Electronic ceramic hydrogen humidification atmosphere high-temperature bell jar sintering furnace

Abstract

The electronic ceramic hydrogen humidification atmosphere high-temperature bell jar sintering furnace comprises a furnace base, a furnace body installed on the furnace base and a furnace wall covering the outer wall of the furnace body, an air inlet pipe is connected to the side wall of the furnace wall in an inserted mode and connected with a triple pipe, and the side, away from the air inlet pipe, of the triple pipe is connected to an installation base. The mounting seat is mounted on the inner wall of the furnace wall, a plurality of groups of air outlets are formed in the triple pipe at equal intervals, and the triple pipe surrounds the outer wall of the furnace body. Hot air is transmitted into the triple pipe through the air inlet pipe and exhausted through the air outlets distributed in the triple pipe, and under the action that the triple pipe is installed on the periphery of the furnace body in a surrounding mode, all corners in the furnace wall can be filled with the hot air released from the triple pipe, so that the distribution condition of gas in the furnace wall is further improved, and the service life of the furnace wall is prolonged. And the temperature uniformity in the furnace wall is enhanced.

Description

Technical Field

[0001] The invention relates to the technical field of heat treatment processing equipment, in particular to a high-temperature bell-jar sintering furnace for electronic ceramics in a hydrogen humidified atmosphere. Background Art

[0002] With the development of modern industrial technology, electronic ceramic materials, especially due to their excellent electrical properties, chemical stability and mechanical strength, have been widely used in many high-tech fields such as microelectronic devices, sensors, fuel cells, etc. However, the preparation process of electronic ceramic materials is complicated, especially its sintering process, which has extremely high requirements on temperature and atmosphere conditions.

[0003] Traditional sintering furnaces often have problems with uneven internal temperature distribution, which directly affects the quality and production efficiency of the sintered products.

[0004] Therefore, we proposed a high-temperature bell-jar sintering furnace for electronic ceramics in a hydrogen humidified atmosphere to solve the above problems. Summary of the invention

[0005] The present invention aims at the problems raised in the prior art and proposes the following technical solutions:

[0006] A high-temperature bell-shaped sintering furnace for electronic ceramics in a hydrogen humidified atmosphere comprises a furnace base, a furnace body mounted on the furnace base and a furnace wall buckled on the outer wall of the furnace body, an air inlet pipe is inserted into the side wall of the furnace wall, and the air inlet pipe is connected to a triple pipe, a side of the triple pipe away from the air inlet pipe is connected to a mounting seat, the mounting seat is mounted on the inner wall of the furnace wall, a plurality of groups of air outlets are equidistantly provided on the triple pipe, and the triple pipe surrounds the outer wall of the furnace body.

[0007] The hot air is transmitted to the triple pipe through the air inlet pipe and discharged from the air outlets distributed on the triple pipe. With the triple pipe installed around the furnace body, the hot air released from the triple pipe can fill every corner inside the furnace wall, thereby further improving the distribution of gas in the furnace wall and enhancing the temperature uniformity inside the furnace wall.

[0008] As a preferred embodiment of the above technical solution, an air outlet is provided at the top of the furnace wall.

[0009] Under the principle of cold air sinking and hot air rising, the high-temperature gas inside the furnace wall that is too hot is released through the outlet, achieving efficient heat exchange and rapid cooling.

[0010] As a preferred embodiment of the above technical solution, a sensing window is provided on the side wall of the furnace wall, and a temperature sensing device is inserted in the sensing window, a sensing block is installed on the end of the temperature sensing device, the outer side of the temperature sensing device is connected to a mounting plate, and a display panel is installed on the outer side of the mounting plate.

[0011] The sensing block installed on the side of the temperature sensing device close to the furnace wall can detect the gas temperature released from the sensing window. The gas temperature is displayed via the display panel. Under the display function of the display panel, the internal temperature of the furnace wall can be intuitively monitored to avoid the existence of excessively high or low temperatures.

[0012] As a preferred embodiment of the above technical solution, a first limiting groove is opened on the inner wall of the furnace wall, and a mounting block is installed on the inner wall of the first limiting groove, and the mounting block is connected to the limiting clamping block, and the limiting clamping block is clamped on the outer wall of the triple pipe.

[0013] Under the positioning and limiting action of the limiting block, the installation between the side wall of the triple tube and the inner wall of the furnace wall is limited to avoid the dislocation of the triple tube.

