Flash discharge lamp and flash irradiation device

Abstract

The invention provides a flash discharge lamp capable of suppressing blackening of a trigger tube and a flash irradiation device. The flash discharge lamp includes: a light emitting tube extending in a first direction and exhibiting light transmissivity; a pair of electrodes arranged on the inner side of the light-emitting tube and facing each other in the first direction; and a trigger tube disposed along the outside of the light emitting tube so as to extend across the pair of electrodes, the trigger tube including: a conductive member extending in a first direction; and an insertion tube that extends in the first direction, accommodates at least a portion of the conductive member on the inside thereof, and is transmissive to light, the insertion tube being provided with a plurality of constricted portions along the first direction in a region facing between the pair of electrodes, the constricted portions having a portion of the inner peripheral surface thereof protruding toward the conductive member.

Description

Technical Field

[0001] The present invention relates to a flash discharge lamp and a flash irradiation device. Background Art

[0002] In the flash annealing process of a semiconductor substrate, a lamp (also called a "flash discharge lamp" or "flash lamp") is often flashed with relatively high energy for a short time of 10 msec or less to heat the workpiece.

[0003] To flash the lamp, firstly, a capacitor connected to the lamp is charged with a voltage of a predetermined value, thereby accumulating the charge for the current used for flashing. Secondly, a high-frequency voltage called a trigger voltage is applied to the outer surface of the lamp, causing insulation breakdown between electrodes inside the lamp to flash.

[0004] In many cases, a trigger voltage acts on a conductor that is fixed to the outer surface of the lamp by winding or the like, thereby generating a barrier discharge on the inner surface of the lamp. In general discharge lamps including flash discharge lamps, a conductor is fixed to the lamp in a contact state by winding a metal wire around the outer circumference of the light-emitting tube or the like (for example, Patent Document 1).

[0005] On the other hand, in a lamp that flashes at high energy as described above, when wires are arranged on the outer surface of the lamp, there is a possibility that the flash performance will deteriorate during the use of the lamp due to phenomena such as the wires being cut by the impact when the lamp flashes, the wires being shifted in position, or the wires becoming hot and melting.

[0006] In addition, the wire component is heated and evaporated during flashing, thereby contaminating the lamp housing and workpieces, or adhering to the outside of the arc tube to deteriorate the quartz glass and cause the lamp to break (see Patent Document 2).

[0007] As a countermeasure to the above-mentioned problem, a technique has been proposed in which a member (also called a "trigger tube") is sealed in a sealed container made of a dielectric such as glass, which is equivalent to a conductor of the above-mentioned wire (for example, Patent Documents 2 to 4). The trigger tube is fixed in such a way that the outer surface of its container contacts the outer surface of the lamp. When a high-frequency voltage is applied to the trigger tube in this state, the lamp can be flashed in the same manner as when a wire is used without causing the above-mentioned disadvantages. When this technique is used, the above-mentioned positional deviation, contamination, and recrystallization can also be prevented when the lamp flashes.

[0008] Patent Documents 2 to 4 describe a structure in which an electrode rod made of a high melting point metal is sealed in a trigger tube container, and also describe that a vacuum or an inert gas is preferably sealed in the trigger tube container.

[0009] Prior art literature

[0010] Patent Literature

[0011] Patent Document 1: Japanese Patent Application Publication No. 2010-10139

[0012] Patent Document 2: Japanese Patent Application Publication No. 2003-203606

[0013] Patent Document 3: Japanese Patent Application Publication No. 2009-170208

[0014] Patent Document 4: Japanese Patent Application Publication No. 2014-2952

[0015] In recent years, in the field of semiconductor integrated circuits, high density and high precision have been progressing rapidly. Due to the limitation of substrate area, circuits are stacked on substrates in a three-dimensional structure, and there is a tendency for the thickness of each stacked layer to become smaller. Due to the requirement of manufacturing such products, it is also required to further reduce the heat input depth during heating in the flash annealing process. Specifically, measures are taken to reduce the heat input depth by shortening the flash time of the lamp.

[0016] Generally speaking, when the flash time is shortened under the condition that the lamp input energy per flash is constant, the energy consumption per flash time increases, and the load on the quartz tube and electrodes constituting the lamp increases. Therefore, the possibility of the lamp breaking early or not lighting increases, and it is necessary to pay special attention to the size of the lamp, the shape of each part, the cooling conditions, etc., and make them appropriate.

