Mounting jig and mounting method for quartz ignition device of furnace tube equipment

Abstract

The invention provides an ignition device installation jig and method for furnace tube equipment, the jig comprises a first end, a second end and a connecting part connecting the first end and the second end, and the installation method is that the installation jig is used for replacing an ignition device to be placed between a reaction tube and a heater. According to the quartz ignition device installation jig of the furnace tube equipment and the installation method, the jig is matched with the ignition device in size, and the state of the ignition device during installation can be accurately simulated; the jig is in a dumbbell shape and is easy to hold and convenient to install. The fixture is made of a polytetrafluoroethylene material, is light, has good wear resistance and low friction coefficient, is not easy to damage a connector of a heater and a reaction tube during position adjustment, and can reduce loss and improve the installation efficiency when being used for installing the quartz ignition device by using the fixture and the method.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a quartz ignition device installation fixture and an installation method for a furnace tube device. Background Art

[0002] Furnace tube equipment is a key equipment used for heat treatment in the semiconductor manufacturing process. Its main function is to heat silicon wafers to achieve processes such as oxidation, diffusion, and deposition. A key component in the furnace tube equipment is the reaction tube, which is used to hold silicon wafers and expose them to a specific chemical vapor environment for chemical vapor deposition (CVD) or other heat treatment processes. The reaction tube is connected to an ignition device (Torch), which is used to generate water vapor through high-temperature reactions and pass it into the reaction tube. The ignition device is a cylindrical tube body, in which gas or chemicals pass and react at a specific temperature. It is usually made of quartz, can withstand high temperatures and remain chemically inert. The ignition device uses a heater (Torch Heater) to heat the gas. The heater can adjust and control the temperature of the ignition device to control the reaction.

[0003] In the prior art, such as Figure 3 , 4 As shown, when installing the ignition device in the furnace tube equipment, the interface 61 of the gas outlet end 6 of the quartz ignition device and the interface 91 of the reaction tube 9 are required to be sealed and fixed, and at the same time, the ignition device and the heater 7 must be firmly connected. In order to achieve this effect, it is necessary to achieve that the sealing surface of the gas outlet interface 61 and the reaction tube interface 91 are in a parallel state during installation, and at the same time, a gap is maintained between the ignition device and the side cooling plate 8. Therefore, it is necessary to adjust the angles of the reaction tube, the ignition device and the heater several times during the installation process. Since the ignition device is made of quartz material and is relatively heavy, and its cylindrical shape is not easy to hold, and it needs to be adjusted repeatedly during operation, it is easy to bump and cause damage to the quartz, and the installation efficiency is low and it is easy to cause loss. Summary of the invention

[0004] In order to solve the defects in the prior art, the present invention provides a quartz ignition device installation fixture and an installation method for a furnace tube device.

[0005] A quartz ignition device installation fixture for a furnace tube device, the quartz ignition device comprising an air inlet heating end, an air outlet end, and a hollow cylindrical portion connecting the air inlet heating end and the air outlet end, the air inlet heating end comprising a cylindrical air inlet pipe, a hydrogen inlet and an oxygen inlet, the air outlet end comprising an air outlet pipe and a pipe opening sealing surface, an air inlet is provided in the middle of the air outlet pipe, the fixture comprising a first end, a second end and a connecting portion connecting the first end and the second end, the first end simulates the air inlet heating end of the quartz ignition device, the second end simulates the air outlet end of the quartz ignition device, the connecting portion corresponds to the hollow cylindrical portion of the quartz ignition device, and is constructed in a dumbbell shape, the connecting portion having two end cylindrical portions and a middle cylindrical portion, the cross-sectional diameter of the two end cylindrical portions being greater than the cross-sectional diameter of the middle cylindrical portion, and the cross-sectional diameter of the two end cylindrical portions is consistent with the cross-sectional diameter of the hollow cylindrical portion of the quartz ignition device.

[0006] Preferably, the first end of the jig is consistent in shape and size with the air inlet heating end of the quartz ignition device, and the second end of the jig is consistent in shape and size with the air outlet end of the quartz ignition device.

[0007] Preferably, the fixture is made of polytetrafluoroethylene.

