Raw material sampling device for photoresist production

Abstract

The invention discloses a raw material sampling device for photoresist production, which relates to the field of photoresist production and comprises a bottom plate and a storage box fixedly mounted on one side of the top of the bottom plate. In the sampling process, a driving motor drives a first crank through a belt transmission piece to promote a first push rod to perform circular motion so as to drive a first driving block to slide, and the mechanism ensures the swing of a swing rod, so that the reverse acting force of a second driving block is triggered, and a second crank also moves along with the second driving block; the rotating rod transmits force to the sliding block to trigger swinging of the movable rod, the action directly controls movement of the second fixed rod and the sampling piece, it is ensured that the sampling pipe can accurately cut into the sample storage box, stable and consistent sampling is achieved, sampling is conducted under the same standard and condition each time, and therefore the consistency of the sampling amount is ensured, and the sampling efficiency is improved. In addition, due to the automatic sampling process in the closed environment, the external pollution risk is reduced to the maximum extent.

Description

Technical Field

[0001] The invention relates to the technical field of photoresist production, in particular to a raw material sampling device used for photoresist production. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that resists etching whose solubility changes when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. In the production process of photoresist, a variety of raw materials are needed. Before production, the raw materials need to be sampled to test their physical and chemical properties, such as purity, viscosity, molecular weight, etc., to ensure that the raw materials used meet the specified quality standards.

[0003] For example, the "raw material sampling device for photoresist production" with publication number: CN218271541U includes a main body tube, a driving unit and multiple sampling tubes; the main body tube is provided with a negative pressure channel along its own axial direction, and a piston is provided in the negative pressure channel and is movably arranged along the axial direction of the main body tube, and the piston divides the negative pressure channel into a working chamber and an auxiliary chamber along the axial direction of the main body tube, and the working chamber is open at one end away from the piston; one end of any sampling tube can extend into the working chamber from the opening of the working chamber, and is detachably connected to the main body tube, and each sampling tube has a glue containing chamber, and a glue suction port is penetrated on one side wall of the glue containing chamber away from the piston, and a side wall close to the piston is set to be made of flexible material to form a flexible side wall; the driving unit is connected to the piston for driving the piston to move along the axial direction of the main body tube.

[0004] However, in the prior art, if the sampling process relies entirely on manual labor, it will not only lead to low efficiency and increase time and labor costs, but also different operators will use different methods and standards in sampling due to differences in technical levels and experience, which will lead to reduced consistency of samples and further affect the accuracy and reliability of subsequent analysis. In addition, in the manual sampling process, incorrect sampling methods or improper operations can easily cause samples to be contaminated, which will seriously affect the test results and cause data deviation or distortion, thereby adversely affecting the overall research or production process. Summary of the invention

[0005] The purpose of the present invention is to provide a raw material sampling device for photoresist production, so as to solve the problem proposed in the above background technology that different operators adopt different methods and standards when sampling due to differences in technical level and experience, which will lead to reduced consistency of samples and further affect the accuracy and reliability of subsequent analysis.

[0006] To achieve the above object, the present invention provides the following technical solution: a raw material sampling device for photoresist production, comprising a bottom plate and a material storage box fixedly installed on one side of the top of the bottom plate, a material pump is installed on one side of the top of the bottom plate, a lifting mechanism is installed on the inner side of the material storage box, a circular frame is fixedly connected to one side of the top of the bottom plate, and a sampling mechanism is installed on the top of the circular frame;

[0007] The cam is provided with a first end fixedly mounted on the top of the fixing frame, and the second end fixedly mounted on the bottom of the fixing frame is provided with a second end fixedly mounted on the top of the fixing frame, and the second end of the fixing frame is slidably connected to the fixing frame.

[0008] Preferably, the bottom end side wall of the fixing frame is rotatably connected to a first crank, one end side wall of the first crank is fixedly connected to a first push rod, the outer surface of the first push rod is rotatably connected to a first driving block, and the first driving block is slidably connected to the first limiting hole.

