Fixing clamp for mask production

Abstract

The invention relates to the technical field of mask production, and discloses a fixing clamp for mask production, which comprises a clamp seat for loading mask bodies, by starting an air pump, high-pressure air can enter through the bottom end of a fixing cylinder, and meanwhile, under the cooperation of a cleaning assembly, a plurality of clamp bodies can be lifted, so that the mask bodies can be cleaned; meanwhile, the sleeve can rotate and blow air to the top end of the clamp seat, so that the dust removal effect is achieved, the self-cleaning function can ensure that the mask plate fixing clamp can be effectively cleaned after being used every time, the cleanliness of the mask plate can be kept, the mask plate is prevented from being polluted by pollutants, and the service life of the mask plate fixing clamp is prolonged. According to the mask plate fixing clamp with the self-cleaning function, extra cleaning steps and cost can be reduced, due to the fact that the clamp can be self-cleaned, pollutants on the clamp do not need to be removed through extra cleaning agents or equipment, the cleaning process is simplified, the cleaning cost is reduced, and the cleaning efficiency is improved. And meanwhile, potential damage to the mask plate due to improper cleaning is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of mask production, in particular to a fixing fixture for mask production. Background Art

[0002] The mask, also known as the photomask, photolithography mask, etc., is a graphic master used in the photolithography process in microelectronics manufacturing. The function of the mask is to transfer the designer's circuit pattern to the substrate or wafer of the downstream industry through exposure, so as to achieve mass production. As the benchmark and blueprint for photolithography replication, the accuracy and quality level of the mask will directly affect the quality rate of the final downstream products. The mask is mainly composed of a substrate, a shading layer and a protective mold. Among them, the substrate accounts for 90% of the direct raw material cost and is the main part of the mask. The substrate is divided into resin substrates and glass substrates. The mainstream products of glass substrates are quartz substrates and soda substrates. The shading layer is divided into latex and hard shading molds, which are used to form mask patterns on the substrate. The protective mold is used to protect the surface of the mask from dust, dirt, particles and other pollution. In the patent application with application announcement number CN220543252U, it includes multiple fixed drying clamps for clamping and fixing the mask and drying it after cleaning, and an adjusting connection mechanism. The adjusting connection mechanism is arranged on one side of the multiple fixed drying clamps, and is used to adjust the spacing between the multiple fixed drying clamps to fix the spacing after the adjustment. The utility model realizes that the cleaned mask can be quickly dried without being disassembled during use by the fixed drying clamps, so that the use of the device can reduce the occurrence of self-drying, and the mask does not need to be disassembled during drying, which makes the device simpler to use, increases the convenience of using the device, achieves good use effect, increases the applicability of the device, and increases the practicality of the device.

[0003] In the prior art including the above-mentioned patents, the mask needs to be clamped by a fixture during manufacturing, and the presence of particles and dirt on the surface of the fixture will damage the mask. The cleanliness of the mask is crucial as it is a key tool for pattern transfer. The fixed fixture is not easy to self-clean, and the residues on the fixture will contaminate the mask. These residues include particles in the air, organic residues, metal ions, etc., which will affect the light transmittance and pattern accuracy of the mask, and thus cause defects in the lithography process, such as line width changes, pattern distortion or loss, etc. Summary of the invention

[0004] The problem to be solved by the present invention is that it is difficult for the existing mask fixing fixture to automatically clean the dust on the top thereof.

