Intraocular lens growing furnace and intraocular lens furnace system comprising same

Abstract

The invention discloses an intraocular lens growing furnace and an intraocular lens furnace system comprising the intraocular lens growing furnace, and relates to the technical field of intraocular lens preparation.The intraocular lens growing furnace is characterized in that an airflow guiding device is arranged on a crystal bar cooling device main body, and airflow is guided into a crystal lifting hole in a cooling disc main body through the airflow guiding device; due to the fact that the lower flow guide cylinder is of a conical structure, after gas blown out of the gas blowing pipe passes through the upper flow guide cylinder and the lower flow guide cylinder, airflow can flow to the area of the crystal lifting hole in the cooling disc body along the outer wall of the lower flow guide cylinder, at the moment, part of the airflow can enter the crystal lifting hole, and the crystal lifting hole can be cooled. Through the arrangement of the upper guide cylinder and the lower guide cylinder, airflow flows in one direction as much as possible, acts on the area of the crystal lifting hole and enters the crystal lifting hole to take away volatile matters and the like in the crystal lifting hole, and the crystal lifting device has the characteristics of simple structure, good use effect and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of artificial crystal preparation, and in particular to an artificial crystal growth furnace and an artificial crystal furnace system comprising the artificial crystal growth furnace. Background Art

[0002] Driven by the national macro-strategic policy of "carbon peak and carbon neutrality", the photovoltaic industry is becoming the "new favorite" of the new energy industry. In this context, with the development of the photovoltaic industry, the global demand for multi-crystalline / monocrystalline silicon has grown rapidly, and the market is in short supply. Affected by this, the price of multi-crystalline / monocrystalline silicon, which is the main raw material for solar cells, has risen rapidly, and many domestic companies are expanding production.

[0003] Taking multi-crystalline / single-crystalline silicon as an example, the amount of silicon core used in the entire production process of multi-crystalline / single-crystalline silicon is very large. Most of the existing silicon cores are prepared by zone melting (mainly through high-frequency coils and seed crystal chucks to complete the pulling process). Its working principle is as follows: when working, high-frequency current is passed through the high-frequency coil, and high-frequency induction heating is performed, so that the high-frequency coil generates current to generate magnetic lines of force on the raw material rod; the upper end of the heated raw material rod forms a melting zone, and then the seed crystal is inserted into the melting zone; when the end of the seed crystal is integrated with the melting zone of the raw material rod, the seed crystal is slowly lifted, and the molten raw material melt will rise with the seed crystal to form a new columnar crystal. This new columnar crystal is the finished product of the silicon core.

[0004] In the actual production process, multi-crystalline / single-crystalline silicon production enterprises have found that it is very cumbersome to deal with the residual materials in the silicon core preparation process, the silicon core that is accidentally broken, and the fragments generated in the process stages of reduction, cutting, grinding and polishing. In order to save trouble, many companies directly discard the above-mentioned residual materials, broken cores, and fragments or pile them in warehouses for a long time. Some companies recycle the above-mentioned fragments, pull them into silicon rods through a vertical pulling furnace, and then use the silicon rods to pull them into silicon cores. This not only increases the cost of drawing silicon cores, but also causes a large waste of resources. Some companies also recycle the above-mentioned fragments, pull them into silicon rods through a vertical pulling furnace, and then cut the silicon rods into multiple columnar silicon rods with a size of 8mm*8mm or 10mm*10mm through a multi-wire cutting machine. This not only increases the production cost of the columnar silicon rods, but also may introduce more impurities during the cutting process, which reduces the product quality and causes a large waste of resources. So how to reuse the broken silicon materials has become one of the long-term technical demands of technicians in this field.

[0005] In order to overcome the above technical problems, the applicant submitted a PCT patent application on March 21, 2023. The patent name is Crystal Cooling Device and Artificial Crystal Preparation Equipment for Simultaneously Pulling Multiple Crystals, and the international application number is PCT / CN2023 / 082901. The patent application discloses a crystal cooling device for simultaneously pulling multiple crystals. In the entire device, the crystal cooling plate is one of the key components. When the crystal cooling plate is actually used, it is placed in a closed furnace chamber and is located above the crucible. When the crystal rod is pulled, a protective gas is introduced into the furnace chamber, and the protective gas is The protective gas is constantly circulating (i.e., an air inlet and an exhaust port are provided on the furnace chamber, the air inlet is constantly taking in air, and the exhaust port is constantly exhausting air), and the protective gas flows in the furnace chamber to bring the volatiles in the furnace chamber out of the furnace chamber through the exhaust port, while trying to prevent the volatiles from adhering to the newly drawn crystal rod, crystal cooling plate and crystal pulling hole. Once the volatiles adhere to the crystal rod, crystal cooling plate and crystal pulling hole and accumulate to a certain thickness, they will fall onto the melt surface in the crucible and affect the drawing of the crystal rod. When the volatiles adhere to the crystal pulling hole, it may cause the drawn crystal rod to get stuck in severe cases. The existing crystal cooling plate is connected to the lower flange through the lower water inlet pipe and the water outlet pipe, and the lower water inlet pipe and the water outlet pipe are spaced apart, with a gap between them. In actual applications, it is found that Figure 1 As shown, the airflow formed by the protective gas will enter the middle hole in the middle of the crystal cooling plate from the gap between the water inlet pipe and the water outlet pipe. When the airflow enters the middle hole, the airflow formed by the protective gas at the crystal cooling plate will be turbulent. Once the airflow is turbulent, volatiles will fly around in the furnace, and the flying volatiles cannot be discharged through the exhaust port. The probability of the flying volatiles adhering to the crystal rod, the crystal cooling plate and the crystal pulling hole will increase. In addition, when the crystal rod cooling device with an existing structure is in use, when multiple circles of crystal pulling holes are set on the cooling plate body, the airflow in the crystal pulling holes located in the inner circle cannot enter or the amount of airflow entering is small (for example, Figure 1 As shown in the figure), this will cause volatiles to adhere to the crystal rod and the crystal pulling hole. Therefore, how to prevent volatiles from entering the crystal pulling hole has become a long-term technical demand of technicians in this field. Summary of the invention

