Device and method for detecting air pressure and air tightness of semiconductor-grade aluminum chamber

Abstract

The invention discloses a device and a method for detecting air pressure and air tightness of a semiconductor-grade aluminum chamber, and aims to overcome the defects of low working efficiency, large personal error and high detection cost when air pressure and air tightness detection is carried out on a workpiece cavity. The device comprises a high-pressure tank and an air pressure tandem device, the air pressure tandem device is provided with an air inlet hole and a plurality of air outlet holes, the air outlet holes can be communicated with the air inlet hole, the air inlet hole is connected with the high-pressure tank, and the air outlet holes are respectively connected with detection air pipes. When the air pressure and the air tightness of the workpiece aluminum chambers are detected, the air inlet hole is communicated with the high-pressure tank, the plurality of workpiece aluminum chambers are respectively communicated with the plurality of air outlet holes, and the air pressure and the air tightness of the plurality of workpiece aluminum chambers are detected at one time, so that the working efficiency is improved, and the personal error and the detection cost are reduced.

Description

Technical Field

[0001] The present invention relates to a semiconductor product detection technology, and more specifically, to a semiconductor-grade aluminum chamber air pressure and air tightness detection device and method. Background Art

[0002] With the rapid development of the semiconductor industry, the efficiency of cavity air pressure and air tightness detection is also increasing. Cavity air pressure and air tightness detection technology is widely used in industries, construction, transportation, and other fields, and plays a vital role in product quality and safety. In industrial production, such as in the manufacturing process of semiconductor equipment such as pressure vessels, stainless steel cavities, and pipelines, cavity air pressure and air tightness detection is a key link to ensure the strength and sealing of the equipment. The cavity must be tested for air pressure and air tightness. If the air pressure and air tightness test fails, it will affect the final performance and service life of the product, causing economic losses. The current detection method is a one-to-one cavity air pressure and air tightness test, which relies on manual testing, low work efficiency, large human errors, and high detection costs. Summary of the invention

[0003] In order to overcome the above-mentioned shortcomings, the present invention provides a semiconductor-grade aluminum chamber air pressure and airtightness detection device and method, which can improve detection efficiency and reduce detection errors and detection costs.

[0004] In order to solve the above technical problems, the present invention adopts the following technical scheme: a semiconductor-grade aluminum chamber air pressure and air tightness detection device, including a high-pressure tank and an air pressure series connector, an air inlet and a plurality of air outlets are arranged on the air pressure series connector, the air outlets can be connected to the air inlet, the air inlet is connected to the high-pressure tank, and the air outlets are respectively connected to the detection air pipes.

[0005] When testing the air pressure and air tightness of the aluminum chamber of the workpiece, the air inlet is connected to the high-pressure tank, and multiple aluminum chambers of the workpiece are connected to multiple air outlets respectively, so that the air pressure and air tightness of multiple aluminum chambers of the workpiece can be tested at one time. Each aluminum chamber is connected to a pressure gauge. The air source is delivered to the air inlet through the high-pressure tank, and the air source is delivered to the aluminum chamber of the workpiece after passing through the air pressure series device; the pressure value of the pressure gauge is monitored in real time. When it reaches the set value, the delivery of the air source is blocked and the pressure is maintained. In the process, the pressure value of the pressure gauge is recorded to analyze the air pressure and air tightness of the aluminum chamber.

[0006] Batch workpiece aluminum chamber air pressure and airtightness testing can test multiple cavities at the same time, so the test can be completed faster. This is advantageous in a production line or batch production environment. Batch testing helps ensure consistent test conditions and reduces human error. This helps to obtain accurate comparison and evaluation results. Although batch testing requires more equipment and resources to perform tests, it can reduce the cost of each test in the long run, especially in large-scale production. Batch testing generates a large amount of data, which can be used for more in-depth analysis and trend identification, helping to improve product design and manufacturing processes.

[0007] Preferably, one-way air outlet valves are installed at the air outlet positions.

[0008] The one-way air outlet valve realizes one-way delivery of the gas source to prevent the air flow in the aluminum chamber of the workpiece from leaking toward the air outlet during the pressure holding process.

[0009] Preferably, an outlet pressure gauge and an outlet main valve are installed on the pipeline between the air inlet and the high-pressure tank.

[0010] The outlet pressure gauge is convenient for monitoring the intake pressure of the air inlet hole, and the outlet main valve is convenient for controlling the opening and closing of the gas source in the high-pressure tank.

[0011] Preferably, a transition chamber is provided on the air pressure series connector, the air inlet and the air outlet are both connected to the transition chamber, and an air outlet branch valve is installed at the air outlet position.

[0012] The gas source is output from the high-pressure tank and sent into the transition chamber through the air inlet, while the air outlet is connected to the transition chamber, so the gas source can be diverted to different air outlets, thereby realizing one-time detection of multiple workpiece aluminum chambers. An outlet branch valve is installed at the outlet position. When the air pressure in the workpiece aluminum chamber reaches the set value, the outlet branch valve is closed to facilitate the pressure maintenance of the workpiece aluminum chamber. In addition, an outlet branch valve is installed at each outlet position to facilitate the individual control of the gas source of each workpiece aluminum chamber.

