MZI and MRR combined on-chip hybrid filter and control method thereof

Abstract

The invention relates to a filter, in particular to an MZI and MRR combined on-chip hybrid filter and a control method thereof, and aims to overcome the defect that in the prior art, the function of a single tunable filter is relatively limited. The MZI and MRR combined on-chip hybrid filter comprises an MZI structure and MRR filtering modules located on an MZI upper arm and an MZI lower arm respectively; the MRR filtering module comprises a third beam splitter, a fourth beam splitter, a fifth beam splitter and a sixth beam splitter. Phase shifters are arranged between the third beam splitter and the fourth beam splitter, between the fourth beam splitter and the fifth beam splitter, between the third beam splitter and the fifth beam splitter, and between the fourth beam splitter and the sixth beam splitter. Meanwhile, the invention provides a control method of the MZI and MRR combined on-chip hybrid filter, so that the MZI and MRR combined on-chip hybrid filter simultaneously outputs a group of optical signals with complementary frequency spectrums and a group of optical signals with the same frequency spectrums.

Description

Technical Field

[0001] The present invention relates to a filter, and in particular to an on-chip hybrid filter combining MZI and MRR and a control method thereof. Background Art

[0002] The rapid growth of data traffic has promoted the development of fiber-optic communications. With the assistance of high-performance silicon photonic chips with large bandwidth and low power consumption, the use of optical wavelength division multiplexing technology in optical interconnection networks provides a solution for fiber-optic communications. With the popularization of optical wavelength division multiplexing technology, multi-channel filters have become a key component for achieving efficient data transmission and increasing network capacity. The main function of multi-channel filters is to select or separate different optical wavelength channels in fiber-optic communication systems, allowing multiple signals to be transmitted in parallel in the same optical fiber.

[0003] As a multi-channel filter, microring resonator has unique advantages such as tiny structure, strong plasticity and easy adjustment. It has attracted widespread attention in the field of optical wavelength division multiplexing. The tuning technology of multi-channel filters based on microring resonators is an important research direction in the fields of optical communication and optical information processing. The design of tunable filters is also a major technical challenge in the field of multi-channel filters. The existing single tunable filters have relatively limited functions, mainly focusing on the tunability of extinction ratio, central wavelength and free spectral range. Researchers are actively exploring the combination of microring resonators with other structures, aiming to develop tunable filters with new structures to achieve more diverse functions. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcoming of the relatively limited functions of a single tunable filter in the prior art, and to provide an on-chip hybrid filter combining MZI and MRR and a control method thereof, combining a microring resonator (MRR) with a Mach-Zehnder interferometer (MZI) to realize a tunable filter with a new structure and diversified functions.

[0005] To achieve the above objectives, the technical solutions provided by the present invention are as follows:

[0006] An on-chip hybrid filter combining MZI and MRR, comprising an MZI structure; the MZI structure comprises a first beam splitter, a second beam splitter, an MZI upper arm and an MZI lower arm; the two input ends of the first beam splitter are respectively used to connect to external devices, and the two output ends thereof are respectively connected to one end of the MZI upper arm and one end of the MZI lower arm; the two input ends of the second beam splitter are respectively connected to the other end of the MZI upper arm and the MZI lower arm, and the two output ends thereof are respectively used to connect to external devices; the special feature of the filter is that it also comprises an MRR filtering module respectively located at the MZI upper arm and the MZI lower arm; the MRR filtering module comprises a third beam splitter, a fourth beam splitter, a fifth beam splitter and a sixth beam splitter; one input end of the third beam splitter is connected to one of the output ends of the first beam splitter; , another input end is connected to an input end of the fourth beam splitter and a phase shifter is arranged between the two; another input end of the fourth beam splitter is connected to an output end of the fifth beam splitter and a phase shifter is arranged between the two; one output end of the third beam splitter is connected to an input end of the fifth beam splitter and a phase shifter is arranged between the two, and the other output end is connected to another input end of the fifth beam splitter; one output end of the fourth beam splitter is connected to an input end of the sixth beam splitter, and the other output end is connected to another input end of the sixth beam splitter and a phase shifter is arranged between the two; the other output end of the fifth beam splitter is connected to an output end of the sixth beam splitter; the other output end of the sixth beam splitter is connected to one of the input ends of the second beam splitter; all the above ports are connected by waveguides.

