Chemical liquid concentration adjusting method, system and device

Abstract

The invention provides a chemical liquid concentration adjusting method, system and device. The method comprises the steps that if the target concentration is smaller than the current concentration, the target supplement amount is obtained based on a first compensation relation, and the first compensation relation is used for representing the corresponding relation between the target supplement amount and the current density of chemical liquid, the current concentration, the current volume, the target concentration and the density of first supplement liquid; if the target concentration is greater than the current concentration, obtaining a target supplementation amount based on a second compensation relationship which is used for representing a corresponding relationship between the target supplementation amount and the current concentration of the chemical liquid, the target concentration, the current volume, the current density, the density of a second supplementation liquid and the concentration of the second supplementation liquid; the concentration of the chemical liquid is adjusted according to the determined target supplement amount, the current chemical liquid does not need to be replaced, the cost is reduced, meanwhile, adjustment of the concentration of the chemical liquid can be rapidly achieved, and the waiting time for switching chemical liquid with different concentrations is saved.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor technology and relates to a chemical liquid concentration adjustment method, system and device. Background Art

[0002] With the development of semiconductor technology, in order to improve the efficiency of semiconductor wet cleaning or etching machines and increase the process compatibility of the machines, a CDS (chemical dispense system) is required to switch between different concentrations of liquid medicine to correspond to different processing processes. When the concentration of the liquid medicine needs to be switched, the liquid medicine in the CDS needs to be drained to inject new liquid medicine, which not only wastes a lot of liquid medicine raw materials and increases production costs, but also wastes the production time of the machine, affecting the efficiency of the machine.

[0003] For example, the commonly used DHF (diluted hydrofluoric acid) has a ratio of 1:100, 1:200, 1:300, and 1:500. In order to be suitable for different semiconductor processing processes, it is necessary to switch between DHFs of different concentrations.

[0004] Therefore, it is necessary to provide a method, system and device for adjusting the concentration of chemical liquid. Summary of the invention

[0005] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a chemical liquid concentration adjustment method, system and device for solving the problems of high cost and low efficiency of chemical liquid concentration adjustment in the prior art.

[0006] To achieve the above-mentioned purpose and other related purposes, a method for adjusting the concentration of a chemical liquid comprises:

[0007] Compare the current concentration of the chemical liquid with the target concentration;

[0008] If the target concentration is less than the current concentration, the target replenishment amount is obtained based on the first compensation relationship by combining the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid, wherein the first compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid;

[0009] If the target concentration is greater than the current concentration, based on the second compensation relationship, the target replenishment amount is obtained by combining the current concentration of the chemical liquid, the target concentration, the current volume, the current density, the density of the second replenishment liquid, and the concentration of the second replenishment liquid, wherein the second compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current concentration of the chemical liquid, the target concentration, the current volume, the current density, the density of the second replenishment liquid, and the concentration of the second replenishment liquid;

[0010] The chemical liquid is supplemented with corresponding supplementary liquid according to the target supplementary amount.

[0011] Optionally, the second compensation relationship is:

[0012] V w =ρ1V c (C2-C1) / ρ w (C w -C2)

[0013] Among them, V w is the target replenishment amount, C1 is the current concentration of the chemical liquid, C2 is the target concentration of the chemical liquid, and C w is the concentration of the second supplementary liquid, V c is the current volume of the chemical liquid, ρ1 is the current density of the chemical liquid, ρ w is the density of the second supplementary liquid.

[0014] Optionally, the first compensation relationship is:

[0015] V w =C1ρ1V c / C2ρ w -ρ1V c / ρ w

[0016] Among them, V w is the target replenishment amount, C1 is the current concentration of the chemical liquid, C2 is the target concentration of the chemical liquid, V c is the current volume of the chemical liquid, ρ1 is the current density of the chemical liquid, ρ w is the density of the first replenishing liquid.