[0013] In the second scheme, an air inlet cavity is provided on the air pressure series connector, a switching dial is installed in the air inlet cavity, a switching vent is provided on the switching dial, and both the switching vent and the air inlet are connected to the air inlet cavity; the switching dial is rotated to make the switching vent and the air outlet correspondingly connected.

[0014] The gas source is output from the high-pressure tank and sent into the air inlet cavity after passing through the air inlet hole. The switching dial rotates to connect the switching vent hole with the air outlet hole. At this time, the switching vent hole is connected between the air outlet hole and the air inlet cavity, and the gas source is delivered to the aluminum chamber of the workpiece connected to the air outlet hole for air pressure and air tightness testing. The airway is switched by rotating the switching dial, which is convenient to operate.

[0015] The third solution is to install a switching turntable on the air pressure series connector, on which an air inlet sleeve and a switching vent are arranged, and a transition hole is arranged between the air inlet sleeve and the switching vent in the switching turntable, the air inlet sleeve and the air inlet hole are sealed together, and the switching turntable is rotated to connect the switching vent with the air outlet hole accordingly.

[0016] The gas source is output from the high-pressure tank, sent into the air inlet sleeve after passing through the air inlet hole, and then sent to the switching vent hole after passing through the transition hole. The switching vent hole is connected to the outlet hole by rotating the switching turntable, and the gas source is sent to the aluminum chamber of the workpiece connected to the outlet hole for air pressure and air tightness testing. The switching of the airway is achieved by rotating the switching turntable, which is convenient to operate. In addition, the transition hole has a small space, which is conducive to the rapid delivery of the gas source to the switching vent hole, and then the gas source quickly enters the aluminum chamber of the workpiece.

[0017] Preferably, a plurality of receivers are installed on the inner wall of the air inlet cavity corresponding to the air outlet holes, and transmitters are installed on the switching turntable corresponding to the switching air holes.

[0018] During the rotation of the switching turntable, when the signal emitted by the in-position transmitter on the switching turntable is received by the in-position receiver at the corresponding position, the switching turntable rotates to the in-position position, and the switching vent on the switching turntable is connected to the air outlet correspondingly. The setting of the in-position receiver and the in-position transmitter can realize the precise control of the rotation position of the switching turntable.

[0019] Preferably, a driving motor is installed on the gas pressure series connector, a rotating shaft is provided on the switching turntable, the rotating shaft is rotatably installed on the gas pressure series connector, and the driving motor drives the rotating shaft to rotate.

[0020] The driving motor works to drive the rotating shaft to rotate, thereby realizing the rotation of the switching turntable.

[0021] Preferably, a sealing surface is arranged on the air pressure series connector corresponding to the switching dial, a boss is arranged in the middle of the sealing surface on the sealing surface arranged at the opening end of the air outlet, a contact surface is arranged on the switching dial corresponding to the sealing surface, the switching vent is arranged on the contact surface, a groove is arranged on the contact surface corresponding to the boss, the contact surface and the sealing surface are sealed together, and the boss and the groove are sealed together.

[0022] The coordinated arrangement of the boss and the groove is beneficial to improving the sealing effect between the sealing surface and the contact surface.

[0023] A semiconductor-grade aluminum chamber air pressure and air tightness detection method is used for detection by using a semiconductor-grade aluminum chamber air pressure and air tightness detection device, and comprises the following steps: S1, connecting multiple detection air pipes with multiple aluminum chambers of workpieces to be detected, and each aluminum chamber is connected to an air pressure gauge; S2, a high-pressure tank delivers an air source to an air inlet, and the air source is delivered to the aluminum chamber of the workpiece after passing through an air pressure series connection device; S3, monitoring the pressure value of the air pressure gauge, and after reaching a set value, blocking the delivery of the air source and maintaining the pressure; S4, recording the pressure value of the pressure gauge, and analyzing the air pressure and air tightness of the aluminum chamber.

[0024] By using a pneumatic tandem, one-to-one testing is increased to one-to-many testing, shortening the testing time for the same batch of the same product, reducing time consumption, and solving efficiency problems. The batch testing method brought by the pneumatic tandem can ensure that the same test conditions are applied to each cavity, reduce human errors, improve consistency and accuracy, save manpower, and reduce testing costs.

[0025] Compared with the prior art, the present invention has the following beneficial effects: (1) by using a pneumatic series connection device, one-to-one detection is increased to one-to-many detection, thereby shortening the detection time of the same batch of the same products, reducing time consumption, and improving work efficiency; (2) the batch detection method brought about by the pneumatic series connection device can ensure that the same test conditions are applied to each cavity, reduce human errors, improve consistency and accuracy, save manpower, and reduce detection costs; (3) batch testing generates a large amount of data, which can be used for more in-depth analysis and trend identification, and help improve product design and manufacturing processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is the detection principle diagram of the present invention.

[0027] Figure 2 It is a schematic diagram of the structure of the gas pressure series device according to Example 1 of the present invention.