[0008] A method for installing a quartz ignition device of a furnace tube device, using the quartz ignition device installation fixture described in any one of the above items to replace the ignition device, comprising the following steps:

[0009] Step S1: The operator holds the middle cylindrical part of the jig connection part, opens the upper half of the heater, and places the jig at the position to be installed of the quartz ignition device in the furnace tube equipment, that is, the part of the first end of the jig corresponding to the cylindrical air inlet pipe is placed in the groove in the heater, and the first end of the jig is aligned with the air inlet channel, and the second end is preliminarily aligned with the interface of the reaction tube;

[0010] Step S2: adjusting the position of the heater so that the portion of the second end of the jig corresponding to the tube orifice sealing surface is parallel to the reaction tube interface, and a certain gap is maintained between the jig and the upper and side cooling plates;

[0011] Step S3: When the portion of the second end of the fixture corresponding to the pipe opening sealing surface is parallel to the reaction tube interface, the adjustment is completed and the position of the heater is fixed;

[0012] Step S4: remove the fixture and replace it with the quartz ignition device, seal and fix the pipe mouth sealing surface of the gas outlet end with the reaction tube interface, connect the gas inlet of the gas outlet end with the equipment pipeline, close the upper half of the heater, and connect the hydrogen inlet and the oxygen inlet with the gas inlet channel of the furnace tube equipment to complete the installation.

[0013] Preferably, step S2a is further provided between step S2 and step S3: if repeatedly adjusting the position of the heater still fails to make the nozzle sealing surface of the second end of the fixture parallel to the reaction tube interface, the position of the reaction tube interface is adjusted by slightly rotating the reaction tube.

[0014] Preferably, in step S2, the position of the heater is adjusted in six directions: up and down, front and back, and left and right.

[0015] The present invention has the following beneficial effects:

[0016] The present invention proposes a quartz ignition device installation jig and installation method for furnace tube equipment, which uses a jig with a size and structure similar to the ignition device to pre-install and adjust the angle of the heater, and replaces the jig with the ignition device after the angle of the heater is adjusted. The size of the jig matches the ignition device, and can accurately simulate the state of the ignition device during installation; the connection part of the jig adopts a dumbbell shape, which is easy to hold and install; it is made of polytetrafluoroethylene, which is light and has good wear resistance and low friction coefficient. It is not easy to damage the interface between the heater and the reaction tube when adjusting the position. Using this jig and method to install the quartz ignition device can reduce losses and improve installation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural diagram of a quartz ignition device installation fixture for a furnace tube device according to a preferred embodiment of the present invention.

[0018] Figure 2 It is a schematic diagram of the installation of a quartz ignition device installation fixture for a furnace tube device according to a preferred embodiment of the present invention.

[0019] Figure 3 It is a schematic diagram of the installation of the furnace tube equipment ignition device of the preferred embodiment of the present invention.

[0020] Figure 4 It is a bottom view of the quartz ignition device after installation according to the preferred embodiment of the present invention.

[0021] Figure 5 The present invention is a flowchart of a method for installing a quartz ignition device of a furnace tube device according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0022] The following will illustrate the implementation methods of the present invention in conjunction with the drawings in the specification. It should be noted that the implementation methods involved in this specification are not exhaustive and do not represent the only implementation methods of the present invention. The following corresponding embodiments are only for the purpose of clearly illustrating the invention content of the patent of the present invention, and are not intended to limit its implementation methods. For ordinary technicians in this field, different forms of changes and modifications can be made on the basis of the description of these embodiments. All obvious changes or modifications that belong to the technical concept and invention content of the present invention are also within the scope of protection of the present invention.

[0023] First, refer to Figure 3 , 4 Explain the structure and working principle of the existing quartz ignition device. Figure 3 , 4 As shown, the quartz ignition device is a high-temperature reaction container made of quartz and hollow inside. The quartz ignition device includes an air inlet heating end 4, an air outlet end 6, and a hollow cylindrical portion 5 connecting the air inlet heating end 4 and the air outlet end 6. The air inlet heating end 4 includes a cylindrical air inlet pipe 41, a hydrogen inlet 421, and an oxygen inlet 422. The hydrogen inlet 421 and the oxygen interface 422 are connected to the air inlet channel of the furnace tube equipment, and the cylindrical air inlet pipe 41 is placed in the middle of the heater 7 for heating the gas introduced. Hydrogen and oxygen are introduced into the air inlet heating end 4, and after being heated by the heater 7, they reach the reaction temperature, and react to generate water vapor after mixing in the inner cavity of the hollow cylindrical portion 5, and the water vapor is output to the inside of the reaction tube 9 along the air outlet end 6. The air outlet end 6 includes an air outlet pipe 62 and a pipe mouth end 61, and an air inlet 63 extends vertically from the middle of the air outlet pipe 62. There is a certain gap between the cooling plate 8 and the hollow cylindrical portion, so that the quartz ignition device can be cooled and the expansion of the quartz ignition device at high temperature can be avoided.