[0017] Similarly, when the flash time is shortened, the load on the trigger tube also increases. When the lamp lighting test is repeatedly performed under the condition of short flash time, the blackening of the inner surface of the trigger tube container, which was previously sporadically observed at the end of the life, occurs earlier. The blackened portion absorbs the light emitted from the lamp, resulting in a problem that the light intensity and distribution uniformity of the light irradiating the workpiece surface are reduced compared to the case where there is no blackening. Summary of the invention

[0018] Problems to be solved by the invention

[0019] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a flash discharge lamp and a flash irradiation device capable of suppressing blackening of a trigger tube.

[0020] Means for solving problems

[0021] The flash discharge lamp of the present invention comprises:

[0022] The light-emitting tube extends in a first direction and is transmissive to light;

[0023] a pair of electrodes arranged opposite to each other in the first direction inside the light emitting tube; and

[0024] The trigger tube is arranged along the outer side of the light emitting tube so as to extend between the pair of electrodes.

[0025] The trigger tube has:

[0026] a conductive member extending along the first direction; and

[0027] The insertion tube extends along the first direction, receives at least a portion of the conductive member inside, and is transparent to light.

[0028] The insertion tube includes a plurality of constricted portions along the first direction in a region facing between the pair of electrodes, in which a portion of an inner peripheral surface protrudes toward the conductive member.

[0029] In addition, in the above-mentioned flash discharge lamp, it can also be constructed that the conductive component has a base end supported on one end of the insertion tube and a top end non-contacting with the other end of the insertion tube, and the contraction portion closest to the top end among the multiple contraction portions is closer to the top end than the center between the pair of electrodes.

[0030] In addition, in the above-mentioned flash discharge lamp, it can also be configured that when the distance between the pair of electrodes is set to D, the number of the contraction parts is set to N (N is a natural number greater than 2), and the maximum interval among the intervals of the multiple contraction parts is set to Amax, the relationship Amax≤D / N is satisfied.

[0031] In the above-described flash discharge lamp, the insertion tube may include three or more of the constricted portions.

[0032] In the above flash discharge lamp, the conductive member may be made of tungsten or molybdenum.

[0033] In the above flash discharge lamp, the conductive member may be coated with a metal belonging to the platinum group.

[0034] A flash irradiation device according to the present invention includes the above-mentioned flash discharge lamp.

[0035] The flash irradiation device of the present invention may include either a configuration including only one flash discharge lamp or a configuration including a plurality of flash discharge lamps.

[0036] The present inventors presume that the reason why blackening occurs in the trigger tube is as follows.

[0037] (1) Since the flash time is shortened, the operating temperature of the conductive member increases compared to the conventional case.

[0038] (2) The conductive member that is heated when the lamp is operated comes into contact with a portion of the inner surface of the glass insertion tube.

[0039] (3) The glass in the portion in contact with the conductive member is overheated, and a portion of it melts and adheres to the conductive member.

[0040] (4) Oxygen is released from the glass attached to the inner surface of the insertion tube and the conductive member due to (3), and reacts with the conductive member to form an oxide.

[0041] (5) (3) and (4) occur prematurely due to (1), and the conductive member turns black. The blackened portion absorbs a large amount of light irradiated from the lamp, and the operating temperature rises.

[0042] (6) The process from (3) to (5) is repeated with each flash, and the blackened area grows. Part of the blackened material also adheres to the inner surface of the insertion tube.

[0043] In order to deal with the blackening of the trigger tube, a contraction portion in which a part of the inner circumferential surface protrudes toward the conductive member is provided on the insertion tube, so that the contraction portion restricts the vibration of the conductive member when the lamp is operated, and the area where the conductive member contacts the inner surface of the insertion tube is limited to the contraction portion, so that the blackening can be concentrated only on the contraction portion. In addition, by providing a plurality of contraction portions, the load of each contraction portion can be reduced, so the amount of blackening of each contraction portion can be suppressed. As a result, the amount of blackening of the trigger tube can be suppressed even after long-term use.

[0044] In addition, by arranging the constricted portion closest to the top end of the conductive member among the multiple constricted portions closer to the top end of the conductive member than the center between a pair of electrodes, the movement of the top end of the conductive member, which is prone to large vibration, can be effectively restricted.