[0017] Optionally, before comparing the current concentration of the chemical liquid with the target concentration, a certain amount of liquid is first injected into the chemical liquid and mixed, and the current volume of the chemical liquid is obtained according to the volume and density of the injected liquid, combined with the original concentration, original density, and current concentration of the chemical liquid; wherein the injected liquid is the first replenishing liquid or the second replenishing liquid, the amount of the injected liquid is less than half of the target replenishing amount, and the current concentration and current volume are respectively the concentration and volume of the chemical liquid after mixing. Optionally, the current volume of the chemical liquid can be obtained by the following calculation method:

[0018] First, inject a certain amount of liquid into the chemical liquid and mix it;

[0019] According to the volume and density of the injected liquid, combined with the original concentration, original density, and current concentration of the chemical liquid, the original volume of the chemical liquid is obtained, wherein the injected liquid is the first supplementary liquid or the second supplementary liquid;

[0020] Based on the first compensation relationship or the second compensation relationship, the total replenishment amount is obtained in combination with the original volume of the chemical liquid, and the difference between the total replenishment amount and the amount of the injected liquid is the target replenishment amount.

[0021] Optionally, if the target replenishment amount obtained based on the second compensation relationship is greater than the remaining capacity, a preset amount of chemical liquid is discharged to obtain an updated current volume, and the updated target replenishment amount is obtained in combination with the second compensation relationship; wherein the preset amount is the difference between the target replenishment amount before the update and the remaining capacity.

[0022] Optionally, if the target replenishment amount obtained based on the first compensation relationship is greater than the remaining capacity, a preset amount of chemical liquid is discharged to obtain an updated current volume, and the updated target replenishment amount is obtained in combination with the first compensation relationship; wherein the preset amount is the difference between the target replenishment amount before the update and the remaining capacity.

[0023] Optionally, the chemical liquid concentration is adjusted according to the target replenishment amount, and the adjusted chemical liquid concentration is obtained. If it is equal to the target concentration, the chemical liquid concentration adjustment is completed. If it is not equal to the target concentration, return and re-execute until the adjusted chemical liquid concentration is equal to the target concentration.

[0024] Optionally, before returning to re-execute, compare whether the number of executions returned is less than or equal to the set number N. If so, return to continue execution; if greater, stop the loop.

[0025] Optionally, the first replenishing liquid is a solvent corresponding to the chemical liquid, and the second replenishing liquid is a solute corresponding to the chemical liquid or a chemical liquid with a concentration greater than a target concentration.

[0026] To achieve the above-mentioned and other related purposes, the present invention further provides a chemical liquid concentration adjustment system, comprising:

[0027] A volume acquisition module is used to obtain the current volume of the chemical liquid;

[0028] A concentration comparison module is used to compare the target concentration of the chemical liquid with the current concentration;

[0029] A compensation relationship acquisition module, used to acquire a first compensation relationship and a second compensation relationship, wherein the first compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid, and the second compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current concentration, target concentration, current volume, current density, density of the second replenishment liquid and concentration of the second replenishment liquid of the chemical liquid;

[0030] The replenishment amount determination module is used to determine the target replenishment amount according to the comparison result between the target concentration of the chemical liquid and the current concentration in combination with the first compensation relationship or the second compensation relationship.

[0031] In order to achieve the above-mentioned object and other related objects, the present invention also provides a chemical liquid concentration regulating device, comprising:

[0032] processor;

[0033] A memory coupled to the processor stores processor-executable instructions, which, when executed by the processor, enable the processor to perform the above method.

[0034] As described above, the chemical liquid adjustment method, system and device of the present invention adjust the concentration of the chemical liquid according to the target replenishment amount, so that the concentration of the chemical liquid is switched to the target concentration without replacing the current chemical liquid, thereby reducing costs. At the same time, the chemical liquid concentration can be adjusted quickly, saving the waiting time for switching chemical liquids of different concentrations. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Shown is a flow chart of a method for adjusting chemical liquid concentration in an embodiment of the present invention.

[0036] Figure 2 Shown is a structural block diagram of a chemical liquid concentration adjustment system in an embodiment of the present invention.

[0037] Figure 3 Shown is a schematic block diagram of a chemical liquid concentration regulating device in an embodiment of the present invention. DETAILED DESCRIPTION

[0038] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0039] For example, when describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional view showing the device structure will not be partially enlarged according to the general scale, and the schematic view is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional space dimensions of length, width and depth should be included.

[0040] For ease of description, spatial relational terms such as "under", "below", "below", "below", "above", "on", etc. may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatial relational terms are intended to include other directions of the device in use or operation in addition to the directions depicted in the drawings. In addition, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or there can be one or more intervening layers. As used herein, "between..." means including the end point values.

