A method, device, medium and product for determining the trajectory of particle collision points under shadow effect in hexagonal lattice

Abstract

The present application discloses a method, device, medium, and product for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice, and relates to the field of theoretical simulation of the microscopic morphology of dry etching and thin film deposition surfaces. The present application splits the hexagonal lattice model into odd-numbered lattice units and even-numbered lattice units based on the layer height of the three-dimensional lattice stack; by first calculating the odd and even layers separately and then merging and comparing them, the problem of spatial position misalignment between adjacent odd and even layers is solved, reducing the difficulty of numerical processing; by determining the vertical distance between the vertical line and the particle flight trajectory line, the lattice units without collision under the contour surface of the hexagonal lattice model are eliminated in real time, saving the amount of calculation; by determining the projection component, the collision point of the particle with the three-dimensional surface morphology during flight is obtained, achieving efficient positioning of the collision point, and improving the efficiency of determining the trajectory of the particle collision point under the shadow effect of the hexagonal lattice.

Description

Technical Field

[0001] The present application relates to the field of theoretical simulation of dry etching and thin film deposition surface micromorphology, and in particular to a method, device, medium and product for determining the trajectory of particle collision points under the shadow effect under a hexagonal lattice. Background Art

[0002] The shadowing effect is a key microscopic mechanism in dry etching and thin film deposition processes, resulting in surface roughening, manifested microscopically as random structures at the nanometer or even micrometer scale. Traditionally, this roughening effect has impacted device performance, constituting a long-standing challenge for etching and deposition techniques. In recent years, this effect has been actively applied to surface microtexturing, demonstrating promising applications in numerous fields, including optics, the environment, and biology. To achieve the desired control of surface microtopography in diverse applications, it is essential to establish theoretical simulations of the evolution of surface microtopography during dry etching and thin film growth under the influence of the shadowing effect. Currently, these simulations often employ the Monte Carlo method, which represents the substrate to be etched as a hexagonal or cubic lattice network. Random etching or deposition particles are generated using the Monte Carlo method, with the particles' initial positions and motion directions randomly selected. The collision trajectories on the etched / deposited surface are then calculated. Material is then removed (etched) or added (deposited) at these collision points, ultimately capturing the evolution of the etched profile. Among them, the collision point trajectory calculation is the core content of the entire simulation, and the efficiency of its algorithm directly determines the efficiency of the simulation process.

[0003] The method for calculating collision point trajectories is directly related to the lattice network model used; currently, common models include the cubic lattice model and the hexagonal lattice model. The cubic lattice model's algorithm is relatively simple, but it only applies to substrates with a precise cubic lattice orientation. It cannot provide sufficient symmetry and anisotropy for non-cubic lattice materials or amorphous materials. The hexagonal lattice model avoids the shortcomings of the cubic lattice and has greater applicability. However, due to the misalignment between rows and layers of the hexagonal lattice, the numerical processing of lattice coordinates and trajectory calculations is significantly more difficult. Therefore, there are currently no reports on methods for calculating shadow particle collision point trajectories using the hexagonal lattice model. Summary of the Invention

[0004] The purpose of this application is to provide a method, device, medium and product for determining the trajectory of collision points of particles with shadow effects under a hexagonal lattice, which can improve the efficiency of determining the trajectory of collision points of particles with shadow effects under a hexagonal lattice.

