Wafer box clamping device

Abstract

The invention relates to the technical field of wafer box carrying, in particular to a wafer box clamping device which comprises a wafer box, and a protruding fixing boss is formed on the wafer box. A horizontal sliding rail assembly is mounted on the supporting plate; the clamping jaw device comprises a power output assembly, a left clamping jaw and a right clamping jaw, the power output assembly is fixed to the supporting plate, the left clamping jaw and the right clamping jaw are oppositely arranged, and the power output assembly is used for driving the left clamping jaw and the right clamping jaw to be opened and closed and used for clamping or loosening the fixing boss; the left clamping jaw and the right clamping jaw are connected with the horizontal sliding rail assembly in a sliding mode. Wafer cassettes of different sizes can be clamped by opening and closing the left clamping jaw and the right clamping jaw; when the power output assembly drives the left clamping jaw and the right clamping jaw to be opened and closed, the left clamping jaw and the right clamping jaw are located at the same horizontal position all the time when being opened and closed, clamping is more stable and reliable, and the problem that clamping is not stable due to vertical deviation is solved.

Description

Technical Field

[0001] The invention relates to the technical field of wafer box transportation, in particular to a wafer box clamping device. Background Art

[0002] In order to reduce the risk of wafer contamination, wafers are generally stored in wafer boxes and transported through wafer boxes. In traditional technology, the transportation of wafer boxes in warehouses, production workshops and other indoor places is generally carried out manually, which consumes a lot of manpower.

[0003] The invention patent with the announcement number CN215618061 U discloses a clamping device for clamping a wafer box with handles protruding from two opposite sides and a first plug-in limit portion on the handles. The clamping device comprises two support arms arranged opposite to each other at intervals for supporting the two support handles one-to-one and a connecting arm connected between the two support arms. The support arm is provided with a second plug-in limit portion for plugging with the first plug-in limit portion to prevent the wafer box from slipping off the support arm. The prior art supports the handles on both sides of the wafer box respectively through two support arms, and prevents the wafer box from slipping off the support arm through the second plug-in limit portion on the support arm and the first plug-in limit portion on the wafer box support handle. However, the prior art still has structural deficiencies. Its two supporting arms are fixed structures and can only clamp wafer boxes of the same size. When wafer boxes of different sizes need to be clamped, the two supporting arms adapted to the size of the wafer boxes need to be replaced. Replacing the supporting arms is very troublesome and inconvenient to use, requires high labor and affects work efficiency.

[0004] Therefore, there is still room for improvement in the prior art. Summary of the invention

[0005] In order to solve the problems of the prior art, the present invention proposes a wafer box clamping device that can be adapted to clamp wafer boxes of different sizes.

[0006] In order to achieve the above object, the technical solution applied by the present invention is as follows:

[0007] A wafer box clamping device comprises a wafer box, on which a raised fixed boss is formed; a support plate, on which a horizontal slide rail assembly is installed; a clamping jaw device, which comprises a power output assembly, a left clamping jaw and a right clamping jaw, wherein the power output assembly is fixed to the support plate, the left clamping jaw and the right clamping jaw are arranged opposite to each other, and the power output assembly is used to drive the left clamping jaw and the right clamping jaw to open and close, so as to clamp or release the fixed boss; the left clamping jaw and the right clamping jaw are respectively slidably connected to the horizontal slide rail assembly.

[0008] According to the above scheme, the horizontal slide rail assembly includes a front slide rail and a rear slide rail, a front slider 1 and a rear slider 1 are fixed on the left clamp, and a front slider 2 and a rear slider 2 are fixed on the right clamp. The front slider 1 and the front slider 2 are respectively slidably connected to the front slide rail, and the rear slider 1 and the rear slider 2 are respectively slidably connected to the rear slide rail.

[0009] According to the above scheme, the power output assembly includes a first output end and a second output end, the left clamp is connected to the first output end through transmission assembly 1, and the right clamp is connected to the second output end through transmission assembly 2.

