Heat treatment furnace

Abstract

The invention provides a heat treatment furnace capable of inhibiting the retention of atmosphere gas in a furnace body. This heat treatment furnace is provided with: a furnace body provided with an input port, an output port, and a heat treatment space in which a plurality of objects to be treated are heat-treated; a plurality of conveyed parts which can carry the plurality of processed objects in a state that the plurality of processed objects are arranged side by side with gaps in the left-right direction, and are arranged side by side in the forward direction; a push rod which pushes the conveyed part in the forward direction; and a plurality of intake pipes arranged side by side in the left-right direction, each intake pipe having an intake port for supplying an atmospheric gas into the heat treatment space. The conveyed portion is disposed between the intake pipes adjacent in the left-right direction. A gas inlet of the gas inlet pipe is configured to supply atmosphere gas to the processed object. The heat treatment furnace has a plurality of exhaust ports for discharging the atmosphere gas in the heat treatment space to the outside of the furnace body. When the furnace body is viewed in the forward direction, the exhaust port is disposed directly above a gap between a plurality of objects to be processed which are arranged side by side in the left-right direction on the conveyed portion.

Description

Technical Field

[0001] The technology disclosed in this specification relates to a heat treatment furnace. Background Art

[0002] Patent document 1 discloses a heat treatment furnace for heat treating a plurality of objects to be treated. The heat treatment furnace comprises: a furnace body having an input port and an output port; a conveying plate on which a plurality of objects to be treated are stacked in an up-down direction and pushed from the input port toward the output port by a push rod; and a plurality of air inlet pipes having air inlets for supplying an atmosphere gas into a heat treatment space of the furnace body. A plurality of exhaust ports are formed on the upper wall of the furnace body.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2021-162246 Summary of the invention

[0006] When the processed objects are stacked on the conveying plate in the up-down direction and arranged side by side in the left-right direction, a large amount of processed objects are arranged in the furnace body. Therefore, the flow of the atmosphere gas in the furnace body is affected by the processed objects. In a heat treatment furnace such as patent document 1, a plurality of exhaust ports are arranged near the left end (i.e., near the left side wall extending in the conveying direction) and near the right end (i.e., near the right side wall extending in the conveying direction) of the upper wall of the furnace body. Therefore, the exhaust port and the air inlet are not arranged in consideration of the loading state of the processed objects. As a result, the atmosphere gas is easily retained in the furnace body.

[0007] This specification discloses a technology capable of suppressing the retention of atmospheric gas in a furnace.

[0008] In a first embodiment of the technology disclosed in this specification, a heat treatment furnace comprises: a furnace body having an input port, an output port, and a heat treatment space for heat treatment of a plurality of objects to be treated; a plurality of transported parts capable of carrying the plurality of objects to be treated in a state where the plurality of objects to be treated are stacked in the up-down direction and arranged side by side with a gap in the left-right direction orthogonal to the up-down direction, and arranged side by side in the forward direction; a push rod that pushes the transported parts in the forward direction from the input port of the furnace body toward the output port; and a plurality of air intake pipes having air intake ports for supplying atmosphere gas into the heat treatment space, and arranged side by side in the left-right direction. The transported parts are arranged between the air intake pipes adjacent to each other in the left-right direction. The air intake ports of the air intake pipes are arranged to supply the atmosphere gas to the objects to be treated stacked in the up-down direction. The heat treatment furnace has a plurality of exhaust ports for exhausting the atmosphere gas in the heat treatment space to the outside of the furnace body. When the furnace body is viewed in the forward direction, the exhaust port is arranged right above gaps between the plurality of processed objects arranged in parallel in the left-right direction on the conveyed portion.

[0009] According to the above-mentioned configuration, the atmosphere gas supplied to the heat treatment space from the air inlet pipe passes between the processed objects stacked in the up-down direction, and flows to the gaps between the multiple processed objects arranged side by side in the left-right direction on the conveying plate. Next, the atmosphere gas flows upward in the gaps between the multiple processed objects. Since the exhaust port is arranged directly above the gaps between the multiple processed objects when the furnace body is observed in the forward direction, the atmosphere gas flows upward toward the exhaust port after flowing in the gaps between the multiple processed objects. In the case where gas is generated from the processed object, the atmosphere gas flows toward the exhaust port together with the gas generated from the processed object. Finally, the atmosphere gas is discharged from the exhaust port to the outside of the furnace body together with the gas generated from the processed object. Thus, it is possible to suppress the atmosphere gas from being retained in the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a schematic cross-sectional view of the heat treatment furnace according to the first embodiment.

[0011] Figure 2 This is a front view of a plurality of processed objects placed on a conveyor plate according to the first embodiment.

[0012] Figure 3 It is a horizontal cross-sectional view of the object to be processed in the first embodiment.

[0013] Figure 4 yes Figure 1 A schematic cross-sectional view of a heat treatment furnace taken along line IV-IV.

[0014] Figure 5It is a cross-sectional view showing the uppermost processed object and the first partition wall according to the first embodiment.

[0015] Figure 6 yes Figure 1 A schematic cross-sectional view of a heat treatment furnace taken along line VI-VI.

[0016] Figure 7 is a horizontal cross-sectional view showing a part of the heat treatment furnace of the first embodiment.

[0017] Figure 8 This is a cross-sectional view showing the object to be processed and the second partition wall arranged at the leftmost end (second partition wall side) of the first embodiment.

[0018] Fig. 9 This is a schematic cross-sectional view showing a conveying plate, an air inlet pipe arranged around the conveying plate, and a furnace body of the heat treatment furnace according to the first embodiment.

[0019] Fig.10 It is a block diagram of the heater, push rod, regulating valve and control device of the first embodiment.

[0020] Fig.11 This is a schematic side view of the object to be processed and the air inlet pipe when the notch of the object to be processed and the air inlet pipe do not overlap in the left-right direction in the first embodiment.

[0021] Fig.12 This is a schematic side view of the object to be processed and the air intake pipe when the notch of the object to be processed and the air intake pipe overlap in the left-right direction in the first embodiment.

[0022] Fig.13 This is a schematic cross-sectional view showing a furnace body, a workpiece arranged in a furnace interior space, and an air intake duct of the heat treatment furnace according to the first embodiment.

[0023] Fig.14 is a horizontal cross-sectional view showing a part of a heat treatment furnace according to the second embodiment.

[0024] Fig.15 is a horizontal cross-sectional view showing a part of a heat treatment furnace according to the second embodiment.

[0025] Fig.16 This is a schematic cross-sectional view showing a furnace body, a workpiece arranged in a heat treatment space, and a heater in a heat treatment furnace according to a third embodiment.

