Silicon-aluminum alloy reflector and large-aperture optical-mechanical integrated scanning reflector assembly

Abstract

The invention belongs to the related technical field of optical-mechanical systems, and discloses a silicon-aluminum alloy reflector and a large-aperture optical-mechanical integrated scanning reflector assembly. A mirror body of the reflecting mirror comprises a substrate, a modified layer and a reflecting film, the substrate is made of silicon-aluminum alloy, the modified layer is made of nickel-phosphorus alloy, the mass fraction of silicon in the silicon-aluminum alloy is 40% + / -2%, and the mass fraction of phosphorus in the nickel-phosphorus alloy is 11% + / -2%. The reflector assembly comprises a reflector, an azimuth axis system mechanism and a pitch axis system mechanism, the two ends of the reflector are connected with the pitch axis system mechanism, and the pitch axis system mechanism is used for adjusting the pitch angle of the reflector; the pitch axis system mechanism is arranged on the azimuth axis system mechanism, and the azimuth axis system mechanism rotates to drive the pitch axis system mechanism to rotate so as to drive the reflector to rotate. According to the invention, the problem in the prior art that small reflector deformation and high inherent frequency of the scanning reflector assembly cannot be simultaneously ensured under the temperature difference condition is solved.

Description

Technical Field

[0001] The present invention belongs to the technical field related to optical-mechanical systems, and more specifically, relates to a silicon-aluminum alloy reflector and a large-aperture optical-mechanical integrated scanning reflector assembly. Background Art

[0002] Scanning mirror assemblies usually require small loads and small moments of inertia. The traditional structural scheme of scanning mirror assemblies usually uses optical glass as the mirror material, metal as the supporting structural material, and adhesives are used to bond the mirror and the supporting structural parts. This scheme has the disadvantages of low natural frequency, low servo bandwidth, poor stability of optical axis pointing accuracy, and poor mirror surface accuracy under temperature difference load.

[0003] By searching the existing literature, the following prior arts are found: CN202010557053.9 discloses a tooling and bonding method for bonding a scanning reflector. In this invention, the scanning reflector and the supporting structure are made of different materials, and the reflector is installed by bonding; CN201880030862.5 discloses a scanning reflector system and method, the device has a reflector and a drive mechanism, and this invention is a MEMS scanning reflector; CN202111433437.0 discloses a space camera pointing reflector assembly. However, this invention uses nesting to support the two sides of the reflector, and the reflector and the nesting are connected by pins and bonded at the same time. The above-mentioned scanning reflector assembly has problems such as low natural frequency, low servo bandwidth, stability of optical axis pointing accuracy, and poor reflector surface accuracy under temperature difference load. Therefore, there is an urgent need for a reflector assembly that can solve the above problems. Summary of the invention

[0004] In response to the above defects or improvement needs of the prior art, the present invention provides a silicon-aluminum alloy reflector and a large-aperture optical-mechanical integrated scanning reflector assembly to solve the problem in the prior art that the scanning reflector assembly cannot simultaneously ensure small reflector deformation and high assembly natural frequency under temperature difference conditions.

[0005] To achieve the above-mentioned purpose, according to one aspect of the present invention, a silicon-aluminum alloy reflector is provided, wherein the mirror body of the reflector comprises a substrate, a modified layer and a reflective film, wherein the substrate is made of silicon-aluminum alloy, the modified layer is arranged on the substrate, the modified layer is made of nickel-phosphorus alloy, and the reflective film is arranged on the modified layer as a reflective surface, wherein the mass fraction of silicon in the silicon-aluminum alloy is 40%±2%, and the mass fraction of phosphorus in the nickel-phosphorus alloy is 11%±2%.

[0006] Further preferably, the reflector includes a mirror body and connecting plates arranged on both sides of the mirror body and connected to the mirror body, the mirror body and the connecting plates are integrally formed, and a stress unloading groove is arranged between the mirror body and the connecting plates.

[0007] Further preferably, a weight-reducing hole is provided on the side of the mirror body.

[0008] Further preferably, the weight-reducing holes are blind holes, which are symmetrically and evenly distributed on both sides of the mirror body.

