Plane stretching type Mini-LED chip film expanding device and method capable of correcting errors

Abstract

The invention belongs to the technical field of manufacturing of Mini-LED chips, and discloses a plane stretching type Mini-LED chip film expanding device and method capable of correcting errors. A plane stretching type chip film expanding device capable of correcting errors comprises a first film expanding mechanism, a second film expanding mechanism, a film pressing frame, a scanning camera and an error correcting mechanism. A first film expanding mechanism and a second film expanding mechanism are adopted for integrally stretching a blue film, then a scanning camera detects the position of a chip on the blue film, a correction disc is adsorbed through an adsorption through hole to locally fix the part, without deviation, of the chip in the blue film, and then the part, with deviation and without fixation, of the chip in the blue film is jacked up through a marble; the blue film is locally expanded, so that the position of the chip on the blue film is corrected, the position of the chip is accurately adjusted, and the problems that a conventional film expanding device cannot randomly adjust the local stretching amount of the blue film and cannot correct the position deviation of the local chip are solved.

Description

Technical Field

[0001] The present invention belongs to the technical field of Mini-LED chip manufacturing, and specifically relates to a planar stretchable Mini-LED chip film expansion device and method capable of correcting errors. Background Art

[0002] In semiconductor chip manufacturing, after the chips are mass-produced on the wafer, the chips are still a whole, and then they are cut and divided to form the small chips we commonly see. The distance between the chips is the distance between the cutting lines. For Mini-LED chips with a size of about 100 microns, it is difficult to transfer and package the chips at a very small distance, so the distance between the chips needs to be expanded through the film expansion process.

[0003] The traditional method of expanding the Mini-LED chip film is to place the blue film in the middle of a ring and fix it, and then use a cylinder to lift the blue film from the middle of the ring so that the blue film is stretched as a whole, thereby increasing the spacing between the chips on the blue film.

[0004] However, the stretching deformation of the blue film is easily affected by factors such as temperature, strain, and stretching speed. It is difficult for the chip to expand evenly from the center. In reality, the chips in the center area are over-expanded, while the chips in the four corners are under-expanded. This method is obviously difficult to meet the requirements of Mini-LED chips to be horizontal and vertical. Moreover, even if errors occur after film expansion, they cannot be corrected, which greatly affects the accuracy of subsequent chip transfer. Summary of the invention

[0005] In view of the above-mentioned defects, the purpose of the present invention is to propose a planar stretchable Mini-LED chip film expansion device and method that can correct errors, which expands the film in two perpendicular directions of the chip rows respectively, and can correct in the error area after film expansion, thereby improving the arrangement accuracy of the chips after film expansion.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A planar stretching chip film expansion device capable of correcting errors, comprising a first film expansion mechanism, a second film expansion mechanism, a film pressing frame, a scanning camera and an error correction mechanism;

[0008] The film expansion direction of the first film expansion mechanism and the film expansion direction of the second film expansion mechanism are arranged perpendicular to each other, the film pressing frame is used to fix the blue film with the chip, the error correction mechanism is used for local expansion of the blue film, and the scanning camera is used to detect the position of the chip on the blue film;

[0009] The error correction mechanism includes a correction disk, a plurality of pins and a pin driving mechanism. The correction disk is provided with a plurality of adsorption through holes and a plurality of correction through holes. The adsorption through holes are evenly distributed on the correction disk. The plurality of adsorption through holes are respectively connected to an exhaust mechanism. The adsorption through holes are used to adsorb and fix the blue film on the upper surface of the correction disk when the exhaust mechanism is activated. The correction through holes are evenly distributed between the adsorption through holes. The pins are movably arranged in the correction through holes, one pin corresponds to one correction through hole, and the upward and downward movements of the plurality of pins are separate and independent. When driven by the pin driving mechanism, at least one of the pins moves upward and protrudes from the upper surface of the correction disk. The pins that move upward and protrude are used to locally expand the blue film.

[0010] Preferably, a porous ceramic is arranged in the adsorption through hole, the porous ceramic is flush with the upper surface of the correction disk, the adsorption through hole is connected to an external air pumping mechanism through a first air pipe, and the air pumping mechanism is a negative pressure pump;

[0011] The pin is arranged in the correction through hole at one end close to the upper surface of the correction disk. The pin is a cylindrical structure, and the upper end of the pin is hemispherical. The outer wall of the pin is sealed with the inner wall of the correction through hole. The upper end of the pin does not exceed the upper surface of the correction disk when it does not move upward. The other end of the correction through hole is connected to the second air pipe, and the second air pipe is connected to the pin driving mechanism. The pin driving mechanism is an external air pressure adjustment system.

[0012] Preferably, the adsorption through hole is a cylindrical through hole with a diameter of 1 mm, and the correction through hole is a cylindrical through hole with a diameter of 1.5 mm.

[0013] Preferably, the device further comprises a rotation drive, wherein the rotation drive is used to drive the correction disk to rotate in a horizontal direction.

[0014] Preferably, the film pressing frame comprises a first film pressing frame and a second film pressing frame, the first film pressing frame and the second film pressing frame are arranged one above the other, the first film pressing frame can be buckled with the second film pressing frame, and the buckling of the first film pressing frame and the second film pressing frame is used to clamp and fix the stretched blue film;

[0015] The second film pressing frame is provided with a raised platform, and the raised platform is flush with the upper surface of the correction disk; the film pressing frame is square, and the side length of the film pressing frame is less than the length L2 of the second film expanding mechanism.

[0016] Preferably, it further comprises a plurality of press frame column heads, wherein the press frame column heads are provided with a first through hole, a push block is provided in the first through hole, the push block is sealed against the inner wall of the first through hole, one side of the first through hole is connected to a third air pipe, the third air pipe is connected to an external first air pump, a locking arrow is installed on a side of the push block away from the third air pipe, the locking arrow is used to lock the first film pressing frame and the second film pressing frame, the first film pressing frame and the second film pressing frame are respectively provided with a plurality of locking through holes, and the first through hole matches the locking through holes;

[0017] Under the control of the first air pump, the pushing block can push the locking arrow to move downward and pass through the locking through hole of the first film pressing frame and the locking through hole of the second film pressing frame in sequence.