[0005] To achieve the above objectives, this application provides the following solutions:

[0006] In a first aspect, the present application provides a method for determining collision point trajectories of particles with shadow effects in a hexagonal lattice, comprising:

[0007] Determine the layer height of the three-dimensional lattice stacking based on the three-dimensional surface morphology of the hexagonal lattice model;

[0008] Based on the layer height of the three-dimensional lattice stacking, the hexagonal lattice model is split into lattice units; the lattice units include: odd-numbered layer lattice units and even-numbered layer lattice units;

[0009] The length extension direction of the hexagonal lattice model is the positive direction of the X axis, the width extension direction of the hexagonal lattice model is the positive direction of the Y axis, and the height extension direction of the hexagonal lattice model is the positive direction of the Z axis to construct a real space coordinate system;

[0010] determining an XY plane of the lattice unit based on the real space coordinate system;

[0011] Taking a straight line passing through the center point of the lattice unit and perpendicular to the XY plane of the lattice unit as a perpendicular line to obtain a first perpendicular line set;

[0012] Obtain particle flight trajectory lines in the hexagonal lattice model;

[0013] In the actual space coordinate system, determining a vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line as a first vertical distance;

[0014] Screening the first vertical line set to obtain the vertical lines and lattice units whose first vertical distance is less than a set value, to generate a second vertical line set and the first lattice set;

[0015] In the real space coordinate system, determining the vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line as the second vertical distance;

[0016] Screening out the vertical line corresponding to a lattice whose second vertical distance is less than one lattice and the lattice unit corresponding to the vertical line to form a third vertical line set and a second lattice set;

[0017] Obtain the initial position of the deposited particles;

[0018] determining, in the real space coordinate system, a projection component of a distance from an initial position of the deposited particle to a center point of a lattice unit in the second lattice set in the particle flight direction, and using a lattice unit corresponding to a minimum projection component as a collision point between the particle and the three-dimensional surface topography during flight;

[0019] Based on the obtained collision points, the collision point trajectory of the particles with shadow effect under the hexagonal lattice is generated.

[0020] Optionally, the process of determining the center point of the lattice unit includes:

[0021] Obtaining the center point coordinates of the lattice unit in a lattice space coordinate system;

[0022] The coordinates of the center point of the lattice unit are converted into coordinates in the real space coordinate system to obtain the center point of the lattice unit.

[0023] Optionally, the coordinates of the center points of the lattice units are processed in batches by writing a function formula.

[0024] Optionally, a straight line perpendicular to the XY plane of the lattice unit and the center point of the lattice unit is determined by writing a function formula to generate the first perpendicular line set.

[0025] Optionally, the vertical distance between each perpendicular line in the first perpendicular line set and the particle flight trajectory line is determined by writing a function formula.

[0026] Optionally, the vertical distance between the center point of the lattice unit strung together by each perpendicular line in the second perpendicular line set and the particle flight trajectory line is determined by writing a function formula.

[0027] Optionally, determining, in the real space coordinate system, a projection component of a distance from an initial position of the deposited particle to a center point of a lattice unit in the second lattice set in the particle flight direction includes:

[0028] Determining, in the real space coordinate system, a vector from the initial position of the deposited particle to the center point of a lattice unit in the second lattice set;

[0029] A particle flight trajectory vector is determined, and the projection component is determined based on the vector and the particle flight trajectory vector.

[0030] In a second aspect, the present application provides a computer device comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of the method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice described in any one of the above.

[0031] In a third aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice described in any one of the above.

[0032] In a fourth aspect, the present application provides a computer program product, comprising a computer program, which, when executed by a processor, implements the steps of the method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice described in any one of the above.

[0033] According to the specific embodiments provided in this application, this application has the following technical effects:

[0034] The present application provides a method, device, medium and product for determining the trajectory of particle collision points under the shadow effect in a hexagonal lattice. Based on the layer height of the three-dimensional lattice stack, the hexagonal lattice model is split into odd-numbered lattice units and even-numbered lattice units; by first calculating the odd and even layers separately and then merging and comparing them, the problem of spatial position misalignment between adjacent odd and even layers is solved, and the difficulty of numerical processing is reduced; by determining the vertical distance between the vertical line and the particle flight trajectory line, the lattice units without collision under the contour surface of the hexagonal lattice model are eliminated in real time, saving the amount of calculation; by determining the projection component, the collision point of the particle with the three-dimensional surface morphology during flight is obtained, and efficient positioning of the collision point is achieved, thereby improving the efficiency of determining the trajectory of the particle collision point under the shadow effect in the hexagonal lattice. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0036] Figure 1 A schematic flow chart of a method for determining collision point trajectories of particles with shadow effects in a hexagonal lattice according to an embodiment of the present application;

