Adjusting mechanism for mounting position of loading port

Abstract

A load port attachment position adjustment mechanism T capable of adjusting an attachment position of a load port 1 on a wall surface 2F of a transfer chamber 2 in which a substantially closed substrate transfer space is formed, the load port attachment position adjustment mechanism T comprising: an X-axis direction adjustment part T1 for adjusting a position of the load port 1 in a width direction W of the wall surface 2F; a Y-axis direction adjustment unit (T2) for adjusting the position of the loading port (1) in the thickness direction (D) of the wall surface (2F); and a Z-axis direction adjustment unit (T3) for adjusting the position of the load port (1) in the height direction (H) of the wall surface (2F). A three-axis direction adjustment mechanism (T4) integrating an X-axis direction adjustment part (T1), a Y-axis direction adjustment part (T2) and a Z-axis direction adjustment part (T3) is mounted on a wall surface (2F) through a mounting hole (2t) horizontally formed at the upper part of the wall surface (2F), so that the operability of accurately mounting the loading port (1) on the wall surface of the conveying chamber (2) is improved.

Description

Technical Field

[0001] The present disclosure relates to a load port installation position adjustment mechanism that adjusts the position (installation position) of a load port installed on a front surface of a substrate transfer device. Background Art

[0002] For example, in a semiconductor manufacturing process, a wafer (an example of a substrate) is processed in a clean room to improve yield and quality. In recent years, a "mini-environment system" that further improves cleanliness only for a local space around a high wafer has been introduced, and a device for transporting and processing wafers has been adopted. In the mini-environment system, a loading port is provided adjacent to a transport chamber, wherein the loading port constitutes a part of a wall surface of a wafer transport chamber (hereinafter referred to as a transport chamber) that is substantially sealed within a housing, and has a function of placing a FOUP (front-opening transport box) in a highly clean internal space and opening and closing the door of the FOUP when in close contact with the door of the FOUP, which is a storage container for storing a transport target object such as a wafer.

[0003] The operation of mounting the loading port to the transport chamber and adjusting the position of the loading port is performed by placing a leg provided at the lower portion of the loading port on a leg receiving portion having an appropriate adjustment bolt (e.g., a jacking bolt) provided near the lower end of the wall surface of the transport chamber, and then appropriately adjusting the adjustment bolt (see Japanese Patent No. 5910019 (Patent Document 1) and Japanese Patent No. 5988076 (Patent Document 2)).

[0004] However, in order for the operator to access the appropriate adjustment bolts such as the jack bolts, the operator is forced to crawl into the recessed area near the lower end of the loading port and perform the adjustment work in this posture. Therefore, there are problems that the operability is poor and the installation work including the position adjustment process takes a lot of time.

[0005] Furthermore, in the related art, after the load port installation operation is completed, if some height position adjustment bolts continue to be exposed and protrude downward more than surrounding parts, it is expected that when the load port, which is separate or mounted on the transport chamber, is moved by a forklift, the tip of the forklift may come into contact with or get caught on the lower ends of the height position adjustment bolts, thereby causing the load port to fall over. Therefore, when moving the load port using a forklift or other loading truck, extreme caution is required.

[0006] The present disclosure provides some embodiments of a loading port installation position adjustment mechanism, which enables the operation of adjusting the installation position of the loading port relative to the wall surface of the transport chamber to be smoothly performed in a comfortable posture, and also enables smooth moving operations using a loading truck. Summary of the invention

[0007] According to one embodiment of the present disclosure, a loading port installation position adjustment mechanism is provided, which is capable of adjusting the installation position of the loading port on the wall surface of a handling chamber, wherein the handling chamber defines a substantially closed substrate handling space. The loading port installation position adjustment mechanism according to the present invention includes: an X-axis adjustment portion, which is configured to adjust the position of the loading port in the width direction W (left-right direction) of the wall surface; a Y-axis adjustment portion, which is configured to adjust the position of the loading port in the thickness direction (front-back direction) of the wall surface; and a Z-axis adjustment portion, which is configured to adjust the position of the loading port in the height direction (up-down direction) of the wall surface; wherein the three-axis adjustment mechanism of the integrated (combined) X-axis adjustment portion, the Y-axis adjustment portion and the Z-axis adjustment portion is installed on the wall surface by using a mounting hole formed on at least one of the upper section or the middle section of the wall surface.

[0008] For such a loading port installation position adjustment mechanism according to the present disclosure, the three-axis adjustment mechanism is installed on the wall surface using a mounting hole formed on the upper section or the middle section of the wall surface. Therefore, the operator can use the X-axis adjustment part, the Y-axis adjustment part, and the Z-axis adjustment part to adjust the installation position of the loading port relative to the wall surface in various directions (left-right direction, front-back direction, and up-down direction) at the position of the upper section or the middle section of the wall surface, thereby eliminating the need to perform adjustment operations in an uncomfortable posture as in the related art and shortening the operation time. In particular, the SEMI standard stipulates that mounting holes are formed on the upper section, the middle section, or the lower section of the wall surface. Therefore, by using the mounting holes to install the three-axis adjustment mechanism on the wall surface, it is not necessary to form a separate dedicated mounting hole, which is advantageous.

[0009] Furthermore, with the load port installation position adjustment mechanism according to the present disclosure, it is not necessary to arrange the height position adjustment bolt near the lower end of the load port. Therefore, when a single load port or the entire EFEM including the load port mounted to the transport chamber is moved by a forklift, there is no possibility that the tip of the forklift contacts with the height position adjustment bolt or gets caught on the height position adjustment bolt, thereby overturning it. This enables smooth movement operation using a loading truck such as a forklift, thereby improving safety and operability.

[0010] In the configuration of the related art in which the adjustment bolts (e.g., jack bolts) need to be appropriately adjusted in a state where the legs provided at the lower portion of the load port are placed on the leg receiving portions having the appropriate adjustment bolts provided near the lower end of the wall surface of the transfer chamber, the entire load port needs to be temporarily tilted so that the legs provided at the lower portion of the load port are placed on the leg receiving portions. With such a configuration of the prior art, it is considered that the lifting and tilting operations of the load port, which becomes larger and heavier as the wafer becomes larger, become more complicated, thereby increasing the burden and risk of the operator.

[0011] On the other hand, for the loading port installation position adjustment mechanism according to the present disclosure, by placing the above-mentioned three-axis adjustment mechanism on the upper section or the middle section of the wall surface, the leg receiving portion arranged near the lower end of the wall surface of the handling room does not need a height position adjustment function. In view of this, the loading port installation position adjustment mechanism according to the present disclosure includes a leg arranged at the lower end portion of the base frame and a leg receiving portion arranged on the lower section of the wall surface to support the leg. The leg receiving portion includes a groove and an upward-facing surface, and the lower end of the leg is assembled into the groove. The front portion of the upward-facing surface is a portion that is farther away from the wall surface than the groove when the groove is used as a boundary, and is arranged at a lower position than the rear portion of the upward-facing surface, which is a portion that is closer to the wall surface than the groove. By doing so, the leg arranged at the lower part of the loading port can be placed on the leg receiving portion without temporarily tilting the entire loading port. In other words, during the operation of mounting the load port on the wall surface of the transport chamber, as the load port moves toward the transport chamber, the lower end of the leg passes over the upwardly facing surface of the front portion of the leg receiving portion, fits into the groove, and then abuts the rear portion to ensure that the leg remains fitted in the groove. This eliminates the need to lift the load port, thereby reducing the burden and risk to the operator.

[0012] In addition, in the loading port installation position adjustment mechanism according to the present invention, if a handle having a handle body arranged at a position separated by a predetermined distance from the wall surface of the transport chamber is provided, and the handle body is constructed to be accessible to an operator at least when the loading port is installed on the wall surface, the operator can hold the handle body and push the loading port toward the wall surface of the transport chamber, which makes it possible to cope with the increase in the size of the loading port.