[0010] According to the above scheme, the first output end includes an upper slide groove provided on the power output component and an upper slider slidably provided in the upper slide groove, the left clamp is fixedly connected to the upper slider through a transmission component 1, the second output end includes a lower slide groove provided on the power output component and a lower slider slidably provided in the lower slide groove, the right clamp is fixedly connected to the lower slider through a transmission component 2, and the upper slide groove and the lower slide groove are arranged in parallel with an upper and lower interval.

[0011] According to the above scheme, a connecting plate 1 is fixed on the left clamping jaw, and a transmission component 1 includes a transmission plate 1 and a transmission rod 1, one end of the transmission plate 1 is fixedly connected to the upper slider, the other end of the transmission plate 1 is fixedly connected to one end of the transmission rod 1, and the other end of the transmission rod 1 is fixedly connected to the connecting plate 1 after passing through the support plate; a connecting plate 2 is fixed on the right clamping jaw, and a transmission component 2 includes a transmission plate 2 and a transmission rod 2, one end of the transmission plate 2 is fixedly connected to the lower slider, the other end of the transmission plate 2 is fixedly connected to one end of the transmission rod 2, and the other end of the transmission rod 2 is fixedly connected to the connecting plate 2 after passing through the support plate.

[0012] According to the above scheme, the transmission rod 1 is vertically located between the transmission plate 1 and the connecting plate 1, the transmission rod 2 is vertically located between the transmission plate 2 and the connecting plate 2, the transmission plate 1 and the transmission plate 2 are Z-shaped plates, and the length of the transmission rod 1 is greater than the length of the transmission rod 2.

[0013] According to the above scheme, the support plate is formed with limit groove 1 and limit groove 2, the transmission rod 1 is passed through the limit groove 1 and is slidably connected with the limit groove 1, the transmission rod 2 is passed through the limit groove 2 and is slidably connected with the limit groove 2, and the support plate is installed with adjustable position stroke sensor 1 and stroke sensor 2, the stroke sensor 1 is arranged corresponding to the transmission rod 1, and the stroke sensor 2 is arranged corresponding to the transmission rod 2.

[0014] According to the above scheme, a clamping plate 1 and a limiting step 1 are formed on the left clamping jaw, a front limiting block 1 and a rear limiting block 1 are fixed on the limiting step 1 at intervals, and the front limiting block 1 and the rear limiting block 1 are located above the clamping plate 1; a clamping plate 2 and a limiting step 2 are formed on the right clamping jaw, a front limiting block 2 and a rear limiting block 2 are fixed on the limiting step 2 at intervals, and the front limiting block 2 and the rear limiting block 2 are located above the clamping plate 2; when the left clamping jaw and the right clamping jaw are closed to clamp the fixed boss, the groove formed by the front limiting block 1, the rear limiting block 1 and the clamping plate 1 is used to clamp the first side of the fixed boss, and the groove formed by the front limiting block 2, the rear limiting block 2 and the clamping plate 2 is used to clamp the second side of the fixed boss.

[0015] According to the above scheme, a first side of the fixed boss is formed with a card slot 1, a second side of the fixed boss is formed with a card slot 2, a card block 1 is formed on the limiting step 1, and a card block 2 is formed on the limiting step 2. When the left clamp and the right clamp are closed to clamp the fixed boss, the card block 1 cooperates with the card slot 1 to be positioned, and the card block 2 cooperates with the card slot 2 to be positioned.

[0016] According to the above solution, a mounting hole for an external robot is formed on the support plate.