[0018] Preferably, the first film expansion mechanism comprises a first roller group and a first pressing block group, the first roller group and the first pressing block group are arranged oppositely and in parallel on both sides of the error correction mechanism in the second direction, the first roller group is used to stretch the blue film in the first direction, and the first pressing block group is used to fix the blue film in the first direction;

[0019] The second film expansion mechanism comprises a second roller group and a second pressing block group, the second roller group and the second pressing block group are arranged oppositely and parallel to the two sides of the error correction mechanism in the first direction, the second roller group is used to stretch the blue film in the second direction, and the second pressing block group is used to fix the blue film in the second direction;

[0020] The first direction is perpendicular to the second direction, the second roller group and the second pressing block group have the same length, the second roller group and the second pressing block group are arranged between the first roller group and the first pressing block group, and a gap is arranged between the second roller group and the first roller group and the first pressing block group;

[0021] The first roller group comprises a first upper roller and a first lower roller which are arranged opposite to each other, the first upper roller and the first lower roller are arranged opposite to each other, and the first upper roller and the first lower roller are respectively arranged on both sides of the blue film thickness direction;

[0022] The first pressing block group includes a first upper pressing block and a first lower pressing block which are arranged opposite to each other. The first upper pressing block and the first lower pressing block are arranged opposite to each other, and the first upper pressing block and the first lower pressing block are respectively arranged on both sides of the blue film thickness direction;

[0023] The second roller group comprises a second upper roller and a second lower roller which are arranged opposite to each other, the second upper roller and the second lower roller are arranged opposite to each other, and the second upper roller and the second lower roller are arranged on both sides of the blue film thickness direction respectively;

[0024] The second pressing block group includes an oppositely arranged second upper pressing block and a second lower pressing block. The second upper pressing block and the second lower pressing block are arranged opposite to each other, and the second upper pressing block and the second lower pressing block are respectively arranged on both sides in the thickness direction of the blue film.

[0025] Preferably, a spacing adjustment device is arranged between the first upper roller and the first lower roller. The spacing adjustment device is used to adjust the distance between the first upper roller and the first lower roller. The spacing between the first upper roller and the first lower roller is adjustable within the range of 0 - 10 mm. A spacing adjustment device is arranged between the second upper roller and the second lower roller. The spacing adjustment device is used to adjust the distance between the second upper roller and the second lower roller. The spacing between the second upper roller and the second lower roller is adjustable within the range of 0 - 10 mm. The first upper roller, the first lower roller, the second upper roller, and the second lower roller are provided with fine knurling with a module of 0.2 mm. A spacing adjustment device is arranged between the first upper pressing block and the first lower pressing block. The spacing adjustment device is used to adjust the distance between the first upper pressing block and the first lower pressing block. The spacing between the first upper pressing block and the first lower pressing block is adjustable within the range of 0 - 10 mm. A spacing adjustment device is arranged between the second upper pressing block and the second lower pressing block. The spacing adjustment device is used to adjust the distance between the second upper pressing block and the second lower pressing block. The spacing between the second upper pressing block and the second lower pressing block is adjustable within the range of 0 - 10 mm.

[0026] The length of the first film expanding mechanism is L1, and the length of the second film expanding mechanism is L2. Define the side length of the maximum allowable square range after the chip film is expanded as L3. L3 < L2 < L1. A gap d is arranged between the first film expanding mechanism and the second film expanding mechanism along the length direction of the second film expanding mechanism.

[0027] L3 is less than 80 mm; L2 is 20 mm larger than the side length of the pressure film frame; L1 is larger than the side length of the unexpanded blue film; d is greater than 30 mm.

[0028] An error correction method for a planar stretching type chip film expanding device, using the above-mentioned planar stretching type chip film expanding device, includes the following steps:

[0029] A. Placing the blue film and starting: Place the blue film with the chip on the correction disk, and start the scanning camera to observe the spacing of the chips on the blue film in real time.

[0030] B. First bidirectional film expansion: Use the first film expansion mechanism to stretch the blue film until the distance between any two adjacent chips along the first direction reaches 96% of the set spacing, and use the second film expansion mechanism to stretch the blue film until the distance between any two adjacent chips along the second direction reaches 96% of the set spacing, and the set spacing is the spacing between adjacent chips required for the next process;

[0031] C. Error identification: Obtain the positions of all chips through a scanning camera, and determine whether the chip spacing in several areas is less than 95% of the set spacing. If the chip spacing in the area is greater than or equal to 95% of the set spacing, mark the area as an adjusted area. If the chip spacing in the area is less than 95% of the set spacing, mark the area as an error area. Select one of the error areas and determine whether the error area is a convex polygon. If so, proceed to step D. If not, the error area is a concave polygon, which is divided into several convex polygons and then enters step D. If the error area is already the minimum adjustment range and cannot be divided, directly enter step D;

[0032] D. Error correction: Control the pins in the correction disk corresponding to the error area to extend upward, so that the blue film in the error area is lifted up and stretched;

[0033] E. Error elimination verification: Use a scanning camera to re-identify the error area after error correction. If the chip spacing in the error area still does not reach 95% and the error area is not the minimum adjustable range, return to step C to re-identify and segment; if the error area is the minimum adjustable range, return to step D to repeat the adjustment and accumulate the number of adjustments of the error area. When the accumulated number of adjustments of the error area exceeds the preset maximum number of adjustments, the adjustment of the error area is abandoned and the error area is marked as an adjusted area; until all areas are marked as adjusted areas, enter step F;

[0034] F. Second bidirectional film expansion: Use the first film expansion mechanism to stretch the blue film after error elimination and verification, and the scanning camera observes the spacing of the chips in the first direction in real time. When the average spacing of the chips is equal to the set spacing, the stretching is stopped; Use the second film expansion mechanism to stretch the blue film, and the scanning camera observes the spacing of the chips in the second direction in real time. When the average spacing of the chips is equal to the set spacing, the stretching is completed.