[0026] Fig.17 This is a schematic cross-sectional view showing a furnace body, a workpiece arranged in a furnace interior space, and an air inlet duct of a heat treatment furnace according to a fourth embodiment.

[0027] Fig.18This is a schematic cross-sectional view showing a conveying plate, an air inlet pipe arranged around the conveying plate, and a furnace body in a heat treatment furnace according to a fourth embodiment.

[0028] Explanation of symbols

[0029] 2…object to be treated; 4…sagger; 4a…side wall; 5…notch; 6…object to be treated; 10…heat treatment furnace; 12…furnace body; 14…first partition wall; 16…heater; 18…guide portion; 20…conveying portion; 20a…conveying plate; 22…push rod; 26…second partition wall; 28…air inlet pipe; 28a…air inlet port; 30…adjusting valve; 32…supply pipe; 36…control device; 42…upper wall; 44…lower wall; 46…furnace inlet wall; 46a…inlet port; 48…furnace outlet wall; 48a…outlet port; 50…right side wall; 52…left side wall; 54… Internal space; 58…heat treatment space; 58a…furnace space; 60…cooling space; 64…loading rail; 66…guide rail; 68…pad; 70…exhaust port; 128…first air inlet pipe; 130…second air inlet pipe; 216…heating heater; 218…insulating heater; 258…heating space; 260…insulating space; 370…exhaust port; D1…distance; D2…distance; D3…distance; D4…distance; D5…distance; D6…distance; G1…gap; W1…width; W2…width; W3…width; W4…width; W5…width. DETAILED DESCRIPTION

[0030] The main features of the embodiments described below are listed in advance. It should be noted that the technical elements described below are independent technical elements, which can exert technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of application.

[0031] The second scheme of the technology disclosed in this specification is based on the above-mentioned first scheme, and the width of the exhaust port in the left-right direction is more than 1 times and less than 3 times the width of the gap between the multiple processed objects arranged side by side in the left-right direction in the left-right direction. According to the above-mentioned structure, even if the atmosphere gas flows in the gap between the multiple processed objects (the gap in the left-right direction) and then diffuses to the right or left toward the upper wall, the atmosphere gas can be discharged from the exhaust port to the outside of the furnace body together with the gas generated from the processed objects. In this way, it is possible to further suppress the retention of the atmosphere gas in the furnace body.

[0032] The third solution of the technology disclosed in this specification is based on the first or second solution described above, and the multiple air intake pipes are arranged side by side in the forward direction. The distance between the adjacent air intake pipes in the forward direction is an integer multiple of the length of the conveyed part in the forward direction. In a heat treatment furnace that usually uses a push rod, when the push rod pushes the conveyed part once, the conveyed part moves a distance equivalent to the length of the conveyed part in the forward direction. According to the above structure, the atmospheric gas can be uniformly supplied to the treated object on the conveyed part.

[0033] The fourth scheme of the technology disclosed in this specification is based on any one of the first to third schemes mentioned above, and the heat treatment furnace is provided with: an adjustment valve, which allows the atmosphere gas to be supplied from the air inlet when the adjustment valve is open, and prohibits the atmosphere gas from being supplied from the air inlet when the adjustment valve is closed; and a control device, which controls the opening and closing of the adjustment valve. The processed object has a notch, which is located at the upper part of the processed object and connects the inside and the outside of the processed object. When the air inlet pipe overlaps with the notch in the left-right direction, the control device opens the adjustment valve. According to the above structure, when the air inlet pipe overlaps with the notch in the left-right direction, the atmosphere gas is supplied from the air inlet of the air inlet pipe. Thereby, the atmosphere gas can be efficiently supplied to the inside of the processed object.

[0034] A fifth scheme of the technology disclosed in this specification is based on any one of the first to fourth schemes described above, and the heat treatment furnace includes: a plurality of adjustment valves that switch the intake amount of the atmosphere gas supplied from the intake port between a first intake amount and a second intake amount different from the first intake amount; and a control device that controls the plurality of adjustment valves. In the intake pipes adjacent to each other in the left-right direction, the intake port of one intake pipe is opposed to the intake port of another intake pipe. When the intake amount supplied from the intake port of the one intake pipe is switched to the first intake amount, the control device switches the intake amount supplied from the intake port of the other intake pipe to the second intake amount. According to the above configuration, the atmosphere gas in the heat treatment space is stirred, and the concentration of the atmosphere gas and the gas component generated from the object to be treated can be made uniform in the heat treatment space.

[0035] The sixth scheme of the technology disclosed in this specification is based on any one of the first to fifth schemes described above, wherein the heat treatment space has: a plurality of furnace spaces arranged side by side in the forward direction and demarcated by a plurality of first partitions arranged on the upper side of the processed object. The plurality of exhaust ports are respectively arranged in each of the plurality of furnace spaces. According to the above configuration, it is possible to suppress the atmospheric gas from being retained in each furnace space.

[0036] The seventh scheme of the technology disclosed in this specification is based on the sixth scheme, and the heat treatment furnace further includes: a plurality of guide rails, the conveyed part is arranged between the guide rails adjacent to each other in the left-right direction, the guide rails extend along the forward direction, and guide the conveyed part in the forward direction; and a plurality of second partition walls, the second partition walls extend from the guide rails to the first partition walls. According to the above configuration, it is possible to suppress the atmospheric gas supplied from the air intake pipe from moving between adjacent furnace spaces.

[0037] The eighth scheme of the technology disclosed in this specification is based on the seventh scheme described above, and the distance between the second partition wall and the processed object in the left-right direction is greater than 10 mm and less than 30 mm. According to the above structure, it is possible to suppress the contact between the second partition wall and the processed object, and to suppress the movement of the atmosphere gas supplied from the air inlet pipe between adjacent furnace spaces.

[0038] A ninth solution of the technology disclosed in this specification is based on any one of the sixth to eighth solutions described above, wherein in each of the plurality of furnace spaces, the distance between the exhaust port and the air inlet pipe in the forward direction is longer than the length of the transported portion in the forward direction. According to the above configuration, in each furnace space, the contact time between the atmosphere gas and the processed object can be prolonged.

[0039] The tenth scheme of the technology disclosed in this specification is based on any one of the sixth to ninth schemes described above, wherein the distance between the first partition wall and the processed object is greater than 10 mm and less than 30 mm. According to the above structure, it is possible to suppress the first partition wall from contacting the processed object, and suppress the atmospheric gas from passing between the first partition wall and the processed object.