[0006] In order to solve the above problems, the present application provides an artificial crystal growth furnace. The present invention arranges an airflow guide device on the main body of the crystal rod cooling device, and guides the airflow to the crystal pulling hole on the cooling plate main body through the airflow guide device, thereby effectively preventing volatiles from adhering to the crystal rod and the crystal pulling hole.

[0007] In order to achieve the purpose of the above invention, the present invention adopts the following technical solutions: An artificial crystal growth furnace, the artificial crystal growth furnace comprises: a furnace body, the furnace body comprises an auxiliary furnace chamber, a main furnace chamber arranged below the auxiliary furnace chamber, and a valve arranged between the auxiliary furnace chamber and the main furnace chamber, the valve being capable of dividing the auxiliary furnace chamber and the main furnace chamber into two independent cavities; a crystal rod cooling device body, the crystal rod cooling device body being arranged in the furnace body and provided with at least one crystal pulling hole for the pulled crystal to pass through; a lifting device, the lifting device being arranged in the auxiliary furnace chamber and connected to the crystal rod cooling device body and driving the crystal rod cooling device body to move up and down in the auxiliary furnace chamber and the main furnace chamber, and an airflow guiding device, the airflow guiding device being arranged on the crystal rod cooling device body.

[0008] The artificial crystal growth furnace described herein, the airflow guide device comprises a lower guide tube, an upper guide tube and an air blowing pipe, the upper end of the upper guide tube is connected to the bottom of the lower flange in the main body of the crystal rod cooling device, the inner hole in the middle of the upper guide tube corresponds to the inner hole in the middle of the lower flange, a lower guide tube is arranged below the upper guide tube, the lower guide tube is arranged above the cooling plate main body in the main body of the crystal rod cooling device, at least one air blowing pipe is arranged above the upper guide tube, the air inlet end of the air blowing pipe is connected to the air source, and the air blowing end of the air blowing pipe corresponds to the inner hole in the middle of the upper guide tube.

[0009] In the artificial crystal growth furnace, at least one circle of airflow baffle rings is provided on the cooling plate body outside the lower guide tube, and each circle of airflow baffle rings is respectively arranged between two circles of crystal pulling holes.

[0010] In the artificial crystal growth furnace, the lower guide tube has a conical shape.

[0011] In the artificial crystal growth furnace, the outer edge surface of the lower guide tube is provided with a water pipe through hole which is recessed inwards.

[0012] In the artificial crystal growth furnace, the air blowing pipe is connected to a lifting arm in a lifting device and rises and falls with the lifting arm.

[0013] In the artificial crystal growth furnace, an inwardly concave groove is provided on the side wall of the lifting arm, a cover plate is provided at the open end of the groove, an air inlet is provided above the cover plate, and an air outlet is provided below the cover plate, and the air outlet is connected to the air blowing pipe.

[0014] In the artificial crystal growth furnace, the outer side of the air outlet is connected to the air blowing pipe connection seat, the air blowing pipe connection seat is connected to the air blowing pipe, and the air blowing pipe is arranged as a broken line structure.

[0015] In the artificial crystal growth furnace, an air inlet pipe is arranged on the outer side of the lifting arm, the upper end of the air inlet pipe is connected to the air source, and the lower end of the air inlet pipe is connected to the air blowing pipe.

[0016] In the artificial crystal growth furnace, an air inlet pipe is provided in the cooling medium channel in the middle of the lifting arm, the upper end of the air inlet pipe passes through the side wall of the lifting arm to connect to the air source, and the lower end of the air inlet pipe passes through the side wall of the lifting arm to connect to the blowing pipe.

[0017] An artificial crystal furnace system comprises the artificial crystal growth furnace according to any one of claims 1 to 10.

[0018] Due to the adoption of the above technical solution, the present invention has the following beneficial effects: According to the present application, an airflow guide device is provided on the main body of the crystal rod cooling device, and the airflow is guided to the crystal pulling hole on the cooling plate main body by the airflow guide device, thereby effectively preventing volatiles from adhering to the crystal rod and the crystal pulling hole.