[0035] A Mini-LED chip film expansion device comprises the above-mentioned planar stretching film expansion device capable of correcting errors.

[0036] The technical solution provided by the present invention may include the following beneficial effects:

[0037] The first film expansion mechanism and the second film expansion mechanism are used to stretch the blue film as a whole, and then a scanning camera detects the position of the chip on the blue film. The correction disk uses the adsorption through hole to locally fix the part of the chip position in the blue film that has not been offset, and then the part of the chip in the blue film that has been offset and not fixed is lifted up by a marble, and the blue film is locally expanded, so that the position of the chip on the blue film can be corrected to accurately adjust the chip position, thereby solving the problem that conventional film expansion devices cannot arbitrarily adjust the local stretching amount of the blue film and cannot correct the local chip position offset.

[0038] By rotating the correction disk, the chip arrangement direction is adjusted to be parallel to the stretching direction of the film expansion device, thereby solving the problem that the adjustment position is difficult to calculate when the chip arrangement direction and the stretching direction are different.

[0039] Sufficient buffer areas are reserved between the edge and center of the blue film to ensure uniform stretching of the center of the blue film, thereby solving the problem of irregular deformation of the center of the blue film caused by insufficient buffer areas.

[0040] By first stretching the blue film to 96% of the maximum chip spacing according to the chip spacing, a margin is provided for local error adjustment to prevent excessive expansion of the blue film. At the same time, a large amount of expansion is required during subsequent film expansion, which causes new errors to become larger.

[0041] By adopting the method of dividing the error area, the chip spacing is adjusted area by area to ensure that 99% of the chip spacing reaches 95-96% of the preset maximum chip spacing during the error correction stage, thereby reducing the final chip average offset. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is a schematic structural diagram of an embodiment of the present invention.

[0043] Figure 2 It is a structural schematic diagram of another direction of an embodiment of the present invention.

[0044] Figure 3 The figure is a working principle diagram of an embodiment of the present invention.

[0045] Figure 4 It is a partial enlarged view of a film pressing frame with a locking arrow according to an embodiment of the present invention.

[0046] Figure 5 It is a three-dimensional schematic diagram of a first film pressing frame according to an embodiment of the present invention.

[0047] Figure 6 It is a three-dimensional schematic diagram of a second laminating frame according to an embodiment of the present invention.

[0048] Figure 7 FIG. 4 is a cross-sectional view of a second lamination frame according to an embodiment of the present invention.

[0049] Figure 8 for Figure 7 A partial enlarged view of point A in the middle.

[0050] Wherein: a first film expanding mechanism 1, a second film expanding mechanism 2, a film pressing frame 3, a first film pressing frame 31, a second film pressing frame 32, a locking through hole 33, a raised platform 34, a scanning camera 4 and an error correction mechanism 5, a correction disk 51, a plurality of pins 52, an adsorption through hole 53, a correction through hole 54, a porous ceramic 55, a pressing frame column head 6, a first through hole 61, a pushing block 62, a locking arrow 7, and a chip 8;

[0051] The length L1 of the first film expanding mechanism, the length L2 of the second film expanding mechanism, the side length L3 of the maximum square range allowed after chip film expansion, and the gap d between the first film expanding mechanism and the second film expanding mechanism along the length direction of the second film expanding mechanism. DETAILED DESCRIPTION

[0052] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0053] In the description of the present invention, it is necessary to understand that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance.

[0054] In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0055] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] The embodiments of the present invention are described below in conjunction with the accompanying drawings.

[0057] A planar stretching chip film expansion device capable of correcting errors, comprising a first film expansion mechanism 1, a second film expansion mechanism 2, a film pressing frame 3, a scanning camera 4 and an error correction mechanism 5;

[0058] The film expansion direction of the first film expansion mechanism 1 and the film expansion direction of the second film expansion mechanism 2 are arranged perpendicular to each other, the film pressing frame 3 is used to fix the blue film with the chip 8, the error correction mechanism 5 is used for local expansion of the blue film, and the scanning camera 4 is used to detect the position of the chip 8 on the blue film;

[0059] The error correction mechanism 5 includes a correction disk 51, a plurality of pins 52 and a pin driving mechanism. The correction disk 51 is provided with a plurality of adsorption holes 53 and a plurality of correction holes 54. The adsorption holes 53 are evenly distributed on the correction disk 51. The plurality of adsorption holes 53 are respectively connected to an exhaust mechanism. The adsorption holes 53 are used to adsorb and fix the blue film on the upper surface of the correction disk 51 when the exhaust mechanism is activated. The correction holes 54 are evenly distributed between the adsorption holes 53. The pins 52 are movably arranged in the correction holes 54 up and down, one pin corresponds to one correction hole, and the up and down movements of the plurality of pins 52 are separate and independent. When driven by the pin driving mechanism, at least one of the pins 52 moves upward and protrudes from the upper surface of the correction disk. The pins 52 that move upward and protrude are used to locally expand the blue film.

[0060] The target of chip transfer is the two-dimensional dot matrix on the substrate. During the transfer process, the crystal head, chip 8, and dot matrix on the substrate need to be aligned one by one. If the accuracy of chip 8 on the blue film is high enough, the error compensation movement of the blue film can be reduced, thereby improving the final transfer accuracy.