[0013] According to the present disclosure, by integrating and arranging the X-axis adjustment part, the Y-axis adjustment part and the Z-axis adjustment part at the upper end part or the vertical center part of the loading port, a loading port installation position adjustment mechanism can be provided that enables the operator to adjust the left and right installation position, the front and rear installation position and the up and down installation position of the loading port relative to the wall surface of the conveying room in a relatively comfortable posture. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a side view schematically showing the relative positional relationship between an EFEM equipped with a load port and its peripheral devices in one embodiment of the present disclosure.

[0015] Figure 2 It is shown Figure 1 A simplified plan view of the relative positional relationship shown.

[0016] Figure 3is a front view showing a load port according to an embodiment, with some parts omitted.

[0017] Figure 4 is a rear view of a load port according to an embodiment.

[0018] Figure 5 is a rear view showing a load port according to an embodiment, with some parts omitted.

[0019] Figure 6 A and Figure 6 B is an explanatory diagram of the operation of the connection switching mechanism according to the embodiment.

[0020] Figure 7 A and Figure 7 B is shown corresponding to Figure 6 A and Figure 6 B is a view of a connection switching mechanism in the related art.

[0021] Figure 8 is Figure 5 The view is viewed in the direction of arrow A.

[0022] Fig. 9 is along Figure 5 A cross-sectional view taken along line BB in FIG.

[0023] Fig.10 is corresponding to Fig. 9 A view showing a state where a mapper is located at a mapping position.

[0024] Fig.11 is a front view of a load port equipped with a three-axis adjustment mechanism according to an embodiment.

[0025] Fig.12 Observed from a predetermined angle Fig.11 View of area C in FIG.

[0026] Fig.13 yes Fig.11 Magnified view of area C in FIG.

[0027] Fig.14 is along Fig.13 A cross-sectional view taken along line EE in FIG.

[0028] Fig.15 is along Fig.13 A cross-sectional view taken along line FF in FIG.

[0029] Fig.16 is a front view of a load port according to an embodiment, with some parts omitted.

[0030] Fig.17 yes Fig.16Magnified view of area Q in FIG.

[0031] Fig.18 is along Fig.16 A cross-sectional view taken along line aa in FIG.

[0032] Fig.19 Observed from a predetermined angle Fig.16 View of region R in FIG.

[0033] Fig. 20 Observed from a predetermined angle Fig.16 A view of region S in FIG. DETAILED DESCRIPTION

[0034] An embodiment of the present disclosure will now be described with reference to the accompanying drawings. The loading port installation position adjustment mechanism T according to the present embodiment is a mechanism for adjusting the installation position of the loading port 1 relative to the wall surface 2F (front wall surface) of the transport chamber 2 when the loading port 1 is installed on the wall surface 2F (front wall surface) of the transport chamber 2.

[0035] The loading port 1 is used, for example, in a semiconductor manufacturing process. Figure 1 and Figure 2 As shown, the load port 1 constitutes a part of the wall surface 2F (front wall surface) of the transport chamber 2 in the clean room, and is used to load and unload a transport target object such as a wafer W between the transport chamber 2 and a transport container 3 such as a FOUP. The load port 1 constitutes a part of the EFEM (equipment front end module) together with the transport chamber 2, and serves as an interface between the transport container 3 and the transport chamber 2. In the present embodiment, in the front-to-back direction D (see FIG. 1 ) in which the transport container 3, the load port 1, and the transport chamber 2 are arranged in this order, Figure 1 In the embodiment of the present invention, the transport container side is defined as the front side, and the transport chamber side is defined as the rear side.

[0036] like Figure 1 As schematically shown, the transport container 3 may be a FOUP 3 including a FOUP body 32, an internal space 3S of which can be opened only to the rear side via a loading / unloading port 31, and a FOUP door 33, which can open and close the loading / unloading port 31. The FOUP 3 is a known container in which a plurality of slots are provided, which are configured to accommodate wafers W as transport target objects in the corresponding slots, and which are configured to allow the wafers W to be loaded and unloaded via the loading / unloading port 31. A flange portion 35 gripped by a device (e.g., an overhead transport device (OHT)) that automatically transports the transport container 3 is provided on the upper surface of the FOUP body 32.

[0037] like Figure 1As shown in the figures, the loading port 1 includes a plate-shaped base frame 4 having an opening 41 formed to open the internal space 2S of the conveying chamber 2; a mounting table 5, which is arranged in a substantially horizontal posture to protrude to the front side from the base frame 4; a seating holding mechanism 6, which is constructed to hold the FOUP 3 conveyed from the outside on the mounting table 5; a traction mechanism 7, which is constructed to move the FOUP 3 on the mounting table 5 along the front-to-back direction D between the seating position and the delivery position of the conveying target object; a loading port door 8, which is constructed to open and close the opening 41 of the base frame 4; and a door opening / closing mechanism 9, which is constructed to open the opening 41 of the base frame 4 by moving the loading port door 8 to a door opening position retreating toward the conveying chamber 2.

[0038] The base frame 4 is arranged in an upright posture, and has a generally rectangular plate shape having an opening 41 large enough to communicate with the loading / unloading port of the FOUP 3 mounted on the mounting table 5. Figure 1 Schematically showing an opening 41 of the base frame 4. In the load port 1 of the present embodiment, the base frame 4 constitutes a part of the wall surface 2F (front wall surface) of the transport chamber 2. The lower end of the base frame 4 is provided with a leg 42 having a caster and a leg mounting portion.

[0039] The mounting table 5 is provided on the upper part of a horizontal base 50 (support base) provided at a position slightly higher than the vertical center of the base frame 4 in a substantially horizontal posture, and can mount the FOUP 3 with the FOUP body 32 facing the base frame 4. Figure 3 As shown, the mounting table 5 is provided with a plurality of protrusions 51 protruding upward. By engaging these protrusions 51 with holes (not shown) formed on the bottom surface of the FOUP 3, the FOUP 3 is positioned on the mounting table 5.

[0040] The seat holding mechanism 6 holds the FOUP 3 on the mounting table 5 by establishing a locked state in which a locking claw (not shown) provided on the mounting table 5 is hooked and fixed to a locked portion (not shown) provided on the bottom surface of the FOUP 3. Furthermore, in the load port 1 of the present embodiment, the FOUP 3 can be separated from the mounting table 5 by unlocking the locking claw from the locked portion.

[0041] The traction mechanism 7 moves the FOUP 3 on the mounting table 5 in the front-rear direction D between a seated position where the FOUP body 32 is spaced a predetermined distance from the load port door 8 and a delivery position where the FOUP body 32 is in close contact with the load port door 8. The traction mechanism 7 is configured by using a slide rail (not shown) that moves the mounting table 5 forward and backward, etc. The seat holding mechanism 6 and the traction mechanism 7 may also be regarded as mechanisms included in the mounting table 5.

[0042] exist Figure 1 , as a state in which the FOUP 3 is mounted on the mounting table 5, a state in which the bottom surface of the FOUP 3 is in contact with the upper surface of the mounting table 5 is schematically shown. However, in reality, since the FOUP 3 is supported by a plurality of protrusions 51 protruding upward from the upper surface of the mounting table 5, and the plurality of protrusions 51 are engaged with the bottom closed holes formed on the bottom surface of the FOUP 3, the upper surface of the mounting table 5 and the bottom surface of the FOUP 3 do not contact each other, and a predetermined gap is formed between the upper surface of the mounting table 5 and the bottom surface of the FOUP 3.