[0009] According to another aspect of the present invention, a large-aperture optical-mechanical integrated scanning reflector assembly is provided, the reflector assembly comprising the above-mentioned reflector, azimuth axis system mechanism and pitch axis system mechanism, wherein:

[0010] Both ends of the reflector are connected to the pitch axis mechanism, and the pitch axis mechanism is used to adjust the pitch angle of the reflector;

[0011] The pitch axis system mechanism is arranged on the azimuth axis system mechanism, and the rotation of the azimuth axis system mechanism drives the pitch axis system mechanism to rotate, thereby driving the reflector to rotate.

[0012] Further preferably, the pitch axis system mechanism includes a pitch seat, an angle measuring shaft, a first angular contact bearing and a second angular contact bearing arranged on one side of the pitch seat, and a deep groove ball bearing, a drive motor and a pitch motor shaft arranged on the other side of the pitch seat, wherein:

[0013] The angle measuring axis and the pitch motor axis are arranged on both sides of the reflector and are fixedly connected to the reflector;

[0014] The deep groove ball bearing, the pitch motor shaft and the pitch seat form a revolute pair;

[0015] The pitch seat, the first angular contact bearing, the second angular contact bearing and the angle measuring shaft form a revolute pair;

[0016] The driving motor drives the pitch motor shaft, the reflector and the angle measuring shaft to rotate.

[0017] Further preferably, the outer rings of the first angular contact bearing and the second angular contact bearing are fixed to the bearing mounting holes of the pitch seat, and the inner rings of the first angular contact bearing and the second angular contact bearing are fixed on the goniometric shaft, so that the axial direction of the rotating pair formed by the pitch seat, the first angular contact bearing, the second angular contact bearing and the goniometric shaft is fixed.

[0018] Further preferably, the inner ring of the deep groove ball bearing is fixed on the pitch motor shaft, and the outer ring is installed in the bearing mounting hole of the pitch seat and is not fixed, so that the deep groove ball bearing can move axially relative to the bearing mounting hole of the pitch seat when there is a temperature difference.

[0019] Further preferably, a pitch angle measuring mechanism is also provided on one side of the pitch seat, and the pitch angle measuring mechanism includes a grating seat, a circular grating and a reading head. The circular grating is installed on the angle measuring axis through the grating seat, and the reading head is used to read the rotation angle of the circular grating, that is, the pitch rotation angle of the reflector.

[0020] Further preferably, the reflecting surface of the reflector is higher than the rotation axis of the pitch axis system mechanism. At the same time, the center of mass of the reflector and the pitch axis system mechanism are on the rotation axis, thereby avoiding load eccentricity. The materials of the pitch seat, the angle measuring axis and the pitch motor shaft are all made of silicon aluminum alloy.

[0021] In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:

[0022] 1. The material of the angle measuring axis, the pitch motor axis and the reflector substrate of the present invention is a silicon aluminum alloy with a silicon mass fraction of 40% ± 2%, a high elastic modulus (> 100GPa), a low density (< 2600kg / m 3 ), the mass and moment of inertia are smaller, the phosphorus content of the nickel-phosphorus alloy modified layer is 11%±2%, ensuring that the difference in thermal expansion coefficient between the substrate and the modified layer is ≤0.2ppm / ℃, thereby ensuring that the reflector does not deform under temperature difference conditions and the natural frequency of the component is high.

[0023] 2. The mirror body and the connecting plate of the present invention are integrally formed, avoiding the use of adhesives, and the connection rigidity is higher and the creep is smaller, thereby improving the natural frequency and optical axis pointing stability of the reflector assembly, thereby improving the servo bandwidth of the reflector assembly. In addition, the nickel-phosphorus alloy modified layer can be ultra-precision cut or polished, and the surface roughness can reach sub-nanometer. Therefore, the present invention can be applied to optical mechanical systems in infrared, near-infrared, visible light and ultraviolet bands, and can achieve athermal, lightweight and high-rigidity design, and has the advantages of high manufacturing efficiency and low cost.