[0045] In addition, when the distance between a pair of electrodes is set to D, the number of contraction parts is set to N (N is a natural number greater than 2), and the maximum interval among the multiple contraction parts is set to Amax, the vibration of the conductive component between the contraction parts can be appropriately limited by satisfying the relationship Amax≤D / N.

[0046] In addition, the conductive member is made of tungsten or molybdenum, so it is difficult to melt even at high temperatures. In addition, since the conductive member is coated with a metal belonging to the platinum group, the conductive member is protected from contact with oxygen released from the insertion tube, and oxidation of the conductive member is suppressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 This is a schematic cross-sectional view of one embodiment of the flash irradiation device when viewed along the Y direction.

[0048] Figure 2 It is only shown in the picture Figure 1 Diagram of a flash discharge lamp.

[0049] Figure 3 Yes Figure 2 A magnified view of region III.

[0050] Figure 4 This is a diagram showing the configuration of a lighting circuit used in a verification experiment. DETAILED DESCRIPTION

[0051] Embodiments of the flash discharge lamp and the flash irradiation device of the present invention will be described with reference to the drawings. The following drawings are schematic drawings, and the dimensional ratios in the drawings are not necessarily consistent with the actual dimensional ratios, and the dimensional ratios between the drawings are not necessarily consistent.

[0052] Figure 1 is a schematic cross-sectional view of one embodiment of the flash irradiation device 1 when viewed along the Y direction, Figure 2 It is only shown in the picture Figure 1 FIG. 10 is a diagram of a flash discharge lamp. Figure 3 Yes Figure 2 The enlarged view of area III. Figure 1 As shown in FIG. 1 , the flash irradiation device 1 of the present embodiment includes a flash discharge lamp 10, a reflective member 20, and a support table 30 for placing a workpiece W1. Figure 1 Although only one flash discharge lamp 10 is shown in the figure, flash irradiation device 1 may be equipped with a plurality of flash discharge lamps 10 .

[0053] In the following description, Figure 1 As shown, the description will be made with the direction along the tube axis of arc tube 11 as X direction, the direction in which flash discharge lamp 10 and workpiece W1 face each other as Z direction, and the direction orthogonal to the X direction and the Z direction as Y direction. The X direction corresponds to the first direction.

[0054] In addition, in this specification, when expressing a direction, when distinguishing between positive and negative directions, positive and negative signs are added to describe it, such as "+Z direction" and "-Z direction". In addition, when expressing a direction without distinguishing between positive and negative directions, it is simply described as "Z direction".

[0055] The reflective member 20 includes a reflective surface 21 for reflecting the light L1 emitted from the flash discharge lamp 10. Figure 1 As shown, the light L1 emitted from the flash discharge lamp 10 and traveling toward the +Z side is reflected toward the -Z side. Figure 1 The size and shape of the reflective member 20 shown are merely examples. The reflective member 20 is, for example, an aluminum (Al) plate.

[0056] The support table 30 is a base including a plurality of pins 30 a on which the workpiece W1 is placed. Figure 1The structure of the support table 30 supporting the workpiece W1 shown is only an example, and any structure that can keep the workpiece W1 stationary or fixed at a predetermined position may be used, for example, a structure that supports the outer edge of the workpiece W1 in a hooked manner. In addition, the separation distance between the flash discharge lamp 10 and the workpiece W1 in the Z direction is appropriately adjusted according to the type of the workpiece W1, the processing steps, etc., but is set to 30 mm in this embodiment.

[0057] Flash discharge lamp 10 includes arc tube 11 , a pair of electrodes ( 12 p , 12 n ), and trigger tube 13 .

[0058] The light-emitting tube 11 is a tube body made of quartz glass that is in a straight tube shape extending in the X direction and is transparent to the light L1 and encloses a light-emitting gas. The light-emitting tube 11 includes a pair of electrodes (12p, 12n) disposed opposite to each other in the X direction on the inside. The length of the light-emitting tube 11 in the X direction of the present embodiment is 580 mm, the outer diameter when viewed in the X direction is 25 mm, and the inner diameter is 20 mm.