[0017] Beneficial effects of the present invention:

[0018] With this arrangement, wafer boxes of different sizes can be clamped by opening and closing the left jaw and the right jaw; by installing a horizontal slide rail assembly on the support plate, when the power output assembly drives the left jaw and the right jaw to open and close, the left jaw and the right jaw slide horizontally along the horizontal slide rail assembly with small resistance and better sliding opening and closing effect, thereby achieving clamping or releasing the raised fixed boss on the wafer box, and the left jaw and the right jaw are always in the same horizontal position under the limiting action of the horizontal slide rail assembly when opening and closing, so the clamping is more stable and reliable, and there will be no problem of unstable clamping due to up and down deviation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic diagram of the clamping device of the present invention;

[0020] Figure 2 yes Figure 1 Top view without support plate;

[0021] Figure 3 is a schematic diagram of a power output assembly of the present invention;

[0022] Figure 4 It is a schematic diagram of the left clamp and the right clamp of the present invention;

[0023] Figure 5 It is a working state diagram of the present invention;

[0024] Figure 6 It is a schematic diagram of the wafer box of the present invention.

[0025] In the figure:

[0026] 10. Gripping device; 11. Support plate; 111. Front slide rail; 112. Rear slide rail; 113. Mounting hole; 114. Limiting slot 1; 115. Limiting slot 2; 12. Power output assembly; 121. Upper slide groove; 122. Lower slide groove; 123. Upper slider; 124. Lower slider; 131. Transmission plate 1; 132. Transmission plate 2; 141. Transmission rod 1; 142. Transmission rod 2; 15. Left gripper; 151. Connecting plate 1; 152. Front limiting block 1; 153. Rear limiting block 1; 1 54. Front slider one; 155. Rear slider one; 156. Block one; 157. Clamp one; 158. Limit step one; 16. Right clamp; 161. Connecting plate two; 162. Front limit block two; 163. Rear limit block two; 164. Front slider two; 165. Rear slider two; 166. Block two; 167. Clamp two; 168. Limit step two; 17. Travel sensor one; 18. Travel sensor two; 20. Wafer box; 21. Fixed boss; 22. Slot one; 23. Slot two. DETAILED DESCRIPTION

[0027] The technical solution of the present invention is described below in conjunction with the accompanying drawings and embodiments.

[0028] like Figures 1 to 6 As shown, a wafer box clamping device described in the present invention includes a wafer box 20, on which a raised fixed boss 21 is formed; a support plate 11, on which a horizontal slide rail assembly is installed; a clamping device 10, wherein the clamping device 10 includes a power output assembly 12, a left clamping jaw 15 and a right clamping jaw 16, the power output assembly 12 is fixed on the support plate 11, and the left clamping jaw 15 and the right clamping jaw 16 are arranged opposite to each other, and the power output assembly 12 is used to drive the left clamping jaw 15 and the right clamping jaw 16 to open and close, so as to clamp or release the fixed boss 21; the left clamping jaw 15 and the right clamping jaw 16 are respectively slidably connected to the horizontal slide rail assembly. In this arrangement, by installing a horizontal slide rail assembly on the support plate 11, when the power output assembly 12 drives the left jaw 15 and the right jaw 16 to open and close, the left jaw 15 and the right jaw 16 slide horizontally along the horizontal slide rail assembly with small resistance and better sliding opening and closing effect, thereby achieving clamping or releasing the raised fixed boss 21 on the wafer box 20, and the left jaw 15 and the right jaw 16 are always in the same horizontal position under the limiting action of the horizontal slide rail assembly when opening and closing, so the clamping is more stable and reliable, and there will be no problem of unstable clamping due to up and down deviation.

[0029] It should be noted that the left clamping jaw 15 and the right clamping jaw 16 can be opened and closed to clamp wafer boxes 20 of different sizes.

[0030] Specifically, the horizontal slide rail assembly includes a front slide rail 111 and a rear slide rail 112, a front slider 154 and a rear slider 155 are fixed to the left clamping jaw 15, and a front slider 164 and a rear slider 165 are fixed to the right clamping jaw 16. The front slider 154 and the front slider 164 are respectively slidably connected to the front slide rail 111, and the rear slider 155 and the rear slider 165 are respectively slidably connected to the rear slide rail 112. In this way, the left clamping jaw 15 is slidably set on one side of the front slide rail 111 and the rear slide rail 112, and the right clamping jaw 16 is slidably set on the other side of the front slide rail 111 and the rear slide rail 112, so that the front slide rail 111, the rear slide rail 112, the left clamping jaw 15 and the right clamping jaw 16 cooperate to form a clamping groove that can adapt to wafer boxes of different sizes.

