Microwave test probe station and use method thereof

Abstract

The invention provides a microwave test probe station and a use method thereof. The microwave test probe station comprises a support frame; the test bench is fixedly connected to the top of the supporting frame, a probe bench is installed at the position, close to one side, of the top of the test bench, a placement opening is formed in the top of the probe bench, fixing openings are formed in the two sides of the inner wall of the placement opening, a movable frame is installed between the two fixing openings through two drawing assemblies, and the movable frame is fixedly connected with the test bench. A movable groove is formed in the top of the movable frame, a first air cylinder is installed at the bottom of the movable frame, a butt joint ring is installed at the telescopic end of the first air cylinder, and six second air cylinders are installed on the outer surface of the butt joint ring at equal intervals. According to the microwave test probe station provided by the invention, through the design, the direction of the platform can be accurately, quickly and stably adjusted in multiple directions on the probe station, and a probe and a chip can be aligned more quickly and efficiently, so that the chip test efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of air ventilation, and in particular to a microwave test probe station and a use method thereof. Background Art

[0002] Microwave measurement is a measurement technology for microwave signals and microwave circuit related parameters. The main measurement objects are: power, frequency or wavelength, waveform and spectrum, noise level, standing wave, attenuation and phase shift, etc. It is a fast, accurate, multi-parameter and multi-functional comprehensive measurement system composed of microwave measurement, automatic control and computer technologies. There are two main structural types: automatic network analyzer and six-port network analyzer.

[0003] The microwave test probe station measures the microwave radio frequency parameters of wafers or chips by using a probe station and a probe. The probe station is one of the important testing equipment in the semiconductor industry. During the microwave test, the probe station fixes the wafer or chip on a chuck mounted on the platform, and uses a manipulator to place the probe arm and the probe tip to the correct position on the object to be tested. The probe tip must be suitable for the test procedure to be performed and accurately aligned by a microscope.

[0004] In the process of aligning the chip platform with the probe on the existing microwave test probe station, the platform is mainly adjusted horizontally and vertically. The adjustment direction has certain limitations and the operation is cumbersome, which makes it inconvenient to quickly and accurately align the chip and the probe, thus affecting the test efficiency and accuracy.

[0005] Therefore, it is necessary to provide a microwave test probe station and a method of using the same to solve the above technical problems. Summary of the invention

[0006] The present invention provides a microwave test probe station and a method for using the same, which solves the problem that if a chip platform is placed on the microwave test probe station only to assist in aligning the chip and the probe in a horizontal or vertical manner, the adjustment of the orientation has certain limitations, making it inconvenient to quickly and accurately align the chip and the probe, affecting the test efficiency and accuracy.

[0007] In order to solve the above technical problems, the microwave test probe station provided by the present invention comprises: a support frame;

[0008] The test bench is fixedly connected to the top of the support frame, a probe bench is installed at a position near one side of the top of the test bench, a placement opening is provided on the top of the probe bench, and fixing openings are provided on both sides of the inner wall of the placement opening, a movable frame is installed between the two fixing openings through two pull-out assemblies, a movable groove is provided on the top of the movable frame, a first cylinder is installed at the bottom of the movable frame, a docking ring is provided at the telescopic end of the first cylinder, six second cylinders are installed at equal intervals on the outer surface of the docking ring, and each telescopic end of the second cylinder is fixedly connected with a fixing ring, a movable column is installed between the plurality of fixing rings through a connecting buckle, a movable disk is fixedly connected to the bottom end of the movable column, a platform is fixedly connected to the top end of the movable column, a plurality of air holes are provided on the top of the platform, a docking head is fixedly connected to the outer surface of the platform at the back, and a docking plate with a handle is installed on the front of the movable frame;

[0009] A negative pressure component, wherein the negative pressure component is installed on the back of the probe station, an air suction pipe is installed at the inlet of the negative pressure component, probes are installed at the top of the probe station near both sides through an adjustment component, a collection module is installed at the top of the probe station through an adjustment base, and a network analyzer is installed at the top of the test bench near the other side;

[0010] The placement port is opened on the front and top of the probe station. The pull-out assembly is similar to the structure of a drawer. The docking ring is located inside the movable groove, and the bottom of the movable disk is in contact with the inner wall of the docking ring. If necessary, a ball bearing can be installed on the bottom of the movable disk to reduce friction. The suction pipe has a certain length to meet the movement of the movable frame back and forth. The suction pipe is a hose. The adjustment base can adjust the position of the acquisition module as needed. The adjustment assembly can make the probes closer or farther away from each other as needed. The inside of the adjustment assembly can be driven by a cylinder, and the network analyzer and the probe are connected by a line.