[0040] The eleventh scheme of the technology disclosed in this specification is based on any one of the above-mentioned first to tenth schemes, and the heat treatment furnace also includes: a heating heater, which is arranged in the heat treatment space; and a heat preservation heater. The heat treatment space has: a plurality of furnace spaces arranged side by side in the forward direction. The plurality of furnace spaces include: a heating space, in which the heating heater is arranged, and the heating space is connected to the input port; and a heat preservation space, in which the heat preservation heater is arranged, and the heat preservation space is connected to the heating space. The exhaust port is arranged in the heating space. According to the above-mentioned structure, the heated atmosphere gas in the heat preservation space and the gas generated from the object to be processed flow into the heating space, so that the heating space is heated. As a result, compared with the structure in which the atmosphere gas and the gas generated from the object to be processed do not flow from the heat preservation space to the heating space, the heat generation of the heating heater can be reduced.

[0041] The twelfth scheme of the technology disclosed in this specification is based on any one of the first to eleventh schemes described above, wherein the intake pipe is formed of ceramics. According to the above structure, the heat resistance of the intake pipe is higher than that of a structure in which the intake pipe is a component other than ceramics. As a result, it is possible to suppress the intake pipe from being damaged by heat in a heat treatment furnace used under high temperature conditions. In addition, for example, in a structure in which the intake pipe is formed of metal, metal may sometimes be mixed into the object to be treated. As a result, the quality of the object to be treated is reduced. According to the above structure, it is possible to suppress the reduction in the quality of the object to be treated caused by the mixing of metal.

[0042] The thirteenth scheme of the technology disclosed in this specification is based on any one of the above-mentioned first to twelfth schemes, and the heat treatment furnace is further provided with a supply pipe, which is connected to the plurality of air inlet pipes respectively and supplies the atmosphere gas to the plurality of air inlet pipes. The supply pipe passes through the wall of the furnace body. According to the above structure, the atmosphere gas is heated by the furnace body when it flows through the supply pipe. As a result, when the atmosphere gas is supplied from the air inlet pipe to the heat treatment space, the temperature drop of the heat treatment space can be suppressed.

[0043] (First embodiment)

[0044] Figure 1 The heat treatment furnace 10 of the first embodiment shown in the figure performs heat treatment on the object 2. Hereinafter, the longitudinal direction of the heat treatment furnace 10 is referred to as the front-back direction, the direction perpendicular to the front-back direction is referred to as the left-right direction, and the direction perpendicular to the front-back direction and the left-right direction is referred to as the up-down direction. In addition, the forward direction is the direction from the input port 46a toward the output port 48a, and the backward direction is the direction from the output port 48a toward the input port 46a.

[0045] like Figure 2 As shown, the processed object 2 includes a sagger 4 and a processed object body 6 (see Figure 3 The sagger 4 has a substantially rectangular box shape. The sagger 4 has a plurality of (four in this embodiment) notches 5. The notches 5 are located at the upper portion of the sagger 4. Figure 3 As shown, four notches 5 are respectively arranged on each side wall of the four side walls 4a of the sagger 4. The width W1 of the four side walls 4a is the same. Two notches 5 are opposite to each other in the front-back direction, and the other two notches 5 are opposite to each other in the left-right direction. The notches 5 connect the inside and the outside of the sagger 4. The width W2 of the notch 5 is greater than 30% and less than 70% of the width W1 of the side wall 4a. In this embodiment, the width W2 is 40% of the width W1. The width W2 can be greater than 30% and less than 60%.

[0046] The processed object body 6 is arranged inside the sagger 4. The processed object body 6 is, for example, a raw material of a ceramic capacitor, and a positive electrode material and a negative electrode material of a lithium ion battery.

[0047] like Figure 1 As shown, the heat treatment furnace 10 includes: a furnace body 12, a plurality of first partition walls 14, a plurality of heaters 16, and a guide portion 18 (see Figure 2 ), a plurality of transported portions 20, a push rod 22, a plurality of second partition walls 26 (refer to Figure 6 ), multiple intake pipes 28, multiple adjustment valves 30 (refer to Fig.10 ), multiple supply pipes 32 (refer to Fig. 9 ), and the control device 36 (refer to Fig.10 ).

[0048] The furnace body 12 is a substantially rectangular heat-insulating structure extending in the front-rear direction. The furnace body 12 includes an upper wall 42, a lower wall 44, a furnace inlet wall 46, a furnace outlet wall 48, and a right side wall 50 (see Figure 4 ), and the left side wall 52 (refer to Figure 4 ). The upper wall 42, the lower wall 44, the furnace inlet wall 46, the furnace outlet wall 48, the right side wall 50 and the left side wall 52 define an internal space 54 of the furnace body 12. The upper wall 42 and the lower wall 44 extend in the front-to-back direction. The upper wall 42 is arranged to be on the upper side than the lower wall 44. The furnace inlet wall 46 is connected to the rear end of the upper wall 42 and the rear end of the lower wall 44. The furnace inlet wall 46 has an input port 46a that penetrates the furnace inlet wall 46 in the front-to-back direction. The internal space 54 is connected to the outside of the furnace body 12 through the input port 46a. For example, the internal space 54 is connected to a replacement chamber (not shown) arranged outside the furnace body 12 through the input port 46a. The furnace outlet wall 48 is connected to the front end of the upper wall 42 and the front end of the lower wall 44. The furnace outlet wall 48 has an output port 48a that penetrates the furnace outlet wall 48 in the front-to-back direction. The internal space 54 is connected to the outside of the furnace body 12 through the output port 48a. For example, the internal space 54 is connected to a replacement chamber (not shown) disposed inside the furnace body 12 via the output port 48a. The output port 48a and the input port 46a are opposite to each other in the front-rear direction. Figure 4 As shown, the right side wall 50 and the left side wall 52 are separated in the left-right direction. The right side wall 50 and the left side wall 52 are opposite to each other in the left-right direction. The right side wall 50 and the left side wall 52 are connected to the upper wall 42, the lower wall 44, and the furnace entrance wall 46 (see Figure 1 ), and the furnace outlet wall 48 (refer to Figure 1 )connect.

[0049] like Figure 1 As shown, a plurality of first partition walls 14 are arranged side by side in the front-rear direction. The first partition walls 14 extend downward from the upper wall 42. The plurality of first partition walls 14 divide the internal space 54 into a plurality of spaces.

