Performance detection device and method for integrated VCSEL laser

By designing an integrated performance detection device, using multiple functional modules to detect the line width, wavelength and modulation intensity of the VCSEL laser, the problem of single and time-consuming testing functions in the prior art is solved, and fast and comprehensive performance detection is achieved.

CN119574064APending Publication Date: 2025-03-07BEIJING INST OF RADIO METROLOGY & MEASUREMENT
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Patent Information

Application Number
CN202411941484.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-03-07

AI Technical Summary

Technical Problem

The prior art is difficult to quickly and comprehensively detect multiple performance parameters of the vertical cavity surface emitting laser VCSEL, resulting in a single test function and time-consuming and labor-intensive test.

Method used

An integrated performance detection device is designed, including a computer, a laser under test control module, a VCSEL laser, a coupled lens group, an optical fiber, an optical fiber beam splitter, a Fabripero cavity and a wavelength meter. Through the combination of these modules, the line width, wavelength and modulation intensity of the laser can be measured.

Benefits of technology

It realizes fast, all-round and multi-angle detection of the performance of VCSEL lasers, with simple structure, convenient implementation and wide application.

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Abstract

The invention belongs to the technical field of laser performance detection, and particularly discloses a performance detection device and method for an integrated VCSEL laser, and the method comprises the steps: an upper computer issues a control instruction to a detected laser control module, so as to enable the detected laser to control the working temperature, working current and working frequency of the detected VCSEL laser; the measured VCSEL laser outputs laser with a specific wavelength to the coupling lens group at the working temperature, the working current and the working frequency; the coupling lens group couples the received laser into an optical fiber and transmits the laser to the optical fiber beam splitter; the optical fiber beam splitter splits the received coupled laser and transmits the split laser to the Fabry-Perot cavity and the wavemeter respectively; the Fabry-Perot cavity processes the received laser beam splitting to obtain a Fabry-Perot cavity signal, and transmits the Fabry-Perot cavity signal to an upper computer so as to measure the line width of the laser and the modulation intensity of the laser; and the wavelength meter processes the received split laser beams to obtain wavelength parameters and transmits the wavelength parameters to the upper computer so as to measure the wavelength of the laser.
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Description

Technical Field

[0001] The present invention belongs to the technical field of laser performance detection, and in particular relates to a performance detection device and method for an integrated VCSEL laser. Background Art

[0002] Vertical Cavity Surface Emitting Laser (VCSEL) is widely used in biosensing, large-capacity optical communication, imaging and other fields due to its small size, low power consumption, low threshold current, circular symmetry of the output spot and small divergence angle. In the field of quantum precision measurement, the main focus is on the power, operating current, operating temperature range, operating band, etc. of the laser during operation. It is necessary to measure multiple sets of parameters, and different measurement devices are used for different measurement parameters, which is time-consuming and labor-intensive. Therefore, it is urgent to propose a device and method for integrated VCSEL laser performance detection to solve the above technical problems. Summary of the invention

[0003] The present invention provides a performance detection device and method for an integrated VCSEL laser, which are used to solve the problem that the VCSEL test function is single and time-consuming and labor-intensive.

[0004] In a first aspect, a performance detection device for an integrated VCSEL laser is provided, the device comprising:

[0005] Host computer, laser control module under test, vertical cavity surface emitting laser (VCSEL) under test, coupling lens group, optical fiber, optical fiber beam splitter, Fabry-Perot cavity and wavelength meter; among which,

[0006] The host computer is used to send control instructions to the laser control module under test, and to measure the laser line width and the modulation intensity and wavelength of the laser according to the signals collected by the Fabry-Perot cavity and the wavelength meter;

[0007] The laser control module under test is used to receive the control instruction to control the operating temperature, operating current and operating frequency of the VCSEL laser under test;

[0008] The VCSEL laser to be tested is used to output laser light of a specific wavelength to the coupling lens group at the operating temperature, operating current and operating frequency;

[0009] The coupling lens group is used to couple the received laser into the optical fiber;

[0010] The optical fiber is used to transmit the coupled laser to the optical fiber beam splitter;

[0011] The optical fiber beam splitter is used to split the received coupled laser and transmit them to the Fabry-Perot cavity and the wavelength meter respectively;

[0012] The Fabry-Perot cavity is used to process the received laser beam to obtain a Fabry-Perot cavity signal, and transmit it to the host computer to measure the laser line width and the modulation intensity of the laser;

[0013] The wavelength meter is used to process the received laser beam to obtain wavelength parameters, and transmit the wavelength parameters to the host computer to measure the wavelength of the laser.