[0011] Preferably, a mounting frame is installed on the top of the test bench near the other side, and a display screen is installed on the front of the mounting frame;

[0012] The display screen can display the images collected by the collection module.

[0013] Preferably, a connecting wire is installed on the top of the acquisition module through a connector, a socket is provided on the front side of the probe station near both sides, and a plug is installed on the back side of the docking plate near both sides;

[0014] The other end of the cable is connected to the display and network analyzer, and the plug is snapped into the inside of the socket.

[0015] Preferably, a base is installed on the top of the test bench, and an adjusting rod is installed on the top of the base;

[0016] The adjusting rod can control the operation of six second cylinders.

[0017] Preferably, a control box is installed on one side of the inner wall of the support frame, and a box door is rotatably connected to one side of the control box;

[0018] The control box is equipped with a power switch and a controller for controlling the operation of the equipment.

[0019] Preferably, the negative pressure component includes a protective shell, heat dissipation holes are provided on both sides of the protective shell, an air pump is installed inside the protective shell, and an exhaust pipe is installed at the outlet of the air pump.

[0020] Preferably, the top of the probe station is fixedly connected to a fixing plate near both sides, and the top of the fixing plate is rotatably connected to a rotating disk via a rotating buckle;

[0021] The rotating buckle allows the rotating disc to be angle adjusted.

[0022] Preferably, a third cylinder is installed on the top of the rotating disk, and a mounting buckle with a fixing bolt is installed on each telescopic end of the third cylinder, and a probe is installed on the other side of each mounting buckle;

[0023] The mounting buckle and the fixing bolt are used to fix the probe, and a soft ring is arranged at one end of the fixing bolt.

[0024] Preferably, a connecting frame is installed on one side of the fixing plate, and a telescopic rod is rotatably connected to one side of the connecting frame through a movable buckle;

[0025] The telescopic end of the telescopic rod is connected with the outer surface of the rotating disk through a movable buckle.

[0026] A method for using a microwave test probe station, wherein the microwave test probe station needs to be used when in use, and the method comprises the following steps:

[0027] S1: A movable frame is installed in the placement opening of the probe station through a pull-out assembly, and then the docking ring is installed in the movable groove on the movable frame through the first cylinder. The expansion and contraction of the first cylinder can drive the structure on the docking ring to adjust the up and down position according to the needs, and six second cylinders are installed on the outer surface of the docking ring. Then, the movable column with the movable disk is connected by leaving a connecting buckle and a fixed ring at the expansion end of the second cylinder. The movable disk and the docking ring are in contact to increase the stability of the movable column when adjusting the orientation;

[0028] S2: The platform with air holes is installed on a movable column, and the platform is connected to the suction pipe of the negative pressure component through a joint. The negative pressure component draws air so that the chip placed on the platform is fixed on the platform through the principle of negative pressure, thereby increasing the test stability.

[0029] S3: When conducting chip microwave testing, first set the test parameters and perform calibration on the network analyzer, then adjust the distance between the two probes by adjusting the components, and prepare to pull out the movable frame to place the chip to be tested on the platform. At the same time, start the negative pressure component to form negative pressure on the platform to fix the chip, and then push the movable frame to reset. You can cooperate with the acquisition module to adjust the position of the platform with the chip. During this process, the second cylinder on the outer surface of the docking ring can be expanded or contracted according to needs, which can drive the movable column to be adjusted in all directions until the chip and the probe are aligned. Then start the first cylinder to push the docking ring upward, so that the aligned chip and probe can be in contact for testing.