[0050] The internal space 54 includes a heat treatment space 58 and a cooling space 60. The heat treatment space 58 is composed of an upper wall 42, a lower wall 44, a furnace entrance wall 46, and a right side wall 50 (see Figure 4 )、The left side wall 52 (refer to Figure 4 ), and a first partition wall 14 arranged at the boundary with the cooling space 60. The heat treatment space 58 is arranged at the rear of the furnace body 12. The heat treatment space 58 is divided into a plurality of furnace spaces 58a by the first partition wall 14. The plurality of furnace spaces 58a are arranged side by side in the front-to-back direction. The furnace spaces 58a adjacent in the front-to-back direction are connected to each other. Heaters 16 are respectively arranged in the plurality of furnace spaces 58a. When the heater 16 generates heat, the furnace space 58a (heat treatment space 58) is heated.

[0051] The cooling space 60 is disposed in the front portion of the furnace body 12. The cooling space 60 is composed of the upper wall 42, the lower wall 44, the furnace outlet wall 48, and the right side wall 50 (see Figure 4 )、The left side wall 52 (refer to Figure 4 ), and a first partition wall 14 disposed at the boundary with the heat treatment space 58. The cooling space 60 is connected to the heat treatment space 58. A cooling pipe (not shown) is disposed in the cooling space 60. The cooling space 60 is cooled by passing water or air through the cooling pipe.

[0052] The guide portion 18 is disposed in the heat treatment space 58 and the cooling space 60. Figure 2 As shown, the guide section 18 includes: a plurality of loading rails 64 and a plurality of guide rails 66 (see Figure 4 ).

[0053] The loading rail 64 extends in the front-rear direction. Figure 4 As shown, a plurality of loading rails 64 are arranged side by side in the left-right direction.

[0054] The guide rail 66 extends in the front-rear direction. A plurality of (four in this embodiment) guide rails 66 are arranged separately in the left-right direction. Six loading rails 64 are arranged between two adjacent guide rails 66 in the left-right direction. The upper surface of the guide rail 66 is arranged to be slightly above the upper surface of the loading rail 64.

[0055] The plurality of transported portions 20 are arranged side by side in the front-to-back direction and in the left-to-right direction. Figure 2As shown, the conveyed portion 20 has more than one (two in this embodiment) conveying plates 20a. Two conveying plates 20a are arranged side by side in the left-right direction. The conveying plate 20a has a flat plate shape. The conveying plate 20a can carry multiple processed objects 2 on the upper surface. In this embodiment, six processed objects 2 are stacked on the upper surface of the conveying plate 20a in the up-down direction across the pad 68. There is a gap G1 between the processed object 2 on one conveying plate 20a of the two conveying plates 20a arranged side by side in the left-right direction and the processed object 2 on the other conveying plate 20a. Multiple processed objects 2 are arranged side by side in the left-right direction on the conveyed portion 20 with a gap G1. In the modified example, multiple processed objects 2 can be arranged on one conveying plate 20a in a manner stacked in the up-down direction and arranged side by side in the left-right direction. In this case, the gap G1 is arranged between 2 rows of processed objects 2 arranged side by side in the left-right direction.

[0056] like Figure 5 As shown, the processed object 2 located at the uppermost side among the multiple processed objects 2 on the conveying plate 20a is configured to be lower than the first partition wall 14. The processed object 2 located at the uppermost side is separated from the lower end of the first partition wall 14. In the up-down direction, the distance D1 between the processed object 2 located at the uppermost side and the lower end of the first partition wall 14 is more than 10mm and less than 30mm. Thus, the processed object 2 located at the uppermost side can be suppressed from contacting with the first partition wall 14. In addition, the space between the processed object 2 located at the uppermost side and the first partition wall 14 can be suppressed from being too large. Thus, gas (such as atmosphere gas described later) can be suppressed from passing through the space between the processed object 2 located at the uppermost side and the first partition wall 14. The distance D1 can be more than 10mm and less than 20mm, or can be more than 10mm and less than 15mm.

[0057] like Figure 4 As shown in FIG. 1 , the transported unit 20 is arranged on the loading rail 64. The transported unit 20 is arranged between two guide rails 66 adjacent to each other in the left-right direction. The guide rail 66 is arranged between two transported units 20 adjacent to each other in the left-right direction. The transported unit 20 (two transport plates 20a) is pushed by the push rod 22 (see FIG. 1 ). Figure 1 ) pushes the conveyor 20 forward in the internal space 54 in the furnace body 12. The conveyed portion 20 is guided in the forward direction by the guide rail 66 and slides on the loading rail 64. When the conveyed portion 20 moves in the heat treatment space 58, the object 2 is heated. When the conveyed portion 20 moves in the cooling space 60, the object 2 is cooled.

[0058] like Figure 1As shown, the push rod 22 is arranged outside the furnace body 12 near the input port 46a. The push rod 22 is configured to push the conveying plate 20a forward. The push rod 22 pushes the conveyed portion 20 once to move the conveyed portion 20 by a distance equivalent to the length of the conveyed portion 20 in the front-back direction. In this embodiment, the push rod 22 pushes three conveyed portions 20 (six conveying plates 20a) arranged side by side in the left-right direction forward at the same time. As a result, the three conveyed portions 20 move from the input port 46a to the internal space 54, and the multiple conveyed portions 20 in the internal space 54 are pushed forward by the movement of the three conveyed portions 20. By repeatedly using the push rod 22 to push the conveyed portion 20, the conveyed portion 20 is input from the input port 46a to the internal space 54, passes through the heat treatment space 58 and the cooling space 60 in sequence, and is output from the output port 48a to the outside of the furnace body 12. It should be noted that the structure of the push rod 22 is well known, and therefore the detailed description thereof will be omitted.

[0059] like Figure 6 As shown, the second partition wall 26 extends upward from the upper surface of the guide rail 66 to the first partition wall 14. The upper end of the second partition wall 26 is connected to the lower end of the first partition wall 14. The width of the second partition wall 26 in the left-right direction is roughly the same as the width of the guide rail 66 in the left-right direction. In the present embodiment, four second partition walls 26 are arranged in a row in the left-right direction. The second partition wall 26 located on the far right is arranged on the right side of the processed object 2 on the conveyed portion 20 located on the far right. The second partition wall 26 located on the far left is arranged on the left side of the processed object 2 on the conveyed portion 20 located on the far left. The two second partition walls 26 located in the center are respectively arranged between the processed object 2 on the conveyed portion 20 configured on the right side of the guide rail 66 and the processed object 2 on the conveyed portion 20 configured on the left side of the guide rail 66.

[0060] like Figure 7 As shown, a plurality of second partitions 26 are arranged side by side in the front-to-back direction. The distance D2 between two adjacent second partitions 26 in the front-to-back direction is greater than the length L1 of the transported portion 20 (one transport plate 20a) in the front-to-back direction. The distance D2 is an integer multiple of the length L1. The distance D2 is, for example, greater than 2 times and less than 5 times the length L1. In the present embodiment, the distance D2 is 3 times the length L1.