[0043] The load port door 8 can be in the fully closed position (see FIG. Figure 1 ), the load port door 8 moves between a door open position where the load port door 8 moves backward from the fully closed position toward the transfer chamber 2 and a fully open position where the opening space of the opening 41 is fully opened backward. Figure 3 As shown, the loading port door 8 includes a suction engagement portion 81 having a suction portion 81a capable of attracting the FOUP door 33 and an engagement claw 81b capable of engaging with an engagement hole (latch hole) of the FOUP door 33. The loading port door 8 is configured to be able to move between a fully closed position, a door open position, and a fully open position together with the FOUP door 33 while maintaining engagement with the FOUP door 33 by the suction engagement portion 81. In the present embodiment, the postures of the loading port door 8 at the fully closed position and the door open position are set to be the same posture. The movement path of the loading port door 8 between the fully open position and the fully closed position includes a path (horizontal path) in which the loading port door 8 at the fully closed position moves toward the transport chamber 2 to the door open position while maintaining its height position, and a path (vertical path) in which the loading port door 8 at the door open position moves downward to the fully open position while maintaining its front-rear position. The FOUP door 33 held by the loading port door 8 in the door open position is positioned together with the loading port door 8 at a position behind the base frame 4 (at a position completely separated from the FOUP body 32 and located in the internal space 2S of the transport chamber 2), so that the loading port door 8 in the door open position can be moved in both vertical and horizontal directions.

[0044] This movement of the load port door 8 is achieved by a door opening / closing mechanism 9 provided on the load port 1. The door opening / closing mechanism 9 moves the load port door 8 to the door open position or the fully open position, thereby allowing the internal space 3S of the FOUP 3 to communicate with the transfer chamber 2 via the opening 41 of the base frame 4 maintained in the open state. The door opening / closing mechanism 9 is composed of, for example, a movable block (not shown) for supporting a support frame 80 (see FIG. 1 ) supporting the load port door 8 and a slide rail (not shown). Figure 4 and 5 ) so that the support frame 80 can move in the front-to-back direction D, and the slide rail is used to support the movable block so that the movable block can move in the vertical direction H. The door opening / closing mechanism 9 moves the loading port door 8 in the front-to-back direction D and the up-down direction H by operating a driving source (not shown) such as an actuator. A construction in which an actuator for the front-to-back movement and an actuator for the up-down movement are provided separately. However, in terms of reducing the number of parts, a construction in which the loading port door 8 is moved in the front-to-back direction and the up-down direction by using a common actuator as a driving source is better.

[0045] like Figure 4 and Figure 5 As shown, the load port door 8 according to the present embodiment includes a connection switching mechanism 83 for operating the engagement claw 81b of the attraction engagement portion 81 to release the engagement state (locked state) between the FOUP door 33 and the FOUP body 32, thereby establishing a state (unlocked state) in which the FOUP door 33 can be removed from the FOUP body 32. The connection switching mechanism 83 is a mechanism that rotates the engagement claw 81b (latch key) that can be engaged with an engagement hole (latch hole) (not shown) provided on the FOUP door 33 within a predetermined angle range. In the present embodiment, the connection switching mechanism 83 includes a connecting rod 84 for connecting a pair of engagement claws 81b provided on the left and right sides to each other, and a cylinder 85 for moving the connecting rod 84 in the left-right width direction W in response to the forward-backward movement of the cylinder rod 851, and rotating the left-right pair of engagement claws 81b synchronously in response to the forward-backward movement of the cylinder 85. Figure 4 and Figure 5 is a view with a portion of the door cover 89 removed to make the interior visible.

[0046] like Figure 6 A and Figure 6 As schematically shown in FIG. 2B , in a state where the engagement claw 81 b is engaged with the engagement hole of the FOUP door 33, the air cylinder 85 is operated to move the piston rod 851 from the first stroke position (1) to the second stroke position (2). Therefore, the engagement claw 81 b rotates while engaging with the engagement hole. As a result, a state (unlocked state) in which the FOUP door 33 can be removed from the FOUP body 32 can be established (see FIG. 2B ). Figure 6 B). On the contrary, in a state where the engagement claw 81b is engaged with the engagement hole of the FOUP door 33, when the air cylinder 85 is operated to move the piston rod 851 from the second stroke position (2) to the first stroke position (1), the engagement claw 81b rotates while engaging with the engagement hole. As a result, a state (locked state) in which the FOUP door 33 cannot be removed from the FOUP body 32 can be established (see Figure 6 A).

[0047] In order to reliably open and close the FOUP door 33 through the loading port door 8, it is necessary to reliably insert the engagement claw 81b into the engagement hole of the FOUP door 33 to allow them to engage with each other, and to rotate the engagement claw 81b in the engaged state. Figure 7 A and Figure 7 As schematically shown in FIG. 1B , a configuration is adopted in which a cylinder bracket 86 provided at a tip portion of a piston rod 851 of a cylinder 85 advances and retreats together with the piston rod 851 in the width direction W so that a connecting rod 84 connected to the cylinder bracket 86 advances and retreats together with the piston rod 851 in the width direction W. A configuration is also adopted in which a stopper bolt 87 for determining a distance of forward and backward movement of the cylinder bracket 842 is provided on the loading port door 8, and in which when the cylinder bracket 86 comes into contact with the stopper bolt 87, the forward and backward movement of the piston rod 851 is stopped to stop the rotation of the engaging claw 81b associated with the forward and backward movement of the piston rod 851, thereby determining the rotation angle of the engaging claw 81b. Figure 7 A and Figure 7 B shows the locked state and the unlocked state respectively.

[0048] In such a configuration of the related art, there is a possibility that dust may be generated due to the contact between the stopper bolt 841 and the cylinder bracket 842 and the dust may flow into the transfer chamber 2 .

[0049] Therefore, in this embodiment, if Figure 6 A and Figure 6 As shown in B, a stopper bolt 87 is provided inside the cylinder 85 which is kept airtight by an appropriate sealing structure. Figure 6B, the base end (proximal end) of the piston rod 851 contacts the stop bolt 87 to stop the forward and backward movement of the piston rod 851 (specifically, the movement in the backward direction), and stops the rotation of the engagement claw 81b associated with the forward and backward movement of the piston rod 851, thereby determining the rotation angle of the engagement claw 81b. In particular, in the present embodiment, an adjustment bolt is used as a stop bolt 87, and the end position of the adjustment bolt in the cylinder 85 (the position where it contacts the piston rod 851) is adjustable. In addition, by providing a shock-absorbing material 88 (cushion pad) in contact with the base end of the piston rod 851 at a predetermined position on the end side in the cylinder 85, the forward movement of the piston rod 851 can be limited. In addition, the shock-absorbing material 88 (cushion pad) can be provided at a predetermined position on the stop bolt 87 to limit the forward movement of the piston rod 851.

[0050] According to this configuration, although contact between parts occurs inside the cylinder 85 when the cylinder 85 is driven, the inside of the cylinder 85 is maintained at a high airtightness level by an appropriate sealing structure, so dust generated inside the cylinder 85 is retained inside the cylinder 85. As a result, it is possible to prevent or suppress dust generated inside the cylinder 85 from being released to the outside of the cylinder 85. In addition, compared with the configuration of the related art, it is not necessary to provide a separate dedicated stopper bolt outside the cylinder 85, which can contribute to simplifying the configuration and reducing the number of parts, thereby reducing costs.

[0051] In addition, according to the present embodiment, the loading port includes a mapping mechanism M which maps information related to the installation status of the wafer W in each slot 34 of the FOUP 3 located at the transfer position, including the presence or absence of the wafer W, when the opening 41 of the base frame 4 is opened by the door opening / closing mechanism 9.

[0052] like Figure 1 , Figure 4 , Figure 5 and Figure 8 As shown, the mapping mechanism M includes a mapper M2 and a mapping arm M3 (mapping moving part) supporting the mapper M2, and the mapper M2 has a mapping sensor M1 (a transmitter M11 and a receiver M12) at its end portion, and the mapping sensor M1 can detect the presence or absence of the transport target object W stored in multiple stages in the height direction H through the multiple stages of slots provided in the FOUP 3. The mapping mechanism M is capable of detecting the presence or absence and the storage posture of the transport target object W in the FOUP 3.