[0041] In the context of the present application, a structure in which a first feature is described as being "above" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0042] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and therefore the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0043] like Figure 1 As shown, this embodiment provides a method for adjusting the concentration of a chemical liquid, comprising the following steps:

[0044] S1: Get the current volume V of the chemical liquid c ;

[0045] A sensor is installed on the reactor to measure the current volume of the chemical liquid in the reactor. In some embodiments, a liquid level sensor is installed to read the current liquid level value of the chemical liquid in the reactor to obtain the current volume V of the chemical liquid. c However, the present application is not limited thereto, and in other implementations, other sensors may also be used to measure the volume in the chemical liquid.

[0046] Since the volume of the chemical liquid in the reactor obtained by the above measurement is not accurate, the current volume of the chemical liquid can be obtained by the following operation and calculation method: first inject a certain amount of liquid into the reactor, mix it evenly, and then obtain the current volume of the chemical liquid according to the volume and density of the injected liquid, the original concentration of the chemical liquid in the reactor before mixing, the original density and the current concentration of the chemical liquid in the reactor after mixing. Here, the corresponding parameters of the chemical liquid before the liquid is injected include the original concentration, original density and original volume of the chemical liquid, and the corresponding parameters of the chemical liquid after the liquid is injected and mixed include the current concentration, current density and current volume. In addition, the amount of the quantitative liquid is much smaller than the target replenishment amount, that is, after the quantitative liquid is injected, the size comparison relationship between the current concentration of the chemical liquid and the target concentration is consistent with the size comparison relationship between the original concentration of the chemical liquid and the target concentration. Preferably, the amount of the injected liquid is less than fifty percent of the target replenishment amount. The target replenishment amount is calculated based on the target concentration, and the target replenishment amount will be specifically described below.

[0047] The injected liquid can be selected according to the actual situation. If the concentration of the chemical liquid in the reactor is greater than the target concentration of the chemical liquid, you can choose to inject the corresponding solvent of the chemical liquid into the reactor, or you can choose to inject the liquid as the corresponding chemical liquid in the reactor with a certain concentration (the concentration of the injected liquid is not limited). Preferably, the injected liquid is the corresponding solvent of the chemical liquid, which can dilute the chemical liquid in the reactor. If the concentration of the chemical liquid in the reactor is less than the target concentration of the chemical liquid, you can choose to inject the corresponding solute in the chemical liquid into the reactor, or you can choose to inject a chemical liquid with a concentration greater than the target concentration.

[0048] The chemical liquid may be at least one of hydrofluoric acid, SC1 (NH4OH:H2O2:DIW=1:2:50), etc., which is used for etching and cleaning of wafers.

[0049] Exemplarily, the reactor contains a hydrofluoric acid solution. In order to accurately obtain the volume of the hydrofluoric acid solution in the reactor, the current volume of the hydrofluoric acid can be calculated in the following manner: first add a small amount of water or a hydrofluoric acid solution with a higher concentration (for example, hydrofluoric acid with a concentration of 49%) to the reactor, mix them evenly, and then obtain the original volume of the hydrofluoric acid solution based on the volume and density of the injected water or hydrofluoric acid, the original concentration of the hydrofluoric acid, the original density and the concentration of the hydrofluoric acid after mixing. The sum of the original volume of the hydrofluoric acid solution and the volume of the injected water or hydrofluoric acid is the current volume of the chemical liquid;

[0050] In the present invention, water is DIW (deionized water), and the density of chemical liquids with different proportions can be obtained by looking up a table.

[0051] Specifically, there are two ways to calculate the current volume after the above operation:

[0052] (1) When the injected liquid is a chemical liquid corresponding to the solvent, the calculation method is as follows:

[0053]

[0054] Where C, ρ, and V are the original concentration, original density, and original volume of the chemical liquid in the reactor, ρ0 and V0 are the density and volume of the injected liquid, and C1 is the current concentration of the chemical liquid after mixing;

[0055] The original volume of the chemical solution is as follows:

[0056] V=C1ρ0V0 / (C-C1)ρ

[0057] The sum of the original volume of the chemical liquid and the volume of the injected liquid is taken as the current volume of the chemical liquid; that is,