[0014] In a second aspect, a performance detection method for an integrated VCSEL laser is provided, the method comprising:

[0015] The host computer sends a control instruction to the laser control module under test;

[0016] The laser control module under test receives the control instruction to control the operating temperature, operating current and operating frequency of the VCSEL laser under test;

[0017] The VCSEL laser under test outputs laser light of a specific wavelength to the coupling lens group at the operating temperature, operating current and operating frequency;

[0018] The coupling lens group couples the received laser into the optical fiber;

[0019] The optical fiber transmits the coupled laser to the optical fiber beam splitter;

[0020] The optical fiber beam splitter splits the received coupled laser light and transmits the split light to the Fabry-Perot cavity and the wavelength meter respectively;

[0021] The Fabry-Perot cavity processes the received laser beam to obtain a Fabry-Perot cavity signal, and transmits the signal to the host computer to measure the laser line width and the modulation intensity of the laser;

[0022] The wavelength meter processes the received laser beam to obtain wavelength parameters, and transmits the parameters to the host computer to measure the wavelength of the laser.

[0023] The embodiments of the present invention provide a performance detection device and method for an integrated VCSEL laser, which use different functional modules to detect the line width, wavelength, modulation intensity and other performance of the laser output, and can effectively and quickly detect the performance of the VCSEL laser in all aspects and from multiple angles. The device has a simple structure, is easy to implement, and has a wide range of applications.

[0024] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0026] Figure 1 A schematic diagram of the structure of a performance detection device for an integrated VCSEL laser provided according to an embodiment of the present invention;

[0027] Figure 2 The present invention is a schematic diagram of an implementation flow of a performance detection method for an integrated VCSEL laser provided in accordance with an embodiment of the present invention. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of this specification more clear, the technical solutions of this specification will be clearly and completely described below in combination with the specific embodiments of this specification and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of this specification, not all of the embodiments. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this specification.

[0029] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, device, product or equipment that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0030] The technical solutions provided by the embodiments of this specification are described in detail below in conjunction with the accompanying drawings.

[0031] In order to improve the ability to quickly and comprehensively detect a VCSEL laser, an embodiment of the present invention provides a performance detection device and method for an integrated VCSEL laser.

[0032] Figure 1 FIG. 1 is a schematic diagram of a performance detection device for an integrated VCSEL laser according to an embodiment of the present invention. Figure 1 , the device comprises:

[0033] Host computer, laser control module under test, vertical cavity surface emitting laser (VCSEL) under test, coupling lens group, optical fiber, optical fiber beam splitter, Fabry-Perot cavity and wavelength meter; among which,

[0034] The host computer is used to send control instructions to the laser control module under test, and to measure the laser line width and the modulation intensity and wavelength of the laser according to the signals collected by the Fabry-Perot cavity and the wavelength meter;

[0035] The laser control module under test is used to receive the control instruction to control the operating temperature, operating current and operating frequency of the VCSEL laser under test;

[0036] The VCSEL laser to be tested is used to output laser light of a specific wavelength to the coupling lens group at the operating temperature, operating current and operating frequency;

[0037] The coupling lens group is used to couple the received laser into the optical fiber;

[0038] The optical fiber is used to transmit the coupled laser to the optical fiber beam splitter;

[0039] The optical fiber beam splitter is used to split the received coupled laser and transmit them to the Fabry-Perot cavity and the wavelength meter respectively;

[0040] The Fabry-Perot cavity is used to process the received laser beam to obtain a Fabry-Perot cavity signal, and transmit it to the host computer to measure the laser line width and the modulation intensity of the laser;

[0041] The wavelength meter is used to process the received laser beam to obtain wavelength parameters, and transmit the wavelength parameters to the host computer to measure the wavelength of the laser.

[0042] In a specific embodiment, the apparatus further comprises an optical platform;

[0043] The optical platform is used to install the above optical elements, including but not limited to the coupling lens group, the Fabry-Perot cavity, the optical fiber beam splitter, etc.