[0053] like Figure 8 and Fig. 9 (Respectively in Figure 5 The view observed in the direction of arrow A and along Figure 5As shown in the cross-sectional view taken along line BB in FIG. 1 , the mappers M2 are arranged in pairs on the left and right sides and spaced apart by a predetermined distance in the width direction W in a form in which they protrude forward from a predetermined position of the mapping arm M3. The mappers M2 have mapping sensors M1 attached to their end portions. Figure 8 and Fig. 9 The hatching (parallel oblique lines) indicating the cutting surface are omitted. The mapping sensor M1 is composed of an emitter M11 (light-emitting sensor) that emits a light beam (linear light) as a signal and a receiver M12 (light-receiving sensor) that receives the signal emitted from the emitter M11. The mapping sensor M1 can also be composed of an emitter and a reflecting part that reflects the linear light emitted from the emitter toward the emitter. In this case, the emitter also plays the role of a receiver. In order to prevent the mapping sensors M1 (M11 and M12) whose optical axes are horizontally oriented to the left and right from interfering with the transport target object W to be detected during the mapping process, the left and right span between the mapping sensors M1 (M11 and M12) is set to an appropriate value according to the plan view size of the transport target object W.

[0054] The mapping arm M3 makes the position of the mapper M2 in the front-rear direction D Fig.10 The position shown (ie, the mapping position (P1) where the mapping sensor M1 can detect the wafer W accommodated in the FOUP 3 via the opening 41 in the open state) is the same as Figure 8 and Fig. 9 The wafer moves between the positions shown (ie, the wafer mapping impossible position (P2) where the mapping sensor M1 cannot detect that the wafer W is accommodated in the FOUP 3). Fig.10 is corresponding to Fig. 9 , showing a state where the mapper M2 is located at the mapping position (P1).

[0055] like Figure 3 and Figure 4 As shown, the mapping arm M3 of the present embodiment is integrally or as a single unit formed like a downward U-shape, which has an upper frame portion M31 and a pair of left and right side frame portions M32 extending downward from both ends of the upper frame portion M31. The mapping arm M3 rotates within a predetermined angle range around the lower end portion of each side frame portion M32 as a rotation center axis to move the position of the mapper M2 between the mapping position (P1) and the wafer mapping impossible position (P2).

[0056] In particular, in the present embodiment, the lower end portion of each side frame portion M32 is rotatably attached to the side surface of the door cover 89 that covers the peripheral portion of the load port door 8 from the transport chamber 2. In this regard, the mapping mechanism M according to the present embodiment includes a tilting mechanism M4 that tilts the entire mapping arm M3 around a pivot point at a mounting portion between the mapping arm M3 and the door cover 89. Fig. 9 and Fig.10 As shown, the tilt mechanism M4 includes a mapping arm driving cylinder M41, a mapping arm driving crank M42 having an end portion (lower end portion) connected to the end portion of the mapping arm driving cylinder M41 (the end portion of the cylinder rod), and a mapping arm pivot shaft portion M43 (corresponding to the pivot point) connected to the other end portion (upper end portion) of the mapping arm driving crank M42. In the present embodiment, the mapping arm driving cylinder M41 and the mapping arm driving crank M42 are disposed in the inner space of the door cover 89. In addition, most of the mapping arm pivot shaft portion M43 is disposed in the inner space of the door cover 89 except for a predetermined area on one end side fixed to the lower end of the mapping arm M3 (the lower end of the side frame M32). The mapping arm pivot shaft portion M43 is disposed in an orientation in which its axial direction consistent with the longitudinal direction extends in the width direction W of the loading port 1. The lower end portion of the mapping arm M3 (the lower end of the side frame M32) is fixed to one end portion of the mapping arm pivot shaft portion M43 in a manner that allows it to rotate integrally, and the mapping arm drive crank M42 is fixed to the other end portion of the mapping arm pivot shaft portion M43 in a manner that allows it to rotate integrally. In the present embodiment, the mounting position of the mapping arm pivot shaft portion M43 is set to a position slightly lower than the center position of the side frame M32 in the height direction (a position close to the center position of the loading port door 8 in the height direction) (see FIG. Figure 5 wait).

[0057] According to this tilt mechanism M4 (mapping arm driving mechanism), the mapping arm driving crank M42 moves between the first position (1) and the second position (2) together with the forward and backward movement of the mapping arm driving cylinder M41. Fig.10 As shown, when the mapping arm driving crank M42 is in the first position (1), the mapper M2 can be located at the mapping position (P1). Fig. 9 As shown, when the mapping arm driving cylinder M41 is operated to move the mapping arm driving crank M42 from the first position (1) to the second position (2), the mapping arm pivot shaft part M43 rotates together with the movement of the mapping arm driving crank M42, and the mapping arm M3 tilts around the mapping arm pivot shaft part M43 by an amount corresponding to the rotation angle, so that the mapper M2 can be switched from the mapping position (P1) to the wafer mapping impossible position (P2).

[0058] In the present embodiment, a first position detection sensor (not shown) for detecting that the mapping arm driving crank M42 is in the first position (1) and a second position detection sensor (not shown) for detecting that the mapping arm driving crank M42 is in the second position (2) are provided. The driving of the mapping arm driving cylinder M41 and the tilting of the mapping arm M3 by the tilting mechanism M4 are controlled based on the detection signals of the first position detection sensor and the second position detection sensor, so that the mapper M2 can be accurately positioned at the mapping position (P1) and the wafer mapping impossible position (P2). In addition, a counterweight (not shown) is provided below the lower end of each side frame portion M32 to stabilize the tilting operation of the tilting mechanism M4 on the mapping arm M3. The mapping arm M3 according to the present embodiment moves integrally with the door cover 89 in the front-to-back direction and the up-and-down direction, and moves independently of the door opening / closing mechanism 9 through the tilting mechanism M4.

[0059] The inner space of the door cover 89 is kept sealed. Therefore, during the forward and backward movement of the mapping arm driving cylinder M41, even if particles are generated at the contact portion between the mapping arm driving cylinder M41 and the mapping arm driving crank M42 or at the contact portion between the mapping arm driving crank M42 and the mapping arm pivot shaft portion M43, the particles can be confined in the inner space of the door cover 89. As a result, it is possible to prevent or suppress the situation where particles are discharged from the inner space of the door cover 89 to the inner space 2S of the conveying chamber 2. In the related art, the rotation center axis of the mapping arm is set at a position lower than the door cover 89, for example, at a predetermined position on the support frame 80 supporting the loading port door 8, and the tilting mechanism is also arranged around it. Therefore, there is a possibility that particles generated at the contact portion between the mapping arm driving cylinder and the mapping arm driving crank or at the contact portion between the mapping arm driving crank and the mapping arm pivot shaft portion are discharged into the inner space of the conveying chamber or fly upward toward the inner space of the conveying chamber. On the other hand, according to the configuration of the tilting mechanism M4 of the present embodiment that tilts and drives the mapping arm M3, these problems of the related art can be solved.

[0060] Furthermore, according to the configuration in which the mapping arm M3 of the present embodiment is tilted and driven by the tilt mechanism M4, the arm length of the mapping arm M3 (the length from the central rotation axis M43 of the mapping arm M3 to the upper frame portion M31 which is the upper end of the mapping arm M3) is shortened compared to the configuration in the related art in which the central rotation axis of the mapping arm is set at a position lower than the door cover 89 (for example, at a predetermined position on the support frame 80 supporting the loading port door 8). Therefore, compared to the configuration in the related art, vibration during operation of the mapping arm M3 can be more effectively suppressed, thereby contributing to improved mapping accuracy.