[0019] Furthermore, according to the present application, during the drawing process, since the lower guide tube is a conical structure, the gas blown out of the air pipe will flow along the outer wall of the lower guide tube to the area of ​​the crystal pulling hole on the cooling plate body after passing through the upper guide tube and the lower guide tube. At this time, part of the airflow will enter the crystal pulling hole. Through the arrangement of the upper guide tube and the lower guide tube, the airflow can be made to flow in one direction as much as possible, so that the airflow acts on the area of ​​the crystal pulling hole, and the airflow enters the crystal pulling hole to take away the volatiles in the crystal pulling hole.

[0020] Moreover, according to the present application, the airflow can be better guided into the crystal pulling hole by the provision of an airflow baffle ring.

[0021] The invention has the characteristics of simple structure, good use effect and the like, and is suitable for wide-scale promotion and application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the flow direction of the airflow of the existing crystal cooling plate; Figure 2 It is a schematic diagram of the structure of the present invention; Figure 3 It is a schematic diagram of the three-dimensional structure of the upper guide tube in the present invention; Figure 4 It is a first structural schematic diagram of the lower guide tube in the present invention; Figure 5 is a second structural schematic diagram of the lower guide tube in the present invention; Figure 6 It is a schematic diagram of the top view of the cooling plate body in the present invention; Figure 7 is a schematic structural diagram of a crystal rod cooling device according to an embodiment of the present invention; Figure 8 is an application schematic diagram of a crystal rod cooling device according to an embodiment of the present invention; Fig. 9 is a schematic structural diagram of a lifting arm in an embodiment of the present invention; Fig.10 is a schematic structural diagram of the lifting arm from another perspective in an embodiment of the present invention; Fig.11 It is a schematic diagram of the airflow direction of the present invention; In the figure: 1. upper water inlet pipe; 2. transition chamber; 3. crystal perforation; 4. lower flange; 5. water outlet pipe; 6. lower water inlet pipe; 7. middle hole; 8. diverter plate; 9. crystal pulling hole; 10. cooling plate body; 11. cavity; 12. air flow baffle ring; 13. lower guide tube; 14. upper guide tube; 15. air blowing pipe; 16. water pipe perforation; 17. cooling medium inlet; 18. cooling medium outlet; 19. crystal rod cooling device body; 20. auxiliary furnace chamber; 21. lifting device; 22. lifting arm; 23. crystal rod; 24. valve; 25. main furnace chamber; 26. heater; 27. cooling medium channel; 28. air inlet; 29. ​​groove; 30. cover plate; 31. air outlet; 32. air blowing pipe connecting seat. Implementation

[0023] The present application is described in detail below by way of examples, but it is not intended that there is any adverse limitation to the present application. The present application has been described in detail herein, and its specific embodiments are also disclosed therein. It will be apparent to those skilled in the art that various changes and modifications can be made to the specific embodiments of the present application without departing from the spirit and scope of the present application.

[0024] In the description of the present invention, it should be understood that the terms "center", "lateral", "length", "width", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "side" and the like indicate positions or positional relationships based on the attached Figure 1 The orientation or positional relationship shown is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] The innovation of the present invention is mainly to set an air flow guide device on the crystal rod cooling device body 19, and guide the air flow into each crystal pulling hole 9 through the air flow guide device, so that the air flow can flow in one direction as much as possible. When the air flow passes through the crystal pulling hole 9, the pressure of the air flow blocks volatiles from entering the crystal pulling hole 9, thereby avoiding the occurrence of volatiles entering the crystal pulling hole 9, thereby avoiding the probability of volatiles adhering to the crystal rod and the crystal pulling hole, etc., thereby ensuring the smooth pulling of the crystal rod.

[0027] The present invention discloses an artificial crystal growth furnace, which comprises: a furnace body, which comprises an auxiliary furnace chamber 20, a main furnace chamber 25 arranged below the auxiliary furnace chamber 20, and a valve 24 arranged between the auxiliary furnace chamber 20 and the main furnace chamber 25, wherein the valve 24 can divide the auxiliary furnace chamber 20 and the main furnace chamber 25 into two independent cavities; a crystal rod cooling device body 19, which is arranged in the furnace body and is provided with at least one crystal pulling hole 9 for the pulled crystal to pass through; a lifting device 21, which is arranged in the auxiliary furnace chamber 20 and is connected to the crystal rod cooling device body 19 and drives the crystal rod cooling device body 19 to move up and down in the auxiliary furnace chamber 20 and the main furnace chamber 25, and an airflow guide device, which is arranged on the crystal rod cooling device body 19.

[0028] According to the present application, an airflow guide device is provided on the crystal rod cooling device body 19, and the airflow is guided to the crystal pulling hole 9 on the cooling plate body 10 by the airflow guide device, thereby effectively preventing volatiles from adhering to the crystal rod and the crystal pulling hole 9.

[0029] During the drawing process, the gas blown out of the blowing pipe passes through the upper guide tube and the lower guide tube, and then flows along the outer wall of the lower guide tube to the area of ​​the crystal pulling hole on the cooling plate body. At this time, part of the airflow will enter the crystal pulling hole. Through the arrangement of the upper guide tube and the lower guide tube, the airflow can be made to flow in one direction as much as possible, so that the airflow acts on the area of ​​the crystal pulling hole, and the airflow enters the crystal pulling hole to prevent volatiles from entering the crystal pulling hole.