[0009] Preferably, one end of the rotating rod is rotatably connected to the fixed frame, the bottom of the movable block is fixedly connected to a second fixed plate, the bottom end of the movable sleeve is fixedly connected to a baffle, and the inner diameter of the movable block is smaller than the outer diameter of the baffle.

[0010] Preferably, a driving motor is installed on the inner side of the circular frame, and a belt transmission member is fixedly connected to the output end of the driving motor, and a driven wheel of the belt transmission member is fixedly connected to one end of the first crank.

[0011] Preferably, the sampling member comprises a mounting frame, one end of the mounting frame is fixedly connected to the bottom end of the second fixing rod, and the side wall of the movable block is fixedly connected to a second fixing plate.

[0012] Preferably, a second cylinder is installed on the top of the second fixed plate, a sampling tube is installed on the inner side of the mounting frame, a piston rod is slidably connected to the inner side of the sampling tube, and the top of the piston rod is fixedly connected to the bottom output end of the second cylinder.

[0013] Preferably, the lifting mechanism includes a fixed bar and a first cylinder, a lifting block is slidably connected to the inner side of the fixed bar, one end of the lifting block is fixedly connected to a lifting rod, the inner side of the fixed bar is rotatably connected to the first fixed rod, and the top of the first fixed rod is rotatably connected to a scissors frame.

[0014] Preferably, the top end of the first cylinder is fixedly connected to the inner wall of the storage box, the output end of the first cylinder is fixedly connected to a first fixed plate, the bottom end of the first fixed plate is fixedly connected to a lifting rod, and one end of the lifting rod is fixedly connected to the top of the scissors frame.

[0015] Preferably, a movable hole is opened on the inner side of the fixing bar, a lifting ring is slidably connected to the inner side of the movable hole, one end of the lifting ring passes through the movable hole, one end of the lifting ring is fixedly connected to a movable rod, and the movable rod is rotatably connected to the scissor frame.

[0016] Preferably, a sampling head is fixedly connected to the inner side of the lifting ring, a delivery pipe is fixedly connected to the top of the sampling head, one end of the delivery pipe is fixedly connected to a material pump, a discharge pipe is fixedly connected to the output end of the material pump, a sample storage box is installed on the top of the base plate, and the output end of the discharge pipe is located above the sample storage box.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. In the present invention, during the sampling process, the driving motor drives the first crank through the belt transmission part, prompting the first push rod to perform circular motion, thereby driving the first drive block to slide. This mechanism ensures the swing of the swing rod, thereby triggering the reverse force of the second drive block, causing the second crank to move accordingly, and the rotating rod transfers the force to the sliding block, triggering the swing of the movable rod. This action directly controls the movement of the second fixed rod and the sampling part, ensuring that the sampling tube can be accurately cut into the sample storage box to achieve stable and consistent sampling. Each sampling is carried out under the same standards and conditions, thereby ensuring the consistency of the sampling amount and improving the reliability of the data. In addition, the automated sampling process in a closed environment minimizes the risk of external contamination, ensuring that the obtained samples are pure and true, and accurately reflecting the characteristics of the samples in the sample storage box.

[0019] 2. In the present invention, the movable rod swings under the action of the sliding block, effectively transmitting the force to the rotating frame, thereby causing the movable block to move and cooperate. This movement process not only causes the movable rod and the movable sleeve to slide against each other, but also causes the movable sleeve to slide on the surface of the first sliding rod. When the movable sleeve reaches the end of the fixed frame, the movable block continues to slide on the second sliding rod, driving the second fixed rod and the second fixed plate to move downward, so that the sampling tube can be smoothly inserted into the sample storage box, thereby effectively obtaining the internal liquid sample. This design ensures that the sampling process proceeds smoothly and ensures the integrity of the sample. After the sampling is completed, the system uses the second cylinder to control the piston rod to achieve accurate suction of the photoresist. The cooperation of the swing rod and the first crank generates a cyclical force, which enhances the coordination of the internal structure of the system and causes the movable block to perform stable linear motion. In addition, the design of the up and down movement of the movable block makes the sampling process more efficient and convenient, ensuring that the sample is evenly distributed inside the sample box. Through precise motion control and structural design, the sampling efficiency is improved, the stability and reliability of the sample quality are ensured, and the suction and sampling process of the photoresist are smoother, ultimately achieving efficient and accurate liquid sample extraction.

