Full-aperture patch type magneto-rheological optical polishing equipment

Abstract

The invention relates to full-aperture patch type magneto-rheological optical polishing equipment which comprises a flexible polishing module and an intelligent control module. The flexible polishing module is composed of an ultra-thin deformable flexible film, magneto-rheological polishing liquid and an inlet and outlet, and a microcircuit is embedded in the flexible film to respond to magnetic field changes and protect electromagnetic equipment. The magnetorheological polishing liquid adjusts the rheological property through a magnetic field, materials on the surface of optical glass are removed, and the inlet and the outlet are used for spraying and recycling the liquid. The intelligent control module is provided with transverse and longitudinal electromagnetic equipment, an adjustable magnetic field is generated, the driving force of the polishing solution is accurately controlled, the polishing precision and efficiency are ensured, and meanwhile automatic machining is achieved through data processing and a control algorithm. The equipment can be used for efficiently polishing the optical glass, reducing the production cost and period, improving the adaptability of surfaces with complex shapes, enhancing the automation level, simplifying the management, ensuring the stability of the equipment and promoting the intelligent and efficient development of optical glass manufacturing.

Description

Technical Field

[0001] The invention relates to a full-aperture patch-type magnetorheological optical polishing device, in particular to high-precision automatic polishing of optical glass surfaces, and belongs to the field of precision manufacturing. Background Art

[0002] The application and demand for precision optical components in multiple industries will continue to grow. According to the "2025 China Semiconductor Industry Development Trend Report Latest Market Research Report" by the Ministry of Industry and Information Technology of China, it is expected that by 2025, the demand for precision optical components in China's semiconductor industry will increase by more than 30%; the 2023 "China Healthcare Industry Outlook" report pointed out that with the development of telemedicine and precision medicine, the demand for precision optical components in medical imaging and diagnostic equipment will increase significantly. It is expected that in the next five years, the demand for precision optical components in the healthcare industry will increase by an average annual rate of 15%; the 2024 "US Aerospace Industry Trend Report" predicts that with the increase in space exploration and commercial space activities, the demand for precision optical components will increase by an average annual rate of 20% between 2024 and 2028; the "2023-2027 European Smart Security Market Analysis" report predicts that in 2027, the demand for precision optical components in the European smart security market will increase by 40% compared with 2023.

[0003] With the significant growth in the demand for precision optical components, the requirements for their manufacturing technology are also changing with each passing day. This is not only reflected in the higher pursuit of precision, stability and consistency of optical components, but also in the strict requirements for production efficiency and cost control. To this end, the manufacturing technology of precision optical components must continue to innovate and upgrade, using more advanced materials, more sophisticated processing technology and more intelligent manufacturing processes. The improvement of precision optical component manufacturing technology is an inevitable requirement for market development and a source of power for the industry's continued progress.

[0004] Manufacturing precision optical components at full aperture, low cost and without loss has always been the ultimate pursuit in the field of optical manufacturing. Traditional precision optical component manufacturing technology is limited in accuracy, efficiency and cost control due to its basic manufacturing principles and process characteristics. The specific reasons are as follows:

[0005] 1. Limited precision: Traditional manufacturing technologies such as grinding and polishing rely on physical removal of materials to achieve the required shape and surface finish, a process that is affected by machining tool accuracy, material properties (such as hardness, toughness), and thermal effects during machining. The nonlinear characteristics of physical removal make it increasingly difficult to remove tiny materials when approaching the target size, increasing the challenge of achieving high precision.

[0006] 2. Inefficiency: In order to achieve high precision, traditional manufacturing processes often require repeated grinding, polishing and inspection steps. Correction and adjustment may be required between each step, which greatly prolongs the manufacturing cycle.

[0007] 3. Subsurface damage: During the grinding and polishing process, although the final surface looks smooth, physical forces may cause microcracks or stress concentrations under the surface of the material. This subsurface damage will affect the optical performance and life of the component.

[0008] 4. Costs are difficult to control: High-precision machining equipment is usually expensive, especially advanced equipment that can process complex optical components, such as CNC machine tools and precision grinders; the purchase cost of these equipment directly increases the initial investment in production.