[0031] Furthermore, the power output assembly 12 includes a first output end and a second output end, the left clamping jaw 15 is connected to the first output end through the transmission assembly 1, and the right clamping jaw 16 is connected to the second output end through the transmission assembly 2. In this way, by providing two output ends on the same power output assembly 12, the left clamping jaw 15 and the right clamping jaw 16 are driven to open and close at the same time, which has a simple structure, low cost, and small space occupation.

[0032] Further, the first output end includes an upper slide groove 121 provided on the power output assembly 12 and an upper slider 123 slidably provided in the upper slide groove 121, the left clamping jaw 15 is fixedly connected to the upper slider 123 through a transmission assembly 1, the second output end includes a lower slide groove 122 provided on the power output assembly 12 and a lower slider 124 slidably provided in the lower slide groove 122, the right clamping jaw 16 is fixedly connected to the lower slider 124 through a transmission assembly 2, and the upper slide groove 121 and the lower slide groove 122 are arranged in parallel with an upper and lower interval. In this arrangement, when the first output end is working, the upper slider 123 is driven to slide in the upper slide groove 121, thereby driving the left clamping jaw 15 to move, and when the second output end is working, the lower slider 124 is driven to slide in the lower slide groove 122, thereby driving the right clamping jaw 16 to move, thereby achieving the purpose of opening and closing.

[0033] It should be noted that the upper slide groove 121 and the lower slide groove 122 are arranged in parallel with each other in an upper and lower manner, which is convenient for assembly and occupies little space.

[0034] Further, a connecting plate 151 is fixed on the left clamp 15, and a transmission component 1 includes a transmission plate 131 and a transmission rod 141, one end of the transmission plate 131 is fixedly connected to the upper slider 123, the other end of the transmission plate 131 is fixedly connected to one end of the transmission rod 141, and the other end of the transmission rod 141 is fixedly connected to the connecting plate 151 after passing through the support plate 11; a connecting plate 2 161 is fixed on the right clamp 16, and a transmission component 2 includes a transmission plate 2 132 and a transmission rod 2 142, one end of the transmission plate 2 132 is fixedly connected to the lower slider 124, the other end of the transmission plate 2 132 is fixedly connected to one end of the transmission rod 2 142, and the other end of the transmission rod 2 142 is fixedly connected to the connecting plate 2 161 after passing through the support plate 11. With this arrangement, when the upper slider 123 slides in the upper slide groove 121, it drives the transmission plate 131 and the transmission rod 141 to move synchronously, thereby driving the left clamping jaw 15 to move. When the lower slider 124 slides in the lower slide groove 122, it drives the transmission plate 2 132 and the transmission rod 2 142 to move synchronously, thereby driving the right clamping jaw 16 to move, and the transmission effect is good.

[0035] Further, the transmission rod 141 is vertically located between the transmission plate 131 and the connecting plate 151, the transmission rod 2 142 is vertically located between the transmission plate 132 and the connecting plate 161, the transmission plate 131 and the transmission plate 132 are Z-shaped plates, and the length of the transmission rod 141 is greater than the length of the transmission rod 2 142. This arrangement is convenient for assembly and occupies little space.

[0036] Furthermore, the support plate 11 is formed with a limiting groove 114 and a limiting groove 2 115, a transmission rod 141 is inserted into the limiting groove 114 and is slidably connected with the limiting groove 114, a transmission rod 2 142 is inserted into the limiting groove 115 and is slidably connected with the limiting groove 2 115, and a stroke sensor 17 and a stroke sensor 2 18 with adjustable positions are installed on the support plate 11, the stroke sensor 17 is correspondingly arranged with the transmission rod 141, and the stroke sensor 2 18 is correspondingly arranged with the transmission rod 2 142. In this way, the positions of the stroke sensor 1 17 and the stroke sensor 2 18 are adjusted according to the wafer boxes 20 of different sizes, thereby controlling the opening and closing strokes of the left clamping jaw 15 and the right clamping jaw 16 to adapt to the clamping use of wafer boxes 20 of different sizes.