[0061] The loading port 1 according to the present embodiment may include a bottom purge section, which is provided on the mounting table 5 and is capable of injecting an ambient gas (also referred to as a purge gas) into the FOUP 3 from the bottom surface side of the FOUP 3 and replacing the gas atmosphere in the FOUP 3 with the ambient gas, the ambient gas being a properly selected gas such as nitrogen, an inert gas, or dry air (nitrogen or dry air is mainly used in the present embodiment). The bottom purge section mainly includes a plurality of nozzles (not shown) provided at predetermined positions on the mounting table 5, which function as bottom purge injection nozzles that eject predetermined ambient gases and bottom purge exhaust nozzles that exhaust the gas atmosphere in the FOUP 3. The plurality of nozzles may be connected in a state of being assembled into an injection port (not shown) and an exhaust port (not shown) provided at the bottom of the FOUP 3. The purge process can be performed in the following manner: ambient gas is supplied from a bottom purge injection nozzle into the internal space 3S of FOUP 3 through an injection port, and the gas atmosphere in the internal space 3S of FOUP 3 is discharged from a bottom purge discharge nozzle through an exhaust port (the gas atmosphere is air or a low-cleanliness ambient gas other than air for a predetermined time from the start of the purge process, and is a high-cleanliness ambient gas filled in the internal space 3S of FOUP 3 after a predetermined time).

[0062] Such a load port 1 constitutes an EFEM together with a transfer chamber 2 in which a transfer robot 21 is provided. Figure 2 As shown, a plurality of load ports 1 (for example, three load ports) are arranged side by side on the front surface (front wall surface) 2F of the transfer chamber 2. The operation of the EFEM is controlled by a controller ( Figure 2 The control unit 1C shown in the figure) and the controller of the entire EFEM ( Figure 1 Controlled by the control unit C) shown.

[0063] In the internal space 2S of the transport chamber 2, a transport robot 21 capable of transporting a transport target object such as a wafer W between the FOUP 3 on the load port 1 and the process chamber R is provided. Figure 1 and Figure 2As shown, the transport robot 21 includes an arm 212 and a travel unit, the arm 212 is configured to connect, for example, a plurality of link elements to each other so as to be horizontally rotatable, and a transport target object gripping portion 211 (hand) is provided at the end portion of the arm 212, and the travel unit is configured to rotatably support an arm base constituting the base end of the arm 212 and is configured to travel in the width direction W of the transport chamber 2 (a parallel direction to the loading port 1). The transport robot 21 has a link structure (multi-joint structure) whose shape changes between a folded state in which the arm length is the smallest and an extended state in which the arm length is longer than the folded state. A transport robot 21 can be used in which a plurality of individually controllable hands 211 are provided in multiple stages in the height direction at the end portion of the arm 212.

[0064] The transport chamber 2 is configured so that the inner space 2S is substantially sealed by connecting the load port 1 and the process chamber R. Figure 1 As shown, a downflow, that is, an airflow from top to bottom, is formed in the internal space 2S of the transport chamber 2. Therefore, even if particles that contaminate the surface of the wafer W exist in the internal space 2S of the transport chamber 2, the particles can be pushed downward by the downflow, which makes it possible to suppress the attachment of particles to the surface of the wafer W during transport. Figure 1 In the figure, the gas flow in the transport chamber 2 forming the downflow is schematically indicated by arrows. An EFEM in which an appropriate station such as a buffer station and an aligner are arranged on the side of the transport chamber 2 or in the inner space 2S of the transport chamber 2 may also be formed.

[0065] In the present embodiment, a plurality of processing chambers R (semiconductor processing equipment) (three processing chambers in the illustrated example) are arranged side by side in the width direction W on the wall surface 2B (rear wall surface) of the transport chamber 2 facing the wall surface 2F (front wall surface) on which the loading port 1 is arranged. Each processing chamber R is configured to perform a different appropriate process. Examples of processes performed in an intermediate process or a later process of a semiconductor manufacturing process include a back grinding process, a wafer stacking process, and a dicing process. The operation of the processing chamber R is controlled by a controller ( Figure 1 In this regard, the controller of the entire process chamber R (control unit RC) and the controller of the entire EFEM (control unit C) are higher-level controllers of the control unit 1C of the load port 1.

[0066] The inner space RS of each process chamber R, the inner space 2S of the transfer chamber 2, and the inner space 3S of the FOUP 3 placed on each load port 1 are maintained at a high cleanliness. On the other hand, the space where the load port 1 is located (in other words, the outside of the process chamber and the outside of the EFEM) has a relatively low cleanliness. Figure 1 and Figure 21 is a view schematically showing a relative positional relationship between the load port 1 and the transfer chamber 2 , and a relative positional relationship between the EFEM provided with the load port 1 and the transfer chamber 2 and the process chamber R. FIG.

[0067] The loading port installation position adjustment mechanism T according to the present embodiment is a mechanism for adjusting the installation position of the loading port 1 relative to the wall surface 2F of the transport chamber 2 when the loading port 1 is placed and installed on the wall surface (front wall surface 2F) of the transport chamber 2.

[0068] like Fig.11 As shown, the load port installation position adjustment mechanism T includes: an X-axis adjustment portion T1 configured to adjust the position of the load port 1 in the width direction W (left-right direction) relative to the wall surface (front wall surface 2F) of the transport chamber 2; a Y-axis adjustment portion T2 configured to adjust the position (inclined position) of the load port 1 in the thickness direction D (front-rear direction or depth direction) relative to the wall surface (front wall surface 2F) of the transport chamber 2; and a Z-axis adjustment portion T3 configured to adjust the position of the load port 1 in the height direction H (up-down direction) relative to the wall surface (front wall surface 2F) of the transport chamber 2. These three-axis direction adjustment portions (X-axis adjustment portion T1, Y-axis adjustment portion T2, and Z-axis adjustment portion T3) are combined into a three-axis adjustment mechanism T4, which is located at the upper corner portion of the base frame 4.

[0069] The loading port installation position adjustment mechanism T includes a loading port guide portion T5 that can be placed (installed) on the upper corner of the base frame 4, and includes an X-axis movable body T11 that can move forward and backward in the width direction W relative to the loading port guide portion T5, a Y-axis movable body T21 that can move forward and backward in the front-to-back direction D relative to the loading port guide portion T5, and a Z-axis movable body T31 that can move forward and backward in the height direction H relative to the loading port guide portion T5.

[0070] like Fig.12 and Fig.13 As shown, the X-axis movable body T11 is constituted by using an X-axis jack bolt T11 arranged in a posture that the axial direction of the X-axis jack bolt T11 coincides with the width direction W of the loading port 1. When the operator applies an operating force to tighten the X-axis jack bolt T11, the X-axis jack bolt T11 moves in a direction in which the tip of the bolt is pressed against the side surface T51 of the loading port guide T5. The X-axis jack bolt T11 is held by an X-axis jack bolt stay T12 provided at a position facing the side surface T51 of the loading port guide T5 so as to advance and retreat. The X-axis jack bolt stay T12 is fixed to the base frame 4. In addition, the X-axis jack bolt stay T12 is provided with an X-axis nut T13 threadedly coupled to the X-axis bolt T11, and the position of the X-axis jack bolt T11 can be fixed by the X-axis nut T13.

[0071] The X-axis adjustment portion T1 advances and retreats the X-axis movable body T11 in the width direction W of the load port 1, which enables the entire load port 1 including the X-axis jack bolt stay T12 to be moved relative to the load port guide T5 in the width direction W. In the present embodiment, when a tightening operation force is applied to the X-axis movable body T11, the entire load port 1 including the X-axis jack bolt stay T12 is moved away from the load port guide T5 (specifically, the side surface T51) in the width direction W.

