 174 of the third subassembly 171 are tightly arranged on the opposite sides of the second rolling member 175, and the third track member 173 and the fourth track member 174 of the fourth subassembly 172 are tightly arranged on the opposite sides of the second rolling member 175, thereby facilitating further improving the accuracy of the third subassembly 171 and the fourth subassembly 172 in guiding the first adjusting member 121 to move relative to the second adjusting member 122 along the second direction. In other words, it is facilitating guiding the second adjusting member 122 to move relative to the first adjusting member 121 along the second direction. In addition, the second rolling member 175 is arranged between the third track member 173 and the fourth track member 174, and the opposite sides of the second rolling member 175 can be respectively rollingly connected to the third track member 173 and the fourth track member 174, so that the second rolling member 175 and the third track member 173 are in line contact and the friction force of relative sliding between the second rolling member 175 and the third track member 173 is small, and the second rolling member 175 and the fourth track member 174 are in line contact and the friction force of relative sliding between the second rolling member 175 and the fourth track member 174 is small, which improves the accuracy of relative sliding of the third track member 173 and the fourth track member 174 along the second direction, and then helps to improve the accuracy of adjusting the height of the second adjustment member 122 in the third direction.

[0111] See also Figures 13 to 16 The present application also provides a wafer detection device 200, which includes: a shell 210, a base 220, a lifting mechanism 100 provided in the present application and a chuck 230, wherein the shell 210 has a chamber 211; the base 220 is arranged in the chamber 211; the lifting mechanism 100 is installed on one side of the base 220; the chuck 230 is used to carry a sample to be detected, and the chuck 230 is arranged on a side of the second adjustment member 122 away from the mounting seat 110. When the second adjustment member 122 moves along the third direction, the chuck 230 and the sample to be detected are driven to move along the third direction.

[0112] Optionally, the wafer inspection device 200 is a vacuum probe station.

[0113] It can be understood that along the third direction, the base 220 , the lifting mechanism 100 and the chuck 230 are arranged in sequence.

[0114] In this embodiment, the base 220, the lifting mechanism 100 and the chuck 230 are located in the chamber 211. When the first adjustment member 121 in the lifting mechanism 100 moves relative to the mounting seat 110 along the first direction, the second adjustment member 122 is driven to move relative to the first adjustment member 121 along the second direction and the third direction, so as to adjust the position of the second adjustment member 122 in the third direction, thereby adjusting the position of the chuck 230 and the sample to be detected carried on the second adjustment member 122 in the third direction. In this embodiment, the lifting mechanism 100 still maintains a high adjustment accuracy for the height of the second adjustment member 122 in the third direction, thereby still maintaining a high adjustment accuracy for the height of the chuck 230 and the sample to be detected in the third direction, so as to improve the detection performance of the wafer detection device 200.

[0115] Optionally, in some embodiments, the chamber 211 is in a vacuum state, so as to detect the performance of the sample to be detected in a vacuum state.

[0116] Optionally, the sample to be tested is a wafer, and the wafer testing device 200 is used to perform radio frequency testing and reliability testing on the wafer.

[0117] Optionally, the size of the sample to be tested may be, but is not limited to, 6 inches, 8 inches, or 12 inches.

[0118] Optionally, the material of the sample to be detected may be, but is not limited to, silicon (Si), gallium nitride (GaN), silicon carbide (SiC), etc.

[0119] Optionally, the wafer inspection device 200 also includes a negative pressure device (not shown) and a baffle assembly 270. The bottom of the shell 210 has a through hole 212, and the through hole 212 connects the chamber 211 and the negative pressure device. The baffle assembly 270 includes a first baffle 271 and a second baffle 272. The first baffle 271 and the second baffle 272 are arranged at intervals along a third direction and are respectively connected to the side walls of the through hole 212. The orthographic projection of the first baffle 271 on the shell 210 partially overlaps with the orthographic projection of the second baffle 272 on the shell 210.

[0120] When the negative pressure device is connected to the chamber 211 through the through hole 212, the negative pressure device can evacuate the chamber 211 to make the chamber 211 in a vacuum state. During this process, the first baffle 271 and the second baffle 272 can prevent small parts in the chamber 211 from being sucked out of the through hole 212 and transported to the negative pressure device, thereby avoiding damage to the negative pressure device and extending the service life of the negative pressure device.

