Flower basket transposition device

Abstract

The invention discloses a flower basket transposition device, and relates to the field of semiconductors. The driving device comprises a synchronous belt, the synchronous belt and the bearing plate are arranged in parallel, and the synchronous belt is used for controlling the device to carry out cooperative transposition; the synchronous wheels are respectively provided with a first synchronous wheel and a second synchronous wheel, the first synchronous wheel and the second synchronous wheel are oppositely arranged, and the first synchronous wheel and the second synchronous wheel are respectively embedded in the left side and the right side of the interior of the synchronous belt; the motor is arranged below the second synchronizing wheel; the speed reduction device is connected to the upper portion of the motor and used for reducing the rotating speed of the synchronous wheel; the adjusting device is used for adjusting the tightness of the synchronous belt and comprises a bearing seat, and the bearing seat is provided with a first bearing seat and a second bearing seat on the upper portion and the lower portion of the first synchronous wheel respectively; the adjusting nut seat is arranged on the right side of the first synchronizing wheel, and the adjusting nut seat is divided into a first adjusting nut seat and a second adjusting nut seat from top to bottom.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a flower basket replacement device. Background Art

[0002] At present, in the field of semiconductor processing, wafers are the basic materials for chip production, and their processing involves many complex and precise processes. Wafers are usually placed in special baskets and circulated between different processing equipment, storage areas and wafer sites. Traditional methods of transporting wafer baskets mostly rely on simple manual operations or relatively basic mechanical transmission mechanisms. When faced with large-scale and high-efficiency semiconductor production needs, these traditional methods are difficult to ensure the accuracy of each wafer basket replacement by manual operation, and the basket speed and stability are low. The basic mechanical transmission mechanism is insufficient in stability and is prone to shaking during the stop process, resulting in an unstable basket.

[0003] In order to solve the above problems in the prior art (patent number: CN221520884U), Figure 1 , a rotary cylinder 120 is installed under the bottom plate 100, and a transmission motor 240 is arranged above the bottom plate and started, thereby driving the rotary cylinder 120 to rotate. When the rotary cylinder 120 rotates through the avoidance groove 130, it drives the synchronous belt to move, and the synchronous belt drives the flower basket 110 arranged on the synchronous belt to move, thereby realizing a stable replacement of the flower basket. However, when the device stops, due to the use of the rotary cylinder 120, during the rotation process, if the air pressure of the rotary cylinder 120 drops, the piston movement speed slows down, and the rotation speed of the rotary cylinder 120 decreases, resulting in a slower replacement speed of the flower basket; and when the air pressure of the rotary cylinder 120 rises, the rotation speed of the rotary cylinder 120 increases, and the replacement speed will increase; this uneven rotation speed will cause the flower basket to shake during the replacement process, thereby affecting the stability of the device during replacement.

[0004] In view of this, we provide a flower basket replacement device to solve the above problems. Summary of the invention

[0005] The purpose of the present application is to solve the problem that the use of a rotating cylinder for transposition in the prior art causes the flower basket to shake during the transposition process, resulting in reduced stability of the device during transposition. In order to solve the above technical problem, a flower basket transposition device is provided, which does not cause the flower basket to shake during the transposition process and improves the stability of the device during transposition.

[0006] To achieve the above-mentioned purpose, the embodiment of the present application adopts the following technical scheme: a basket transposition device, comprising: a carrier plate; a driving device, the driving device comprising: a synchronous belt, the synchronous belt is arranged in parallel with the carrier plate, and the synchronous belt is used to control the coordinated transposition of the device; a synchronous wheel, the synchronous wheel is respectively provided with a first synchronous wheel and a second synchronous wheel, the first synchronous wheel and the second synchronous wheel are arranged opposite to each other, the first synchronous wheel and the second synchronous wheel are respectively embedded in the left and right sides of the synchronous belt, and the synchronous wheel is used to drive the synchronous belt to move synchronously; a motor, the motor is arranged below the second synchronous wheel, and the motor is used to control the rotation of the synchronous wheel; a reduction device, the reduction device is connected to the top of the motor, and the reduction device is used to reduce the speed of the synchronous wheel; an adjusting device The adjusting device is used to adjust the tightness of the synchronous belt, and the adjusting device includes: a bearing seat, the bearing seat is respectively provided with a first bearing seat and a second bearing seat above and below the first synchronous wheel; an adjusting nut seat, the adjusting nut seat is arranged on the right side of the first synchronous wheel, and the adjusting nut seat is divided into a first adjusting nut seat and a second adjusting nut seat above and below, and the adjusting nut seat is used to adjust the distance between the bearing seat; the second synchronous wheel is driven to rotate by the rotation of the motor, and the second synchronous wheel drives the synchronous belt to convert the rotational motion into linear motion, and at the same time, the motor is connected to the reduction device to reduce the speed, and when the adjusting nut seat rotates, the adjusting nut seat moves axially, thereby changing the distance between the adjusting nut seat and the bearing seat, so as to adjust the tightness of the synchronous belt.

