Data acquisition method and device based on EDA protocol, electronic equipment and medium

Abstract

The invention provides a data collection method and device based on an EDA protocol, electronic equipment and a medium, and the method comprises the steps: obtaining a self-description model of to-be-collected equipment through a first EDA protocol for each to-be-collected equipment in target equipment; the target device is a device capable of supporting an EDA protocol, and the to-be-collected device is a target device needing data collection; based on the self-description model, configuring a corresponding data acquisition mode for the to-be-acquired device; the data acquisition mode comprises a triggering event of data acquisition, a target data item needing to be acquired and an acquisition frequency; and sending the data acquisition mode to the to-be-acquired device through a second EDA protocol, so that the to-be-acquired device actively reports data corresponding to the target data item according to the acquisition frequency under the condition that the to-be-acquired device reaches a trigger event in the data acquisition mode. Through the method, the data acquisition efficiency, flexibility and frequency are improved.

Description

Technical Field

[0001] The present application relates to the field of data acquisition technology, and in particular to a data acquisition method, device, electronic device and medium based on an EDA protocol. Background Art

[0002] In the traditional semiconductor manufacturing process, the host computer (such as the wafer fab host) usually uses the SECS / GEM protocol (SEMI Equipment Communication Standard; Generic Equipment Model) to collect data from various devices in the semiconductor factory. Since the protocol itself is not a protocol for data collection, but a protocol for machine automation control, when the host computer uses this protocol for data collection, the data transmission speed will be slow, and the automation control function will also be affected, thus failing to meet the high demand for real-time data in modern advanced processes. At the same time, the amount of data transmitted in each communication is limited, and it is impossible to support the collection and analysis of big data. In addition, when the host computer collects data from each device, the collected data items are relatively fixed, and the flexibility of data collection is poor, and it cannot be flexibly adjusted according to different process requirements. Moreover, each data collection is actively requested by the host computer, and the device can only respond passively. Since the frequency of the host computer requesting data is usually lower than the frequency of the device actively reporting data, the request frequency of the host computer will become the bottleneck of the data collection frequency. Summary of the invention

[0003] In view of this, the purpose of the present application is to provide a data acquisition method, device, electronic device and medium based on the EDA protocol to improve the efficiency, flexibility and frequency of data acquisition.

[0004] In a first aspect, an embodiment of the present application provides a data acquisition method based on an EDA protocol, the method comprising:

[0005] For each device to be collected among the target devices, a self-description model of the device to be collected is obtained through a first EDA protocol; the self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected; wherein the target device is a device that can support the EDA protocol, and the device to be collected is a target device that needs to perform data collection;

[0006] Based on the self-describing model, a corresponding data collection mode is configured for the device to be collected; the data collection mode includes a triggering event for data collection, target data items to be collected, and a collection frequency;

[0007] The data collection mode is sent to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached.

[0008] In combination with the first aspect, an embodiment of the present application provides a first possible implementation of the first aspect, wherein, before obtaining the self-description model of each device to be collected in the target device through the first EDA protocol, the method further includes:

[0009] For each device to be collected among the target devices, based on the authentication account and password established with the device to be collected, the authentication account and password are sent to the device to be collected through the third EDA protocol, so that the device to be collected performs identity authentication on the received authentication account and password;

[0010] When the device to be collected successfully authenticates the authentication account and password, a random key returned by the device to be collected is received.

[0011] In combination with the first possible implementation of the first aspect, the embodiment of the present application provides a second possible implementation of the first aspect, wherein the step of obtaining the self-description model of the device to be collected through the first EDA protocol includes:

[0012] During the validity period of this identity authentication, a self-description model request carrying the random key is sent to the device to be collected through the first EDA protocol, so that the device to be collected returns the self-description model of the device to be collected when receiving the self-description model request.

[0013] In combination with the first possible implementation of the first aspect, the embodiment of the present application provides a third possible implementation of the first aspect, wherein, based on the self-description model, configuring a corresponding data collection mode for the device to be collected includes:

[0014] In response to the triggering event of data collection, the target data items to be collected and the collection frequency configured by the user for the device to be collected based on the self-describing model, a data collection mode of the device to be collected is generated.

[0015] In combination with the first possible implementation of the first aspect, an embodiment of the present application provides a fourth possible implementation of the first aspect, wherein the first EDA protocol is the SEMI E125 protocol, the second EDA protocol is the SEMI E134 protocol, and the third EDA protocol is the SEMI E132 protocol.