[0020] 3. In the present invention, the force of the first cylinder pushes the first fixed plate to move in the movable direction, thereby driving the lifting rod to perform lifting movement. This movement causes the lifting block to slide inside the fixed bar. With the transmission of the force at the bottom end of the lifting rod, the scissor frame opens, driving the moving rod to slide. The expansion of the scissor frame controls the position of the lifting ring, so that it can perform precise linear lifting movement within the limitation of the moving hole. The sampling head is connected to the top of the lifting ring and rises and falls with the movement of the lifting ring. By adjusting the height of the lifting ring, the sampling head can penetrate into different depths inside the sample storage box to achieve multi-layer collection of samples. This function not only improves the sampling efficiency, but also ensures the representativeness and uniformity of the sampling, making the entire sampling process very accurate and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of a raw material sampling device for photoresist production according to the present invention;

[0022] Figure 2 A schematic top view of a raw material sampling device for photoresist production according to the present invention;

[0023] Figure 3 It is a structural schematic diagram of a sampling mechanism in a raw material sampling device for photoresist production according to the present invention;

[0024] Figure 4 It is a schematic diagram of the disassembled structure of a sampling mechanism in a raw material sampling device for photoresist production according to the present invention;

[0025] Figure 5It is a schematic diagram of the partially disassembled structure of a sampling mechanism in a raw material sampling device for photoresist production according to the present invention;

[0026] Figure 6 It is a partial structural schematic diagram of a raw material sampling device for photoresist production of the present invention;

[0027] Figure 7 It is a structural schematic diagram of a lifting mechanism in a raw material sampling device for photoresist production according to the present invention;

[0028] Figure 8 It is a schematic diagram of a part of the internal structure of a lifting mechanism in a raw material sampling device for photoresist production of the present invention;

[0029] Fig. 9 The present invention is a schematic diagram of the disassembled structure of a lifting mechanism in a raw material sampling device for photoresist production.

[0030] In the figure: 1, bottom plate; 2, material storage box; 3, lifting mechanism; 31, fixed bar; 311, moving hole; 32, lifting ring; 33, sampling head; 331, conveying pipe; 34, lifting rod; 35, lifting block; 36, first cylinder; 361, first fixed plate; 37, moving rod; 38, first fixed rod; 39, scissor frame; 4, material pump; 41, discharge pipe; 5, sampling mechanism; 51, fixed frame; 52, first slide bar; 53, moving sleeve; 531, second slide bar; 532, baffle; 54, movable block; 541, second fixed plate; 54 2. Second fixed rod; 55. Swing rod; 551. First limiting hole; 552. Second limiting hole; 56. Movable rod; 561. Rotating frame; 562. Sliding block; 563. Rotating rod; 57. First crank; 571. First push rod; 572. First driving block; 58. Spring; 59. Second crank; 591. Second push rod; 592. Second driving block; 6. Sample box; 7. Driving motor; 71. Belt transmission; 8. Sampling part; 81. Second cylinder; 82. Mounting frame; 83. Sampling tube; 84. Piston rod; 9. Reciprocating frame. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Example 1: Reference Figure 1 - Figure 6As shown: a raw material sampling device for photoresist production, comprising a bottom plate 1 and a material storage box 2 fixedly installed on one side of its top, a material pump 4 is installed on one side of the top of the bottom plate 1, a lifting mechanism 3 is installed inside the material storage box 2, a circular frame 9 is fixedly connected to one side of the top of the bottom plate 1, and a sampling mechanism 5 is installed on the top of the circular frame 9;