[0005] In order to solve the above technical problems, the technical solution of the present invention is: a fixing fixture for mask production, comprising a fixture seat for loading the mask body, a cleaning component is arranged inside the fixture seat, a clamping component is arranged on the fixture seat, and the clamping component is located above the cleaning component; The cleaning assembly includes a fixed cylinder fixed to the inner wall of the fixture seat, and the bottom of the fixed cylinder extends from the inner wall of the fixture seat to the bottom thereof, a reciprocating cylinder is slidably connected to the arc-shaped outer wall of the fixed cylinder, a sleeve is rotatably connected to the reciprocating cylinder, a guide cylinder is fixedly connected to the inner wall of the fixture seat, and the guide cylinder is sleeved on the outer wall of the sleeve, a plurality of guide blocks are fixedly connected to the arc-shaped outer wall of the sleeve, and each guide block is slidably connected to the inner wall of the guide cylinder, and a plurality of total guide blocks matching the plurality of guide blocks are provided on the inner wall of the guide cylinder The guide groove is provided inside the clamp seat, and a capping cylinder is slidably arranged inside the clamp seat, and the capping cylinder is located above the guide cylinder, a clamping block is fixedly connected to the top of the sleeve, a clamping groove matching the clamping block is provided at the bottom of the capping cylinder, a plurality of air blocking plates are fixedly arranged on the inner wall of the sleeve, a plurality of inner air outlets are provided on the peripheral side of the sleeve, a plurality of outer air outlets matching the plurality of inner air outlets are provided on the peripheral side of the capping cylinder, an air pump is installed inside the clamp seat, and the bottom end of the fixed cylinder is connected to the output end of the air pump through an air guide pipe; A plurality of connecting rotating rods are rotatably arranged on the arc-shaped outer wall of the fixed cylinder, and a sliding seat is rotatably connected to the top end of each connecting rotating rod, and two side guide strips fixedly connected to the clamp seat are slidably arranged on both sides of each sliding seat, and a clamp seat is slidably connected to the top end of each sliding seat, and the clamp seat is slidably connected to the clamp seat, and an inclined strip is fixedly connected to one side of each clamp seat on the clamp seat.

[0006] Preferably, an annular groove matching the reciprocating cylinder is provided at the bottom end of the sleeve, a plurality of guide blocks are distributed in an annular array around the sleeve, a plurality of total guide grooves are distributed in an annular array on the arc-shaped inner wall of the guide cylinder, and a plurality of air blocking plates are distributed in an annular array on the inner wall of the sleeve.

[0007] Preferably, each of the main guide grooves comprises a straight slide groove formed on the inner wall of the guide cylinder, and the inner wall of the guide cylinder is provided with an inclined slide groove connected to the straight slide groove.

[0008] Preferably, an ejection hole matching the capping cylinder is provided on the clamp seat, and the capping cylinder slides on the inner wall of the ejection hole, and the capping cylinder is located at the center of the plurality of clamp seats.

[0009] Preferably, the plurality of connecting rods are distributed in a circular array on the arc-shaped outer wall of the fixed cylinder, each of the side guide strips is provided with a movable groove matching the slide seat, and each of the bottom ends of the clamping seats is provided with a telescopic groove matching the slide seat.

[0010] Preferably, a guide rod is fixed on each of the clamping seats, a transverse guide groove matching the plurality of guide rods is formed on the clamping seat, and an inclined groove matching the guide rod is formed on each of the inclined bars.

[0011] Preferably, a clamp body is slidably mounted on each clamp seat, a telescopic rod is fixedly connected to the top of the clamp seat, one end of the telescopic rod is fixedly connected to the clamp body, and a rubber seat in contact with the top of the mask body is fixed to the bottom of each clamp body.

[0012] Preferably, a mounting frame is fixedly provided at the bottom end of the clamp seat, and the air pump is installed on the mounting frame.