[0061] With this structure, the first film expansion mechanism 1 and the second film expansion mechanism 2 are used to stretch the blue film as a whole, and then the scanning camera 4 detects the position of the chip 8 on the blue film. The correction disk 51 adsorbs the part of the blue film where the position of the chip 8 is not offset (specifically, the part of the adjusted area) through the adsorption through hole 53, thereby realizing local fixation of the blue film. Then, the part of the blue film where the chip 8 is offset (specifically, the error area) is lifted up by the pin 52, and the error area of ​​the blue film is locally expanded, so that the position of the chip 8 on the error area of ​​the blue film can be corrected to accurately adjust the position of the chip 8, thereby solving the problem that the conventional film expansion device cannot arbitrarily adjust the local stretching amount of the blue film and cannot correct the local chip 8 position offset.

[0062] The following is a comparison of the average transfer error of chip 8 using a conventional blue film expansion and a blue film expansion with error correction in the same wafer transfer machine.

[0063] X-direction offset (μm) Y direction offset (μm) Conventional film expansion 4.1 6.7 This solution corrects the error expansion film 0.8 1.3

[0064] like Figure 1 and Figure 2 In a specific embodiment, the correction disk 51 is a circular disk, and the adsorption holes 53 are distributed on the correction disk 51 in a two-dimensional array. The adsorption holes 53 are connected to an external vacuum pump through an air pipe, and the vacuum pump provides negative pressure so that the blue film is adsorbed and fixed by the adsorption holes 53; in a specific embodiment, a correction hole 54 is arranged at the center of a rectangle formed by four adjacent adsorption holes 53, and the correction hole 54 is connected to an external air pressure adjustment system through an air pipe, and the air pressure adjustment system provides positive pressure or negative pressure to drive the ball 52 in the correction hole 54 to move along the length direction of the correction hole 54.

[0065] Preferably, a porous ceramic 55 is provided in the adsorption through hole 53, and the porous ceramic 55 is flush with the upper surface of the correction disk 51. The adsorption through hole 53 is connected to an external air pumping mechanism through a first air pipe, and the air pumping mechanism is a negative pressure pump;

[0066] The pin 52 is arranged in the correction through hole 54 at one end close to the upper surface of the correction disk 51. The pin 52 is a cylindrical structure, and the upper end of the pin 52 is hemispherical. The outer wall of the pin 52 and the inner wall of the correction through hole 54 are sealed. The upper end of the pin 52 does not exceed the upper surface of the correction disk 51 when it does not move upward. The other end of the correction through hole 54 is connected to the second air pipe, and the second air pipe is connected to the pin drive mechanism, which is an external air pressure adjustment system.

[0067] With this structure, the porous ceramic 55 prevents the blue film from being deformed when being adsorbed, thereby preventing the position of the chip 8 from being affected.

[0068] The air pressure adjustment system is used to control the extension of the pin 52 in the correction through hole 54 to lift up the blue film in the specified area. The air pressure is adjusted to control the extension length of the pin 52 to accurately adjust the position of the local chip 8 on the blue film.

[0069] In a specific embodiment, a sealing ring is added on the outer side of the ball 52 to ensure a sealed connection between the ball 52 and the inner wall of the correction through hole 54 .

[0070] Preferably, the adsorption through hole 53 is a cylindrical through hole with a diameter of 1 mm, and the correction through hole 54 is a cylindrical through hole with a diameter of 1.5 mm.

[0071] Preferably, a rotation drive is further included, and the rotation drive is used to drive the correction disk 51 to rotate in the horizontal direction.

[0072] In a specific embodiment, a stepper motor is selected as a rotation driver to drive the correction disk 51 to rotate in situ. When the blue film is placed on the correction disk 51, the arrangement direction of the chip 8 and the stretching direction of the film expansion device can be adjusted to be parallel to each other by rotating the correction disk 51, thereby solving the problem that the adjustment position is difficult to calculate when the arrangement direction of the chip 8 and the stretching direction are not parallel.

[0073] Preferably, the film pressing frame 3 comprises a first film pressing frame 31 and a second film pressing frame 32, wherein the first film pressing frame 31 and the second film pressing frame 32 are arranged one above the other, and the first film pressing frame 31 can be buckled with the second film pressing frame 32, and the buckling of the first film pressing frame 31 and the second film pressing frame 32 is used to clamp and fix the stretched blue film;

[0074] The height from the inner frame edge to the outer frame edge of the second film pressing frame 32 gradually decreases, and a slope frame inclined outward and downward is formed on the upper surface of the second film pressing frame 32. A raised platform is provided on the inner frame edge of the second film pressing frame 32, and the raised platform 34 is flush with the upper surface of the correction disk 51; the film pressing frame 3 is square, and the side length of the film pressing frame 3 is less than the length L2 of the second film expanding mechanism 2.

[0075] The inclined frame is used to facilitate the positioning and locking of the first laminating frame 31 and the second laminating frame 32 . In a specific embodiment, the raised height of the raised platform 34 is 0.5 mm, ensuring that the blue film is placed flat on the upper surface of the correction disk 51 .

[0076] Preferably, it further comprises a plurality of press frame column heads 6, wherein the press frame column head 6 is provided with a first through hole 61, wherein a push block 62 is provided in the first through hole 61, wherein the push block 62 is sealed against the inner wall of the first through hole 61, wherein one side of the first through hole 61 is connected to a third air pipe, wherein the third air pipe is connected to an external first air pump, wherein a locking arrow 7 is installed on a side of the push block 62 away from the third air pipe, wherein the locking arrow 7 is used to lock the first film pressing frame 31 and the second film pressing frame 32, wherein the first film pressing frame 31 and the second film pressing frame 32 are respectively provided with a plurality of locking through holes 33, wherein the first through hole 61 matches the locking through holes 33;

[0077] Under the control of the first air pump, the pushing block 62 can push the locking arrow 7 to move downward and pass through the locking through hole 33 of the first film pressing frame 31 and the locking through hole 33 of the second film pressing frame 32 in sequence.

[0078] like Figure 2 and Figure 4-8With this structure, the first air pump supplies air to push the pushing block 62 in the first through hole 61, and the pushing block 62 pushes the locking arrow 7. The locking arrow 7 penetrates into the locking through hole 33 of the die frame and passes through the blue film clamped in the die frame 3, locking the stretched blue film for easy transfer.