[0037] Figure 2 A schematic diagram of an implementation flow of a method for determining collision point trajectories of particles with shadow effects in a hexagonal lattice provided in one embodiment of the present application;

[0038] Figure 3 A schematic diagram of an actual space coordinate system provided in another embodiment of the present application;

[0039] Figure 4 A schematic diagram of lattice position dislocation caused when the number of lattice layers (Z) is an even number provided in another embodiment of the present application;

[0040] Figure 5 A schematic diagram of lattice position dislocation caused when the number of lattice layers (Z) is an odd number of layers provided in another embodiment of the present application;

[0041] Figure 6 A schematic diagram of theoretical simulation results of the shadow effect morphology under a hexagonal lattice at different levels using the method for determining the trajectory of particle collision points of the shadow effect under a hexagonal lattice provided by the present application, provided in another embodiment of the present application;

[0042] Figure 7A schematic diagram of the structure of a computer device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0044] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0045] In an exemplary embodiment, Figure 1 and Figure 2 As shown, a method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice is provided. The method is executed by a computer device, and specifically can be executed by a computer device such as a terminal or a server alone, or can be executed by a terminal and a server together. In the embodiment of the present application, the method is described by taking the application of the method to the server as an example, including:

[0046] S1: Determine the height of the three-dimensional lattice stacking layer based on the surface three-dimensional morphology of the hexagonal lattice model.

[0047] S2: Based on the height of the three-dimensional lattice stacking layer, the hexagonal lattice model is split into lattice units. The lattice units include: odd-numbered lattice units and even-numbered lattice units. The odd-numbered lattice units form the lattice unit set Cells_odd_1, and the even-numbered lattice units form the lattice unit set Cells_even_1. The three-dimensional surface morphology is represented by lattice space coordinates. The lattice unit sets Cells_odd_1 and Cells_even_1 are represented by (X, Y, Z) coordinates, where X = (x1, x2, x3…xi…xn), Y = (y1, y2, y3…yi…yn), and Z = (z1, z2, z3…zi…zn). (xi, yi, zi) are the three-dimensional coordinates of a lattice, and their physical meaning is the point at the highest position zi of the lattice in the xi-th row and yi-th column in the three-dimensional surface morphology.

[0048] S3: The length extension direction of the hexagonal lattice model is the positive direction of the X axis, the width extension direction of the hexagonal lattice model is the positive direction of the Y axis, and the height extension direction of the hexagonal lattice model is the positive direction of the Z axis to construct a real space coordinate system. Figure 3 shown.

[0049] S4: Determine the XY plane of the lattice unit based on the real space coordinate system.

[0050] S5: Taking a straight line passing through the center point of the lattice unit and perpendicular to the XY plane of the lattice unit as a perpendicular line, to obtain a first perpendicular line set.

[0051] In this step, the X and Y coordinates of the center points of the odd and even lattice cells in the real space coordinate system are determined. Because the calculations are performed separately for the odd and even lattice cells, the first perpendicular line sets generated include the odd-layer perpendicular line set Lines_odd_1 and the even-layer perpendicular line set Lines_even_1.

[0052] S6: Obtain the particle flight trajectory line in the hexagonal lattice model.

[0053] S7: In the actual space coordinate system, determine the vertical distance between each perpendicular line in the first perpendicular line set and the particle flight trajectory line as the first perpendicular distance.

[0054] S8: Filter the first vertical line set to obtain vertical lines and lattice cells whose first vertical distance is less than a set value (e.g., 1 cell) to generate a second vertical line set and the first lattice set. Similarly, the second vertical line set includes the vertical line set Lines_odd_2 and the vertical line set Lines_even_2. The first lattice set includes the lattice set Cells_odd_2 and the lattice set Cells_even_2.

