Workbench for baling silicon wafer finished products in front open type wafer conveying box

By designing a workbench with rotating function and packaging material storage area, the problem of low packaging efficiency and vulnerability to damage in the existing technology is solved, and more efficient baling operation and lower risk of silicon wafer damage is achieved, providing semiconductor manufacturing companies with better packaging solutions.

CN119590675AInactive Publication Date: 2025-03-11杭州中欣晶圆半导体股份有限公司
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Patent Information

Application Number
CN202411672149.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-21
Publication Date
2025-03-11
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The prior art has problems such as inefficiency and vulnerability to damage in the packaging process of 12-inch silicon wafers. This is mainly due to the simple structure of the workbench, the lack of positioning device and rotation function, resulting in low operating efficiency and the silicon wafer is easily affected by collision and vibration during loading and baling.

Method used

A workbench for baling finished silicon wafers in front-open wafer conveyor box is designed, which has a rotation function and a packaging storage area. Through the structure of the side baffle and support plate, the position of the front-open wafer conveyor box can be quickly and accurately fixed, reducing the time for operators to adjust the position, and achieving stable placement of the silicon wafer through the rotating shaft and turntable.

Benefits of technology

It improves the baling efficiency of finished silicon wafer products in front-open wafer conveying boxes, reduces the risk of damage to silicon wafers, improves operational convenience, and provides semiconductor manufacturing companies with better packaging solutions.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to a workbench for baling silicon wafer finished products in a front open type wafer conveying box, and belongs to the technical field of silicon wafer conveying box baling equipment.The workbench comprises a workbench plate, column legs integrally welded and fixed to the workbench plate are arranged at the lower ends of the four corners of the workbench plate, a fixing base is arranged on the rear portion of the upper end of one side of the workbench plate, and the lower end of the workbench plate is connected with the column legs. A supporting plate extending to the front portion of the working table plate is arranged on the upper portion of the front end of the fixing base, side baffles are arranged on the two sides of the upper end of the front portion of the supporting plate, a rotating disc is arranged on the side edge of the supporting plate, and a rotating shaft is arranged between the rotating disc and the working table plate. The packing machine has the advantages of having a rotating function and a packing material storage area, and convenience is provided for packing operation. The packing efficiency of silicon wafer finished products in the front open type wafer conveying box is improved, the silicon wafer damage risk is reduced, the operation convenience is improved, and a better packing solution is provided for semiconductor manufacturing enterprises.
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Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer conveying box packaging equipment, and in particular to a workbench used for packaging finished silicon wafers in a front-opening wafer conveying box. Background Art

[0002] 1. In the field of semiconductor manufacturing, the packaging of 12-inch silicon wafer products is crucial. At present, when 12-inch silicon wafer products are loaded into the front opening wafer transfer box FOSB (Front Opening Shipping Box) for packaging, the following methods are mainly used and the problems faced: 1.1 The conventional workbench has a simple structure and is prone to shaking during the process of putting on PE bags and aluminum foil bags, increasing the risk of damage to the silicon wafer.

[0003] 1.2 The lack of a special positioning device makes it difficult to accurately fix the position of the FOSB, resulting in low operating efficiency and prone to uneven packaging.

[0004] 2.1 Single function, can not meet the comprehensive packaging needs. Lack of rotating table, label direction is easy to make mistakes. There is no special bag storage area, operators need to frequently look for tools during operation, wasting time and reducing work efficiency.

[0005] 2. Disadvantages of Existing Technologies 1. Low efficiency. Due to the lack of a suitable workbench, the baling and bagging operation process is cumbersome and time-consuming, which cannot meet the needs of efficient production. Operators work under inconvenient conditions and are prone to fatigue, which further affects work efficiency.

[0006] 2. Silicon wafers are easily damaged. Without a stable workbench and positioning device, silicon wafers are easily impacted and vibrated during loading into FOSB and packaging, resulting in white spots and scratches on the edges of the silicon wafers, affecting product quality. Summary of the invention

[0007] The present invention mainly solves the deficiencies in the prior art and provides a workbench for packing finished silicon wafers in a front-opening wafer cassette, which has the advantages of a rotating function and a packaging material storage area, and provides convenience for packing operations. It improves the packing efficiency of finished silicon wafers in a front-opening wafer cassette, reduces the risk of silicon wafer damage, improves operational convenience, and provides a better packaging solution for semiconductor manufacturing companies.