[0059] The light-emitting gas sealed in the light-emitting tube 11 is, for example, xenon gas. The pressure of the xenon gas sealed in the light-emitting tube 11 is, for example, 60 kPa at room temperature. When the light-emitting gas sealed in the light-emitting tube 11 is xenon gas, light with a wavelength of 200 to 1100 nm is generated by discharge.

[0060] The pair of electrodes (12p, 12n) are arranged so as to be separated by a distance of 500 mm in the X direction. The electrodes (12p, 12n) of this embodiment are made of lanthanum oxide tungsten and have an outer diameter of 10 mm. Figure 1 and Figure 2 The shapes of the electrodes (12p, 12n) shown are just examples and are not limited to these shapes. The electrodes (12p, 12n) are connected to a lamp lighting circuit (not shown) via power supply lines (12a, 12a).

[0061] like Figure 1 and Figure 2 As shown, a trigger tube 13 is provided on the outer wall surface on the +Z side of the light emitting tube 11. In addition, the trigger tube 13 may be provided on the -Z side of the light emitting tube 11, but if the energy loss of the light L1 emitted from the light emitting tube 11 and directly traveling toward the workpiece W1 is considered, the +Z side of the light emitting tube 11 is preferred.

[0062] The trigger tube 13 includes a conductive member 14 extending in the X direction and an insertion tube 15 extending in the X direction and accommodating at least a part of the conductive member 14 therein.

[0063] The conductive member 14 is made of tungsten or molybdenum, for example. The conductive member 14 is in the shape of a round rod with an outer diameter of 1 mm and a total length of 540 mm. Figure 2As shown in the figure, a molybdenum foil 16 for sealing is electrically connected to one end of the conductive member 14. A pin 17 is welded to one end of the molybdenum foil 16. The material of the pin 17 is, for example, molybdenum. The pin 17 is in the shape of a round bar with an outer diameter of 1 mm. The pin 17 is electrically connected to a trigger circuit (described later) via a lead wire, and power is supplied from the outside of the insertion tube 15 to the conductive member 14 inside.

[0064] The insertion tube 15 of this embodiment has an outer diameter of 4 mm, an inner diameter of 2 mm, and a total length of 570 mm when viewed in the X direction. The insertion tube 15 accommodates a conductive member 14 with one end cut in the inner space, and shrinks and seals the portion where a sealing molybdenum foil 16 to which one end of the conductive member 14 is welded is arranged in such a way that the space is substantially in a vacuum state. Thus, the base end 14a of the conductive member 14 is fixed to one end of the insertion tube 15. On the other hand, the top end 14b of the conductive member 14 is in non-contact with the other end of the insertion tube 15, and the conductive member 14 is supported in a cantilever state on the inner side of the insertion tube 15. In addition, the top end 14b of the conductive member 14 is 10 mm away from the electrode 12p.

[0065] The space inside the insertion tube 15 may be filled with an inert gas and hermetically sealed. In addition, the space inside the insertion tube 15 may not be hermetically sealed as long as the lighting operation is performed without any problem.

[0066] The insertion tube 15 in this embodiment is made of quartz glass like the light-emitting tube 11. However, the light-emitting tube 11 and the insertion tube 15 may be made of different materials, or may be separated from each other if arranged close to each other. In addition, the light-emitting tube 11 and the insertion tube 15 may not be made of quartz glass.

[0067] The light emitting tube 11 and the insertion tube 15 are fixed in a lamp housing (not shown) using a dedicated fixing fixture (not shown). The fixing fixture is made of, for example, ceramic. The insertion tube 15 is in contact with the outer surface of the light emitting tube 11 and is arranged so that the central axes of the light emitting tube 11 and the insertion tube 15 are substantially parallel.

[0068] like Figure 2 As shown, the insertion tube 15 has a portion of the inner peripheral surface of the constricted portion 15a to 15c protruding toward the conductive member 14 in the region facing the pair of electrodes (12p, 12n). The constricted portions 15a to 15c are formed by locally heating the insertion tube 15 with an oxyhydrogen flame or the like to shrink it. Figure 2 and Figure 3As shown, the inner diameter of the contraction portion 15a~15c is smaller than the other parts and larger than the outer diameter of the conductive member 14. The inner diameter of the contraction portion 15a~15c is about 1.5mm. In addition, the total length of the contraction portion 15a~15c in the X direction is about 5mm. A plurality of contraction portions 15a~15c are provided along the X direction. In this embodiment, three contraction portions 15a~15c are provided.