[0033] The sampling mechanism 5 includes a fixed frame 51 and a swing rod 55. The inner side of the top of the fixed frame 51 is fixedly connected to a first sliding rod 52. The surface of the first sliding rod 52 is slidably connected to a movable sleeve 53. One end of the swing rod 55 is rotatably connected to the bottom end of the fixed frame 51. The bottom of the movable sleeve 53 is fixedly connected to a second sliding rod 531. The outer surface of the second sliding rod 531 is slidably connected to a movable block 54. The bottom of the movable block 54 is fixedly connected to a second fixed rod 542. One side of the movable block 54 is rotatably connected to a rotating frame 561. The bottom of the rotating frame 561 is fixedly connected to a movable rod 56. The outer surface of the movable rod 56 is slidably connected to a sliding block 562. A spring 58 is installed between 561 and the sliding block 562, and the spring 58 is sleeved on the outer surface of the movable rod 56. The side wall of the sliding block 562 is fixedly connected with a rotating rod 563, and the outer surface of the rotating rod 563 is fixedly connected with a second crank 59, and a second push rod 591 is fixedly connected to the side wall of one end of the second crank 59. A second limiting hole 552 is opened at the top of the swing rod 55, and a first limiting hole 551 is opened at the bottom of the swing rod 55. The second limiting hole 552 is slidably connected to the inner side of the second driving block 592, and the outer surface of the second push rod 591 is rotatably connected to the second driving block 592. A sampling component 8 is installed on one side of the movable block 54.

[0034] In this embodiment, when sampling, the photoresist inside the storage box 2 is sampled by using the material pump 4 in cooperation with the sampling head 33 so as to be transported to the sample storage box 6 through the discharge pipe 41. Subsequently, the inside of the sample storage box 6 is partially sampled by the sampling member 8, and multiple samplings can be performed to divide the sample area inside it into multiple groups. When the sampling mechanism 5 is used to divide the samples, the power of the driving motor 7 is transmitted to the first crank 57 through the belt transmission member 71, so that the first crank 57 drives the first push rod 571 to move and start to make a circular motion. In this process, the first push rod 571 will drive the first drive block 572 to move together. At this time, the first drive block 572 will slide in the first limit hole 551, so that the first crank 57 continues to rotate. The synergistic effect of the first push rod 571 and the first drive block 572 will exert a force on the swing rod 55, so that the swing rod 55 swings when it moves. Due to the swing of the swing rod 55 , the second driving block 592 can slide in the second limiting hole 552 , thereby applying a reverse force to the second push rod 591 , so that the second crank 59 starts to move.

[0035] Because the second push rod 591 rotates at different speeds due to the swinging rod 55, the second crank 59 cannot complete a complete circular motion when rotating. As the swinging rod 55 continues to swing, the second crank 59 will also swing accordingly. During the activity, the rotating rod 563 transmits the force to the sliding block 562, so that the movable rod 56 starts to swing.

[0036] The swing of the movable rod 56 will cause the movable block 54 to move, thereby controlling the movement of the second fixed rod 542, so as to control the movement of the sampling piece 8. As the position of the sampling piece 8 changes, the sample inside the sample box 6 can be sampled through the sampling tube 83. By controlling the movement of the movable rod 56, the consistency and repeatability of the sampling are ensured. Each sampling can be completed under the same standards and conditions, ensuring the same sampling amount. This consistency not only improves the reliability of the data, but also makes the subsequent analysis and comparison of experimental data more scientific and reasonable. Through this fully automated sampling system, the sampling process is carried out in a closed environment, which minimizes these risks, so that a purer sample that truly reflects the characteristics of the sample in the sample box 6 can be obtained.