[0037] Further, the left clamping jaw 15 is formed with a clamping plate 157 and a limiting step 158, and the limiting step 158 is fixed with a front limiting block 152 and a rear limiting block 153 at intervals, and the front limiting block 152 and the rear limiting block 153 are located above the clamping plate 157, and the right clamping jaw 16 is formed with a clamping plate 167 and a limiting step 168, and the limiting step 168 is fixed with a front limiting block 162 and a rear limiting block 163 at intervals. 3. The front stop block 162 and the rear stop block 163 are located above the clamping plate 167. When the left clamping jaw 15 and the right clamping jaw 16 are closed to clamp the fixed boss 21, the groove formed by the front stop block 152, the rear stop block 153 and the clamping plate 157 is used to clamp the first side of the fixed boss 21, and the groove formed by the front stop block 162, the rear stop block 163 and the clamping plate 167 is used to clamp the second side of the fixed boss 21. This arrangement prevents the wafer box 20 from shaking up and down after being clamped, and the clamping effect is more stable and reliable.

[0038] Further, the first side of the fixed boss 21 is formed with a slot 1 22, the second side of the fixed boss 21 is formed with a slot 2 23, the limiting step 158 is formed with a block 156, and the limiting step 168 is formed with a block 2 166. When the left clamping jaw 15 and the right clamping jaw 16 are closed to clamp the fixed boss 21, the block 156 cooperates with the slot 1 22 to clamp, and the block 2 166 cooperates with the slot 2 23 to clamp. In this way, the wafer box 20 will not shake left and right after being clamped, and the clamping effect is more stable and reliable.

[0039] Furthermore, a mounting hole 113 for an external robot is formed on the support plate 11. With this arrangement, the wafer box 20 can be transported and moved by the external robot.

[0040] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the enlightenment of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, which all belong to the protection scope of the present invention.

Claims

1. A wafer box clamping device, characterized in that: include: A wafer box (20), wherein a protruding fixing boss (21) is formed on the wafer box (20); A support plate (11), wherein a horizontal slide rail assembly is mounted on the support plate (11); A clamping jaw device (10), the clamping jaw device (10) comprising a power output assembly (12), a left clamping jaw (15) and a right clamping jaw (16), the power output assembly (12) being fixed on a support plate (11), the left clamping jaw (15) and the right clamping jaw (16) being arranged opposite to each other, the power output assembly (12) being used for driving the left clamping jaw (15) and the right clamping jaw (16) to open and close, so as to clamp or release a fixed boss (21); The left clamping jaw (15) and the right clamping jaw (16) are respectively slidably connected to the horizontal slide rail assembly.

2. A wafer box clamping device according to claim 1, characterized in that: The horizontal slide rail assembly comprises a front slide rail (111) and a rear slide rail (112); a front slider 1 (154) and a rear slider 1 (155) are fixed on the left clamp (15); a front slider 2 (164) and a rear slider 2 (165) are fixed on the right clamp (16); the front slider 1 (154) and the front slider 2 (164) are respectively slidably connected to the front slide rail (111); the rear slider 1 (155) and the rear slider 2 (165) are respectively slidably connected to the rear slide rail (112).

3. A wafer box clamping device according to claim 2, characterized in that: The power output assembly (12) comprises a first output end and a second output end, the left clamping jaw (15) is transmission-connected to the first output end via a first transmission assembly, and the right clamping jaw (16) is transmission-connected to the second output end via a second transmission assembly.

4. A wafer box clamping device according to claim 3, characterized in that: The first output end comprises an upper slide groove (121) provided on the power output component (12) and an upper slider (123) slidably provided in the upper slide groove (121); the left clamping jaw (15) is fixedly connected to the upper slider (123) via a transmission component 1; the second output end comprises a lower slide groove (122) provided on the power output component (12) and a lower slider 124 slidably provided in the lower slide groove (122); the right clamping jaw (16) is fixedly connected to the lower slider (124) via a transmission component 2; the upper slide groove (121) and the lower slide groove (122) are arranged in parallel with an upper and lower interval.