[0079] In a specific embodiment, before the blue film is stretched, the first film pressing frame 31 is fixed under a plurality of pressing frame column heads 6, which are connected to an external cylinder. During stretching, the blue film is located between the first film pressing frame 31 and the second film pressing frame 32. When the blue film is stretched, the cylinder pushes the pressing frame column heads 6, which push the first film pressing frame 31 to move downward and snap into the second film pressing frame 32 under the blue film to clamp the stretched blue film.

[0080] Preferably, the locking arrow 7 is made of polypropylene.

[0081] The locking arrow 7 is made of polypropylene, has a smooth surface, and is easy to slide in the channel. It also has elasticity and high strength to meet the use requirements.

[0082] Preferably, the first film expansion mechanism 1 comprises a first roller group and a first pressing block group, the first roller group and the first pressing block group are arranged oppositely and in parallel on both sides of the error correction mechanism 5 in the second direction, the first roller group is used to stretch the blue film in the first direction, and the first pressing block group is used to fix the blue film in the first direction;

[0083] The second film expansion mechanism 2 includes a second roller group and a second pressing block group, the second roller group and the second pressing block group are arranged oppositely and parallel to the two sides of the error correction mechanism 5 in the first direction, the second roller group is used to stretch the blue film in the second direction, and the second pressing block group is used to fix the blue film in the second direction;

[0084] The first direction is perpendicular to the second direction, the second roller group and the second pressing block group have the same length, the second roller group and the second pressing block group are arranged between the first roller group and the first pressing block group, and a gap is arranged between the second roller group and the first roller group and the first pressing block group;

[0085] The first roller group comprises a first upper roller and a first lower roller which are arranged opposite to each other, the first upper roller and the first lower roller are arranged opposite to each other, and the first upper roller and the first lower roller are respectively arranged on both sides of the blue film thickness direction;

[0086] The first pressing block group includes a first upper pressing block and a first lower pressing block which are arranged opposite to each other. The first upper pressing block and the first lower pressing block are arranged opposite to each other, and the first upper pressing block and the first lower pressing block are respectively arranged on both sides of the blue film thickness direction;

[0087] The second roller set includes an oppositely arranged second upper roller and a second lower roller. The second upper roller and the second lower roller are arranged directly opposite to each other, and the second upper roller and the second lower roller are respectively arranged on both sides in the thickness direction of the blue film;

[0088] The second pressing block set includes an oppositely arranged second upper pressing block and a second lower pressing block. The second upper pressing block and the second lower pressing block are arranged directly opposite to each other, and the second upper pressing block and the second lower pressing block are respectively arranged on both sides in the thickness direction of the blue film.

[0089] With this structure, after the first roller set and the first pressing block set clamp the blue film, the blue film is stretched in the first direction by the rolling of the first roller set. After the second roller set and the second pressing block set clamp the blue film, the blue film is stretched in the second direction by the rolling of the second roller set.

[0090] Preferably, a spacing adjustment device is provided between the first upper roller and the first lower roller. The spacing adjustment device is used to adjust the distance between the first upper roller and the first lower roller. The spacing between the first upper roller and the first lower roller is adjustable within the range of 0 - 10 mm. A spacing adjustment device is provided between the second upper roller and the second lower roller. The spacing adjustment device is used to adjust the distance between the second upper roller and the second lower roller. The spacing between the second upper roller and the second lower roller is adjustable within the range of 0 - 10 mm. The first upper roller, the first lower roller, the second upper roller, and the second lower roller have fine knurling with a module of 0.2 mm; A spacing adjustment device is provided between the first upper pressing block and the first lower pressing block. The spacing adjustment device is used to adjust the distance between the first upper pressing block and the first lower pressing block. The spacing between the first upper pressing block and the first lower pressing block is adjustable within the range of 0 - 10 mm. A spacing adjustment device is provided between the second upper pressing block and the second lower pressing block. The spacing adjustment device is used to adjust the distance between the second upper pressing block and the second lower pressing block. The spacing between the second upper pressing block and the second lower pressing block is adjustable within the range of 0 - 10 mm;

[0091] The length of the first film expanding mechanism 1 is L1, the length of the second film expanding mechanism 2 is L2. Define the side length of the maximum allowable square range after the chip 8 is film-expanded as L3. L3 < L2 < L1. A gap d is provided between the first film expanding mechanism 1 and the second film expanding mechanism 2 along the length direction of the second film expanding mechanism 2;

[0092] L3 is less than 80 mm; L2 is 20 mm larger than the side length of the pressure film frame 3; L1 is larger than the side length of the unexpanded blue film; d is larger than 30 mm.

[0093] The blue film can be conveniently clamped and loosened through the rollers and pressing block sets with adjustable spacing, so as to improve the overall processing efficiency.

[0094] In a specific embodiment, a spring buckle is used to quickly adjust the distance between the roller group and the pressure block group. As a simple replacement, a telescopic cylinder or a motor or other device can also be used to adjust the distance.

[0095] L1 is larger than the side length of the unexpanded blue film, ensuring that the entire blue film is within the clamping range of the first film expansion mechanism, ensuring uniform stretching of the blue film as a whole; L3 is designed to be less than 80mm, and the expansion size can meet the subsequent transfer process of the chip 8. In the second and third film expansions, the edge of the blue film is fixed, and only the central area of ​​the blue film is stretched. L2 is 20mm longer than the side length of the film pressing frame 3, and d is greater than 30mm. Sufficient buffer area is reserved between the edge and the central area of ​​the blue film to ensure uniform stretching of the central area of ​​the blue film, solving the problem of irregular deformation of the center of the blue film caused by insufficient buffer area.

[0096] In a specific embodiment, the material of the film pressing frame 3 is 7075 aluminum alloy; the film pressing frame 3 is made of 7075 aluminum alloy, which is light in weight and high in strength, suitable for high-frequency motion mechanisms, and easy to process.