[0037] Embodiment 2: Figure 3 - Figure 6 As shown, the side wall at the bottom end of the fixed frame 51 is rotatably connected to the first crank 57, and the side wall at one end of the first crank 57 is fixedly connected to the first push rod 571. The outer surface of the first push rod 571 is rotatably connected to the first driving block 572, and the first driving block 572 is slidably connected to the first limiting hole 551. One end of the rotating rod 563 is rotatably connected to the fixed frame 51, and the bottom of the movable block 54 is fixedly connected to the second fixed plate 541, and the bottom end of the movable sleeve 53 is fixedly connected to the baffle 532, and the inner diameter of the movable block 54 is smaller than the outer diameter of the baffle 532. The inner side of the back frame 9 is installed with a driving motor 7, and the output end of the driving motor 7 is fixedly connected to a belt transmission member 71, and the driven wheel of the belt transmission member 71 is fixedly connected to one end of the first crank 57. The sampling member 8 includes a mounting frame 82, one end of which is fixedly connected to the bottom end of the second fixed rod 542, and the side wall of the movable block 54 is fixedly connected to the second fixed plate 541. A second cylinder 81 is installed on the top of the second fixed plate 541 , a sampling tube 83 is installed inside the mounting frame 82 , a piston rod 84 is slidably connected inside the sampling tube 83 , and the top of the piston rod 84 is fixedly connected to the bottom output end of the second cylinder 81 .

[0038] In this embodiment, during the sampling process, when the movable rod 56 is swung by the force generated by the sliding block 562, the swung movement not only causes the movable rod 56 to move, but also effectively transmits the force it bears to the rotating frame 561. The rotating frame 561 is also pushed due to the additional force of the spring 58, thereby causing relative sliding between the movable rod 56 and the sliding block 562. In this process, the continuous swinging of the movable rod 56 will cause the rotating frame 561 to further transmit the force to the movable block 54, causing the movable sleeve 53 to slide on the surface of the first sliding rod 52.

[0039] As the movable sleeve 53 moves toward one end of the first slide bar 52, when it reaches the end, the movable sleeve 53 cannot move forward further due to the restriction of the fixed frame 51. This restriction means that at this time, the swing of the movable rod 56 cannot continue to transmit the force to the movable sleeve 53, causing the entire system to enter a relatively static state.

[0040] At the same time, under the action force, the movable block 54 starts to slide on the surface of the second slide bar 531 to control its downward movement. As the movable block 54 moves downward, it drives the second fixed rod 542 and the second fixed plate 541 to move downward together, so that the bottom end of the sampling tube 83 can be inserted into the interior of the sample storage box 6. This design allows the sampling process to proceed smoothly, thereby ensuring that the internal liquid sample can be effectively obtained.

[0041] After the sampling is completed, the second cylinder 81 can be used to control the movement of the piston rod 84 to achieve the suction of the internal photoresist. This process requires precise control to ensure that the sampling is accurate and complete. In this process, the swing rod 55 will generate a reciprocating force under the continuous action of the first crank 57, thereby continuously enhancing the coordination between the first crank 57 and the movable rod 56 and other related structures. In this way, the movable block 54 will perform a back-and-forth linear motion.

[0042] During the linear motion of the movable block 54, the two end points of its motion trajectory will be accompanied by up and down motion changes. This up and down motion design can make the sampling process more efficient and convenient, ensuring that after the entire sampling is completed, the final sample can be evenly distributed inside the sample box. The design of this system not only improves the efficiency of sampling, but also ensures the stability and reliability of the sampling quality, making the suction and sampling process of the photoresist smoother.

[0043] Embodiment 3: According to Figure 7 - Fig. 9As shown, the lifting mechanism 3 includes a fixed bar 31 and a first cylinder 36. A lifting block 35 is slidably connected to the inner side of the fixed bar 31. A lifting rod 34 is fixedly connected to one end of the lifting block 35. A first fixed rod 38 is rotatably connected to the inner side of the fixed bar 31. A scissor frame 39 is rotatably connected to the top of the first fixed rod 38. The top of the first cylinder 36 is fixedly connected to the inner wall of the storage box 2. A first fixed plate 361 is fixedly connected to the output end of the first cylinder 36. The bottom end of the first fixed plate 361 is fixedly connected to the lifting rod 34. One end of the lifting rod 34 is fixedly connected to the top of the scissor frame 39. A moving hole 311 is opened on the inner side of the fixed bar 31. A lifting ring 32 is slidably connected to the inner side of the moving hole 311. One end of the lifting ring 32 passes through the moving hole 311. A moving rod 37 is fixedly connected to one end of the lifting ring 32. The moving rod 37 is rotatably connected to the scissor frame 39. A sampling head 33 is fixedly connected to the inner side of the lifting ring 32, a delivery pipe 331 is fixedly connected to the top of the sampling head 33, one end of the delivery pipe 331 is fixedly connected to the material pump 4, a discharge pipe 41 is fixedly connected to the output end of the material pump 4, a sample storage box 6 is installed on the top of the bottom plate 1, and the output end of the discharge pipe 41 is located above the sample storage box 6.