[0072] like Fig.14 As shown, the Y-axis movable body T21 is constituted by using a Y-axis adjustment bolt T21 arranged in a posture that the axial direction of the Y-axis adjustment bolt T21 coincides with the thickness direction D of the loading port 1. When the operator applies an operating force to tighten the Y-axis adjustment bolt T21, the Y-axis adjustment bolt T21 moves in a direction in which the tip of the bolt is pressed against the wall surface (front wall surface 2F) of the conveying chamber 2. The Y-axis adjustment bolt T21 is held in the loading port guide T5 so as to advance and retreat. In the loading port guide T5, a threaded hole T50 is formed that penetrates the loading port guide T5 in the thickness direction, and the Y-axis adjustment bolt T21 is threadedly connected in the threaded hole T50. In addition, a Y-axis nut T22 is provided at a position of the loading port guide T5 that overlaps with the threaded hole T50 in the thickness direction D, and the Y-axis adjustment bolt T21 is threadedly connected in the Y-axis nut T22 and the threaded hole T50. By tightening the Y-axis nut T22, the movement of the Y-axis adjustment bolt T21 in the thickness direction D can be limited, and the position of the Y-axis adjustment bolt T21 can be fixed. In the present embodiment, a hollow cylindrical bolt that penetrates in the axial direction is used as the Y-axis adjustment bolt T21, and the loading port mounting bolt T6 is inserted into the axial hollow portion T21a of the Y-axis adjustment bolt T21. The total length of the loading port mounting bolt T6 is longer than the total length of the Y-axis adjustment bolt T21. The end portion of the loading port mounting bolt T6 can be directly or via a nut (see Fig.14 ) is inserted and threadedly coupled into a mounting hole 2t formed on a wall surface (front wall surface 2F) of the transfer chamber 2. The head of the load port mounting bolt T6 is disposed adjacent to one end (front end) of the Y-axis adjustment bolt T21.

[0073] The Y-axis adjustment portion T2 advances and retreats the Y-axis movable body T21 in the thickness direction D of the loading port 1, which enables the entire loading port 1 to be moved in the thickness direction D (depth direction or tilt direction) relative to the wall surface (front wall surface 2F) of the transport chamber 2. In the present embodiment, when a tightening operation force is applied to the Y-axis movable body T21, the entire loading port 1 is moved in the thickness direction D away from the wall surface (front wall surface 2F) of the transport chamber 2.

[0074] like Fig.15 As shown, the Z-axis movable body T31 is constituted by using a Z-axis jack bolt T31 arranged in a posture that the axial direction of the Z-axis jack bolt T31 coincides with the height direction H of the loading port 1. The Z-axis jack bolt T31 is held by a Z-axis jack bolt stay T32 provided at a position facing the downward facing surface T52 of the loading port guide portion T5 so as to move forward and backward. The Z-axis jack bolt stay T32 is fixed to the base frame 4. When the operator applies an operating force to tighten the Z-axis jack bolt T31, the Z-axis jack bolt T31, whose tip (upper end) is inserted into the insertion hole T53 formed on the downward facing surface T52 of the loading port guide portion T5, moves upward. Then, the head of the Z-axis jack bolt T31 pushes the Z-axis jack bolt stay T32 upward. Therefore, the entire base frame 4 on which the Z-axis jack bolt stay T32 is fixed moves upward, and finally the entire loading port 1 moves upward. In addition, a Z-axis nut T33 threadedly coupled to the Z-axis jack bolt T31 is provided on the downward facing surface T52 of the load port guide T5. The Z-axis nut T33 restricts movement of the Z-axis jack bolt T31 in the height direction H, thereby fixing the position of the Z-axis jack bolt T31.

[0075] The Z-axis adjustment portion T3 advances and retreats the Z-axis movable body T31 in the height direction H of the load port 1, thereby moving the entire load port 1 including the Z-axis jack bolt stay T32 relative to the load port guide T5 in the height direction H. In the present embodiment, when a tightening operation force is applied to the Z-axis movable body T31, the entire load port 1 including the Z-axis jack bolt stay T32 is moved toward the load port guide T5 (upward) in the height direction H, as described above.

[0076] In this embodiment, the X-axis jack bolt stay T12 and the Z-axis jack bolt stay T32 are integrally formed and fixed to the base frame 4 (see Fig.12 and Fig.13 ).

[0077] The loading port guide portion T5 is a plate-shaped portion including a side surface T51 on which the end of the X-axis movable body T11 abuts and a downwardly facing surface T52 having an insertion hole T53 into which the Z-axis movable body T31 can be inserted. Fig.16As shown, a loading port guide T5 having different thickness dimensions is applied while using the central portion in the width direction W as a boundary, and a portion against which the end of the X-axis movable body T11 abuts and a portion in which the insertion hole T53 is formed are provided in a relatively thick portion. In addition, in the relatively thick portion of the loading port guide T5, a plate mounting bolt hole T54 is formed, into which a plate mounting bolt T7 for mounting the loading port guide T5 on the base frame 4 can be inserted. The plate mounting bolt hole T54 is set to a size that allows the plate mounting bolt T7 to be inserted with sufficient play. In the present embodiment, the plate mounting bolt hole T54 is formed at a plurality of positions (two positions in the example shown) at a predetermined pitch in the height direction H. In the present embodiment, the loading port guide T5 can be fixed to the base frame 4 by inserting the plate mounting bolt T7 into the plate mounting bolt hole T54 while covering the plate mounting bolt hole T54 with a plate cover T8 and threading the end of the plate mounting bolt T7 into the plate mounting bolt fixing hole 4t formed on the base frame 4.

[0078] like Fig.14 As shown, a threaded hole T50 into which the Y-axis adjustment bolt T21 is threadedly coupled is formed in a relatively thin portion of the loading port guide T5. A predetermined area of ​​the loading port guide T5 including a position where the threaded hole T50 is formed does not directly overlap with the base frame 4 due to a cutout 4K formed on the base frame 4, and faces the wall surface (front wall surface 2F) of the transport chamber 2.

[0079] The loading port installation position adjustment mechanism T according to the present embodiment includes, as its main element, a three-axis adjustment mechanism T4 which combines an X-axis adjustment portion T1, a Y-axis adjustment portion T2, and a Z-axis adjustment portion T3, and is arranged at two corners of the upper portion of the base frame 4. By undergoing the process described below at each arrangement position, the installation position of the loading port 1 relative to the wall surface (front wall surface 2F) of the transfer chamber 2 can be adjusted.

[0080] First, as a preparation for the three-axis adjustment mechanism T4, the plate mounting bolt T7, the X-axis jack bolt T11 as the X-axis movable body T11, and the Z-axis jack bolt T31 as the Z-axis movable body T31 are loosened. In this preparation state, the loading port 1 is moved to a position close to the wall surface (front wall surface 2F) of the conveying chamber 2 with the base frame 4 maintaining a vertical posture. Next, the loading port mounting bolt T6 is inserted (or can be inserted in advance) into the axial hollow portion T21a of the Y-axis adjustment bolt T21, and the end portion of the loading port mounting bolt T6 is inserted and threadedly coupled to the mounting hole 4t of the base frame 4 directly or via a nut. It is important that the loading port mounting bolt T6 is loosely tightened at this time, and the loading port guide portion T5 is allowed to move about several millimeters in each of the width direction W (X-axis direction), the thickness direction D (Y-axis direction), and the height direction H (Z-axis direction) relative to the base frame 4.

[0081] Next, the plate mounting bolt T7 is threadedly coupled and tightly fastened into the plate mounting bolt fixing hole 4t formed on the base frame 4. This enables the loading port guide T5 to be fixed to the base frame 4. Next, the Y-axis mounting position adjustment process is performed by the Y-axis adjustment portion T2. ​​Specifically, when a tightening operation force is applied to the Y-axis adjustment bolt T21, the entire loading port 1 moves away from the wall surface (front wall surface 2F) of the transport chamber 2, and when a loosening operation force is applied to the Y-axis adjustment bolt T21, the entire loading port 1 moves toward the wall surface (front wall surface 2F) of the transport chamber 2. By appropriately applying such an operation force, the position of the entire loading port 1 relative to the wall surface (front wall surface 2F) of the transport chamber 2 in the thickness direction D can be adjusted in units of several millimeters. In the present embodiment, the position of the loading port 1 at the time of initial setting before the Y-axis adjustment process is set as a reference position, and the loading port 1 is configured to be able to move a maximum of +2 mm (2 mm forward) from the reference position in the Y-axis direction (front-rear direction D). After the position in the Y-axis direction is adjusted, the position of the Y-axis adjustment bolt T21 is fixed by applying an operating force to tighten the Y-axis nut T22 provided on the load port guide T5 .