[0008] The above technical problems of the present invention are mainly solved by the following technical solutions: A workbench for packaging finished silicon wafers in a front-opening wafer transfer box comprises a workbench plate, wherein the lower ends of the four corners of the workbench plate are provided with column legs that are integrally welded and fixed to the workbench plate, a fixed seat is provided at the rear of the upper end of one side of the workbench plate, a support plate extending to the front of the workbench plate is provided at the upper front end of the fixed seat, side baffles are provided on both sides of the upper front end of the support plate, a turntable is provided on the side of the support plate, and a rotating shaft is provided between the turntable and the workbench plate.

[0009] The side baffle and support plate structure can quickly and accurately fix the position of the front-opening wafer pod, reducing the time for operators to adjust the position of the front-opening wafer pod, making the placement of silicon wafers more efficient and orderly. It ensures that the F front-opening wafer pod can be stably placed on the support plate, effectively reducing the possibility of silicon wafers being damaged due to instability.

[0010] As a preferred embodiment, both sides of the workbench are provided with a packaging bag storage box connected and fixed to the column legs by screws. The packaging bag storage box is used to store PE bags and aluminum foil bags, which is convenient for operators to store and use. Operators do not need to waste time searching, and can easily take the required packaging bags for bundling operations, thereby improving work speed.

[0011] Preferably, a bag taking groove having an arc structure is provided at the upper end of the outer side of the packaging bag storage box.

[0012] Preferably, the support plate, the packaging bag storage box and the side baffles are all made of PP plates, which are suitable for use in clean rooms and will not cause particle and metal contamination to the silicon wafers.

[0013] Preferably, the lower ends of the column legs are provided with screw adjustment feet that are threadedly sleeved with the column legs. According to the flatness of different floors, the end surface of the workbench can be kept level by adjusting the length of the screw adjustment feet. At the same time, it provides a comfortable working posture for the operator, reducing the physical fatigue caused by long-term bending or tiptoeing.

[0014] Preferably, a plurality of reinforcing rib plates II are provided between the upper outer circle of the rotating shaft and the lower end of the turntable and are distributed in an annular manner with equal intervals, and the reinforcing rib plates II are in a triangular structure.

[0015] Preferably, reinforcing rib plates I are provided between the two sides of the lower end of the rear portion of the support plate and the fixing seat, and the reinforcing rib plates I are in a triangular structure.

[0016] The present invention can achieve the following effects: The present invention provides a workbench for packing finished silicon wafers in a front-opening wafer cassette. Compared with the prior art, the workbench has the advantages of a rotation function and a packaging material storage area, which facilitates the packing operation. The packing efficiency of finished silicon wafers in a front-opening wafer cassette is improved, the risk of silicon wafer damage is reduced, and the operational convenience is improved, providing a better packaging solution for semiconductor manufacturing companies. Reasonable workbench design and layout make the entire packing process smoother, reduce unnecessary operation links and actions, and thus significantly improve the packing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present invention.

[0018] Figure 2 It is a front view structural schematic diagram of the present invention.

[0019] In the figure: workbench 1, support plate 2, fixing seat 3, reinforcing rib plate I 4, turntable 5, packaging bag storage box 6, column leg 7, screw adjustment foot 8, side baffle 9, bag taking slot 10, rotating shaft 11, reinforcing rib plate II 12. DETAILED DESCRIPTION

[0020] The technical solution of the invention is further specifically described below through embodiments and in conjunction with the accompanying drawings.

