SEM equipment shooting automatic auxiliary leveling device

Abstract

The invention discloses an SEM equipment shooting automatic auxiliary leveling device which comprises a supporting box and a supporting block, the supporting block is arranged in the middle of the inner bottom of the supporting box, supporting frames are arranged in the middle of the inner bottom end of the supporting box around the supporting block, and lead screws are arranged in the middle of the supporting frames through bearing seats. Threaded blocks are connected to the lead screws through threads, connecting rods are arranged in the middles of the two sides of the threaded blocks, the other ends of the connecting rods extend to the outer sides of the moving grooves, connecting pieces are arranged on the portions, on the outer sides of the moving grooves, of the connecting rods through bearings, a semi-circular truncated cone is arranged at the top of the supporting block, and a transverse plate is arranged in the middle of the top of the semi-circular truncated cone; an inserting block is arranged in the middle of the bottom of the transverse plate, and the transverse plate is connected with the inserting groove of the semicircular truncated cone in an inserted mode through the inserting block. By automatically adjusting the adjusting platform, the shooting effect of the SEM equipment can be better, and before use, the adjusting platform can be quickly assembled and disassembled.

Description

Technical Field

[0001] The invention relates to the technical field of SEM equipment leveling, and in particular to an automatic auxiliary leveling device for shooting SEM equipment. Background Art

[0002] The SEM device, or scanning electron microscope, is a device that uses an electron beam to scan the surface of a sample to achieve high-magnification imaging. It can be widely used in many fields such as material science, biology, medicine, geology, etc. When the SEM device is in use, it needs to be leveled with a leveling device to make the subsequent pictures more stable.

[0003] In the prior art, general auxiliary leveling equipment is manually leveled when in use, which may result in certain errors, thereby affecting the shooting effect. In addition, it is not convenient to disassemble and replace the leveling platform during use, which makes its applicability low. Summary of the invention

[0004] The object of the present invention is to provide an automatic auxiliary leveling device for photographing SEM equipment to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an automatic auxiliary leveling device for SEM equipment shooting, comprising a support box and a support block, the top of the support box is provided with an opening, and a support block is provided at the middle position of the bottom of the support box, a support frame is provided at the middle position of the bottom end of the support box around the support block, and a screw rod is provided at the middle position of the support frame through a bearing seat, and a threaded block is connected to the screw rod through a thread, movable grooves are provided on the support frames on both sides of the threaded block, and connecting rods are provided at the middle position of both sides of the threaded block, and the other end of the connecting rod extends to the outside of the movable groove, and the The connecting rods on the outer side of the movable groove are all provided with connecting plates through bearings, the top of the support block is provided with a semicircular table, and the middle position of the top of the semicircular table is provided with a slot, the middle position of the top of the semicircular table is provided with a cross plate, and the middle position of the bottom of the cross plate is provided with an insertion block, and the cross plate is plugged into the slot of the semicircular table through the insertion block, so that the threaded block on the screw rod drives the connecting rods on both sides to move, and the connecting rod drives the side block at the other end of the connecting plate to prop up and lower, which is convenient for leveling the adjustment platform on the horizontal plate and the longitudinal plate, and before use, the insertion block at the bottom of the horizontal plate can be plugged into the semicircular table and clamped and fixed, which is convenient for assembly and disassembly of the adjustment platform.

[0006] Preferably, longitudinal plates are provided at the middle positions of both sides of the transverse plate, and side blocks are provided on both sides of the bottom of the transverse plate and the longitudinal plate away from the center, and the side blocks are connected to the corresponding connecting plates through a rotating shaft.

[0007] Preferably, an adjustment platform is provided on the top of the horizontal plate and the vertical plate, and a tilt sensor is provided at the middle position of both sides of the adjustment platform, so that the tilt sensor senses the tilt information and transmits it to the controller, which processes the information and controls the corresponding motor to start.

[0008] Preferably, arc-shaped clamping blocks are provided at the bottom of the horizontal plates on both sides of the semicircular table, and sliding blocks are provided at the tops of the clamping blocks. The bottoms of the horizontal plates corresponding to the sliding blocks are provided with sliding grooves, and the sliding grooves are slidably connected to the corresponding sliding blocks, so that when the clamping blocks move, the sliding blocks can be driven to move in the sliding grooves.