[0024] 3. The materials of the pitch seat, angle measuring axis, pitch motor shaft and reflector of the present invention are all silicon-aluminum alloy with the same silicon mass fraction, which avoids the difference in thermal expansion coefficient between the reflector and the supporting structure, and can avoid the deformation of the reflector due to inconsistent thermal expansion and contraction of the reflector and the supporting structure under temperature difference conditions; in addition, the reflector of the present invention is provided with a stress unloading groove, and the bearing mounting hole of the deep groove ball bearing relative to the pitch seat can move axially under temperature difference conditions, which can further reduce the stress deformation of the reflector under temperature difference conditions. Compared with the prior art, the surface accuracy of the reflector under temperature difference load is better. The present invention is particularly suitable for large-aperture scanning reflector assemblies (aperture ≥ 100mm), and is also suitable for small-aperture reflector assemblies. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1is a schematic cross-sectional view of a component constructed according to a preferred embodiment of the present invention;

[0026] Figure 2 is an exploded view of a pitch axis system constructed according to a preferred embodiment of the present invention;

[0027] Figure 3 Schematic diagram of a reflector structure constructed according to a preferred embodiment of the present invention, wherein (a) is a left view, (b) is a front view, and (c) is a top view;

[0028] Figure 4 It is a schematic diagram of the appearance of the component (including the torque motor) and the assembly of the reflector constructed according to the preferred embodiment of the present invention;

[0029] Figure 5 1 is a schematic diagram of the appearance of a pitch motor axis and an angle measuring axis constructed according to a preferred embodiment of the present invention, wherein (a) is the pitch motor axis, and (b) is the angle measuring axis;

[0030] Figure 6 is a schematic diagram of an ultra-precision turned reflector connection surface constructed according to a preferred embodiment of the present invention;

[0031] Figure 7 is a schematic diagram of an ultra-precision turned reflector constructed according to a preferred embodiment of the present invention;

[0032] Figure 8 It is a schematic diagram of the adjustment of the angle measuring axis constructed according to the preferred embodiment of the present invention.

[0033] Throughout the drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0034] 1-pitch seat, 2-first angular contact bearing, 3-second angular contact bearing, 4-angle measuring axis, 5-angular contact bearing inner ring pressure plate, 6-angular contact bearing outer ring pressure plate, 7-grating seat, 8-circular grating, 9-reflector, 10-mirror body, 11-connecting plate, 12-stress unloading groove, 13-weight reduction hole, 14-pitch motor shaft, 15-deep groove ball bearing, 16-deep groove ball bearing pressure plate, 17-drive motor, 18-drive motor pressure plate, 19-bearing mounting hole of pitch seat, 20-reading head, 21-connecting flange, 22-azimuth seat, 23-third angular contact bearing, 24-azimuth motor shaft, 25-fourth angular contact bearing, 26-angular contact bearing pressure plate;

[0035] 27-reflector connecting screws and cylindrical pin installation process holes;

[0036] 28-deep groove ball bearing inner ring matching surface, 29-deep groove ball bearing mounting end surface, 30-angular contact bearing inner ring matching surface, 31-angular contact bearing mounting end surface;

[0037] 32-reflector fixture, 33-zero point positioning flange, 34-flying cutter assembly;

[0038] 35- pitch motor shaft fixture, 36- ultra-precision air-floating turntable with adjustable leveling and centering. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0040] The scanning reflector assembly of the present invention comprises an orthogonal azimuth axis mechanism, a pitch axis mechanism and a reflector 9. The assembly is fixed to the optical system structure body through an azimuth seat 22 to realize the scanning, image stabilization, tracking, measurement and other functions of the optical system.

[0041] The azimuth axis system and the pitch axis system are two mutually perpendicular rotation axes, the normal of the reflector 9 is perpendicular to the pitch rotation axis, and the center of mass of the reflector 9 and the pitch axis system coincides with the pitch rotation axis. The azimuth axis system and the pitch axis system are connected by connecting flange 21 and pitch seat 1 using screws and cylindrical pins. The reflector 9 and the pitch axis system are connected by angle measuring shaft 4 and pitch motor shaft 14 using screws and cylindrical pins, which ensures assembly processability.

[0042] The pitch axis mechanism adopts a fixed support-floating support structure to compensate for the length change of the axis system caused by thermal deformation and manufacturing and installation errors, and reduce the deformation of the mirror surface of the reflector 9 under a wide temperature difference load. The pitch seat 1, the pitch motor shaft 14, the angle measuring shaft 4 and the base material of the reflector 9 are all made of silicon-aluminum alloy with the same mass fraction. The surface of the silicon-aluminum alloy is modified with nickel-phosphorus alloy. Combined with magnetorheological shaping polishing and CCOS polishing process, the high surface accuracy and sub-nanometer surface roughness of the reflector 9 are achieved, and the mass fraction of silicon-aluminum alloy and the phosphorus content of nickel-phosphorus alloy are controlled to achieve matching of thermal expansion coefficients, reduce bimetallic effect, and reduce thermal stress deformation of the reflector 9 under a wide temperature difference load.