[0007] Further, according to an embodiment of the present application, a moving block is passed through the middle of the first synchronous wheel, and the moving block is connected to the first bearing seat and the second bearing seat respectively.

[0008] Further, according to an embodiment of the present application, a braking device is provided in the motor, and the braking device is used to stop the rotation of the motor.

[0009] Further, according to an embodiment of the present application, a connecting piece is slidably connected to the synchronous belt.

[0010] Further, according to an embodiment of the present application, a material shape is provided on the left side of the motor, and a first sensor and a second sensor are respectively connected to both sides of the material shape.

[0011] Further, according to an embodiment of the present application, a diaphragm coupling is provided between the motor and the second synchronous wheel.

[0012] Further, according to an embodiment of the present application, a synchronous slide bar is arranged above the carrying plate, and the synchronous slide bar is arranged parallel to the synchronous belt.

[0013] Further, according to an embodiment of the present application, a linear bearing is slidably connected to the synchronous sliding rod.

[0014] Further, according to an embodiment of the present application, the connecting member and the linear bearing are commonly connected to a translation stage, a flower basket stage is arranged above the translation stage, and the flower basket stage is used to carry a wafer flower basket.

[0015] Further, according to an embodiment of the present application, a sensor sheet is arranged in front of the first sensor and the second sensor, and the sensor sheet is used to cooperate with the first sensor and the second sensor to control the braking device.

[0016] Compared with the prior art, the present invention starts the motor, so that the power of the motor is transferred to the synchronous wheel after the speed is adjusted by the speed reducer, so that the first synchronous wheel and the second synchronous wheel start to rotate, and then drive the first annular synchronous belt embedded on the left and right sides thereof to move synchronously, and the synchronous belt cooperates with the synchronous belt on the parallel bearing plate to drive the wafer basket placed on the synchronous belt to start transmission; during the transmission process, when the tightness of the synchronous belt needs to be adjusted, the first adjustment nut seat and the second adjustment nut seat are operated. By rotating the first adjustment nut seat and the second adjustment nut seat, the adjustment nut seat is displaced in a specific direction by using the matching structure between the first and second bearing seats corresponding to the first and second bearing seats, and the distance between the adjustment nut seat and the bearing seat is changed; the synchronous belt is always ensured to be in a suitable tightness, and the stable transmission and precise transposition of the wafer basket during the transmission process are guaranteed, so that the entire wafer basket transmission system runs smoothly; thus, the problem that the use of a rotating cylinder for transposition causes the basket to shake during the transposition process, resulting in a decrease in the stability of the device during transposition is solved, and the technical effect of not causing the basket to shake during the transposition process and improving the stability of the device during transposition is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present application is further described below in conjunction with the accompanying drawings and embodiments.

[0018] Figure 1 It is a three-dimensional structural schematic diagram of a flower basket rotating transmission mechanism in the prior art.

[0019] Figure 2 It is a schematic diagram of the internal structure of the flower basket transposition device of the present application.

[0020] Figure 3 It is a structural schematic diagram of the flower basket transposition device of the present application being moved to the left side.

[0021] Figure 4 It is a structural schematic diagram of the flower basket transposition device of the present application moved to the right side.

[0022] Figure 5 It is the overall structure of the flower basket transposition device of the present application.