[0009] Preferably, thread grooves are provided at corresponding middle positions of the semicircular table, the insert block and the clamping block, and screws are threadedly connected in the thread grooves of the semicircular table, the insert block and the clamping block, and nuts are threadedly connected at both ends of the screw, so that the screw is screwed into the thread groove and the nuts are screwed on both ends of the screw, so that the insert block, the clamping block and the semicircular table can be fixed to prevent movement.

[0010] Preferably, the top of the support block is provided with an arc groove that fits with the bottom of the semi-cone, and sliding balls are evenly provided on the top of the support block, and the tops of the sliding balls are all in fit with the bottom of the semi-cone, so that the sliding balls on the top of the support block support and slide on it, making its rotation adjustment more stable.

[0011] Preferably, the top of the support frame is provided with an opening, and a motor is provided at the position of the other end of the support frame corresponding to the screw rod, and the output end of the motor is connected to the corresponding screw rod through a bearing and a coupling.

[0012] Preferably, a battery is provided on one side of the inner bottom of the support box, and a controller is provided on the other side of the inner bottom of the support box.

[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: the SEM equipment shoots an automatic auxiliary leveling device, which can start the motor on one side according to the direction of the tilted side, so that the motor drives the threaded block on the screw rod to move, and the threaded block drives the connecting rods on both sides to move, and the connecting rod drives the connecting piece to move together, so that the other end of the connecting piece can drive the side block to be propped up and lowered through the rotating shaft, so as to facilitate the leveling of the adjustment platform on the horizontal plate and the vertical plate, and before use, the plug block at the bottom of the horizontal plate can be plugged into the semicircular table, and then the movable clamping block can clamp its two sides, and then the screw rod can be screwed through the semicircular table, the plug block and the clamping block, and the nuts can be screwed on both ends of the screw rod, so as to fix the horizontal plate and the semicircular table, and facilitate the assembly and disassembly of the adjustment platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the front cross-sectional structure of the present invention.

[0015] Figure 2 It is a schematic diagram of the main and sectional structure of the adjusting platform and the semicircular table of the present invention.

[0016] Figure 3 It is a bottom view structural diagram of the horizontal plate and the vertical plate of the present invention.

[0017] Figure 4 It is a schematic diagram of a top view and a cross-sectional structure of a support frame of the present invention.

[0018] Figure 5 For the present invention Figure 1 Enlarged structural diagram at A in the middle.

[0019] In the figure: 1. support box; 2. support block; 3. motor; 4. support frame; 5. adjustment platform; 6. tilt sensor; 7. connecting piece; 8. screw rod; 9. cross plate; 10. moving groove; 11. battery; 12. controller; 13. semicircular table; 14. clamping block; 15. screw rod; 16. slider; 17. plug block; 18. side block; 19. longitudinal plate; 20. slide groove; 21. connecting rod; 22. threaded block; 23. sliding ball. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-5 An embodiment of the present invention is as follows: an automatic auxiliary leveling device for SEM equipment shooting, comprising a support box 1 and a support block 2, the top of the support box 1 is provided with an opening, and the middle position of the bottom of the support box 1 is provided with a support block 2, and the middle position of the bottom of the support box 1 around the support block 2 is provided with a support frame 4, and the middle position of the support frame 4 is provided with a screw rod 8 through a bearing seat, and the screw rod 8 is connected to a threaded block 22 through a thread, and the support frame 4 on both sides of the threaded block 22 is provided with a movable groove 10, and the middle position of the two sides of the threaded block 22 is provided with a connecting rod 8. The connecting rod 21 and the other end of the connecting rod 21 are extended to the outside of the movable groove 10, and the connecting rod 21 outside the movable groove 10 is provided with a connecting plate 7 through a bearing, and a longitudinal plate 19 is provided at the middle position on both sides of the transverse plate 9, and side blocks 18 are provided on both sides of the bottom of the transverse plate 9 and the longitudinal plate 19 away from the center end, and the side blocks 18 are connected to the corresponding connecting plate 7 through a rotating shaft, and an opening is provided at the top of the support frame 4, and a motor 3 is provided at the position corresponding to the screw rod 8 at the other end of the support frame 4, and the output end of the motor 3 is connected to the corresponding screw rod 8 through a bearing and a coupling.