[0082] Next, the Z-axis mounting position adjustment process is performed by the Z-axis adjustment unit T3. Specifically, when a tightening operation force is applied to the Z-axis jack bolt T31, the entire loading port 1 including the Z-axis jack bolt stay T32 moves upward relative to the wall surface (front wall surface 2F) of the transport chamber 2, and when a loosening operation force is applied to the Z-axis jack bolt T31, the entire loading port 1 including the Z-axis jack bolt stay T32 moves downward relative to the wall surface (front wall surface 2F) of the transport chamber 2. By appropriately applying such an operation force, the position of the entire loading port 1 in the height direction H relative to the wall surface (front wall surface 2F) of the transport chamber 2 can be adjusted in units of several millimeters. In the present embodiment, the position of the loading port 1 after the Y-axis adjustment process is set as the Z-axis reference position, and the loading port 1 is constructed to be movable in the Z-axis direction (up and down direction H) within a range of ±5 mm from the Z-axis reference position (within a range of 10 mm). After the position in the Z-axis direction is adjusted, the position of the Z-axis jack bolt T31 is fixed by applying an operating force for tightening the Z-axis nut T33 provided on the load port guide T5 .

[0083] Next, the X-axis mounting position adjustment process is performed by the X-axis adjustment part T1. Specifically, when a tightening operation force is applied to the X-axis jack bolt T11, the entire loading port 1 including the X-axis jack bolt stay T12 moves to one of the left and right sides (the left side in the illustrated example) relative to the loading port guide T5 temporarily fixed on the wall surface (front wall surface 2F) of the transport chamber 2, and when a loosening operation force is applied to the X-axis jack bolt T11, the entire loading port 1 moves to the other of the left and right sides (the right side in the illustrated example) relative to the loading port guide T5. By appropriately applying such an operation force, the position of the entire loading port 1 in the width direction W relative to the wall surface (front wall surface 2F) of the transport chamber 2 can be adjusted in units of several millimeters. In the present embodiment, the position of the loading port 1 after the Z-axis adjustment process is set as the X-axis reference position, and the loading port 1 is configured to be movable in the X-axis direction (left-right direction) within a range of ±5 mm from the X-axis reference position (within a range of 10 mm). After the position in the X-axis direction is adjusted, the position of the X-axis jack bolt T11 is fixed by applying an operating force for tightening the X-axis nut T13 provided on the X-axis jack bolt stay T12.

[0084] As described above, by sequentially performing the Y-axis mounting position adjustment process, the Z-axis mounting position adjustment process, and the X-axis mounting position adjustment process, the three-axis mounting position of the entire load port 1 can be adjusted relative to the wall surface (front wall surface 2F) of the transfer chamber 2. The order of the mounting position adjustment process is not limited to the order of i) the Y-axis mounting position adjustment process, ii) the Z-axis mounting position adjustment process, and iii) the X-axis mounting position adjustment process, and can be performed in any appropriate order.

[0085] Finally, the loading port mounting bolt T6 screwed with a certain play (relaxed state) into the mounting hole 2t on the wall surface (front wall surface 2F) of the transport chamber 2 is tightly tightened. This makes it possible to maintain a state in which the loading port guide T5 and at least the vicinity of the area of ​​the loading port 1 to which the loading port guide T5 is fixed do not move in any direction relative to the wall surface (front wall surface 2F) of the transport chamber 2.

[0086] In the loading port installation position adjustment mechanism T according to the present embodiment, the three-axis adjustment mechanism T4 is provided at each of the two ends of the upper section of the base frame 4, and each three-axis adjustment mechanism T4 is constructed to be individually adjustable. Therefore, the operator is not forced to adjust the position of the loading port 1 in the height direction H by approaching the jacking bolts in the recessed position provided at the bottom of the base frame 4 in a crawling posture as in the related art, but can smoothly adjust the installation position of the loading port 1 by approaching the three-axis adjustment mechanism T4 in a standing posture. This makes it possible to improve operability and shorten the installation operation time. In addition, the three-axis adjustment mechanism T4 can be installed on the wall surface (front wall surface 2F) of the conveying chamber 2 by using the mounting hole 2t, and the formation position of the mounting hole 2t is specified by the SEMI standard on the wall surface (front wall surface 2F) of the conveying chamber 2. There is no need to set a dedicated mounting hole on the wall surface (front wall surface 2F) of the conveying chamber 2. The three-axis adjustment mechanism T4 can be easily placed and installed on the existing wall surface (front wall surface 2F) of the transfer chamber 2, which also contributes to reducing the introduction cost.

[0087] Furthermore, according to the load port mounting position adjustment mechanism T of the present embodiment, it is not necessary to arrange the height position adjustment jack bolts at the bottom of the base frame 4 in a posture in which the jack bolts protrude further downward than the surrounding parts. Therefore, for example, when a single load port 1 or the entire EFEM including the load port 1 mounted to the transport chamber 2 is moved by a forklift, it is unlikely that the forklift tip will come into contact with or get caught on the exposed portion (lower end portion) of the height position adjustment jack bolt, thereby causing the forklift to overturn. This makes it possible to reduce safety risks.

[0088] like Figure 16 to Figure 18 As shown in , the loading port installation position adjustment mechanism T according to the present embodiment includes a leg L1 provided at the bottom of the loading port 1 and a leg receiving portion L2 provided on the lower portion of the wall surface (front wall surface 2F) of the transport chamber 2. By placing the leg L1 on the leg receiving portion L2, the loading port 1 can be installed in a state that complies with the SEMI standard. In this regard, Fig.16 is a front view of the lower half of load port 1, Fig.17 yes Fig.16A magnified view of region Q in , with some parts removed, Fig.18 is along Fig.17 A cross-sectional view taken along line aa in FIG.

[0089] In this embodiment, if Fig.18 As shown, a block leg receiving portion L2 is used in which a groove L21 is continuously formed in the width direction W, and the lower end portion of the leg L1 is fitted into the groove L21. Fig.17 and Fig.18 In the embodiment, the lifting bolt is illustrated as the leg L1, but a simple rod-shaped part may also be used. Fig.18 As shown, as a block-shaped leg receiving portion L2 that supports the lower end of such a leg L1 in a state where the lower end of such a leg L1 is accommodated in the groove L21, a leg receiving portion is used in which the height of the upward-facing surface is different in the front and rear of the groove L21. Specifically, the upward-facing surface of the front side of the groove L21 (the front upward-facing surface L22) is located at a lower position than the upward-facing surface of the rear side of the groove L21 (the rear upward-facing surface L23). Therefore, the depth from the front upward-facing surface L22 to the bottom of the groove L21 is smaller than the depth from the rear upward-facing surface L23 to the bottom of the groove L21.

[0090] The leg receiving portions L2 are fixed to the lower mounting bracket 2U, and the lower mounting bracket 2U is fixed to the lower portion of the wall surface (front wall surface 2F) of the transport chamber 2. In the present embodiment, the legs L1 are provided at the lower end portions on the left and right sides of the load port 1, and the leg receiving portions L2 are provided at positions corresponding to the legs L1 in the lower mounting bracket 2U.

[0091] In addition, if Fig.16 , Fig.19 and Fig. 20 As shown, the loading port installation position adjustment mechanism T according to the present embodiment includes a handle K, which can be grasped by an operator to apply a pressing force that moves the entire loading port 1 toward the wall surface (front wall surface 2F) of the transport chamber 2 when the loading port 1 is installed on the wall surface (front wall surface 2F) of the transport chamber 2. In this regard, Fig.19 Viewed from the side of load port 1 Fig.16 The stereogram of region R in Fig. 20 is viewed from the other side of load port 1 Fig.16 Stereoscopic image of area S in . Fig.19 and Fig. 20 A state in which some parts around the handle K are removed is shown.