[0097] Reference Figure 3 , an error correction method for a planar stretching chip film expansion device, using the planar stretching chip film expansion device described above, comprising the following steps:

[0098] A. Placing the blue film and starting: placing the blue film with the chip 8 on the correction plate 51, and starting the scanning camera 4 to observe the distance between the chips 8 on the blue film in real time;

[0099] B. First bidirectional film expansion: Use the first film expansion mechanism 1 to stretch the blue film until the distance between any two adjacent chips 8 along the first direction reaches 96% of the set spacing, and use the second film expansion mechanism 2 to stretch the blue film until the distance between any two adjacent chips 8 along the second direction reaches 96% of the set spacing, and the set spacing is the spacing between adjacent chips 8 required for the next processing step;

[0100] C. Error identification: The positions of all chips 8 are obtained by scanning the camera, and it is determined whether the chip spacing in several areas is less than 95% of the set spacing. If the chip spacing in the area is greater than or equal to 95% of the set spacing, the area is marked as an adjusted area. If the chip spacing in the area is less than 95% of the set spacing, the area is marked as an error area. It is determined whether the error area is a convex polygon. If so, it proceeds to step D. If not, the error area is a concave polygon, which is divided into several convex polygons and then enters step D. If the error area is already the minimum adjustment range and cannot be divided, it directly enters step D;

[0101] D. Error correction: Control the pins in the correction disk corresponding to the error area to extend upward, so that the blue film in the error area is lifted up and stretched;

[0102] E. Error elimination verification: Use a scanning camera to re-identify the error area after error correction. If the chip spacing in the error area still does not reach 95% and the error area is not the minimum adjustable range, return to step C to re-identify and segment; if the error area is the minimum adjustable range, return to step D to repeat the adjustment and accumulate the number of adjustments of the error area. When the accumulated number of adjustments of the error area exceeds the preset maximum number of adjustments, the adjustment of the error area is abandoned and the error area is marked as an adjusted area; until all areas are marked as adjusted areas, enter step F;

[0103] F. Second bidirectional film expansion: Use the first film expansion mechanism 1 to stretch the blue film after error elimination and verification, and the scanning camera 4 observes the spacing of the chips 8 in the first direction in real time. When the average spacing of the chips 8 is equal to the set spacing, the stretching is stopped; Use the second film expansion mechanism 2 to stretch the blue film, and the scanning camera 4 observes the spacing of the chips 8 in the second direction in real time. When the average spacing of the chips 8 is equal to the set spacing, the stretching is completed.

[0104] By adopting this method, the chip 8 spacing of any part on the blue film can be adjusted by cooperating with the scanning camera 4 and the pin 52, so as to reduce the error of the chip 8 spacing after the blue film is stretched, and solve the problem that the conventional stretching method cannot accurately adjust the chip 8 spacing. The chip 8 on the blue film is stretched to 96% of the maximum chip 8 spacing, providing a margin for local error adjustment. If it is greater than 96%, the margin is too small, which may cause the blue film to expand excessively. If it is less than 96%, the margin is too large. When the film is expanded later, the amount of expansion required is large, and the newly appeared error also becomes larger.

[0105] In a specific embodiment, step A also includes adjusting the angle of the chip 8 arrangement direction. The blue film is rotated by the correction disk to adjust the chip 8 arrangement direction to be consistent with the stretching direction, and then step B is performed; when adjusting the error area, the adsorption through hole 53 outside the area opens the negative pressure, and the correction through hole 54 in the area is passed with gas to make the ball 52 therein extend 1mm. Then the adsorption through hole 53 and the correction through hole 54 are restored to normal pressure to release the blue film. Since the deformation of the blue film has a certain delay, wait for 15 seconds and use the scanning camera 4 to identify the area again. If the chip 8 spacing still does not reach more than 95%, repeat the adjustment.

[0106] A Mini-LED chip film expansion device uses the above-mentioned error-correctable planar stretching film expansion device.

[0107] Example

[0108] Blue film in place: The first film expansion mechanism 1 and the second film expansion mechanism 2 are separated by a 10mm gap. The blue film to be expanded is placed on the correction plate 5 with the chip 8 facing upwards, and the chip 8 is close to the first and second pressure block groups and does not exceed the range of the correction plate 5.

[0109] Angle adjustment: Through the detection of the scanning camera 4, the deflection angle of the center row of the chip 8 is taken as the overall deflection angle, and all the adsorption holes 53 of the correction disk 5 are opened with negative pressure to suck the blue film and rotate the corresponding angle to eliminate the overall angle deviation of the blue film. All the adsorption holes 53 of the correction disk 5 are restored to normal pressure to release the blue film and then rotated in the opposite direction by a corresponding angle to complete the reset.

[0110] The first bidirectional film expansion: use the first film expansion mechanism 1 to clamp the blue film up and down, and the first roller group will roll to stretch the blue film along the first direction. The scanning camera 4 observes the spacing between adjacent chips 8 in the first direction in real time, and the spacing is set to 300μm. When the spacing between adjacent chips 8 in the first direction reaches 288μm, the first roller group stops rolling; use the second film expansion mechanism 1 to clamp the blue film up and down, and the second roller group will roll to stretch the blue film along the second direction. The scanning camera 4 observes the spacing between adjacent chips 8 in the second direction in real time, and the spacing is set to 300μm. When the spacing between adjacent chips 8 in the second direction reaches 288μm, the second roller group stops rolling.

[0111] Error correction:

[0112] The scanning camera 4 obtains the positions of all chips 8. There are several areas where the chip 8 spacing is lower than 285μm. Select one of the areas with errors. If the area is a convex polygon, the adsorption through hole 53 outside the area opens negative pressure, and the correction through hole 54 in the area is passed through gas, so that the marble 52 therein bulges 1mm, and the blue film in the area expands slightly; if the area is a concave polygon, it is divided into multiple convex polygons and the above operation is performed again; after the operation is completed, the adsorption through hole 53 and the correction through hole 54 are restored to normal pressure to release the blue film, and after waiting for 15 seconds, the scanning camera 4601 is used to identify the area. If the chip 8 spacing still does not reach more than 285μm, the adjustment is repeated; if it is consistent with the overall spacing and the spacing is between 285 and 288μm, the next area with errors is adjusted. Finally, 99% of the chip 8 spacing is adjusted to the set spacing between 285 and 288μm.