[0043] Based on topology optimization technology, the reflector 9 is designed to be lightweight. Based on optical-mechanical integration analysis technology, the reflector 9 is designed with groove structures in four directions, which can reduce the assembly stress and thermal stress transmitted to the mirror body, thereby reducing the stress deformation of the reflective surface of the reflector 9. In addition, the assembly accuracy of the components is guaranteed through stress relief technology, ultra-precision turning and adjustment.

[0044] The weight reduction design of the reflector 9 adopts a closed back plate structure and has reinforcing ribs designed in the horizontal and vertical directions. On the basis of ensuring the processing properties of the reflector 9, the comprehensive optimization of the lightweight and rigidity design of the reflector 9 can be achieved.

[0045] The reflector base material is a silicon-aluminum alloy with a silicon mass fraction of 40%±2%, and the modified layer material is a nickel-phosphorus alloy with a phosphorus mass fraction of 11%±2%, which reduces the bimetallic effect. The surface of the modified layer can be ultra-precision cut and polished, and can simultaneously achieve high surface accuracy and sub-nanometer surface roughness of the reflector 9. It can be used in optical-mechanical systems in infrared, near-infrared, visible light and ultraviolet bands, and can achieve athermal, lightweight and high-rigidity design, and has the advantages of high manufacturing efficiency and low cost.

[0046] The angle measuring end of the pitch axis system mechanism is a fixed end, and a pair of angular contact bearings are adopted. The inner rings of the first angular contact bearing 2 and the second angular contact bearing 3 are fixed to the angle measuring shaft 4, and the outer rings are fixed to the bearing mounting holes of the pitch seat 1, and they cannot move axially relative to each other; the motor end is a floating end, and a deep groove ball bearing is adopted. The inner ring of the deep groove ball bearing 15 is fixed to the pitch motor shaft 14, and the outer ring and the pitch seat 1 are matched with a small clearance shaft hole, which can move axially, and can compensate for the length change of the pitch axis system caused by manufacturing and installation errors and temperature differences, ensure the stiffness of the pitch axis system, and reduce the deformation of the mirror surface of the reflector 9 under assembly and temperature difference loads.

[0047] The reflecting surface of the reflector 9 is higher than the rotation axis of the pitch axis system mechanism. Through mass attribute analysis and structural optimization, the center of mass of the reflector 9 and the pitch axis system mechanism is ensured to be located on the rotation axis, avoiding eccentricity and additional counterweight, reducing the moment of inertia, and improving the servo resonance frequency of the component.

[0048] The connecting surfaces between the reflector 9 and the goniometric shaft 4 and the pitch motor shaft 14 are processed by ultra-precision turning to achieve a flatness of the connecting surfaces less than 1 micron, ensuring that no assembly stress deformation occurs when the reflector 9 is assembled; the deep groove ball bearing inner ring mating surface 28 and the deep groove ball bearing mounting end surface 29 of the pitch motor shaft, the angular contact bearing inner ring mating surface 30 and the angular contact bearing mounting end surface 31 of the goniometric shaft are all processed by ultra-precision turning, and the goniometric shaft 4 is installed and adjusted using an ultra-precision air-floating turntable 36 to improve the coaxiality of the deep groove ball bearing inner ring mating surface 28 of the pitch motor shaft and the angular contact bearing inner ring mating surface 30 of the goniometric shaft, and to improve the parallelism of the deep groove ball bearing mounting end surface 29 of the pitch motor shaft and the angular contact bearing mounting end surface 31 of the goniometric shaft, thereby reducing the mirror deformation of the reflector 9 assembly and ensuring the angular shaking accuracy of the axis of rotation.