[0024] Combine the following Figure 1 A quartz ignition device installation fixture for a furnace tube device according to a preferred embodiment of the present invention is described in detail. The installation fixture comprises a first end 1, a second end 3, and a connecting portion 2 connecting the first end and the second end. The first end 1 simulates the air inlet heating end 4 of the quartz ignition device, the second end 3 simulates the air outlet end 6 of the quartz ignition device, and the connecting portion 2 corresponds to the hollow cylindrical portion 5 of the quartz ignition device (refer to Figure 3 , 4 The connecting portion 2 is constructed in a dumbbell shape, including two cylindrical portions 21 at both ends and a middle cylindrical portion 23. The middle cylindrical portion 23 is relatively slender and easy to hold. The cross-sectional diameter of the two cylindrical portions 21 at both ends is larger than the cross-sectional diameter of the middle cylindrical portion 23, and the cross-sectional diameter of the two cylindrical portions 23 at both ends is consistent with the cross-sectional diameter of the hollow cylindrical portion 5 of the quartz ignition device.

[0025] Preferably, the first end 1 of the fixture is consistent in shape and size with the air inlet heating end 4 of the quartz ignition device, and is provided with a cylinder 11, the size of which matches the middle groove of the heater 7 of the furnace tube device. The end of the cylinder 11 is provided with two bifurcated interfaces 121 and 122, the size of which is the same as the hydrogen interface 421 and the oxygen interface 422 of the ignition device. The second end 3 is consistent in shape and size with the air outlet end 6 of the quartz ignition device, and is provided with a cylinder 32, a circular sealing end 31 and a bifurcated interface 33. The cylinder 32 simulates the air outlet pipe 62 of the quartz ignition device, the circular sealing end 31 simulates the pipe mouth sealing surface 61, and the bifurcated interface 33 simulates the air inlet 63 of the quartz ignition device. The size of the circular sealing end 31 matches the size of the interface 91 of the reaction tube 9.

[0026] Preferably, the jig is made of polytetrafluoroethylene, which has good wear resistance and low friction coefficient, and is not easy to damage the sealing surface of the interface 91 of the reaction tube 9 during installation. At the same time, polytetrafluoroethylene is lighter than quartz, which is convenient for operators to hold and use the jig.

[0027] The following is a detailed description of a method for installing a quartz ignition device of a furnace tube device according to a preferred embodiment of the present invention. Figure 5 As shown, the method of the present invention uses the above-mentioned fixture instead of the ignition device and is placed between the reaction tube and the heater. The specific steps are as follows:

[0028] Step S1: The operator holds the middle cylindrical portion 23 of the fixture connection portion 2, opens the upper half of the heater 7, and places the fixture at the position to be installed of the quartz ignition device in the furnace tube equipment, that is, places the cylinder 11 of the first end 1 of the fixture in the groove in the heater 7, aligns the bifurcated interfaces 121 and 122 of the first end 1 of the fixture with the air inlet channel, and preliminarily aligns the circular sealing end 31 of the second end 3 with the interface 91 of the reaction tube 9.

[0029] Step S2: The position of the heater 7 is adjusted by adjusting the heater adjustment mechanism 71, so that the circular sealing end 31 of the second end 3 of the jig is parallel to the reaction tube interface 91, and at the same time, a certain gap is maintained between the jig and the upper and side cooling plates 8. Preferably, in step S2, the position of the heater 7 is adjusted in six directions: up and down, front and back, and left and right.

[0030] Here, the heater 7 can be opened from the side, with a groove in the middle, and the size of the groove matches the cylindrical air inlet pipe 41 of the quartz ignition device and the cylinder 11 of the fixture. A position adjustment mechanism 71 is provided below the heater 7. By operating the position adjustment mechanism 71, the heater 7 can be moved in six directions: up, down, left, right, front, and back. A cooling plate 8 is provided on the side and top of the connecting portion 5 of the fixture. The cooling plate is a right-angle structure, and there is a certain gap above and on the side of the cylindrical portion 23 at both ends of the connecting portion. The circular sealing end 31 of the second end of the fixture should be parallel to the reaction tube interface 91.

[0031] Step S3: When the circular sealing end 31 of the second end 3 of the fixture is parallel to the reaction tube interface 91, the adjustment is completed and the position of the heater 7 is fixed. Figure 2 Shown is a schematic diagram of the installation of an ignition device installation fixture for a furnace tube device according to a preferred embodiment of the present invention.

[0032] Step S4: Remove the fixture and replace it with a quartz ignition device, seal and fix the pipe mouth sealing surface 61 of the gas outlet end 6 with the reaction tube interface 91, connect the gas inlet 63 of the gas outlet end 6 with the equipment pipeline, close the upper half of the heater 7, and connect the hydrogen inlet 421 and the oxygen inlet 422 with the gas inlet channel of the furnace tube equipment to complete the installation.