[0030] Compared with the related art, the microwave test probe station and the method of using the same provided by the present invention have the following advantages:

[0031] Beneficial effects:

[0032] The present invention provides a microwave test probe station. In order to enable the platform of the microwave test probe station to adjust the orientation quickly and accurately, a movable frame is installed in the placement opening of the probe station through a pull-out assembly, and then the docking ring is installed in the movable groove on the movable frame through a first cylinder. The expansion and contraction of the first cylinder can drive the structure on the docking ring to adjust the upper and lower positions according to the needs, and six second cylinders are installed on the outer surface of the docking ring. Then, a movable column with a movable disk is connected by leaving a connecting buckle and a fixing ring at the expansion and contraction end of the second cylinder. The movable disk and the docking ring are in contact to increase the stability of the movable column when adjusting the orientation. Then, a platform with an air vent is installed on the movable column, and the platform is connected to the suction pipe of the negative pressure assembly through the docking joint. The negative pressure assembly is used to evacuate air so that the chip placed on the platform is fixed on the platform through the principle of negative pressure, thereby increasing the test stability. Through this design, the platform can be accurately, quickly and stably adjusted in all directions on the probe station, and the probe and the chip can be aligned faster and more efficiently, thereby facilitating improving the efficiency of chip testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A schematic structural diagram of a first embodiment of a microwave test probe station provided by the present invention;

[0034] Figure 2 A structural schematic diagram of a network analyzer is provided for the present invention;

[0035] Figure 3 A structural schematic diagram of a docking plate is provided for the present invention;

[0036] Figure 4 The present invention provides Figure 3 An enlarged view of point A is shown;

[0037] Figure 5 A structural schematic diagram of a connecting buckle is provided for the present invention;

[0038] Figure 6 A schematic diagram of the structure of an air pump is provided for the present invention;

[0039] Figure 7 A schematic structural diagram of a second embodiment of a microwave test probe station provided by the present invention;

[0040] Figure 8 The present invention provides Figure 7 An enlarged view of point B is shown.

[0041] Numbers in the figure: 1. Support frame, 2. Test bench, 3. Base, 4. Adjustment rod, 5. Box door, 6. Control box, 7. Handle, 8. Docking plate, 9. Probe station, 10. Placement port, 11. Adjustment component, 12. Probe, 13. Acquisition module, 14. Connecting wire, 15. Connector, 16. Adjustment base, 17. Network analyzer, 18. Mounting frame, 19. Negative pressure component, 191. Protective shell, 192. Air pump, 193. Exhaust pipe, 194. Heat dissipation hole, 20. Movable frame, 21. First cylinder , 22. Pull-out assembly, 23. Movable column, 24. Platform, 25. Air vent, 26. Butt joint, 27. Intake pipe, 28. Movable groove, 29. Socket, 30. Fixing port, 31. Docking ring, 32. Connecting buckle, 33. Plug, 34. Movable disk, 35. Fixed ring, 36. Second cylinder, 37. Fixed plate, 38. Rotating buckle, 39. Rotating disk, 40. Installation buckle, 41. Fixing bolt, 42. Third cylinder, 43. Movable buckle, 44. Telescopic rod, 45. Connecting frame, 46. Display screen. DETAILED DESCRIPTION

[0042] The present invention will be further described below in conjunction with the accompanying drawings and implementation modes.

[0043] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 ,in, Figure 1 A schematic structural diagram of a first embodiment of a microwave test probe station provided by the present invention; Figure 2 A structural schematic diagram of a network analyzer is provided for the present invention; Figure 3 A structural schematic diagram of a docking plate is provided for the present invention; Figure 4 The present invention provides Figure 3 An enlarged view of point A is shown; Figure 5 A structural schematic diagram of a connecting buckle is provided for the present invention; Figure 6The present invention provides a schematic diagram of the structure of the air pump. The microwave test probe station comprises: a support frame 1;