[0028] Figure 3 It is a schematic diagram of the structure of the gas pressure series device according to Example 2 of the present invention.

[0029] Figure 4 It is a schematic diagram of the structure of the gas pressure series device of Example 3 of the present invention.

[0030] Figure 5 It is a schematic diagram of the buffer mechanism of Example 4 of the present invention.

[0031] In the figure: 1. high-pressure tank, 2. air pressure series connector, 3. air inlet, 4. air outlet, 5. air outlet pressure gauge, 6. air outlet main valve, 7. detection air pipe, 8. one-way air outlet valve, 9. transition chamber, 10. air outlet branch valve, 11. connecting seat, 12. connecting plate, 13. sinking groove, 14. positioning convex ring, 15. air inlet connecting nozzle, 16. air outlet connecting nozzle, 17. aluminum chamber, 18. air inlet chamber, 19. switching turntable, 20. switching air vent, 21. in-position receiver, 22. in-position transmitter, 23. driving motor, 24. rotating shaft, 25. sealing surface, 26. boss, 27. air inlet sleeve, 28. transition hole, 29. buffer sleeve, 30. buffer column, 31. guide hole, 32. buffer plate, 33. buffer spring, 34. fixing sleeve, 35. mounting sleeve, 36. ejector. DETAILED DESCRIPTION

[0032] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Embodiment 1: A semiconductor-grade aluminum chamber pressure and airtightness detection device (see attached Figure 1 , Attachment Figure 2 ), including a high-pressure tank 1 and a gas pressure series connection 2, an air inlet 3 and a plurality of air outlets 4 are arranged on the gas pressure series connection 2, and the air outlets 4 can all be communicated with the air inlet 3, the air inlet 3 is connected to the high-pressure tank 1, and an air outlet pressure gauge 5 and an air outlet main valve 6 are installed on the pipeline between the air inlet 3 and the high-pressure tank 1, and the air outlet 4 is respectively connected to the detection air pipe 7. The air inlet 3 and the high-pressure tank 1 are connected through the air inlet pipeline, the air outlet pressure gauge 5 is installed on the air inlet pipeline, and the air outlet main valve 6 is installed at the position of the air inlet 3.

[0033] One-way air outlet valves 8 are installed at the air outlet holes 4 so that the air flow can only flow outward from the air outlet holes 4 but cannot flow in the reverse direction.

[0034] A transition chamber 9 is provided on the air pressure series connection 2, and both the air inlet 3 and the air outlet 4 are connected to the transition chamber 9, and an air outlet branch valve 10 is installed at the position of the air outlet 4. Both the air outlet main valve 6 and the air outlet branch valve 10 are electromagnetic valves, which are convenient for automatic control of opening and closing.

[0035] The air pressure series connection 2 includes a connection seat 11 and a connection plate 12. A sinking groove 13 is provided on the connection seat 11. A positioning convex ring 14 is provided on the connection plate 12. The positioning convex ring 14 is adapted to be inserted into the sinking groove 13. The outer wall of the positioning convex ring 14 is sealed and fitted with the side wall of the sinking groove 13 to form a transition cavity 9 inside the convex ring. The pressure end face of the connection plate 12 is pressed tightly against the end face of the connection seat 11. The connection plate 12 and the connection seat 11 are fastened and connected by screws. The air inlet 3 is provided on the connection plate 12, and the air outlet 4 is provided on the connection seat 11. An air inlet connection nozzle 15 is provided on the connection plate 12 corresponding to the air inlet 3. The air inlet connection nozzle 15 extends outward from the surface of the connection plate 12. The air inlet connection nozzle 15 facilitates the connection of the air inlet pipe between the air inlet 3 and the high-pressure tank 1. An air outlet connection nozzle 16 is provided on the connection seat 11 corresponding to the air outlet hole 4 . The air outlet connection nozzle 16 extends outward from the surface of the connection seat 11 . The detection air pipe 7 is connected to the air outlet connection nozzle 16 to achieve communication with the air outlet hole 4 .

[0036] A semiconductor-grade aluminum chamber air pressure and air tightness detection method is used to detect the semiconductor-grade aluminum chamber air pressure and air tightness detection device, including the following steps: S1, connecting multiple detection air pipes 7 to multiple aluminum chambers 17 of workpieces to be detected, and each aluminum chamber 17 is connected to a pressure gauge; at this time, the main air outlet valve 6 and the air outlet branch valve 10 are both closed.

[0037] S2, the main outlet valve 6 and the outlet branch valve 10 are opened, the high-pressure tank 1 delivers the gas source to the air inlet 3 through the air inlet pipe, and the gas source is delivered to the aluminum chamber 17 of the workpiece after passing through the air pressure series device 2; specifically, all the outlet branch valves 10 can be opened synchronously, or one by one; S3, monitor the pressure value of the pressure gauge, when it reaches the set value, close the corresponding air outlet branch valve 10, block the delivery of the gas source, and maintain the pressure; when the air outlet branch valves 10 adopt the working mode of opening one by one, wait until the air pressure in the aluminum chamber 17 of the previous workpiece reaches the set value and closes the corresponding air outlet branch valve 10, and then open the next air outlet branch valve 10, and so on, open the air outlet branch valves 10 one by one.