[0014] As a preferred embodiment of the above technical solution, the outer walls of the triple tubes are all connected with buckles, and the outer walls of the buckles are connected through a supporting device;

[0015] The supporting device includes a supporting sleeve rod installed with an outer wall of a buckle, and a second limiting groove is opened in the supporting sleeve rod, a first elastic member is connected in the second limiting groove, the first elastic member is connected to a supporting inner rod, the ends of the supporting inner rod are both connected to the outer wall of another buckle, sliding grooves are symmetrically opened on the inner wall of the second limiting groove, and a first slider is slidably connected in the sliding groove, the first slider is connected to the outer wall of the supporting inner rod, a first elastic member is connected in the second limiting groove, and the first elastic member is connected to the supporting inner rod.

[0016] Under the action of the elastic potential energy of the first elastic member, the extension length between the supporting inner rod and the supporting sleeve rod is adjusted, so as to complete the support of the middle part of multiple groups of triple tubes clamped by the buckle to avoid collapse.

[0017] As a preferred embodiment of the above technical solution, the outer wall of the first slider is symmetrically provided with a third limit groove, and the inner wall of the third limit groove is symmetrically provided with a fourth limit groove, a sliding rod is installed in the fourth limit groove, the outer wall of the sliding rod is slidably connected with the second slider, the second slider is connected to the outer wall of the elastic plug block, the outer wall of the second slider is connected with a second elastic member, the side of the second elastic member away from the second slider is connected to the inner wall of the fourth limit groove, the middle part of the second elastic member surrounds the outer wall of the sliding rod, the outer side of the elastic plug block passes through a Y-shaped groove, and the Y-shaped grooves are equidistantly provided on the outer wall of the supporting sleeve rod.

[0018] When the length of the supporting inner rod extending out of the supporting sleeve rod reaches a certain value, the elastic plug block at this time pops out to the Y-shaped groove at a suitable position under the elastic potential energy of the second elastic member and the sliding action of the sliding rod and the second sliding block. Under the limiting action of the Y-shaped groove, the limiting work between the supporting inner rod and the supporting sleeve rod is completed, thereby ensuring the stability of the middle support of the triple tube.

[0019] As a preferred embodiment of the above technical solution, the outer wall of the elastic plug is connected with a soft pad.

[0020] Under the effect of the soft pad, the hands of the staff are protected to avoid direct pressing of the elastic plug block, which may cause damage to the hands of the staff.

[0021] The beneficial effects of the present invention are:

[0022] (1) The air inlet pipe is connected to the triple pipe, and the triple pipe is installed around the furnace body so that the gas in the furnace wall can circulate, thereby further improving the distribution of the gas in the furnace wall and enhancing the temperature uniformity inside the furnace wall;

[0023] (2) A circulating air cooling structure is set up inside the furnace wall, including an air intake structure and an exhaust structure; the air intake structure is composed of a triple pipe surrounding the furnace body, and the exhaust structure is located at the top of the furnace wall. Under the principle of cold air sinking and hot air rising, efficient heat exchange and rapid cooling are achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 The schematic diagram of the internal structure in the front view state provided by the embodiment of the present invention is shown;

[0025] Figure 2 The embodiment of the present invention shown provides Figure 1 A schematic diagram of the internal structure of the middle limit block and the triple pipe in a partial top view;

[0026] Figure 3 The embodiment of the present invention shown provides Figure 1 A partial enlarged structural schematic diagram of 17;

[0027] Figure 4 The embodiment of the present invention shown provides Figure 3 Enlarged structural diagram at A in the middle.

[0028] Legend:

[0029] 1. Furnace base; 2. Furnace body; 3. Furnace wall; 4. Air outlet; 5. First limiting groove; 6. Mounting block; 7. Limiting card block; 8. Air inlet pipe; 9. Triple pipe; 10. Mounting seat; 11. Sensing window; 12. Sensing block; 13. Temperature sensing device; 14. Mounting plate; 15. Display panel; 16. Buckle; 17. Support inner rod; 18. First slider; 19. Slide groove; 20. Support sleeve rod; 21. Y-shaped groove; 22. Second limiting groove; 23. First elastic member; 24. Third limiting groove; 25. Fourth limiting groove; 26. Slide rod; 27. Second slider; 28. Second elastic member; 29. ​​Elastic plug block; 30. Cushion. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0031] In order to solve the problem of uneven internal temperature distribution in sintering furnaces in the prior art, the present application connects the air inlet pipe 8 with the triple pipe 9, and the triple pipe 9 is installed around the furnace body 2 so that the gas in the furnace wall 3 can circulate, thereby further improving the distribution of the gas in the furnace wall 3 and enhancing the temperature uniformity inside the furnace wall 3.

[0032] like Figure 1 As shown, in an embodiment of the present invention: an electronic ceramic hydrogen humidified atmosphere high-temperature bell-shaped sintering furnace comprises a furnace base 1, a furnace body 2 installed on the furnace base 1, and a furnace wall 3 covered and buckled on the outer wall of the furnace body 2; wherein the furnace wall 3 and the furnace base 1 are covered and buckled to form a furnace cavity, which is well known to those skilled in the art and will not be elaborated in this application.