[0049] like Figure 1As shown, the pitch axis system mainly consists of a pitch seat 1, a first angular contact bearing 2, a second angular contact bearing 3, an angle measuring shaft 4, an angular contact bearing inner ring pressure plate 5, an angular contact bearing outer ring pressure plate 6, a grating seat 7, a circular grating 8, a pitch motor shaft 14, a deep groove ball bearing 15, a deep groove ball bearing pressure plate 16, a drive motor 17, a drive motor pressure plate 18, and a reading head 20; the pitch axis system consists of a pitch axis system and a reflector 9, and the reflector 9 is connected to the pitch axis system through the angle measuring shaft 4 and the pitch motor shaft 14 using screws and cylindrical pins; the azimuth axis system mainly consists of a connecting flange 21, a circular grating 8, a reading head 20, an azimuth seat 22, a drive motor 17, a third angular contact bearing 23, an azimuth motor shaft 24, a fourth angular contact bearing 25, and an angular contact bearing pressure plate 26. The azimuth axis system and the pitch axis system are connected through the connecting flange 21 and the pitch seat 1 using screws and cylindrical pins.

[0050] In the material selection implementation, the materials of the pitch seat 1, the angle measuring shaft 4, the pitch motor shaft 14 and the base of the reflector 9 are all made of silicon-aluminum alloy with a silicon mass fraction of 40%, which is used to achieve thermal expansion coefficient matching. The surface of the silicon-aluminum alloy is modified with nickel-phosphorus alloy, combined with magnetorheological shaping polishing and CCOS polishing technology, to achieve high surface accuracy and sub-nanometer surface roughness of the reflector 9, and control the phosphorus content of the nickel-phosphorus alloy to achieve thermal expansion coefficient matching and reduce the bimetallic effect.

[0051] like Figure 1 , Figure 2As shown, in the embodiment of the shaft system structure design, the pitch shaft system adopts a fixed support-floating support structure, the angle measuring end is the fixed end, and the motor end is the floating end. The pitch seat 1 and the outer rings of the first angular contact bearing 2 and the second angular contact bearing 3 are matched with shaft holes, and are connected and fixed by screws through the angular contact bearing outer ring pressure plate 6. In the pitch shaft system, the angle measuring shaft 4 and the inner rings of the first angular contact bearing 2 and the second angular contact bearing 3 are matched with shaft holes, and are connected and fixed by screws through the angular contact bearing inner ring pressure plate 5. The grating seat 7 and the angle measuring shaft 4 are matched with shaft holes, and are connected and fixed by screws and cylindrical pins. The circular grating 8 is installed on the grating seat 7 by screw connection. The reading head 20 is installed on the pitch seat 1. The reflector 9 is connected to the angle measuring shaft 4 and the pitch motor shaft 14 by screws and cylindrical pins. The pitch motor shaft 14 and the inner ring of the deep groove ball bearing 15 are matched with shaft holes, and are connected and fixed by screws through the deep groove ball bearing pressure plate 16. The outer ring of the deep groove ball bearing 15 is matched with the pitch seat 1 in a small clearance shaft hole and is not fixed. The rotor of the drive motor 17 is installed on the pitch motor shaft 14 and is fixed by screws through the drive motor pressure plate 18. The stator of the drive motor 17 is installed on the pitch seat 1 by screw connection. In the azimuth axis system mechanism, the connecting flange 21 is connected to the azimuth motor shaft 24 by screws and cylindrical pins. The circular grating 8 is installed on the connecting flange 21 by screw connection. The reading head 20 is installed on the azimuth seat 22 by screw connection. The stator of the drive motor 17 is installed on the azimuth seat 22 by screw connection. The inner rings of the third angular contact bearing 23 and the fourth angular contact bearing 25 are matched with the azimuth seat 22 in a shaft hole, and the angular contact bearing pressure plate 26 is fixed with the azimuth seat 22 by screw connection, and the third angular contact bearing 23 and the fourth angular contact bearing 25 are pre-tightened and fixed. The outer rings of the third angular contact bearing 23 and the fourth angular contact bearing 25 are matched with the azimuth motor shaft 24 in a shaft hole and are pre-tightened and fixed by a shaft shoulder. The rotor of the drive motor 17 is mounted on the azimuth motor shaft 24 by screw connection.