[0044] A test bench 2 is fixedly connected to the top of the support frame 1, a probe station 9 is installed at a position near one side of the top of the test bench 2, a placement opening 10 is provided on the top of the probe station 9, and both sides of the inner wall of the placement opening 10 are provided with fixing openings 30, a movable frame 20 is installed between the two fixing openings 30 through two pull-out components 22, a movable groove 28 is provided on the top of the movable frame 20, a first cylinder 21 is installed at the bottom of the movable frame 20, a docking ring 31 is installed at the telescopic end of the first cylinder 21, and the docking ring 31 is provided Six second cylinders 36 are installed at equal intervals on the outer surface, and a fixed ring 35 is fixedly connected to the telescopic end of each second cylinder 36. A movable column 23 is installed between the plurality of the fixed rings 35 through a connecting buckle 32. A movable plate 34 is fixedly connected to the bottom end of the movable column 23, and a platform 24 is fixedly connected to the top end of the movable column 23. A plurality of air holes 25 are provided on the top of the platform 24. A docking joint 26 is fixedly connected to the outer surface of the platform 24 at the back, and a docking plate 8 with a handle 7 is installed on the front of the movable frame 20;

[0045] A negative pressure component 19, wherein the negative pressure component 19 is installed on the back of the probe station 9, an air intake pipe 27 is installed at the inlet of the negative pressure component 19, probes 12 are installed at the top of the probe station 9 near both sides through an adjustment component 11, a collection module 13 is installed at the top of the probe station 9 through an adjustment base 16, and a network analyzer 17 is installed at the top of the test bench 2 near the other side;

[0046] The placement port 10 has openings on the front and top of the probe station 9. The pull-out assembly 22 is similar to the structure of a drawer. The docking ring 31 is located inside the movable groove 28. The movable disk 34 is in contact with the bottom of the inner wall of the docking ring 31. If necessary, a ball bearing can be installed at the bottom of the movable disk 34 to reduce friction. The suction pipe 27 has a certain length to meet the movement of the movable frame 20 back and forth. The suction pipe 27 is a hose. The adjustment base 16 can adjust the position of the acquisition module 13 as needed. The adjustment assembly 11 can allow the probes 12 to move closer to or farther away from each other as needed. The interior of the adjustment assembly 11 can be driven by a cylinder. The network analyzer 17 and the probe 12 are connected by a line. The interior of the platform 24 is empty, the docking joint 26 and the platform 24 are connected, and the pull-out assembly 22 is installed inside the fixed port 30.

[0047] A mounting frame 18 is installed on the top of the test bench 2 near the other side, and a display screen 46 is installed on the front of the mounting frame 18;

[0048] The display screen 46 can display the image collected by the collection module 13 to assist in alignment.

[0049] The top of the acquisition module 13 is installed with a connecting wire 14 through a connector 15, the front of the probe station 9 is provided with sockets 29 near both sides, and the back of the docking plate 8 is provided with plugs 33 near both sides;

[0050] The other end of the connecting line 14 is connected to the display screen 46 and the network analyzer 17 , and the plug 33 is inserted into the inside of the socket 29 .

[0051] A base 3 is installed on the top of the test bench 2, and an adjusting rod 4 is installed on the top of the base 3;

[0052] The regulating rod 4 can control the operation of the six second cylinders 36 , and there are also buttons on the base 3 to control the operation of other devices on the probe station 9 .

[0053] A control box 6 is installed on one side of the inner wall of the support frame 1, and a box door 5 is rotatably connected to one side of the control box 6;

[0054] The box door 5 is provided with a lock, and the control box 6 is internally provided with a power switch and a controller for controlling the operation of the equipment.

[0055] The negative pressure assembly 19 comprises a protective shell 191, both sides of the protective shell 191 are provided with heat dissipation holes 194, an air pump 192 is installed inside the protective shell 191, and an exhaust pipe 193 is installed at the outlet of the air pump 192;

[0056] The air pump 192 draws air to form a negative pressure on the platform 24 .