[0044] In a specific embodiment, the device further comprises a magnetically replaceable mounting fixture and a five-dimensional frame; wherein,

[0045] The magnetically replaceable mounting fixture comprises a pluggable connection terminal; a portion of the magnetically replaceable mounting fixture is connected to the laser control module under test, and another portion is fixed to the optical platform;

[0046] The magnetically replaceable mounting fixture is used to be disassembled from the optical platform when replacing the laser under test, and is placed in the original position after the laser under test is replaced to achieve rapid recovery of the optical path;

[0047] The pluggable connection terminal is used to install the VCSEL laser under test, the terminal matches the package of the VCSEL laser under test, fixes the working position of the VCSEL laser under test and connects the pins of the laser, so as to realize the physical connection between the laser under test and the magnetically replaceable mounting fixture;

[0048] The coupling lens group is installed on the five-dimensional mirror frame to perform forward and backward, up and down, left and right translation, and pitch and yaw movements on the five-dimensional mirror frame to couple the laser into the optical fiber.

[0049] In a specific embodiment, the device further comprises a power meter;

[0050] The power meter is used to test the output power of the laser.

[0051] In one embodiment, the device further comprises an atomic gas chamber;

[0052] The atomic gas chamber is enabled to work when the wavelength meter does not exist or cannot work normally, and the working process specifically includes:

[0053] The light generated by the receiving laser under the operating temperature and working current controlled by the laser control module under test is received. When the laser wavelength resonates with the atoms in the atomic gas chamber, the laser is absorbed by the atoms and a transmission peak is generated, i.e., an absorption signal appears. When there is no atomic gas chamber absorption signal, the laser operating temperature point is changed step by step until the atomic gas chamber absorption signal appears, and the temperature and current of the laser when the atomic gas chamber absorption signal appears are recorded. At this time, the wavelength of atomic resonance is the wavelength of the laser output laser.

[0054] In a specific embodiment, the Fabry-Perot cavity is specifically used for:

[0055] The Fabry-Perot cavity is linearly scanned by the Fabry-Perot cavity driver, the time when the half-width of the transmitted light spectrum line occupies the free spectral range of the Fabry-Perot cavity is recorded and uploaded to the host computer, and the measured laser line width δf is obtained according to the following formula:

[0056]

[0057] Where f0 is the complete free spectral range of the Fabry-Perot cavity; Δt1 is the time interval between adjacent spectral transmission peaks collected by the host computer; Δt2 is the time interval used by the host computer to collect the half-width of a single peak.

[0058] In a specific embodiment, the Fabry-Perot cavity is further used for:

[0059] The modulation intensity of the laser can be measured by linearly scanning the Fabry-Perot cavity with a Fabry-Perot cavity driver and recording the peak value of the newly added transmission peak of the Fabry-Perot cavity and the ratio of the transmission peak value of the original center frequency. The specific principle is as follows:

[0060] The VCSEL laser under test is modulated with microwaves to generate multi-sideband laser spectrum lines. Under ideal conditions, the intensity distribution of different sidebands is related to the microwave modulation intensity loaded on the laser. The electric vector amplitude of the sideband transmission peak is E n , expressed by the first kind of Bessel function, specifically satisfies:

[0061] E n (β) = EJ n (β)cos2π(ν L +nΩ)t,n=0,±1...

[0062] Where β is the modulation intensity; n is the sideband level; E is the photoelectric vector amplitude of the laser when there is no modulation; ν L is the center frequency of the laser output; Ω is the microwave modulation frequency loaded on the laser;

[0063] According to E n (β) Obtain the sideband intensity P according to the following formula n :

[0064] P n =|E n (β)| 2 ;

[0065] Collect the total light intensity P of the Fabry-Perot cavity transmission light before loading the modulated sideband, and the first-order sideband transmission peak P1 of the Fabry-Perot cavity after loading the microwave modulation signal, calculate the ratio η1 = P1 / P, and calculate the ratio η1 according to the obtained ratio η1 and the sideband light intensity P n The modulation intensity β can be obtained by inverse calculation of the calculation formula and the first-kind Bessel function.

[0066] The embodiments of the present invention provide a performance detection device and method for an integrated VCSEL laser, which uses different functional modules to detect the line width, wavelength, modulation intensity and other performance of the laser output, and can effectively and quickly detect the performance of the VCSEL laser in all aspects and from multiple angles.