[0009] As the core of modern optical systems, precision optical components have extremely stringent manufacturing technology requirements, and they need to ensure full-aperture, low-cost, and non-destructive production. However, traditional manufacturing technology has exposed many drawbacks in the face of this challenge: on the one hand, it relies on high-precision physical processing and measurement equipment, which leads to high costs and difficulty in avoiding sub-surface damage; on the other hand, the lengthy process flow and repeated correction steps significantly reduce production efficiency. In order to manufacture precision optical components in a full-aperture, low-cost, and non-destructive manner, the present invention proposes a full-aperture patch-type magnetorheological optical polishing device, which combines a flexible polishing module, an electromagnetic intelligent control module, and an integrated intelligent control module, and is applied in the manufacture of precision optical components. The large-scale processing equipment is avoided by implementing the control of the electromagnetic field distribution. The full-aperture, low-cost, and non-destructive manufacturing of precision optical components is realized. It effectively overcomes the bottleneck in the traditional manufacturing of precision optical components and opens up a new path for the realization of high-precision, high-efficiency, and low-cost manufacturing of precision optical components. Summary of the invention

[0010] The present invention provides a full-aperture patch-type magnetorheological optical polishing device, which realizes high-precision, high-efficiency, customized optical polishing based on magnetorheological polishing technology and flexible electromagnetic control technology, and provides a high-precision, high-efficiency, and low-cost technical solution for the manufacture of precision optical components. Moreover, the flexible electromagnetic control technology can be used to flexibly design the electromagnetic arrangement in the flexible film according to the initial surface shape and target surface shape of different optical materials, thereby improving the accuracy and efficiency of optical manufacturing. The technical solution adopted by the present invention is:

[0011] The full-aperture patch-type magnetorheological optical polishing device described in the present invention is composed of two parts, namely a flexible polishing module 1 and an intelligent control module 2.

[0012] The flexible polishing module 1 includes a flexible membrane component 11, an electromagnetic valve component 12, and a magnetic liquid sensor component 13; the intelligent control module 2 includes an electromagnetic regulation component 21, a circuit sensor component 22, and an intelligent data processing component 23.

[0013] The flexible polishing module 1 is located at one end close to the target optical surface and directly contacts the target optical surface, wherein the flexible membrane component 11 realizes adjustable flexible membrane deformation by responding to the magnetic field changes of the intelligent control module 2 to adapt to the polishing requirements of different materials and surfaces; the intelligent control module 2 is located at one end away from the target optical surface, and controls the magnetic field strength and distribution by receiving and processing data from various sensors, thereby affecting the properties of the flexible membrane component 11 and dynamically adjusting the polishing removal function.

[0014] The adjustable flexible membrane deformation specifically refers to the deformation of the flexible membrane assembly 11 according to the polishing requirements of the target optical surface, which on the one hand compensates for the limited adjustment range of the polishing removal function, and on the other hand covers the irregular or curved areas of the target optical surface to ensure that the polishing process always maintains uniform fitting.

[0015] The dynamic adjustment of the polishing removal function specifically refers to the change in the properties of the flexible membrane assembly 11, which is achieved through the intelligent control module 2. This change directly affects the rheological properties of the magnetorheological fluid, including its viscosity and elastic modulus. Under different magnetic field intensities, these properties of the magnetorheological fluid will be dynamically adjusted, thereby changing the polishing pressure and removal rate of the flexible polishing module 1 on the target optical surface. This dynamic adjustment capability achieves the results of optimization based on the specific surface shape data and actual material properties of the target optical surface, achieving high-precision and high-efficiency polishing effects. By precisely controlling electromagnetic parameters, customized polishing processing can be performed at different polishing stages and on optical components of different materials to ensure processing quality and improve processing efficiency.

[0016] The flexible membrane assembly 11 in the flexible polishing module 1 constitutes the main part of the flexible polishing module 1, and is used to accurately fit the target optical surface so that the magnetorheological polishing fluid can effectively act on the target optical surface; the electromagnetic valve assembly 12 is evenly distributed inside the flexible membrane assembly 11, and is used to control the supply and discharge of the magnetorheological polishing fluid, ensuring that the liquid can be evenly distributed in the working area during the polishing process, while also allowing the used polishing fluid to be discharged to maintain the working state and polishing efficiency of the polishing fluid; the magnetic liquid sensor assembly 13 is located at the end of the flexible membrane assembly 11 away from the target optical surface, and is used to monitor the amount of magnetorheological polishing fluid in real time; the electromagnetic valve assembly 12 is connected to the magnetic liquid sensor assembly 13, and is used to receive liquid level information and automatically adjust the electromagnetic valve to open or close according to the preset liquid level range to achieve the replenishment or discharge of the magnetorheological polishing fluid.