[0023] In the attached figure:

[0024] 1. Carrying plate 11, synchronous slide bar 111, linear bearing

[0025] 2. Synchronous belt 21, tooth pitch 22, connecting parts

[0026] 221, translation stage 2211, flower basket stage 22111, wafer flower basket

[0027] 3. Synchronous wheel 31, first synchronous wheel 32, second synchronous wheel

[0028] 33, convex teeth 34, annular protrusion 4, motor

[0029] 41. Braking device 5, deceleration device 6, bearing seat

[0030] 61. First bearing seat 62. Second bearing seat 63. Moving block

[0031] 7. Adjusting nut seat 71, first adjusting nut seat 72, second adjusting nut seat

[0032] 8. Material type 81. First sensor 82. Second sensor

[0033] 9. Diaphragm coupling 10. Induction plate 100. Bottom plate

[0034] 120, rotating cylinder 240, transmission motor 130, avoidance groove

[0035] 110. Flower basket DETAILED DESCRIPTION

[0036] In order to make the purpose and technical solution of the present invention clearly and completely described, and the advantages more clearly understood, the embodiments of the present invention are further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, and are not used to limit the embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "one", "first", "second", "third", "fourth", "fifth", "sixth" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which means fixed connection, detachable connection, or integral connection; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, and internal communication between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention are understood according to specific circumstances.

[0039] For the purpose of simplicity and illustration, the principles of the embodiments are described primarily by reference to examples. In the following description, many specific details are presented to provide a thorough understanding of the embodiments. However, it is apparent to one of ordinary skill in the art that the embodiments are not limited to these specific details in practice. In some instances, known methods and structures are not described in detail to avoid making the embodiments unnecessarily difficult to understand. In addition, all embodiments are used in conjunction with each other.

[0040] Embodiment 1:

[0041] like Figure 2 As shown, the present embodiment provides a basket transposition device, which includes: a carrier plate 1; a driving device, the driving device includes: a synchronous belt 2, the synchronous belt is arranged in parallel with the carrier plate 1, and the synchronous belt is transposed in coordination with a control device; a synchronous wheel 3, the synchronous wheel 3 is respectively provided with a first synchronous wheel 31 and a second synchronous wheel 32, the first synchronous wheel 31 and the second synchronous wheel 32 are arranged opposite to each other, the first synchronous wheel 31 and the second synchronous wheel 32 are respectively embedded in the left and right sides of the synchronous belt 2, and the synchronous wheel 3 is used to drive the synchronous belt 2 to move synchronously; a motor 4, the motor 4 is arranged below the second synchronous wheel 32, The motor 4 is used to control the rotation of the synchronous wheel 3; the speed reducer 5 is connected to the top of the motor 4, and the speed reducer 5 is used to reduce the speed of the synchronous wheel 3; the adjusting device, the adjusting device includes: a bearing seat 6, and the bearing seat 6 is respectively provided with a first bearing seat 61 and a second bearing seat 62 above and below the first synchronous wheel 31; an adjusting nut seat 7, the adjusting nut seat 7 is arranged on the right side of the first synchronous wheel 31, and the adjusting nut seat 7 is divided into a first adjusting nut seat 71 and a second adjusting nut seat 72 above and below, and the adjusting nut is used to adjust the distance between the adjusting nut and the bearing seat 6; the adjusting device is used to adjust the tightness of the synchronous belt 2;

[0042] Start the motor 4, which begins to output power. The power firstly reduces the speed according to the preset reduction ratio through the reduction device 5 to match the running speed and torque required by the synchronous wheel 3 and the synchronous belt 2. The synchronous wheel 3 is subjected to the force of the rotation of the motor 4 and rotates synchronously with the motor 4. The synchronous wheel 3 rotates to transmit the circular motion to the synchronous belt 2 arranged on the synchronous wheel 3, so that the synchronous wheel 3 converts the circular motion into linear motion to achieve preliminary stable operation. During the transmission process, when adjusting the tightness of the synchronous belt 2 for the running stability of the driving device, operate the first adjusting nut seat 71 and the second adjusting nut seat 72. By rotating the first adjusting nut seat 71 and the second adjusting nut seat 72, the matching structure between the first adjusting nut seat 71 and the second adjusting nut seat 72 and the corresponding first bearing seat 61 and the second bearing seat 62 is utilized to make the adjusting nut seat 7 displaced in a specific direction and change the distance between the bearing seat 6. Ensure that the synchronous belt 2 is always at a suitable tightness to reduce jitter during operation, thereby ensuring the stability of the device when it is transposed.