[0052] like Figure 3 As shown in (a) to (c) in the embodiment of the structural design of the reflector 9, the weight reduction design of the reflector 9 adopts a closed back plate structure, and reinforcing ribs are designed for the reflector 9 in the horizontal and vertical directions. The reflector 9 includes a mirror body 10 and connecting plates 11 arranged on both sides of the mirror body and connected to the mirror body. The mirror body and the connecting plate are integrally formed, and a stress unloading groove 12 is arranged between the mirror body and the connecting plate. A weight reduction hole 13 is arranged on the side of the mirror body. On the basis of ensuring the processing technology of the reflector 9, the comprehensive optimization of the lightweight and rigidity design of the reflector 9 is achieved, and the stress transmission to the mirror body can be isolated.

[0053] like Figure 1 to Figure 4 As shown, in the embodiment of connecting the reflector 9 with the pitch motor shaft 14 and the goniometric shaft 4, the reflector is connected with the pitch motor shaft 14 and the goniometric shaft 4 via screws and cylindrical pins via the connecting plate 11, and the screws and cylindrical pins are installed from the outside of the pitch seat 1 to ensure assembly processability.

[0054] like Figure 5 As shown, during the ultra-precision turning of the pitch motor shaft 14 and the goniometer shaft 4, the deep groove ball bearing inner ring mating surface 28, deep groove ball bearing mounting end face 29 and connecting surface of the pitch motor shaft, and the angular contact bearing inner ring mating surface 30, angular contact bearing mounting end face 31 and connecting surface of the goniometer shaft are all processed using ultra-precision lathes to ensure the flatness of the connecting surface, the cylindricity and geometric dimension tolerance of the bearing inner ring mating surface, the perpendicularity of the bearing inner ring mating surface and the bearing mounting end face, and the parallelism of the bearing mounting end face and the connecting surface.

[0055] like Figure 6 , Figure 7 As shown, in the implementation of ultra-precision turning of the reflector 9, the reflector 9 is mounted on the reflector fixture 32 by screw connection, the reflector fixture 32 is mounted on the zero point positioning flange 33 by screw connection, and the zero point positioning flange 33 is mounted on the ultra-precision machine tool B axis. The flying cutter assembly 34 is used to process the reflective surface and the connecting surface of the reflector 9 to ensure the flatness and parallelism of the connecting surface between the reflector 9 and the pitch motor shaft 14 and the angle measuring shaft 4, and to ensure the verticality of the reflective surface and the connecting surface.

[0056] like Figure 8 As shown, in the embodiment of adjusting and ensuring the coaxiality and parallelism of the pitch motor shaft 14 and the goniometric shaft 4, the reflector 9 is connected with the pitch motor shaft 14 and the goniometric shaft 4 by screws and cylindrical pins. The pitch motor shaft 14 is installed on the pitch motor shaft fixture 35 by screw connection, and then the pitch motor shaft fixture 35 is installed on the ultra-precision air-floating turntable 36 that can be adjusted for leveling and centering. With the rotation axis of the ultra-precision air-floating turntable 36 as a reference, the deep groove ball bearing mounting end face 29 of the pitch motor shaft is tilted and the deep groove ball bearing inner ring mating surface 28 of the pitch motor shaft is translated to ensure the verticality of the deep groove ball bearing inner ring mating surface 28 of the pitch motor shaft and the rotation axis of the ultra-precision air-floating turntable 36, and to ensure the coaxiality of the deep groove ball bearing mounting end face 29 of the pitch motor shaft and the rotation axis of the ultra-precision air-floating turntable 36. Then the angle measuring shaft 4 is translated to ensure the coaxiality of the deep groove ball bearing inner ring matching surface 28 of the pitch motor shaft and the angular contact bearing inner ring matching surface 30 of the angle measuring shaft, and to ensure the parallelism of the deep groove ball bearing mounting end surface 29 of the pitch motor shaft and the angular contact bearing mounting end surface 31 of the angle measuring shaft. This reduces the mirror deformation of the reflector 9 assembly and ensures the angular shake accuracy of the pitch axis system.

[0057] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon aluminum alloy reflector, characterized in that: The mirror body of the reflector (9) comprises a substrate, a modified layer and a reflective film, wherein the substrate is made of a silicon-aluminum alloy, the modified layer is arranged on the substrate, the modified layer is made of a nickel-phosphorus alloy, and the reflective film is arranged on the modified layer as a reflective surface, wherein the mass fraction of silicon in the silicon-aluminum alloy is 40%±2%, and the mass fraction of phosphorus in the nickel-phosphorus alloy is 11%±2%.