[0017] The electromagnetic control component 21 in the intelligent control module 2 is located at the end of the flexible polishing module 1 away from the target optical surface, and is used to generate an adjustable magnetic field to affect the performance of the flexible membrane component 11 with respect to the magnetorheological polishing fluid. It is also used to receive a control signal from the intelligent data processing component 23, adjust the magnitude and direction of the current, and accurately control the magnetic field intensity and distribution generated by the electromagnetic control component 21; the electromagnetic sensor component 22 is located at the end of the flexible membrane component 11 away from the target optical surface, or is embedded in the flexible membrane component 11, and is used to monitor key electromagnetic parameters during the polishing process; the data collected by the electromagnetic sensor component 22 is transmitted to the integrated intelligent data processing component 23 via a signal line or wirelessly, and the intelligent data processing component 23 sends a control instruction to the electromagnetic control component 21 to adjust the current parameters.

[0018] The intelligent data processing component 23 in the intelligent control module 2 is located in the central processing unit of the computer entity, and is used to receive external input position coordinate information to complete coordinate alignment and conversion, receive and process data from the magnetic liquid sensor component 13 and the electromagnetic sensor component 22 in real time, and dynamically control control parameters.

[0019] The components in the flexible polishing module 1 and the intelligent control module 2 are divided into two layers in order from near to far relative to the target optical surface: the first layer is composed of a flexible membrane component 11, an electromagnetic valve component 12, and a magnetic liquid sensor component 13; the second layer is composed of an electromagnetic control component 21, a circuit sensor component 22, and an intelligent data processing component 23.

[0020] The coordinate alignment and conversion algorithm process includes:

[0021] Step 1: Positioning of optical glass after inspection. After the inspection process is completed, the optical glass is accurately positioned. At this time, the relative position of the optical glass is determined to form the relative coordinates of the optical glass (starting point coordinates);

[0022] Step 2: Transform the coordinate system to the translation stage coordinate system. Move the optical glass to the platform to be processed (translation stage). During this process, the relative coordinates of the optical glass need to be converted into the coordinate system of the translation stage to ensure that the position of the optical glass on the translation stage can be accurately identified and controlled.

[0023] Step 3: Establish the correspondence between the coordinates of the translation stage and the coordinates of the surface mount device. In the translation stage coordinate system, further establish the correspondence with the coordinate system of the surface mount device to ensure that the translation stage coordinates can be correctly interpreted and applied by the surface mount device;

[0024] Step 4: Convert the coordinates to the SMD stage coordinates. Finally, convert the stage coordinates to the SMD device coordinate system. This conversion ensures that the SMD device can operate accurately according to the stage coordinates to achieve accurate processing of optical glass.

[0025] The beneficial effects of the present invention are:

[0026] As the core of modern optical systems, precision optical components have extremely stringent manufacturing technology requirements. Traditional technologies have problems such as low processing efficiency and unstable processing quality due to the variety of surface shapes. The present invention proposes a full-aperture patch-type magnetorheological optical polishing device, which can manufacture and process precision optical components with high efficiency, high precision and low cost; it solves the problems of low efficiency and poor robustness in multiple surface processing.

[0027] The present invention realizes one-step processing of precision optical components through innovative microcircuit design and magnetic field control technology; effectively meets the polishing requirements of various complex optical workpieces; and avoids errors caused by multiple adjustments to processing parameters. The present invention combines integrated microcircuit design, magnetic field control and real-time parameter optimization technology to optimize the real-time adjustment of processing parameters, promote the development of the precision processing industry in a more intelligent and efficient direction, and reduce the dependence on the experience and skills of operators, reducing production costs and difficulty. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is the overall structure diagram of the present invention;

[0029] Figure 2 It is a working schematic diagram of the present invention;

[0030] Figure 3 is an operation flow chart of the present invention;

[0031] Figure 4 It is the algorithm flow chart of the present invention.

[0032] Among them, 1 is a flexible polishing module 1, 11 is a flexible membrane component, 12 is an electromagnetic valve component, 13 is a magnetic fluid sensor component; 2 is an intelligent control module, 21 is an electromagnetic regulation component, 22 is a circuit sensor component, and 23 is an intelligent processing component. Specific implementation plan

[0033] The specific embodiments of the present invention are further described in detail below in conjunction with the accompanying drawings. The following embodiments or drawings are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0034] Figure 1 This is an overall structural diagram of a full-aperture patch-type magnetorheological optical polishing device of the present invention. There are two layers from top to bottom, indicating that the flexible polishing module 1 and the intelligent control module 2 are two parts in total. The components of the flexible polishing module 1 are located on the first layer, and the components of the intelligent control module 2 are located on the second layer;

[0035] From top to bottom, the first layer consists of a whole layer of flexible membrane components 11 and multiple electromagnetic valve components 12 and magnetic fluid sensor components 13 evenly distributed thereon; the second layer consists of multiple evenly distributed electromagnetic control components 21 and electromagnetic sensor components 22 and a single intelligent data processing component 23.