[0043] like Figure 2 As shown, the first bearing seat 61 and the second bearing seat 62 are connected to a moving block 63 through the first synchronous wheel 31, and the moving block 63 is used to drive the first synchronous wheel 31 to move.

[0044] The first synchronous wheel 31 is connected with the first bearing seat 61 and the second bearing seat 62 by the moving block 63, which provides an effective way to accurately adjust the tension of the synchronous belt 2. During the adjustment process, the position of the first synchronous wheel 31 can be accurately changed by moving the moving block 63, thereby adjusting the tightness of the synchronous belt 2. This precise adjustment mechanism ensures that the synchronous belt 2 always maintains an optimal tension state, ensuring good meshing between the synchronous belt 2 and the synchronous wheel 3. When it is necessary to fine-tune the tension of the synchronous belt 2, the moving block 63 moves the first synchronous wheel 31 by a small amplitude, so that the teeth of the synchronous belt 2 are in close and uniform contact with the synchronous wheel 3, avoiding the shaking of the synchronous belt 2 caused by uneven tension, thereby improving the stability of the device during position change. If there is no moving block 63 to assist in adjusting the tension of the synchronous belt 2, it will become more difficult to adjust the tightness of the synchronous belt 2. When the tension of the synchronous belt 2 needs to be adjusted, it may only be possible to indirectly affect the tightness of the synchronous belt 2 by changing the position of the bearing seat 6 or adjusting the nut seat 7. However, this method cannot achieve precise control of the tension of the synchronous belt 2. In this case, the synchronous belt 2 may be separated from the synchronous wheel 3 due to excessive looseness, resulting in discontinuous power transmission, causing intermittent pauses or jitters in the wafer basket during operation, seriously affecting the stability of the device during repositioning.

[0045] like Figures 2 to 4As shown, a stopping device 41 is provided in the motor 4, and the stopping device 41 is used to stop the rotation of the motor 4. A material 8 is provided on the left side of the motor 4, and a first sensor 81 and a second sensor 82 are connected to both sides of the material 8. A sensing sheet 10 is provided in front of the first sensor 81 and the second sensor 82, and the sensing sheet 10 is used to cooperate with the first sensor 81 and the second sensor 82 to control the stopping device 41.

[0046] Through the cooperation of the induction sheet 10, the first sensor 81 and the second sensor 82, the stopping position of the motor 4 can be accurately controlled. During the operation of the device, when the induction sheet 10 reaches a specific position and is detected by the sensor, the stopping device 41 will accurately stop the rotation of the motor 4, so that the device can stop accurately at the preset position, thereby improving the accuracy of the device when it is transposed. The stopping device 41 in the motor 4 is controlled by the induction sheet 10, the first sensor 81 and the second sensor 82, and can achieve a smoother braking process. This control method gradually adjusts the braking force of the motor 4 according to the relative position of the induction sheet 10 and the induction sheet 10. When the induction sheet 10 passes, a signal is sent to the stopping device 41, and the stopping device 41 begins to adjust the speed of the motor 4 to gradually reduce it instead of stopping it suddenly, thereby ensuring the stability of the device when it is transposed. At the same time, when the motor 4 stops running normally, since the motor 4 and the transmission parts have a certain inertia, in the absence of the braking device 41, they will continue to move a short distance under the action of inertia, which will produce inertial shock and affect the transmission stability of the device. The braking device 41 in the motor 4 receives the signal sent by the cooperation of the induction plate 10 and the first sensor 81 and the second sensor 82, and through a reasonable braking method, quickly consumes the kinetic energy of the motor 4 and the transmission parts, reduces the inertial shock, and thus ensures the stability of the device during position change.