[0061] like Figure 8As shown, the side of the second partition wall 26 is separated from the processed object 2 on the conveying part 20 in the left-right direction. In the left-right direction, the distance D3 between the side of the second partition wall 26 and the processed object 2 is more than 10mm and less than 30mm. Thus, the contact between the processed object 2 and the second partition wall 26 can be suppressed. In addition, the space between the processed object 2 and the second partition wall 26 can be suppressed to be too large. Thus, the space between the multiple processed objects 2 on the conveying plate 20a and the second partition wall 26 can be suppressed to pass through. The distance D3 can be more than 10mm and less than 20mm, or more than 10mm and less than 15mm.

[0062] like Figure 4 As shown, a plurality of air inlet pipes 28 are arranged in the heat treatment space 58. The air inlet pipes 28 are formed of ceramics, such as mullite, alumina, and silicon carbide. A plurality of (four in the present embodiment) air inlet pipes 28 are arranged in a row in the left-right direction. The air inlet pipes 28 are inserted into the guide rail 66. The air inlet pipe 28 located on the far right is arranged on the right side of the object to be processed 2 on the conveyed portion 20 located on the far right. The air inlet pipe 28 located on the far left is arranged on the left side of the object to be processed 2 on the conveyed portion 20 located on the far left. The two air inlet pipes 28 located in the center are respectively arranged between the object to be processed 2 on the conveyed portion 20 arranged on the right side of the guide rail 66 and the object to be processed 2 on the conveyed portion 20 arranged on the left side of the guide rail 66.

[0063] like Figure 7 As shown, a plurality of intake pipes 28 are arranged side by side in the front-to-back direction. The distance D4 between two intake pipes 28 adjacent to each other in the front-to-back direction is greater than the length L1. The distance D4 is an integer multiple of the length L1. For example, the distance D4 is greater than 2 times and less than 5 times the length L1. In the present embodiment, the distance D4 is 3 times the length L1. In addition, the distance D4 is substantially the same as the distance D2.

[0064] like Fig. 9 As shown, the air intake pipe 28 extends upward from the guide rail 66 toward the upper wall 42. The upper end of the air intake pipe 28 is arranged to be higher than the upper end of the uppermost processed object 2 among the plurality of processed objects 2 on the conveying plate 20a. The air intake pipe 28 is separated from the processed objects 2 on the conveying plate 20a in the left-right direction.

[0065] The air inlet pipe 28 is configured to supply the atmosphere gas to the heat treatment space 58. The atmosphere gas is, for example, air, oxygen, or nitrogen. The air inlet pipe 28 has a plurality of air inlets 28a. In the present embodiment, six air inlets 28a are arranged in a row in the vertical direction. The distance between the adjacent air inlets 28a in the vertical direction is substantially the same as the width of the sagger 4 in the vertical direction. In the air inlet pipe 28 located on the far right, six air inlets 28a are located at the right end of the air inlet pipe 28. In the air inlet pipe 28 located on the far left, six air inlets 28a are located at the left end of the air inlet pipe 28. In the two air inlet pipes 28 located in the center, six air inlets 28a are located at each end of the right end and the left end of the air inlet pipe 28. In the two air inlet pipes 28 adjacent in the left-right direction, the air inlet 28a of one air inlet pipe 28 is opposed to the air inlet 28a of the other air inlet pipe 28 in the left-right direction.

[0066] like Fig. 9 As shown, the air inlet 28a is arranged at a position opposite to the notch 5 of the sagger 4 in the left-right direction. That is, the position of the air inlet 28a in the up-down direction is substantially the same as the position of the notch 5 in the up-down direction. The air inlet 28a supplies the atmosphere gas to the right and / or to the left toward the notch 5. Thus, the atmosphere gas flows into the interior of the sagger 4 through the notch 5, and then flows out to the outside of the sagger 4, i.e., the gap G1, through the notch 5. The gas generated from the main body 6 of the processed object is discharged from the sagger 4 by the atmospheric gas passing through the inside of the sagger 4. The flow rate of the atmospheric gas supplied from each air inlet 28a is the same. Therefore, the atmospheric gas is uniformly supplied to each of the multiple processed objects 2 stacked on the conveying plate 20a.

[0067] like Figure 4 As shown, the regulating valve 30 is arranged outside the furnace body 12. The regulating valve 30 can be opened and closed. The regulating valve 30 adjusts the flow rate of the atmosphere gas supplied from the air inlet 28a to the heat treatment space 58. When the regulating valve 30 is opened, the atmosphere gas is allowed to be supplied from the air inlet 28a to the heat treatment space 58. When the regulating valve 30 is closed, the atmosphere gas is prohibited from being supplied from the air inlet 28a to the heat treatment space 58.

[0068] The supply pipe 32 is connected to four air intake pipes 28 arranged side by side in the left-right direction, respectively. The supply pipe 32 extends in a straight line. In a modified example, the supply pipe 32 may extend in a zigzag shape. The supply pipe 32 supplies the atmosphere gas to the air intake pipe 28. The supply pipe 32 penetrates the lower wall 44, thereby passing through the lower wall 44. The atmosphere gas flows in the supply pipe 32 from the right end toward the center, and flows in the supply pipe 32 from the left end toward the center. While the atmosphere gas flows in the supply pipe 32, it passes through the lower wall 44 and is heated. Thus, the heated atmosphere gas is supplied to the air intake pipe 28. Therefore, it is possible to suppress the temperature of the heat treatment space 58 from being lowered when the atmosphere gas is supplied to the heat treatment space 58 from the air inlet 28a of the air intake pipe 28.

[0069] like Figure 1 As shown, the furnace body 12 has a plurality of exhaust ports 70. The exhaust ports 70 are disposed on the upper wall 42. The exhaust ports 70 penetrate the upper wall 42 in the vertical direction. The exhaust ports 70 connect the internal space 54 of the furnace body 12 with the outside of the furnace body 12.

[0070] Each exhaust port 70 is disposed in each furnace space 58a. The plurality of exhaust ports 70 are arranged side by side in the front-to-back direction. In the front-to-back direction, the exhaust ports 70 are disposed near the first partition wall 14. The exhaust ports 70 are disposed to be located at the rear side of the air intake pipe 28. Figure 7 As shown, the distance D5 between two exhaust ports 70 adjacent to each other in the front-to-back direction is greater than the length L1. The distance D5 is an integer multiple of the length L1. The distance D5 is, for example, greater than 2 times and less than 5 times the length L1. In the present embodiment, the distance D5 is 3 times the length L1. In addition, the distance D5 is substantially the same as the distance D2. With respect to the exhaust port 70 and the air intake pipe 28 disposed in the same furnace space 58a, the distance D6 between the exhaust port 70 and the air intake pipe 28 in the front-to-back direction is longer than the length L1.