[0044] In this embodiment, during the sampling process, the force generated by the first cylinder 36 can effectively push the first fixed plate 361 to move in the moving direction. As the first fixed plate 361 continues to move, its displacement will be directly transmitted to the lifting rod 34 connected thereto, causing the latter to start lifting and lowering movement. The movement of the lifting rod 34 is not only unidirectional, but also drives the lifting block 35 to slide correspondingly inside the fixed bar 31. This sliding process is very critical because it provides the necessary up and down adjustment space for subsequent sampling.

[0045] In particular, when the force generated by the bottom end of the lifting rod 34 is transmitted to the scissor frame 39, the scissor frame 39 can effectively respond to the force because the first fixing rod 38 is firmly fixed to the inner side of the fixing bar 31. The bottom end of the scissor frame 39 starts to drive the moving rod 37 to slide, resulting in the scissor frame 39 gradually unfolding.

[0046] At the same time, the expansion of the scissor frame 39 also controls the position of the lifting ring 32, so that the lifting ring 32 can perform precise linear lifting and lowering motion within the limits of the moving hole 311. This design ensures that during the sampling process, the adjustment of the lifting ring 32 is controlled and predictable. The movement path of the lifting ring 32 is actually limited by the design, so that its range of motion can be accurately set, thereby avoiding unnecessary damage or mis-sampling.

[0047] In addition, the sampling head 33 is directly connected to the top of the lifting ring 32. As the lifting ring 32 moves, the sampling head 33 will move accordingly inside the storage box 2. The design of the lifting ring 32 allows it to move up and down precisely in the vertical direction. This function is crucial for the flexible positioning of the sampling head 33. By adjusting the height of the lifting ring 32, the sampling head 33 can penetrate into different depths inside the sample storage box 6 to achieve multi-level collection of samples. This design not only improves the efficiency of sampling, but also ensures the representativeness and uniformity of the sampled samples.

[0048] The use method and working principle of the device: During the sampling process, the first fixed plate 361 is pushed to move by the force of the first cylinder 36. As the first fixed plate 361 continues to move, the lifting rod 34 can be driven to move up and down. At this time, the lifting rod 34 will drive the lifting block 35 to slide inside the fixed bar 31. In this process, the force at the bottom end of the lifting rod 34 will be transmitted to the scissor frame 39. Since the first fixed rod 38 is fixed on the inner side of the fixed bar 31, the bottom end of the scissor frame 39 can drive the moving rod 37 to slide. This not only makes the scissor frame 39 gradually unfold, but also controls the position of the lifting ring 32, so that one end of the lifting ring 32 can perform a linear lifting motion under the restriction of the moving hole 311. At the same time, the sampling head 33, driven by the lifting ring 32, will move inside the storage box 2 to achieve sampling at different depths.

[0049] During sampling, the photoresist inside the storage box 2 is sampled by using the material pump 4 in cooperation with the sampling head 33, and is transported to the sample storage box 6 through the discharge pipe 41. In this process, the inside of the sample storage box 6 is partially sampled by the sampling member 8, and multiple samplings can be achieved, and the sample area inside the sample storage box 6 is divided into multiple groups.