[0030] Furthermore, according to the present application, during the drawing process, since the lower guide tube 15 is a conical structure, the gas blown out of the blowing pipe 15 passes through the upper guide tube 14 and the lower guide tube 13, and the airflow will flow along the outer wall of the lower guide tube 13 to the area of ​​the crystal pulling hole on the cooling plate main body 10. At this time, part of the airflow will enter the crystal pulling hole 9. Through the arrangement of the upper guide tube 14 and the lower guide tube 13, the airflow can flow in one direction as much as possible, so that the airflow acts on the area of ​​the crystal pulling hole, and the airflow enters the crystal pulling hole 9 to take away the volatiles in the crystal pulling hole 9.

[0031] Moreover, according to the present application, the airflow blocking ring 12 is provided to better guide the airflow into the crystal pulling hole 9 .

[0032] Below, the specific structure of the preferred embodiment of the present application will be described in detail based on the accompanying drawings and various embodiments.

[0033] Attached Figures 2 to 11 An artificial crystal growth furnace is shown, in which the airflow guide device includes a lower guide tube 13, an upper guide tube 14 and an air blowing pipe 15, the upper end of the upper guide tube 14 is connected to the bottom of the lower flange 4 in the main body 19 of the crystal rod cooling device, the inner hole in the middle of the upper guide tube 14 corresponds to the inner hole in the middle of the lower flange 4, the lower guide tube 13 is arranged below the upper guide tube 14, the lower guide tube 13 is arranged above the cooling plate main body 10 in the main body 19 of the crystal rod cooling device, the upper end of the lower guide tube 13 is located below the inner hole in the middle of the upper guide tube 14, at least one air blowing pipe 15 is arranged above the upper guide tube 14, the air inlet end of the air blowing pipe 15 is connected to the air source, and the air blowing end of the air blowing pipe 15 corresponds to the inner hole in the middle of the upper guide tube 14.

[0034] During implementation, the height of the upper guide tube 14 is greater than the height of the lower guide tube 13, that is, the lower end surface of the upper guide tube 14 is located at the lower part of the lower water inlet pipe 6 in the main body 19 of the crystal rod cooling device. Figure 2 shown.

[0035] Further, if Figure 2 As shown, in order to better allow the airflow to enter the crystal pulling hole 9, at least one circle of airflow blocking ring 12 is provided on the cooling plate body 10 outside the lower guide tube 13, and each circle of airflow blocking ring 12 is respectively arranged between two circles of crystal pulling holes 9.

[0036] In implementation, when the crystal pulling holes 9 are arranged in two circles, an airflow blocking ring 12 is arranged on the cooling plate body 10 between the two circles of crystal pulling holes 9. Figure 2 shown.

[0037] When the crystal pulling holes 9 are arranged in multiple circles, air flow baffle rings 12 are respectively provided on the cooling plate main body 10 between every two circles of crystal pulling holes 9, wherein the height and diameter of the air flow baffle rings 12 increase successively from the inside to the outside, that is, the height of the air flow baffle ring 12 located in the outer circle is the highest, and the height of the air flow baffle ring 12 located in the innermost circle is the lowest.

[0038] Further, if Figure 3 As shown, the upper guide tube 14 is a hollow cylindrical structure.

[0039] Further, if Figure 2 , 5As shown, the lower guide tube 13 has a conical shape. In implementation, in order to make the outer edge surface of the lower end of the lower guide tube 13 as close as possible to the innermost crystal pulling hole 9 on the cooling plate body 10, an inwardly concave water pipe perforation 16 is provided on the outer edge surface of the lower guide tube 13, so that the water outlet pipe 5 and the lower water inlet pipe 6 are located in the water pipe perforation 16. When the lower guide tube 13 is set to a conical structure, the upper end of the conical structure is sealed, which can prevent the airflow from entering the middle hole 7 in the middle of the cooling plate body 10.

[0040] Further, if Figure 4 As shown, when the outer shape of the lower guide tube 13 is set to be conical, the upper end of the lower guide tube 13 is provided with a platform.

[0041] Further, if Figure 8 As shown, the air blowing pipe 15 is connected to the lifting arm 22 in the lifting device, and rises and falls with the lifting arm 22.

[0042] When implementing it, Fig. 9 , 10 As shown, the first structure of the air blowing pipe 15 connecting to the lifting arm 22 is that a groove 29 recessed inwardly is provided on the side wall of the lifting arm 22, a cover plate 30 is provided at the open end of the groove 29, an air intake channel is formed by the groove 29 and the cover plate 30, an air inlet 28 is provided above the cover plate 30, the air inlet 28 is connected to the air source, and an air outlet 31 is provided below the cover plate 30, and the air outlet 31 is connected to the air blowing pipe 15.

[0043] Further, if Fig. 9 , 10 As shown, the outer side of the air outlet 31 is connected to the air blowing pipe connecting seat 32, and the air blowing pipe connecting seat 32 is connected to the air blowing pipe 15. The air blowing pipe 15 is set as a zigzag structure. The zigzag structure is set to enable the air blowing pipe 15 to turn so that the air outlet of the air blowing pipe 15 corresponds to the upper guide tube 14.