[0069] The constricted portions 15a to 15c protrude toward the conductive member 14 and are close to the conductive member 14. Here, "close" is used with the intention of referring to a situation where the two are in contact, or a situation where the two are arranged at a separation distance that is smaller than the thickness of the tube wall of the insertion tube 15. The constricted portions 15a to 15c are located in the area facing the electrodes (12p, 12n) that radiate strong light during flashing, and have a smaller inner diameter than the surrounding area. During operation, the frequency of contact with the conductive member 14 is higher than that of the surrounding area, so more blackening occurs near the inner surface of the constricted portions 15a to 15c than in the surrounding area. That is, the constricted portions 15a to 15c limit the vibration of the conductive member 14 when the lamp is operating, and the area where the conductive member 14 contacts the inner surface of the insertion tube 15 is limited to the constricted portions 15a to 15c, so that the blackening can be concentrated only in the constricted portions 15a to 15c. Furthermore, by providing a plurality of constricted portions 15a to 15c, the load on each constricted portion 15a to 15c is reduced (distributed), thereby reducing the amount of blackening of each constricted portion 15a to 15c. As a result, the amount of blackening of trigger tube 13 can be reduced even after flash discharge lamp 10 is used for a long time.

[0070] The contraction part 15a closest to the top end 14b among the multiple contraction parts 15a to 15c is preferably closer to the top end 14b than the center between the pair of electrodes (12p, 12n). In this way, the movement of the top end 14b of the conductive member 14, which is prone to vibration, can be effectively restricted. The contraction part 15a is arranged at a position 20 mm away from the top end 14b of the conductive member 14.

[0071] In addition, regarding the configuration of multiple contraction parts 15a~15c, when the distance between a pair of electrodes (12p, 12n) is set to D, the number of contraction parts 15a~15c is set to N (N is a natural number greater than 2), and the largest interval among the intervals of multiple contraction parts 15a~15c is set to Amax, it is preferred to satisfy the relationship Amax≤D / N. Here, the distance D between a pair of electrodes (12p, 12n) is the shortest distance between a pair of electrodes (12p, 12n). In addition, the interval between the contraction parts 15a~15c is the interval between the centers of the contraction parts 15a~15c. By satisfying the relationship Amax≤D / N, the vibration of the conductive member 14 between the contraction parts 15a~15c can be appropriately limited.

[0072] In this embodiment, the number N of the constricted portions 15a to 15c is 3, and the interval A1 between the constricted portions 15a and 15b is equal to the interval A2 between the constricted portions 15b and 15c, that is, A1=A2=Amax.

[0073] Next, a verification experiment was performed to compare the occurrence of blackening in trigger tube 13 using flash discharge lamp 10 equipped with insertion tube 15 having a plurality of constrictions and a flash discharge lamp equipped with insertion tube 15 having a single constriction. The details will be described below.

[0074] [Verification Experiment 1]

[0075] (Example 2)

[0076] Example 2 is the flash discharge lamp 10 of the above embodiment. The distance D between the pair of electrodes (12p, 12n) is 500 mm, and the intervals between the three constrictions are 163 mm. The constriction closest to the top 14b of the conductive member 14 is set at a position 20 mm away from the top 14b of the conductive member 14.

[0077] (Example 1)

[0078] Example 1 is the same as Example 2 except that there are two constricted portions. The interval between the two constricted portions is 245 mm. The constricted portion closest to the tip 14 b of the conductive member 14 is set at a position 20 mm away from the tip 14 b of the conductive member 14 .

[0079] (Comparative Example)

[0080] The comparative example is the same as Example 2 except that the number of the constricted portion is one. The one constricted portion is set at a position 20 mm away from the tip 14 b of the conductive member 14 .

[0081] (condition)

[0082] Figure 4 : This is a diagram showing the structure of a lighting circuit for a verification experiment. The lighting circuit for the verification experiment includes a lamp lighting circuit 41 connected to the electrodes (12p, 12n) of the flash discharge lamp 10 and a trigger circuit 42 connected to the conductive member 14. A pulse current with a short time width is input to the flash discharge lamp 10 as an energy source for instantaneous discharge. The time width and energy of the pulse current can be adjusted according to the capacitance of the capacitor 43, the inductance of the coil 44, and the voltage value of the charger 45. Here, a 600μF capacitor 43 and a coil 44 for adjusting the flash time to 0.5ms are used.