[0038] S4, record the pressure value of the pressure gauge, and analyze the air pressure and air tightness of the aluminum chamber 17.

[0039] In this embodiment, the high-pressure tank 1 uses an argon gas bottle, argon gas is used as the gas source, and it is ensured that the gas meets the requirements. During S2, the air inlet 3 is slowly inflated, and the reading of the outlet pressure gauge 5 is monitored at the same time, and the pressure is gradually increased to ensure that the pressurization process is uniform to avoid too fast or too high pressure. During S3, a pressure maintenance test is performed for a period of time as needed, and a stable air pressure is usually maintained for a period of time to ensure that the system does not leak; the pressure is required to be not less than 120psi at the beginning of the test. If it is lower than 120psi, it needs to be re-pressurized to 125psi and then stabilized for 3 minutes. The internal space of the pressure gauge + connector is less than 15ml, and the pressure gauge is a digital pressure gauge with an accuracy of 0.1 or above. The pressure gauge needs to be numbered and corrected. The test environment requires temperature fluctuations of less than ±1°C. After completing the test, carefully release the gas source in the cavity to ensure that the release process does not cause sudden pressure release; the test time is 10min, and the judgment is based on the pressure drop <0.4psig for qualified.

[0040] When testing the same product in the same batch: Since the requirements for air pressure testing of the same product in the same batch are consistent, it is only necessary to observe that the reading of the outlet pressure gauge 5 on the air inlet pipe reaches the set requirement, and then uniformly close the main outlet valve 6 to maintain the pressure.

[0041] When testing different batches of different products: Since the requirements for air pressure testing of different batches of different products are inconsistent, the set air pressure requirements are arranged from small to large before batch testing the air pressure, and the readings on the outlet pressure gauge 5 on the air inlet pipe and the readings on the pressure gauge are carefully observed. When the set readings are reached, the corresponding outlet branch valve 10 is closed to start the pressure maintenance process. Then, the next product is inflated, and the operating steps are the same as above, and so on.

[0042] By using the pneumatic tandem 2, the one-to-one test is increased to one-to-many test, shortening the test time of the same batch of the same product, reducing time consumption, and solving efficiency problems. The batch test method brought by the pneumatic tandem 2 can ensure that the same test conditions are applied to each cavity, reduce human errors, improve consistency and accuracy, save manpower, and reduce test costs.

[0043] Embodiment 2: A semiconductor-grade aluminum chamber pressure and airtightness detection device (see attached Figure 1 , Attachment Figure 3 ), including a high-pressure tank 1 and a gas pressure series connection 2, an air inlet 3 and a plurality of air outlets 4 are arranged on the gas pressure series connection 2, and the air outlets 4 can all be communicated with the air inlet 3, the air inlet 3 is connected to the high-pressure tank 1, and an air outlet pressure gauge 5 and an air outlet main valve 6 are installed on the pipeline between the air inlet 3 and the high-pressure tank 1, and the air outlet main valve 6 is a solenoid valve, and the air outlet 4 is respectively connected to the detection air pipe 7. The air inlet 3 and the high-pressure tank 1 are connected through the air inlet pipeline, the air outlet pressure gauge 5 is installed on the air inlet pipeline, and the air outlet main valve 6 is installed at the position of the air inlet 3.

[0044] One-way air outlet valves 8 are installed at the air outlet holes 4 so that the air flow can only flow outward from the air outlet holes 4 but cannot flow in the reverse direction.

[0045] An air inlet chamber 18 is provided on the air pressure series 2, a switching dial 19 is installed in the air inlet chamber 18, a switching vent 20 is provided on the switching dial 19, the switching vent 20 is a through hole, and the switching vent 20 and the air inlet 3 are both connected to the air inlet chamber 18; the air outlet 4 is arranged at intervals in the circumference, and the switching dial 19 rotates to make the switching vent 20 and the air outlet 4 communicate with each other. A plurality of in-position receivers 21 are installed on the inner wall of the air inlet chamber 18 and the air outlet 4 in a one-to-one correspondence, and a in-position transmitter 22 is installed on the switching dial 19 in correspondence with the switching vent 20. The in-position transmitter 22 and the in-position receiver 21 serve as the transmitting end and the receiving end of the photoelectric sensor, respectively.

[0046] A driving motor 23 is installed on the gas pressure series connection 2, and a rotating shaft 24 is arranged on the switching turntable 19. The rotating shaft 24 is rotatably installed on the gas pressure series connection 2, and the driving motor 23 drives the rotating shaft 24 to rotate. A driving gear is installed on the output shaft of the driving motor 23, and a driven gear is installed on the rotating shaft 24, and the driving gear and the driven gear are meshed for transmission.

[0047] A sealing surface 25 is provided on the air pressure series connector 2 corresponding to the switching dial 19, a boss 26 is provided in the middle of the sealing surface 25 provided at the opening end of the air outlet 4, a contact surface is provided on the switching dial 19 corresponding to the sealing surface 25, the switching vent 20 is provided on the contact surface, a groove is provided on the contact surface corresponding to the boss 26, the contact surface is sealed and fitted with the sealing surface 25, and the boss 26 is sealed and fitted with the groove.