[0044] Furthermore, in a specific implementation, the second structure of the air blowing pipe 15 connected to the lifting arm 22 is that an air intake pipe is provided on the outside of the lifting arm 22, that is, the air intake pipe is an independent pipe, and then the pipe is fixed to the outer wall of the lifting arm 22, and the fixing form can be welding, clamp fixing, binding, etc.; the upper end of the air intake pipe is connected to the air source, and the lower end of the air intake pipe is connected to the air blowing pipe 15.

[0045] Furthermore, in a specific implementation, the third structure of the air blowing pipe 15 connected to the lifting arm 22 is that an air intake pipe is provided in the cooling medium channel 27 in the middle of the lifting arm 22, the upper end of the air intake pipe passes through the side wall of the lifting arm 22 to connect to the air source, and the lower end of the air intake pipe passes through the side wall of the lifting arm 22 to connect to the air blowing pipe 15.

[0046] Furthermore, during implementation, the air blowing pipe 15 may not be connected to the lifting arm 22, and the air inlet end of the air blowing pipe 15 may be connected to the furnace wall of the furnace body and connected to the air source; or the air inlet end of the air blowing pipe 15 may be connected to the top of the auxiliary furnace chamber 20 and connected to the air source; or the air inlet end of the air blowing pipe 15 may be connected to the bottom surface of the main furnace chamber 25 and connected to the air source. During implementation, no matter which component the air inlet end of the air blowing pipe 15 is connected to, it must be ensured that the air blowing end of the air blowing pipe 15 corresponds to the inner hole in the middle of the upper guide tube 14 and blows air into the upper guide tube 14.

[0047] Further, if Figure 2 As shown, the lower flange 4 is provided with a plurality of crystal through holes 3, the number and positions of the crystal through holes 3 should correspond one to one with the number and positions of the crystal pulling holes 9 on the cooling plate body 10, a through middle hole is provided in the middle of the upper part of the lower flange 4, at least two transition cavities 2 are provided at intervals on the periphery of the middle hole, a water inlet hole is provided on the upper part of each transition cavity 2, a cooling medium outlet is provided on the lower part of each transition cavity, and a water outlet pipe through hole is provided on the lower flange 4 between every two transition cavities 2.

[0048] Further, if Figure 6 As shown, at least two cooling medium inlets 17 and cooling medium outlets 18 are respectively provided on the cooling disk body 10, a cooling medium outlet 18 is respectively provided between every two cooling medium inlets 17, a diverter plate 8 is respectively provided in the cavity 11 between the cooling medium inlet 17 and the cooling medium outlet 18, and a crystal pulling hole 9 is provided on the cooling disk body 10 outside the cooling medium inlet 17 and the cooling medium outlet 18.

[0049] When in use, the cooling medium enters the transition cavity 2 in the lower flange 4 through the upper water inlet pipe 1, and then enters the lower water inlet pipe 6 through the transition cavity 2. Then, the cooling medium enters the cavity 11 on the cooling disk body 10 through the lower water inlet pipe 6, and the cooling medium entering the cavity 11 is guided by the diverter plate 8, and the cooling medium is guided to the left and right sides of the cooling medium inlet 17 through the diverter plate 8. Since the cooling medium inlet 17 and the cooling medium outlet 18 are cross-arranged (that is, the cooling medium outlet 18 is respectively arranged between every two cooling medium inlets 17), the cooling medium enters the adjacent cooling medium outlets 18 at this time, and then enters the water outlet 5 through the cooling medium outlet 18.

[0050] During implementation, the functions of the lower water inlet pipe 6 and the water outlet pipe 5 can be used interchangeably, for example, the lower water inlet pipe 6 can be used as a water inlet, and can also be used as a water outlet.

[0051] Furthermore, a heat preservation plate is provided under the cooling plate body 10. By providing a heat preservation plate under the cooling plate body 10, the surface of the cooling plate body 10 is kept warm by the heat preservation plate, which effectively prevents volatiles from adhering to the lower surface and side walls of the crystal cooling mechanism due to condensation. At the same time, due to the heat preservation effect of the heat preservation plate, the cooling effect of the cooling medium in the cooling plate body 10 is fully applied to the inner wall of the pulling hole on the crystal, thereby improving the cooling effect on the pulled crystal, realizing rapid crystallization of the crystal, and achieving the purpose of increasing the crystal pulling speed.

[0052] In the specific implementation of the present invention, the structure of the crystal rod cooling device body 19 is as follows Figure 7 As shown, the lower water inlet pipe 6 and the water outlet pipe 5 are respectively connected to the lower flange 4, and an upper flange is arranged above the lower flange 4, and the upper flange includes an upper disc, a middle disc and a lower disc. The upper disc, the middle disc and the lower disc are stacked to form a flange body. A middle hole penetrating the flange body is arranged at the center of the flange body, a hollow water return cavity is arranged at the upper part of the flange body, and a hollow water inlet cavity is arranged at the lower part of the flange body. A connecting pipe penetrating to the water inlet cavity is arranged on the upper part of the flange body, and the connecting pipe forms a main water inlet. A main water outlet penetrating to the water return cavity is arranged on the upper part of the flange body, and a water return transition pipe penetrating to the water return cavity is arranged below the flange body. A crystal perforation penetrating the flange body is arranged on the outer periphery of the middle hole, and the crystal perforation is arranged corresponding to the first lifting hole. A water outlet penetrating to the water inlet cavity is arranged below the flange body, and the water outlet is connected to the water inlet of the cooling medium channel, and the water outlet of the cooling medium channel is connected to the water return transition pipe.