[0007] Further, the MZI lower arm is provided with a front phase shifter between the output end of the first beam splitter and one input end of the third beam splitter;

[0008] The MZI lower arm is located between the other input end of the fourth beam splitter and the output end of the fifth beam splitter and is provided with a rear phase shifter.

[0009] Furthermore, the phase shifter, the front phase shifter, and the rear phase shifter are all micro heaters.

[0010] Furthermore, both the first beam splitter and the second beam splitter are multi-mode interferometers.

[0011] Further, the materials of the waveguide, the first beam splitter, the second beam splitter, the third beam splitter, the fourth beam splitter, the fifth beam splitter, and the sixth beam splitter are all silicon, silicon oxide, silicon nitride, III-V material, or lithium niobate material;

[0012] The MZI structure and the MRR filter module are manufactured using CMOS technology.

[0013] At the same time, the present invention also provides a control method for the on-chip hybrid filter combined with the MZI and MRR, which is special in that it includes the following steps:

[0014] Step 1, inputting the initial optical signal into the first beam splitter, the first beam splitter splits the initial optical signal into two beams, forming an upper optical path and a lower optical path, which are respectively transmitted to the MZI upper arm and the MZI lower arm;

[0015] Step 2: After the optical signal of the upper optical path is filtered by the MRR filter module of the upper arm of the MZI, a part of it is transmitted forward to the second beam splitter, and the rest is transmitted backward to the first beam splitter;

[0016] After the optical signal of the lower optical path is filtered by the MRR filter module of the lower arm of the MZI, a part of it is transmitted forward to the second beam splitter, and the rest is transmitted backward to the first beam splitter;

[0017] The second beam splitter combines and splits the optical signals transmitted in the forward direction of the upper optical path and the lower optical path to obtain two optical signals output in the forward direction; the first beam splitter combines and splits the optical signals transmitted in the reverse direction of the upper optical path and the lower optical path to obtain two optical signals output in the reverse direction;

[0018] Step 3: adjust the power applied to the phase shifter and / or the front phase shifter and / or the rear phase shifter to achieve phase modulation of the optical signal of the upper optical path and / or the lower optical path.

[0019] Furthermore, step 3 is specifically as follows:

[0020] The powers applied to the phase shifters of the two MRR filter modules are correspondingly the same, and the power applied to the front phase shifter and / or the rear phase shifter is adjusted to perform phase modulation on the optical signal of the lower optical path.

[0021] Beneficial effects of the present invention:

[0022] 1. The on-chip hybrid filter of the MZI and MRR combined in the present invention is a tunable multi-channel filter, which integrates the structure of Mach-Zehnder interferometer and microring resonator, and sets multiple phase shifters in the MRR filter module. By adjusting the power applied to the phase shifter of the MRR filter module, the optical signal is precisely phase modulated, thereby achieving tunability of the extinction ratio, central wavelength and free spectral range; through this structure, the output of four ports can be achieved, and a group of optical signals with complementary spectra and a group of optical signals with the same spectrum can be generated simultaneously. The adjustment process is convenient and flexible, effectively improving the output optical signal quality and anti-interference ability, and improving the system capacity.

[0023] 2. The control method of the on-chip hybrid filter of the MZI and MRR combined in the present invention performs phase modulation on the output optical signal by adjusting the phase shifter and / or the front phase shifter and / or the rear phase shifter of the MRR filter module, and can realize the switch state control of the output port, and the control method is flexible and has a wide range of applications.

[0024] 3. The present invention adopts complementary metal oxide semiconductor (CMOS) technology to manufacture a highly integrated on-chip multi-channel filter, achieving miniaturization and high-performance integration of the device.