[0055] S9: In the real-space coordinate system, determine the vertical distance between the center point of each lattice unit strung by each perpendicular line in the second perpendicular line set and the particle's flight trajectory as the second perpendicular distance. During this calculation, subsurface lattices (i.e., lattices whose height is lower than the lowest point of the hexagonal lattice model's contour surface) can be eliminated. Such lattices are below the surface and will not collide with the flying particles.

[0056] S10: Filter out the vertical lines corresponding to the second vertical distance less than one lattice and the lattice cells corresponding to the vertical lines to form a third vertical line set and a second lattice set. The third vertical line set includes the vertical line set Lines_odd_3 and the vertical line set Lines_even_3. The second lattice set includes the lattice set Cells_odd_3 and the lattice set Cells_even_3.

[0057] S11: Obtain the initial position of the deposited particles.

[0058] S12: In the actual space coordinate system, determine the projection component of the distance from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set in the particle flight direction, and use the lattice unit corresponding to the minimum projection component as the collision point between the particle and the three-dimensional surface topography during flight.

[0059] In actual application, the projection component of the distance from the initial position of the deposited particle to the center of each lattice unit in the lattice set Cells_odd_3 and the lattice set Cells_even_3 in the direction of particle flight is determined. The lattice unit with the smallest projection component is the collision point between the particle and the three-dimensional surface topography (i.e., the contour surface of the hexagonal lattice model) during flight.

[0060] S13: Generate collision point trajectories of shadow effect particles under the hexagonal lattice based on the obtained collision points.

[0061] In another exemplary embodiment of the present application, in step 5, the process of determining the center point of the lattice unit includes:

[0062] (1) Obtain the center point coordinates of the lattice unit in the lattice space coordinate system.

[0063] (2) The coordinates of the center point of the lattice unit are converted into coordinates in the actual space coordinate system to obtain the center point of the lattice unit.

[0064] In another exemplary embodiment of the present application, when calculating the X and Y coordinates of the center points of the odd-numbered lattice units and the odd-numbered lattice units in the actual space coordinates, since the conversion formula between the lattice space coordinates and the actual space coordinates is fixed, in order to improve the calculation efficiency, batch processing can be performed by writing a function formula.

[0065] Furthermore, during batch processing, the X, Y coordinates can be vectorized to improve computational efficiency through matrix operations.

[0066] In another exemplary embodiment of the present application, when calculating the vertical distance between each perpendicular line in the perpendicular line set Lines_odd_1 and the perpendicular line set Lines_even_1 in the actual space coordinate and the particle flight trajectory line, since the vertical distance calculation formula is fixed, in order to improve the calculation efficiency, batch processing can also be performed by writing a function formula.

[0067] In another exemplary embodiment of the present application, when calculating the distance between the center of each lattice strung together by each perpendicular line in the perpendicular line set Lines_odd_2 and the perpendicular line set Lines_even_2 in the actual space coordinates and the particle flight trajectory line, since the calculation formula is fixed, in order to improve the calculation efficiency, batch processing can also be performed by writing a function formula.

[0068] In another exemplary embodiment of the present application, determining, in a real space coordinate system, a projection component of a distance from an initial position of a deposited particle to a center point of a lattice unit in a second lattice set in the particle flight direction includes:

[0069] (1) In the real space coordinate system, determine the vector from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set.

[0070] (2) Determine the particle flight trajectory vector, and determine the projection component based on the vector and the particle flight trajectory vector. The projection component is expressed as:

[0071]

[0072] Among them, d represents the projection component, represents the vector from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set, Represents the particle flight trajectory vector.