[0083] First, the capacitor 43 is charged to 4000 V by the voltage of the charger 45. Next, the trigger circuit 42 is driven to apply a trigger voltage of about 10 kV to the conductive member 14. By applying the trigger voltage, a barrier discharge is generated near the inner wall of the arc tube 11 close to the trigger tube 13. When the discharge is generated between the pair of electrodes (12p, 12n), the lamp insulation breakdown voltage is reduced. When the insulation breakdown voltage becomes less than the above-mentioned charging voltage, the flash discharge lamp 10 flashes.

[0084] The life evaluation was performed about 100,000 times under the condition that the lighting was repeated every 1 minute, and the blackening state in the trigger tube 13 was confirmed.

[0085] (result)

[0086] Table 1 shows the results of comparing the blackening state after the life evaluation. In the table, the cumulative blackening length is the value obtained by accumulating the length of the blackening generation area of ​​the trigger tube 13 that is intermittently distributed in the X direction in the area facing the pair of electrodes (12p, 12n). The more blackening there is, the longer the length of the blackening generation area is.

[0087]

[0088] As a result, it can be seen that as the number of contractions increases, there is a tendency for the cumulative length of blackening to decrease. In particular, in Example 2, in which the number of contractions is three, blackening is greatly suppressed compared with the comparative example. In addition, in Example 2, blackening is almost invisible in areas outside the contractions. In addition, in Example 1, blackening is suppressed compared with the comparative example, but the occurrence of blackening is still confirmed in areas outside the two contractions. In the case where there are two contractions, it can be inferred that there is an area where the conductive member 14 contacts the inner circumferential surface of the insertion tube 15 due to vibration, and blackening occurs in this area.

[0089] As described above, by providing a plurality of constricted portions, blackening can be suppressed. In addition, from the viewpoint of suppressing the conductive member 14 from contacting the inner peripheral surface of the insertion tube 15 between the constricted portions, the number of constricted portions is preferably three or more.

[0090] [Verification Experiment 2]

[0091] Based on the results of Verification Experiment 1, flash discharge lamp 10 in which the number of constricted portions was further increased was evaluated.

[0092] (Example 3)

[0093] Example 3 is the same as Example 2 except that there are four constrictions. The intervals between the four constrictions are 123 mm. The constriction closest to the tip 14 b of the conductive member 14 is 20 mm away from the tip 14 b of the conductive member 14 .

[0094] (Example 4)

[0095] Example 4 is the same as Example 2 except that there are five constrictions. The intervals between the five constrictions are 98 mm. The constriction closest to the tip 14 b of the conductive member 14 is 20 mm away from the tip 14 b of the conductive member 14 .

[0096] (result)

[0097] As a result, similar to Example 2, in Examples 3 and 4, almost no blackening was observed in the area other than the contraction portion. In addition, as an indicator of the blackening concentration in the contraction portion, the trigger tube 13 after the life evaluation was destroyed, and the visible light transmittance of the blackened area of ​​the contraction portion was measured and compared. In addition, since the contraction portion may have a different transmittance from the material due to the lens effect based on the shape, etc., a relative comparison was performed with the transmittance at the contraction portion of the unused trigger tube 13 being set to 100. Table 2 shows the results of comparing the transmittance at the blackened area of ​​the contraction portion. In addition, the values ​​in Table 2 are the average values ​​of the transmittances obtained from each contraction portion.

[0098]

[0099] In Examples 3 and 4, the transmittance relative value is higher than that in Example 2. That is, it is considered that the more contraction parts there are, the less blackening adhesion per contraction part, and the load caused by the contact of the conductive member 14 and the light absorption caused by blackening can be suppressed. In addition, the more the number of contraction parts is, the higher the transmittance is, but the rate of increase tends to decrease relative to the increase of contraction parts.

[0100] As described above, by providing two or more, preferably three or more contraction portions in the insertion tube 15, a trigger tube 13 can be provided which is difficult to blacken until the end of lighting even under short pulse flash conditions. This effect can prevent the reduction of illumination and the deterioration of illumination distribution on the workpiece undergoing flash annealing.