[0067] Based on the same inventive concept, the present invention also provides a performance detection method for an integrated VCSEL laser, see Figure 2 , the method comprising:

[0068] S200: The host computer sends a control command to the laser control module under test;

[0069] S202: The laser control module under test receives the control instruction to control the operating temperature, operating current and operating frequency of the VCSEL laser under test;

[0070] S204: The VCSEL laser under test outputs a laser with a specific wavelength to a coupling lens group at the operating temperature, the operating current and the operating frequency;

[0071] S206: The coupling lens group couples the received laser into the optical fiber;

[0072] S208: The optical fiber transmits the coupled laser to the optical fiber beam splitter;

[0073] S210: The optical fiber beam splitter splits the received coupled laser beams and transmits them to the Fabry-Perot cavity and the wavelength meter respectively;

[0074] S212: The Fabry-Perot cavity processes the received laser beam to obtain a Fabry-Perot cavity signal, and transmits the signal to the host computer to measure the laser line width and the modulation intensity of the laser;

[0075] S214: The wavelength meter processes the received laser beam to obtain wavelength parameters, and transmits the parameters to the host computer to measure the wavelength of the laser.

[0076] In a specific embodiment, the device further comprises a magnetically replaceable mounting fixture and a five-dimensional frame; wherein,

[0077] The magnetically replaceable mounting fixture comprises a pluggable connection terminal; a portion of the magnetically replaceable mounting fixture is connected to the laser control module under test, and another portion is fixed to the optical platform;

[0078] The magnetically replaceable mounting fixture is used to be disassembled from the optical platform when replacing the laser under test, and is placed in the original position after the laser under test is replaced to achieve rapid recovery of the optical path;

[0079] The pluggable connection terminal is used to install the VCSEL laser under test, the terminal matches the package of the VCSEL laser under test, fixes the working position of the VCSEL laser under test and connects the pins of the laser, so as to realize the physical connection between the laser under test and the magnetically replaceable mounting fixture;

[0080] The coupling lens group is installed on the five-dimensional mirror frame to perform forward and backward, up and down, left and right translation, and pitch and yaw movements on the five-dimensional mirror frame to couple the laser into the optical fiber.

[0081] In a specific embodiment, the device further comprises a power meter;

[0082] The power meter is used to test the output power of the laser.

[0083] In one embodiment, the device further comprises an atomic gas chamber;

[0084] The atomic gas chamber is enabled to work when the wavelength meter does not exist or cannot work normally, and the working process specifically includes:

[0085] The light generated by the receiving laser under the operating temperature and working current controlled by the laser control module under test is received. When the laser wavelength resonates with the atoms in the atomic gas chamber, the laser is absorbed by the atoms and a transmission peak is generated, i.e., an absorption signal appears. When there is no atomic gas chamber absorption signal, the laser operating temperature point is changed step by step until the atomic gas chamber absorption signal appears, and the temperature and current of the laser when the atomic gas chamber absorption signal appears are recorded. At this time, the wavelength of atomic resonance is the wavelength of the laser output laser.

[0086] In a specific implementation, the Fabry-Perot cavity processes the received laser beam to obtain a Fabry-Perot cavity signal, and transmits the signal to the host computer to measure the laser line width, which specifically includes:

[0087] The Fabry-Perot cavity is linearly scanned by the Fabry-Perot cavity driver, the time when the half-width of the transmitted light spectrum line occupies the free spectral range of the Fabry-Perot cavity is recorded and uploaded to the host computer, and the measured laser line width δf is obtained according to the following formula:

[0088]

[0089] Where f0 is the complete free spectral range of the Fabry-Perot cavity; Δt1 is the time interval between adjacent spectral transmission peaks collected by the host computer; Δt2 is the time interval used by the host computer to collect the half-width of a single peak.

[0090] In a specific implementation, the Fabry-Perot cavity processes the received laser beam to obtain a Fabry-Perot cavity signal, and transmits the signal to the host computer to measure the modulation intensity of the laser, which specifically includes:

[0091] The modulation intensity of the laser can be measured by linearly scanning the Fabry-Perot cavity with a Fabry-Perot cavity driver and recording the peak value of the newly added transmission peak of the Fabry-Perot cavity and the ratio of the transmission peak value of the original center frequency. The specific principle is as follows:

[0092] The VCSEL laser under test is modulated with microwaves to generate multi-sideband laser spectrum lines. Under ideal conditions, the intensity distribution of different sidebands is related to the microwave modulation intensity loaded on the laser. The electric vector amplitude of the sideband transmission peak is En , expressed by the first kind of Bessel function, specifically satisfies:

[0093] E n (β) = EJ n (β)cos2π(ν L +nΩ)t,n=0,±1...