[0058] V c =V+V0

[0059] (2) When the injected liquid is a chemical liquid with a certain concentration, the specific calculation method is as follows:

[0060]

[0061] Wherein, C0 is the concentration of the injected chemical liquid;

[0062] The original volume of the chemical solution is as follows:

[0063] V=ρ0V0(C1-C0) / (C-C1)ρ

[0064] The sum of the calculated original volume of the chemical liquid and the volume of the injected liquid is taken as the current volume of the chemical liquid; that is,

[0065] V c =V+V0

[0066] S2: Compare the current concentration C1 of the chemical liquid with the target concentration C2; if the current concentration is greater than the target concentration C2, execute S3; if the current concentration C1 is less than the target concentration C2, execute S4;

[0067] In the present invention, the concentration of the chemical liquid can be measured by a concentration meter.

[0068] S3: Based on the first compensation relationship, combined with the current density ρ1, current concentration C1, and current volume V of the chemical liquid c , target concentration C2 and density of the first replenishing liquid ρ w Get the target replenishment amount V w .

[0069] The first compensation relationship is calculated as follows:

[0070]

[0071] Among them, V w is the target replenishment amount; C1, ρ1, V c are the current concentration, density and volume of the chemical liquid, respectively, w is the density of the first replenishing liquid;

[0072] This results in the first compensation relationship:

[0073] V w =C1ρ1V c / C2ρ w -ρ1V c / ρ w

[0074] The first compensation relationship is used to characterize the target replenishment amount V w With the current density ρ1, current concentration C1, current volume V of the chemical liquid c , target concentration C2 and density of the first replenishing liquid ρ W The corresponding relationship between them.

[0075] If the target replenishment amount is greater than the remaining capacity of the reactor, the preset amount of chemical liquid in the reactor is discharged to obtain the updated current volume, and the updated target replenishment amount is obtained by combining the first compensation relationship, where the preset amount is the difference between the target replenishment amount before the update and the remaining capacity of the reactor.

[0076] The first supplementary liquid is a solvent corresponding to the chemical liquid. For example, when the hydrofluoric acid solution is diluted, the first supplementary liquid is water.

[0077] S4: Based on the second compensation relationship, the current concentration C1, target concentration C2, and current volume V of the chemical liquid are combined. c , current density ρ1, density of the second supplementary liquid ρ w , the concentration of the second supplementary liquid C w , get the target replenishment amount V w ;

[0078] The second compensation relationship is calculated as follows:

[0079]

[0080] This results in the second compensation relationship:

[0081] V w =ρ1V c (C2-C1) / ρ w (C w -C2)

[0082] The second compensation relationship is used to characterize the target replenishment amount Vw The current concentration C1, target concentration C2, and current volume V of the chemical liquid c , current density ρ1, density of the second supplementary liquid ρ w , the concentration of the second supplementary liquid C w The corresponding relationship between them.

[0083] If the target replenishment amount is greater than the remaining capacity of the reactor, a preset amount of chemical liquid in the reactor is discharged, and the remaining chemical liquid is used as the updated current volume. Combined with the second compensation relationship, the updated target replenishment amount is obtained, where the preset amount is the difference between the target replenishment amount before the update and the remaining capacity of the reactor.

[0084] In steps S3 and S4, the first liquid or the second liquid to be replenished according to the target replenishment amount can be selected according to actual conditions. If the target concentration of the chemical liquid is less than the chemical liquid in the reactor, you can choose to replenish the corresponding solvent of the chemical liquid into the reactor (i.e., dilute the chemical liquid); if the target concentration of the chemical liquid is greater than the chemical liquid in the reactor, you can choose to replenish the corresponding solute in the chemical liquid into the reactor, or you can choose to replenish the chemical liquid with a concentration greater than the target concentration.

[0085] The chemical liquid may be at least one of hydrofluoric acid, SC1 (NH4OH:H2O2:DIW=1:2:50), etc., which is used for etching and cleaning of wafers.

[0086] S5: Adjust the chemical liquid concentration according to the target replenishment amount, and obtain the adjusted chemical liquid concentration. If it is equal to the target concentration, the chemical liquid concentration adjustment is completed. If it is not equal to the target concentration, return to step S2 until the adjusted chemical liquid concentration is equal to the target concentration.