[0121] Optionally, the wafer inspection device 200 also includes multiple probe assemblies (not shown), and the probe assemblies include a connected probe seat, a probe arm and a probe, the probe seat is arranged outside the chamber 211, and part of the probe arm and the probe extend into the chamber 211 to contact with the sample to be inspected and inspect the sample to be inspected.

[0122] See also Fig.17 and Fig.18 In some embodiments, the wafer inspection device 200 further includes a plurality of leveling components 240, which are arranged around the periphery of the mounting seat 110, and the plurality of leveling components 240 cooperate to adjust the relative position of the mounting seat 110 and the base 220; the leveling components 240 include: a support member 241, an adjustment pressure block 242 and a locking member 243, the support member 241 is penetrated by the mounting seat 110 and is threadedly connected to the mounting seat 110, the support member 241 is threadedly connected to the mounting seat 110, and the support member 241 is threadedly connected to the mounting seat 110. One end of the support member 241 abuts against the base 220, and the support member 241 has a first penetration hole 2411. The adjustment pressure block 242 is arranged on the surface of the mounting seat 110 away from the base 220 and has a second penetration hole 2421. The base 220 has a locking hole 221, and the locking member 243 is sequentially penetrated through the second penetration hole 2421, the first penetration hole 2411 and the locking hole 221 to fix the relative position of the mounting seat 110 and the base 220.

[0123] In the terminology of the present application, "plurality" means greater than or equal to two, and may be but is not limited to two, three, four, five or six, etc.

[0124] Optionally, the first penetration hole 2411 is a through hole, and the locking hole 221 is a threaded hole.

[0125] In this embodiment, a plurality of leveling components 240 are arranged around the outer circumference of the mounting seat 110 to adjust the relative position of the mounting seat 110 and the base 220, so that the mounting seat 110 is in a horizontal state, and the first adjustment member 121 and the second adjustment member 122 supported by the mounting seat 110 are prevented from tilting, which is conducive to improving the accuracy of adjusting the position of the second adjustment member 122, the chuck 230 and the sample to be tested in the third direction. Specifically, one end of the support member 241 abuts against the base 220, and the support member 241 is penetrated through the mounting seat 110 and is threadedly connected to the mounting seat 110, then the support member 241 can rotate relative to the mounting seat 110 to adjust the relative position of the support member 241 and the mounting seat 110, thereby adjusting the relative position of the mounting seat 110 and the base 220, which is conducive to adjusting the mounting seat 110 to be in a horizontal state. Furthermore, the locking member 243 is sequentially penetrated in the second penetration hole 2421, the first penetration hole 2411 and the locking hole 221, and the locking member 243 fixes the relative positions of the adjusting block 242, the supporting member 241 and the base 220, thereby preventing the supporting member 241 from continuing to rotate relative to the mounting seat 110 and causing the mounting seat 110 to deviate from the horizontal state, which is beneficial to fix the relative position of the mounting seat 110 and the base 220, improves the stability of the chuck 230 and the sample to be tested being arranged on the side of the second adjusting member 122 away from the first adjusting member 121, and then improves the accuracy of the lifting mechanism 100 in adjusting the height of the second adjusting member 122 in the third direction.

[0126] See also Fig.19 and Fig. 20In some embodiments, the chuck 230 has a flow channel 231 for circulating refrigerant; the wafer inspection device 200 also includes a refrigerant tank 250 and a pipeline assembly 260, the refrigerant tank 250 is used to store refrigerant and transport the refrigerant to the chuck 230 through the pipeline assembly 260; the pipeline assembly 260 includes a pipeline joint 261, a first pipeline member 262, a second pipeline member 263, a third pipeline member 264 and a fourth pipeline member 265, the pipeline joint 261 is arranged on the shell 210 and located in the chamber 211, the pipeline joint 261 has a first interface 2611, a second interface 2612, a third interface 2613 and a fourth interface 2614, wherein the first interface 2611 is connected to the second interface 2612, The third interface 2613 and the fourth interface 2614 are connected; the first pipe member 262 passes through the bottom wall of the chamber 211 and one end of the first pipe member 262 is connected to the refrigerant, the other end of the first pipe member 262 is connected to the first interface 2611, the second pipe member 263 is an annular structure and the opposite ends of the second pipe member 263 are respectively connected to the second interface 2612 and the flow channel 231; the third pipe member 264 is an annular structure and the opposite ends of the third pipe member 264 are respectively connected to the flow channel 231 and the third interface 2613, one end of the fourth pipe member 265 is connected to the fourth interface 2614, and the other end of the fourth pipe member 265 passes through the bottom wall of the chamber 211 and is connected to the outside.