[0025] 4. In the control method of the on-chip hybrid filter of the combined MZI and MRR of the present invention, on the basis of the power applied to the phase shifters of the two MRR filter modules being the same, by adjusting the power applied to the front phase shifter and / or the rear phase shifter, the output optical signal can be further precisely phase modulated, so that the four output ports can simultaneously output a group of optical signals with complementary spectra and a group of optical signals with the same spectra, and the adjustment process is convenient and flexible. Among them, optical signals with complementary spectra can be used to improve the quality and anti-interference ability of the signal. In optical imaging, complementary spectra can help achieve higher imaging quality. In optical communication systems, complementary spectra can be used for the simultaneous transmission of multi-wavelength signals to increase the bandwidth and data transmission capacity of the system. Optical signals with the same spectrum can enhance signal processing capabilities. In optical communication systems, the same spectrum can be used to implement more complex signal processing functions, wavelength division multiplexing can be implemented, signal redundancy can be provided, and the capacity and flexibility of the system can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the structure of a dual straight waveguide microring resonator;

[0027] Figure 2 is a schematic diagram of the structure of a self-coupled microring resonator;

[0028] Figure 3 It is a structural schematic diagram of an MRR filter module in an on-chip hybrid filter embodiment of the present invention in which MZI and MRR are combined;

[0029] Figure 4 It is a structural schematic diagram of an embodiment of an on-chip hybrid filter combined with MZI and MRR of the present invention;

[0030] Figure 5 : is the output image of each port in the embodiment of the on-chip hybrid filter of the MZI and MRR combination of the present invention; wherein a is the output image of the In1 port and the Out1 port, and b is the output image of the In2 port and the Out2 port;

[0031] Figure 6 It is the output image of the In2 port and the Out2 port after adjusting the central wavelength in the embodiment of the on-chip hybrid filter of the MZI and MRR combination of the present invention;

[0032] Figure 7 It is the output image of the In2 port and the Out2 port after the extinction ratio is tuned in the on-chip hybrid filter embodiment of the MZI and MRR combination of the present invention;

[0033] Figure 8 It is the output image of the In2 port and the Out2 port after adjusting the front side phase shifter and the rear side phase shifter in the on-chip hybrid filter embodiment of the MZI and MRR combination of the present invention;

[0034] Fig. 9 It is the output image of the In2 port and the Out2 port after free spectral range tuning in the on-chip hybrid filter embodiment of the MZI and MRR combination of the present invention.

[0035] Description of reference numerals:

[0036] 01-lower coupling zone, 02-upper coupling zone;

[0037] 1-fifth beam splitter, 2-sixth beam splitter, 3-phase shifter, 4-front phase shifter, 5-rear phase shifter, 6-third beam splitter, 7-fourth beam splitter, 8-first beam splitter, 9-second beam splitter. DETAILED DESCRIPTION

[0038] The existing dual straight waveguide microring resonator is composed of a microring coupled with two straight waveguides through the evanescent field. Figure 1 As shown. The optical signal is input into the lower straight waveguide from the In01 port, coupled with the micro-ring to form the lower coupling area 01, part of the optical signal continues to be transmitted in the lower straight waveguide and output through the Out01 port; the rest of the optical signal is coupled into the micro-ring, and the optical signal in the micro-ring is transmitted in the counterclockwise direction, and coupled after approaching the upper straight waveguide to form the upper coupling area 02, part of the optical signal is coupled into the upper straight waveguide and output through the Out02 port, and the rest of the optical signal continues to be transmitted counterclockwise along the micro-ring, and coupled again through the lower coupling area 01, part of the optical signal is coupled into the lower straight waveguide and output through the Out01 port, and the rest of the optical signal continues to be transmitted counterclockwise along the micro-ring.

[0039] The dual straight waveguide microring resonator has a symmetrical structure, so the transmission process of the optical signal after it is input into the upper straight waveguide from the In02 port is the same as the transmission process of the optical signal after it is input into the lower straight waveguide from the In01 port.