[0057] A method for using a microwave test probe station, wherein the microwave test probe station needs to be used when in use, and the method comprises the following steps:

[0058] S1: A movable frame 20 is installed in the placement port 10 of the probe station 9 through a pull-out assembly 22, and then a docking ring 31 is installed in a movable groove 28 on the movable frame 20 through a first cylinder 21. The expansion and contraction of the first cylinder 21 can drive the structure on the docking ring 31 to adjust the up and down position according to demand, and six second cylinders 36 are installed on the outer surface of the docking ring 31. Then, a movable column 23 with a movable disk 34 is connected by leaving a connecting buckle 32 and a fixed ring 35 at the expansion and contraction end of the second cylinder 36. The movable disk 34 is in contact with the docking ring 31 to increase the stability of the movable column 23 when adjusting the orientation;

[0059] S2: The platform 24 of the air hole 25 is installed on the movable column 23, and the platform 24 is connected to the suction pipe 27 of the negative pressure component 19 through the joint 26. The negative pressure component 19 draws air so that the chip placed on the platform 24 is fixed on the platform 24 through the principle of negative pressure, thereby increasing the test stability;

[0060] S3: When conducting microwave testing on a chip, first set the test parameters and perform calibration on the network analyzer 17, then adjust the distance between the two probes 12 by adjusting the component 11, and prepare to pull out the movable frame 20 to place the chip to be tested on the platform 24, and at the same time start the negative pressure component 19 to form a negative pressure on the platform 24 to fix the chip, then push the movable frame 20 to reset, and then cooperate with the acquisition module 13 to adjust the orientation of the platform 24 with the chip. During this process, the second cylinder 36 on the outer surface of the docking ring 31 can be expanded or contracted according to needs, so as to drive the movable column 23 to be adjusted in all directions until the chip and the probe 12 are aligned, and then start the first cylinder 21 to push the docking ring 31 upward, so that the aligned chip and the probe 12 can be brought into contact for testing.

[0061] The working principle of the microwave test probe station and the use method thereof provided by the present invention is as follows:

[0062] A movable frame 20 is installed in the placement port 10 of the probe station 9 through a pull-out assembly 22, and then the docking ring 31 is installed in the movable groove 28 on the movable frame 20 through the first cylinder 21. The expansion and contraction of the first cylinder 21 can drive the structure on the docking ring 31 to adjust the up and down position according to needs, and six second cylinders 36 are installed on the outer surface of the docking ring 31. Then, the movable column 23 with a movable disk 34 is connected by leaving a connecting buckle 32 and a fixing ring 35 at the expansion end of the second cylinder 36. The movable disk 34 is in contact with the docking ring 31 to increase the stability of the movable column 23 during azimuth adjustment. Then, the platform 24 with the air vent 25 is installed on the movable column 23, and the platform 24 is connected to the suction pipe 27 of the negative pressure assembly 19 through the docking joint 26. The core placed on the platform 24 is exhausted by the negative pressure assembly 19. The chip is fixed on the platform 24 through the principle of negative pressure to increase the test stability. In actual use, first set the test parameters and calibrate on the network analyzer 17, then adjust the distance between the two probes 12 through the adjustment component 11, and prepare to pull out the movable frame 20 to place the chip to be tested on the platform 24, and at the same time start the negative pressure component 19 to form negative pressure on the platform 24 to fix the chip, and then push the movable frame 20 to reset, and then cooperate with the acquisition module 13 to adjust the orientation of the platform 24 with the chip. In this process, the second cylinder 36 on the outer surface of the docking ring 31 can be expanded or contracted according to needs, so as to drive the movable column 23 to be adjusted in all directions until the chip and the probe 12 are aligned, and then the first cylinder 21 is started to push the docking ring 31 to move upward, so that the aligned chip and the probe 12 can be contacted for testing.

[0063] Compared with the related art, the microwave test probe station and the method of using the same provided by the present invention have the following advantages:

[0064] Beneficial effects:

[0065] In order to allow the platform 24 of the microwave test probe station to adjust the orientation quickly and accurately, a movable frame 20 is installed in the placement port 10 of the probe station 9 through a pull-out assembly 22, and then the docking ring 31 is installed in the movable groove 28 on the movable frame 20 through the first cylinder 21. The expansion and contraction of the first cylinder 21 can drive the structure on the docking ring 31 to adjust the up and down position according to the needs, and six second cylinders 36 are installed on the outer surface of the docking ring 31. Then, the movable column 23 with the movable disk 34 is connected by leaving a connecting buckle 32 and a fixed ring 35 at the expansion end of the second cylinder 36, and the movable disk is used to adjust the upper and lower positions of the movable column 23 and the movable column 23. 34 contacts with the docking ring 31 to increase the stability of the movable column 23 when adjusting the orientation. Then, the platform 24 with the air vent 25 is installed on the movable column 23, and the platform 24 is connected to the suction pipe 27 of the negative pressure component 19 through the docking joint 26. The negative pressure component 19 draws air to allow the chip placed on the platform 24 to be fixed on the platform 24 through the principle of negative pressure, thereby increasing the test stability. Through this design, the platform 24 can be accurately, quickly and stably adjusted in all directions on the probe station 9, and the probe 12 and the chip can be aligned faster and more efficiently, thereby helping to improve the efficiency of chip testing.

[0066] Second embodiment

[0067] Please refer to Figure 7-Figure 8 , Figure 7 A schematic structural diagram of a second embodiment of a microwave test probe station provided by the present invention; Figure 8 The present invention provides Figure 7 The enlarged view of B is shown. Based on the microwave test probe station and the use method thereof provided in the first embodiment of the present application, the second embodiment of the present application proposes another microwave test probe station and the use method thereof. The second embodiment is only a preferred mode of the first embodiment, and the implementation of the second embodiment will not affect the independent implementation of the first embodiment.

[0068] Specifically, the microwave test probe station and the method of using the same provided in the second embodiment of the present application are different in that the top of the probe station 9 near both sides is fixedly connected with a fixing plate 37, and the top of the fixing plate 37 is rotatably connected with a rotating disk 39 through a rotating buckle 38;

[0069] The rotating buckle 38 allows the rotating disk 39 to adjust the angle, but the adjustment has a certain resistance and is relatively stable without shaking.

[0070] A third cylinder 42 is installed on the top of the rotating disk 39, and a mounting buckle 40 with a fixing bolt 41 is installed at the telescopic end of the third cylinder 42, and a probe 12 is installed on the other side of the mounting buckle 40;

[0071] The mounting buckle 40 cooperates with the fixing bolt 41 to fix the probe 12 . A soft ring is provided at one end of the fixing bolt 41 to increase stability when in contact with the probe 12 .

[0072] A connecting frame 45 is installed on one side of the fixing plate 37, and a telescopic rod 44 is rotatably connected to one side of the connecting frame 45 through a movable buckle 43;

[0073] The telescopic end of the telescopic rod 44 is connected to the outer surface of the rotating disk 39 through the movable buckle 43, and the telescopic rod 44 can drive the rotating disk 39 to adjust a certain angle.

[0074] Compared with the related art, the microwave test probe station and the use method thereof provided by the present invention have the following beneficial effects:

[0075] In order to allow the probes 12 on the probe station 9 to be adjusted at multiple angles as needed, a fixed plate 37 with a connecting frame 45 is installed on the probe station 9, and then the rotating disk 39 is installed on the fixed plate 37 through the rotating buckle 38, and then the third cylinder 42 is installed on the rotating disk 39. The third cylinder 42 can be used to drive the probes 12 fixed by the mounting buckle 40 to adjust their positions, so that the two probes 12 can approach and move away from each other, and the rotating disk 39 is connected to the connecting frame 45 through the movable buckle 43, the telescopic rod 44, and the telescopic rod 44. The rotating disk 39 can be driven to adjust a certain angle through the extension and retraction of the telescopic rod 44. In actual use, the probes 12 are first fixed by the mounting buckle 40 with the fixing bolt 41, and then the third cylinder 42 is started as needed to adjust the distance between the two probes 12. In this process, the angle of the rotating disk 39 can be adjusted as needed, thereby increasing the flexibility of adjusting the probes 12.