[0016] In combination with the first possible implementation of the first aspect, the embodiment of the present application provides a fifth possible implementation of the first aspect, wherein the sending of the data collection mode to the device to be collected through the second EDA protocol so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached, includes:

[0017] During the validity period of this identity authentication, the data collection mode is sent to the device to be collected through the second EDA protocol, so that when the trigger event in the data collection mode is reached, the device to be collected actively reports the data corresponding to the target data item through the Webservice protocol according to the collection frequency.

[0018] In a second aspect, an embodiment of the present application further provides a data acquisition device based on the EDA protocol, the device comprising:

[0019] An acquisition module is used to acquire a self-description model of each device to be collected in the target device through a first EDA protocol; wherein the self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected; the target device is a device that can support the EDA protocol, and the device to be collected is a target device that needs to perform data collection;

[0020] A configuration module, configured to configure a corresponding data collection mode for the device to be collected based on the self-describing model; the data collection mode includes a triggering event for data collection, target data items to be collected, and a collection frequency;

[0021] The first sending module is used to send the data collection mode to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached.

[0022] In combination with the second aspect, the embodiment of the present application provides a first possible implementation of the second aspect, wherein the device further includes:

[0023] A second sending module is used for sending the authentication account password established with the device to be collected to the device to be collected through a third EDA protocol for each device to be collected in the target device before the acquisition module acquires the self-description model of the device to be collected through the first EDA protocol, so that the device to be collected performs identity authentication on the received authentication account password;

[0024] The receiving module is used to receive the random key returned by the device to be collected when the device to be collected successfully authenticates the authentication account and password.

[0025] In combination with the first possible implementation of the second aspect, the embodiment of the present application provides a second possible implementation of the second aspect, wherein the acquisition module, when used to acquire the self-description model of the device to be collected through the first EDA protocol, is specifically used to:

[0026] During the validity period of this identity authentication, a self-description model request carrying the random key is sent to the device to be collected through the first EDA protocol, so that the device to be collected returns the self-description model of the device to be collected when receiving the self-description model request.

[0027] In combination with the first possible implementation of the second aspect, the embodiment of the present application provides a third possible implementation of the second aspect, wherein the configuration module, when used to configure the corresponding data collection mode for the device to be collected based on the self-description model, is specifically used to:

[0028] In response to the triggering event of data collection, the target data items to be collected and the collection frequency configured by the user for the device to be collected based on the self-describing model, a data collection mode of the device to be collected is generated.

[0029] In combination with the first possible implementation of the second aspect, an embodiment of the present application provides a fourth possible implementation of the second aspect, wherein the first EDA protocol is the SEMI E125 protocol, the second EDA protocol is the SEMI E134 protocol, and the third EDA protocol is the SEMI E132 protocol.

[0030] In combination with the first possible implementation of the second aspect, the embodiment of the present application provides a fifth possible implementation of the second aspect, wherein the first sending module is used to send the data acquisition mode to the device to be acquired through the second EDA protocol, so that the device to be acquired actively reports the data corresponding to the target data item according to the acquisition frequency when the trigger event in the data acquisition mode is reached, and is specifically used to:

[0031] During the validity period of this identity authentication, the data collection mode is sent to the device to be collected through the second EDA protocol, so that when the trigger event in the data collection mode is reached, the device to be collected actively reports the data corresponding to the target data item through the Webservice protocol according to the collection frequency.

[0032] In a third aspect, an embodiment of the present application further provides an electronic device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, the steps in any possible implementation of the first aspect above are performed.

[0033] In a fourth aspect, an embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps in any possible implementation of the first aspect described above are executed.

[0034] The data acquisition method, device, electronic device and medium based on the EDA protocol provided in the embodiment of the present application, wherein in the method, the EDA protocol is a protocol specifically used for data acquisition, therefore, using the EDA protocol to collect data is conducive to improving the efficiency of data acquisition. At the same time, by configuring a corresponding data acquisition mode for each device to be collected, so that each device to be collected can actively report the data corresponding to the target data item according to the acquisition frequency when a trigger event in the data acquisition mode is reached, it is conducive to improving the flexibility of data acquisition. Furthermore, in the present embodiment, the data acquisition frequency is configured in the data acquisition mode, and the device to be collected only needs to report the data according to the acquisition frequency, and will not be affected by the frequency of the host computer requesting data, therefore, it is conducive to improving the frequency of data acquisition.