[0113] Second bidirectional film expansion: The first roller group rotates to stretch the blue film outwards, during which the scanning camera 4 observes the spacing of the chips 8 in the first direction in real time. When the average spacing of the chips 8 is 300μm, the first roller group stops rotating. The second roller group rotates to stretch the blue film outwards, during which the scanning camera 4601 observes the spacing of the chips 8 in the second direction in real time. When the average spacing of the chips 8 is 300μm, the second roller group stops rotating.

[0114] The film pressing frame 3 is fixed: all the press frame stigma 6 fall synchronously, the first film pressing frame 31 moves downward and fits tightly against the second film pressing frame 32, and the first film pressing frame 31 and the second film pressing frame 32 fix the blue film. High-pressure gas is introduced into the first through hole 61 of the press frame stigma 6, the locking arrow 7 pops out and penetrates into the locking through hole 33, the first film pressing frame 31 and the second film pressing frame 32 are locked, and the scanning camera 4 scans the positions of all chips 8 on the blue film and stores the records.

[0115] Film expansion is completed: the first film expansion mechanism 1 and the second film expansion mechanism 2 are separated into a gap up and down, the film pressing frame 3 is taken out, and the excess blue film is cut off with scissors.

[0116] Other structures and operations according to the embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0117] In the description of this specification, the description with reference to the terms "embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0118] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A planar stretching chip film expansion device capable of correcting errors, characterized in that: It includes a first film expanding mechanism, a second film expanding mechanism, a film pressing frame, a scanning camera and an error correction mechanism; The film expansion direction of the first film expansion mechanism and the film expansion direction of the second film expansion mechanism are arranged perpendicular to each other, the film pressing frame is used to fix the blue film with the chip, the error correction mechanism is used for local expansion of the blue film, and the scanning camera is used to detect the position of the chip on the blue film; The error correction mechanism includes a correction disk, a plurality of pins and a pin driving mechanism. The correction disk is provided with a plurality of adsorption through holes and a plurality of correction through holes. The adsorption through holes are evenly distributed on the correction disk. The plurality of adsorption through holes are respectively connected to an exhaust mechanism. The adsorption through holes are used to adsorb and fix the blue film on the upper surface of the correction disk when the exhaust mechanism is activated. The correction through holes are evenly distributed between the adsorption through holes. The pins are movably arranged in the correction through holes, one pin corresponds to one correction through hole, and the upward and downward movements of the plurality of pins are separate and independent. When driven by the pin driving mechanism, at least one of the pins moves upward and protrudes from the upper surface of the correction disk. The pins that move upward and protrude are used to locally expand the blue film.

2. The error-correctable planar stretching chip film expansion device according to claim 1, characterized in that: A porous ceramic is arranged in the adsorption through hole, and the porous ceramic is flush with the upper surface of the correction disk. The adsorption through hole is connected to an external air pumping mechanism through a first air pipe, and the air pumping mechanism is a negative pressure pump; The pin is arranged in the correction through hole at one end close to the upper surface of the correction disk. The pin is a cylindrical structure, and the upper end of the pin is hemispherical. The outer wall of the pin is sealed with the inner wall of the correction through hole. The upper end of the pin does not exceed the upper surface of the correction disk when it does not move upward. The other end of the correction through hole is connected to the second air pipe, and the second air pipe is connected to the pin driving mechanism. The pin driving mechanism is an external air pressure adjustment system.

3. The error-correctable planar stretching chip film expansion device according to claim 2, characterized in that: The adsorption through hole is a cylindrical through hole with a diameter of 1 mm, and the correction through hole is a cylindrical through hole with a diameter of 1.5 mm.

4. The error-correctable planar stretching chip film expansion device according to claim 1, characterized in that: The invention also comprises a rotation drive, wherein the rotation drive is used for driving the correction disk to rotate in a horizontal direction.

5. The error-correctable planar stretching chip film expansion device according to claim 1, characterized in that: The film pressing frame comprises a first film pressing frame and a second film pressing frame, wherein the first film pressing frame and the second film pressing frame are arranged one above the other, and the first film pressing frame can be buckled with the second film pressing frame, and the buckling of the first film pressing frame and the second film pressing frame is used to clamp and fix the stretched blue film; The height from the inner frame edge of the second film pressing frame to the outer frame edge gradually decreases, and a slope frame inclined outward and downward is formed on the upper surface of the second film pressing frame. A raised platform is provided on the inner frame edge of the second film pressing frame, and the raised platform is flush with the upper surface of the correction disk. The film pressing frame is square, and the side length of the film pressing frame is less than the length L2 of the second film expanding mechanism.

6. The error-correctable planar stretching chip film expansion device according to claim 5, characterized in that: It also includes a plurality of press frame column heads, wherein the press frame column heads are provided with a first through hole, a push block is provided in the first through hole, the push block is sealed with the inner wall of the first through hole, one side of the first through hole is connected to a third air pipe, the third air pipe is connected to an external first air pump, a locking arrow is installed on the side of the push block away from the third air pipe, the locking arrow is used to lock the first film pressing frame and the second film pressing frame, the first film pressing frame and the second film pressing frame are respectively provided with a plurality of locking through holes, and the first through hole matches the locking through holes; Under the control of the first air pump, the pushing block can push the locking arrow to move downward and pass through the locking through hole of the first film pressing frame and the locking through hole of the second film pressing frame in sequence.