[0033] like Figure 1As shown, an air inlet pipe 8 is inserted into the side wall of the furnace wall 3, and the air inlet pipe 8 is connected to the triple pipe 9. The side of the triple pipe 9 away from the air inlet pipe 8 is connected to the mounting seat 10. The mounting seat 10 is installed on the inner wall of the furnace wall 3. The triple pipe 9 is provided with a plurality of groups of air outlets at equal intervals, and the triple pipe 9 surrounds the outer wall of the furnace body 2; the hot air is transmitted to the triple pipe 9 through the air inlet pipe 8, and is discharged from the air outlets distributed on the triple pipe 9. With the triple pipe 9 being installed around the furnace body 2, the hot air released from the triple pipe 9 can be filled in every corner inside the furnace wall 3, thereby further improving the distribution of gas in the furnace wall 3 and enhancing the temperature uniformity inside the furnace wall 3; an air outlet 4 is provided at the top of the furnace wall 3; under the principle that cold air sinks and hot air rises, the high-temperature gas with excessive temperature inside the furnace wall 3 can be discharged The gas temperature is released from the induction window 11 through the outlet 4, achieving efficient heat exchange and rapid cooling effects; a sensing window 11 is provided on the side wall of the furnace wall 3, and a temperature sensing device 13 is inserted into the sensing window 11, a sensing block 12 is installed on the end of the temperature sensing device 13, and the outer side of the temperature sensing device 13 is connected to a mounting plate 14, and a display panel 15 is installed on the outer side of the mounting plate 14; the sensing block 12 installed on the side of the temperature sensing device 13 close to the furnace wall 3 can detect the gas temperature released from the sensing window 11, and the gas temperature is displayed via the display panel 15. Under the display effect of the display panel 15, the internal temperature of the furnace wall 3 can be intuitively monitored to avoid the existence of excessively high or low temperatures; it is worth noting that the sensing control device of the sensing block 12 and the temperature sensing device 13 is a direct reference to the prior art, and no further elaboration is made here.

[0034] like Figure 1 and Figure 2 As shown, a first limiting groove 5 is provided on the inner wall of the furnace wall 3, and a mounting block 6 is installed on the inner wall of the first limiting groove 5, and the mounting block 6 is connected to the limiting block 7, and the limiting block 7 is clamped on the outer wall of the triple pipe 9; under the positioning and limiting action of the limiting block 7, the installation between the side wall of the triple pipe 9 and the inner wall of the furnace wall 3 is limited to avoid the dislocation of the triple pipe 9; it is worth mentioning that the positioning and limiting method between the limiting block 7 and the triple pipe 9 is a direct reference to the prior art, which is commonly seen in the positioning between a broom and a dustpan, and will not be elaborated on here.

[0035] like Figure 1 , Figure 3 and Figure 4 As shown, the outer walls of the triple tube 9 are all connected with buckles 16, and the outer walls of the buckles 16 are connected through a supporting device;

[0036] The supporting device includes a supporting sleeve rod 20 for installing the outer wall of the buckle 16, and a second limiting groove 22 is opened in the supporting sleeve rod 20, and a first elastic member 23 is connected in the second limiting groove 22, and the first elastic member 23 is connected to the supporting inner rod 17, and the ends of the supporting inner rod 17 are all connected to the outer wall of another buckle 16, and the inner wall of the second limiting groove 22 is symmetrically opened with a slide groove 19, and the slide groove 19 is slidably connected with a first slider 18, and the first slider 18 is connected to the outer wall of the supporting inner rod 17, and the second limiting groove 22 is connected to the first elastic member 23. The first elastic member 23 is connected to the support inner rod 17; under the action of the elastic potential energy of the first elastic member 23, the elongation length between the support inner rod 17 and the support sleeve rod 20 is adjusted, so that the middle part of the multiple sets of triple tubes 9 clamped by the buckle 16 is supported to avoid collapse; the outer wall of the first slider 18 is symmetrically provided with a third limiting groove 24, and the inner wall of the third limiting groove 24 is symmetrically provided with a fourth limiting groove 25, and the fourth limiting groove 25 is installed with a slide rod 26, and the outer wall of the slide rod 26 slides A second slider 27 is connected, and the second sliders 27 are all connected to the outer wall of the elastic plug 29. The outer wall of the second slider 27 is connected to a second elastic member 28. The side of the second elastic member 28 away from the second slider 27 is connected to the inner wall of the fourth limiting groove 25. The middle part of the second elastic member 28 surrounds the outer wall of the slide rod 26. The outer side of the elastic plug 29 passes through the Y-shaped groove 21, and the Y-shaped groove 21 is equidistantly arranged on the outer wall of the support sleeve rod 20. When the length of the supporting inner rod 17 extending out of the supporting sleeve rod 20 reaches a certain value, the elastic plug 29 at this time 9 The elastic potential energy of the second elastic member 28 cooperates with the sliding action of the slide bar 26 and the second slide block 27 to pop out to the Y-shaped groove 21 at the appropriate position. Under the limiting action of the Y-shaped groove 21, the limiting work between the supporting inner rod 17 and the supporting sleeve rod 20 is completed, thereby ensuring the stability of the support of the middle part of the triple tube 9; the outer wall of the elastic plug block 29 is connected to a soft pad 30; under the action of the soft pad 30, the hands of the staff are protected to avoid direct pressing of the elastic plug block 29 and causing damage to the hands of the staff.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them.