[0048] The gas source is output from the high-pressure tank 1, and is sent into the air inlet cavity 18 after passing through the air inlet hole 3. The driving motor 23 drives the switching dial 19 to rotate. When the signal emitted by the in-position transmitter 22 on the switching dial 19 is received by the in-position receiver 21 at the corresponding position, the switching dial 19 rotates to the position, and the switching vent 20 on the switching dial 19 is correspondingly connected to the air outlet hole 4. The switching vent 20 is connected between the air outlet hole 4 and the air inlet cavity 18, and the gas source is transported to the workpiece aluminum chamber 17 connected to the air outlet hole 4 for air pressure and air tightness detection. The airway is switched by rotating the switching dial 19, which is convenient to operate.

[0049] The air pressure series connection device 2 includes a connection seat 11 and a connection plate 12. A sinking groove 13 is provided on the connection seat 11. A positioning convex ring 14 is provided on the connection plate 12. The positioning convex ring 14 is adapted to be inserted into the sinking groove 13. The outer wall of the positioning convex ring 14 is sealed and fitted with the side wall of the sinking groove 13 to form an air intake cavity 18 inside the convex ring. The end of the positioning convex ring 14 is positioned to the switching dial 19. The pressure end face of the connection plate 12 is pressed tightly on the end face of the connection seat 11. The connection plate 12 and the connection seat 11 are fastened by screws. The air inlet 3 is provided on the connection plate 12, and the air outlet 4 is provided on the connection seat 11. An air intake connection nozzle 15 is provided on the connection plate 12 corresponding to the air inlet 3. The air intake connection nozzle 15 extends outward from the surface of the connection plate 12. The air intake connection nozzle 15 facilitates the connection of the air intake pipe between the air inlet 3 and the high-pressure tank 1. An air outlet connection nozzle 16 is provided on the connection seat 11 corresponding to the air outlet hole 4, and the air outlet connection nozzle 16 extends outward from the surface of the connection seat 11, and the detection air pipe 7 is connected to the air outlet connection nozzle 16 to achieve communication with the air outlet hole 4. The driving motor 23 is installed on the surface of the connection seat 11, and a mounting hole is provided on the connection seat 11 corresponding to the rotating shaft 24, and a bearing is installed between the rotating shaft 24 and the mounting hole.

[0050] A semiconductor-grade aluminum chamber air pressure and air tightness detection method is used to detect the semiconductor-grade aluminum chamber air pressure and air tightness detection device, comprising the following steps: S1, connecting multiple detection air pipes 7 to multiple aluminum chambers 17 of workpieces to be detected, and each aluminum chamber 17 is connected to a pressure gauge; at this time, the main air outlet valve 6 is closed.

[0051] S2, the main air outlet valve 6 is opened, and the high-pressure tank 1 delivers the gas source to the air inlet hole 3 through the air inlet pipe, and the gas source is delivered to the aluminum chamber 17 of the workpiece after passing through the air pressure series connector 2; specifically, the driving motor 23 drives the switching dial 19 to rotate, and when the signal emitted by the in-position transmitter 22 on the switching dial 19 is received by the in-position receiver 21 at the corresponding position, the switching dial 19 rotates to the position, and the switching vent 20 on the switching dial 19 is connected to the air outlet hole 4 accordingly, and the switching vent 20 is connected between the air outlet hole 4 and the air inlet cavity 18, and the gas source is delivered to the aluminum chamber 17 of the workpiece connected to the air outlet hole 4, and the air pressure and air tightness detection are carried out.

[0052] S3, monitor the pressure value of the barometer, and when it reaches the set value, rotate the switching dial 19 to block the gas source from being delivered to the workpiece aluminum chamber 17 that reaches the set pressure, and maintain the pressure; the switching dial 19 rotates to connect the switching vent 20 with the next outlet hole 4 accordingly.

[0053] S4, repeat S3 until all the aluminum chambers 17 of the workpiece complete the pressure maintenance, record the pressure value of the pressure gauge during the pressure maintenance process, and analyze the air pressure and air tightness of the aluminum chamber 17.

[0054] In this embodiment, the high-pressure tank 1 uses an argon gas bottle, argon gas is used as the gas source, and it is ensured that the gas meets the requirements. During S2, the air inlet 3 is slowly inflated, and the reading of the outlet pressure gauge 5 is monitored at the same time, and the pressure is gradually increased to ensure that the pressurization process is uniform to avoid too fast or too high pressure. During S3, a pressure maintenance test is performed for a period of time as needed, and a stable air pressure is usually maintained for a period of time to ensure that the system does not leak; the pressure is required to be not less than 120psi at the beginning of the test. If it is lower than 120psi, it needs to be re-pressurized to 125psi and then stabilized for 3 minutes. The internal space of the pressure gauge + connector is less than 15ml, and the pressure gauge is a digital pressure gauge with an accuracy of 0.1 or above. The pressure gauge needs to be numbered and corrected. The test environment requires temperature fluctuations of less than ±1°C. After completing the test, carefully release the gas source in the cavity to ensure that the release process does not cause sudden pressure release; the test time is 10min, and the judgment is based on the pressure drop <0.4psig for qualified.