[0071] In addition, a plurality of (three in this embodiment) exhaust ports 70 are arranged side by side in the left-right direction. The exhaust port 70 is arranged at the center position between two adjacent guide rails 66 in the left-right direction. The exhaust port 70 is arranged at the boundary position of two adjacent conveying plates 20a in the left-right direction.

[0072] like Fig. 9As shown, when the heat treatment furnace 10 is observed backward along the front-to-back direction, the exhaust port 70 is arranged directly above the gap G1 in the left-to-right direction between two objects to be processed 2 arranged side by side in the left-to-right direction. When the heat treatment furnace 10 is observed backward along the front-to-back direction, the exhaust port 70 overlaps with the gap G1 in the up-down direction. The center position of the gap G1 in the left-to-right direction is roughly the same as the center position of the exhaust port 70 in the left-to-right direction. The width W3 of the exhaust port 70 in the left-to-right direction is greater than the width W4 of the gap G1 in the left-to-right direction. The width W3 is more than 1 times and less than 3 times the width W4. Thus, it can be suppressed that the atmosphere gas passing through the gap G1 and the gas generated from the object to be processed body 6 are retained between the upper wall 42 and the object to be processed 2. The width W3 can be more than 1 times and less than 2.5 times the width W4, or more than 1 times and less than 2 times the width W4.

[0073] like Fig.10 As shown, the control device 36 is electrically connected to the heater 16, the push rod 22, and the regulating valve 30. The control device 36 controls the heater 16 to generate heat. The control device 36 controls the push rod 22 so that the push rod 22 pushes the conveyed portion 20.

[0074] In addition, the control device 36 pre-stores the length L1 of the conveyed portion 20 (conveying plate 20a) in the front-to-back direction, the width W2 of the notch 5 of the sagger 4, the notch position of the notch 5 in the conveyed portion 20 in the front-to-back direction, the moving speed of the conveyed portion 20 moved forward by the push of the push rod 22, and the positions of the plurality of air inlet pipes 28. The control device 36 calculates and stores the timing at which the air inlet pipe 28 overlaps with the notch 5 in the left-right direction when the conveyed portion 20 moves due to the push of the push rod 22 based on the length L1, the width W2, the notch position, the moving speed, and the positions of the plurality of air inlet pipes 28. During the period from the first time to the second time after the push of the push rod 22 starts, the air inlet pipe 28 overlaps with the notch 5 in the left-to-right direction. The control device 36 controls the opening and closing of the regulating valve 30 based on the timing at which the air inlet pipe 28 overlaps with the notch 5 in the left-to-right direction when the push of the conveyed portion 20 starts by the push rod 22.

[0075] Specifically, the control device 36 closes the regulating valve 30 before the first time has passed since the push rod 22 starts to push the conveyed portion 20. Fig.11 As shown, the air intake pipe 28 does not overlap with the notch 5 in the left-right direction.

[0076] Next, the control device 36 starts to push the conveyed portion 20 with the push rod 22 until the first time has passed, and then opens the regulating valve 30. Fig.12As shown, the air intake pipe 28 overlaps with the notch 5 in the left-right direction. By opening the regulating valve 30, the atmosphere gas is supplied to the right and / or left from the air intake port 28a of the air intake pipe 28 toward the notch 5. Figure 7 As shown in FIG. 1 , the air inlet pipe 28 is arranged at the rear side of the second partition wall 26, so that the atmosphere gas can be prevented from passing through the second partition wall 26 and flowing into the other furnace space 58a. Fig. 9 As shown, the atmosphere gas flows into the interior of the sagger 4 through the notch 5. Next, the atmosphere gas flows out to the gap G1 together with the gas generated from the main body 6 of the processed object through the notch 5. The atmosphere gas in the gap G1 flows upward (in the stacking direction of the multiple processed objects 2) along the side of the processed object 2 together with the gas generated from the main body 6 of the processed object. Next, as shown in FIG. Fig.13 As shown, when the atmosphere gas exceeds the upper end of the processed object 2 located at the uppermost side, the atmosphere gas and the gas generated from the processed object body 6 flow in the furnace space 58a along the upper wall 42 in the backward direction opposite to the moving direction (forward direction) of the conveyed portion 20. It should be noted that Fig.13 26 and the air inlet pipe 28. Figure 5 ) is 10 mm or more and 30 mm or less, so that the atmosphere gas and the gas generated from the main body 6 of the processed object can be prevented from passing through the first partition wall 14 and flowing into the other furnace space 58a. Then, the atmosphere gas and the gas generated from the main body 6 of the processed object pass through the exhaust port 70 together and are discharged from the furnace space 58a to the outside of the furnace body 12. Fig. 9 As shown in FIG. 1 , when the heat treatment furnace 10 is viewed backward along the front-rear direction, the exhaust port 70 is arranged directly above the gap G1 in the left-right direction between two objects to be processed 2 arranged side by side in the left-right direction, so the atmosphere gas flows smoothly into the exhaust port 70 together with the gas generated from the object to be processed body 6. Thus, it is possible to suppress the atmosphere gas and the gas generated from the object to be processed body 6 from being retained in the furnace space 58a.

[0077] The control device 36 starts to push the conveyed portion 20 with the push rod 22 until the second time has passed, and closes the adjustment valve 30. Thus, the supply of the atmosphere gas from the air inlet 28a is stopped. At this time, the air inlet pipe 28 does not overlap with the notch 5 in the left-right direction. By opening the adjustment valve 30 only between the first time and the second time, compared with the configuration in which the atmosphere gas is always open, the supply amount of the atmosphere gas can be reduced, and the atmosphere gas can be efficiently supplied to the inside of the sagger 4.

[0078] (Effect)

[0079] In the first embodiment described above, when the heat treatment furnace 10 is viewed backward along the front-back direction, the exhaust port 70 is arranged directly above the gap G1 in the left-right direction between two objects to be processed 2 arranged side by side in the left-right direction. As a result, the atmosphere gas flows through the gap G1 between the two objects to be processed 2 arranged side by side in the left-right direction together with the gas generated from the object body 6, flows upward toward the exhaust port 70, and is discharged from the exhaust port 70 to the outside of the furnace body 12. As a result, the atmosphere gas and the gas generated from the object body 6 can be suppressed from being retained in the furnace body 12.