[0053] Furthermore, during implementation, a transition ring may be provided below the flange body, and a middle hole may be provided in the middle of the transition ring. A crystal perforation, a water outlet, and a water return port may be provided on the transition ring. During implementation, the top of the transition ring may be connected to the flange body by bolts, and the bottom of the transition ring may be fixedly connected to the connecting tube and the inner connecting tube, so that the connecting tube and the inner connecting tube may be prevented from being directly connected to the flange body, and a movable connection may be achieved between the flange body, the connecting tube, and the inner connecting tube. When the flange body or the connecting tube and the inner connecting tube fail and need to be replaced, they may be replaced separately. In order to improve the sealing of the cooling medium, sealing rings may be provided at the water outlet and the water return port, respectively. During implementation, the sealing ring may be provided on the transition ring or on the flange body.

[0054] Further, in implementation, a connecting tube and an inner connecting tube are respectively arranged between the flange body and the lower flange 4. The crystal cooling tube is arranged in the cavity between the connecting tube and the inner connecting tube, the upper end of the crystal cooling tube is connected to the crystal upper perforation arranged on the flange body, and the lower end of the crystal cooling tube is connected to the crystal perforation 3 arranged on the lower flange 4. The cavity between the inner edge surface of the connecting tube and the lower end surface of the upper flange, the upper end surface of the lower flange 4, and the outer edge surface of the inner connecting tube forms a cooling medium channel. The main water outlet and the main water inlet respectively form the inlet and outlet of the cooling medium channel.

[0055] Furthermore, in order to make the cooling medium in the cooling medium channel flow smoothly and achieve a better cooling effect, a guide plate is arranged in the cooling medium channel. By setting the guide plate, the cooling medium can be forced to flow in a predetermined direction, thereby achieving a more uniform cooling effect.

[0056] Further, a cooling plate body 10 is provided below the lower flange 4. A cavity 11 is provided in the cooling plate body 10, and a crystal pulling hole 9 corresponding to the crystal through hole 3 and a cooling medium inlet 17 and a cooling medium outlet 18 respectively connected to the cavity 11 are provided on the cooling plate body 10. The cooling medium inlet 17 is connected to the lower end of the lower water inlet pipe 6, and the upper end of the lower water inlet pipe 6 is connected to the lower side of the lower flange 4. The cooling medium outlet 18 is connected to the lower end of the water outlet pipe 5, and the upper end of the water outlet pipe 5 passes through the lower flange 4 and is connected to the cooling medium channel on the flange plate body.

[0057] A lower guide tube 13 is arranged on the cooling plate body 10 inside the lower water inlet pipe 6 and the water outlet pipe 5, and an upper guide tube 14 is arranged below the lower flange 4 inside the lower water inlet pipe 6 and the water outlet pipe 5. The arrangement of the lower guide tube 13 and the upper guide tube 14 can prevent the airflow from entering the middle part of the cooling plate body 10, and can allow the airflow to enter each crystal pulling hole 9.

[0058] When implementing, Figure 8 As shown, the structure of the lifting device 21 is that the lifting device 21 includes at least one lifting arm 22 connected to the crystal rod cooling device body 19 and a lifter for driving the lifting arm 22 to move up and down.

[0059] Furthermore, the lifting device 21 is provided with a cooling medium channel 27, and the crystal rod cooling device body 19 is provided with a cooling channel for cooling medium flow, and the cooling medium channel 27 is in fluid communication with the cooling channel.

[0060] Furthermore, the lifting arm 22 is configured as a straight line structure or a broken line structure.

[0061] Furthermore, the number of the lifting arms 22 is two.

[0062] Furthermore, the cooling medium channel 27 is disposed on a side wall of the lifting arm 22 or in a hollow structure of the lifting arm 22 .

[0063] Furthermore, the lifting arm 22 is configured as a zigzag structure, and at least one linear groove penetrating to the inner wall of the auxiliary furnace chamber 20 is provided on the outer edge surface of the auxiliary furnace chamber 20, and a cover body is provided outside the linear groove and on the outer edge surface of the auxiliary furnace chamber 20, and the zigzag segment of the lifting arm 22 moves up and down in the linear groove.

[0064] Furthermore, the auxiliary furnace chamber 20 is configured to have at least one lifting arm cavity on the outer edge surface of the auxiliary furnace chamber 20, and the inner cavity of the lifting arm cavity is integrated with the inner cavity of the auxiliary furnace chamber 20, and the lifting arm 22 is configured to be able to move up and down in the cavity formed by the inner cavity of the lifting arm cavity and the inner cavity of the auxiliary furnace chamber 20.

[0065] Furthermore, the lifting arm 22 is configured as a linear structure, and the upper end of the lifting arm 22 passes through the top of the auxiliary furnace chamber 20 to connect with the lifter.

