Plate feeding frame of photoetching machine

Abstract

The invention discloses a photoetching machine upper plate frame in the technical field of photoetching machines, the photoetching machine upper plate frame comprises a moving seat, a mounting seat and a mounting plate, the mounting seat is located on the left side of the top of the moving seat, the mounting plate is located on the right side of the top of the moving seat, and stand columns are fixedly connected to the left sides of the front and rear sides of the top of the moving seat; a cross beam is fixedly connected between the upper sides of the inner side walls of the stand columns, lifting grooves are formed in the inner side walls of the stand columns, electric hydraulic cylinders are fixedly connected to the bottoms of inner cavities of the lifting grooves, lifting blocks are fixedly connected to the tops of the electric hydraulic cylinders, and the lifting blocks are slidably connected to the inner cavities of the lifting grooves. The mask plate feeding device is reasonable in structural design, continuous feeding of mask plates can be achieved, feeding is more convenient and faster, meanwhile, efficiency is higher, automatic positioning arrangement of the mask plates can be achieved, time and labor are saved, and meanwhile the positioning accuracy of the mask plates is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography machines, in particular to a plate holder for a photolithography machine. Background Art

[0002] Photolithography is an indispensable process technology in the semiconductor industry. Most photolithography processes use contact exposure, that is, the mask and the wafer need to be in close contact before exposure. During the mask production process, the mask needs to be sent to the photolithography machine for processing. The photolithography machine is basically equipped with a corresponding plate rack to facilitate the loading and unloading of the mask.

[0003] The existing plate loading rack can only load a single mask plate at a time. After loading, the mask plate needs to be placed on the plate loading rack again. The operation process is too cumbersome and inefficient. In addition, in order to ensure the accuracy of plate loading, the existing plate loading rack needs to manually position and arrange the mask plate after the mask plate is loaded, which is time-consuming and labor-intensive, and the positioning accuracy is low. For this reason, we propose a plate loading rack for a lithography machine. Summary of the invention

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: a plate rack of a photolithography machine, comprising a movable seat, a mounting seat and a mounting plate, the mounting seat is located on the left side of the top of the movable seat, the mounting plate is located on the right side of the top of the movable seat, columns are fixedly connected to the left sides of the front and rear sides of the top of the movable seat, a crossbeam is fixedly connected between the upper sides of the inner side walls of the columns, a lifting groove is opened on the inner side wall of the column, an electric hydraulic cylinder is fixedly connected to the bottom of the inner cavity of the lifting groove, a lifting block is fixedly connected to the top of the electric hydraulic cylinder, the lifting block is slidably connected to the inner cavity of the lifting groove, the mounting seat is fixedly connected between the inner side walls of the lifting block, a base is fixedly connected to the lower side of the right side wall of the mounting seat, and the front and rear sides of the top of the base are fixedly connected The cam is connected to a track, and a linear electric slide is slidably connected to the top left side of the track, a connecting rod is connected between the right side walls of the linear electric slide, the top of the connecting rod is fixedly connected to a support plate, the top left side of the support plate is rotatably connected to a first auxiliary roller, and the first auxiliary rollers are arranged in sequence from front to back, and support plates are fixedly connected to the front and back sides of the top of the base, a through groove is opened on the lower side of the outer wall of the support plate, and a connecting column is slidably connected to the inner cavity of the through groove, one end of the connecting column is fixedly connected to the front and rear ends of the connecting rod, the right side wall of the connecting column is fixedly connected to a pushing rod, the left end of the pushing rod is fixedly connected to a connecting block, a moving rod is fixedly connected between the inner side walls of the connecting block, and a baffle is fixedly connected between the left sides of the inner side walls of the support plate.

[0005] Preferably, a vertical plate is fixedly connected between the right sides of the inner walls of the support plate, a plug plate is fixedly connected to the left side wall of the movable rod, the plug plate passes through the vertical plate and extends to the left side wall of the vertical plate, the top of the plug plate is rotatably connected to a second auxiliary roller, and the second auxiliary rollers are arranged in sequence from left to right.