[0050] When the sampling mechanism 5 is used to divide the sample, the power of the driving motor 7 is transmitted to the first crank 57 through the belt transmission member 71, so that the crank 57 starts to move and drives the first push rod 571 to perform circular motion. In this process, the first push rod 571 drives the first driving block 572 to move together, and the first driving block 572 slides inside the first limiting hole 551, so that the first crank 57 rotates. The synergistic action of the first push rod 571 and the first driving block 572 applies a force to the swing rod 55, causing the swing rod 55 to swing when it moves. Due to the swing of the swing rod 55, the second driving block 592 will slide inside the second limiting hole 552, and apply a force to the second push rod 591 in the opposite direction, so that the second crank 59 starts to move. Since the rotation of the swing rod 55 causes the linear velocity of the second push rod 591 to be different, the second crank 59 cannot perform a complete circular motion when it rotates. As the swing rod 55 continues to swing, the second crank 59 will also swing accordingly. When the rotating rod 563 moves following the second crank 59 , the force is transmitted to the sliding block 562 , so that the movable rod 56 starts to swing.

[0051] The swing of the movable rod 56 causes the movable block 54 to move, thereby controlling the movement of the second fixed rod 542, so as to adjust the position of the sampling member 8. As the position of the sampling member 8 changes, the sample inside the sample box 6 can be sampled through the sampling tube 83.

[0052] During the sampling process, when the movable rod 56 is swung by the force of the sliding block 562, the force will be transmitted to the rotating frame 561. Due to the force of the spring 58, the rotating frame 561 will be pushed, resulting in relative sliding between the movable rod 56 and the sliding block 562. In this process, the continued movement of the movable rod 56 will cause the rotating frame 561 to transmit the force to the movable block 54, so that the movable sleeve 53 slides on the surface of the first sliding rod 52. When the movable sleeve 53 moves to the end of one end of the first sliding rod 52, the movable sleeve 53 cannot continue to move due to the restriction of the fixed frame 51. At this time, the swing of the movable rod 56 cannot transmit the force to the movable sleeve 53.

[0053] Therefore, after receiving the force, the movable block 54 will slide on the surface of the second slide bar 531, controlling the movable block 54 to move downward, driving the second fixed rod 542 and the second fixed plate 541 to move downward together, so that the bottom end of the sampling tube 83 is inserted into the sample storage box 6. Subsequently, the second cylinder 81 is used to control the piston rod 84 to move, so that the photoresist inside can be sucked.

[0054] As the swinging rod 55 is continuously acted upon by the first crank 57, the first crank 57 cooperates with the movable rod 56 and other structures to cause the movable block 54 to perform a back-and-forth linear motion. At both ends of the linear motion, the movable block 54 also performs an up-and-down motion, so that after the sampling is completed inside the sample storage box 6, the sample can be evenly distributed inside the sample box.

[0055] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A raw material sampling device for photoresist production, comprising a base plate (1) and a material storage box (2) fixedly mounted on one side of its top, a material pump (4) mounted on one side of the top of the base plate (1), characterized in that: A lifting mechanism (3) is installed inside the material storage box (2), a circular frame (9) is fixedly connected to one side of the top of the bottom plate (1), and a sampling mechanism (5) is installed on the top of the circular frame (9); The sampling mechanism (5) comprises a fixed frame (51) and a swing rod (55), wherein a first sliding rod (52) is fixedly connected to the inner side of the top of the fixed frame (51), a movable sleeve (53) is slidably connected to the surface of the first sliding rod (52), one end of the swing rod (55) is rotatably connected to the bottom end of the fixed frame (51), a second sliding rod (531) is fixedly connected to the bottom of the movable sleeve (53), a movable block (54) is slidably connected to the outer surface of the second sliding rod (531), a second fixed rod (542) is fixedly connected to the bottom of the movable block (54), one side of the movable block (54) is rotatably connected to a rotating frame (561), a movable rod (56) is fixedly connected to the bottom of the rotating frame (561), a sliding block (562) is slidably connected to the outer surface of the movable rod (56), and the rotating frame (561) is fixedly connected to the movable rod (56) and the movable rod (562) is slidably connected to the outer surface of the movable rod (56). A spring (58) is installed between the movable frame (561) and the sliding block (562), and the spring (58) is sleeved on the outer surface of the movable rod (56). The side wall of the sliding block (562) is fixedly connected with a rotating rod (563), and the outer surface of the rotating rod (563) is fixedly connected with a second crank (59), and the side wall of one end of the second crank (59) is fixedly connected with a second push rod (591). The top end of the swing rod (55) is provided with a second limiting hole (552), and the bottom end of the swing rod (55) is provided with a first limiting hole (551). The inner side of the second limiting hole (552) is slidably connected with a second driving block (592), and the outer surface of the second pushing rod (591) is rotatably connected with the second driving block (592). A sampling component (8) is installed on one side of the movable block (54).