[0013] Compared with the prior art, the technical solution of the present invention has the following advantages: (1) The present invention starts the air pump to allow high-pressure air to enter through the bottom of the fixing cylinder. At the same time, with the cooperation of the cleaning component, multiple clamp bodies can be raised. At the same time, the sleeve can rotate and blow air to the top of the clamp seat, so as to achieve the effect of removing dust. The self-cleaning function can ensure that the mask fixing clamp can be effectively cleaned after each use, which helps to maintain the cleanliness of the mask and prevent contaminants from contaminating the mask. The mask fixing clamp with a self-cleaning function can reduce additional cleaning steps and costs. Since the clamp can clean itself, there is no need to use additional cleaning agents or equipment to remove contaminants on the clamp, which not only simplifies the cleaning process, but also reduces the cleaning cost, while avoiding potential damage to the mask caused by improper cleaning; (2) The present invention starts the air pump to evacuate air from the inside of the fixed cylinder. With the cooperation of the clamping assembly, multiple clamping seats slide toward the mask body at the same time. When the telescopic rod contacts the mask body, the mask body can be pushed to fit tightly against the top of the clamp seat. When the mask body contacts the clamp body, each clamp body can slide on the top of the clamp seat and compress the telescopic rod to clamp the mask body. The automatic clamping system can quickly and accurately complete the clamping of the mask without the need for manual adjustment by the operator, thereby greatly shortening the operation time. This not only improves work efficiency, but also enables the production line to run more smoothly. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the local structure of the fixing fixture of the present invention; Figure 3 This is a schematic diagram of the capping tube structure of the present invention; Figure 4 It is a schematic diagram of the cross-sectional structure of the clamp seat of the present invention; Figure 5 For the present invention Figure 4 A partial enlarged view of middle A; Figure 6 It is a schematic diagram of the structure of the clamping assembly of the present invention; Figure 7 It is a schematic diagram of the structure of the guide cylinder of the present invention; Figure 8 It is a schematic diagram of the cross-sectional structure of the capping tube of the present invention; Fig. 9 For the present invention Figure 8 A partial enlarged view of B in the middle; Fig.10 This is a bottom view of the guide tube of the present invention; Fig.11 It is a schematic diagram of the connection structure between the sleeve and the guide block.

[0015] In the figure: 1, fixture seat; 11, mask body; 12, mounting frame; 2. Cleaning assembly; 21. Fixed cylinder; 22. Reciprocating cylinder; 23. Sleeve; 231. Air blocking plate; 232. Snap-on block; 24. Guide block; 241. Main guide groove; 25. Guide cylinder; 26. Capping cylinder; 261. Snap-on groove; 3. Clamping assembly; 31. Connecting rotating rod; 32. Sliding seat; 321. Side guide strip; 33. Clamping seat; 331. Guide rod; 332. Horizontal guide groove; 333. Inclined strip; 34. Clamp body; 35. Telescopic rod; 36. Rubber seat. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0017] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. "Include" or "comprise" and other similar words used in the present disclosure mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and other similar words are not limited to physical or mechanical connections, but may also include electrical connections, whether direct or indirect. "Up", "down", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0018] like Figures 1 to 11 As shown, a fixing fixture for mask production provided by the present invention comprises a fixture seat 1 for loading a mask body 11, a cleaning component 2 is arranged inside the fixture seat 1, a clamping component 3 is arranged on the fixture seat 1, and the clamping component 3 is located above the cleaning component 2; The cleaning assembly 2 includes a fixed cylinder 21 fixed to the inner wall of the fixture seat 1, and the bottom of the fixed cylinder 21 extends from the inner wall of the fixture seat 1 to the bottom thereof, a reciprocating cylinder 22 is slidably connected to the curved outer wall of the fixed cylinder 21, a sleeve 23 is rotatably connected to the reciprocating cylinder 22, a guide cylinder 25 is fixedly connected to the inner wall of the fixture seat 1, and the guide cylinder 25 is sleeved on the outer wall of the sleeve 23, a plurality of guide blocks 24 are fixedly connected to the curved outer wall of the sleeve 23, and each guide block 24 is slidably connected to the inner wall of the guide cylinder 25, and a plurality of total guide blocks 24 matching the plurality of guide blocks 24 are provided on the inner wall of the guide cylinder 25 Guide groove 241, a capping cylinder 26 is slidably arranged inside the fixture seat 1, and the capping cylinder 26 is located above the guide cylinder 25, a clamping block 232 is fixedly connected to the top of the sleeve 23, a clamping groove 261 matching the clamping block 232 is provided at the bottom of the capping cylinder 26, a plurality of air blocking plates 231 are fixedly arranged on the inner wall of the sleeve 23, a plurality of inner air outlets are provided on the peripheral side of the sleeve 23, a plurality of outer air outlets matching the plurality of inner air outlets are provided on the peripheral side of the capping cylinder 26, an air pump is installed inside the fixture seat 1, and the bottom end of the fixed cylinder 21 is connected to the output end of the air pump through an air guide pipe; There are multiple connecting rods 31 that rotate on the arc-shaped outer wall of the fixed cylinder 21, and each connecting rod 31 is rotatably connected to a slide seat 32 at the top end. Two side guide strips 321 that are fixedly connected to the clamp seat 1 are slidably provided on both sides of each slide seat 32. A clamping seat 33 is slidably connected to the top end of each slide seat 32, and the clamping seat 33 is slidably connected to the clamp seat 1. An inclined strip 333 is fixedly connected to one side of each clamping seat 33 on the clamp seat 1.