[0006] Preferably, a mounting groove is opened at the top of the base and on the inner side of the track, electric push rods are fixedly connected to the left and right sides of the bottom of the inner cavity of the mounting groove, a top plate is fixedly connected between the tops of the electric push rods, a third auxiliary roller is rotatably connected to the top of the top plate, and the third auxiliary rollers are arranged in sequence from left to right.

[0007] Preferably, the first auxiliary roller, the second auxiliary roller and the third auxiliary roller are all made of nylon.

[0008] Preferably, a limiting groove is formed on the front side wall of the mounting plate, a screw rod is rotatably connected between the top and bottom of the inner cavity of the limiting groove, and the screw rod is a bidirectional threaded rod.

[0009] Preferably, upper and lower sides of the outer side wall of the screw rod are threadedly connected with limit blocks, and the limit blocks are slidably connected to the inner cavity of the limit groove.

[0010] Preferably, a motor is fixedly connected to the middle of the top of the mounting plate, the bottom end of the power output shaft of the motor passes through the mounting plate and extends to the inner cavity of the limiting groove, and the bottom end of the power output shaft of the motor is fixedly connected to the top of the screw rod.

[0011] Preferably, the front side wall of the limit block is rotatably connected to a linkage rod, and the ends of the linkage rod are rotatably connected to a support rod.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] 1. The plate rack of the lithography machine places the mask plate on the base, limits the position of the baffle plate and the support plate, and aligns the mask plate by running the support rod at the same time, and starts the linear electric slide to drive the connecting rod to move, and the connecting rod drives the support plate and the connecting column to move, and the connecting column drives the moving rod on the connecting block to move through the push rod, and the moving rod moves and drives the plug plate to move under the support of the vertical plate, and the linear electric slide reciprocates, and the connecting rod pushes the mask plate into the lithography machine for processing. When the connecting rod is reset, the plug plate is inserted between the second layer of mask plates, and the mask plates are pushed back and forth alternately between the two, so that the mask plates can be continuously loaded, and the loading is more convenient and more efficient.

[0014] 2. The plate frame of the lithography machine is driven by the starting motor to rotate the lead screw, and the lead screw rotates and drives the limit block to move. Under the action of the lead screw being a bidirectional threaded rod, the limit block moves relatively on the outside of the lead screw, and the limit block moves under the limit support of the limit groove and drives the linkage rod to move at the same time. The linkage rod drives the support rod to move back and forth, and the mask plate is aligned and arranged by the back and forth movement of the support rod, thereby realizing automatic positioning and arrangement of the mask plate, saving time and effort while also improving the positioning accuracy of the mask plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0016] Figure 2 It is a schematic diagram of the main cross-sectional structure of the present invention;

[0017] Figure 3 It is a schematic diagram of the cross-sectional structure of the present invention from the right side;

[0018] Figure 4 It is a schematic diagram of a partial cross-sectional structure of the present invention from the left side;

[0019] Figure 5 For the present invention Figure 2 The enlarged structural diagram at A in the middle;

[0020] Figure 6 For the present invention Figure 3 Enlarged structural diagram at B in the middle.

[0021] In the figure: 100, moving seat; 110, column; 111, crossbeam; 120, lifting slot; 121, electric hydraulic cylinder; 122, lifting block; 200, mounting seat; 210, base; 211, track; 212, linear electric slide; 213, connecting rod; 214, support plate; 215, first auxiliary roller; 220, support plate; 221, through slot; 222, connecting column; 223, push Moving rod; 224, connecting block; 225, vertical plate; 230, moving rod; 231, plug plate; 232, second auxiliary roller; 240, baffle; 250, mounting groove; 251, electric push rod; 252, top plate; 253, third auxiliary roller; 300, mounting plate; 310, limiting groove; 311, screw rod; 312, limiting block; 320, motor; 330, linkage rod; 331, support rod. DETAILED DESCRIPTION

[0022] Embodiment 1:

[0023] See also Figure 1-6The present invention provides a technical solution: a plate holder of a photolithography machine, comprising a moving seat 100, a mounting seat 200 and a mounting plate 300, wherein the mounting seat 200 is located on the left side of the top of the moving seat 100, and the mounting plate 300 is located on the right side of the top of the moving seat 100, and the left sides of the front and rear sides of the top of the moving seat 100 are fixedly connected with columns 110, and the upper sides of the inner walls of the columns 110 are fixedly connected with beams 111, and the inner walls of the columns 110 are provided with lifting grooves 120, and the bottom of the inner cavity of the lifting grooves 120 is fixedly connected with an electric hydraulic cylinder 121, and the top of the electric hydraulic cylinder 121 is fixedly connected with a lifting block 122, and the lifting block 122 is slidably connected to the lifting groove 1 The inner cavity of 20, the mounting seat 200 is fixedly connected between the inner side walls of the lifting block 122, the lower side of the right side wall of the mounting seat 200 is fixedly connected with a base 210, the top front and rear sides of the base 210 are fixedly connected with rails 211, the top left side of the rail 211 is slidably connected with a linear electric slide 212, the right side walls of the linear electric slide 212 are connected with a connecting rod 213, the top of the connecting rod 213 is fixedly connected with a support plate 214, the top left side of the support plate 214 is rotatably connected with a first auxiliary roller 215, and the first auxiliary rollers 215 are arranged in sequence from front to back, the top front and rear sides of the base 210 are fixedly connected with a support plate 220, and the support plate 2 A through slot 221 is provided on the lower side of the outer wall of 20, and a connecting column 222 is slidably connected to the inner cavity of the through slot 221, one end of the connecting column 222 is fixedly connected to the front and rear ends of the connecting rod 213, and a push rod 223 is fixedly connected to the right side wall of the connecting column 222, and a connecting block 224 is fixedly connected to the left end of the push rod 223, and a moving rod 230 is fixedly connected between the inner walls of the connecting block 224, and a baffle 240 is fixedly connected between the left sides of the inner walls of the support plate 220. By placing the mask plate on the base 210, the baffle 240 and the support plate 220 limit the placement of the mask plate, and at the same time, the support rod 331 runs to align and arrange the mask plate, and the linear electric slide is started. 212 drives the connecting rod 213 to move, the connecting rod 213 drives the support plate 214 and the connecting column 222 to move, the connecting column 222 drives the moving rod 230 on the connecting block 224 to move through the pushing rod 223, and the moving rod 230 drives the plug plate 231 to move under the support of the vertical plate 225 while moving, the linear electric slide 212 reciprocates, the connecting rod 213 pushes the mask template into the lithography machine for processing, when the connecting rod 213 is reset, the plug plate 231 is inserted between the second layer of mask templates, and the mask templates are pushed back and forth alternately between the two, which can realize continuous loading of the mask templates, and the loading is more convenient and more efficient.

[0024] Embodiment 2:

[0025] See also Figure 1-6The present invention provides a technical solution: a plate holder of a photolithography machine, comprising a moving seat 100, a mounting seat 200 and a mounting plate 300, wherein the mounting seat 200 is located on the left side of the top of the moving seat 100, and the mounting plate 300 is located on the right side of the top of the moving seat 100, and the left sides of the front and rear sides of the top of the moving seat 100 are fixedly connected with columns 110, and the upper sides of the inner walls of the columns 110 are fixedly connected with beams 111, and the inner walls of the columns 110 are provided with lifting grooves 120, and the bottom of the inner cavity of the lifting grooves 120 is fixedly connected with an electric hydraulic cylinder 121, and the top of the electric hydraulic cylinder 121 is fixedly connected with a lifting block 122, and the lifting block 122 is slidably connected to the inner cavity of the lifting grooves 120, and the mounting seat 200 is fixedly connected to the lifting grooves 120. Between the inner walls of the block 122, the lower side of the right side wall of the mounting seat 200 is fixedly connected with a base 210, and the top front and rear sides of the base 210 are fixedly connected with rails 211, and the top left side of the rail 211 is slidably connected with a linear electric slide 212, and the right side walls of the linear electric slide 212 are connected with a connecting rod 213, and the top of the connecting rod 213 is fixedly connected with a support plate 214, and the top left side of the support plate 214 is rotatably connected with a first auxiliary roller 215, and the first auxiliary rollers 215 are arranged in sequence from front to back, and the top front and rear sides of the base 210 are fixedly connected with a support plate 220, and the lower side of the outer side wall of the support plate 220 is provided with a through groove 221, and the inner cavity of the through groove 221 is slidably connected with a connecting column 222, and the connecting One end of the column 222 is fixedly connected to the front and rear ends of the connecting rod 213, the right side wall of the connecting column 222 is fixedly connected with a push rod 223, the left end of the push rod 223 is fixedly connected with a connecting block 224, the inner side walls of the connecting block 224 are fixedly connected with a moving rod 230, the left side of the inner wall of the support plate 220 is fixedly connected with a baffle 240, the right side of the inner wall of the support plate 220 is fixedly connected with a vertical plate 225, the left side wall of the moving rod 230 is fixedly connected with an insert plate 231, the insert plate 231 penetrates the vertical plate 225 and extends to the left side wall of the vertical plate 225, the top of the insert plate 231 is rotatably connected with a second auxiliary roller 232, and the second auxiliary rollers 232 are arranged in sequence from left to right, the top of the base 210 A mounting groove 250 is provided on the inner side of the track 211, and electric push rods 251 are fixedly connected to the left and right sides of the inner cavity bottom of the mounting groove 250, and a top plate 252 is fixedly connected between the tops of the electric push rods 251, and a third auxiliary roller 253 is rotatably connected to the top of the top plate 252, and the third auxiliary rollers 253 are arranged in sequence from left to right. The first auxiliary roller 215, the second auxiliary roller 232 and the third auxiliary roller 253 are all made of nylon material, and the lifting block 122 is driven to rise and fall by the electric hydraulic cylinder 121. The lifting block 122 drives the mounting seat 200 to move under the support of the lifting groove 120, and the mounting seat 200 drives the base 210 to move up and down to adjust the height of the mask loading position.

[0026] Embodiment three:

[0027] See also Figure 1-6The present invention provides a technical solution: a plate rack of a photolithography machine, comprising a moving seat 100, a mounting seat 200 and a mounting plate 300, wherein the mounting seat 200 is located on the left side of the top of the moving seat 100, and the mounting plate 300 is located on the right side of the top of the moving seat 100, and the left sides of the front and rear sides of the top of the moving seat 100 are fixedly connected with columns 110, and the upper sides of the inner walls of the columns 110 are fixedly connected with beams 111, and the inner walls of the columns 110 are provided with lifting grooves 120, and the bottom of the inner cavity of the lifting grooves 120 is fixedly connected with an electric hydraulic cylinder 121, and the top of the electric hydraulic cylinder 121 is fixedly connected with a lifting block 122, and the lifting block 122 is slidably connected to the inner cavity of the lifting grooves 120, and the mounting seat 200 is fixedly connected between the inner walls of the lifting block 122, and the mounting seat A base 210 is fixedly connected to the lower side of the right side wall of 200, and a track 211 is fixedly connected to the front and rear sides of the top of the base 210. A linear electric slide 212 is slidably connected to the top left side of the track 211. A connecting rod 213 is connected between the right side walls of the linear electric slide 212, and a support plate 214 is fixedly connected to the top of the connecting rod 213. A first auxiliary roller 215 is rotatably connected to the top left side of the support plate 214, and the first auxiliary rollers 215 are arranged in sequence from front to back. A support plate 220 is fixedly connected to the front and rear sides of the top of the base 210, and a through groove 221 is opened on the lower side of the outer wall of the support plate 220. A connecting column 222 is slidably connected to the inner cavity of the through groove 221, and one end of the connecting column 222 is fixedly connected to the front and rear ends of the connecting rod 213. 2 is fixedly connected with a push rod 223, and the left end of the push rod 223 is fixedly connected with a connecting block 224, a moving rod 230 is fixedly connected between the inner side walls of the connecting block 224, a baffle 240 is fixedly connected between the left sides of the inner side walls of the support plate 220, a limiting groove 310 is opened on the front side wall of the mounting plate 300, a screw rod 311 is rotatably connected between the top and bottom of the inner cavity of the limiting groove 310, and the screw rod 311 is a bidirectional threaded rod, and the upper and lower sides of the outer side walls of the screw rod 311 are screwed with limiting blocks 312, and the limiting blocks 312 are slidably connected to the inner cavity of the limiting groove 310, and a motor 320 is fixedly connected to the middle of the top of the mounting plate 300, and the bottom end of the power output shaft of the motor 320 passes through the mounting plate 300 and extends to the inner cavity of the limiting groove 310, and The bottom end of the power output shaft of the motor 320 is fixedly connected to the top of the screw rod 311, and the front side wall of the limit block 312 is rotatably connected to the linkage rod 330, and the ends of the linkage rod 330 are rotatably connected to the support rod 331, and the screw rod 311 is driven to rotate by starting the motor 320, and the limit block 312 is driven to move while the screw rod 311 rotates. Under the action of the screw rod 311 being a bidirectional threaded rod, the limit block 312 moves relatively on the outside of the screw rod 311, and the limit block 312 moves under the limit support of the limit groove 310 and drives the linkage rod 330 to move, and the linkage rod 330 drives the support rod 331 to move back and forth, and the mask plate is aligned and arranged by the back and forth movement of the support rod 331, so that the automatic positioning and arrangement of the mask plate can be realized.It saves time and effort while also improving the positioning accuracy of the mask.

[0028] During specific use, when personnel in this technical field use the upper plate rack to load the mask plate to the lithography machine, the mask plate is placed on the plug plate 231 on the base 210, and the baffle 240 and the support plate 220 limit it and place it, and the electric hydraulic cylinder 121 drives the lifting block 122 to lift, and the lifting block 122 drives the mounting seat 200 to move under the support of the lifting slot 120, and the mounting seat 200 drives the base 210 to move up and down to adjust the height of the mask plate loading position, and after the adjustment is completed, the motor 320 is started to drive the screw rod 311 to rotate, and the screw rod 311 rotates and drives the limit block 312 to move at the same time. Under the action of the screw rod 311 being a bidirectional threaded rod, the limit block 312 moves relatively on the outside of the screw rod 311, and the limit block 312 moves under the limit support of the limit slot 310 and drives the linkage rod 330 to move at the same time. The linkage rod 330 drives the support rod 331 to move forward and backward, and the mask plate is aligned and arranged by the forward and backward movement of the support rod 331. After the support rod 331 runs to align and arrange the mask plate, the linear electric slide 212 is started to drive the connecting rod 213 to move, and the connecting rod 213 drives the support plate 214 and the connecting column 222 to move. The connecting column 222 drives the moving rod 230 on the connecting block 224 to move through the pushing rod 223. At the same time, the movement of the moving rod 230 drives the plugging plate 231 to move under the support of the vertical plate 225. The mask plate falls onto the track 211, and the linear electric slide 212 reciprocates. The connecting rod 213 pushes the mask plate into the lithography machine for processing. When the connecting rod 213 is reset, the plugging plate 231 is supported by the second auxiliary roller 232 and inserted between the second layer of mask plates, and the mask plates are pushed back and forth alternately between the two.