[0047] like Figure 2 and Figure 5 As shown, a connecting piece 22 is slidably connected to the synchronous belt 2, and a synchronous slide bar 11 is arranged above the carrier plate 1, and the synchronous slide bar 11 is arranged parallel to the synchronous belt 2. A linear bearing 111 is slidably connected to the synchronous slide bar 11. The connecting piece 22 and the linear bearing 111 are jointly connected to a translation stage 221, and a flower basket stage 2211 is arranged above the translation stage 221, and the flower basket stage 2211 is used to carry a wafer flower basket 22111.

[0048] Through the cooperation of the synchronous slide bar 11 and the linear bearing 111 with the translation stage 221, the wafer basket 22111 can be positioned more accurately, so that the position of the translation stage 221 can be accurate to a higher precision, and the stability of the device during the transposition process is achieved. And through the combined structure of the connecting piece 22, the synchronous slide bar 11, the linear bearing 111 and the translation stage 221, a more stable support and movement path are provided for the wafer basket 22111. The synchronous slide bar 11 is used as a fixed parallel guide rail, and the linear bearing 111 slides on it, which can effectively limit the movement direction of the translation stage 221, and reduce the displacement and shaking in other directions except parallel to the synchronous belt 2. When the synchronous belt 2 has a slight up and down jump or left and right deviation during operation, the translation stage 221 can maintain a relatively stable horizontal motion state due to the connection with the synchronous slide bar 11 and the linear bearing 111, so that the basket stage 2211 and the wafer basket 22111 can also move more smoothly, ensuring the stability of the basket during transposition.

[0049] like Figure 2 As shown, a diaphragm coupling 9 is provided between the motor 4 and the second synchronous wheel 32 .

[0050] During installation or operation, the shaft of the motor 4 and the shaft of the second synchronous wheel 32 will have axial and radial deviations. The axial deviation is caused by installation errors, thermal expansion or displacement of components, while the radial deviation is caused by factors such as shaft bending, misalignment or uneven distribution of load. The diaphragm of the diaphragm coupling 9 can compensate for these deviations to a certain extent. When axial deviation occurs, the diaphragm can produce elastic deformation in the axial direction, so that the shaft of the motor 4 and the shaft of the second synchronous wheel 32 can still remain connected and transmit torque normally, ensuring that the device has an axial compensation effect when transposing. The diaphragm coupling 9 can prevent the motor 4 from burning due to long-term or instantaneous excessive load. The motor 4 has a certain rated power and torque output range when it is designed. Exceeding this range will cause the winding inside the motor 4 to overheat, insulation damage, etc. By setting the diaphragm coupling 9, when an overload occurs, the motor 4 can be prevented from being subjected to excessive torque load, extending the service life of the motor 4, thereby improving the service life of the device.

[0051] Embodiment 2:

[0052] This embodiment provides a flower basket replacement device having the same structural features as that of the first embodiment.

[0053] The synchronous wheel 3 is disc-shaped as a whole, and a convex tooth 33 is provided at its rim. The convex tooth 33 is an involute tooth structure, and a tooth pitch 21 is provided at the contact part between the synchronous belt 2 and the synchronous wheel 3. The module of the convex tooth 33 is precisely matched with the tooth pitch 21 of the synchronous belt 2.

[0054] The convex teeth 33 are designed with involute tooth profiles and have good meshing characteristics. When in contact with the pitch 21 of the synchronous belt 2, they can gradually mesh in and out, thereby effectively reducing impact and vibration. The module of the convex teeth 33 is precisely matched with the pitch 21 of the synchronous belt 2, ensuring that the two are closely matched during the meshing process without slipping or misalignment. At the same time, the pressure angle of the convex teeth 33 is optimized so that when transmitting power, the force can be evenly distributed on the contact surface of the convex teeth 33, avoiding uneven wear or deformation of the synchronous belt 2 due to excessive local stress, thereby ensuring the smooth operation of the synchronous belt 2 and ensuring the stability of the device during transposition.

[0055] Embodiment 3:

[0056] This embodiment provides a flower basket replacement device having the same structural features as that of the first embodiment.

[0057] Annular protrusions 34 are provided on both side edges of the synchronous wheel 3 .