[0094] Where β is the modulation intensity; n is the sideband level; E is the photoelectric vector amplitude of the laser when there is no modulation; ν L is the center frequency of the laser output; Ω is the microwave modulation frequency loaded on the laser;

[0095] According to E n (β) Obtain the sideband intensity P according to the following formula n :

[0096] P n =|E n (β)| 2 ;

[0097] Collect the total light intensity P of the Fabry-Perot cavity transmission light before loading the modulated sideband, and the first-order sideband transmission peak P1 of the Fabry-Perot cavity after loading the microwave modulation signal, calculate the ratio η1 = P1 / P, and calculate the ratio η1 according to the obtained ratio η1 and the sideband light intensity P n The modulation intensity β can be obtained by inverse calculation of the calculation formula and the first-kind Bessel function.

[0098] The embodiments of the present invention provide a performance detection device and method for an integrated VCSEL laser, which use different functional modules to detect the line width, wavelength, modulation intensity and other performance of the laser output, and can effectively and quickly detect the performance of the VCSEL laser in all aspects and from multiple angles. The device has a simple structure, is easy to implement, and has a wide range of applications.

[0099] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0100] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A performance detection device for an integrated VCSEL laser, characterized in that: The device comprises: Host computer, laser control module under test, vertical cavity surface emitting laser (VCSEL) under test, coupling lens group, optical fiber, optical fiber beam splitter, Fabry-Perot cavity and wavelength meter; among which, The host computer is used to send control instructions to the laser control module under test, and to measure the laser line width and the modulation intensity and wavelength of the laser according to the signals collected by the Fabry-Perot cavity and the wavelength meter; The laser control module under test is used to receive the control instruction to control the operating temperature, operating current and operating frequency of the VCSEL laser under test; The VCSEL laser to be tested is used to output laser light of a specific wavelength to the coupling lens group at the operating temperature, operating current and operating frequency; The coupling lens group is used to couple the received laser into the optical fiber; The optical fiber is used to transmit the coupled laser to the optical fiber beam splitter; The optical fiber beam splitter is used to split the received coupled laser and transmit them to the Fabry-Perot cavity and the wavelength meter respectively; The Fabry-Perot cavity is used to process the received laser beam to obtain a Fabry-Perot cavity signal, and transmit it to the host computer to measure the laser line width and the modulation intensity of the laser; The wavelength meter is used to process the received laser beam to obtain wavelength parameters, and transmit the wavelength parameters to the host computer to measure the wavelength of the laser.

2. The device according to claim 1, characterized in that The device also includes a magnetically replaceable mounting fixture and a five-dimensional frame; wherein, The magnetically replaceable mounting fixture comprises a pluggable connection terminal; a portion of the magnetically replaceable mounting fixture is connected to the laser control module under test, and another portion is fixed to the optical platform; The magnetically replaceable mounting fixture is used to be disassembled from the optical platform when replacing the laser under test, and is placed in the original position after the laser under test is replaced to achieve rapid recovery of the optical path; The pluggable connection terminal is used to install the VCSEL laser under test, the terminal matches the package of the VCSEL laser under test, fixes the working position of the VCSEL laser under test and connects the pins of the laser, so as to realize the physical connection between the laser under test and the magnetically replaceable mounting fixture; The coupling lens group is installed on the five-dimensional mirror frame to perform forward and backward, up and down, left and right translation, and pitch and yaw movements on the five-dimensional mirror frame to couple the laser into the optical fiber.

3. The device according to claim 2, characterized in that The apparatus also includes a power meter; The power meter is used to test the output power of the laser.

4. The device according to claim 2, characterized in that The device also includes an atomic gas chamber; The atomic gas chamber is enabled to work when the wavelength meter does not exist or cannot work normally, and the working process specifically includes: The light generated by the receiving laser under the operating temperature and working current controlled by the laser control module under test is received. When the laser wavelength resonates with the atoms in the atomic gas chamber, the laser is absorbed by the atoms and a transmission peak is generated, i.e., an absorption signal appears. When there is no atomic gas chamber absorption signal, the laser operating temperature point is changed step by step until the atomic gas chamber absorption signal appears, and the temperature and current of the laser when the atomic gas chamber absorption signal appears are recorded. At this time, the wavelength of atomic resonance is the wavelength of the laser output laser.

5. The device according to claim 2, characterized in that The Fabry-Perot cavity is specifically used for: The Fabry-Perot cavity is linearly scanned by the Fabry-Perot cavity driver, the time when the half-width of the transmitted light spectrum line occupies the free spectral range of the Fabry-Perot cavity is recorded and uploaded to the host computer, and the measured laser line width δf is obtained according to the following formula: Where f0 is the complete free spectral range of the Fabry-Perot cavity; Δt1 is the time interval between adjacent spectral transmission peaks collected by the host computer; Δt2 is the time interval used by the host computer to collect the half-width of a single peak.