[0073] In another exemplary embodiment of the present application, the advantages and implementation process of the method provided by the present application are described by taking the determination of the collision trajectory of thin film deposition particles under the shadow effect of the hexagonal lattice network as an example. In this embodiment, a computer is used as a calculation tool. Based on this, the implementation process of this embodiment includes:

[0074] Step 1: Import the three-dimensional morphology Surf lattice network of the hexagonal lattice model with a resolution of L×N. The data format of the Surf lattice network is a two-dimensional matrix with a size of (L, N). The value of each matrix element represents the height of the position in the lattice coordinate.

[0075] S2: Split the Surf lattice network into an odd-numbered lattice network and an even-numbered lattice network, forming the lattice unit set Surf_odd and the lattice unit set Surf_even respectively. The splitting method is to perform an odd-even judgment on the Surf lattice network. Surf_odd and the lattice unit set Surf_even are expressed as:

[0076] Surf_odd=Surf-mod(Surf,2).

[0077] Surf_even=Surf-mod(Surf+1,2).

[0078] Among them, the mod(a, b) function means returning the remainder when a is divided by b, which is used here to determine whether a number is odd or even.

[0079] Then, the lattice cell sets Surf_odd and Surf_even are vectorized and converted into lattice cell sets Cells_odd_1 and Cells_even_1 in the data format [X, Y, Z]. X, Y, Z represent the x, y, and z coordinates of all lattice cells in the lattice coordinate system, respectively. The size of X, Y, and Z is (L×N, 1, 0). The size of lattice cell sets Cells_odd_1 and Cells_even_1 is (L×N, 3, 0).

[0080] S3: Calculate the coordinates (X_real, Y_real, Z_real) of the centers of the odd-numbered and even-numbered lattice cells in real space. Specifically, write a coordinate conversion function to perform batch calculations on the X, Y, and Z coordinates in the lattice cell set Cells_odd_1 and the lattice cell set Cells_even_1. The calculation formula of the function is as follows:

[0081] Z_real=(Z-0.5)*Z*size_lattice_z.

[0082] Y_real=(Y-0.5)*Y*size_lattice_y+mod(X,2)*offset_yx.

[0083] X_real=(X-0.5)*X*size_lattice_x+mod(Z+1,2)*offset_xz.

[0084] in, size_lattice_y=1, Respectively represents the size of the lattice unit in the x, y, and z directions. offset_yx=0.5, The odd and even numbers of the lattice layers (Z) and columns (X) respectively lead to the misalignment of the lattice units in the y and x directions. Figure 4 and Figure 5 shown.

[0085] Then, based on the calculated X_real (including X_real_odd and X_real_even) and Y_real (including Y_real_odd and Y_real_even), create the odd-layer vertical line set Lines_odd_1 and the even-layer vertical line set Lines_even_1. The vertical line set data format is [X_real, Y_real, Vector], where X_real and Y_real are the x and y coordinates of the point through which the line passes, respectively, and Vector is the vector indicating the direction of the vertical line, which is (0, 0, 1).

[0086] S4: Calculate the vertical distance between each perpendicular line in the odd-layer perpendicular line set Lines_odd_1 and the even-layer perpendicular line set Lines_even_1 and the particle flight trajectory in real-space coordinates. Specifically, this is done by writing a line-to-line distance calculation function, Distances_lines2line, which directly performs batch calculations on the X and Y vectors. The input parameters of this function are (X_real, Y_real). The output parameter is the Distances_1 vector, which has a size of (L×N, 1). The distance values ​​calculated in the Distances_1 vector correspond one-to-one with the row coordinates of (X_real, Y_real), facilitating vectorized batch processing.

[0087] S5: Filter out the perpendicular lines and their corresponding lattice cells in the Distances_1 vector that are less than one lattice, forming the perpendicular line set Lines_odd_2 and the perpendicular line set Lines_even_2, as well as the lattice set Cells_odd_2 and the lattice set Cells_even_2.