7. The error-correctable planar stretching chip film expansion device according to claim 1, characterized in that: The first film expansion mechanism comprises a first roller group and a first pressing block group, the first roller group and the first pressing block group are arranged oppositely and parallel to the two sides of the error correction mechanism in the second direction, the first roller group is used to stretch the blue film in the first direction, and the first pressing block group is used to fix the blue film in the first direction; The second film expansion mechanism comprises a second roller group and a second pressing block group, the second roller group and the second pressing block group are arranged oppositely and parallel to the two sides of the error correction mechanism in the first direction, the second roller group is used to stretch the blue film in the second direction, and the second pressing block group is used to fix the blue film in the second direction; The first direction is perpendicular to the second direction, the second roller group and the second pressing block group have the same length, the second roller group and the second pressing block group are arranged between the first roller group and the first pressing block group, and a gap is arranged between the second roller group and the first roller group and the first pressing block group; The first roller group comprises a first upper roller and a first lower roller which are arranged opposite to each other, the first upper roller and the first lower roller are arranged opposite to each other, and the first upper roller and the first lower roller are respectively arranged on both sides of the blue film thickness direction; The first pressing block group includes a first upper pressing block and a first lower pressing block which are arranged opposite to each other. The first upper pressing block and the first lower pressing block are arranged opposite to each other, and the first upper pressing block and the first lower pressing block are respectively arranged on both sides of the blue film thickness direction; The second roller group comprises a second upper roller and a second lower roller which are arranged opposite to each other, the second upper roller and the second lower roller are arranged opposite to each other, and the second upper roller and the second lower roller are arranged on both sides of the blue film thickness direction respectively; The second pressing block group includes a second upper pressing block and a second lower pressing block which are arranged opposite to each other. The second upper pressing block and the second lower pressing block are arranged opposite to each other, and the second upper pressing block and the second lower pressing block are respectively arranged on both sides of the blue film thickness direction.

8. The error-correctable planar stretching chip film expansion device according to claim 7, characterized in that: A spacing adjustment device is provided between the first upper roller and the first lower roller. The spacing adjustment device is used to adjust the distance between the first upper roller and the first lower roller. The spacing between the first upper roller and the first lower roller is adjustable within the range of 0 to 10 mm. A spacing adjustment device is provided between the second upper roller and the second lower roller. The spacing adjustment device is used to adjust the distance between the second upper roller and the second lower roller. The spacing between the second upper roller and the second lower roller is adjustable within the range of 0 to 10 mm. The first upper roller, the first lower roller, the second upper roller, and the second lower roller have fine knurling with a module of 0.2 mm. A spacing adjustment device is provided between the first upper pressing block and the first lower pressing block. The spacing adjustment device is used to adjust the distance between the first upper pressing block and the first lower pressing block. The spacing between the first upper pressing block and the first lower pressing block is adjustable within the range of 0 to 10 mm. A spacing adjustment device is provided between the second upper pressing block and the second lower pressing block. The spacing adjustment device is used to adjust the distance between the second upper pressing block and the second lower pressing block. The spacing between the second upper pressing block and the second lower pressing block is adjustable within the range of 0 to 10 mm. The length of the first film expanding mechanism is L1, and the length of the second film expanding mechanism is L2. Define the side length of the maximum allowable square range after the chip film is expanded as L3. L3 < L2 < L1. A gap d is provided between the first film expanding mechanism and the second film expanding mechanism along the length direction of the second film expanding mechanism. L3 is less than 80 mm; L2 is 20 mm longer than the side length of the film pressing frame; L1 is greater than the side length of the unexpanded blue film; d is greater than 30 mm.

9. An error correction method for a planar stretching chip film expansion device, characterized in that: Using the planar stretching type chip film expanding device with error correction as claimed in any one of claims 1-8, the following steps are included: A. Placing the blue film and starting: Place the blue film with the chip on the correction plate, and start the scanning camera to observe the spacing of the chips on the blue film in real time. B. First two-way film expansion: Use the first film expanding mechanism to stretch the blue film until the distance between any two adjacent chips along the first direction reaches 96% of the set spacing, and use the second film expanding mechanism to stretch the blue film until the distance between any two adjacent chips along the second direction reaches 96% of the set spacing. The set spacing is the spacing between adjacent chips required for the next process. C. Error identification: Obtain the positions of all chips through the scanning camera, and judge whether the chip spacing in several areas is lower than 95% of the set spacing. If the chip spacing in this area is greater than or equal to 95% of the set spacing, mark this area as the adjusted area. If the chip spacing in this area is less than 95% of the set spacing, mark this area as the error area. Select one of the error areas and judge whether the error area is a convex polygon. If so, go to step D. If not, the error area is a concave polygon, divide it into several convex polygons and then go to step D. If the error area has reached the minimum adjustment range and cannot be divided, directly go to step D. D. Error correction: Control the pins in the correction disk corresponding to the error area to extend upward, so that the blue film in the error area is lifted up and stretched; E. Error elimination verification: Use a scanning camera to re-identify the error area after error correction. If the chip spacing in the error area still does not reach 95% and the error area is not the minimum adjustable range, return to step C to re-identify and segment; if the error area is the minimum adjustable range, return to step D to repeat the adjustment and accumulate the number of adjustments of the error area. When the accumulated number of adjustments of the error area exceeds the preset maximum number of adjustments, the adjustment of the error area is abandoned and the error area is marked as an adjusted area; until all areas are marked as adjusted areas, enter step F; F. Second bidirectional film expansion: Use the first film expansion mechanism to stretch the blue film after error elimination and verification, and the scanning camera observes the spacing of the chips in the first direction in real time. When the average spacing of the chips is equal to the set spacing, the stretching is stopped; Use the second film expansion mechanism to stretch the blue film, and the scanning camera observes the spacing of the chips in the second direction in real time. When the average spacing of the chips is equal to the set spacing, the stretching is completed.

10. A Mini-LED chip film expansion device, characterized in that: A planar stretchable chip film expansion device with correctable errors as described in any one of claims 1-8.

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