[0040] Changing the structure of the dual straight waveguide microring resonator causes interference of optical signals, that is, introducing the optical signal output from the Out01 port into the Out02 port, that is, the output optical signal from the Out01 port is used as the input optical signal from the Out2 port, so that the two optical signals interfere in the microring, thereby obtaining a self-coupled microring resonator, such as Figure 2As shown, the self-coupled microring resonator is structurally adjusted based on the dual straight waveguide microring resonator. The optical signal is input from the In port and interference occurs in the microring, so that part of the optical signal is output from the Out port and the rest of the optical signal is output from the In port in the reverse direction. Therefore, the In port is also called the Re port.

[0041] The self-coupled micro-ring resonator forms complementary output spectra at the In port and the Out port. In order to realize the tunable function, the present invention improves the self-coupled micro-ring resonator by adding multiple phase shifters 3 to the self-coupled micro-ring resonator. By adjusting the power of the phase shifter 3, the phase modulation of the optical signal is realized, thereby changing the output spectrum to form an MRR filter module. The structure is as follows: Figure 3 shown.

[0042] The on-chip hybrid filter of MZI and MRR combined in the present invention adds an MRR filter module on the basis of Mach-Zehnder interferometer (MZI), including an MZI structure and two MRR filter modules, such as Figure 4 shown.

[0043] The MZI structure includes a first beam splitter 8, a second beam splitter 9, an MZI upper arm and an MZI lower arm; the two input ends of the first beam splitter 8 are respectively used to connect to external devices, which are respectively recorded as In1 port and In2 port, and its two output ends are respectively connected to one end of the MZI upper arm and the MZI lower arm. The two input ends of the second beam splitter 9 are respectively connected to the other end of the MZI upper arm and the MZI lower arm, and its two output ends are respectively used to connect to external devices, which are respectively recorded as Out1 port and Out2 port.

[0044] The two MRR filter modules are respectively located at the MZI upper arm and the MZI lower arm. The MRR filter modules include a third beam splitter 6 , a fourth beam splitter 7 , a fifth beam splitter 1 , and a sixth beam splitter 2 . One input end of the third beam splitter 6 is connected to one of the output ends of the first beam splitter 8, and the other input end is connected to one of the input ends of the fourth beam splitter 7, and a phase shifter 3 is arranged between the two; the other input end of the fourth beam splitter 7 is connected to one of the output ends of the fifth beam splitter 1, and a phase shifter 3 is arranged between the two; one output end of the third beam splitter 6 is connected to one of the input ends of the fifth beam splitter 1, and a phase shifter 3 is arranged between the two, and the other output end is connected to the other input end of the fifth beam splitter 1; one output end of the fourth beam splitter 7 is connected to one of the input ends of the sixth beam splitter 2, and the other output end is connected to the other input end of the sixth beam splitter 2, and a phase shifter 3 is arranged between the two; the other output end of the fifth beam splitter 1 is connected to one of the output ends of the sixth beam splitter 2; the other output end of the sixth beam splitter 2 is connected to one of the input ends of the second beam splitter 9, and the output end is the Out port of the MRR module; all of the above ports are waveguide connected.

[0045] It also includes a front phase shifter 4 and a rear phase shifter 5. The front phase shifter 4 is arranged between the output end of the first beam splitter 8 and one input end of the third beam splitter 6 on the lower arm of the MZI; the rear phase shifter 5 is arranged between the other input end of the fourth beam splitter 7 and the output end of the fifth beam splitter 1 on the lower arm of the MZI. To facilitate phase modulation, the parameters of the two MRR filter modules in this embodiment are the same, and the phase shifters 3 are all set to the same power. Only by adjusting the power of the front phase shifter 4 and / or the rear phase shifter 5, the phase modulation of the optical signal is realized, thereby changing the output spectrum and realizing the tunable function.

[0046] The phase shifter 3, the front phase shifter 4 and the rear phase shifter 5 in the present invention are all micro-heaters. The phase modulation of the optical signal is achieved by adjusting the power applied to the micro-heater. The micro-heater has the advantages of simple manufacturing process, low power consumption and high phase shifting efficiency.