[0076] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A microwave test probe station, characterized in that: include: Support frame; The test bench is fixedly connected to the top of the support frame, a probe bench is installed at a position near one side of the top of the test bench, a placement opening is provided on the top of the probe bench, and fixing openings are provided on both sides of the inner wall of the placement opening, a movable frame is installed between the two fixing openings through two pull-out assemblies, a movable groove is provided on the top of the movable frame, a first cylinder is installed at the bottom of the movable frame, a docking ring is provided at the telescopic end of the first cylinder, six second cylinders are installed at equal intervals on the outer surface of the docking ring, and each telescopic end of the second cylinder is fixedly connected with a fixing ring, a movable column is installed between the plurality of fixing rings through a connecting buckle, a movable disk is fixedly connected to the bottom end of the movable column, a platform is fixedly connected to the top end of the movable column, a plurality of air holes are provided on the top of the platform, a docking head is fixedly connected to the outer surface of the platform at the back, and a docking plate with a handle is installed on the front of the movable frame; A negative pressure component is installed on the back of the probe station, an air intake pipe is installed at the inlet of the negative pressure component, probes are installed on the top of the probe station near both sides through an adjusting component, a collection module is installed on the top of the probe station through an adjusting base, and a network analyzer is installed on the top of the test bench near the other side.

2. The microwave test probe station according to claim 1, characterized in that: A mounting frame is installed on the top of the test bench near the other side, and a display screen is installed on the front of the mounting frame.

3. The microwave test probe station according to claim 1, characterized in that: A connecting wire is installed on the top of the acquisition module through a connector, sockets are provided on the front side of the probe station near both sides, and plugs are installed on the back side of the docking plate near both sides.

4. The microwave test probe station according to claim 1, characterized in that: A base is installed on the top of the test bench, and an adjusting rod is installed on the top of the base.

5. The microwave test probe station according to claim 1, characterized in that: A control box is installed on one side of the inner wall of the support frame, and a box door is rotatably connected to one side of the control box.

6. The microwave test probe station according to claim 1, characterized in that: The negative pressure component comprises a protective shell, heat dissipation holes are provided on both sides of the protective shell, an air pump is installed inside the protective shell, and an exhaust pipe is installed at the outlet of the air pump.

7. The microwave test probe station according to claim 1, characterized in that: The top of the probe station is fixedly connected to positions near both sides thereof, and the top of the fixed plate is rotatably connected to a rotating disk via a rotating buckle.

8. The microwave test probe station according to claim 7, characterized in that: A third cylinder is installed on the top of the rotating disk, and a mounting buckle with a fixing bolt is installed on the telescopic end of the third cylinder, and a probe is installed on the other side of the mounting buckle.

9. The microwave test probe station according to claim 7, characterized in that: A connecting frame is installed on one side of the fixing plate, and a telescopic rod is rotatably connected to one side of the connecting frame through a movable buckle.

10. A method for using a microwave test probe station, characterized in that: It comprises a microwave test probe station as described in any one of claims 1 to 9, wherein the microwave test probe station requires a method for using the microwave test probe station when in use, comprising the following steps: S1: A movable frame is installed in the placement opening of the probe station through a pull-out assembly, and then the docking ring is installed in the movable groove on the movable frame through the first cylinder. The expansion and contraction of the first cylinder can drive the structure on the docking ring to adjust the up and down position according to the needs, and six second cylinders are installed on the outer surface of the docking ring. Then, the movable column with the movable disk is connected by leaving a connecting buckle and a fixed ring at the expansion end of the second cylinder. The movable disk and the docking ring are in contact to increase the stability of the movable column when adjusting the orientation; S2: The platform with air holes is installed on a movable column, and the platform is connected to the suction pipe of the negative pressure component through a joint. The negative pressure component draws air so that the chip placed on the platform is fixed on the platform through the principle of negative pressure, thereby increasing the test stability. S3: When conducting chip microwave testing, first set the test parameters and perform calibration on the network analyzer, then adjust the distance between the two probes by adjusting the components, and prepare to pull out the movable frame to place the chip to be tested on the platform. At the same time, start the negative pressure component to form negative pressure on the platform to fix the chip, and then push the movable frame to reset. You can cooperate with the acquisition module to adjust the position of the platform with the chip. During this process, the second cylinder on the outer surface of the docking ring can be expanded or contracted according to needs, which can drive the movable column to be adjusted in all directions until the chip and the probe are aligned. Then start the first cylinder to push the docking ring upward, so that the aligned chip and probe can be in contact for testing.

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