[0080] (Second embodiment)

[0081] In the second embodiment, only the differences from the first embodiment are described. Fig.14 As shown, the plurality of intake pipes 28 are composed of a plurality of first intake pipes 128 and a plurality of second intake pipes 130. The configuration of the first intake pipes 128 and the configuration of the second intake pipes 130 are the same as the configuration of the intake pipes 28 of the first embodiment. The first intake pipes 128 and the second intake pipes 130 are alternately arranged side by side in the front-to-back direction. In addition, the first intake pipes 128 and the second intake pipes 130 are alternately arranged side by side in the left-to-right direction. With respect to the first intake pipes 128 and the second intake pipes 130 adjacent to each other in the left-to-right direction, the intake port 28a of the first intake pipe 128 (see Fig. 9 ) is opposite to the air intake port 28a of the second air intake pipe 130 in the left-right direction.

[0082] Fig.10 The regulating valve 30 shown in the figure is switched between a first opening and a second opening. When the regulating valve 30 is at the first opening, the air inlet 28a (see Fig. 9 ) supplies the atmosphere gas at a first intake amount. When the regulating valve 30 is at a second opening, the atmosphere gas is supplied from the intake port 28a at a second intake amount. The second intake amount is different from the first intake amount. The second intake amount is less than the first intake amount.

[0083] The control device 36 switches the first opening and the second opening of the regulating valve 30. The control device 36 controls the regulating valve 30 in such a manner that the opening of the regulating valve 30 connected to the first intake pipe 128 and the opening of the regulating valve 30 connected to the second intake pipe 130 are different. Specifically, Fig.14 As shown, the control device 36 (refer to Fig.10 ) When the regulating valve 30 (refer to Fig.10 ) is switched from the first opening to the second opening, the regulating valve 30 (refer to Fig.10 ) is switched from the second opening to the first opening. As a result, the atmosphere gas is supplied from the air inlet 28a (refer to Fig. 9) is supplied to the heat treatment space 58 at a first intake volume. In addition, the atmosphere gas is supplied from the intake port 28a of the second intake pipe 130 (see Fig. 9 ) is supplied to the heat treatment space 58 with a second intake air volume. It should be noted that, Fig.14 and Fig.15 In the figure, the flow of the atmosphere gas is indicated by arrows.

[0084] like Fig.15 As shown, the control device 36 switches the regulating valve 30 connected to the first air inlet pipe 128 from the second opening to the first opening, and switches the regulating valve 30 connected to the second air inlet pipe 130 from the first opening to the second opening. As a result, the atmosphere gas is supplied to the heat treatment space 58 from the air inlet 28a of the first air inlet pipe 128 at the second air intake amount. In addition, the atmosphere gas is supplied to the heat treatment space 58 from the air inlet 28a of the second air inlet pipe 130 at the first air intake amount. By controlling the regulating valve 30 in such a manner that the opening of the regulating valve 30 connected to the first air inlet pipe 128 and the opening of the regulating valve 30 connected to the second air inlet pipe 130 are different, the atmosphere gas in the heat treatment space 58 is stirred. As a result, the concentration of the gas component generated from the object 2 in the atmosphere gas can be made uniform in the heat treatment space 58.

[0085] (Corresponding relationship)

[0086] The first intake pipe 128 corresponds to “one intake pipe” and the second intake pipe 130 corresponds to “another intake pipe”.

[0087] (Third Embodiment)

[0088] In the third embodiment, only the differences from the first embodiment are described. Fig.16 As shown, the plurality of heaters 16 include a plurality of temperature increasing heaters 216 and a plurality of temperature keeping heaters 218. It should be noted that, Fig.16 In the figure, only the heat treatment space 58 is shown, and the illustration of the cooling space 60 is omitted. A plurality of temperature increasing heaters 216 are arranged in the space on the side of the input port 46a in the heat treatment space 58. Hereinafter, the space on the side of the input port 46a in the heat treatment space 58 is referred to as the temperature increasing space 258. The temperature increasing space 258 is connected to the input port 46a. The temperature increasing space 258 is composed of a plurality of furnace spaces 58a.

[0089] The plurality of heat-retaining heaters 218 are arranged at the front side of the plurality of temperature-raising heaters 216. The plurality of heat-retaining heaters 218 are arranged at the output port 48a (see Figure 1) side. Hereinafter, the space on the output port 48a side of the heat treatment space 58 is referred to as the heat preservation space 260. The heat preservation space 260 is connected to the temperature rising space 258. The heat preservation space 260 is arranged on the front side of the temperature rising space 258. The heat preservation space 260 is composed of a plurality of furnace spaces 58a.

[0090] The heating amount of the heating heater 216 is greater than that of the heat retaining heater 218 . The heating heater 216 raises the temperature of the heating space 258 . The heat retaining heater 218 maintains the temperature of the heat retaining space 260 substantially constant. The temperature of the heat retaining space 260 is higher than that of the heating space 258 .

[0091] A plurality of exhaust ports 70 are disposed in the temperature increasing space 258. The exhaust ports 70 are disposed in each furnace interior space 58a. In each furnace interior space 58a, the exhaust ports 70 are disposed on the rear side of the temperature increasing heater 216.

[0092] In the third embodiment, the air inlet 28a (refer to Fig. 9 ) The supplied atmosphere gas flows in the heat-retaining space 260 in the direction toward the input port 46a (backward). Fig.16 In FIG. 1 , the flow of the atmosphere gas is indicated by arrows. Next, the atmosphere gas and the main body 6 (refer to FIG. 1 ) of the object to be processed are connected. Fig. 9 ) flows from the heat-insulating space 260 into the heating space 258. The heating space 258 is heated by the atmosphere gas heated in the heat-insulating space 260 flowing into the heating space 258. As a result, the heat generation of the heating heater 216 can be reduced compared with a configuration in which the atmosphere gas does not flow from the heat-insulating space 260 into the heating space 258. The atmosphere gas flowing into the heating space 258 flows toward the exhaust port 70 together with the gas generated from the main body 6 of the object to be processed, and is discharged to the outside of the furnace body 12 from the exhaust port 70. Thus, it is possible to suppress the atmosphere gas and the gas generated from the main body 6 of the object to be processed from being retained in the heating space 258 and the heat-insulating space 260.

[0093] (Fourth embodiment)

[0094] In the fourth embodiment, only the differences from the first embodiment are described. Fig.17 As shown, in the heat treatment furnace 10, the exhaust port 370 is arranged across the first partition wall 14 and the upper wall 42 of the furnace body 12. The exhaust port 370 is arranged to be closer to the upper side than the object 2 to be processed. The exhaust port 370 extends backward from the front surface of the first partition wall 14 and then bends, extending upward in the first partition wall 14 and the upper wall 42. The exhaust port 370 opens forward in the furnace space 58a. The exhaust port 370 connects the furnace space 58a with the outside of the furnace body 12.