[0058] During the operation of the synchronous belt 2, the annular protrusion 34 forms a precise gap fit with the edges of both sides of the synchronous belt 2. The size of the gap is strictly controlled, which can not only allow the synchronous belt 2 to have a certain lateral displacement space due to thermal expansion or force deformation during normal operation, but also effectively limit the excessive deviation of the synchronous belt 2. When the synchronous belt 2 shows a slight deviation trend during operation, the guide structure can correct it in time, so that it always stays on the correct running track, ensuring that the good meshing state with the synchronous wheel 3 is maintained, greatly improving the reliability and stability of the operation of the synchronous belt 2, and further ensuring the stability of the device during transposition.

[0059] Although the above describes the illustrative specific implementation methods of the present application so that technicians in this technical field can understand the present application, the present application is not limited to the scope of the specific implementation methods. For ordinary technicians in this technical field, as long as various changes are within the spirit and scope of the present application defined and determined by the attached claims, all application creations using the concept of the present application are protected.

Claims

1. A flower basket replacement device, characterized in that: include: Loading plate; A driving device, the driving device comprising: A synchronous belt, the synchronous belt is arranged in parallel with the bearing plate, and the synchronous belt is used to control the coordinated transposition of the flower basket transposition device; Synchronous wheels, the synchronous wheels are respectively provided with a first synchronous wheel and a second synchronous wheel, the first synchronous wheel and the second synchronous wheel are arranged opposite to each other, the first synchronous wheel and the second synchronous wheel are respectively embedded in the left and right sides of the synchronous belt, and the synchronous wheels are used to drive the synchronous belt to move synchronously; A motor, the motor is arranged below the second synchronous wheel, and the motor is used to control the rotation of the synchronous wheel; A reduction gear, the reduction gear is connected to the top of the motor and is used to reduce the rotation speed of the synchronous wheel; The adjusting device is used to adjust the tightness of the synchronous belt, and the adjusting device includes: A bearing seat, wherein a first bearing seat and a second bearing seat are respectively arranged above and below the first synchronous wheel; An adjusting nut seat is arranged on the right side of the first synchronous wheel. The adjusting nut seat is divided into a first adjusting nut seat and a second adjusting nut seat. The adjusting nut seat is used to adjust the distance between the adjusting nut seat and the bearing seat. The second synchronous wheel is driven to rotate by the rotation of the motor, and the second synchronous wheel drives the synchronous belt to convert rotational motion into linear motion. At the same time, the motor is connected to a reduction device to reduce the rotation speed. When the adjusting nut seat rotates, the adjusting nut seat moves axially, thereby changing the distance between the adjusting nut seat and the bearing seat, so as to adjust the tightness of the synchronous belt.

2. The flower basket transposition device according to claim 1, characterized in that: A moving block is passed through the middle of the first synchronous wheel, and the moving block is connected to the first bearing seat and the second bearing seat respectively.

3. The flower basket transposition device according to claim 1, characterized in that: A stopping device is arranged inside the motor, and the stopping device is used to stop the rotation of the motor.

4. The flower basket transposition device according to claim 1, characterized in that: A connecting piece is slidably connected to the synchronous belt.

5. The flower basket transposition device according to claim 3, characterized in that: A material shape is arranged on the left side of the motor, and a first sensor and a second sensor are respectively connected to both sides of the material shape.

6. The flower basket transposition device according to claim 1, characterized in that: A diaphragm coupling is provided between the motor and the second synchronous wheel.

7. The flower basket transposition device according to claim 4, characterized in that: A synchronous slide bar is arranged above the bearing plate, and the synchronous slide bar is arranged parallel to the synchronous belt.

8. The flower basket transposition device according to claim 7, characterized in that: A linear bearing is slidably connected to the synchronous sliding rod.

9. The flower basket transposition device according to claim 8, characterized in that: The connecting piece and the linear bearing are commonly connected to a translation stage, a flower basket stage is arranged above the translation stage, and the flower basket stage is used for carrying a wafer flower basket.

10. The flower basket transposition device according to claim 5, characterized in that: A sensing sheet is arranged in front of the first sensor and the second sensor, and the sensing sheet is used to cooperate with the first sensor and the second sensor to control the braking device.

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