[0088] S6: Calculate the vertical distance between the center of the lattice strung by each perpendicular line in the perpendicular line set Lines_odd_2 and the perpendicular line set Lines_even_2 and the particle flight trajectory in real space coordinates. Specifically, batch calculation is performed by writing a point-to-line distance calculation function Distances_points2line. The output parameter of this function is the Distances_2 vector. The size of the Distances_2 vector is (L×N, 1), and the Distances_2 vector corresponds one-to-one with the row coordinates of [X_real, Y_real].

[0089] S7: Filter out lattice cells where the distance between the lattice center and the particle's flight trajectory is less than one lattice size. Particles will collide with these lattice cells during flight. Filter out these perpendicular lines and the corresponding lattice cells to form the perpendicular line sets Lines_odd_3 and Lines_even_3, as well as the lattice sets Cells_odd_3 and Cells_even_3.

[0090] S8: Calculate the projection component of the distance from the initial position of the deposited particle to the center of each lattice cell in the lattice set Cells_odd_3 and the lattice set Cells_even_3 in the particle flight direction in the actual space coordinate.

[0091] The calculation method of the projection component is:

[0092] First, calculate the vector from the initial position of the deposited particle to the center of the lattice unit The projection component (ie, projection distance) d is then determined.

[0093] The lattice unit with the smallest projection component is the first collision point between the particle and the three-dimensional surface contour during flight, that is, the desired collision point.

[0094] Corresponding to different simulation times, the three-dimensional morphology contour evolution results under the simulated shadow effect calculated by the method provided by this application are as follows: Figure 6 As shown. Among them, Figure 6 Part (a) is a schematic diagram of the three-dimensional morphology evolution of the five-layer lattice unit under the shadow effect simulated by calculation. Figure 6 Part (b) is a schematic diagram of the three-dimensional morphology evolution of the 10-layer lattice unit under the shadow effect simulated by calculation. Figure 6 Part (c) is a schematic diagram of the three-dimensional morphology evolution of the 15-layer lattice unit under the shadow effect simulated by calculation. Figure 6 Part (d) is a schematic diagram of the three-dimensional morphology profile evolution results of the 20-layer lattice unit under the shadow effect simulated by calculation.

[0095] Based on the above description, compared with the known technology, this application also has the following advantages:

[0096] 1. This application can simulate the shadow effect under the hexagonal lattice.

[0097] 2. The calculation process of this application adopts a process-based and vectorized processing approach, and batch matrix operations can be performed by writing function formulas to improve calculation efficiency.

[0098] In an exemplary embodiment, a computer device is provided. The computer device may be a server or a terminal. The internal structure diagram thereof may be as follows: Figure 7As shown. The computer device includes a processor, a memory, an input / output interface (Input / Output, abbreviated as I / O) and a communication interface. The processor, memory and input / output interface are connected through a system bus, and the communication interface is connected to the system bus through the input / output interface. The processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and computer program in the non-volatile storage medium. The database of the computer device is used to store data for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice. The input / output interface of the computer device is used to exchange information between the processor and an external device. The communication interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice is implemented.

[0099] Those skilled in the art will understand that Figure 7 The structure shown in the figure is merely a block diagram of a portion of the structure related to the solution of the present application and does not constitute a limitation on the computer device to which the solution of the present application is applied. A specific computer device may include more or fewer components than shown in the figure, or combine certain components, or have a different component arrangement. In an exemplary embodiment, a computer device is provided, including a memory and a processor. The memory stores a computer program, and the processor implements the steps of the above-mentioned method embodiments when executing the computer program.

[0100] In an exemplary embodiment, a computer-readable storage medium is provided, storing a computer program. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0101] In an exemplary embodiment, a computer program product is provided, including a computer program. When the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0102] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of relevant data must comply with relevant regulations.