[0019] An annular groove matching the reciprocating cylinder 22 is provided at the bottom end of the sleeve 23, multiple guide blocks 24 are distributed in an annular array around the sleeve 23, multiple total guide grooves 241 are distributed in an annular array on the arc-shaped inner wall of the guide cylinder 25, and multiple air blocking plates 231 are distributed in an annular array on the inner wall of the sleeve 23.

[0020] Each main guide groove 241 includes a straight slide groove formed on the inner wall of the guide cylinder 25 , and an inclined slide groove communicating with the straight slide groove is formed on the inner wall of the guide cylinder 25 .

[0021] The fixture seat 1 is provided with an ejection hole matching the capping tube 26 , and the capping tube 26 slides on the inner wall of the ejection hole. The capping tube 26 is located at the center of the plurality of clamping seats 33 .

[0022] A plurality of connecting rods 31 are distributed in a circular array on the arc-shaped outer wall of the fixed cylinder 21 , each side guide strip 321 is provided with a movable groove matching the slide seat 32 , and each clamping seat 33 is provided with a telescopic groove matching the slide seat 32 at the bottom end.

[0023] A guide rod 331 is fixed on each clamping seat 33 , a transverse guide groove 332 matching the guide rods 331 is formed on the clamping seat 1 , and an inclined groove matching the guide rod 331 is formed on each inclined bar 333 .

[0024] A clamp body 34 is slidably mounted on each clamp seat 33 , a telescopic rod 35 is fixedly connected to the top of the clamp seat 33 , one end of the telescopic rod 35 is fixedly connected to the clamp body 34 , and a rubber seat 36 in contact with the top of the mask body 11 is fixed to the bottom of each clamp body 34 .

[0025] A mounting frame 12 is fixedly provided at the bottom end of the clamp seat 1 , and the air pump is installed on the mounting frame 12 .

[0026] When the mask version body 11 is loosened, the air pump can be started, and then the high-pressure air can enter through the bottom of the fixed cylinder 21 under the connection of the air guide pipe. At this time, the air pressure inside the sleeve 23 and the reciprocating cylinder 22 increases, and the reciprocating cylinder 22 can be pushed to slide on the outer wall of the fixed cylinder 21 and rise under the action of the air pressure, and is fixed to the sleeve 23. The multiple guide blocks 24 on the outer wall slide inside the multiple straight slide grooves respectively, and the sleeve 23 can rise simultaneously with the reciprocating cylinder 22.

[0027] During this process, the rising of the sleeve 23 can drive the connecting rotating rod 31 rotatably connected to it to rotate around the connection position with the slide 32, and can push multiple slides 32 to slide inside multiple groups of side guide strips 321 respectively, while driving the clamping seat 33 slidably connected to the slide 32 to move, and the guide rod 331 fixed on the clamping seat 33 can slide inside the transverse guide groove 332, thereby driving the multiple clamp bodies 34 to separate from the mask version body 11, and the mask version body 11 can be taken out at this time.