[0035] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 A flow chart of a data acquisition method based on the EDA protocol provided in an embodiment of the present application is shown;

[0038] Figure 2 A flow chart of another data acquisition method based on the EDA protocol provided in an embodiment of the present application is shown;

[0039] Figure 3 A schematic diagram of the structure of a data acquisition device based on the EDA protocol provided in an embodiment of the present application is shown;

[0040] Figure 4 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0041] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0042] In the traditional semiconductor manufacturing process, the host computer (such as the wafer fab host) usually uses the SECS / GEM protocol (SEMI Equipment Communication Standard; Generic Equipment Model) to collect data from various devices in the semiconductor factory. Specifically, the data collection process of the host computer based on the SECS / GEM protocol includes: the host computer establishes a connection with each device in the semiconductor factory through the SECS protocol to ensure the stability of the communication channel. The host computer uses the GEM protocol to send data request instructions to the equipment through the automation control system and the machine, and the equipment responds and returns the required data. The host computer stores the collected data in a local database for subsequent processing and analysis.

[0043] In the acquisition process, since the SECS / GEM protocol itself is not a protocol for data acquisition, but a protocol for machine automation control, when the host computer uses this protocol for data acquisition, the data transmission speed will be slow, which cannot meet the high demand for real-time data in modern advanced processes. At the same time, the amount of data transmitted in each communication is limited, which cannot support the collection and analysis of big data. In addition, when the host computer collects data from each device, the collected data items are relatively fixed, the flexibility of data collection is poor, and it cannot be flexibly adjusted according to different process requirements. Moreover, each data collection is actively requested by the host computer, and the device can only respond passively. Since the frequency of the host computer requesting data is usually lower than the frequency of the device actively reporting data (for example, the host computer can send a data collection request to the device every 1 second, while the device can report data once every 1 millisecond), the request frequency of the host computer will become the bottleneck of the data collection frequency.

[0044] Based on this, the embodiments of the present application provide a data acquisition method, device, electronic device and medium based on the EDA protocol to improve data acquisition efficiency, flexibility, and acquisition frequency, which is described below through embodiments.

[0045] To facilitate understanding of this embodiment, a data acquisition method based on the EDA protocol disclosed in the embodiment of the present application is first introduced in detail. The method is applied to a host computer in a semiconductor factory, and the host computer is respectively connected to each device in the semiconductor factory for communication.

[0046] In this embodiment, a semiconductor factory generally includes a host computer and a plurality of devices, wherein the host computer is the host computer of each device, and each device serves as a slave computer of the host computer.

[0047] like Figure 1 As shown, the data collection method includes the following steps S101-S103:

[0048] S101: For each device to be collected in the target device, a self-description model of the device to be collected is obtained through the first EDA protocol; wherein the self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected; the target device is a device that can support the EDA protocol, and the device to be collected is a target device that needs to perform data collection.

[0049] S102: Based on the self-description model, a corresponding data collection mode is configured for the device to be collected; the data collection mode includes a triggering event for data collection, target data items to be collected, and a collection frequency.

[0050] S103: Sending the data collection mode to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when a trigger event in the data collection mode is reached.

[0051] In this embodiment, there are many devices in the semiconductor factory, among which some devices can support the EDA protocol (Equipment Data Acquisition, also known as Interface A), and some devices may not support it. In this embodiment, the devices in the semiconductor factory that can support the EDA protocol are used as target devices, and the devices that need to perform data acquisition in the target devices are used as the devices to be acquired. Among them, the target device can be a semiconductor device, such as a photolithography machine, a grinder, an etcher, a deposition device, etc., which is not limited in this application.

[0052] Before executing step S101, Figure 2 As shown, this embodiment can also be performed according to the following steps S1001-S1002:

[0053] S1001: For each device to be collected in the target device, based on the authentication account and password established with the device to be collected, the authentication account and password are sent to the device to be collected through the third EDA protocol, so that the device to be collected performs identity authentication on the received authentication account and password.

[0054] S1002: When the device to be collected passes the authentication account and password authentication, a random key returned by the device to be collected is received.

[0055] In step S1001, an authentication account and password are pre-established between the host computer and each device to be collected. The host computer stores the authentication account and password corresponding to each device to be collected, and different devices to be collected have different authentication account and passwords.

[0056] For each device to be collected in the target device, the host computer sends the authentication account and password corresponding to the device to be collected to the device to be collected through the third EDA protocol, and the device to be collected performs identity authentication on the host computer after receiving the authentication account and password. Among them, the EDA protocol includes the first EDA protocol, the second EDA protocol and the third EDA protocol, and the third EDA protocol is specifically the SEMI E132 protocol (device client identity authentication and authorization).

[0057] In step S1002, the device to be collected can compare the authentication account and password sent by the host computer with the authentication account and password stored in itself. When the comparison is consistent, it means that the device to be collected has passed the authentication account and password, that is, the device to be collected has passed the identity authentication of the host computer. At this time, the device to be collected will randomly generate a string of random keys and send the random keys to the host computer.