[0066] Furthermore, the lifter 22 includes a hydraulic cylinder, a pneumatic cylinder, an electric push rod, a lead screw lifter and a flexible shaft lifter.

[0067] Furthermore, the lifter includes a lifting block, a power source, a support frame, a guide column, a screw and a nut, wherein the support frame is arranged on the outside of the auxiliary furnace chamber 20, and two parallel guide columns are provided on the support frame, and the lifting block is provided on the two guide columns, and a nut is provided on the lifting block, and the nut is sleeved on the screw, and the upper and lower ends of the screw are respectively arranged at the upper and lower ends of the support frame, the screw is connected to the power source, and the lifting block is connected to the lifting arm 22.

[0068] Furthermore, the replacement structure of the lifter is that the lifter includes a lifting block, a power source, a support frame, a guide column, a flexible shaft lifter and a flexible shaft, the support frame is arranged on the outer side of the auxiliary furnace chamber 20, two parallel guide columns are arranged on the support frame, the lifting block is arranged on the two guide columns, a flexible shaft is arranged on the lifting block between the two guide columns, the flexible shaft is connected to the flexible shaft lifter arranged on the support frame, the flexible shaft lifter is externally connected to a power source, and the lifting block is connected to the lifting arm 22.

[0069] Furthermore, the guide column includes a linear guide rail, a linear bearing, and a guide light bar.

[0070] In the specific implementation of this application, taking the drawing of silicon material as an example, Figure 8As shown, a crucible support seat is provided in the main furnace chamber 25, and a crucible is provided on the crucible support seat. An isolation sleeve is provided in the crucible, and a heater 26 is provided on the periphery of the crucible. The main body 19 of the crystal rod cooling device is arranged above the crucible through a lifting device 21. An auxiliary furnace chamber 20 is provided above the main furnace chamber 25, and a gate valve is provided between the auxiliary furnace chamber 20 and the main furnace chamber 25. An upper shaft is provided in the middle of the top of the auxiliary furnace chamber 20. The lower end of the upper shaft is connected to the seed crystal, and the upper shaft drives the seed crystal to move up and down. When in use, when the heater 26 heats the silicon material in the crucible, the power source is started at this time, and the main body 19 of the crystal rod cooling device is driven to rise through the lifter and the lifting arm, so that the main body 19 of the crystal rod cooling device is separated from the crucible. After the main body 19 of the crystal rod cooling device is separated from the crucible, the heater 26 heats the silicon material in the crucible, which can prevent the main body 19 of the crystal rod cooling device from absorbing the heat during heating, and improve the heating speed of the silicon material by the heater 26. When the silicon material in the crucible melts, the upper shaft drives the seed crystal to descend, and the lifting device 21 drives the crystal rod cooling device body 19 to descend to a predetermined position. When the lower end of the seed crystal contacts the dissolved silicon liquid and the lower end of the seed crystal melts, the upper shaft drives the seed crystal to move upward, and the silicon liquid rises with the seed crystal. When the silicon liquid rises and reaches the crystal rod cooling device body 19, the temperature of the silicon liquid gradually decreases and begins to crystallize. At this time, the newly formed columnar crystal is the desired crystal rod 23. The crystal rod 23 can be a single crystal rod with a large diameter or a silicon core with a small diameter. During pulling, since the volatiles in the silicon material will float into the furnace chamber, at this time, air is blown toward the middle of the crystal rod cooling device body 19 through the air blowing pipe 15, and the gas blown out of the air blowing pipe 15 will pass through the upper guide tube 14 and the lower guide tube 13 and then enter each crystal pulling hole 9 on the cooling disk body 10 in the crystal rod cooling device body 19. At this time, the airflow in each crystal pulling hole 9 will block the volatiles from entering the crystal pulling hole 9 (the air pressure formed by the airflow will compress the volatiles and prevent the volatiles from entering the crystal pulling hole 9), and avoid the volatiles from entering the crystal pulling hole 9 as much as possible. At this time, the airflow blocking ring 12 arranged on the cooling disk body 10 can block the airflow from entering the crystal pulling hole 9, so that more airflow can enter the crystal pulling hole 9. The schematic diagram of the airflow direction of the present invention is shown in FIG. Fig.11 As shown; During the drawing process, when volatiles adhere to the main body 19 of the crystal rod cooling device to a certain extent, the attached materials need to be cleaned. When it is necessary to clean the volatiles, the main body 19 of the crystal rod cooling device is lifted into the auxiliary furnace chamber 20 by the lifter and the lifting arm 22 without stopping the furnace, and then the gate valve is closed to isolate the main furnace chamber 25 from the auxiliary furnace chamber 20, and then the furnace door on the auxiliary furnace chamber 20 is opened to clean the main body 19 of the crystal rod cooling device. After cleaning, the furnace door is closed, the auxiliary furnace chamber 20 is evacuated, and then the gate valve is opened, and the main body 19 of the crystal rod cooling device is lowered into the main furnace chamber 25 by the lifter and the lifting arm 22, and hovers above the crucible, and then the drawing of the crystal rod 23 is started. This effectively improves the yield rate and drawing efficiency of the crystal rod 23.