[0101] The embodiments of the present invention are described above based on the drawings, but it should be understood that the specific structure is not limited to these embodiments. The scope of the present invention is not only shown by the description of the above embodiments, but also by the claims, and includes all changes within the meaning and scope equivalent to the claims.

[0102] The structure adopted in each of the above-mentioned embodiments can be adopted in any other embodiment. The specific structure of each part is not limited to the above-mentioned embodiment, and various modifications can be made within the scope not departing from the gist of the present invention.

[0103] In flash discharge lamp 10 , conductive member 14 may be coated with a metal belonging to the platinum group. Examples of the metal belonging to the platinum group include rhodium (Rh), ruthenium (Ru), platinum (Pt), and iridium (Ir).

[0104] The melting point of the metal belonging to the platinum group is relatively high (1700°C or more), and the resistance to oxidation and corrosion is high. Therefore, the metal belonging to the platinum group hardly melts even at the temperature at which the insertion tube 15 softens (for example, although it also depends on the composition, impurity concentration, etc., in the case of quartz glass, it is about 1000°C to 1700°C). By coating the conductive member 14 with the metal belonging to the platinum group, the conductive member 14 is protected from the influence of contact with oxygen separated from the insertion tube 15, so that blackening is not easily generated in the insertion tube 15.

[0105] The metal belonging to the platinum group is formed as a thin film on the outer surface of the conductive member 14 by metal vapor deposition or plating. In the case of coating with platinum (Pt), the thickness of the thin film is adjusted to be within the range of 0.03 μm to 3.5 μm, and is preferably 0.03 μm to 100 μm, and more preferably 0.05 μm to 50 μm, from the viewpoint of preventing the conductive member 14 from being oxidized.

[0106] Description of symbols

[0107] 1: Flash irradiation device

[0108] 10: Flash discharge lamp

[0109] 11: LED

[0110] 12p: Electrode

[0111] 12n: Electrode

[0112] 13: Trigger tube

[0113] 14: Conductive components

[0114] 14a: base end

[0115] 14b: Top

[0116] 15: Insert the pipe

[0117] 15a: Contraction

[0118] 15b: Contraction

[0119] 15c: Contraction

[0120] 16: Molybdenum foil

[0121] 17: Pin

[0122] 20: Reflective component

[0123] 21: Reflective surface

[0124] 30: Supporting platform

[0125] 30a: Pin

[0126] 41: Lighting circuit

[0127] 42: Trigger Circuit

[0128] 43: Capacitor

[0129] 44: Coil

[0130] 45: Charger

[0131] D: The distance between a pair of electrodes

[0132] L1: Light

[0133] W1: Workpiece.

Claims

1. A flash discharge lamp comprising: The light-emitting tube extends in a first direction and is transmissive to light; a pair of electrodes arranged opposite to each other in the first direction inside the light emitting tube; and The trigger tube is arranged along the outer side of the light emitting tube so as to extend between the pair of electrodes. The trigger tube has: a conductive member extending along the first direction; and The insertion tube extends along the first direction, receives at least a portion of the conductive member inside, and is transparent to light. The insertion tube includes a plurality of constricted portions along the first direction in a region facing between the pair of electrodes, in which a portion of an inner peripheral surface protrudes toward the conductive member.

2. The flash discharge lamp according to claim 1, The conductive member includes a base end supported by one end of the insertion tube and a tip end not in contact with the other end of the insertion tube. The constricted portion closest to the tip among the plurality of constricted portions is closer to the tip than the center between the pair of electrodes.

3. The flash discharge lamp according to claim 1, When the distance between the pair of electrodes is set to D, the number of the contraction parts is set to N, and the maximum interval among the intervals of the plurality of contraction parts is set to Amax, the relationship Amax≤D / N is satisfied, wherein, N is a natural number greater than or equal to 2.

4. The flash discharge lamp according to claim 1, The insertion pipe includes three or more of the constricted portions.

5. The flash discharge lamp according to claim 1, The conductive member is made of tungsten or molybdenum.

6. The flash discharge lamp according to claim 1, The conductive member is coated with a metal belonging to the platinum group.

7. A flash irradiation device, A flash discharge lamp according to any one of claims 1 to 6.

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