5. A wafer box clamping device according to claim 4, characterized in that: A connecting plate 1 (151) is fixed on the left clamp (15), and the transmission assembly 1 includes a transmission plate 1 (131) and a transmission rod 1 (141), one end of the transmission plate 1 (131) is fixedly connected to the upper slider (123), the other end of the transmission plate 1 (131) is fixedly connected to one end of the transmission rod 1 (141), and the other end of the transmission rod 1 (141) passes through the support plate (11) and is fixedly connected to the connecting plate 1 (151); a connecting plate 2 (161) is fixed on the right clamp (16), and the transmission assembly 2 includes a transmission plate 2 (132) and a transmission rod 2 (142), one end of the transmission plate 2 (132) is fixedly connected to the lower slider (124), the other end of the transmission plate 2 (132) is fixedly connected to one end of the transmission rod 2 (142), and the other end of the transmission rod 2 (142) passes through the support plate (11) and is fixedly connected to the connecting plate 2 (161).

6. A wafer box clamping device according to claim 5, characterized in that: The transmission rod 1 (141) is vertically located between the transmission plate 1 (131) and the connecting plate 1 (151); the transmission rod 2 (142) is vertically located between the transmission plate 2 (132) and the connecting plate 2 (161); the transmission plate 1 (131) and the transmission plate 2 (132) are Z-shaped plates, and the length of the transmission rod 1 (141) is greater than the length of the transmission rod 2 (142).

7. The wafer box clamping device according to claim 5, characterized in that: The support plate (11) is formed with a limiting groove 1 (114) and a limiting groove 2 (115); the transmission rod 1 (141) is inserted into the limiting groove 1 (114) and is slidably connected to the limiting groove 1 (114); the transmission rod 2 (142) is inserted into the limiting groove 2 (115) and is slidably connected to the limiting groove 2 (115); a stroke sensor 1 (17) and a stroke sensor 2 (18) with adjustable positions are installed on the support plate (11); the stroke sensor 1 (17) is correspondingly arranged with the transmission rod 1 (141); and the stroke sensor 2 (18) is correspondingly arranged with the transmission rod 2 (142).

8. The wafer box clamping device according to claim 1, characterized in that: The left clamping jaw (15) is formed with a clamping plate (157) and a limiting step (158), and a front limiting block (152) and a rear limiting block (153) are fixed on the limiting step (158) at intervals, and the front limiting block (152) and the rear limiting block (153) are located above the clamping plate (157). The right clamping jaw (16) is formed with a clamping plate (167) and a limiting step (168), and a front limiting block (162) and a rear limiting block (163) are fixed on the limiting step (168) at intervals. The front limit block 2 (162) and the rear limit block 2 (163) are located above the clamp plate 2 (167). When the left clamp (15) and the right clamp (16) are closed to clamp the fixed boss (21), the groove formed by the front limit block 1 (152), the rear limit block 1 (153) and the clamp plate 1 (157) is used to clamp the first side of the fixed boss (21), and the groove formed by the front limit block 2 (162), the rear limit block 2 (163) and the clamp plate 2 (167) is used to clamp the second side of the fixed boss (21).

9. The wafer box clamping device according to claim 8, characterized in that: A first side of the fixed boss (21) is formed with a first card slot (22), a second side of the fixed boss (21) is formed with a second card slot (23), a first card block (156) is formed on the first limiting step (158), and a second card block (166) is formed on the second limiting step (168); when the left clamping jaw (15) and the right clamping jaw (16) are closed to clamp the fixed boss (21), the first card block (156) is engaged with the first card slot (22) and the second card block (166) is engaged with the second card slot (23).

10. The wafer box clamping device according to claim 2, characterized in that: The support plate (11) is formed with a mounting hole (113) for connecting an external robot.

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