6. The device according to claim 2, characterized in that The Fabry-Perot cavity is also specifically used for: The modulation intensity of the laser can be measured by linearly scanning the Fabry-Perot cavity with a Fabry-Perot cavity driver and recording the peak value of the newly added transmission peak of the Fabry-Perot cavity and the ratio of the transmission peak value of the original center frequency. The specific principle is as follows: The VCSEL laser under test is modulated with microwaves to generate multi-sideband laser spectrum lines. Under ideal conditions, the intensity distribution of different sidebands is related to the microwave modulation intensity loaded on the laser. The electric vector amplitude of the sideband transmission peak is E n , expressed by the first kind of Bessel function, specifically satisfies: E n (b)=EJ n (b)cos2π(ν L +nΩ)t,n=0,±1... Where β is the modulation intensity; n is the sideband level; E is the photoelectric vector amplitude of the laser when there is no modulation; ν L is the center frequency of the laser output; Ω is the microwave modulation frequency loaded on the laser; According to E n (β) Obtain the sideband intensity P according to the following formula n : P n =|E n (b)| 2 ; Collect the total light intensity P of the Fabry-Perot cavity transmission light before loading the modulated sideband, and the first-order sideband transmission peak P1 of the Fabry-Perot cavity after loading the microwave modulation signal, calculate the ratio η1 = P1 / P, and calculate the ratio η1 according to the obtained ratio η1 and the sideband light intensity P n The modulation intensity β can be obtained by inverse calculation of the calculation formula and the first-kind Bessel function.

7. A performance detection method for an integrated VCSEL laser, characterized in that: The performance detection device for an integrated VCSEL laser as claimed in any one of claims 1 to 6, the method comprising: The host computer sends control instructions to the laser control module under test; The laser control module under test receives the control instruction to control the operating temperature, operating current and operating frequency of the VCSEL laser under test; The VCSEL laser under test outputs laser light of a specific wavelength to the coupling lens group at the operating temperature, operating current and operating frequency; The coupling lens group couples the received laser into the optical fiber; The optical fiber transmits the coupled laser to the optical fiber beam splitter; The optical fiber beam splitter splits the received coupled laser beam and transmits it to the Fabry-Perot cavity and the wavelength meter respectively; The Fabry-Perot cavity processes the received laser beam to obtain a Fabry-Perot cavity signal, and transmits the signal to the host computer to measure the laser line width and the modulation intensity of the laser; The wavelength meter processes the received laser beam to obtain wavelength parameters, and transmits the parameters to the host computer to measure the wavelength of the laser.

8. The method according to claim 7, characterized in that The device also includes a magnetically replaceable mounting fixture and a five-dimensional frame; wherein, The magnetically replaceable mounting fixture comprises a pluggable connection terminal; a portion of the magnetically replaceable mounting fixture is connected to the laser control module under test, and another portion is fixed to the optical platform; The magnetically replaceable mounting fixture is used to be disassembled from the optical platform when replacing the laser under test, and is placed in the original position after the laser under test is replaced to achieve rapid recovery of the optical path; The pluggable connection terminal is used to install the VCSEL laser under test, the terminal matches the package of the VCSEL laser under test, fixes the working position of the VCSEL laser under test and connects the pins of the laser, so as to realize the physical connection between the laser under test and the magnetically replaceable mounting fixture; The coupling lens group is installed on the five-dimensional mirror frame to perform forward and backward, up and down, left and right translation, and pitch and yaw movements on the five-dimensional mirror frame to couple the laser into the optical fiber.

9. The method according to claim 8, characterized in that The apparatus also includes a power meter; The power meter is used to test the output power of the laser.

10. The method according to claim 8, characterized in that The device also includes an atomic gas chamber; The atomic gas chamber is enabled to work when the wavelength meter does not exist or cannot work normally, and the working process specifically includes: The light generated by the receiving laser under the operating temperature and working current controlled by the laser control module under test is received. When the laser wavelength resonates with the atoms in the atomic gas chamber, the laser is absorbed by the atoms and a transmission peak is generated, i.e., an absorption signal appears. When there is no atomic gas chamber absorption signal, the laser operating temperature point is changed step by step until the atomic gas chamber absorption signal appears, and the temperature and current of the laser when the atomic gas chamber absorption signal appears are recorded. At this time, the wavelength of atomic resonance is the wavelength of the laser output laser.