[0095] like Fig.18As shown, when the heat treatment furnace 10 is viewed backward along the front-rear direction, the exhaust port 370 is arranged directly above the gap G1. The center position of the gap G1 in the left-right direction is substantially the same as the center position of the exhaust port 370 in the left-right direction. The width W5 of the exhaust port 370 in the left-right direction is substantially the same as the width W3 of the exhaust port 70 in the first embodiment in the left-right direction. The width W5 is greater than the width W4 of the gap G1 in the left-right direction.

[0096] The atmosphere gas flows upward in the gap G1 together with the gas generated from the main body 6 of the object to be processed. Fig.17 As shown in FIG. 1 , when the atmospheric gas exceeds the upper end of the uppermost object 2, the atmospheric gas flows in the furnace space 58a together with the gas generated from the object body 6 in the backward direction opposite to the moving direction (forward direction) of the conveyed portion 20. Next, the atmospheric gas passes through the exhaust port 370 together with the gas generated from the object body 6, and is discharged from the furnace space 58a to the outside of the furnace body 12.

[0097] (Variation Example)

[0098] In one embodiment, the control device 36 may keep the regulating valve 30 open when the push rod 22 pushes the conveyed portion 20 .

[0099] The specific examples of the technology disclosed in this specification are described in detail above, however, these specific examples are only examples and do not limit the claims. The technology described in the claims includes various modifications and changes to the specific examples illustrated above. In addition, the technical elements described in this specification or the drawings exert technical usefulness alone or in various combinations, and are not limited to the combination described in the claims at the time of application. In addition, the technology illustrated in this specification or the drawings achieves multiple purposes at the same time, and the technology that achieves one of the purposes itself has technical usefulness.

Claims

1. A heat treatment furnace, wherein: have: A furnace body, the furnace body having an input port, an output port, and a heat treatment space for heat treating a plurality of objects to be treated; A plurality of transported sections capable of carrying the plurality of processed objects in a state where the plurality of processed objects are stacked in the up-down direction and arranged side by side with gaps in the left-right direction orthogonal to the up-down direction, and arranged side by side in the forward direction; a push rod that pushes the conveyed portion in the forward direction from the input port of the furnace body toward the output port; as well as a plurality of air inlet pipes, each of which has an air inlet port for supplying an atmosphere gas into the heat treatment space and is arranged side by side in the left-right direction; The transported portion is arranged between the intake pipes adjacent to each other in the left-right direction. The air inlet of the air inlet pipe is configured to supply the atmospheric gas to the objects to be processed stacked in the up-down direction. The heat treatment furnace has a plurality of exhaust ports for exhausting the atmosphere gas in the heat treatment space to the outside of the furnace body. When the furnace body is viewed in the forward direction, the exhaust port is arranged right above gaps between the plurality of processed objects arranged in parallel in the left-right direction on the conveyed portion.

2. The heat treatment furnace according to claim 1, wherein: The width of the exhaust port in the left-right direction is not less than 1 time and not more than 3 times the width of the gap in the left-right direction between the plurality of processed objects arranged in parallel in the left-right direction.

3. The heat treatment furnace according to claim 1, wherein: The plurality of air intake pipes are arranged side by side in the forward direction, The distance between the adjacent intake pipes in the forward direction is an integral multiple of the length of the transported portion in the forward direction.

4. The heat treatment furnace according to claim 1, wherein: The heat treatment furnace has: an adjustment valve that allows the atmospheric gas to be supplied from the gas inlet when the adjustment valve is open, and prohibits the atmospheric gas from being supplied from the gas inlet when the adjustment valve is closed; and A control device controls the opening and closing of the regulating valve, The object to be processed has a notch, which is located at the upper part of the object to be processed and connects the inside and the outside of the object to be processed. When the intake pipe overlaps with the notch in the left-right direction, the control device opens the adjustment valve.

5. The heat treatment furnace according to claim 1, wherein: The heat treatment furnace has: a plurality of adjustment valves configured to switch an intake amount of the atmosphere gas supplied from the intake port between a first intake amount and a second intake amount different from the first intake amount; as well as a control device for controlling the plurality of regulating valves, In the intake pipes adjacent to each other in the left-right direction, the intake port of one intake pipe faces the intake port of another intake pipe. The control device switches the amount of intake air supplied from the intake port of the one intake pipe to the first intake air amount, and switches the amount of intake air supplied from the intake port of the other intake pipe to the second intake air amount.

6. The heat treatment furnace according to claim 1, wherein: The heat treatment space includes: a plurality of furnace spaces arranged side by side in the forward direction and defined by a plurality of first partition walls arranged above the object to be treated; The plurality of exhaust ports are respectively arranged in each of the plurality of furnace spaces.

7. The heat treatment furnace according to claim 6, wherein: The heat treatment furnace also has: a plurality of guide rails, wherein the transported portion is arranged between the guide rails adjacent to each other in the left-right direction, the guide rails extending in the forward direction and guiding the transported portion in the forward direction; as well as A plurality of second partition walls are provided, wherein the second partition walls extend from the guide rail to the first partition walls.

8. The heat treatment furnace according to claim 7, wherein: A distance between the second partition wall and the object to be processed in the left-right direction is greater than or equal to 10 mm and less than or equal to 30 mm.

9. The heat treatment furnace according to claim 6, wherein: In each of the plurality of in-furnace spaces, a distance between the exhaust port and the air intake duct in the forward direction is longer than a length of the transported portion in the forward direction.

10. The heat treatment furnace according to claim 6, wherein: The distance between the first partition wall and the processed object is not less than 10 mm and not more than 30 mm.

11. The heat treatment furnace according to claim 1, wherein: The heat treatment furnace further comprises: a temperature-raising heater disposed in the heat treatment space; and a heat-retaining heater. The heat treatment space comprises: a plurality of furnace spaces arranged side by side in the forward direction, The multiple furnace spaces include: a heating space, in which the heating heater is arranged, and the heating space is connected to the input port; and a heat preservation space, in which the heat preservation heater is arranged, and the heat preservation space is communicated with the temperature rising space, The exhaust port is arranged in the temperature rising space.

12. The heat treatment furnace according to claim 1, wherein: The intake pipe is formed of ceramic.

13. The heat treatment furnace according to any one of claims 1 to 12, wherein: The heat treatment furnace further includes a supply pipe connected to each of the plurality of air inlet pipes and supplying the atmosphere gas to the plurality of air inlet pipes. The supply pipe passes through the wall of the furnace body.

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