[0071] The present application is mainly applied to a silicon core furnace for drawing silicon cores using broken silicon materials.

[0072] An artificial crystal furnace system comprises the artificial crystal growth furnace according to any one of claims 1 to 10.

[0073] It should be noted that the applicant submitted a PCT patent application on March 21, 2023 for the specific structure of the crystal rod cooling device main body 19 involved in the present invention. The patent name is Crystal Cooling Device and Artificial Crystal Preparation Equipment for Simultaneously Pulling Multiple Crystals, and the international application number is PCT / CN2023 / 082901.

[0074] Regarding the specific structure of the lifting device involved, the applicant has also submitted a PCT patent application on March 21, 2023. The patent name is Artificial Crystal Furnace and Artificial Crystal Furnace System Including an Artificial Crystal Furnace, and the international application number is PCT / CN2023 / 082895.

[0075] Therefore, the present application will not reiterate the technical solutions of the crystal rod cooling device main body 19 and the lifting device 21 involved in the above two patent applications. For details, please refer to the above two patent applications.

[0076] The above description is only the preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the above embodiments of the present invention can be combined with each other, and the present invention can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An artificial crystal growth furnace, characterized in that: The artificial crystal growth furnace comprises: a furnace body, the furnace body comprising an auxiliary furnace chamber (20), a main furnace chamber (25) arranged below the auxiliary furnace chamber (20), and a valve (24) arranged between the auxiliary furnace chamber (20) and the main furnace chamber (25), the valve (24) being capable of dividing the auxiliary furnace chamber (20) and the main furnace chamber (25) into two independent cavities; a crystal rod cooling device body (19), the crystal rod cooling device body (19) being arranged in the furnace body and being provided with at least one crystal pulling hole (9) for the pulled crystal to pass through; a lifting device (21), the lifting device (21) being arranged in the auxiliary furnace chamber (20), being connected to the crystal rod cooling device body (19) and driving the crystal rod cooling device body (19) to move up and down in the auxiliary furnace chamber (20) and the main furnace chamber (25), and an airflow guiding device, the airflow guiding device being arranged on the crystal rod cooling device body (19).

2. The artificial crystal growth furnace according to claim 1, characterized in that: The airflow guide device comprises a lower guide tube (13), an upper guide tube (14) and an air blowing pipe (15); the upper end of the upper guide tube (14) is connected to the lower side of the lower flange (4) in the main body (19) of the crystal rod cooling device; the inner hole in the middle of the upper guide tube (14) corresponds to the inner hole in the middle of the lower flange (4); the lower guide tube (13) is arranged below the upper guide tube (14); the lower guide tube (13) is arranged above the cooling plate main body (10) in the main body (19) of the crystal rod cooling device; at least one air blowing pipe (15) is arranged above the upper guide tube (14); the air inlet end of the air blowing pipe (15) is connected to an air source; the air blowing end of the air blowing pipe (15) corresponds to the inner hole in the middle of the upper guide tube (14).

3. The artificial crystal growth furnace according to claim 2, characterized in that: At least one circle of airflow baffle rings (12) is provided on the cooling plate body (10) outside the lower guide tube (13), and each circle of airflow baffle rings (12) is respectively arranged between two circles of crystal pulling holes (9).

4. The artificial crystal growth furnace according to claim 2, characterized in that: The lower guide tube (13) has a conical shape.

5. The artificial crystal growth furnace according to claim 4, characterized in that: The outer edge surface of the lower guide tube (13) is provided with a water pipe through hole (16) which is recessed inwards.

6. The artificial crystal growth furnace according to claim 2, characterized in that: The air blowing pipe (15) is connected to a lifting arm (22) in the lifting device, and rises and falls along with the lifting arm (22).

7. The artificial crystal growth furnace according to claim 6, characterized in that: An inwardly recessed groove (29) is provided on the side wall of the lifting arm (22); a cover plate (30) is provided at the open end of the groove (29); an air inlet (28) is provided above the cover plate (30); and an air outlet (31) is provided below the cover plate (30); the air outlet (31) is connected to the air blowing pipe (15).

8. The artificial crystal growth furnace according to claim 7, characterized in that: The outer side of the air outlet (31) is connected to an air blowing pipe connection seat (32), the air blowing pipe connection seat (32) is connected to an air blowing pipe (15), and the air blowing pipe (15) is arranged in a folded line structure.

9. The artificial crystal growth furnace according to claim 6, characterized in that: An air inlet pipe is provided on the outside of the lifting arm (22), the upper end of the air inlet pipe is connected to an air source, and the lower end of the air inlet pipe is connected to an air blowing pipe (15).

10. The artificial crystal growth furnace according to claim 6, characterized in that: An air inlet pipe is provided in the cooling medium channel (27) in the middle of the lifting arm (22), the upper end of the air inlet pipe passes through the side wall of the lifting arm (22) to communicate with the air source, and the lower end of the air inlet pipe passes through the side wall of the lifting arm (22) to connect to the air blowing pipe (15).

11. An artificial crystal furnace system, characterized in that: The artificial crystal furnace system includes the artificial crystal growth furnace according to any one of claims 1 to 10.

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