[0058] In step S101, the device to be collected and the host computer will use specific communication content to determine whether the host computer is alive. As long as the host computer keeps replying according to the protocol, the random key will always be valid. At the same time, the host computer will also confirm whether the random key is valid with the device to be collected at fixed intervals. Once it is invalid, a new random key will be obtained again.

[0059] When executing step S101, specifically: within the validity period of this identity authentication, a self-description model request carrying a random key is sent to the device to be collected through the first EDA protocol, so that the device to be collected returns the self-description model of the device to be collected when receiving the self-description model request.

[0060] Among them, the first EDA protocol is the SEMI E125 protocol (Equipment Self-Description, equipment self-description protocol). During the validity period of this identity authentication, that is, during the validity period of the random key, a self-description model request carrying a random key is sent to the device to be collected through the SEMI E125 protocol. When the device to be collected receives the self-description model request, it returns the self-description model of the device to be collected to the host computer. The self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected. Among them, the mechanical structure is such as a robotic arm. An executable event refers to an event that can be executed by the device to be collected, such as a robotic arm extending into a wafer box, a robotic arm starting to grab a wafer, a robotic arm putting down a wafer, etc. The data item is a data item in the device to be collected, such as the current and voltage of the device to be collected.

[0061] In step S102, since the self-description model describes the data items that the host computer can collect from the device to be collected, the user can configure a corresponding data collection mode for the device to be collected in the host computer.

[0062] When executing step S102, specifically: in response to the triggering event of data collection, the target data items to be collected and the collection frequency configured by the user for the device to be collected based on the self-description model, a data collection mode of the device to be collected is generated.

[0063] The trigger event of data collection is used to indicate the timing of starting to collect data from the device to be collected. The trigger event is usually an event in the executable event. For example, the trigger event of data collection can be the robot arm starting to grab the wafer. The target data items to be collected are used to indicate the type of data collected from the device to be collected. For example, the target data items include current data, pressure data, etc. The collection frequency is used to indicate the number of times data is collected and uploaded from the device to be collected within a unit collection cycle.

[0064] When executing step S103, specifically: within the validity period of this identity authentication, the data collection mode is sent to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency through the Webservice protocol (Simple Object Access Protocol) when a trigger event in the data collection mode is reached. The second EDA protocol is specifically the SEMI E134 protocol (data collection management).

[0065] Based on the same technical concept, the embodiment of the present application also provides a data acquisition device based on the EDA protocol, such as Figure 3 As shown, the device comprises:

[0066] The acquisition module 301 is used to acquire the self-description model of each device to be collected in the target device through the first EDA protocol; wherein the self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected; the target device is a device that can support the EDA protocol, and the device to be collected is a target device that needs to perform data collection;

[0067] Configuration module 302, configured to configure a corresponding data collection mode for the device to be collected based on the self-description model; the data collection mode includes a triggering event for data collection, target data items to be collected, and a collection frequency;

[0068] The first sending module 303 is used to send the data collection mode to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached.

[0069] Optionally, the device further comprises:

[0070] A second sending module is used for sending the authentication account password established with the device to be collected to the device to be collected through a third EDA protocol for each device to be collected in the target device before the acquisition module 301 acquires the self-description model of the device to be collected through the first EDA protocol, so that the device to be collected performs identity authentication on the received authentication account password;

[0071] The receiving module is used to receive the random key returned by the device to be collected when the device to be collected successfully authenticates the authentication account and password.

[0072] Optionally, when the acquisition module 301 is used to acquire the self-description model of the device to be collected through the first EDA protocol, it is specifically used to:

[0073] During the validity period of this identity authentication, a self-description model request carrying the random key is sent to the device to be collected through the first EDA protocol, so that the device to be collected returns the self-description model of the device to be collected when receiving the self-description model request.

[0074] Optionally, when the configuration module 302 is used to configure a corresponding data collection mode for the device to be collected based on the self-description model, it is specifically used to:

[0075] In response to the triggering event of data collection, the target data items to be collected and the collection frequency configured by the user for the device to be collected based on the self-describing model, a data collection mode of the device to be collected is generated.

[0076] Optionally, the first EDA protocol is the SEMI E125 protocol, the second EDA protocol is the SEMI E134 protocol, and the third EDA protocol is the SEMI E132 protocol.

[0077] Optionally, when the first sending module 303 is used to send the data collection mode to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached, it is specifically used to:

[0078] During the validity period of this identity authentication, the data collection mode is sent to the device to be collected through the second EDA protocol, so that when the trigger event in the data collection mode is reached, the device to be collected actively reports the data corresponding to the target data item through the Webservice protocol according to the collection frequency.