[0036] Figure 2 This is a working schematic diagram of a full-aperture patch-type magnetorheological optical polishing device of the present invention. From above, the electromagnetic control component 21 and the electromagnetic sensing component 22 of the first layer and the single intelligent data processing component 23 are observed. The space between the second layer and the optical glass is filled with magnetorheological fluid, and the content of the magnetorheological fluid is controlled in real time by each component.

[0037] Figure 3 This is an operation flow chart of a full-aperture patch-type magnetorheological optical polishing device of the present invention. After starting work, the polishing device is initialized, the intelligent data processing component 23 completes the positioning of the optical glass to be processed, calculates the coordinate conversion relationship between the device and the optical glass, generates device movement path data and device magnetic field change data, and the intelligent data processing component 23 converts the movement path data and the magnetic field change data into movement path machine code and magnetic field change machine code, and controls the device to start the processing program until it ends.

[0038] Figure 4 This is an algorithm flow chart of a full-aperture patch-type magnetorheological optical polishing device of the present invention, which shows the entire algorithm flow of the device processing from the beginning to the end. After the process starts, the device is initialized first, the optical glass is positioned to obtain its coordinate information, and the intelligent data processing component 23 subtracts the optical glass target and the existing surface shape data to obtain the polishing removal amount to be achieved, and then generates the moving path data and the magnetic field change data. After the intelligent data processing component 23 converts the device moving path data and the internal magnetic field change data into the device moving machine code and the magnetic field change machine code respectively, the device is controlled to start polishing until the two files are finished running, and the processing is completed by resetting.

Claims

1. A full-aperture patch-type magnetorheological optical polishing device, characterized in that: The polishing device comprises two layers, namely, a flexible polishing module (1) and an intelligent control module (2); The intelligent processing component 23 in the intelligent control module (2) obtains the surface data information of the optical glass to be processed before polishing, calculates the full-aperture processing amount in combination with the target surface data, places the optical glass under the invention, obtains the position information of the optical glass relative to the invention and controls the alignment, calculates the distribution of the full-aperture processing amount on the optical glass, and the intelligent control module (2) controls the electromagnetic valve component 12 to inject magnetorheological fluid to start polishing; the intelligent control module 2 changes the regional electric field distribution to change the magnetic field, thereby controlling the process of optical magnetorheological polishing.

2. The intelligent control module (2) according to claim 1, characterized in that It can calculate coordinate information, polishing removal amount, calculate and generate moving path data and magnetic field change data and convert them into machine code, and transmit the machine code to the device by wireless transmission; Optionally, it can also be transmitted to an external device for operators to observe key data during the polishing process and adjust system parameters during the polishing process; Optionally, the wireless transmission mode can be converted into a wired transmission mode; Optionally, the number of intelligent processing components 23 in the intelligent control module (2) may be greater than one.

3. The intelligent control module (2) according to claim 1, characterized in that The intelligent control module 2 generates a magnetic field change instruction according to the calculated full-caliber processing amount, and converts it into a full-caliber electric field change instruction to control the intelligent control module 2 to complete a series of electromagnetic field change instructions.

4. The flexible polishing module (1) according to claim 1, characterized in that It includes flexible membrane components, electromagnetic valve components, and magnetic liquid sensor components.

5. The process of controlling optical magnetorheological polishing according to claim 1, characterized in that In addition to the lateral shearing of the optical glass by the magnetorheological fluid caused by the change of the magnetic field inside the device, the device as a whole can also cooperate to realize operations such as rotation, translation and deflection.

6. The polishing device according to claim 1 comprises two layers, characterized in that It is divided into an upper and lower two-layer structure. Optionally, the two-layer structure can also be divided into more layers.

7. The flexible membrane assembly according to claim 4, characterized in that It can adjust hardness and deformation in response to changes in electromagnetic fields, and achieve full-aperture and full-process bonding of optical glass.

8. The device according to claim 5 wherein the change in the magnetic field inside the device causes the magnetorheological fluid to shear the optical glass transversely, characterized in that The equipment achieves a sudden change in the magnetic field by instantaneously changing the internal electric field distribution. The magnetorheological fluid affected by the magnetic field generates a lateral shear force relative to the optical glass, thereby achieving polishing processing.

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