[0028] When the plurality of guide blocks 24 slide to the top of the straight slide groove, the sleeve 23 can be inserted into the interior of the capping tube 26, and the clamping block 232 fixed to the top of the sleeve 23 can be clamped with the clamping groove 261 opened at the bottom end of the capping tube 26, and the plurality of internal air outlets opened on the peripheral side of the sleeve 23 can cooperate with the external air outlets opened on the peripheral side of the capping tube 26. With the continuous injection of high-pressure air, the sleeve 23 pushes the capping tube 26 to slide inside the fixture seat 1 and rise. At the same time, the plurality of guide blocks 24 fixed to the outer wall of the sleeve 23 can enter the inclined slide groove from the straight slide groove. At this time, each guide block 24 slides along the inclined slide groove, which can push the sleeve 23 to rotate around the connection position with the reciprocating tube 22. Since the clamping block 232 is clamped with the clamping groove 261, the sleeve The rotation of the cylinder 23 directly drives the capping cylinder 26 to rotate synchronously. When the inner air outlet opened on the sleeve 23 rises to above the clamp seat 1, the high-pressure air inside the sleeve 23 can be discharged from the inner air outlet. At this time, the high-pressure air inside the sleeve 23 can contact multiple air blocking plates 231, which can push the sleeve 23 to continue to slide upward. At the same time, the sleeve 23 can rotate to blow air to the top of the clamp seat 1, thereby cleaning the dust on the clamp seat 1. At the same time, the guide rod 331 fixed on the clamp seat 33 can slide from the inside of the transverse guide groove 332 to the inside of the inclined groove. At this time, multiple clamp bodies 34 can be separated from the clamp seat 1 at the same time, which can prevent the clamp seat 33 from rising and blowing air to the top of the clamp seat 1, causing dust to remain on the clamp body 34.

[0029] When the mask version body 11 needs to be clamped, the mask version body 11 can be placed on the top of the clamp seat 1, and then the air pump can be started to evacuate the inside of the fixed cylinder 21. At this time, the sleeve 23 can slide downward under the action of the capping cylinder 26 and its own gravity. When the capping cylinder 26 completely enters the top outlet, negative pressure is generated inside the sleeve 23, which can drive the reciprocating cylinder 22 to slide downward, and with the cooperation of the clamping assembly 3, multiple clamping seats 33 can slide toward the mask version body 11 at the same time. When the telescopic rod 35 contacts the mask version body 11, the mask version body 11 can be pushed to fit tightly against the top of the clamp seat 1. When the mask version body 11 contacts the clamp body 34, each clamp body 34 can slide on the top of the clamp seat 33 and compress the telescopic rod 35, so as to clamp the mask version body 11.

[0030] The working principle and use process of the present invention are as follows: when the mask version body 11 is loosened, the air pump can be started to allow high-pressure air to enter through the bottom end of the fixed cylinder 21. At the same time, with the cooperation of the cleaning component 2, multiple clamp bodies 34 can be separated from the mask version body 11. At the same time, the sleeve 23 can be raised and then the capping cylinder 26 can be raised. At this time, the mask version body 11 can be taken out. When the guide block 24 slides to the inside of the inclined slide groove, multiple clamp bodies 34 can be raised, and the sleeve 23 can drive the capping cylinder 26 to rise to the top of the clamp seat 1. At this time, the sleeve 23 can rotate and blow air to the top of the clamp seat 1, thereby achieving the effect of removing dust.

[0031] The above embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention. The protection scope of the present invention is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions shall also be deemed to fall within the protection scope of the present invention.