[0087] In the present invention, before returning to step S2, it is compared whether the number of execution returns is less than or equal to the set number N. If it is less than or equal to, it returns to step S2 to continue execution. If it is greater, it stops the cycle and checks whether there is a fault in the equipment that causes the chemical liquid concentration to fail to reach the target concentration. N is set as needed. The greater the difference between the current concentration and the target concentration, the greater N. For example, N is set to 5 when adjusting the hydrofluoric acid concentration.

[0088] Based on the same inventive concept, the embodiment of the present application also provides a chemical liquid concentration adjustment device for implementing the above-mentioned. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme recorded in the above-mentioned method, so the specific limitations in the embodiment of the chemical liquid concentration adjustment device containing one or more chemicals provided below can refer to the limitations of the chemical liquid adjustment method above, and will not be repeated here.

[0089] like Figure 2As shown, the present application also provides a chemical liquid concentration adjustment system, including: a volume acquisition module 601, a concentration comparison module 602, a compensation relationship acquisition module 603, and a replenishment amount determination module 604.

[0090] The volume acquisition module 601 is used to acquire the current volume of the chemical liquid.

[0091] The concentration comparison module 602 is used to compare the target concentration of the chemical liquid with the current concentration.

[0092] The compensation relationship acquisition module 603 is used to obtain a first compensation relationship and a second compensation relationship, wherein the first compensation relationship is used to characterize the correspondence between the target replenishment amount and the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid, and the second compensation relationship is used to characterize the correspondence between the target replenishment amount and the current concentration, target concentration, current volume, current density, density of the second replenishment liquid and concentration of the second replenishment liquid of the chemical liquid.

[0093] The replenishment amount determination module 604 is used to determine the target replenishment amount according to the comparison result between the target concentration and the current concentration of the chemical liquid in combination with the first compensation relationship or the second compensation relationship.

[0094] Figure 3 A schematic block diagram of a device for implementing a system according to one or more embodiments of the present specification or performing a method according to one or more embodiments of the present specification is shown. The device includes a processor 201 and a memory 202, wherein the memory 202 stores instructions executable by the processor 201, and when the instructions are executed by the processor 201, the processor 201 performs operations such as the above method. Each of the processor and the memory can communicate with each other directly or indirectly, for example, via one or more buses (for example, bus 203).

[0095] The chemical liquid concentration adjustment system in the above embodiment, if the target concentration is less than the current concentration, based on the first compensation relationship, the target replenishment amount is obtained by combining the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid; if the target concentration is greater than the current concentration, based on the second compensation relationship, the target replenishment amount is obtained by combining the current concentration, target concentration, current volume, current density, density of the second replenishment liquid and concentration of the second replenishment liquid of the chemical liquid.

[0096] Figure 3A schematic block diagram of a device for implementing a system according to one or more embodiments of the present specification or performing a method according to one or more embodiments of the present specification is shown. The device includes a processor 201 and a memory 202, wherein the memory 202 stores instructions executable by the processor 201, and when the instructions are executed by the processor 201, the processor 201 performs operations such as the above method. Each of the processor and the memory can communicate with each other directly or indirectly, for example, via one or more buses (for example, bus 203).

[0097] The concentration of the chemical liquid is adjusted according to the target replenishment amount, so that the chemical liquid is switched to the target concentration without replacing the current chemical liquid, which reduces the cost. At the same time, the concentration of the chemical liquid can be adjusted quickly, saving the waiting time for switching chemical liquids of different concentrations.

[0098] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A method for adjusting the concentration of a chemical liquid, characterized in that: include: Compare the current concentration of the chemical liquid with the target concentration; If the current concentration is greater than the target concentration, the target replenishment amount is obtained based on a first compensation relationship in combination with the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid, wherein the first compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid; If the current concentration is less than the target concentration, based on the second compensation relationship, the target replenishment amount is obtained by combining the current concentration of the chemical liquid, the target concentration, the current volume, the current density, the density of the second replenishment liquid, and the concentration of the second replenishment liquid, wherein the second compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current concentration of the chemical liquid, the target concentration, the current volume, the current density, the density of the second replenishment liquid, and the concentration of the second replenishment liquid; The chemical liquid is supplemented with corresponding supplementary liquid according to the target supplementary amount.