[0022] The user can start the motor 3 on one side according to the direction of the tilt, so that the motor 3 drives the threaded block 22 on the screw rod 8 to move, and the threaded block 22 drives the connecting rods 21 on both sides to move, and the connecting rods 21 drive the connecting piece 7 to move together, so that the other end of the connecting piece 7 can drive the side block 18 to be propped up and lowered through the rotating shaft, thereby adjusting the inclination of the horizontal plate 9 or the vertical plate 19, which is convenient for leveling the adjustment platform 5 on the horizontal plate 9 and the vertical plate 19.

[0023] A semi-circular platform 13 is provided on the top of the support block 2, and a slot is provided in the middle of the top of the semi-circular platform 13, a horizontal plate 9 is provided in the middle of the top of the semi-circular platform 13, and an insert block 17 is provided in the middle of the bottom of the horizontal plate 9, and the horizontal plate 9 is plugged into the slot of the semi-circular platform 13 through the insert block 17. The insert block 17 at the bottom of the horizontal plate 9 can be plugged into the slot of the semi-circular platform 13, which is convenient for subsequent fixing and also convenient for quick assembly and disassembly of the adjustment platform 5.

[0024] An adjusting platform 5 is provided on the top of the transverse plate 9 and the longitudinal plate 19, and a tilt sensor 6 is provided at the middle position on both sides of the adjusting platform 5; the tilt sensors 6 on both sides of the adjusting platform 5 can sense the tilt information and transmit the information to the controller 12, and the control system in the controller 12 controls the motor 3 to start, which is convenient for subsequent leveling.

[0025] The bottom of the horizontal plates 9 on both sides of the semi-circular table 13 are provided with arc-shaped clamping blocks 14, and the top of the clamping blocks 14 are provided with sliders 16. The bottom of the horizontal plates 9 corresponding to the sliders 16 are provided with sliding grooves 20, and the sliding grooves 20 are slidably connected to the corresponding sliders 16; when in use, the clamping blocks 14 can be moved so that the clamping blocks 14 move in the sliding grooves 20 through the sliders 16 to fit the semi-circular table 13, which is convenient for subsequent fixation.

[0026] The corresponding middle positions of the semi-circular table 13, the insert block 17 and the clamping block 14 are all provided with threaded grooves, and the threaded grooves of the semi-circular table 13, the insert block 17 and the clamping block 14 are connected with screw rods 15 through threads, and both ends of the screw rod 15 are connected with nuts through threads; the screw rod 15 can be screwed through the semi-circular table 13, the insert block 17 and the clamping block 14, and then the nuts can be screwed on both ends of the screw rod 15, so that the cross plate 9 and the semi-circular table 13 can be fixed.

[0027] The top of the support block 2 is provided with an arc groove that fits with the bottom of the semi-circular table 13, and the top of the support block 2 is evenly provided with sliding balls 23, and the tops of the sliding balls 23 are all in contact with the bottom of the semi-circular table 13; when the semi-circular table 13 is rotated and adjusted, the sliding balls 23 on the top of the support block 2 can support and slide it, making its rotation adjustment more stable.

[0028] A battery 11 is provided on one side of the bottom of the support box 1, and a controller 12 is provided on the other side of the bottom of the support box 1; when in use, the battery 11 can power the device, and then the motor 3 and the tilt sensor 6 can be electrically connected to the controller 12, and the control system in the controller 12 can control the start of the motor 3 and the tilt sensor 6 and process the information.

[0029] When the device needs to work, the plug block 17 at the bottom of the cross plate 9 is inserted into the slot of the semicircular table 13, and then the clamping block 14 can be moved so that the clamping block 14 moves in the slide groove 20 through the slider 16 to fit the semicircular table 13, and then the screw 15 is screwed through the semicircular table 13, the plug block 17 and the clamping block 14, and the nuts are screwed on both ends of the screw 15, so that the cross plate 9 and the semicircular table 13 can be fixed, which is convenient for quick assembly and disassembly of the adjustment platform 5.