Claims

1. A fixing fixture for mask production, comprising a fixture seat (1) for loading a mask body (11), characterized in that: A cleaning component (2) is arranged inside the clamp seat (1), a clamping component (3) is arranged on the clamp seat (1), and the clamping component (3) is located above the cleaning component (2); The cleaning assembly (2) comprises a fixed cylinder (21) fixed to the inner wall of the fixture seat (1), and the bottom of the fixed cylinder (21) extends from the inner wall of the fixture seat (1) to the bottom thereof; a reciprocating cylinder (22) is slidably connected to the curved outer wall of the fixed cylinder (21), and a sleeve (23) is rotatably connected to the reciprocating cylinder (22); a guide cylinder (25) is fixedly connected to the inner wall of the fixture seat (1), and the guide cylinder (25) is sleeved on the outer wall of the sleeve (23); a plurality of guide blocks (24) are fixedly connected to the curved outer wall of the sleeve (23), and each guide block (24) is slidably connected to the inner wall of the guide cylinder (25); and the inner wall of the guide cylinder (25) is provided with a plurality of guide blocks (24) matching the plurality of guide blocks (24). a main guide groove (241), a capping cylinder (26) is slidably arranged inside the clamp seat (1), and the capping cylinder (26) is located above the guide cylinder (25), a clamping block (232) is fixedly connected to the top of the sleeve (23), a clamping groove (261) matching the clamping block (232) is provided at the bottom of the capping cylinder (26), a plurality of air blocking plates (231) are fixedly arranged on the inner wall of the sleeve (23), a plurality of internal air outlets are provided on the peripheral side of the sleeve (23), a plurality of external air outlets matching the plurality of internal air outlets are provided on the peripheral side of the capping cylinder (26), an air pump is installed inside the clamp seat (1), and the bottom end of the fixed cylinder (21) is connected to the output end of the air pump via an air guide pipe; A plurality of connecting rods (31) are rotatably provided on the arc-shaped outer wall of the fixed cylinder (21); a slide seat (32) is rotatably connected to the top of each connecting rod (31); two side guide strips (321) fixedly connected to the clamp seat (1) are slidably provided on both sides of each slide seat (32); a clamp seat (33) is slidably provided on the top of each slide seat (32); the clamp seat (33) is slidably connected to the clamp seat (1); and a tilting strip (333) is fixedly connected to one side of each clamp seat (33) on the clamp seat (1).

2. A fixing fixture for mask production according to claim 1, characterized in that: The bottom end of the sleeve (23) is provided with an annular groove matching the reciprocating cylinder (22); a plurality of guide blocks (24) are distributed in an annular array around the sleeve (23); a plurality of main guide grooves (241) are distributed in an annular array on the arc-shaped inner wall of the guide cylinder (25); and a plurality of air blocking plates (231) are distributed in an annular array on the inner wall of the sleeve (23).

3. The fixing fixture for mask production according to claim 1, characterized in that: Each of the main guide grooves (241) comprises a straight slide groove formed on the inner wall of the guide cylinder (25), and the inner wall of the guide cylinder (25) is provided with an inclined slide groove connected to the straight slide groove.

4. The fixing fixture for mask production according to claim 1, characterized in that: The clamp seat (1) is provided with an ejection hole matching the capping cylinder (26), and the capping cylinder (26) slides on the inner wall of the ejection hole. The capping cylinder (26) is located at the center of the plurality of clamp seats (33).

5. The fixing fixture for mask production according to claim 1, characterized in that: A plurality of the connecting rotating rods (31) are distributed in a circular array on the arc-shaped outer wall of the fixed cylinder (21), each of the side guide strips (321) is provided with a movable groove matching the slide seat (32), and each of the clamping seats (33) is provided with a telescopic groove matching the slide seat (32) at the bottom end.

6. The fixing fixture for mask production according to claim 1, characterized in that: A guide rod (331) is fixed on each of the clamping seats (33), a transverse guide groove (332) matching the plurality of guide rods (331) is provided on the clamping seat (1), and an inclined groove matching the guide rod (331) is provided on each of the inclined bars (333).

7. The fixing fixture for mask production according to claim 1, characterized in that: A clamp body (34) is slidably mounted on each clamping seat (33), a telescopic rod (35) is fixedly connected to the top of the clamping seat (33), one end of the telescopic rod (35) is fixedly connected to the clamp body (34), and a rubber seat (36) in contact with the top of the mask body (11) is fixedly mounted on the bottom of each clamp body (34).

8. The fixing fixture for mask production according to claim 1, characterized in that: A mounting frame (12) is fixedly provided at the bottom end of the clamp seat (1), and the air pump is mounted on the mounting frame (12).

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