[0055] When testing the same product in the same batch and different products in different batches: carefully observe the readings on the outlet pressure gauge 5 on the air inlet pipe and the readings on the barometer. When the set readings are reached, turn the switch dial 19 to block the air source from being delivered to the aluminum chamber 17 of the workpiece that has reached the set air pressure, and maintain the pressure. The switch dial 19 is rotated to connect the switch vent 20 with the next outlet hole 4, and the next product is inflated. The operation steps are the same as above, and so on.

[0056] By using the pneumatic tandem 2, the one-to-one test is increased to one-to-many test, shortening the test time of the same batch of the same product, reducing time consumption, and solving efficiency problems. The batch test method brought by the pneumatic tandem 2 can ensure that the same test conditions are applied to each cavity, reduce human errors, improve consistency and accuracy, save manpower, and reduce test costs.

[0057] Embodiment 3: A semiconductor-grade aluminum chamber pressure and airtightness detection device (see attached Figure 1 , Attachment Figure 4 ), including a high-pressure tank 1 and a gas pressure series connection 2, an air inlet 3 and a plurality of air outlets 4 are arranged on the gas pressure series connection 2, and the air outlets 4 can all be communicated with the air inlet 3, the air inlet 3 is connected to the high-pressure tank 1, and an air outlet pressure gauge 5 and an air outlet main valve 6 are installed on the pipeline between the air inlet 3 and the high-pressure tank 1, and the air outlet main valve 6 is a solenoid valve, and the air outlet 4 is respectively connected to the detection air pipe 7. The air inlet 3 and the high-pressure tank 1 are connected through the air inlet pipeline, the air outlet pressure gauge 5 is installed on the air inlet pipeline, and the air outlet main valve 6 is installed at the position of the air inlet 3.

[0058] One-way air outlet valves 8 are installed at the air outlet holes 4 so that the air flow can only flow outward from the air outlet holes 4 but cannot flow in the reverse direction.

[0059] A switching turntable 19 is installed on the pneumatic series 2, and an air inlet sleeve 27 and a switching vent 20 are arranged on the switching turntable 19. The switching vent 20 is a blind hole. A transition hole 28 is arranged between the air inlet sleeve 27 and the switching vent 20 in the switching turntable 19. The air inlet sleeve 27 and the air inlet hole 3 are sealed together. The switching turntable 19 rotates to make the switching vent 20 and the air outlet hole 4 communicate with each other. The air inlet sleeve 27 can rotate. The transition hole 28 has a small space, which is conducive to the rapid delivery of the gas source to the switching vent 20, so that the gas source quickly enters the aluminum chamber 17 of the workpiece.

[0060] A plurality of in-position receivers 21 are mounted on the inner wall of the air inlet cavity 18 and the air outlet holes 4 in a one-to-one correspondence, and a in-position transmitter 22 is mounted on the switching turntable 19 in a corresponding correspondence with the switching vent holes 20. The in-position transmitter 22 and the in-position receiver 21 serve as the transmitting end and the receiving end of the photoelectric sensor, respectively.

[0061] The driving motor 23 is installed on the gas pressure series device 2, and the rotating shaft 24 is arranged on the switching turntable 19. The rotating shaft 24 and the air inlet sleeve 27 are arranged coaxially. The rotating shaft 24 is rotatably installed on the gas pressure series device 2, and the driving motor 23 drives the rotating shaft 24 to rotate. A driving gear is installed on the output shaft of the driving motor 23, and a driven gear is installed on the rotating shaft 24. The driving gear and the driven gear are meshed and transmitted.

[0062] A sealing surface 25 is provided on the air pressure series connector 2 corresponding to the switching dial 19, a boss 26 is provided in the middle of the sealing surface 25 provided at the opening end of the air outlet 4, a contact surface is provided on the switching dial 19 corresponding to the sealing surface 25, the switching vent 20 is provided on the contact surface, a groove is provided on the contact surface corresponding to the boss 26, the contact surface is sealed and fitted with the sealing surface 25, and the boss 26 is sealed and fitted with the groove.

[0063] The gas source is output from the high-pressure tank 1, and is sent into the gas inlet sleeve 27 and the transition hole 28 after passing through the gas inlet hole 3. The driving motor 23 drives the switching dial 19 to rotate. When the signal emitted by the in-position transmitter 22 on the switching dial 19 is received by the in-position receiver 21 at the corresponding position, the switching dial 19 rotates to the position, and the switching vent 20 on the switching dial 19 is correspondingly connected to the gas outlet hole 4. The switching vent 20 is connected between the gas outlet hole 4 and the transition hole 28, and the gas source is transported to the workpiece aluminum chamber 17 connected to the gas outlet hole 4 for air pressure and air tightness detection. The airway is switched by rotating the switching dial 19, which is convenient to operate.