Claims

1. A high-temperature bell-jar sintering furnace for electronic ceramics in a hydrogen humidified atmosphere, comprising a furnace base (1), a furnace body (2) mounted on the furnace base (1), and a furnace wall (3) buckled on the outer wall of the furnace body (2), characterized in that: An air inlet pipe (8) is inserted into the side wall of the furnace wall (3), and the air inlet pipe (8) is connected to a triple pipe (9). The side of the triple pipe (9) away from the air inlet pipe (8) is connected to a mounting seat (10). The mounting seat (10) is mounted on the inner wall of the furnace wall (3). A plurality of groups of air outlets are equidistantly arranged on the triple pipe (9), and the triple pipe (9) surrounds the outer wall of the furnace body (2).

2. The electronic ceramic hydrogen humidified atmosphere high temperature bell jar sintering furnace according to claim 1, characterized in that: The top of the furnace wall (3) is provided with an air outlet (4).

3. The electronic ceramic hydrogen humidified atmosphere high temperature bell jar sintering furnace according to claim 1, characterized in that: A sensing window (11) is provided on the side wall of the furnace wall (3), and a temperature sensing device (13) is inserted into the sensing window (11). A sensing block (12) is installed at the end of the temperature sensing device (13). The outer side of the temperature sensing device (13) is connected to a mounting plate (14), and a display panel (15) is installed on the outer side of the mounting plate (14).

4. The high-temperature bell-jar sintering furnace for electronic ceramics in hydrogen humidified atmosphere according to claim 1, characterized in that: The inner wall of the furnace wall (3) is provided with a first limiting groove (5), and the inner wall of the first limiting groove (5) is provided with a mounting block (6), and the mounting block (6) is connected to a limiting clamping block (7), and the limiting clamping block (7) is clamped on the outer wall of the triple pipe (9).

5. The high-temperature bell-jar sintering furnace for electronic ceramics in hydrogen humidified atmosphere according to claim 1, characterized in that: The outer walls of the triple tubes (9) are all connected with buckles (16), and the outer walls of the buckles (16) are connected via a supporting device; The support device comprises a support sleeve rod (20) mounted on the outer wall of the buckle (16), and a second limiting groove (22) is provided in the support sleeve rod (20), a first elastic member (23) is connected in the second limiting groove (22), the first elastic member (23) is connected to the support inner rod (17), the ends of the support inner rod (17) are both connected to the outer wall of another buckle (16), the inner wall of the second limiting groove (22) is symmetrically provided with a sliding groove (19), and a first sliding block (18) is slidably connected in the sliding groove (19), the first sliding block (18) is connected to the outer wall of the support inner rod (17), the second limiting groove (22) is connected to the first elastic member (23), and the first elastic member (23) is connected to the support inner rod (17).

6. The electronic ceramic hydrogen humidified atmosphere high temperature bell jar sintering furnace according to claim 1, characterized in that: The outer wall of the first slider (18) is symmetrically provided with a third limiting groove (24), and the inner wall of the third limiting groove (24) is symmetrically provided with a fourth limiting groove (25), and a sliding rod (26) is installed in each of the fourth limiting grooves (25). The outer wall of the sliding rod (26) is slidably connected with a second slider (27), and the second slider (27) is connected to the outer wall of the elastic plug (29). The outer wall of the second slider (27) is connected with a second elastic member (28), and the side of the second elastic member (28) away from the second slider (27) is connected to the inner wall of the fourth limiting groove (25), and the middle part of the second elastic member (28) surrounds the outer wall of the sliding rod (26), and the outer side of the elastic plug (29) passes through a Y-shaped groove (21), and the Y-shaped groove (21) is equidistantly provided on the outer wall of the support sleeve rod (20).

7. The electronic ceramic hydrogen humidified atmosphere high temperature bell jar sintering furnace according to claim 1, characterized in that: The outer wall of the elastic plug block (29) is connected with a soft pad (30).

Images