[0127] Optionally, the refrigerant may be, but is not limited to, liquid nitrogen, air, etc.

[0128] It can be understood that the refrigerant tank 250, the first pipe member 262, the first interface 2611, the second interface 2612, the second pipe member 263, the flow channel 231, the third pipe member 264, the third interface 2613, the fourth interface 2614, the fourth pipe member 265 and the outside constitute the flow path of the refrigerant.

[0129] It can be understood that the other end of the fourth pipe member 265 is connected to the outside, and the fourth pipe member 265 can be directly connected to the external air and can also be connected to an external processing device to process the residual refrigerant.

[0130] Optionally, the second pipe member 263 and the third pipe member 264 are steel strip members.

[0131] It is understandable that this application Fig.19 The embodiment is merely an illustration of the connection relationship between the pipeline assembly 260 , the refrigerant tank 250 and the chuck 230 , and should not be construed as limiting the shape of the pipeline assembly 260 .

[0132] In this embodiment, when the refrigerant in the refrigerant tank 250 is transported to the chuck 230 through the pipe assembly 260, the refrigerant is used to cool the chuck 230 and reduce the temperature of the chuck 230, thereby reducing the temperature of the sample to be tested carried by the chuck 230, so that the sample to be tested reaches a low temperature environment, which is convenient for the wafer inspection device 200 to perform performance testing on the sample to be tested in a low temperature environment. When the refrigerant enters the chamber 211 from the refrigerant tank 250, the first pipe member 262 is connected to the pipe joint 261, and the pipe joint 261 and the chuck 230 are connected through the second pipe member 263 of the annular structure. After the refrigerant flows through the chuck 230, the remaining refrigerant flows out of the chuck 230 and is connected to the pipe joint 261 through the third pipe member 264 of the annular structure, and finally flows to the outside of the chamber 211 through the fourth pipe member 265. In this embodiment, on the one hand, the connection method of the pipe assembly 260 is simple and easy to install; on the other hand, the second pipe member 263 and the fourth pipe member 265 are both annular structures and are arranged around the outer periphery of the chuck 230, so that the second pipe member 263 and the fourth pipe member 265 have a certain activity space. When the lifting mechanism 100 drives the second adjusting member 122 and the chuck 230 to move relative to the mounting seat 110 along the third direction, it will drive the end of the second pipe member 263 connected to the chuck 230 and the end of the third pipe member 264 connected to the chuck 230 to move in the third direction, which can prevent the second pipe member 263 and the third pipe member 264 from being damaged by directly pulling them, and can also prevent the second pipe member 263 and the third pipe member 264 from hindering the movement of the second adjusting member 122 and the chuck 230 in the third direction, thereby ensuring the accuracy of the lifting mechanism 100 in adjusting the height of the second adjusting member 122 in the third direction.

[0133] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0134] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the above preferred implementation modes, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A lifting mechanism, characterized in that: The lifting mechanism comprises: Mounting seat; and An adjustment component, wherein the adjustment component includes a first adjustment member and a second adjustment member, the first adjustment member is slidably connected to the mounting seat along a first direction, the second adjustment member is slidably connected to the first adjustment member along a second direction, and the second adjustment member is slidably connected to the first adjustment member along a third direction, when the first adjustment member moves along the first direction, the second adjustment member moves relative to the first adjustment member along the second direction and the third direction, thereby adjusting the height of the second adjustment member in the third direction, wherein the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, and the range of the angle α between the first direction and the second direction is: 15°≤α≤30°; the range of the angle β between the second direction and the third direction is: 60°≤β≤75°.

2. The lifting mechanism according to claim 1, characterized in that: The first adjusting member has a first position and a second position relative to the mounting seat along the first direction; the lifting mechanism also includes a control component, the control component includes a controller, a first control subassembly and a second control subassembly, the first control subassembly and the second control subassembly are arranged on the mounting seat at intervals along the first direction, the first control subassembly is arranged close to the first position, and the second control subassembly is arranged close to the second position, the controller is electrically connected to the first control subassembly and the second control subassembly respectively, and the controller, the first control subassembly and the second control subassembly cooperate to control the first adjusting member to move between the first position and the second position.