[0047] The first beam splitter 8 and the second beam splitter 9 are both multimode interferometers. The multimode interferometer has a simple manufacturing process, a small size suitable for optical integration, a low insertion loss, and a large bandwidth. The materials of the waveguide and each beam splitter are silicon, silicon oxide, silicon nitride, III-V materials, or lithium niobate materials. The ratio of the two optical signals output by all beam splitters is 1:1.

[0048] In order to improve the integration level of the above-mentioned on-chip hybrid filter, the present invention adopts CMOS technology to realize an on-chip multi-channel filter.

[0049] The optical signal transmission process of the MRR filter module of the present invention is specifically as follows:

[0050] The initial optical signal is input to the third beam splitter 6 and is divided into two parts. One part of the optical signal is transmitted to the fifth beam splitter 1 through the phase shifter 3, and the other part of the optical signal is directly transmitted to the fifth beam splitter 1. The fifth beam splitter 1 combines the two parts of the optical signal and divides them into two parts, which are respectively recorded as the first optical signal and the second optical signal.

[0051] The first optical signal is transmitted to the fourth beam splitter 7 via the phase shifter 3, and is divided into two parts after passing through the fourth beam splitter 7, wherein one part of the optical signal is transmitted to the sixth beam splitter 2 via the phase shifter 3, and the other part of the optical signal is directly transmitted to the sixth beam splitter 2, and the sixth beam splitter 2 combines the two parts of the optical signal and divides them into two parts, which are recorded as the third optical signal and the fourth optical signal, and the third optical signal is transmitted to the second beam splitter 9, and the fourth optical signal is transmitted to the fifth beam splitter 1. The optical signal transmitted to the fifth beam splitter 1 is divided into two parts, wherein one part of the optical signal is transmitted to the third beam splitter 6 via the phase shifter 3, and the other part of the optical signal is directly transmitted to the third beam splitter 6, and the third beam splitter 6 combines the two parts of the optical signal and divides them into two parts, wherein one part of the optical signal is transmitted to the first beam splitter 8, and the other part of the optical signal is transmitted to the fourth beam splitter 7 via the phase shifter 3, and then the transmission path is the same as that of the first optical signal.

[0052] The second optical signal is directly transmitted to the sixth beam splitter 2 and divided into two parts. One part of the optical signal is transmitted to the fourth beam splitter 7 through the phase shifter 3, and the other part of the optical signal is directly transmitted to the fourth beam splitter 7. The fourth beam splitter 7 combines the two parts of the optical signal and divides them into two parts. One part of the optical signal is transmitted to the third beam splitter 6 through the phase shifter 3, and then has the same transmission path as the initial optical signal after being input into the third beam splitter 6. The other part of the optical signal is transmitted to the fifth beam splitter 1 through the phase shifter 3, and then has the same transmission path as the above-mentioned fourth optical signal.

[0053] According to the above analysis of the optical signal transmission process, it can be obtained that after the initial optical signal is input from the In1 or In2 port, a part of the optical signals in the MZI upper arm and the MZI lower arm are respectively output to the second beam splitter 9 through the MRR module, and are combined and then split by the second beam splitter 9 to form two optical signals, which are output in the forward direction from the Out1 port and the Out2 port, and the other part of the light is combined and then split by the first beam splitter 8 to form another two optical signals, which are output in the reverse direction from the In1 port and the In2 port, so the In1 port and the In2 port are also recorded as the Re1 port and the Re2 port respectively.

[0054] The control method of the above-mentioned on-chip hybrid filter combined with MZI and MRR is specifically as follows:

[0055] The first beam splitter 8 receives the initial optical signal input from the outside and divides it into two beams, forming an upper optical path and a lower optical path. After the optical signal of the upper optical path is filtered by the MRR filter module of the upper arm of the MZI, a part of it is transmitted forward to the second beam splitter 9, and the rest is transmitted backward to the first beam splitter 8. After the optical signal of the lower optical path is filtered by the MRR filter module of the lower arm of the MZI, a part of it is transmitted forward to the second beam splitter 9, and the rest is transmitted backward to the first beam splitter 8. The second beam splitter 9 combines and splits the optical signals transmitted forward by the upper optical path and the lower optical path to obtain two optical signals output in the forward direction. The first beam splitter 8 combines and splits the optical signals transmitted backward by the upper optical path and the lower optical path to obtain two optical signals output in the reverse direction. The four optical signals are all used as the output of the filter. Phase modulation of the optical signals output from the upper arm of the MZI and the lower arm of the MZI can be achieved by adjusting the power of each phase shifter 3 in the two MRR filter modules. Phase modulation of the optical signals output from the lower optical path can also be achieved by adjusting the power of the front phase shifter 4 and the rear phase shifter 5. In this embodiment, the power applied to the phase shifters 3 of the two MRR filter modules is the same. The power applied to the front phase shifter 4 and / or the rear phase shifter 5 is adjusted to phase modulate the optical signal of the lower optical path, and finally a group of optical signals with complementary spectra and a group of optical signals with the same spectrum are output, such as Figures 5 to 9 shown.

[0056] The optical signal is input to the In1 port, and the power applied to the front phase shifter 4 and the rear phase shifter 5 is 0. By adjusting the power applied to the phase shifter 3 in the two MRR filter modules, the optical signals output from the In1, In2, Out1 and Out2 ports are obtained as follows: Figure 5 As shown in the figure, it can be seen that the signals output by the Out1 and Out2 ports are a group of signals with the same spectrum, the signals output by the In1 and In2 ports are a group of signals with the same spectrum, and the signals output by the Out2 and In2 ports are a group of signals with complementary spectrums, and the signals output by the Out1 and In1 ports are a group of signals with complementary spectrums.

[0057] exist Figure 5 Based on b, the power applied to the phase shifter between the third beam splitter 6 and the fourth beam splitter 7 in the two MRR filter modules is reduced, and the optical signals output from the In2 and Out2 ports are obtained as follows: Figure 6 As shown, compared Figure 5 As can be seen from b, the left shift of the output signal is achieved, so the present invention can achieve tunable center wavelength.

[0058] exist Figure 5 Based on b, the power applied to the phase shifter between the sixth beam splitter 2 and the fourth beam splitter 7 in the two MRR filter modules is increased, and the optical signals output from the In2 and Out2 ports are obtained as follows Figure 7 As shown, compared Figure 5As can be seen from b, the waveform of the output signal is changed, so the present invention can achieve tunable extinction ratio.

[0059] exist Figure 5 Based on b, the power applied to the phase shifter between the fifth beam splitter 1 and the third beam splitter 6 in the two MRR filter modules is increased, and the power applied to the phase shifter between the sixth beam splitter 2 and the fourth beam splitter 7 in the two MRR filter modules is increased, and the optical signals output from the In2 and Out2 ports are obtained as follows: Fig. 9 As shown, compared Figure 5 As can be seen from b, the waveform of the output signal is changed, so the present invention can achieve tunable free spectral range.

[0060] exist Figure 5 Based on b, the power applied to the front phase shifter 4 and the rear phase shifter 5 is adjusted to obtain the optical signals output from the In2 and Out2 ports as shown in FIG. Figure 8 As shown, the transmittance of In2 and Out2 ports is close to 0. Figure 5 b, it can be considered Figure 5 In b, the In2 and Out2 ports are open, while at this time, the In2 and Out2 ports are closed. Therefore, by adjusting the power applied to the front-side phase shifter 4 and the rear-side phase shifter 5, accurate control of the switching state of the output port can be achieved.