[0079] Figure 4A structural diagram of an electronic device provided for an embodiment of the present application includes: a processor 401, a memory 402 and a bus 403, wherein the memory 402 stores machine-readable instructions executable by the processor 401. When the electronic device runs the above-mentioned information processing method, the processor 401 communicates with the memory 402 through the bus 403, and the processor 401 executes the machine-readable instructions to perform the method steps described in Example 1.

[0080] The embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the method steps described in the first embodiment are executed.

[0081] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described devices, electronic devices, and computer-readable storage media can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0082] In the several embodiments provided in the present application, it should be understood that the disclosed methods, devices, electronic devices and computer-readable storage media can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the modules is only a logical function division. There may be other division methods in actual implementation. For example, multiple modules or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or modules can be electrical, mechanical or other forms.

[0083] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0084] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0085] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application can essentially be embodied in the form of a software product, or in other words, the part that contributes to the prior art or the part of the technical solution. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0086] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-described embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-described embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A data acquisition method based on EDA protocol, characterized in that: The method comprises: For each device to be collected among the target devices, a self-description model of the device to be collected is obtained through a first EDA protocol; wherein the self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected; the target device is a device that can support the EDA protocol, and the device to be collected is a target device that needs to perform data collection; Based on the self-describing model, a corresponding data collection mode is configured for the device to be collected; the data collection mode includes a triggering event for data collection, target data items to be collected, and a collection frequency; The data collection mode is sent to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached.

2. The method according to claim 1, characterized in that: Before obtaining the self-description model of each device to be collected in the target device through the first EDA protocol, the method further includes: For each device to be collected among the target devices, based on the authentication account and password established with the device to be collected, the authentication account and password are sent to the device to be collected through the third EDA protocol, so that the device to be collected performs identity authentication on the received authentication account and password; When the device to be collected successfully authenticates the authentication account and password, a random key returned by the device to be collected is received.

3. The method according to claim 2, characterized in that: The step of obtaining the self-description model of the device to be collected by using the first EDA protocol includes: During the validity period of this identity authentication, a self-description model request carrying the random key is sent to the device to be collected through the first EDA protocol, so that the device to be collected returns the self-description model of the device to be collected when receiving the self-description model request.

4. The method according to claim 2, characterized in that: The configuring a corresponding data collection mode for the device to be collected based on the self-describing model includes: In response to the triggering event of data collection, the target data items to be collected and the collection frequency configured by the user for the device to be collected based on the self-describing model, a data collection mode of the device to be collected is generated.

5. The method according to claim 2, characterized in that: The first EDA protocol is the SEMI E125 protocol, the second EDA protocol is the SEMI E134 protocol, and the third EDA protocol is the SEMI E132 protocol.

6. The method according to claim 2, characterized in that: The sending of the data collection mode to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached, includes: During the validity period of this identity authentication, the data collection mode is sent to the device to be collected through the second EDA protocol, so that when the trigger event in the data collection mode is reached, the device to be collected actively reports the data corresponding to the target data item through the Webservice protocol according to the collection frequency.

7. A data acquisition device based on EDA protocol, characterized in that: The device comprises: An acquisition module is used to acquire a self-description model of each device to be collected in the target device through a first EDA protocol; wherein the self-description model is used to describe the mechanical structure of the device to be collected, executable events, and data items that can be collected from the device to be collected; the target device is a device that can support the EDA protocol, and the device to be collected is a target device that needs to perform data collection; A configuration module, configured to configure a corresponding data collection mode for the device to be collected based on the self-describing model; the data collection mode includes a triggering event for data collection, target data items to be collected, and a collection frequency; The first sending module is used to send the data collection mode to the device to be collected through the second EDA protocol, so that the device to be collected actively reports the data corresponding to the target data item according to the collection frequency when the trigger event in the data collection mode is reached.

8. The device according to claim 7, characterized in that: The device also includes: A second sending module is used for sending the authentication account password established with the device to be collected to the device to be collected through a third EDA protocol for each device to be collected in the target device before the acquisition module acquires the self-description model of the device to be collected through the first EDA protocol, so that the device to be collected performs identity authentication on the received authentication account password; The receiving module is used to receive the random key returned by the device to be collected when the device to be collected successfully authenticates the authentication account and password.

9. An electronic device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate via the bus, and when the machine-readable instructions are executed by the processor, the steps of the method as described in any one of claims 1 to 6 are performed.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 6 are executed.

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