[0092] The handle K includes a handle receiving portion K1 and a rod-shaped handle body K2. The handle receiving portion K1 has a base end fixed to the base frame 4 and extending forward. The rod-shaped handle body K2 is supported in an upright posture by the end portion of the handle receiving portion K1. The handle body K2 is supported by the handle receiving portion K1 in a use posture in which the handle body K2 protrudes upward from the handle receiving portion K1 (see Fig.19 ) and the handle body K2 are stored in the cover 50 (see Fig.16 ) in the internal space of the storage location (see Fig. 20 ) to change its posture. In the present embodiment, a pair of handles K are provided at positions of the left and right sides of the base frame 4 along the width direction W where the mounting table 5 is clamped.

[0093] With the loading port installation position adjustment mechanism T according to the present embodiment, when the loading port 1 is installed on the wall surface (front wall surface 2F) of the transport chamber 2 by placing the legs L1 on the leg receiving portions L2, after the loading port 1 is moved from the front side (front portion) of the transport chamber 2 to a position close to the wall surface (front wall surface 2F) by an appropriate manner, the operator holds the handle body K2 supported in the use posture by the handle receiving portion K1, and applies an operating force that pushes the handle body K2 toward the wall surface (front wall surface 2F) of the transport chamber 2. As a result, the entire loading port 1 can be moved toward the wall surface (front wall surface 2F) of the transport chamber 2, and the legs L1 provided at the bottom of the loading port 1 can be placed on the leg receiving portions L2. At this time, by providing steps on the upward facing surfaces L22 and L23 of the leg receiving portion L2 and positioning the front upward facing surface L22 at a position lower than the rear upward facing surface L23 using the groove L21 as a boundary, the leg L1 can be smoothly placed on the leg receiving portion L2 by pushing the entire loading port 1 to a position where the lower end portion of the leg L1 fits into the groove L21 of the leg receiving portion L2, without having to temporarily tilt or lift the entire loading port 1 in order to place the leg L1 on the leg receiving portion L2. At an appropriate time after the leg L1 is placed on the leg receiving portion L2, the posture of the handle body K2 is changed from the use position (see Fig.19 ) to the storage location (see Fig. 20 ). Therefore, the handle body K2 can be stored in the inner space of the cover 50, thereby preventing the handle K from interfering with other parts after the loading port mounting operation.

[0094] As described above, with the load port installation position adjustment mechanism T according to the present embodiment, in the case of using the leg receiving groove L21 formed on the upper surface of the block-shaped leg receiving portion L2 as a boundary, the upward-facing surface L22 in front of the leg receiving groove L21 formed on the upper surface of the block-shaped leg receiving portion L2 is located at a lower position than the upward-facing surface L23 behind the leg receiving groove L21. Therefore, when the operator wants to install the load port 1 on the wall surface (front wall surface 2F) of the transport chamber 2, the operator applies an operating force that pushes the load port 1 toward the wall surface (front wall surface 2F) of the transport chamber 2, whereby the leg L1 is smoothly fitted into the leg receiving groove L21 through the upward-facing surface L22 in front of the leg receiving groove L21. The leg L1 abuts against the portion of the leg receiving portion L2 behind the leg receiving groove L21, thereby preventing the leg L1 from moving further toward the wall surface (front wall surface 2F) of the transport chamber 2, and keeping the leg L1 assembled in the leg receiving groove L21. Therefore, even if a large and heavy loading port 1 compatible with a large wafer (large substrate) is developed, the risk (such as the loading port 1 falling over) caused by having to tilt the entire loading port when installing the loading port on the wall surface (front wall surface 2F) of the transport chamber 2 can be avoided. In addition, by specifying the position where the leg receiving portion L2 receives (supports) the leg L1, the operating position of the loading port 1 (which is unclear in the related art) can be clarified during installation, and the installation operation can be easily performed by any operator.

[0095] In particular, the load port installation position adjustment mechanism T according to the present embodiment includes a handle K that extends horizontally from the base frame 4 within the reach of the operator. Therefore, even if the load port 1 is provided with a large mounting table 5 capable of loading a large FOUP for storing enlarged wafers, and in particular, even if the load port 1 is so large and heavy that the operator cannot reach the base frame 4 by extending his / her hand from the tip (end) side of the mounting table 5, the operator can hold the handle K and can apply an operating force that pushes the load port 1 toward the wall surface (front wall surface 2F) of the transport chamber 2, and the operator can smoothly and appropriately perform the installation operation on the wall surface (front wall surface 2F) of the transport chamber 2.

[0096] The present disclosure is not limited to the above-mentioned embodiments. For example, in the above-mentioned embodiments, the X-axis adjustment part, the Y-axis adjustment part, and the Z-axis adjustment part are configured to utilize the threaded connection and the forward / backward movement of the bolt. However, the type of the bolt is not particularly limited. A configuration that utilizes the forward / backward movement of parts other than the bolt may be adopted.

[0097] In addition, it is possible to use a mounting hole formed in the middle portion of the wall surface of the transfer chamber (in Figure 3The three-axis adjustment mechanism is mounted on the wall surface of the transport chamber by using the holes indicated by reference numerals 2t (2c) in the figure. As described above, the SEMI standard requires that the mounting holes be formed at predetermined positions on the upper section, middle section, and lower section of the wall surface of the transport chamber. The position adjustment mechanism according to the present disclosure can be mounted on the wall surface of the transport chamber by using the upper hole and the middle hole specified by the SEMI standard.

[0098] The transport container is not limited to FOUP, and may be a container other than FOUP, such as a front opening shipping box (FOSB) or a box.

[0099] As described above, the load port according to the present disclosure can be used as a part of the EFEM. However, the load port can also be applied to a handling device other than the EFEM. In this case, the installation position adjustment mechanism according to the present disclosure can be applied to facilitate the installation of the load port in the handling chamber.

[0100] In the above embodiment, a wafer is used as an example of a transport target object. However, the transport target object may also be a graticule, a rectangular substrate including a liquid crystal transport target object or a glass transport target object, a ring frame wafer, a culture plate, a culture container, a tray, a culture dish, etc.

[0101] Furthermore, the specific configuration of each part is not limited to the above-described embodiment, and various modifications may be made without departing from the spirit of the present disclosure.

[0102] Description of Reference Numerals

[0103] 1: Loading port, 2: Transport chamber, 2t: Mounting hole, T: Loading port mounting position adjustment mechanism, T1: X-axis adjustment section, T2: Y-axis adjustment section, T3: Z-axis adjustment section, T4: Three-axis adjustment mechanism, L1: Leg, L2: Leg receiving part, K: Handle, K2: Handle body

Claims

1. A load port installation position adjustment mechanism capable of adjusting an installation position of a load port on a wall surface of a transport chamber, the transport chamber defining a substantially closed substrate transport space in the transport chamber, the load port installation position adjustment mechanism comprising: an X-axis adjustment portion configured to adjust a position of the load port in a width direction of the wall surface; a Y-axis adjustment portion configured to adjust a position of the loading port in a thickness direction of the wall surface; as well as a Z-axis adjustment portion configured to adjust a position of the loading port in a height direction of the wall surface; A three-axis adjustment mechanism integrating the X-axis adjustment part, the Y-axis adjustment part and the Z-axis adjustment part is mounted on the wall surface by using a mounting hole formed on at least one of an upper section and a middle section of the wall surface.

2. The loading port installation position adjustment mechanism according to claim 1, further comprising: a leg disposed at a lower end portion of the base frame; as well as a leg receiving portion provided at a lower end of the wall surface to support the leg, wherein the leg receiving portion comprises a groove and an upwardly facing surface, the lower end of the leg being fitted into the groove, The front portion of the upward facing surface is a portion farther away from the wall surface than the groove when using the groove as a boundary, and is set at a lower position than the rear portion of the upward facing surface, and the rear portion is a portion closer to the wall surface than the groove.

3. The loading port installation position adjustment mechanism according to claim 1 or 2, further comprising: a handle having a handle body provided at a position spaced a predetermined distance from the wall surface of the transport chamber, wherein the handle body is accessible to an operator at least when the loading port is mounted on the wall surface.

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