Claims

1. An on-chip hybrid filter combining MZI and MRR, comprising an MZI structure; the MZI structure comprises a first beam splitter (8), a second beam splitter (9), an MZI upper arm and an MZI lower arm; The two input ends of the first beam splitter (8) are respectively used to connect to external devices, and the two output ends thereof are respectively connected to one end of the MZI upper arm and one end of the MZI lower arm; The two input ends of the second beam splitter (9) are respectively connected to the other end of the MZI upper arm and the other end of the MZI lower arm, and the two output ends thereof are respectively used to connect to external devices; Features: Also included are MRR filter modules located at the MZI upper arm and the MZI lower arm respectively; The MRR filter module comprises a third beam splitter (6), a fourth beam splitter (7), a fifth beam splitter (1), and a sixth beam splitter (2); One input end of the third beam splitter (6) is connected to one of the output ends of the first beam splitter (8), and the other input end is connected to one input end of the fourth beam splitter (7), and a phase shifter (3) is provided between the two; the other input end of the fourth beam splitter (7) is connected to one of the output ends of the fifth beam splitter (1), and a phase shifter (3) is provided between the two; One output end of the third beam splitter (6) is connected to one input end of the fifth beam splitter (1) with a phase shifter (3) disposed therebetween, and the other output end is connected to the other input end of the fifth beam splitter (1); one output end of the fourth beam splitter (7) is connected to one input end of the sixth beam splitter (2), and the other output end is connected to the other input end of the sixth beam splitter (2) with a phase shifter (3) disposed therebetween; The other output end of the fifth beam splitter (1) is connected to an output end of the sixth beam splitter (2); The other output end of the sixth beam splitter (2) is connected to one of the input ends of the second beam splitter (9); The above ports are all connected by waveguides.

2. The on-chip hybrid filter combining MZI and MRR according to claim 1, characterized in that: The MZI lower arm is located between the output end of the first beam splitter (8) and an input end of the third beam splitter (6) and is provided with a front phase shifter (4); The MZI lower arm is provided with a rear phase shifter (5) between the other input end of the fourth beam splitter (7) and the output end of the fifth beam splitter (1).

3. The on-chip hybrid filter combining MZI and MRR according to claim 1 or 2, characterized in that: The phase shifter (3), the front phase shifter (4), and the rear phase shifter (5) are all micro-heaters.

4. The on-chip hybrid filter combining MZI and MRR according to claim 3, characterized in that: The first beam splitter (8) and the second beam splitter (9) are both multi-mode interferometers.

5. The on-chip hybrid filter combining MZI and MRR according to claim 4, characterized in that: The materials of the waveguide, the first beam splitter (8), the second beam splitter (9), the third beam splitter (6), the fourth beam splitter (7), the fifth beam splitter (1), and the sixth beam splitter (2) are all silicon, silicon oxide, silicon nitride, III-V material, or lithium niobate material; The MZI structure and the MRR filter module are manufactured using CMOS technology.

6. A control method for an on-chip hybrid filter combining MZI and MRR as described in claims 1-5, characterized in that: The following steps are involved: Step 1, inputting an initial optical signal into a first beam splitter (8), the first beam splitter (8) splits the initial optical signal into two beams, forming an upper optical path and a lower optical path, which are respectively transmitted to an MZI upper arm and an MZI lower arm; Step 2, after the optical signal of the upper optical path is filtered by the MRR filter module of the upper arm of the MZI, a part of it is transmitted forward to the second beam splitter (9), and the rest is transmitted backward to the first beam splitter (8); After the optical signal of the lower optical path is filtered by the MRR filter module of the lower arm of the MZI, a portion of it is transmitted forward to the second beam splitter (9), and the rest is transmitted backward to the first beam splitter (8); The second beam splitter (9) combines and splits the optical signals transmitted in the upper optical path and the lower optical path in the forward direction to obtain two optical signals output in the forward direction; the first beam splitter (8) combines and splits the optical signals transmitted in the upper optical path and the lower optical path in the reverse direction to obtain two optical signals output in the reverse direction; Step 3, adjusting the power applied to the phase shifter (3) and / or the front phase shifter (4) and / or the rear phase shifter (5) to achieve phase modulation of the optical signal of the upper optical path and / or the lower optical path.

7. The control method of the on-chip hybrid filter combined with MZI and MRR according to claim 6, characterized in that: Step 3 is as follows: The powers applied to the phase shifters (3) of the two MRR filter modules are correspondingly the same, and the power applied to the front phase shifter (4) and / or the rear phase shifter (5) is adjusted to perform phase modulation on the optical signal of the lower optical path.

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