[0064] The air pressure series device 2 includes a connection seat 11 and a connection plate 12. A sinking groove 13 is provided on the connection seat 11. A positioning convex ring 14 is provided on the connection plate 12. The positioning convex ring 14 is adapted to be inserted into the sinking groove 13. The end of the positioning convex ring 14 is positioned on the switching turntable 19. The pressure end face of the connection plate 12 is pressed tightly on the end face of the connection seat 11. The connection plate 12 and the connection seat 11 are fastened by screws. The air inlet 3 is provided on the connection plate 12, and the air outlet 4 is provided on the connection seat 11. An air inlet connection nozzle 15 is provided on the connection plate 12 corresponding to the air inlet 3. The air inlet connection nozzle 15 extends outward from the surface of the connection plate 12. The air inlet connection nozzle 15 facilitates the connection of the air inlet pipe between the air inlet 3 and the high-pressure tank 1. An air outlet connection nozzle 16 is provided on the connection seat 11 corresponding to the air outlet 4. The air outlet connection nozzle 16 extends outward from the surface of the connection seat 11. The detection air pipe 7 is connected to the air outlet connection nozzle 16 to achieve communication with the air outlet 4. The driving motor 23 is mounted on the surface of the connecting seat 11 . Mounting holes are arranged on the connecting seat 11 corresponding to the rotating shaft 24 . A bearing is installed between the rotating shaft 24 and the mounting holes.

[0065] A semiconductor-grade aluminum chamber air pressure and air tightness detection method is used to detect the semiconductor-grade aluminum chamber air pressure and air tightness detection device, comprising the following steps: S1, connecting multiple detection air pipes 7 to multiple aluminum chambers 17 of workpieces to be detected, and each aluminum chamber 17 is connected to a pressure gauge; at this time, the main air outlet valve 6 is closed.

[0066] S2, the main air outlet valve 6 is opened, and the high-pressure tank 1 delivers the gas source to the air inlet hole 3 through the air inlet pipe, and the gas source is delivered to the aluminum chamber 17 of the workpiece after passing through the air pressure series connector 2; specifically, the driving motor 23 drives the switching dial 19 to rotate, and when the signal emitted by the in-position transmitter 22 on the switching dial 19 is received by the in-position receiver 21 at the corresponding position, the switching dial 19 rotates to the position, and the switching vent 20 on the switching dial 19 is connected to the air outlet hole 4 accordingly, and the switching vent 20 is connected between the air outlet hole 4 and the air inlet cavity 18, and the gas source is delivered to the aluminum chamber 17 of the workpiece connected to the air outlet hole 4, and the air pressure and air tightness detection are carried out.

[0067] S3, monitor the pressure value of the barometer, and when it reaches the set value, rotate the switching dial 19 to block the gas source from being delivered to the workpiece aluminum chamber 17 that reaches the set pressure, and maintain the pressure; the switching dial 19 rotates to connect the switching vent 20 with the next outlet hole 4 accordingly.

[0068] S4, repeat S3 until all the aluminum chambers 17 of the workpiece complete the pressure maintenance, record the pressure value of the pressure gauge during the pressure maintenance process, and analyze the air pressure and air tightness of the aluminum chamber 17.

[0069] In this embodiment, the high-pressure tank 1 uses an argon gas bottle, argon gas is used as the gas source, and it is ensured that the gas meets the requirements. During S2, the air inlet 3 is slowly inflated, and the reading of the outlet pressure gauge 5 is monitored at the same time, and the pressure is gradually increased to ensure that the pressurization process is uniform to avoid too fast or too high pressure. During S3, a pressure maintenance test is performed for a period of time as needed, and a stable air pressure is usually maintained for a period of time to ensure that the system does not leak; the pressure is required to be not less than 120psi at the beginning of the test. If it is lower than 120psi, it needs to be re-pressurized to 125psi and then stabilized for 3 minutes. The internal space of the pressure gauge + connector is less than 15ml, and the pressure gauge is a digital pressure gauge with an accuracy of 0.1 or above. The pressure gauge needs to be numbered and corrected. The test environment requires temperature fluctuations of less than ±1°C. After completing the test, carefully release the gas source in the cavity to ensure that the release process does not cause sudden pressure release; the test time is 10min, and the judgment is based on the pressure drop <0.4psig for qualified.

[0070] When testing the same product in the same batch and different products in different batches: carefully observe the readings on the outlet pressure gauge 5 on the air inlet pipe and the readings on the barometer. When the set readings are reached, turn the switch dial 19 to block the air source from being delivered to the aluminum chamber 17 of the workpiece that has reached the set air pressure, and maintain the pressure. The switch dial 19 is rotated to connect the switch vent 20 with the next outlet hole 4, and the next product is inflated. The operation steps are the same as above, and so on.

[0071] By using the pneumatic tandem 2, the one-to-one test is increased to one-to-many test, shortening the test time of the same batch of the same product, reducing time consumption, and solving efficiency problems. The batch test method brought by the pneumatic tandem 2 can ensure that the same test conditions are applied to each cavity, reduce human errors, improve consistency and accuracy, save manpower, and reduce test costs.