[0021] Example: Figure 1 and Figure 2 As shown, a workbench for packing finished silicon wafers in a front-opening wafer transfer box comprises a workbench 1. The lower ends of the four corners of the workbench 1 are provided with column legs 7 that are integrally welded and fixed to the workbench 1. The lower ends of the column legs 7 are provided with screw adjustment feet 8 that are threadedly sleeved with the column legs 7. Both sides of the workbench 1 are provided with packaging bag storage boxes 6 that are screwed and fixed to the column legs 7. The upper ends of the outer sides of the packaging bag storage boxes 6 are provided with a bag taking groove 10 in a circular arc structure. A fixing seat 3 is provided at the rear of the upper end of one side of the workbench 1. A support plate 2 extending to the front of the workbench 1 is provided at the upper front end of the fixing seat 3. A reinforcing rib plate I4 is provided between the lower sides of the rear end of the support plate 2 and the fixing seat 3. The reinforcing rib plate I4 is in a triangular structure. Side baffles 9 are provided on both sides of the upper front end of the support plate 2. A turntable 5 is provided on the side of the support plate 2. The support plate 2, the turntable 5, the packaging bag storage box 6, and the side baffles 9 are all made of PP plates. A rotating shaft 11 is provided between the turntable 5 and the worktable 1 , and a plurality of reinforcing rib plates II 12 are provided between the upper outer circle of the rotating shaft 11 and the lower end of the turntable 5 and are distributed in an annular manner with equal intervals. The reinforcing rib plates II 12 are in a triangular structure.

[0022] Working principle: When the front-opening wafer cassette is placed at the front end of the support plate 2, the operator takes the packaging bags placed in the packaging bag storage boxes 6 on the left and right sides to pack the bags, and then puts them on the rotatable turntable 5 for sorting and labeling. The packing workbench in the front-opening wafer cassette can improve the packing efficiency, reduce the risk of silicon wafer damage, and improve the convenience of operation, providing efficient and reliable packaging solutions for semiconductor manufacturers.

[0023] In summary, the workbench used for packing finished silicon wafers in front-opening wafer cassettes has the advantages of a rotating function and a packaging material storage area, which facilitates the packing operation. It improves the packing efficiency of finished silicon wafers in front-opening wafer cassettes, reduces the risk of silicon wafer damage, improves operational convenience, and provides better packaging solutions for semiconductor manufacturers.

[0024] The above description is only a specific embodiment of the present invention, but the structural features of the present invention are not limited thereto. Any changes or modifications made by any technician in the field of the present invention are included in the patent scope of the present invention.

Claims

1. A workbench for packing finished silicon wafers in a front-opening wafer transfer box, comprising a workbench plate (1), wherein the lower ends of the four corners of the workbench plate (1) are provided with column legs (7) which are integrally welded and fixed to the workbench plate (1), characterized in that: A fixed seat (3) is provided at the rear upper end of one side of the workbench (1); a support plate (2) extending to the front of the workbench (1) is provided at the upper front end of the fixed seat (3); side baffles (9) are provided on both sides of the upper front end of the support plate (2); a turntable (5) is provided on the side of the support plate (2); and a rotating shaft (11) is provided between the turntable (5) and the workbench (1).

2. The workbench for packing finished silicon wafers in a front-opening wafer transfer box according to claim 1, characterized in that: Both sides of the workbench (1) are provided with packaging bag storage boxes (6) which are screw-connected and fixed to the column legs (7).

3. The workbench for packing finished silicon wafers in a front-opening wafer transfer box according to claim 2, characterized in that: The upper outer end of the packaging bag storage box (6) is provided with a bag taking slot (10) in an arc structure.

4. The workbench for packing finished silicon wafers in a front-opening wafer transfer box according to claim 2, characterized in that: The support plate (2), the turntable (5), the packaging bag storage box (6), and the side baffle (9) are all made of PP plates.

5. The workbench for packing finished silicon wafers in a front-opening wafer transfer box according to claim 1, characterized in that: The lower ends of the column legs (7) are each provided with a screw adjustment foot (8) threadedly sleeved with the column legs (7).

6. The workbench for packing finished silicon wafers in a front-opening wafer transfer box according to claim 1, characterized in that: A plurality of reinforcing rib plates II (12) are arranged between the upper outer circle of the rotating shaft (11) and the lower end of the rotating disk (5) and are distributed in an annular manner with equal spacing, and the reinforcing rib plates II (12) are in a triangular structure.

7. The workbench for packing finished silicon wafers in a front-opening wafer transfer box according to claim 1, characterized in that: A reinforcing rib plate I (4) is provided between the two sides of the lower rear end of the support plate (2) and the fixing seat (3), and the reinforcing rib plate I (4) is in a triangular structure.

Citation Information

Patent Citations

  • Bagging module applied to automatic wafer box packaging equipment

    CN111645973A

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    CN116534385A

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