2. A silicon-aluminum alloy reflector as claimed in claim 1, characterized in that: The reflector (9) further comprises connecting plates (11) arranged on both sides of the mirror body and connected to the mirror body, the mirror body and the connecting plates are integrally formed, and a stress unloading groove (12) is arranged between the mirror body and the connecting plates.

3. A silicon-aluminum alloy reflector as claimed in claim 1 or 2, characterized in that: A weight-reducing hole (13) is provided on the side of the mirror body.

4. A silicon aluminum alloy reflector as claimed in claim 3, characterized in that: The weight-reducing holes are blind holes, symmetrically and evenly distributed on both sides of the mirror body.

5. A large-aperture optical-mechanical integrated scanning reflector assembly, characterized in that: The reflector assembly comprises the reflector (9) according to any one of claims 1 to 4, an azimuth axis system mechanism and a pitch axis system mechanism, wherein: Both ends of the reflector (9) are connected to the pitch axis system mechanism, and the pitch axis system mechanism is used to adjust the pitch angle of the reflector (9); The pitch axis system mechanism is arranged on the azimuth axis system mechanism, and the rotation of the azimuth axis system mechanism drives the pitch axis system mechanism to rotate, thereby driving the reflector (9) to rotate.

6. A large-aperture optical-mechanical integrated scanning reflector assembly as claimed in claim 5, characterized in that: The pitch axis system mechanism comprises a pitch seat (1), an angle measuring shaft (4), a first angular contact bearing (2) and a second angular contact bearing (3) arranged on one side of the pitch seat (1), and a deep groove ball bearing (15), a drive motor (17) and a pitch motor shaft (14) arranged on the other side of the pitch seat (1), wherein: The angle measuring axis (4) and the pitch motor axis (14) are arranged on both sides of the reflector (9) and are fixedly connected to the reflector (9); The deep groove ball bearing (15), the pitch motor shaft (14) and the pitch seat (1) form a revolute pair; The pitch seat (1), the first angular contact bearing (2), the second angular contact bearing (3) and the angle measuring shaft (4) form a revolute pair; The driving motor drives the pitch motor shaft (14), the reflector (9) and the angle measuring shaft (4) to rotate.

7. A large-aperture optical-mechanical integrated scanning reflector assembly as claimed in claim 5 or 6, characterized in that: The outer rings of the first angular contact bearing (2) and the second angular contact bearing (3) are fixed to the bearing mounting holes of the pitch seat (1), and the inner rings of the first angular contact bearing (2) and the second angular contact bearing (3) are fixed to the angle measuring shaft (4), so that the rotation pair formed by the pitch seat (1), the first angular contact bearing (2), the second angular contact bearing (3) and the angle measuring shaft (4) is axially fixed.

8. A large-aperture optical-mechanical integrated scanning reflector assembly as claimed in claim 5 or 6, characterized in that: The inner ring of the deep groove ball bearing (15) is fixed on the pitch motor shaft (14), and the outer ring is rotated in the bearing mounting hole of the pitch seat (1) and is not fixed, so that the deep groove ball bearing (15) can move axially relative to the bearing mounting hole of the pitch seat (1) when there is a temperature difference.

9. A large-aperture optical-mechanical integrated scanning reflector assembly as claimed in claim 5 or 6, characterized in that: A pitch angle measuring mechanism is also arranged on one side of the pitch seat (1), the pitch angle measuring mechanism comprising a grating seat (7), a circular grating (8) and a reading head (20), the circular grating (8) being mounted on the angle measuring shaft (4) via the grating seat (7), and the reading head (20) being used for reading the rotation angle of the circular grating (8), that is, the pitch rotation angle of the reflector (9).

10. A large-aperture optical-mechanical integrated scanning reflector assembly as claimed in claim 5 or 6, characterized in that: The reflecting surface of the reflector (9) is higher than the rotation axis of the pitch axis system mechanism, and the center of mass of the reflector (9) and the pitch axis system mechanism is on the rotation axis; the pitch seat (1), the angle measuring axis (4) and the pitch motor shaft (14) are all made of silicon aluminum alloy.

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