[0072] Embodiment 4: A semiconductor-grade aluminum chamber pressure and airtightness detection device (see attached Figure 5), its structure is similar to any one of the embodiments 1 to 3, the main difference is that in this embodiment, a buffer mechanism is arranged in the air outlet 4, the buffer mechanism includes a buffer sleeve 29 and a buffer column 30, a guide hole 31 is arranged in the buffer sleeve 29, the guide hole 31 gradually becomes smaller towards the direction close to the buffer column 30, a buffer plate 32 is arranged at the end of the buffer column 30, the buffer plate 32 is aligned with the guide hole 31, and the buffer column 30 is connected to the buffer spring 33. The buffer mechanism also includes a fixed sleeve 34, the fixed sleeve 34 is connected to the mounting sleeve 35 through a connecting rib, the buffer spring 33 is installed in the mounting sleeve 35, one end of the buffer column 30 is placed in the mounting sleeve 35, a push rod 36 is arranged on the buffer plate 32, and the push rod 36 is pressed on the buffer sleeve 29 to realize the positioning of the buffer column 30. A step surface is arranged in the air outlet 4, one end of the buffer sleeve 29 is pressed on the step surface, and the fixed sleeve 34 is threadedly connected to the inner wall of the air outlet 4 to realize the positioning. The end face of the fixed sleeve 34 is pressed on the buffer sleeve 29 to realize the positioning of the buffer sleeve 29. When the instantaneous airflow pressure of the air outlet 4 is too high, the airflow discharged from the guide hole 31 impacts the buffer plate 32, and the buffer column 30 moves to buffer and absorb energy, reducing the impact force of the airflow, and preventing the large airflow impact from causing damage to the workpiece aluminum chamber 17. The other structures are the same as any one of embodiments 1 to 3.

[0073] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.

Claims

1. A semiconductor-grade aluminum chamber air pressure and air tightness detection device, characterized in that: The air pressure series device comprises a high-pressure tank and an air pressure series device. An air inlet and a plurality of air outlets are arranged on the air pressure series device. The air outlets can be connected with the air inlet. The air inlet is connected with the high-pressure tank, and the air outlets are respectively connected with the detection air pipes.

2. The semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 1 is characterized in that: One-way air outlet valves are installed at the air outlet positions.

3. The semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 1 is characterized in that: An outlet pressure gauge and an outlet main valve are installed on the pipeline between the air inlet and the high-pressure tank.

4. The semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 1 is characterized in that: A transition cavity is arranged on the air pressure series device, the air inlet and the air outlet are both connected with the transition cavity, and an air outlet branch valve is installed at the air outlet position.

5. The semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 1, characterized in that: An air inlet cavity is arranged on the air pressure series connector, a switching turntable is installed in the air inlet cavity, a switching vent hole is arranged on the switching turntable, and both the switching vent hole and the air inlet hole are connected with the air inlet cavity; the switching turntable rotates to make the switching vent hole and the air outlet hole connected with each other.

6. The semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 1, characterized in that: A switching turntable is installed on the air pressure series connector, an air intake sleeve and a switching vent are arranged on the switching turntable, a transition hole is arranged between the air intake sleeve and the switching vent in the switching turntable, the air intake sleeve and the air intake hole are sealed together, and the switching turntable rotates to make the switching vent and the air outlet hole communicate with each other accordingly.

7. A semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 5 or 6, characterized in that: A plurality of receivers are installed on the inner wall of the air inlet cavity corresponding to the air outlet holes, and transmitters are installed on the switching turntable corresponding to the switching air holes.

8. A semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 5 or 6, characterized in that: A driving motor is installed on the gas pressure series device, a rotating shaft is arranged on the switching turntable, the rotating shaft is rotatably installed on the gas pressure series device, and the driving motor drives the rotating shaft to rotate.

9. A semiconductor-grade aluminum chamber air pressure and air tightness detection device according to claim 5 or 6, characterized in that: A sealing surface is arranged on the air pressure series connector corresponding to the switching dial, a boss is arranged in the middle of the sealing surface on the sealing surface arranged at the opening end of the air outlet, a contact surface is arranged on the switching dial corresponding to the sealing surface, a switching vent is arranged on the contact surface, a groove is arranged on the contact surface corresponding to the boss, the contact surface is sealed and fitted with the sealing surface, and the boss is sealed and fitted with the groove.

10. A method for detecting gas pressure and air tightness of a semiconductor-grade aluminum chamber, characterized in that: The semiconductor-grade aluminum chamber air pressure and air tightness detection device described in any one of claims 1 to 9 is used for detection, comprising the following steps: S1, connecting multiple detection air pipes to multiple aluminum chambers of workpieces to be detected, and each aluminum chamber is connected to a pressure gauge; S2, a high-pressure tank delivers a gas source to the air inlet, and the gas source is delivered to the aluminum chamber of the workpiece after passing through a gas pressure series connector; S3, monitoring the pressure value of the pressure gauge, and after reaching the set value, blocking the delivery of the gas source and maintaining the pressure; S4, recording the pressure value of the pressure gauge, and analyzing the air pressure and air tightness of the aluminum chamber.

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