3. The lifting mechanism according to claim 2, characterized in that: The lifting mechanism also includes a driving assembly, which includes a driving member. The driving member is installed on a mounting seat and electrically connected to the controller, and the driving member is used to drive the first adjusting member to move along a first direction; when the first adjusting member moves to a first position, the first control subassembly generates a first signal, and the controller receives the first signal of the first control subassembly and controls the driving member to close; when the first adjusting member moves to a second position, the second control subassembly generates a second signal, and the controller receives the second signal of the second control subassembly and controls the driving member to close, and the controller, the first control subassembly and the second control subassembly cooperate to move the first adjusting member between the first position and the second position.

4. The lifting mechanism according to claim 3, characterized in that: The first control subassembly includes a first mounting member, a first electrode, a second electrode and a first switch member, the first mounting member is mounted on the mounting seat, the first electrode is arranged on the first mounting member, the second electrode abuts against the first electrode, the second electrode is also connected to the first switch member, and the second electrode and the first switch member can move relative to the first mounting member along a first direction, the first electrode and the second electrode are both electrically connected to the controller, when the first adjusting member moves to a first position, the first electrode is disconnected from the second electrode and a first signal is generated, the controller receives the first signal and controls the driving member to close; when the first adjusting member leaves the first position in a direction close to the second position, the controller controls the driving member to open, and the first electrode abuts against the second electrode; The second control subassembly includes a second mounting member, a third electrode, a fourth electrode and a second switch member. The second mounting member is mounted on the mounting seat, the third electrode is arranged on the second mounting member, the fourth electrode abuts the third electrode, the fourth electrode is also connected to the second switch member, and the fourth electrode and the second switch member can move along a first direction relative to the second mounting member. The third electrode and the fourth electrode are both electrically connected to the controller. When the first adjusting member moves to the second position, the third electrode is disconnected from the fourth electrode and a second signal is formed. The controller receives the second signal and controls the driving member to close. When the first adjusting member leaves the second position in a direction close to the second position, the controller controls the driving member to open, and the third electrode abuts against the fourth electrode.

5. The lifting mechanism according to claim 4, characterized in that: The driving assembly also includes a guide member and a connecting member, the power output shaft of the driving member is connected to the guide member, the guide member extends along a first direction, the connecting block is sleeved on the outer circumference of the guide member and is threadedly connected to the guide member, the connecting block is connected to the first adjusting member, and the connecting block is located between the first position and the second position; when the driving member is turned on, the guide member is driven to rotate, thereby driving the connecting block and the first adjusting member to move relative to the mounting seat along the first direction, thereby realizing the adjustment of the height of the second adjusting member in the third direction.

6. The lifting mechanism according to claim 5, characterized in that: The first control subassembly further includes a first elastic member, the first mounting member has a first accommodating cavity, and the first accommodating cavity extends along a first direction; the first electrode is arranged in the first accommodating cavity, the first switch member is sequentially penetrated through the first elastic member, the first electrode and the second electrode, and one end of the first switch member away from the second electrode protrudes from the first accommodating cavity; when the first adjusting member moves to the first position, the connecting block abuts against the first switch member to compress the first elastic member and drive the first switch member and the second electrode to move relative to the first accommodating cavity along the first direction toward the direction away from the second position, the first electrode is disconnected from the second electrode and a first signal is generated, the controller receives the first signal and controls the driving member to close; when the first adjusting member leaves the first position toward the direction close to the second position, the controller controls the driving member to open, the first elastic member elastically recovers and drives the first switch member and the second electrode to move relative to the first accommodating cavity along the first direction toward the direction close to the second position, and the first electrode abuts against the second electrode; The second control subassembly also includes a second elastic member, the second mounting member has a second accommodating cavity, and the second accommodating cavity extends along the first direction; the third electrode is arranged in the second accommodating cavity, the second switch member is sequentially penetrated through the second elastic member, the third electrode and the fourth electrode, and one end of the second switch member away from the fourth electrode protrudes from the second accommodating cavity; when the first adjusting member moves to the second position, the connecting block abuts against the second switch member to compress the second elastic member and drive the second switch member and the fourth electrode to move relative to the second accommodating cavity along the first direction toward the direction away from the first position, the third electrode is disconnected from the fourth electrode and a second signal is generated, the controller receives the second signal and controls the driving member to close; when the first adjusting member leaves the second position in a direction close to the first position, the controller controls the driving member to open, the second elastic member elastically recovers and pushes the second switch member and the fourth electrode to move relative to the second accommodating cavity along the first direction toward the direction close to the first position, and the third electrode abuts against the fourth electrode.

7. The lifting mechanism according to claim 5, characterized in that: The lifting mechanism also includes a limiting assembly, which includes a first limiting member and a second limiting member, which are arranged on the mounting seat, and the first limiting member and the second limiting member are arranged at intervals along the first direction on opposite sides of the connecting block to limit the movement of the connecting block in the first direction.