[0030] When the SEM equipment is assembled with it, the tilt sensors 6 on both sides of the adjustment platform 5 can sense the tilt information and transmit the information to the controller 12. The control system in the controller 12 controls the motor 3 to start. When the motor 3 on the tilted side is started, the threaded block 22 on the screw rod 8 can be driven to move, so that the threaded block 22 drives the connecting rods 21 on both sides to move, and the connecting rod 21 drives the connecting piece 7 to move together. The other end of the connecting piece 7 can drive the side block 18 to be lifted and lowered through the rotating shaft, thereby adjusting the inclination of the horizontal plate 9 or the vertical plate 19, which is convenient for leveling the adjustment platform 5 on the horizontal plate 9 and the vertical plate 19. During leveling, the sliding ball 23 on the top of the support block 2 can support and slide it, so that its rotation adjustment can be more stable.

Claims

1. An automatic auxiliary leveling device for SEM equipment, characterized in that: The invention comprises a support box (1) and a support block (2), wherein the top of the support box (1) is provided with an opening, and a support block (2) is provided at a middle position of the bottom of the support box (1), support frames (4) are provided at middle positions of the bottom of the support box (1) around the support block (2), and screw rods (8) are provided at middle positions in the support frames (4) through bearing seats, and threaded blocks (22) are connected to the screw rods (8) through threads, movable grooves (10) are provided on the support frames (4) on both sides of the threaded blocks (22), and connecting rods (21) are provided at middle positions on both sides of the threaded blocks (22), the other ends of the connecting rods (21) extend to the outside of the movable grooves (10), and connecting plates (7) are provided on the connecting rods (21) on the outside of the movable grooves (10) through bearings, and a semi-circular table (13) is provided at the top of the support block (2), and a slot is provided at the middle position of the top of the semi-circular table (13), and a horizontal plate (9) is provided at the middle position of the top of the semi-circular table (13).

2. The automatic auxiliary leveling device for SEM equipment shooting according to claim 1, characterized in that: An insert block (17) is provided at the middle position of the bottom of the transverse plate (9), and the transverse plate (9) is plugged into a slot of the semicircular table (13) via the insert block (17).

3. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: A longitudinal plate (19) is provided at the middle position of both sides of the transverse plate (9), and side blocks (18) are provided on both sides of the bottom of the transverse plate (9) and the longitudinal plate (19) away from the center, and the side blocks (18) are connected to the corresponding connecting plates (7) through a rotating shaft.

4. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: An adjustment platform (5) is provided on the top of the transverse plate (9) and the longitudinal plate (19), and a tilt sensor (6) is provided at the middle position of both sides of the adjustment platform (5).

5. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: The bottoms of the horizontal plates (9) on both sides of the semicircular table (13) are provided with arc-shaped clamping blocks (14), and the tops of the clamping blocks (14) are provided with sliding blocks (16). The bottoms of the horizontal plates (9) corresponding to the sliding blocks (16) are provided with sliding grooves (20), and the sliding grooves (20) are slidably connected to the corresponding sliding blocks (16).

6. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: Corresponding middle positions of the semi-circular table (13), the insert block (17) and the clamping block (14) are all provided with threaded grooves, and the threaded grooves of the semi-circular table (13), the insert block (17) and the clamping block (14) are threadedly connected to a screw rod (15), and both ends of the screw rod (15) are threadedly connected to nuts.

7. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: The top of the support block (2) is provided with an arc groove that fits with the bottom of the semi-circular table (13), and sliding balls (23) are evenly provided on the top of the support block (2), and the tops of the sliding balls (23) are all fitted with the bottom of the semi-circular table (13).

8. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: The top of the support frame (4) is provided with an opening, and a motor (3) is provided at the other end of the support frame (4) at a position corresponding to the screw rod (8), and the output end of the motor (3) is connected to the corresponding screw rod (8) via a bearing and a coupling.

9. The automatic auxiliary leveling device for SEM equipment photography according to claim 1, characterized in that: A storage battery (11) is provided on one side of the inner bottom of the support box (1), and a controller (12) is provided on the other side of the inner bottom of the support box (1).

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