[0033] Preferably, when the position of the heater 7 is repeatedly adjusted and the circular sealing end 31 of the second end 3 of the jig is still not parallel to the reaction tube interface 91, there is a step S2a between step S2 and step S3: the position of the reaction tube interface 91 is adjusted by slightly rotating the reaction tube 9. Here, the reaction tube 9 can be rotated slightly along the axis, so that the position of the reaction tube interface 91 can be adjusted.

[0034] The present invention proposes a quartz ignition device installation jig and installation method for furnace tube equipment, which uses a jig with a size and structure similar to the ignition device to pre-install and adjust the angle of the heater, and replaces the jig with the ignition device after the angle of the heater is adjusted. The size of the jig matches the ignition device, and can accurately simulate the state of the ignition device during installation; the connection part of the jig adopts a dumbbell shape, which is easy to hold and install; it is made of polytetrafluoroethylene, which is light and has good wear resistance and low friction coefficient. It is not easy to damage the interface between the heater and the reaction tube when adjusting the position. Using this jig and method to install the quartz ignition device can reduce losses and improve installation efficiency.

[0035] Obviously, those skilled in the art should realize that the above embodiments are only used to illustrate the present invention, and are not used to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. A quartz ignition device installation fixture for furnace tube equipment, the quartz ignition device comprising an air inlet heating end, an air outlet end, and a hollow cylindrical portion connecting the air inlet heating end and the air outlet end, the air inlet heating end comprising a cylindrical air inlet pipe, a hydrogen inlet and an oxygen inlet, the air outlet end comprising an air outlet pipe and a pipe opening sealing surface, an air inlet is provided in the middle of the air outlet pipe, characterized in that: The fixture includes a first end, a second end and a connecting portion connecting the first end and the second end, the first end simulates the air intake heating end of the quartz ignition device, the second end simulates the air outlet end of the quartz ignition device, the connecting portion corresponds to the hollow cylindrical portion of the quartz ignition device, and is constructed in a dumbbell shape, the connecting portion has two end cylindrical portions and a middle cylindrical portion, the cross-sectional diameters of the two end cylindrical portions are greater than the cross-sectional diameter of the middle cylindrical portion, and the cross-sectional diameters of the two end cylindrical portions are consistent with the cross-sectional diameters of the hollow cylindrical portion of the quartz ignition device.

2. A quartz ignition device installation fixture for furnace tube equipment according to claim 1, characterized in that: The first end of the fixture is consistent with the air inlet heating end of the quartz ignition device in shape and size, and the second end of the fixture is consistent with the air outlet end of the quartz ignition device in shape and size.

3. The quartz ignition device installation fixture for furnace tube equipment according to claim 1, characterized in that: The fixture is made of polytetrafluoroethylene.

4. A method for installing a quartz ignition device of a furnace tube equipment, characterized in that: Using the quartz ignition device installation fixture as described in any one of claims 1 to 3 to replace the ignition device comprises the following steps: Step S1: The operator holds the middle cylindrical part of the jig connection part, opens the upper half of the heater, and places the jig at the position to be installed of the quartz ignition device in the furnace tube equipment, that is, the part of the first end of the jig corresponding to the cylindrical air inlet pipe is placed in the groove in the heater, and the first end of the jig is aligned with the air inlet channel, and the second end is preliminarily aligned with the interface of the reaction tube; Step S2: adjusting the position of the heater so that the portion of the second end of the jig corresponding to the tube orifice sealing surface is parallel to the reaction tube interface, and a certain gap is maintained between the jig and the upper and side cooling plates; Step S3: When the portion of the second end of the fixture corresponding to the pipe opening sealing surface is parallel to the reaction tube interface, the adjustment is completed and the position of the heater is fixed; Step S4: remove the fixture and replace it with the quartz ignition device, seal and fix the pipe mouth sealing surface of the gas outlet end with the reaction tube interface, connect the gas inlet of the gas outlet end with the equipment pipeline, close the upper half of the heater, and connect the hydrogen inlet and the oxygen inlet with the gas inlet channel of the furnace tube equipment to complete the installation.

5. A method for installing a quartz ignition device of a furnace tube device as claimed in claim 4, characterized in that: There is also a step S2a between step S2 and step S3: If the nozzle sealing surface of the second end of the fixture cannot be made parallel to the reaction tube interface after repeatedly adjusting the position of the heater, the position of the reaction tube interface is adjusted by slightly rotating the reaction tube.

6. A method for installing a quartz ignition device of a furnace tube device as claimed in claim 4, characterized in that: In step S2, the position of the heater is adjusted in six directions: up and down, front and back, and left and right.

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