2. The method for adjusting the concentration of a chemical liquid according to claim 1, characterized in that: The second compensation relationship is: V w =ρ1V c (C2-C1) / p w (C w -C2) Among them, V w is the target replenishment amount, C1 is the current concentration of the chemical liquid, C2 is the target concentration of the chemical liquid, and C w is the concentration of the second supplementary liquid, V c is the current volume of the chemical liquid, ρ1 is the current density of the chemical liquid, ρ w is the density of the second supplementary liquid.

3. The method for adjusting the concentration of a chemical liquid according to claim 1 or 2, characterized in that: The first compensation relationship is: V w =C1ρ1V c / C2p w -p1V c / r w Among them, V w is the target replenishment amount, C1 is the current concentration of the chemical liquid, C2 is the target concentration of the chemical liquid, V c is the current volume of the chemical liquid, ρ1 is the current density of the chemical liquid, ρ w is the density of the first replenishing liquid.

4. The method for adjusting the concentration of a chemical liquid according to claim 1, characterized in that: It also includes injecting a certain amount of liquid into the chemical liquid and mixing it before comparing the current concentration of the chemical liquid with the target concentration, and obtaining the current volume of the chemical liquid based on the volume and density of the injected liquid, combined with the original concentration, original density and current concentration of the chemical liquid; wherein the injected liquid is the first replenishing liquid or the second replenishing liquid, the amount of the injected liquid is less than half of the target replenishing amount, and the current concentration and the current volume are respectively the concentration and volume of the chemical liquids after mixing.

5. The method for adjusting the concentration of chemical liquid according to claim 1, characterized in that: If the target replenishment amount obtained based on the second compensation relationship is greater than the remaining capacity, the preset amount of chemical liquid is discharged to obtain the updated current volume, and the updated target replenishment amount is obtained in combination with the second compensation relationship, where the preset amount is the difference between the target replenishment amount before the update and the remaining capacity.

6. The method for adjusting the concentration of a chemical liquid according to claim 1, characterized in that: If the target replenishment amount obtained based on the first compensation relationship is greater than the remaining capacity, the preset amount of chemical liquid is discharged to obtain the updated current volume, and the updated target replenishment amount is obtained in combination with the first compensation relationship, where the preset amount is the difference between the target replenishment amount before the update and the remaining capacity.

7. The method for adjusting the concentration of a chemical liquid according to claim 1, characterized in that: The chemical liquid concentration is adjusted according to the target replenishment amount, and the adjusted chemical liquid concentration is obtained. If it is equal to the target concentration, the chemical liquid concentration adjustment is completed. If it is not equal to the target concentration, it returns and re-executes until the adjusted chemical liquid concentration is equal to the target concentration.

8. The method for adjusting the concentration of a chemical liquid according to claim 8, characterized in that: Before returning to re-execution, compare whether the number of executions returned is less than or equal to the set number N. If so, return to continue execution; if greater, stop the loop.

9. The method for adjusting the concentration of chemical liquid according to claim 8, characterized in that: The first replenishing liquid is a solvent corresponding to the chemical liquid, and the second replenishing liquid is a solute corresponding to the chemical liquid or a chemical liquid with a concentration greater than a target concentration.

10. A chemical liquid concentration adjustment system, characterized in that: include: A volume acquisition module is used to obtain the current volume of the chemical liquid; A concentration comparison module is used to compare the target concentration of the chemical liquid with the current concentration; A compensation relationship acquisition module, used to acquire a first compensation relationship and a second compensation relationship, wherein the first compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current density, current concentration, current volume, target concentration and density of the first replenishment liquid of the chemical liquid, and the second compensation relationship is used to characterize the corresponding relationship between the target replenishment amount and the current concentration, target concentration, current volume, current density, density of the second replenishment liquid and concentration of the second replenishment liquid of the chemical liquid; The replenishment amount determination module is used to determine the target replenishment amount according to the comparison result between the target concentration of the chemical liquid and the current concentration in combination with the first compensation relationship or the second compensation relationship.

11. A chemical liquid concentration regulating device, characterized in that: include: processor; as well as A memory coupled to the processor, the memory storing processor-executable instructions, wherein when the instructions are executed by the processor, the processor executes the method according to any one of claims 1 to 9.

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