8. The lifting mechanism according to any one of claims 1 to 7, characterized in that: The lifting mechanism includes a first track assembly and a second track assembly, wherein the first track assembly is arranged between the first adjusting member and the mounting seat, and the first track assembly extends along a first direction to enable the first adjusting member to move relative to the mounting seat along the first direction; the second track assembly is arranged between the first adjusting member and the second adjusting member, and the second track assembly extends along a second direction to enable the first adjusting member to move relative to the second adjusting member along the second direction.

9. The lifting mechanism according to claim 8, characterized in that: The first track assembly includes a first subassembly and a second subassembly, the mounting seat has a first convex strip facing the first adjusting member, the first adjusting member has a first groove facing the second adjusting member, the first convex strip divides the first groove into a first setting space and a second setting space, the first setting space is used to set the first subassembly, the second setting space is used to set the second subassembly, the first subassembly and the second subassembly cooperate to guide the first adjusting member to move relative to the mounting seat along a first direction; The second track assembly includes a third subassembly and a fourth subassembly, the second adjusting member has a second convex strip facing the first adjusting member, the first adjusting member has a second groove facing the second adjusting member, the second convex strip divides the second groove into a third setting space and a fourth setting space, the third setting space is used to set the third subassembly, the fourth setting space is used to set the fourth subassembly, the third subassembly and the fourth subassembly cooperate to guide the first adjusting member to move relative to the second adjusting member along the second direction; The first subassembly and the second subassembly both include a first track member, a second track member and a first rolling member, the first track member is arranged on the first adjusting member, the second track member is arranged on the mounting seat, and the first rolling member is arranged between the first track member and the second track member and can be respectively connected to the first track member and the second track member by rolling; the third subassembly and the fourth subassembly both include a third track member, a fourth track member and a second rolling member, the third track member is arranged on the first adjusting member, the fourth track member is arranged on the second adjusting member, and the second rolling member is arranged between the third track member and the fourth track member and can respectively be connected to the third track member and the fourth track member by rolling.

10. A wafer inspection device, characterized in that: The wafer detection device comprises: a housing having a chamber; A base, the base being disposed in the chamber; The lifting mechanism according to any one of claims 1 to 9, wherein the lifting mechanism is installed on one side of the base; and A chuck is used to carry the sample to be tested. The chuck is arranged on a side of the second adjusting member away from the mounting seat. When the second adjusting member moves along the third direction, the chuck and the sample to be tested are driven to move along the third direction.

11. The wafer inspection device according to claim 10, characterized in that: The wafer detection device also includes a plurality of leveling components, which are arranged around the outer circumference of the mounting seat, and the plurality of leveling components cooperate to adjust the relative position of the mounting seat and the base; the leveling component includes: a support member, an adjusting pressure block and a locking member, the support member is penetrated through the mounting seat and threadedly connected to the mounting seat, one end of the support member abuts against the base, the support member has a first penetration hole, the adjusting pressure block is arranged on the surface of the mounting seat away from the base and has a second penetration hole, the base has a locking hole, and the locking member is penetrated through the second penetration hole, the first penetration hole and the locking hole in sequence to fix the relative position of the mounting seat and the base.

12. The wafer inspection device according to claim 10, characterized in that: The chuck has a flow channel for circulating a refrigerant; the wafer inspection device also includes a refrigerant tank and a pipeline assembly, the refrigerant tank is used to store the refrigerant and transport the refrigerant to the chuck through the pipeline assembly; The pipeline assembly includes a pipeline joint, a first pipeline member, a second pipeline member, a third pipeline member and a fourth pipeline member, the pipeline joint is arranged on the shell and located in the chamber, the pipeline joint has a first interface, a second interface, a third interface and a fourth interface, wherein the first interface is communicated with the second interface, and the third interface is communicated with the fourth interface; the first pipeline member passes through the bottom wall of the chamber and one end of the first pipeline member is connected to the refrigerant, and the other end of the first pipeline member is connected to the first interface, the second pipeline member is an annular structure and the opposite ends of the second pipeline member are respectively connected to the second interface and the flow channel; the third pipeline member is an annular structure and the opposite ends of the third pipeline member are respectively connected to the flow channel and the third interface, one end of the fourth pipeline member is connected to the fourth interface, and the other end of the fourth pipeline member passes through the bottom wall of the chamber and is connected to the outside.

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