Claims

1. A plate holder for a photolithography machine, characterized in that: The invention comprises a movable seat (100), a mounting seat (200) and a mounting plate (300), wherein the mounting seat (200) is located on the left side of the top of the movable seat (100), and the mounting plate (300) is located on the right side of the top of the movable seat (100). The left sides of the front and rear sides of the top of the movable seat (100) are fixedly connected with columns (110), the upper sides of the inner side walls of the columns (110) are fixedly connected with crossbeams (111), and the inner side walls of the columns (110) are provided with lifting grooves (120), and the lifting grooves (120) are provided with crossbeams (111). ) is fixedly connected to the bottom of the inner cavity of the lifting groove (120), a lifting block (122) is fixedly connected to the top of the lifting groove (120), the lifting block (122) is slidably connected to the inner cavity of the lifting groove (120), the mounting seat (200) is fixedly connected between the inner side walls of the lifting block (122), a base (210) is fixedly connected to the lower side of the right side wall of the mounting seat (200), and a track (211) is fixedly connected to the front and rear sides of the top of the base (210), and the track (211) is fixedly connected to the inner cavity of the lifting groove (120). A linear electric slide (212) is slidably connected to the left side of the top, a connecting rod (213) is connected between the right side walls of the linear electric slide (212), a supporting plate (214) is fixedly connected to the top of the connecting rod (213), a first auxiliary roller (215) is rotatably connected to the left side of the top of the supporting plate (214), and the first auxiliary rollers (215) are arranged in sequence from front to back, and a support plate (220) is fixedly connected to the front and rear sides of the top of the base (210), and a through groove is opened on the lower side of the outer side wall of the support plate (220) (221), the inner cavity of the through groove (221) is slidably connected with a connecting column (222), one end of the connecting column (222) is fixedly connected to the front and rear ends of the connecting rod (213), the right side wall of the connecting column (222) is fixedly connected with a pushing rod (223), the left end of the pushing rod (223) is fixedly connected with a connecting block (224), the inner side walls of the connecting block (224) are fixedly connected with a moving rod (230), and the left side of the inner side wall of the support plate (220) is fixedly connected with a baffle (240).

2. The plate holder of a photolithography machine according to claim 1, characterized in that: A vertical plate (225) is fixedly connected between the right sides of the inner side walls of the support plate (220), and a plug plate (231) is fixedly connected to the left side wall of the moving rod (230). The plug plate (231) passes through the vertical plate (225) and extends to the left side wall of the vertical plate (225). The top of the plug plate (231) is rotatably connected to a second auxiliary roller (232), and the second auxiliary rollers (232) are arranged in sequence from left to right.

3. The plate holder of a photolithography machine according to claim 2, characterized in that: A mounting groove (250) is provided at the top of the base (210) and on the inner side of the track (211); electric push rods (251) are fixedly connected to the left and right sides of the inner cavity bottom of the mounting groove (250); a top plate (252) is fixedly connected between the tops of the electric push rods (251); a third auxiliary roller (253) is rotatably connected to the top of the top plate (252); and the third auxiliary rollers (253) are arranged in sequence from left to right.

4. The plate holder of a photolithography machine according to claim 3, characterized in that: The first auxiliary roller (215), the second auxiliary roller (232) and the third auxiliary roller (253) are all made of nylon.

5. The plate holder of a photolithography machine according to claim 1, characterized in that: A limiting groove (310) is formed on the front side wall of the mounting plate (300), a screw rod (311) is rotatably connected between the top and bottom of the inner cavity of the limiting groove (310), and the screw rod (311) is a bidirectional threaded rod.

6. The plate holder of a photolithography machine according to claim 5, characterized in that: Limiting blocks (312) are threadedly connected to the upper and lower sides of the outer side walls of the screw rod (311), and the limiting blocks (312) are slidably connected to the inner cavity of the limiting groove (310).

7. The plate holder of a photolithography machine according to claim 6, characterized in that: A motor (320) is fixedly connected to the middle of the top of the mounting plate (300), the bottom end of the power output shaft of the motor (320) passes through the mounting plate (300) and extends to the inner cavity of the limiting groove (310), and the bottom end of the power output shaft of the motor (320) is fixedly connected to the top end of the screw rod (311).

8. The plate holder of a photolithography machine according to claim 7, characterized in that: The front side wall of the limit block (312) is rotatably connected to a linkage rod (330), and the ends of the linkage rod (330) are rotatably connected to a support rod (331).

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