2. A raw material sampling device for photoresist production according to claim 1, characterized in that: The side wall at the bottom end of the fixing frame (51) is rotatably connected to a first crank (57), a side wall at one end of the first crank (57) is fixedly connected to a first push rod (571), an outer surface of the first push rod (571) is rotatably connected to a first driving block (572), and the first driving block (572) is slidably connected to the first limiting hole (551).

3. A raw material sampling device for photoresist production according to claim 2, characterized in that: One end of the rotating rod (563) is rotatably connected to the fixed frame (51); the bottom of the movable block (54) is fixedly connected to a second fixed plate (541); the bottom end of the movable sleeve (53) is fixedly connected to a baffle (532); and the inner diameter of the movable block (54) is smaller than the outer diameter of the baffle (532).

4. A raw material sampling device for photoresist production according to claim 3, characterized in that: A driving motor (7) is installed inside the circular frame (9), and a belt transmission member (71) is fixedly connected to the output end of the driving motor (7), and a driven wheel of the belt transmission member (71) is fixedly connected to one end of the first crank (57).

5. The raw material sampling device for photoresist production according to claim 1, characterized in that: The sampling member (8) comprises a mounting frame (82), one end of the mounting frame (82) is fixedly connected to the bottom end of the second fixing rod (542), and the side wall of the movable block (54) is fixedly connected to the second fixing plate (541).

6. A raw material sampling device for photoresist production according to claim 5, characterized in that: A second cylinder (81) is installed on the top of the second fixed plate (541), a sampling tube (83) is installed on the inner side of the mounting frame (82), a piston rod (84) is slidably connected to the inner side of the sampling tube (83), and the top of the piston rod (84) is fixedly connected to the bottom output end of the second cylinder (81).

7. A raw material sampling device for photoresist production according to claim 1, characterized in that: The lifting mechanism (3) comprises a fixing bar (31) and a first cylinder (36); a lifting block (35) is slidably connected to the inner side of the fixing bar (31); one end of the lifting block (35) is fixedly connected to a lifting rod (34); the inner side of the fixing bar (31) is rotatably connected to a first fixing rod (38); and the top of the first fixing rod (38) is rotatably connected to a scissor-type frame (39).

8. A raw material sampling device for photoresist production according to claim 7, characterized in that: The top end of the first cylinder (36) is fixedly connected to the inner wall of the material storage box (2); the output end of the first cylinder (36) is fixedly connected to a first fixed plate (361); the bottom end of the first fixed plate (361) is fixedly connected to a lifting rod (34); and one end of the lifting rod (34) is fixedly connected to the top of a scissor frame (39).

9. A raw material sampling device for photoresist production according to claim 8, characterized in that: A moving hole (311) is provided inside the fixing bar (31), a lifting ring (32) is slidably connected inside the moving hole (311), one end of the lifting ring (32) passes through the moving hole (311), one end of the lifting ring (32) is fixedly connected to a moving rod (37), and the moving rod (37) is rotatably connected to the scissor frame (39).

10. A raw material sampling device for photoresist production according to claim 9, characterized in that: A sampling head (33) is fixedly connected to the inner side of the lifting ring (32); a delivery pipe (331) is fixedly connected to the top of the sampling head (33); one end of the delivery pipe (331) is fixedly connected to a material pump (4); a discharge pipe (41) is fixedly connected to the output end of the material pump (4); a sample storage box (6) is installed on the top of the bottom plate (1); and the output end of the discharge pipe (41) is located above the sample storage box (6).

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