[0103] Those skilled in the art will understand that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, database or other media used in the embodiments provided in this application may include at least one of non-volatile and volatile memory. Non-volatile memory may include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory may include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM may be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0104] The databases involved in the various embodiments provided herein may include at least one of a relational database and a non-relational database. Non-relational databases may include, but are not limited to, distributed databases based on blockchains. The processors involved in the various embodiments provided herein may include, but are not limited to, general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic units, data processing logic units based on quantum computing, and the like.

[0105] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0106] This document uses specific examples to illustrate the principles and implementation methods of this application. The description of the above examples is only intended to help understand the method and core concept of this application. At the same time, for those skilled in the art, based on the concept of this application, there may be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this application.

Claims

1. A method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice, characterized in that: The method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice comprises: Determine the layer height of the three-dimensional lattice stacking based on the three-dimensional surface morphology of the hexagonal lattice model; Based on the layer height of the three-dimensional lattice stacking, the hexagonal lattice model is split into lattice units; the lattice units include: odd-numbered layer lattice units and even-numbered layer lattice units; The length extension direction of the hexagonal lattice model is the positive direction of the X axis, the width extension direction of the hexagonal lattice model is the positive direction of the Y axis, and the height extension direction of the hexagonal lattice model is the positive direction of the Z axis to construct a real space coordinate system; determining an XY plane of the lattice unit based on the real space coordinate system; Taking a straight line passing through the center point of the lattice unit and perpendicular to the XY plane of the lattice unit as a perpendicular line to obtain a first perpendicular line set; Obtain particle flight trajectory lines in the hexagonal lattice model; In the actual space coordinate system, determining a vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line as a first vertical distance; Screening the first vertical line set to obtain the vertical lines and lattice units whose first vertical distance is less than a set value, to generate a second vertical line set and the first lattice set; In the real space coordinate system, determining the vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line as the second vertical distance; Screening out the vertical line corresponding to a lattice whose second vertical distance is less than one lattice and the lattice unit corresponding to the vertical line to form a third vertical line set and a second lattice set; Obtain the initial position of the deposited particles; determining, in the real space coordinate system, a projection component of a distance from an initial position of the deposited particle to a center point of a lattice unit in the second lattice set in the particle flight direction, and using a lattice unit corresponding to a minimum projection component as a collision point between the particle and the three-dimensional surface topography during flight; Based on the obtained collision points, the collision point trajectory of the particles with shadow effect under the hexagonal lattice is generated.

2. The method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice according to claim 1, characterized in that: The process of determining the center point of the lattice unit includes: Obtaining the center point coordinates of the lattice unit in a lattice space coordinate system; The coordinates of the center point of the lattice unit are converted into coordinates in the real space coordinate system to obtain the center point of the lattice unit.

3. The method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice according to claim 2, characterized in that: The center point coordinates of the lattice units are processed in batches by writing a function formula.

4. The method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice according to claim 1, characterized in that: The center point of the lattice unit and a straight line perpendicular to the XY plane of the lattice unit are determined by writing a function formula to generate the first perpendicular line set.

5. The method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice according to claim 1, characterized in that: The vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line is determined by writing a function formula.

6. The method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice according to claim 1, characterized in that: The vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line is determined by writing a function formula.

7. The method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice according to claim 1, characterized in that: Determining, in the real space coordinate system, a projection component of a distance from an initial position of the deposited particle to a center point of a lattice unit in the second lattice set in the particle flight direction includes: Determining, in the real space coordinate system, a vector from the initial position of the deposited particle to the center point of a lattice unit in the second lattice set; A particle flight trajectory vector is determined, and the projection component is determined based on the vector and the particle flight trajectory vector.

8. A computer device comprising: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the method for determining the collision point trajectory of particles with shadow effects under a hexagonal lattice according to any one of claims 1 to 7.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice according to any one of claims 1 to 7 is implemented.

10. A computer program product comprising a computer program, characterized in that When the computer program is executed by a processor, the method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice according to any one of claims 1 to 7 is implemented.

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